JPH0737966B2 - Rotation / linear motion 2-axis scanning device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is capable of performing a main scanning of 360 degrees in the circumferential direction and a sub-scanning in the axial direction in an optical or ultrasonic scanner device equipped with a rotary and linear motion biaxial drive mechanism. Therefore, it is suitable for ultrasonic flaw detection and monitoring equipment inside the tube.
The present invention relates to a linear motion biaxial scanning device.

[0002]

2. Description of the Related Art In power plants and the like, facility diagnosis of piping and the like using electromagnetic waves or ultrasonic waves is performed. Recently, there is an increasing demand for inserting a sensor into a tube for inspecting a thin tube and observing the surface of the tube wall or the inside of the tube wall from the inside, and an ultrasonic ultrasonic flaw detection system has been developed. As a conventional example of this technique, there is, for example, an "ultrasonic flaw detection probe" described in JP-A-2-32249.

Further, although the fields of industrial application are different, there is an ultrasonic diagnostic apparatus as a medical diagnostic apparatus using ultrasonic waves. Recently, along with the progress of micromachining technology, even catheter-type devices that are used by inserting them into blood vessels have emerged, and even those that have an actuator at the tip of the catheter and drive ultrasonic transducers have been devised. ing. As a conventional example of this technique, for example, Japanese Patent Laid-Open No. 2-2
There is an "ultrasonic diagnostic device" described in Japanese Patent No. 86141.

A conventional ultrasonic flaw detection probe will be described below. FIG. 8 is a usage example of the ultrasonic flaw detection probe in the conventional example. The ultrasonic flaw detection probe 30 includes a circumferential flaw detection unit 31 and an axial flaw detection unit 32.
Each of the units 31 and 32 is contained in a case 34 having an opening through which ultrasonic waves pass.

The ultrasonic flaw detection probe 30 is rotated by the probe rotation device 33 to detect the inner wall of the pipe 100. The rotation of the motor 38 of the probe rotation device 33 is transmitted by using a flexible drive transmission shaft 39 so that the rotation can be performed through a narrow pipe.

The circumferential flaw detection unit 31 is for detecting flaws in the circumferential direction of the pipe, and performs flaw detection with a sound wave axis which is vertical to the pipe axis direction and is inclined in the circumferential direction of the pipe by a few dozen degrees with respect to the normal line. . Therefore, the ultrasonic probe 35 is attached off-axis,
The optimal angle is set by the circumferential incidence mirror 36.

The cable 40 is used for transmitting a flaw detection signal and for advancing the ultrasonic flaw detection probe 30.

The axial flaw detection unit 32 is for detecting flaws in the axial direction, and performs flaw detection with a sound wave axis parallel to the normal line in the circumferential direction of the tube and inclined by a few dozen degrees in the tube axis direction. Therefore, the ultrasonic probe 35 is attached on the central axis, and the optimum angle is set by the axial incident mirror 37.

The axial flaw detection unit 32 can measure flaws in the traveling direction, and the rotation angle of the ultrasonic flaw detection probe 30 can determine the circumferential angle. Further, since the circumferential flaw detection unit 31 measures flaws in the circumferential direction of the pipe, the position (distance) of the flaw can be determined by advancing the ultrasonic flaw detection probe 30 along the pipe. Therefore, the location of the scratch can be specified from the position and angle information from the two units.

Since the ultrasonic flaw detection probe 30 is constantly rotated by the probe rotating device 33, it is necessary to transmit the signal from the ultrasonic probe 35 through the drive transmission shaft 39, and further, it is rotated. Therefore, it is necessary to connect using a slip ring.

A conventional ultrasonic diagnostic apparatus will be described below. FIG. 9 is a cross-sectional view of the vicinity of the ultrasonic transducer of the ultrasonic diagnostic apparatus in the conventional example.

The tip portion 41 of the catheter type ultrasonic diagnostic apparatus
An ultrasonic transducer 42 is attached to the. Tip 41
At the base end side of the, the reflection member 46 having a slope of 45 degrees with respect to the axis of the insertion portion is fixedly attached to the rotor 45 of the electrostatic motor 44 provided so as to be orthogonal to the axis of the insertion portion 43. Has been done. The ultrasonic waves emitted from the ultrasonic transducer 42 are transmitted through the member forming the distal end portion 41 and reflected in the direction orthogonal to the axis of the insertion portion 43.

