JPH07333096A - Inspection method and device for piping - Google Patents
Inspection method and device for pipingInfo
- Publication number
- JPH07333096A JPH07333096A JP13221894A JP13221894A JPH07333096A JP H07333096 A JPH07333096 A JP H07333096A JP 13221894 A JP13221894 A JP 13221894A JP 13221894 A JP13221894 A JP 13221894A JP H07333096 A JPH07333096 A JP H07333096A
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- Prior art keywords
- dissolved oxygen
- concentration
- pure water
- pipe
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Landscapes
- Sampling And Sample Adjustment (AREA)
- Examining Or Testing Airtightness (AREA)
- Pipeline Systems (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、配管の検査方法及び装
置に関し、特に、溶存酸素濃度の極めて低い純水を供給
する配管系の漏洩状態の検査に好適な配管の検査方法及
び装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pipe inspection method and device, and more particularly to a pipe inspection method and device suitable for inspecting a leak state of a pipe system for supplying pure water having a very low dissolved oxygen concentration.
【０００２】[0002]
【従来の技術】水は、多くの産業分野で使用されてお
り、要求される水の純度は、その使用目的によって異な
るが、半導体工場では、特に高純度の超純水が使用され
ている。一方、水中には、大気中の酸素が溶け込んでい
るが、前記超純水では溶存酸素も不純物とされ、半導体
の基板洗浄工程等で用いる超純水には、溶存酸素濃度１
０ｐｐｂ以下のものが要求されている。このようなこと
から、超純水を製造する際には、溶存酸素低減処理工程
を行って水中の溶存酸素を低減するようにしている。2. Description of the Related Art Water is used in many industrial fields, and the required purity of water depends on the purpose of use, but in semiconductor factories, ultrapure water of particularly high purity is used. On the other hand, oxygen in the atmosphere is dissolved in the water, but dissolved oxygen is also an impurity in the ultrapure water, and the dissolved oxygen concentration is 1 in the ultrapure water used in the semiconductor substrate cleaning step and the like.
Those below 0 ppb are required. Therefore, when producing ultrapure water, a dissolved oxygen reduction treatment step is performed to reduce dissolved oxygen in water.
【０００３】[0003]
【発明が解決しようとする課題】上記超純水を純水製造
装置から使用箇所に供給する配管系の材料には、従来か
ら空気の透過量が少なく、かつ、経済的な材料としてポ
リ塩化ビニルが多く用いられてきているが、ポリ塩化ビ
ニルからなる配管系では、内外の酸素分圧の差により該
ポリ塩化ビニルを透過する空気中の極僅かな酸素によっ
て水中の溶存酸素濃度が増加し、使用先での規定の溶存
酸素濃度を上回ってしまうことがある。The material of the piping system for supplying the above-mentioned ultrapure water from the pure water producing apparatus to the place of use has conventionally been polyvinyl chloride as an economical material with a low air permeation amount. However, in a piping system made of polyvinyl chloride, the concentration of dissolved oxygen in water increases due to the slightest amount of oxygen in the air that permeates the polyvinyl chloride due to the difference in oxygen partial pressure between the inside and outside, It may exceed the specified dissolved oxygen concentration at the place of use.
【０００４】このため、酸素の透過係数がポリ塩化ビニ
ルよりも小さい材料、例えばポリビニリデンフルオライ
ド等を配管材料として使用することにより、酸素が配管
材料を透過して水中に溶け込む量を低減することができ
るが、配管系の製作における経済性、入手の容易さ、加
工の容易性等も考慮して適切な材料を選択する必要があ
る。Therefore, by using a material having a smaller oxygen permeability coefficient than that of polyvinyl chloride, such as polyvinylidene fluoride, as a piping material, the amount of oxygen permeating the piping material and dissolving in water can be reduced. However, it is necessary to select an appropriate material in consideration of economical efficiency in manufacturing the piping system, availability, and ease of processing.
