JPH07335164A - Converging coil device and its manufacture - Google Patents

Abstract

PURPOSE:To establish a structure of a converging coil device with temp. rise prcluded and also a manufacturing method for such coil devices, by conducting the heat generated from a coil wire quickly to a coil case, radiating the heat quickly to the atmosphere, and thereby lessening the heat in the coil case. CONSTITUTION:A converging coil device comprises a coil case 1 to accommodate a coil wire 2 for converging charged particles, a lid 1a to constitute part of the coil case 1, and a plurality of metal fins 7 for heat radiation which are implanted approx. perpendicularly on the external walls of the case 1 and lid 1a. The heat generated in the coil wire 2 when current is fed to the coil wire 2 is radiated into the atmosphere through the fins 7 on the exterior walls so that the temp. rise in the coil case is suppressed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a focusing coil device and a method of manufacturing the same, and more particularly to a structure of a focusing coil which has a high heat resistance for generating a magnetic field for focusing scattered charged particles and a method of manufacturing the same.

[0002]

7 is a longitudinal sectional view of a conventional focusing coil device, FIG. 8 is a front view taken along the broken line CC in FIG. 7, and FIG. 9 is an enlarged view of a portion B in FIG. In each drawing, 1 is a coil case around which a coil wire 2 is wound, 1a is a coil case lid of the coil case 1, and 1b is a coil case 1.
The coil case cylindrical portion, 4 is a cloth tape wound around the outer circumference of the coil wire 2, and 5 is an air layer existing in the gap between the coil wires 2.

Next, the operation and manufacturing method of the above structure will be described.

The coil case cylindrical portion 1b which constitutes the coil case 1 has a cylindrical shape around the coil center axis X, and the coil wire 2 is wound around the coil center axis X around the outer peripheral portion thereof.

When the coil wire 2 is wound around the coil case cylindrical portion 1b, the coil wire 2 is wound in close contact with the coil case lid 1a and the coil case 1 so that there is as little space as possible.

After the coil wire 2 is wound, the coil wire 2 is attached to the coil case 1, and the cloth tape 4 is wound around the outer periphery of the coil wire 2 so that the coil wire 2 is tightly bound so as not to spread.

Even if the coil wire 2 is tightly wound around the coil case cylindrical portion 1b and tightly bound with the cloth tape 4,
As shown in FIG. 9, the air layer 5 remains between the coil wire 2 and the coil wire 2 and between the coil wire 2 and the coil case 1.

In the focusing coil device manufactured as described above, when a current is passed through the coil wire 2, a magnetic field is generated, and the charged particles scattered by the magnetic field can be focused.

At this time, by passing an electric current through the coil wire 2, the coil wire 2 generates heat, and the heat is conducted to the adjacent coil wire 2 and the coil case 1 as shown by an arrow Y in FIG. Are released from the outer wall of the coil case 1 into the atmosphere.

When an air layer 5 exists between the coil wires 2 and between the coil wires 2 and between the coil wire 2 and the coil case 1, heat is conducted through the air layer 5.

[0011]

Since the conventional focusing coil device is constructed as described above by the manufacturing method as described above, the heat generated in the coil wire 2 is transferred to the air layer 5 having a poor thermal conductivity. There is a problem that it is disturbed and is difficult to reach the coil case 1. Therefore, when the amount of heat generated by the coil wire 2 is large, the temperature inside the coil case 1 is gradually increased, and as a result, the coil wire 2 is burned.

The present invention has been made in order to solve the above-mentioned problems of the prior art. The heat generated in the coil wire is quickly conducted to the coil case, and the heat is quickly transferred to the atmosphere. An object of the present invention is to provide a structure of a focusing coil device and a method for manufacturing the same in which the heat accumulated in the coil case is reduced by releasing the heat and the temperature rise is prevented.

[0013]

In order to achieve the above object, the present invention provides, as a focusing coil device according to claim 1, a coil case for accommodating a coil wire for focusing charged particles, and the coil. The present invention provides a focusing coil device including a plurality of heat-dissipating metal fins which are planted almost vertically on an outer wall of a case.

In order to achieve the above object, the present invention provides
The focusing coil device according to claim 2, wherein a coil case that houses a coil wire for focusing charged particles, a gap between the coil wire and the coil wire, and a gap between the coil wire and the coil case are filled. And a filler having a thermal conductivity higher than that of air, and a focusing coil device.

In order to achieve the above object, the present invention provides
As a method for manufacturing the focusing coil device according to claim 3, a step of winding a coil wire around a coil case cylindrical portion to form a coil, and a step of winding a filler having a thermal conductivity higher than air during winding of the coil wire. And a step of coating the surface of the attached coil wire and filling the gap between the coil wires with the filling material.