With this structure, when the electrostatic motor 44 is driven to rotate the rotor 45 of the electrostatic motor 44 to rotate the reflecting member 46, the ultrasonic wave is emitted from the ultrasonic vibrator 42. The ultrasonic wave is the reflection member 4
The light is reflected by the inclined surface 6 and is emitted in a direction orthogonal to the axis of the insertion portion 43. Further, the echo due to this ultrasonic wave is reflected by the inclined surface of the reflecting member 46 and received by the ultrasonic vibrator 42, whereby radial scanning is performed.

In such a structure, the electrostatic motor 4 is used for rotational driving.
Since 4 is used, a high driving voltage is required, it cannot be used underwater, and the tip portion 41 is used for casing. Therefore, it is necessary to transmit the ultrasonic wave through the member forming the tip portion 41, which results in a large loss in efficiency.

FIG. 10 is a sectional view of a linear / radial drive electrostatic motor of an ultrasonic diagnostic apparatus in a conventional example.
(A) shows a state before linear driving, and (b) shows a state after linear driving.

In this conventional example, the ultrasonic transducer 42 fixed to the shaft 47, the linear driving electrostatic motor 48, and the radial driving electrostatic motor 51 are connected to form an ultrasonic scanning unit 54. There is. A rotor 49 of an electrostatic motor 48 for linear driving is fixed to the substantially center of the shaft 47, and the rotor 49 is surrounded by a stator 50 formed in a cylindrical shape. On the other hand, a rotor 52 of an electrostatic motor 51 for radial drive is fixed to the end of the shaft 47 on the opposite side of the ultrasonic transducer 42, and this rotor 52 is also surrounded by a stator 53 formed in a cylindrical shape. There is.

By driving the electrostatic motor 51 for radial drive, the ultrasonic transducer 42 fixed to the shaft 47 is rotated, and radial scanning of ultrasonic waves is performed.

Further, by driving the electrostatic motor 48 for linear driving, the shaft 47 can be moved in the axial direction to perform linear scanning.

Further, by combining these linear scanning and radial scanning, it is possible to perform cylindrical scanning and obtain a linear scanning image of a designated cross section.

However, in such a configuration, by performing the linear scanning, the electrostatic motor 51 for radial drive is formed.
The rotor 52 also moves together with the shaft 47, the rotor 52 and the stator 53 are displaced, the torque is significantly reduced, and the rotation cannot be maintained. In order to prevent this, the rotor 52 is moved by the stroke of the linear scan.
Alternatively, the length of the stator 53 may be made redundant (made longer).

[0021]

However, the above-mentioned conventional structure has the following problems.

The ultrasonic flaw detection probe has the following problems. 1) Since the probe rotation device and the ultrasonic flaw detection probe are separated into units, the efficiency of rotation transmission is reduced and uneven rotation occurs at the bent portion of the pipe. 2) The movement of the pipe in the axial direction is caused by pulling from the outside, and in order to accurately measure the flaw position, a bidirectional flaw detection probe in the circumferential direction and the axial direction is required, and the device cannot be downsized. 3) Since the ultrasonic probe itself is rotated, a structure such as a slip ring or a non-contact electromagnetic induction connector is required for signal transmission.

The ultrasonic diagnostic apparatus has the following problems. 1) In the example shown in FIG. 9, the drive is only rotation, no fine movement mechanism in the axial direction is added, and the position of the flaw cannot be specified when used for flaw detection. 2) In the example shown in FIG. 9, since the electrostatic motor is used, a high driving voltage is required, it cannot be used in water, and the casing is provided at the tip. Therefore, it is necessary to transmit ultrasonic waves through the member forming the tip,
Effectively, the loss is large. 3) In the example shown in FIG. 10, an electrostatic motor is used to linearly drive and rotationally drive the shaft that fixes the ultrasonic transducer. However, the rotor of the electrostatic motor is rotationally driven by the amount of movement by the linear drive. It is necessary to make the part long, which is not suitable for miniaturization. 4) When rotating the ultrasonic vibrator itself, a structure such as a slip ring or a non-contact electromagnetic induction connector is required for signal transmission.