【０００５】また、工場等の配管設備では、材料の劣化
による変質や微小なクラックの発生、弁や継手部分等、
様々な漏洩要因があるが、従来は、配管各部からの水の
滲出を目視により観察して漏洩を検知するのみであっ
た。しかし、配管内への酸素の透過による水中の溶存酸
素濃度の増加は、水が外部に滲出する以前に発生するの
で、定期的に配管系の漏洩状態を検査する必要がある。Further, in piping equipment such as factories, deterioration due to material deterioration, generation of minute cracks, valves and joints, etc.
Although there are various leak factors, conventionally, the leak was detected only by visually observing the seepage of water from each part of the pipe. However, the increase in the dissolved oxygen concentration in water due to the permeation of oxygen into the pipe occurs before the water leaks to the outside, so it is necessary to regularly inspect the leakage state of the pipe system.
【０００６】さらに、他の各種液体を供給する配管系に
おいても、配管材料の漏洩状態を検査することによって
最適な配管材料を選択できるとともに、液体中の成分の
濃度変動や外部への漏洩等を未然に防止することができ
る。Further, also in the piping system for supplying various other liquids, the optimum piping material can be selected by inspecting the leakage state of the piping material, and the concentration fluctuation of the component in the liquid and the leakage to the outside can be prevented. It can be prevented.
【０００７】なお、合成樹脂等の材料中の分子透過量に
ついては、材料の両側が気体の場合は各種文献に記載さ
れているが、一方が液体の場合に付いての透過に関する
特性値はほとんど記載されておらず、経験等により判定
しているのが実情である。The molecular permeation amount in a material such as synthetic resin is described in various documents when both sides of the material are gas, but most of the characteristic values relating to permeation when one side is liquid are almost the same. The fact is that it is not listed, but is judged based on experience and other factors.
【０００８】そこで本発明は、液体を供給する配管系の
設計や設備管理を効率よく行え、特に溶存酸素濃度が１
０ｐｐｂ以下の超純水を供給する配管系における純水中
の溶存酸素濃度の増加を確実に防止することができる配
管の検査方法及び装置を提供することを目的としてい
る。Therefore, the present invention enables efficient design and facility management of a piping system for supplying a liquid, and particularly when the dissolved oxygen concentration is 1.
An object of the present invention is to provide a pipe inspection method and device capable of reliably preventing an increase in the dissolved oxygen concentration in pure water in a pipe system that supplies ultrapure water of 0 ppb or less.
【０００９】[0009]
【課題を解決するための手段】上記した目的を達成する
ため、本発明の配管の検査方法は、検査対象となる配管
の一方から溶存酸素濃度１ｐｐｂ以下の純水、あるいは
所定濃度の二酸化炭素が溶存した液体を導入するととも
に、前記配管の他方における前記純水中の溶存酸素濃度
あるいは二酸化炭素濃度を測定することを特徴としてい
る。In order to achieve the above object, the pipe inspection method of the present invention uses pure water having a dissolved oxygen concentration of 1 ppb or less or carbon dioxide having a predetermined concentration from one of the pipes to be inspected. It is characterized in that the dissolved liquid is introduced and the dissolved oxygen concentration or carbon dioxide concentration in the pure water in the other side of the pipe is measured.
【００１０】また、本発明の配管の検査装置は、配管の
一方から溶存酸素濃度１ｐｐｂ以下の純水を導入する純
水供給手段と、前記純水の流量を測定する手段と、前記
配管の他方における前記純水中の溶存酸素濃度を測定す
る溶存酸素濃度測定手段とを備えたことを特徴としてい
る。Further, the pipe inspection apparatus of the present invention comprises a pure water supply means for introducing pure water having a dissolved oxygen concentration of 1 ppb or less from one of the pipes, a means for measuring the flow rate of the pure water, and the other of the pipes. And a dissolved oxygen concentration measuring means for measuring the dissolved oxygen concentration in the pure water.
