JPH073654Y2 - Device for CO2 laser - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a metal end flange device at both ends of a laser and at least one metal intermediate flange at the transition from one module to another. The device, a plurality of dielectric stand-alone tubes between the end flange device and the intermediate flange device, the end regions of which are received in the socket holes on the front side of the flange device, and on the side of some flange devices. Provided between the gas supply connection, the lateral gas discharge connection on some flange devices and, according to the flow, the socket hole and the gas connection, each of which is at least two socket holes, i.e. Longitudinal circulation module type having at least KW output performance, which has a communication device connected to an independent pipe and arranged inside the flange device.
A device for a CO ₂ laser.

[Problems to be solved by conventional techniques and devices]

Such lasers are already known in West Germany,
It is also sold. In various respects, this laser corresponds to the disclosure of West German Published Patent Application No. 3422525.0-33. The energy at the output of such a laser depends on how much HF energy is delivered to the gas and also on the amount of gas delivered.
As is known, gas is used. By supplying twice the HF energy and doubling the gas flow rate, 1.
Attempts were made to up output of 5KW to 3KW. However, rather than doubling, only extremely low results were obtained. It was also possible to increase the proportion of helium in the gas mixture. As is known, the gas mixture contains about 10% CO ₂
, And 20% N ₂ and 70% He. That is, the proportion of helium must be increased to 90%, for example. For reasons decided, this has never been a problem. Similarly, employing another type of cooling method, such as nitrogen cooling, has not been a problem.

[Outline of device]

An object of the present invention is to provide a device as claimed in claim 1 of the utility model, which can improve the performance of the laser by a simple means while maintaining substantially the same principle.

According to the invention, this object is achieved by the features which are apparent from the characterizing part of claim 1 of the utility model.
As a result, in the case of the flange device, the gas supply pipe that is considerably difficult to install and extends obliquely does not become a problem. The flange device itself is also significantly simpler. The symmetrical supply of gas to the flange device is conventional and unchanged. So you can leave the gas composition as it is,
It is possible to use a dielectric independent tube with a conventional inner diameter, there is no need to extend the independent tube, no new type of gas cooling is needed, doubling the HF energy and doubling the gas flow rate. In this case, almost double the laser output can be obtained. Even if a large-volume chamber is formed, there is almost no cost burden compared to other deformations. Apparently, the large-volume chamber acts as a pressure balancing means, so that the chamber as a whole is under equal pressure. In addition, the pressure in the chamber is approximately equal to the pressure at the end of the gas supply connection, and the gas discharge connection is substantially subjected to the same pressure that exists at the outlet of the socket located downstream. It is self-evident. The gas is sufficiently stable in the large volume chamber that it can conveniently flow into the dielectric freestanding tube and be easily discharged from the dielectric freestanding tube into the large volume chamber.

The gas supply is always such that several flange devices are supplied with gas. Twice the amount of gas will appear in the flange device through which the gas flows out, where it is particularly essential to provide a chamber with a large volume.

The feature of claim 2 of the utility model registration allows the gas to flow from the chamber into the independent pipe without additional bending.

Due to the feature of claim 3 of the utility model registration, the chamber can be easily manufactured, and the chamber can be easily made to have an airtight structure outwardly. In particular,
A mortise miller with a fairly large radius makes it possible to form chambers, and the quarter radius that remains because of the contour shape of the mortise miller avoids blind spots that would otherwise be possible without this miller. . A quarter radius is also convenient for mechanical stress, since stress concentrates at corners at right angles.

In particular, the present invention is important in the case of the device described in claim 4 of the utility model registration. The end flange device is always supplied with gas, ie a dose of gas, for cooling the mirror. However, in some of the intermediate flange devices, twice the amount of gas flows due to the discharge flow, so that a chamber is especially necessary.

Due to the characteristics of claim 5 of the utility model registration, the rationalization effect can be obtained, and the temperature profile of the gas can be improved. When the gas supply chamber is the same size as the gas discharge chamber, the gas supply chamber is naturally larger than the gas supply chamber. However, as a result, the gas is not very hot on the feed side. this is,
This is what happens whenever gas is compressed against resistance. For example, in that case, the mirrors and the like also remain cooler.