The present invention solves the above-mentioned problems of the prior art, and provides a rotary / linear motion biaxial scanning device for small-sized and high-performance flaw detection, which can be mounted on an autonomously inspecting robot. The purpose is to provide.

[0025]

In order to achieve this object, a rotary / linear motion biaxial scanning device of the present invention is provided with an optical or ultrasonic wave transmitting and receiving device as a flaw detection sensor and a scanning device. It is provided with a reflecting mirror attached to the runner, a rotary actuator for performing main scanning of light or ultrasonic waves in a circumferential direction of 360 degrees, and a linear movement actuator for performing sub-scanning in the axial direction. The rotary shaft of the runner with a reflector driven by the two actuators has a rotation transmission mechanism capable of linear movement by rolling or sliding, and on the inner or outer circumference of the runner with a reflector.
It has a linear motion transmission mechanism that can be rotated by rolling or sliding.

[0026]

With this configuration, the measurement wave emitted from the transmitter of light or ultrasonic waves is reflected by the runner with a reflecting mirror, and irradiates the inner wall of the pipe to be flaw-detected. If there is a flaw in the pipe, the measuring wave reflected from the flaw is detected by the receiver and the flaw is detected.

The runner with a reflecting mirror is driven by a rotary actuator that performs main scanning in 360 degrees in the circumferential direction and a linear movement actuator that performs sub scanning in the axial direction.
By the rotation transmission mechanism capable of linear movement due to rolling or sliding and the rotation transmission mechanism capable of rotation, biaxial scanning of main scanning of rotation and sub-scanning of linear movement parallel to the rotation axis is performed without interference. .

[0028]

【Example】

(Embodiment 1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

FIG. 2 shows the rotation / rotation according to the first embodiment of the present invention.
It is an external view of a linear motion biaxial scanning device, and explanatory drawing of the operation | movement, (a) is a figure which shows a flaw detection locus and a flaw detection state, (b)
FIG. 6 is a diagram showing a state of closest approach to a flaw, and FIG.

In FIG. 2, 1 is a flaw detection robot incorporating a rotary / linear motion biaxial scanning device, 2 is an optical or ultrasonic wave transmitter / receiver, 3 is a runner with a reflecting mirror, 4 is a transmitted measurement wave, Reference numeral 5 is a measurement wave propagating inside the pipe when the measurement wave is an ultrasonic wave, 6 is a flaw, 7 is a flaw detection locus, and 100 is a pipe.

In this embodiment, the pipe 100 filled with water is used.
The flaw detection robot 1 is moving in the direction indicated by the arrow.
The runner 3 with a reflector is rotated by a rotation actuator (not shown), and scans the measurement wave 4 transmitted from the wave transmitter / receiver 2 on the circumference of the inner wall of the pipe. Therefore, the flaw detection locus 7 has a spiral shape. The ultrasonic wave 5 propagating in the pipe 100 propagates in the axial direction of the pipe, and the flaw is observed ahead of the irradiation point of the ultrasonic wave to the pipe in the traveling direction. The reflection signal from the flaw 6 is obtained before the closest approach to the flaw, and the flaw is detected in advance (a).

When the flaw is detected, the flaw detection robot 1 slows down and stops when the flaw cannot be detected (b). If the measuring wave 4 is light, it is damped on the order of the spot size of the light.

The flaw detection robot drives the runner 3 with a reflecting mirror back and forth by a linear motion actuator (not shown) while stopped, and measures the position where a signal from the flaw 6 is obtained. At this time, the two-dimensional shape of the flaw can be obtained from only the signal from one transducer 2 by simultaneously performing the main scanning by the rotation actuator (not shown).

Further, the flaw detection robot 1 can be manufactured in a small size by using the micromachining technique, and since the actuator and the sensor are incorporated in one robot, the flaw detection robot 1 can freely move in a narrow pipe. However, flaw detection is possible.

FIG. 1 is a sectional view showing the detailed structure of the rotary / linear motion biaxial scanning device in FIG. Reference numeral 8 is a rotation actuator, 9 is a rotation transmission mechanism capable of linear movement which will be described later with reference to FIG.
Is a linear motion transmitting mechanism which will be described later by using the reference numeral 12, a damper 12 and a shaft seal 21 for airtightness. The same elements and parts as those in FIG. 1 are designated by the same reference numerals as those in FIG.