【００１１】[0011]
【作 用】配管材料を透過して水中に溶け込んだ酸素量
を測定することにより、例えば、該配管材料が超純水の
供給配管として適切かどうかを判断することができる。
すなわち、水の流量だけでなく、配管の長さや口径、配
管途中の継手や弁等も含めて酸素透過量を測定すること
により、純水製造装置から使用先に至る配管材料として
適切な材料を選択することができる。[Operation] By measuring the amount of oxygen that has penetrated through the pipe material and dissolved in water, it is possible to determine whether or not the pipe material is suitable as a supply pipe for ultrapure water, for example.
That is, by measuring not only the flow rate of water but also the length and diameter of the pipe, the amount of oxygen permeation including the joints and valves in the middle of the pipe, a suitable material for the pipe from the pure water production device to the place of use can be selected. You can choose.
【００１２】また、配管設備の酸素透過量を定期的に測
定して監視することにより、配管系の異常を早期に発見
することができ、超純水使用箇所での溶存酸素濃度の増
加による事故や水漏れ等の事故を未然に防止することが
できる。Further, by periodically measuring and monitoring the oxygen permeation amount of the piping equipment, it is possible to detect abnormalities in the piping system at an early stage, and an accident due to an increase in the dissolved oxygen concentration at the place where ultrapure water is used. It is possible to prevent accidents such as water leaks.
【００１３】さらに、所定濃度の二酸化炭素が溶存した
液体を用いて配管系両端部での二酸化炭素濃度の変化を
測定することによっても、配管材料等を透過するガス量
を測定することができる。Further, by measuring the change in carbon dioxide concentration at both ends of the piping system using a liquid in which a predetermined concentration of carbon dioxide is dissolved, the amount of gas passing through the piping material and the like can be measured.
【００１４】[0014]
【実施例】以下、本発明を、図面に示す実施例に基づい
てさらに詳細に説明する。図１乃至図４は、本発明方法
の原理を説明するための図であって、図１は、実験装置
の構成を示すものである。この実験装置は、検査対象と
なる配管サンプル（以下、単に配管という）１の一端に
溶存酸素低減装置２を設け、該配管１の途中に、水中の
溶存酸素濃度を測定する分析器３を設けたものである。
なお、配管１の他端には流出する水を受けるタンク４を
設けている。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in more detail below with reference to the embodiments shown in the drawings. 1 to 4 are diagrams for explaining the principle of the method of the present invention, and FIG. 1 shows the configuration of an experimental apparatus. In this experimental apparatus, a dissolved oxygen reduction device 2 is provided at one end of a pipe sample (hereinafter, simply referred to as a pipe) 1 to be inspected, and an analyzer 3 for measuring a dissolved oxygen concentration in water is provided in the middle of the pipe 1. It is a thing.
A tank 4 for receiving the outflowing water is provided at the other end of the pipe 1.
【００１５】上記分析器３には、溶存酸素の検出下限が
０．１ｐｐｂのＯｒｂｉｓｐｈｅｒｅ製ＭＯＣＡ３６０
０を用いた。また、分析器３は、配管１に弁３１を介し
て接続されており、測定セル３２を流れる水量を測定す
るための流量計３３と、分析器本体である制御部３４
と、検出した溶存酸素濃度を出力するレコーダー３５と
を備えている。The analyzer 3 has a lower detection limit of dissolved oxygen of 0.1 ppb by MOBI 360 manufactured by Orbissphere.
0 was used. Further, the analyzer 3 is connected to the pipe 1 via a valve 31, and has a flow meter 33 for measuring the amount of water flowing through the measurement cell 32 and a control unit 34 which is an analyzer body.
And a recorder 35 for outputting the detected dissolved oxygen concentration.