Due to the characteristics of claim 6 of the utility model registration, the formation of the chamber becomes easier. Obviously, it is not essential to use the bottom surface as a guide surface for the gas guide, i.e. to raise the bottom surface towards the gas connection in the shape of a wedge. Rather, the chimba exerts the desired effect despite its flat bottom, which in turn reduces its weight.

The features of the utility model claim 8 enable the heat to be distributed symmetrically, which helps to mechanically stress the laser configuration.

〔Example〕

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The laser shown in FIG. 1 has a left end flange 11, a right end flange device 12 and three intermediate flanges 13, 14 and 16. On the left side of the end flange device 11, a 45 ° mirror housing 17 and a 180 ° mirror housing 18 are provided. On the right side of the end flange device 12, a housing 19 for a 180 ° mirror and a housing 21 for a 45 ° mirror are provided.

The laser is erected on a base stand (not shown) including a heat exchanger and a gas pump. End flange device 11,12
The cooled unused gas is supplied to the intermediate flange device 14 via the supply pipe 22. Gas is also symmetrically supplied to the flange devices 11, 14, 12 from the back side by a supply pipe (not shown). Intermediate flange device
Spent gas is discharged from 13, 16 through the discharge pipe 23. The discharge pipe 23 is only shown by the alternate long and short dash line in FIG. The symmetrically arranged discharge pipes 24 are shown in cutaway view. Dielectric independent pipe between the flange devices
26 extend four along the geometric center axis 27 of the laser. The independent tubes 26 are arranged as a set of four tubes. As shown in FIG. 4, left and right socket holes 29 (as well as all other flange devices),
A right socket hole 31 is provided. The left socket holes are vertically aligned with each other, as are the right socket holes 31. In addition, the left and right socket holes located above
29, 31 and the left and right socket holes 29, 31 located below are also aligned. The intermediate flange devices 13, 14, 16 are provided with a through hole 32 coaxially with the geometrical center axis 27, and a support pipe 33 having a large diameter penetrates the through hole. The left end flange device 11 has such coaxial holes only on its right side, and the right end flange device 12 only on its left side, but these holes are not through holes but the end region of the support tube 33. Accept. In front of the respective socket holes 29, 31, a flange plate 34 is attached in a state of being coaxially aligned with the socket holes. The flange plate 34 surrounds the central opening 36,
It has a sealing ring 37 embedded in the insertion groove. Since the flange plate 34 also has a similar sealing ring on the back side, the flange plate 34 is sealed forward and backward.
In FIG. 4, the flange plate 34 is shown only on the lower right side.
The upper left flange plate in FIG. 4 is covered by a screw-on cover plate 38 having a central opening 39 slightly larger than the central opening 36. On both sides of the intermediate flange device 16,
Support tube flanges 41, 42 are provided coaxially with the geometric center axis 27 and thus coaxially with the through hole 32. According to FIG. 4, the support tube flange has a square profile and is located with its corners facing downwards. The flange device is a support pipe flange 41, 42
Is fixed to the supporting pipe 33 penetrating therethrough. Naturally, the end flange devices 11 and 12 have such a flange plate 34, a cover plate 38 and a support tube flange only on the surfaces facing each other.

The intermediate flange device 16, which is described in detail herein as representative of the flange device, includes a cubic aluminum block 43. The length of one side of this aluminum block is 23 cm, and the wall thickness is 9 cm. Figures 3 and 4 are shown to scale according to these dimensions. The aluminum block 43 has a flat, vertical, smooth surface 44 on the left side, and so does the right side surface 46. The two faces 44, 46 are parallel to each other when viewed vertically. Inside these faces 44 and 46 are left side chamber 47 and right side chamber 4
8 and are formed respectively. The bottom surfaces 49, 51 are flat and extend vertically. The bottom surfaces 49,51 are oriented inwardly, as shown particularly clearly in the upper right part of FIG.
It is located at a depth that exceeds the depth, but not so deep that it intersects with the through hole 32. An important material bridge 52 is left between the bottom surfaces 49 and 51 and the through hole 32. This allows
At right angles and with maximum diameter, the left socket hole 29 communicates with the left chamber 47 and the right socket hole 31 has the right chamber.
Connect to 48. Upper side wall 52 of each chamber 47, 48,
53 is height aligned and extends horizontally and flatly. The same can be said for the lower side walls 54, 56. Since the lower side wall extends below the socket holes 29, 31, the socket holes are connected unimpeded to the chamber interior. In each chamba,
The side walls 57 and 58 extend substantially vertically except for the arcuately projecting peripheral portion 59 of the screw hole 61. This allows the screw holes 61 to be relatively closer to the inside of the chamber, so that the cover
As shown in FIG. 3, the right side chamber 48 has a width of about one half of the thickness of the aluminum block 43, which is sufficient to obtain rigidity. The material is left behind once.