First, the rotation transmission mechanism capable of linear movement and the rotation transmission mechanism capable of rotation will be described with reference to the drawings. This is commonly used in the techniques of FIGS. 1, 5, 6, and 7.

FIG. 3 shows an embodiment of a linearly movable rotation transmitting mechanism which is a main part of the same rotary / linear motion biaxial scanning device, and has a structure like a linear slide ball bearing.

The shaft 13 of the rotation transmission mechanism and the linear motion slider 1
5 is provided with a plurality of thin grooves, and a plurality of fine balls 14 are inserted between the two grooves. The linear slider 15 receives the rotation of the shaft 13 without rattling in the rotation direction and moves in the axial direction without resistance.

When rolling is used, the rotation transmission mechanism which can move linearly includes the one using the ball, and the one in which a part of the shaft 13 is ground to be a flat surface and a thin needle is used as a roller.
Further, when slip is used, there are a method using a lubricant, a fluid bearing and the like. In these cases, a mesh (spline shape or the like) parallel to the shaft for transmitting the rotation is added.

The power transmission input from the rotary actuator is also received from the linear slider 1 even from the shaft 13 (FIGS. 1 and 6).
From 5 (FIGS. 5 and 7), either may be used.

FIG. 4 shows an embodiment of a rotatable linear motion transmission mechanism which is a main part of the rotary / linear motion biaxial scanning device. In the figure, a deep groove type ball bearing is used for the description. However, in an actual scanning mechanism, a bearing is not used in order to downsize the device, and a groove is directly formed, and a small ball is sandwiched therebetween. .

The end of the runner 3 with a reflecting mirror opposite to the reflecting mirror is stepped so that the bearing 16 can be mounted, and the bearing 16 is fixed with a stopper 17. Even if the outer peripheral ring of the bearing 16 is fixed 18, the runner 3 with a reflecting mirror can freely rotate. When the fixed 18 of the outer peripheral ring is moved in the axial direction, the reflector-equipped runner 3 moves in the axial direction without affecting the rotation (FIGS. 1 and 6).

In the case of utilizing rolling, the rotatable linear motion transmitting mechanism includes the one using the balls and the one having a shape in which cones such as abacus balls are combined with each other. Further, when slip is used, there are a method using a lubricant, a fluid bearing and the like. In these cases,
A mesh orthogonal to the axis for transmitting rotation is added.

In the rotatable linear motion transmitting mechanism, the bearing 16 may be provided inside the runner 3 with a reflecting mirror, and the power input from the linear motion actuator may be supplied from the inner ring of the bearing 16 (FIGS. 5 and 7). ).

In the first embodiment shown in FIG. 1, the flaw detection robot 1 has a housing separated from the wave transmitter / receiver 2 on the side of the biaxial moving mechanism and is connected by a thin stay. Since the measurement wave 4 has a certain area, a part of the measurement wave is lost due to the stay, but the measurement is performed at most rotation positions without loss. Since the pipe is filled with water, airtightness is maintained by the shaft seal 21 so as not to affect the actuator.

The rotary actuator 8 is the flaw detection robot 1.
The rotation is arranged at the center of the above and the generated rotation is directly connected to the runner 3 with a reflecting mirror by using the rotation transmission mechanism 9 capable of linear movement. The measurement wave 4 is mainly scanned in the circumferential direction with respect to the tube wall by the rotation of the runner 3 with a reflecting mirror.

The runner 3 with a reflecting mirror is moved in the axial direction of the pipe through a linear motion transmission mechanism 11 which is rotatable by a linear motion actuator 10 formed in a ring shape. In order to prevent the outer peripheral ring of the rotatable linear motion transmission mechanism 11 from being displaced in the rotation direction due to the rotation of the runner 3 with a reflector, and to fix the runner 3 with a reflector to the initial position, the linear motion transmission mechanism 11 The outer peripheral ring of is fixed by the damper 12. The damper 12 is an elastic body such as a spring, and is deformed without obstruction for the stroke of the linear motion and supports the outer peripheral ring of the linear motion transmission mechanism 11. By the movement of the runner 3 with a reflecting mirror in the tube axis direction, the measurement wave 4 is sub-scanned in the tube axis direction.

In this embodiment, the rotary actuator 8 is an electromagnetic motor, and the linear actuator 10 is an electromagnetic voice coil motor. The actuator is not limited to any particular method, and an optimum actuator method may be selected depending on the configuration of the transmission system used.