【００１６】まず、配管１として、外径１６ｍｍ，内径
１３ｍｍ，長さ２００ｍｍ（溶存酸素低減装置取付部か
ら分析器までの長さ）のポリ塩化ビニル（ＰＶＣ）製の
直管を使用し、溶存酸素低減装置２から溶存酸素濃度を
１ｐｐｂ以下まで低減した純水を導入して分析器３で溶
存酸素濃度を測定した。First, a straight pipe made of polyvinyl chloride (PVC) having an outer diameter of 16 mm, an inner diameter of 13 mm, and a length of 200 mm (the length from the dissolved oxygen reduction device mounting portion to the analyzer) is used as the pipe 1. Pure water having a dissolved oxygen concentration reduced to 1 ppb or less was introduced from the oxygen reduction device 2, and the dissolved oxygen concentration was measured by the analyzer 3.
【００１７】図２は、配管１への導入水量を変動させた
ときの溶存酸素濃度測定値を示すもので、図から明らか
なように、配管１を通過する純水の流量の変動に伴って
水中の溶存酸素濃度も変化し、純水の流量が増加すると
溶存酸素濃度の増加量が少なくなることが判る。FIG. 2 shows measured values of dissolved oxygen concentration when the amount of water introduced into the pipe 1 is changed. As is clear from the figure, the flow rate of pure water passing through the pipe 1 is changed. It can be seen that the dissolved oxygen concentration in water also changes, and the increase in the dissolved oxygen concentration decreases as the flow rate of pure water increases.
【００１８】図３は、純水の流量と溶存酸素濃度測定値
との関係を示すもので、上述のように、純水の流量の増
加に伴って溶存酸素濃度測定値が低くなっていること、
すなわち、溶存酸素濃度の増加量が少なくなっているこ
とが判る。また、配管１として上記ポリ塩化ビニルに代
えて同一寸法のポリビニリデンフルオライド（ＰＶＤ
Ｆ）製の管を用いた場合の純水の流量と溶存酸素濃度測
定値との関係を、同じく図３に示す。両者の溶存酸素濃
度測定値を比較すると、酸素の透過係数が小さいポリビ
ニリデンフルオライドからなる配管は、従来のポリ塩化
ビニル製の配管に比べて溶存酸素濃度の増加量が少ない
ことが判る。FIG. 3 shows the relationship between the pure water flow rate and the dissolved oxygen concentration measurement value. As described above, the dissolved oxygen concentration measurement value decreases as the pure water flow rate increases. ,
That is, it can be seen that the increase in the dissolved oxygen concentration is small. Further, as the pipe 1, instead of the above polyvinyl chloride, polyvinylidene fluoride (PVD) having the same size is used.
Similarly, FIG. 3 shows the relationship between the flow rate of pure water and the measured dissolved oxygen concentration when a tube made of F) is used. Comparing the measured values of the dissolved oxygen concentration of both, it is found that the pipe made of polyvinylidene fluoride having a small oxygen permeability coefficient has a smaller increase in the dissolved oxygen concentration as compared with the pipe made of conventional polyvinyl chloride.
【００１９】ここで、溶存酸素低減装置２から配管１に
導入する純水の溶存酸素濃度をＣ0［ｐｐｂ］、分析器
３での溶存酸素濃度測定値をＣ［ｐｐｂ］とし、配管１
の酸素透過速度をＦ［ｇ／ｓｅｃ］、通水量をＶ［ｇ／
ｓｅｃ］とすれば、Ｃ＝Ｃ0＋Ｆ／Ｖの関係が成り立
つ。この式に基づいて前記図３を書換えると図４に示す
図となり、水量の逆数と溶存酸素濃度増加量とに直線関
係があることが判る。そして、この直線の傾きがそれぞ
れの配管材料の酸素透過速度（漏洩速度）を表してお
り、図から、ポリ塩化ビニルの酸素の漏洩速度は１．３
×１０-8［ｇ／ｓ］、ポリビニリデンフルオライドの酸
素の漏洩速度は１．２×１０-9［ｇ／ｓ］と算出でき、
ポリ塩化ビニル製配管は、ポリビニリデンフルオライド
製配管に比べて酸素の漏洩速度が高いことが判る。Here, the dissolved oxygen concentration of pure water introduced into the pipe 1 from the dissolved oxygen reducing device 2 is C 0 [ppb], and the measured dissolved oxygen concentration in the analyzer 3 is C [ppb], and the pipe 1
Of oxygen permeation rate of F [g / sec] and water flow rate of V [g / sec]
sec], the relationship of C = C 0 + F / V is established. When FIG. 3 is rewritten based on this equation, the figure is shown in FIG. 4, and it can be seen that there is a linear relationship between the reciprocal of the water amount and the dissolved oxygen concentration increase amount. The slope of this straight line represents the oxygen permeation rate (leak rate) of each pipe material, and from the figure, the oxygen leak rate of polyvinyl chloride is 1.3.