In order to achieve the above object, the present invention provides
The method for manufacturing the focusing coil device according to claim 4, wherein the air inside the coil case is removed from a first opening provided in a coil case that houses a coil wire for focusing the charged particles, and A resin material having a higher thermal conductivity than air is introduced into the inside of the coil case from the second port provided, and a gap between the coil wire and the coil wire,
And a step of filling the gap between the coil wire and the coil case with the resin material, to provide a method for manufacturing a focusing coil device.

[0017]

According to the above means, in the focusing coil device according to the first aspect, the heat generated in the coil wire when the coil wire is energized is transferred to the atmosphere through a plurality of metal fins planted on the outer wall of the coil case. Releases and suppresses temperature rise inside the coil case.

In the above-mentioned means, in the focusing coil device according to the second aspect, when the coil wire 2 is energized, heat generated in the coil wire is generated between the coil wire and the coil wire and between the coil wire and the coil case. It efficiently conducts inside the coil case through the filler filled in the gap, and suppresses the temperature rise inside the coil case.

In the above-mentioned means, in the method of manufacturing the focusing coil device according to the third aspect, when the coil wire is formed by winding the wire on the coil case cylindrical portion, the gap between the coil wires is heated more than air. By applying a filler having excellent conductivity, a focusing coil device having excellent thermal conductivity inside the coil case is obtained.

In the above means, in the method of manufacturing a focusing coil device according to a fourth aspect of the present invention, the inside of the coil case accommodating the coil wire is evacuated, and a resin material having a higher thermal conductivity than air is contained therein. By introducing the resin material, the gap between the coil wire and the coil wire and the gap between the coil wire and the coil case can be efficiently filled with the resin material, thereby providing a focused coil device having excellent thermal conductivity inside the coil case. obtain.

[0021]

Embodiments of the present invention will be described below with reference to the drawings.

First Embodiment FIG. 1 is a vertical sectional view of a focusing coil device according to a preferred first embodiment of the present invention, and FIG. 2 is a front view taken along a broken line AA in FIG. In the figure, 7 is a coil case 1 and a coil case lid 1 which constitutes a part of the coil case 1.
The metal fins for heat dissipation are vertically planted at equal intervals on the outer surface of a. By the way, the metal fin 7 is made of the same material as the coil case 1 and the coil case lid 1a, and is integrally molded with each.

Next, the operation of the above-described structure will be described.

When a current is applied to the coil wire 2, the coil wire 2 generates heat. This heat is conducted to the adjacent coil wire 2 or directly to the coil wire 2. In addition, when the air layer 5 exists between the coil wire 2 and the coil wire 2 or between the coil wire 2 and the coil case 1, heat is conducted through the air layer 5.

The heat transferred to the coil case 1 is radiated from the main body of the coil case 1 or the coil case lid 1a into the atmosphere through the metal fins 7 implanted in each. The metal fins 7 substantially increase the surface area of the outer wall of the coil case 1 and the coil case lid 1a, and increase the contact area with the atmosphere, so that much heat can be released into the atmosphere. . For this reason, even if the air layer 5 is present inside the coil case 1 and heat conduction is deteriorated, the heat released is large, so the heat generated in the coil wire 2 is not accumulated inside and the coil wire due to high heat is generated. It is possible to prevent breakage of item 2.

Second Embodiment FIG. 3 is a partial sectional front view of the focusing coil device in the process of manufacturing, for explaining a method of manufacturing a focusing coil device according to a second preferred embodiment of the present invention. It is a partial cross-section enlarged view which shows the internal structure of the focusing coil apparatus manufactured by the method of FIG.

As shown in the figure, in the manufacturing process of the focusing coil device, the wire 10 is connected to the coil case cylindrical portion 1b.
The coil wire 2 is formed by winding it around the outer circumference of the coil wire 2. At this time, the wire 10 is wound on the outer circumference of the coil wire 2 already wound while applying the epoxy resin 9 with the brush 8.

That is, the epoxy resin 9 is applied to each layer of the coil wire 2, and the epoxy resin 9 is filled between the layers of the coil wire 2.

As a result, as shown in FIG. 4, the epoxy resin 9 fills the air layer 5 that is usually generated in the gap between the coil wire 2 and the coil wire 2 or the gap between the coil wire 2 and the coil case 1. To be done.

By manufacturing the focusing coil device as described above, most of the air layer 5 formed between the coil wire 2 and the coil wire 2 or between the coil wire 2 and the coil case 1 is It is filled with epoxy resin 9. In this way, the filled epoxy resin 9 has a higher thermal conductivity than the air layer 5, so that the heat generated in the coil wire 2 is efficiently transferred to the adjacent coil wire 2 and the coil case 1. Can be transmitted to.