Further, in this embodiment, the actuator is used in a fixed manner, and the movement is performed by sliding (rolling) of the transmission mechanism. Therefore, it is possible to increase the length of the rotary actuator by moving the rotor portion, which is a problem in the conventional example. Does not occur.

Further, since the main scanning and the sub-scanning of the rotary / linear motion biaxial scanning device are independent of each other and do not interfere with each other, the two-dimensional shape and position of the flaw can be determined from the signal of one transducer 2 for a short time. It is possible to obtain accurately with. Moreover, since the wave transmitter / receiver 2 is fixedly used, wiring for signal transmission is very easy.

(Embodiment 2) FIG. 5 is a sectional view of a rotary / linear motion biaxial scanning device according to a second embodiment of the present invention. The same elements and parts as those in FIG. 2 are designated by the same reference numerals.

In the second embodiment, the linear movement actuator 10 is arranged at the center of the flaw detection robot 1, and the runner 3 with a reflecting mirror is moved in the axial direction of the pipe via the rotatable linear movement transmission mechanism 11. The linear motion transmission mechanisms 11 are arranged in two rows with a space therebetween so as not to cause an axis shift. Damper 12
Is attached to the rear of the linear motion actuator 10.

A rotation transmission mechanism 9 capable of linear movement is formed on the outer periphery of the runner 3 with a reflecting mirror, and an internal gear is formed on one of the outer peripheral rings of the transmission mechanism 9 to form a gear of the rotation actuator 8. And the power is transmitted. In this embodiment, a plurality of rotation actuators 8 are arranged,
Each is rotating in synchronization.

In the present embodiment, electrostatic motors, which are more advantageous than electromagnetic ones in size reduction, are used for the rotary actuators 8 in a distributed manner, and linear voice actuators 10 are electromagnetic voice coil motors. This embodiment has an advantage that the actuators 8 and 10 can be fixed on the same substrate and the assembling becomes easy.

The measurement wave 4 emitted from the wave transmitter / receiver 2 is two-dimensionally scanned on the inner wall of the pipe by the runner 3 with a reflecting mirror, which is scanned on two axes of rotation / linear movement, and two-dimensional information on the flaw can be obtained. .

(Third Embodiment) FIG. 6 is a sectional view of a rotary / linear motion biaxial scanning device according to a third embodiment of the present invention. The same elements and parts as those in FIG. 1 are designated by the same reference numerals. The difference from FIG. 1 is that a shaft 19 for supporting the wave transmitter / receiver and the biaxial scanning mechanism is provided, and a bearing 21 and an opening 22 provided in the runner are provided.

In this embodiment, the wave transmitter / receiver 2 is incorporated in the scanning mechanism. Therefore, the runner 3 with a reflecting mirror is hollow, and the reflecting mirror faces inward. The measurement wave 4 is reflected by the reflecting mirror and transmitted to the pipe through the opening 22. Airtightness is maintained by the shaft seal 21 so that water in the pipe does not affect the actuator.

A shaft 19 for supporting the wave transmitter / receiver 2 is provided with a rotation transmission mechanism 9 which is linearly movable via a bearing 20 and a runner 3 with a reflecting mirror.

A plurality of rotating actuators 8 rotate synchronously, and the gears of the rotation transmitting mechanism 9 are driven by the respective gears to main-scan the measurement wave 4.

A rotatable linear motion transmission mechanism 11 and a linear motion actuator 10 are attached to the outer periphery of the runner 3 with a reflecting mirror, and are positioned at predetermined positions by a damper 12.

When the linear movement actuator 10 is driven, the damper 12 is deformed with an appropriate spring constant, the runner 3 with a reflecting mirror is moved in the axial direction, and the measurement wave 4 is sub-scanned.

In the present embodiment, since the wave transmitter / receiver 2 is housed in the runner 3 with a reflecting mirror, it becomes a very small flaw detector, and it is possible to manufacture a flaw detection robot which can move in a narrow pipe. Further, since the measurement wave 4 directly observes the inner wall of the pipe through the opening 22, there is an advantage that there is no loss due to the stay and accurate measurement can be performed, as compared with the first and second embodiments.