X10 -8 [g / s], the leakage rate of oxygen of polyvinylidene fluoride can be calculated as 1.2 x 10 -9 [g / s],
It can be seen that the polyvinyl chloride piping has a higher oxygen leakage rate than the polyvinylidene fluoride piping.
【００２０】このようにして、任意の材料からなる配管
の酸素透過速度を求めることにより、該材料を超純水の
供給配管系に使用したときの溶存酸素濃度の増加量を推
定することができる。このとき、配管に導入する純水中
の溶存酸素濃度は、該配管の導入側と酸素濃度測定側と
で溶存酸素濃度の変化量を求められる濃度ならばよい
が、導入する純水中の溶存酸素濃度を１０ｐｐｂ以下、
特に１ｐｐｂ以下にすることにより、溶存酸素濃度の増
加量を確実に知ることができ、測定精度を大幅に向上さ
せることができる。In this way, by obtaining the oxygen permeation rate of the pipe made of any material, it is possible to estimate the increase amount of the dissolved oxygen concentration when the material is used for the ultrapure water supply pipe system. . At this time, the dissolved oxygen concentration in the pure water to be introduced into the pipe may be a concentration at which the amount of change in the dissolved oxygen concentration between the introduction side of the pipe and the oxygen concentration measurement side can be obtained, but the dissolved oxygen concentration in the pure water to be introduced Oxygen concentration below 10 ppb,
In particular, by setting it to 1 ppb or less, the increase amount of the dissolved oxygen concentration can be surely known, and the measurement accuracy can be significantly improved.
【００２１】したがって、本発明方法を適用することに
より、超純水の使用先における溶存酸素許容量や配管の
長さなどに応じて配管として用いることができる材料を
特定することができる。また、通水量と溶存酸素濃度増
加量との関係から、通水量が多い場合には、酸素透過速
度が比較的高い配管を用いても溶存酸素の増加量が少な
いため、超純水の使用量が多い場所に超純水を供給する
配管には、酸素透過速度が比較的高くても、安価で入手
の容易な材料からなる配管を使用できることが判る。Therefore, by applying the method of the present invention, the material that can be used as the pipe can be specified according to the dissolved oxygen allowable amount and the length of the pipe in the place where the ultrapure water is used. In addition, from the relationship between the water flow rate and the dissolved oxygen concentration increase amount, when the water flow rate is high, the amount of increase in dissolved oxygen is small even if a pipe with a relatively high oxygen permeation rate is used. It can be seen that a pipe made of an inexpensive and easily available material can be used as a pipe for supplying ultrapure water to a place where there is a lot of oxygen even if the oxygen permeation rate is relatively high.
【００２２】さらに、合成樹脂のような物質中を分子拡
散する現象においては、該物質中の通路径が拡散する分
子の平均自由行程よりも小さいときには、分子の拡散は
クヌーセンの拡散過程によるため、分子の拡散速度は、
分子量の逆数の平方根に比例することになる。すなわ
ち、酸素（分子量３２）の透過速度に対して、例えば水
分子（分子量１８）の透過速度は、酸素の透過速度の約
１．３倍となる。これにより、酸素の透過速度が判れ
ば、他の分子、例えば二酸化炭素やアンモニアなどの透
過速度も求めることが可能となる。Further, in the phenomenon of molecular diffusion in a substance such as a synthetic resin, when the passage diameter in the substance is smaller than the mean free path of the diffusing molecule, the diffusion of the molecule is due to the Knudsen diffusion process. The diffusion rate of molecules is
It will be proportional to the square root of the reciprocal of the molecular weight. That is, for example, the permeation rate of water molecules (molecular weight 18) is about 1.3 times the permeation rate of oxygen (molecular weight 32). Thus, if the oxygen permeation rate is known, the permeation rates of other molecules such as carbon dioxide and ammonia can be obtained.