As a result, the heat generated in the coil wire 2 due to the energization of the coil wire 2 is directly or through the filled epoxy resin 9 and the adjacent coil wire 2 and the coil case 1 are provided.
Is transmitted efficiently. Since the heat transferred to the coil case 1 is released into the atmosphere, it is possible to prevent the heat from being accumulated inside the coil case 1.
As a result, it is possible to prevent the coil wire 2 from being damaged by high heat.

When the wire 10 is wound around the coil case cylindrical portion 1b to form the coil wire 2, the epoxy resin 9 is evenly applied by the brush 8 so that more air layer 5 is formed. Since it can be replaced with, a more effective structure can be obtained in consideration of heat release.

Third Embodiment FIG. 5 is a sectional view of a manufacturing apparatus for explaining a method of manufacturing a focusing coil apparatus according to a third preferred embodiment of the present invention. In the figure, 11 is a vacuum chamber for housing the coil case 1 around which the coil wire 2 is wound, 12 is a container containing the epoxy resin 9, 17 is an inlet formed in the hermetically sealed coil case 1, and 18 is a hermetically sealed coil. An outlet formed in the case 1, 19 is an empty container, 13 is a pipe communicating between the inside of the coil case 1 and the container 12 via an inlet 17, 1
Reference numeral 5 denotes a pipe that connects the inside of the coil case 1 and the container via the outlet 18.

In the structure described above, when the inside of the vacuum chamber 11 is evacuated, the air inside the coil case 1 is sucked out from the outlet 18 through the pipe 15 and the container 19.

On the other hand, the epoxy resin 9 contained in the container 12 is injected from the pipe 13 into the inlet 17 and the inside of the coil case 1 by gravity. At this time, since air does not exist in the gap between the coil wires 2 and the gap between the coil wire 2 and the coil case 1, the epoxy resin quickly flows into these gaps.

The epoxy resin 9 filled inside the coil case 1 is further discharged from the inside of the coil case 1 to the outlet 1.
8 and the pipe 15 flow into the container 19.

Then, when the heights of the liquid surfaces of the epoxy resin 9 inside the container 12 and the container 19 become equal due to the balance of gravity of the epoxy resin 9, the flow is stopped.

As described above, since the air inside the coil case 1 is evacuated by the vacuum chamber 11, no air bubbles or the like remain in the gap between the coil wires 2 inside the coil case 1, and the epoxy resin 9 is removed. Will be filled.

That is, the gap between the coil wire 2 and the coil wire 2 wound inside the coil case 1 and the gap between the coil wire 2 and the coil case 1 are all filled with the epoxy resin 9. .

In the focusing coil device manufactured as described above, the coil wire 2 is energized by energizing the coil wire 2.
The heat generated in the epoxy resin 9
Through the adjacent coil wire 2 and coil case 1,
It is transmitted efficiently. Since the heat transferred to the coil case 1 is released into the atmosphere, it is possible to prevent the heat from being accumulated inside the coil case 1. As a result, it is possible to prevent the coil wire 2 from being damaged by high heat.

Fourth Embodiment FIG. 6 is a sectional view of a manufacturing apparatus for explaining a method of manufacturing a focusing coil apparatus according to a fourth preferred embodiment of the present invention. In the figure, 16 is a container communicating with an outlet 18 provided in the coil case 1 through a pipe 15, and 14 is a vacuum pump for drawing a vacuum inside the container 16. In addition,
The coil case 1 is additionally provided with an inlet 17, and a container 12 containing the epoxy resin 9 is introduced through a pipe 13.
Communicate with.

In the structure as described above, the container 16
When the inside of the coil is evacuated by the vacuum pump 14, the air inside the coil case 1 is sucked out from the outlet 18 through the pipe 15 and the container 16.

On the other hand, the epoxy resin 9 contained in the container 12 is evacuated from the coil case 1 through the outlet 18, the pipe 15 and the container 16 by the force of gravity and the vacuum pump 14 to draw an inlet 17 part. Is introduced from the pipe 13 into the inlet 17 and the inside of the coil case 1.

The epoxy resin 9 filled inside the coil case 1 is further discharged from the inside of the coil case 1 to the outlet 1.
8 and a pipe 15 are introduced into the container 16.

The presence of the container 16 prevents the vacuum pump 14 from directly sucking the epoxy resin 9.

Through the steps described above, the vacuum pump 1
Since the air inside the coil case 1 is released by 4,
The gap between the coil wires 2 inside the coil case 1 is filled with the epoxy resin 9 without leaving bubbles or the like.