(Embodiment 4) FIG. 7 is a sectional view of a rotary / linear motion biaxial scanning device according to a fourth embodiment of the present invention. The same reference numerals are given to the above-mentioned elements and parts including the flaw detection robot 1 and the wave transmitter / receiver 2.

Inside the case of the flaw detection robot 1, a rotation transmission mechanism 9 which is linearly movable via a bearing 20 and a runner 3 with a reflecting mirror are attached. Airtightness is maintained by the shaft seal 21 so that water in the pipe does not affect the actuator.

A plurality of rotating actuators 8 rotate in synchronization, each gear drives the internal gear of the rotation transmitting mechanism 9, and the measurement wave 4 is mainly scanned.

A rotatable linear motion transmission mechanism 11 and a linear motion actuator 10 are attached to the inner circumference of the runner 3 with a reflecting mirror, and are positioned at predetermined positions by a damper 12.

When the linear movement actuator 10 is driven, the damper 12 is deformed with an appropriate spring constant, the runner 3 with a reflecting mirror is moved in the axial direction, and the measurement wave 4 is sub-scanned.

In this embodiment, the wave transmitter / receiver 2 is also housed in the runner 3 with a reflecting mirror, and has the same advantages as the third embodiment. Further, in this embodiment, the bearing 20 supporting the scanning mechanism is large, and the most stable biaxial scanning is possible.

[0069]

As described above, the rotary / linear motion biaxial scanning device of the present invention as described in the embodiments has the following advantages. 1) Since the actuator for scanning the measurement wave in two dimensions, the wave transmitter / receiver for flaw detection, and the runner with a reflector are built into the robot as one body, it can freely move in a narrow pipe. It is most suitable as a flaw detection module for a flaw detection robot. In particular, by incorporating the wave transmitter / receiver in the biaxial scanning mechanism as in the third and fourth embodiments, further miniaturization can be achieved. 2) In Examples 3 and 4, the ultrasonic wave reflected by the reflecting mirror is directly emitted to the pipe through the opening. Moreover, Example 1
Since there is no loss due to stays such as 1 and 2 and transmission loss as in the conventional example of the ultrasonic diagnostic apparatus, accurate flaw detection can be performed. 3) Since the measurement wave is scanned two-dimensionally, the position and shape of the flaw can be measured from the signal of one transducer, and a very small flaw detection device can be realized. 4) Since the wave transmitter / receiver is fixedly used, direct wiring can be performed without using a slip ring or a non-contact electromagnetic induction connector. 5) The movement of the reflecting mirror can be performed independently of the rotation / linear movement without interfering with each other, and since the transmission mechanism using rolling has high transmission efficiency, the torque of the actuator may be small. Therefore, a very small biaxial scanning device can be realized. 6) Since the movement of the reflecting mirror due to the linear movement does not affect the actuator (it does not involve the movement of the actuator rotor portion as in the conventional example), it is not necessary to increase the size of the rotation actuator even if the stroke is large. Absent.

With many advantages as described above,
The rotary / linear motion biaxial scanning device is not only very effective as an ultra-compact flaw detector, but it can be downsized to a few millimeters by applying micromachine technology. As a medical catheter-type ultrasonic diagnostic device, Is also effective.

[Brief description of drawings]

FIG. 1 is a rotation / linear movement 2 according to a first embodiment of the present invention.
Cross-sectional view of the axis scanning device

FIG. 2 is a diagram showing an operation of the rotary / linear motion biaxial scanning device.

FIG. 3 is a diagram showing an embodiment of a rotation transmission mechanism capable of linear movement, which is a main part of the rotation / linear movement biaxial scanning device.

FIG. 4 is a diagram showing an embodiment of a rotatable linear motion transmission mechanism that is a main part of the rotary / linear motion biaxial scanning device.

FIG. 5: Rotation / linear movement 2 in the second embodiment of the present invention
Cross-sectional view of the axis scanning device

FIG. 6 is a rotation / linear movement 2 according to the third embodiment of the present invention.
Cross-sectional view of the axis scanning device

FIG. 7: Rotation / linear movement 2 in the fourth embodiment of the present invention
Cross-sectional view of the axis scanning device

FIG. 8 is a sectional view of a conventional ultrasonic flaw detection probe.

FIG. 9 is a cross-sectional view of the vicinity of an ultrasonic transducer of a conventional ultrasonic diagnostic apparatus.