【００２３】なお、上記説明は、大気中に設置される超
純水供給用の配管系、すなわち、配管外部側の対象ガス
の分圧が高い場合を対象として説明したが、配管内部側
の対象ガスの分圧が高い場合でも同様にして配管の漏洩
状態を求めることができる。例えば、配管中に所定濃度
の二酸化炭素を溶存した液体を導入するとともに、配管
の他方で液体中の二酸化炭素濃度を測定し、両者の二酸
化炭素濃度を比較することにより、配管内から外部に漏
洩する二酸化炭素量を求めることができる。そして、前
述のように、該二酸化炭素の漏洩状態から水等の他の成
分の漏洩状態も知ることができ、配管の設計や設備管理
を効率よく行うことができる。In the above description, the pipe system for supplying ultrapure water installed in the atmosphere, that is, the case where the partial pressure of the target gas on the outside of the pipe is high, has been described. Even if the partial pressure of the gas is high, the leak state of the pipe can be similarly obtained. For example, while introducing a liquid in which a predetermined concentration of carbon dioxide is dissolved into the pipe, measuring the carbon dioxide concentration in the liquid on the other side of the pipe, and comparing the carbon dioxide concentrations of the two, leakage from the inside of the pipe to the outside The amount of carbon dioxide to be consumed can be calculated. Then, as described above, the leakage state of other components such as water can be known from the leakage state of the carbon dioxide, and the piping design and facility management can be efficiently performed.
【００２４】図５は、本発明装置の一実施例を示す概略
系統図であって、純水中の溶存酸素濃度を低減する溶存
酸素低減装置１１から純水使用部門１２に純水を供給す
る配管１３の漏洩状態を検査するための装置構成の一例
を示すものである。前記配管１３の純水導入側には、純
水流量を制御するための流量制御弁１４と流量計１５と
が設けられており、配管１３の出口側には、弁１６を備
えたサンプリング管１７を介して溶存酸素濃度測定手段
である分析器１８が接続されている。FIG. 5 is a schematic system diagram showing an embodiment of the apparatus of the present invention, in which pure water is supplied from the dissolved oxygen reducing apparatus 11 for reducing the dissolved oxygen concentration in pure water to the pure water using section 12. 3 shows an example of a device configuration for inspecting a leak state of the pipe 13. A flow control valve 14 and a flow meter 15 for controlling the pure water flow rate are provided on the pure water introduction side of the pipe 13, and a sampling pipe 17 having a valve 16 is provided on the exit side of the pipe 13. An analyzer 18, which is a dissolved oxygen concentration measuring means, is connected via the.
【００２５】このように構成して連続的に、あるいは定
期的に配管１３出口側の溶存酸素濃度を測定することに
より、その変動状態から配管１３の異常、例えば疲労に
よる極微小なクラックの発生等を早期に発見することが
でき、純水使用部門１２における溶存酸素濃度増加によ
る製品への影響、例えば歩留まりの低下を防止できると
ともに、水漏れ等の事故も未然に防止でき、配管１３の
保守、交換時期を適確に知ることができる。With such a configuration, the dissolved oxygen concentration at the outlet side of the pipe 13 is measured continuously or periodically, so that the fluctuation of the pipe 13 causes abnormalities in the pipe 13, for example, generation of minute cracks due to fatigue. Can be detected early, the influence on the product due to the increase in the dissolved oxygen concentration in the pure water use section 12, for example, the decrease in yield can be prevented, and accidents such as water leakage can be prevented in advance, and maintenance of the pipe 13 can be performed. You can know exactly when to replace.
【００２６】なお、溶存酸素濃度測定手段は、通常は、
純水使用部門の近傍に設ければよいが、配管系の長さや
系統数等に応じて複数箇所に設けてもよく、配管入口側
と出口側の両端部に設けて両者の測定値の比較を行うよ
うにしてもよい。The dissolved oxygen concentration measuring means is usually
It may be installed in the vicinity of the department using pure water, but it may be installed in multiple locations depending on the length of the piping system, the number of systems, etc. May be performed.
【００２７】[0027]
【発明の効果】以上説明したように、本発明の配管の検
査方法によれば、液体を供給する配管内外の圧力差（対
象ガスの分圧差）により配管材料を透過する各種分子、
例えば酸素の透過量等を確実に知ることができるので、
例えば、溶存酸素濃度を管理する必要がある純水を供給
する配管系における溶存酸素濃度の増加を簡単な実験で
求めることが可能となり、配管系の設計を適性に行うこ
とができ、配管設備のコスト低減を図れるとともに、溶
存酸素濃度の増加による製品歩留まりの低下も防止する
ことができる。As described above, according to the pipe inspection method of the present invention, various molecules that permeate the pipe material due to the pressure difference (the partial pressure difference of the target gas) inside and outside the pipe for supplying the liquid,
For example, you can know the amount of oxygen permeation, etc.
For example, it is possible to obtain an increase in the dissolved oxygen concentration in a piping system that supplies pure water that needs to control the dissolved oxygen concentration by a simple experiment, and to appropriately design the piping system, The cost can be reduced, and the reduction in product yield due to the increase in dissolved oxygen concentration can be prevented.
【００２８】また、本発明の配管の検査装置によれば、
配管を通して供給される純水中の溶存酸素濃度の増加か
ら配管系の異常を早期に発見することができ、超純水使
用箇所での溶存酸素濃度の増加による事故や水漏れ等の
事故を未然に防止することができる。According to the pipe inspection apparatus of the present invention,
Abnormalities in the piping system can be detected early from an increase in the dissolved oxygen concentration in the pure water supplied through the piping, and accidents such as water leaks and other accidents due to an increase in the dissolved oxygen concentration at the places where ultrapure water is used can occur Can be prevented.
【図１】 本発明方法を実施する実験装置の一例を示す
系統図である。FIG. 1 is a system diagram showing an example of an experimental apparatus for carrying out the method of the present invention.
【図２】 流量変化に対する溶存酸素濃度測定値の変化
を示す図である。FIG. 2 is a diagram showing a change in a measured value of a dissolved oxygen concentration with respect to a change in a flow rate.
【図３】 流量と溶存酸素濃度との関係を示す図であ
る。FIG. 3 is a diagram showing a relationship between a flow rate and a dissolved oxygen concentration.
【図４】 流量の逆数と溶存酸素濃度との関係を示す図
である。FIG. 4 is a diagram showing the relationship between the reciprocal of the flow rate and the dissolved oxygen concentration.
【図５】 本発明装置の一実施例を示す概略系統図であ
る。FIG. 5 is a schematic system diagram showing an embodiment of the device of the present invention.
１…配管、２…溶存酸素低減装置、３…分析器、３２…
測定セル、３３…流量計、３４…制御部、３５…レコー
ダー、４…タンク １１…溶存酸素低減装置、１２…純水使用部門、１３…
配管、１４…流量制御弁、１５…流量計、１８…分析器1 ... Piping, 2 ... Dissolved oxygen reduction device, 3 ... Analyzer, 32 ...
Measuring cell, 33 ... Flowmeter, 34 ... Control section, 35 ... Recorder, 4 ... Tank 11 ... Dissolved oxygen reduction device, 12 ... Pure water use section, 13 ...
Piping, 14 ... Flow control valve, 15 ... Flow meter, 18 ... Analyzer
Claims (5)
存酸素濃度の純水を導入するとともに、前記配管の他方
における前記純水中の溶存酸素濃度を測定することを特
徴とする配管の検査方法。1. An inspection of a pipe, wherein pure water having a predetermined dissolved oxygen concentration is introduced from one of the pipes to be inspected, and the dissolved oxygen concentration in the pure water in the other pipe is measured. Method.
酸素濃度が、１ｐｐｂ以下であることを特徴とする請求
項１記載の配管の検査方法。2. The pipe inspection method according to claim 1, wherein the dissolved oxygen concentration of pure water introduced from one of the pipes is 1 ppb or less.
徴とする請求項１記載の配管の検査方法。3. The pipe inspection method according to claim 1, wherein the amount of the pure water introduced is varied.
の二酸化炭素が溶存した液体を導入するとともに、前記
配管の他方における前記液体中の二酸化炭素濃度を測定
することを特徴とする配管の検査方法。4. An inspection of a pipe, wherein a liquid in which carbon dioxide having a predetermined concentration is dissolved is introduced from one of the pipes to be inspected, and the carbon dioxide concentration in the liquid in the other pipe is measured. Method.
水を導入する純水供給手段と、前記純水の流量を測定す
る手段と、前記配管の他方における前記純水中の溶存酸
素濃度を測定する溶存酸素濃度測定手段とを備えたこと
を特徴とする配管の検査装置。5. A pure water supply means for introducing pure water having a predetermined dissolved oxygen concentration from one of the pipes, a means for measuring the flow rate of the pure water, and a dissolved oxygen concentration in the pure water in the other pipe. And a dissolved oxygen concentration measuring means for measuring the temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13221894A JP3407085B2 (en) | 1994-06-14 | 1994-06-14 | Piping inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13221894A JP3407085B2 (en) | 1994-06-14 | 1994-06-14 | Piping inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07333096A true JPH07333096A (en) | 1995-12-22 |
| JP3407085B2 JP3407085B2 (en) | 2003-05-19 |
Family
ID=15076155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13221894A Expired - Fee Related JP3407085B2 (en) | 1994-06-14 | 1994-06-14 | Piping inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3407085B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005274400A (en) * | 2004-03-25 | 2005-10-06 | Kurita Water Ind Ltd | Ultrapure water evaluating apparatus and ultrapure water manufacturing system |
| CN102564713A (en) * | 2012-02-09 | 2012-07-11 | 昆明川金诺化工股份有限公司 | Method for detecting leakage of tube nest of sulfuric acid heat exchanger |
| CN108351272A (en) * | 2015-10-06 | 2018-07-31 | 英福康有限责任公司 | The fluctuation of detection test gas during sniff leakage is searched |
| CN111128417A (en) * | 2020-01-14 | 2020-05-08 | 长沙理工大学 | Method for diagnosing leakage of steam generator of nuclear power plant |
-
1994
- 1994-06-14 JP JP13221894A patent/JP3407085B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005274400A (en) * | 2004-03-25 | 2005-10-06 | Kurita Water Ind Ltd | Ultrapure water evaluating apparatus and ultrapure water manufacturing system |
| JP4507659B2 (en) * | 2004-03-25 | 2010-07-21 | 栗田工業株式会社 | Evaluation method of ultrapure water |
| CN102564713A (en) * | 2012-02-09 | 2012-07-11 | 昆明川金诺化工股份有限公司 | Method for detecting leakage of tube nest of sulfuric acid heat exchanger |
| CN108351272A (en) * | 2015-10-06 | 2018-07-31 | 英福康有限责任公司 | The fluctuation of detection test gas during sniff leakage is searched |
| CN108351272B (en) * | 2015-10-06 | 2021-01-26 | 英福康有限责任公司 | Detecting fluctuations in test gas during sniffing leak seeking |
| CN111128417A (en) * | 2020-01-14 | 2020-05-08 | 长沙理工大学 | Method for diagnosing leakage of steam generator of nuclear power plant |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3407085B2 (en) | 2003-05-19 |
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