The covers 62 provided on both sides of the aluminum block 43 have a contour shape according to the surface 46 of the right end portion, and the upper screw 63 and
The lower screw 64 and a seal (not shown) inside the cover 62 widely and airtightly fix it in place. Four central screws 66, which not only press the cover 62 against the surface 46 but also hold the flange 67 which receives the end region of the discharge pipe 24, are screwed into the screw holes 61. The cover 62 has a central hole 68 as an extension of the discharge pipe 24. Therefore, gas is allowed to flow from the independent pipe 26 into the socket holes 29, 31 and stabilizes the chambers 47, 48 under equal pressure, from the central hole 68 to the discharge pipe 24, by the convenient method described above. And the gas can flow out. The gas then reaches the heat exchanger and the gas pump.

In the case of the embodiment shown in FIG. 1, the intermediate flange devices 13, 16 perform the gas discharge operation, and the flange devices 11, 14 and 1
In 2, the supply operation is performed.

In practice, the cross section of the discharge pipes 23, 24 is twice as large as the supply pipe 22.

[Brief description of drawings]

Fig. 1 is a side view of a laser composed of four segments, excluding the cooling device and the HF supply device, Fig. 2 is an enlarged view of the right region of Fig. 1, and Fig. 3 is a cover removed. In addition, a partially cutaway view of the intermediate flange device located on the left side of FIG. 2 with the right socket flange removed, FIG. 4 is a view of FIG. 3 seen from the left side. 11 …… Left end flange device, 12 …… Left end flange device, 13, 14, 16 …… Intermediate flange device, 22 …… Supply pipe, 23, 24 …… Discharge pipe, 26 …… Independent pipe, 29, 31 ...... Socket hole, 33 …… Support tube, 34 …… Flange plate, 38 …… Cover plate, 41, 42 …… Support tube flange, 43 …… Aluminum block, 47, 48 …… Chamber, 62 …… Cover.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Bernd Huarer Germany Day 7257 Day Twin Hirschil Landerner Schutlerse 2

Claims (8)

[Scope of utility model registration request] 1. A metal end flange arrangement at both ends of the laser and at least one metal intermediate flange arrangement at the transition from one module to another, between the end flange arrangement and the intermediate flange arrangement. And the end regions are located in the socket holes on the front side of the flange device, the dielectric independent pipes, the side gas supply connections on some flange devices, and some flange devices. Provided between a gas discharge connection on one side and, according to the flow, a socket hole and a gas connection, each connecting at least two socket holes, ie independent pipes, and arranged inside the flange device. an apparatus for longitudinal distribution modules form a CO ₂ laser having at least KW output performance with a communication device that is, communication device volume greater Chillan , And the sockets hole communicates directly Chiyanba, apparatus for CO ₂ laser, wherein the longitudinal width of Chiyanba is equal to the distance of at least two sockets holes. 2. The device according to claim 1, wherein the socket hole is in abutment with and communicates with the chamber. 3. The utility model registration claim 1 wherein the chamber is closed by a side cover that supports the gas connection, and the chamber has a quarter radius in its corner area. apparatus. 4. The device according to claim 1, wherein the flange device is an intermediate flange device. 5. The device according to claim 2, wherein the flange devices are all the same size and the chambers are all the same size. 6. The device according to claim 1, wherein the chamber has a flat bottom surface. 7. The apparatus according to claim 1, wherein when there are four or more socket holes, one chamber is provided for each of the socket holes located vertically on the side surface. . 8. A device according to claim 1, wherein the chamber is symmetrical with respect to the geometrical longitudinal center axis of the laser.