FIG. 10 is a sectional view of a linear / radial drive electrostatic motor of a conventional ultrasonic diagnostic apparatus.

[Explanation of symbols]

 1 flaw detection robot 2 wave transmitter / receiver 3 runner with reflecting mirror 4 measurement wave 5 ultrasonic waves propagating in the pipe 6 flaws 7 flaw detection locus 8 rotation actuator 9 linear movement rotation transmission mechanism 10 linear movement actuator 11 rotatable linear movement Transmission mechanism 12 Damper 13 Shaft 14 Micro ball 15 Linear slider 16 Bearing 17 Stopper 18 Fixed 19 Shaft 20 Bearing 21 Shaft seal 22 Opening

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshikazu Kawauchi 3-10-10 Higashisanda, Tama-ku, Kawasaki City, Kanagawa Prefecture Matsushita Giken Co., Ltd. (56) Reference JP-A-2-32249 (JP, A)

Claims (7)

[Claims] 1. A transmitter / receiver for transmitting and receiving light or ultrasonic waves, a reflector attached to a runner for scanning, and main scanning for light or ultrasonic waves in a circumferential direction of 360 degrees. A rotation actuator, a linear movement actuator that performs sub-scanning in the axial direction, a rotation transmission mechanism that allows the rotation axis of a runner with a reflecting mirror driven by the two actuators to be linearly moved by rolling or sliding, and with the reflecting mirror. To equip the inner or outer circumference of the runner with a linear motion transmission mechanism that can rotate due to rolling or sliding, and to interfere with the main scanning of rotation and the sub-scanning of linear motion parallel to the rotation axis. A rotary / linear motion biaxial scanning device characterized in that it is driven by the runner with a reflecting mirror. 2. The rotary / linear motion biaxial scanning device according to claim 1, wherein the wave transmitter / receiver and the rotary / linear motion actuator are installed on the opposite side of the reflecting mirror. 3. The rotary / linear motion biaxial scanning device according to claim 1, wherein the wave transmitter / receiver and the rotary and linear motion actuators are installed on the same side of the reflecting mirror. 4. A rotation transmission mechanism capable of linear movement by rolling comprises a runner with a reflecting mirror, a rotary shaft and a plurality of micro balls, and a plurality of grooves are formed in the runner with a reflecting mirror and the rotary shaft in parallel with the rotary shaft. Provide a plurality of micro balls in each groove between the runner with a reflecting mirror and the rotating shaft, and enable the linear movement by rolling the micro balls along the groove, and transmit the rotation by the engagement of the grooves and the micro balls. The rotary / linear motion biaxial scanning device according to claim 1. 5. A rotation transmission mechanism capable of linear movement by sliding comprises a runner with a reflecting mirror and a rotating shaft, and a plurality of meshes are provided on the runner with the reflecting mirror and the rotating shaft in parallel with the rotating shaft. A lubricant is filled between the meshing of the runner with the rotary shaft and the rotary shaft, and the runner with the reflecting mirror slides along the meshing to enable linear movement, and the rotation is transmitted by the meshing of the runner with the reflective mirror and the rotary shaft. Rotation / linear movement 2 according to claim 1.
Axis scanning device. 6. A linear motion transmission mechanism that is rotatable by rolling is composed of a runner with a reflecting mirror, a slider of a linear motion actuator, and a plurality of fine balls, and is provided with the reflecting mirror perpendicular to the rotation axis of the runner with a reflecting mirror. One or more grooves are provided on the slider of the runner and the actuator for linear movement, a plurality of micro balls are loaded in each groove between the runner with a reflector and the slider, and the balls can roll along the grooves. 2. The rotary / linear motion biaxial scanning device according to claim 1, wherein the linear motion is transmitted by the engagement of the groove and the minute ball. 7. A linear motion transmitting mechanism that is rotatable by slipping comprises a runner with a reflecting mirror and a slider of a linear motion actuator, and the runner with a reflecting mirror and the linear motion actuator are perpendicular to the rotation axis of the runner with a reflecting mirror. One or more meshing grooves are provided on the slider, and each meshing groove between the runner with a reflecting mirror and the slider is filled with a lubricant, and the slider slides along the groove to enable rotation. The rotary / linear motion biaxial scanning device according to claim 1, which transmits motion.