That is, the gap between the coil wire 2 and the coil wire 2 wound inside the coil case 1 and the gap between the coil wire 2 and the coil case 1 are all filled with the epoxy resin 9. .

Further, due to the suction action of the vacuum pump 14,
The epoxy resin 9 immediately flows into the gap such as the coil wire.

In the focusing coil device manufactured as described above, the coil wire 2 is energized by energizing the coil wire 2.
The heat generated in the epoxy resin 9
Through the adjacent coil wire 2 and coil case 1,
It is transmitted efficiently. Since the heat transferred to the coil case 1 is released into the atmosphere, it is possible to prevent the heat from being accumulated inside the coil case 1. As a result, it is possible to prevent the coil wire 2 from being damaged by high heat.

As described above, according to the focusing coil device of the first embodiment, the heat generated by the energization of the coil wire 2 in the coil case 1 is efficiently radiated to the atmosphere through the metal fin 7. Therefore, the temperature inside the coil case 1 can be prevented from rising and the coil wire 2 can be prevented from being damaged.

Further, according to the focusing coil device manufactured by the manufacturing method of the second embodiment, the third embodiment and the fourth embodiment, the gap between the coil wire 2 and the coil wire 2 in the coil case 1, Since the epoxy resin 9 is filled in the gap between the coil case 1 and the coil wire 2, the efficiency of heat conduction between the coil wire 2 and the coil wire 2 and between the coil wire 2 and the coil case 1 increases. As a result, it becomes possible to prevent the temperature inside the coil case 1 from rising, and the coil wire 2
Can prevent damage.

Further, in the manufacturing methods of the second, third and fourth embodiments, air in the gap formed between the coil wire 2 and the coil wire 2 and between the coil wire 2 and the coil case 1 is removed. Efficiently kicked out, epoxy resin 9 can be filled here,
It offers a relatively simple and reliable method.

[0053]

As described above, according to the present invention,
In a focusing coil device configured by winding a coil wire inside a coil case, heat generated in the coil wire inside the coil case can be efficiently conducted through an epoxy resin or can be effectively released to the outside by a metal fin. It is also possible to obtain a structure that has a high heat conduction effect by filling the gap around the coil wire with epoxy resin.
An effect is that a manufacturing method that can be configured easily and reliably can be obtained.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a focusing coil device according to a first embodiment of the present invention.

FIG. 2 is a front view taken along the fracture plane AA in FIG.

FIG. 3 is a view for explaining the manufacturing method for the focusing coil device according to the second embodiment of the present invention, and is a partial cross-sectional front view particularly during the manufacturing of the focusing coil device.

FIG. 4 is a partially enlarged cross-sectional view showing the internal structure of a focusing coil device manufactured by the method of the second embodiment.

FIG. 5 is a sectional view of the manufacturing apparatus for explaining the method of manufacturing the focusing coil device according to the third embodiment of the present invention.

FIG. 6 is a cross-sectional view of the manufacturing apparatus for explaining the method of manufacturing the focusing coil device according to the fourth embodiment of the present invention.

FIG. 7 is a vertical cross-sectional view of a conventional focusing coil device.

FIG. 8 is a front view taken along the fracture plane CC in FIG.

9 is an enlarged view of a portion B in FIG.

[Explanation of symbols]

1 coil case, 2 coil wire, 4 cloth tape, 5
Air layer, 7 metal fins, 8 brushes, 9 epoxy resin, 10 wires, 11 vacuum chamber, 12, 16, 19
Container, 13, 15 tubes, 14 vacuum pump, 17 inlets, 18 outlets.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location H05H 7/04

Claims (4)

[Claims] 1. A focusing coil, comprising: a coil case for accommodating a coil wire for focusing charged particles; and a plurality of metal fins for heat radiation, which are planted substantially vertically on an outer wall of the coil case. apparatus. 2. A coil case for accommodating a coil wire for focusing charged particles, and a thermal conductivity exceeding air filled in a gap between the coil wire and the coil wire and a gap between the coil wire and the coil case. And a filling material having the same. 3. A step of winding a coil wire around a cylindrical portion of a coil case to form a coil, and applying a filler having a thermal conductivity exceeding that of air during winding of the coil wire onto the surface of the wound coil wire. And a step of applying the filler to the gaps between the coil wires, the method of manufacturing a focusing coil device. 4. A step of extracting air inside a coil case from a first opening provided in a coil case for accommodating a coil wire for focusing charged particles, and a coil opening from a second opening provided in the coil case. A step of injecting a resin material having a thermal conductivity exceeding air into the case, and filling the gap between the coil wire and the coil wire and the gap between the coil wire and the coil case with the resin material; A method of manufacturing a focusing coil device, comprising: