JPH0733208A - Load storing facility - Google Patents

Abstract

PURPOSE:To improve storing efficiency of a shelf and also aim at making the whole device compact by making a storage unit freely storable by means of inclining a load towards the further end and moving in and out a take-in take-out tool along the inclining direction of the storage unit. CONSTITUTION:A take-in take-out tool is caused to face a storage unit 3 at the time of take-out operation by combining the traveling motion of a machine body and the elevating motion of an elevating body 13. When an output shaft 25 is then made to turn by an arm driving device 24 and causing a No.1 link 28 to turn to other side above a rotation table 16 around an inclined shaft center 18, the playing end side of a No.2 link body 31 is shook out to the other outer side against the rotation table 16 by a chain 38 or the like. A load supporting unit 22 then is caused to make a protruding motion to the side by causing it to make a linear motion in the lateral direction by the rotation of an intermediate shaft 29. Under this state, the load supporting unit 22 is lifted up by raising it up a little and abut it on the inclined base of a container 6. The load supporting unit 22 is then stored on the rotation table 16 by its rotation to one direction of the output shaft 25. A series of take-out operation in finished by carrying out traveling motion and load delivery motion thereafter.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load storage facility that handles, for example, a container containing a semiconductor (wafer) as a load.

[0002]

2. Description of the Related Art Conventionally, as this type of equipment, for example, a load storage device disclosed in Japanese Patent Laid-Open No. 61-92613 has been provided. This conventional configuration has a shelf having a plurality of compartment storage spaces and a loading / unloading device. The loading / unloading device has a load holder that can be horizontally withdrawn on an elevating table. The space is configured to support the load while being inclined by the load receiving base. The load to be handled is formed by a case in which a large number of semiconductors and the like are accommodated side by side, and an engaged portion with which the load holder can be engaged is provided on the upper part of the case.

According to this conventional structure, the load holder is opposed to the compartment storage space, and the combined operation of the vertical movement of the lift table and the horizontal movement of the load holder is performed. The load holder can be engaged with and disengaged from the locked portion, and the load can be put in and taken out from the compartment storage space. By providing an inclined locking member on the load holder, the case is supported in an inclined manner in the elevating table, and the shelf is transferred to the receiving table by inclining the case.

As another conventional example, a tilting stand is provided on the shelf side, and a tilting receiver is provided on the upper surface of the fork that acts on the load from below, so that all of the delivery and storage are performed. It is considered that the case is tilted.

[0005]

According to the structure in which the conventional cradle and the tilt stand are provided, the space for raising and lowering the fork formed in the upper part of each compartment storage space is used for the cradle and the tilt. Since the height of the receiving tool must be included, it is required to be high, and thus the size of the shelf is increased, in other words, the storage efficiency is poor with respect to the scale. Further, the loading / unloading device requires a width corresponding to the stroke of the fork body to move in and out, which leads to an increase in the size of the entire equipment.

An object of the present invention is to provide a load storage facility which can improve the storage efficiency of shelves and can make the whole including the loading / unloading device compact.

[0007]

In order to achieve the above object, the load storage equipment of the first aspect of the present invention comprises a shelf and a loading and unloading device, and the shelf is a storage section which can store a load inclining in the depth direction. The loading / unloading device is configured to move the loading / unloading device for loading / unloading a load along the tilting direction of the storage portion.

In the load storage equipment of the second aspect of the present invention, the loading / unloading device comprises an elevating body and a loading / unloading tool provided on the lifting body, and the loading / unloading tool is arranged with respect to the inclination direction of the storage section. It is composed of a middle-bending arm device having a base end arranged to rotate around an inclined axis in the orthogonal direction and arranged on the lifting body, and a load support portion connected to a free end of the middle-bending arm device. There is.

[0009]

According to the structure of the first aspect of the present invention described above, the load can be stored in the storage portion in the shelf in a predetermined inclined posture. Further, the loading / unloading device moves the loading / unloading tool back and forth when carrying out the shipping operation. In this state, the loading / unloading device can be made to face the intended storage portion by the operation of the loading / unloading device. Then, the loading / unloading device can be moved downward so as to be positioned below the load. In this case, the projecting movement is carried out along the tilt direction, whereby the loading / unloading device can be positioned below the load being tilt-supported and along the tilted bottom surface.

In this state, the loading / unloading tool can be lifted a little while keeping the tilted posture and brought into contact with the tilted bottom surface of the load from below, so that the load can be lifted without shaking. The load can be positioned in the loading / unloading device while maintaining the tilted posture by the retracting movement of the loading / unloading device. This completes a series of shipping operations. By performing the operation opposite to that described above, the loading / unloading device can store the load in the intended storage portion in an inclined posture.

Further, according to the structure of the second aspect of the present invention, in carrying out the warehousing work, the loading / unloading device can completely store the load supporting portion in the loading / unloading device by the middle folding movement of the middle folding arm device. Then, the loading / unloading tool is made to face the intended storage part. At that time, the loading / unloading device is rotated around the tilt axis as required, so that the free end of the load support part is moved to either of the left and right sides. It can be on the shelf and facing the intended storage.

Then, the load-supporting portion can be caused to project in the inclination direction by the extension movement of the middle-bending arm device, and the load-supporting portion can be positioned below the load supported on the inclination and along the inclined bottom surface. Then, after the load is lifted by the load support unit, the middle-bending arm device can be bent in the middle to position the load in the loading / unloading device.

[0013]

An embodiment of the present invention will be described below with reference to the drawings. 1 is a shelf, in a frame main body 2 including columns,
A plurality of storage units 3 are formed in the vertical direction and the horizontal direction. Each storage unit 3 is partitioned and formed by receiving members 4 that are provided at predetermined intervals in the vertical direction and the horizontal direction and that form a pair in the horizontal direction. Further, each storage unit 3 is configured by inclining the receiving member 4 so that the front surface side of the shelf 1 is lower so that the load is stored in the depth direction 5 in an inclined manner. The load that can be stored in each storage unit 3 is, for example, a container 6 containing a semiconductor (wafer), and is handled in an inclined shape so that the wafer does not move inside.

A pair of the shelves 1 are arranged side by side with a passage 8 therebetween, and a loading and unloading device 9 is arranged outside the ends of the shelves 1 and a loading and unloading device 10 is arranged in the passage 8. There is.
This loading / unloading device 10 is a body 11 that can run freely in the passage 8.
And the post 12 standing upright from this aircraft 11, and this post 12
The lifting / lowering body 13 is supported and guided by the lifting / lowering body 13 and the loading / unloading tool 20 provided on the lifting / lowering body 13.

The lifting body 13 includes a vertical member 13A and a horizontal member 13B.
Is formed in an L shape in a side view by the above, and a rotary table 16 which is rotatable around a vertical axis 15 via a bearing 14 is provided on an upper portion of the lateral member 13B.
A table drive device 17 interlocking with 16 is provided in the lateral member 13B. Further, the loading / unloading tool 20 is provided on the turntable 16 so as to be rotatable around an inclination axis 18 that is orthogonal to the inclination direction of the storage section 3.

The loading / unloading device 20 is composed of a middle folding arm device 21 having its base end attached to the rotary table 16 and a load supporting portion 22 connected to the free end of the middle folding arm device 21. That is, the upper surface of the rotary table 16 has an inclined axis 18
Is formed on an inclined upper surface that is orthogonal to, and a cylindrical body 23 centered on the inclined axis 18 is fixed to the inclined upper surface. Then, while fixing the arm drive device 24 to the back side of the rotary table 16, the output shaft 25 from the arm drive device 24 is
It is positioned on the tilt axis 18 and is inserted through the tubular body 23.

The center bending arm device 21 has a base end externally fitted to the tubular body 23 via a bearing 26 and is linked to an output shaft 25 from the rotary table 16 side via a connecting member 27. body
28 and the free end of the first link body 28, the intermediate shaft 29 and the bearing
A second link body 31 whose base ends are rotatably connected to each other via 30 and a base end of which is relatively rotatable to the free end of the second link body 31 via an operating shaft 32 and a bearing 33. And the plate-shaped load supporting portion 22 connected to the.

Both link bodies 28 and 31 are formed in a case shape, and a transmission mechanism 35 is interposed inside. That is, the transmission mechanism 35 includes the first toothed wheel 36 fixed to the tubular body 23,
A second toothed wheel 37 fixed to the lower part of the intermediate shaft 29 and a first toothed wheel
A first chain 38 that links 36 and a second toothed wheel 37, a third toothed wheel 39 fixed to the upper portion of the intermediate shaft 29, a fourth toothed wheel 40 fixed to the actuating shaft 32, and a third toothed wheel. It is composed of a second chain 41 that links the wheel 39 and the fourth tooth wheel 40.

Next, the operation of loading and unloading the container 6 in the above embodiment will be described. In the shelf 1, the container 6 is stored in the storage portion 3, and at this time, the container 6 is in a predetermined inclined posture as shown in FIG. 1 due to the inclined arrangement of the receiving member 4. In carrying out the warehousing operation, in the loading / unloading device 10, as shown by the solid line in FIG. 2, the first link body 28 is moved to one side on the rotary table 16 by rotating the output shaft 25 to one side by the operation of the arm driving device 24. And the second link body 31 is housed on one end side of the rotary table 16, so that the load support portion 22 is completely housed on the rotary table 16.

In this state, the traveling movement of the machine body 11 and the ascending / descending movement of the elevating / lowering body 13 cause the loading / unloading tool 20 to face the intended storage portion 3 as shown by the solid line in FIG. 2 and FIG. At that time, if necessary, turntable 16
Is rotated 180 degrees about the vertical axis 15 by the operation of the table drive device 17 so that the free end of the load supporting portion 22 faces one of the shelves 1 and the intended storage portion 3. At this time, the tilt axis 18 is positioned in a direction orthogonal to the intended tilt direction of the storage section 3.

Next, when the output shaft 25 is rotated to the other side by the reverse operation of the arm driving device 24 and the first link body 28 is rotated to the other side on the rotary table 14 around the tilt axis 18, the first link body 28 is rotated.
The intermediate shaft 29 is rotated to the side opposite to the output shaft 25 through the toothed wheel 36, the second toothed wheel 37, and the first chain 38,
As a result, the free end side of the second link body 31 is swung to the outside of the rotary table 16 on the other side.

The rotation of the intermediate shaft 29 causes the third toothed wheel 39 to rotate.
And the operating shaft 32 through the fourth tooth ring 40 and the second chain 41.
Is rotated to the same side as the output shaft 25, whereby the load supporting portion 22 accommodated on the rotary table 16 is linearly moved in the lateral direction so as to project to the side of the rotary table 16.
At that time, the projecting movement is performed in the direction along the inclination direction, whereby the load supporting portion 22 is below the container 6 which is inclined and along the inclined bottom surface, as shown by the solid line in FIG. To position.

In this state, the elevating body 13 is slightly raised, and the load supporting portion 22 is raised between the receiving members 4 in an inclined posture so that the load supporting portion 22 is brought into contact with the inclined bottom surface of the container 6 from below. The container 6 is lifted without shaking by. Then, by rotating the output shaft 25 to one side, as described above, the load supporting portion 22
Can be completely accommodated on the rotary table 16, so that the container 6 is positioned on the rotary table 16 while maintaining the inclined posture.

After that, the container 6 can be passed to the loading and unloading device 9 by performing the traveling movement of the loading and unloading device 10 and the passing operation of the loading and unloading device 20, and the series of unloading work is completed. By performing the operation opposite to that described above, the loading / unloading device 10 can load the container 6 received from the material handling device 9 into the intended storage part 3. Similarly, for the shelf 1 on the opposite side,
As shown in the phantom line, the load supporting portion 22 can be positioned below the container 6 that is supported in an inclined manner and along the inclined bottom surface.

In the above embodiment, the form having the center folding device 21 as the loading / discharging device 20 is shown, but in the first aspect of the present invention, a normal multistage fork type may be used. Further, in the above embodiment, the loading / unloading tool 20 is provided on the rotary table 16 and the loading / unloading tool 20 is configured to act on the shelves 1 on both sides. However, in the first invention, the loading / unloading tool 20 is not rotated. Alternatively, the configuration may be such that only one of the shelves 1 is operated.

[0026]

According to the first aspect of the present invention having the above-described structure, since the loading / unloading movement of the loading / unloading tool to / from the storage portion is performed along the inclination direction, it is formed between the upper and lower sides of the load which is tilted and supported by the storage portion. The working space for the loading / unloading tool can be reduced, and the shelf can be made compact, that is, the storage efficiency can be improved. Then, in any of the shelf and the loading and unloading device, the load can be in a predetermined inclined posture, and
The loading and unloading with the loading / unloading tool can be performed in a predetermined tilted posture and without shaking.

Further, according to the structure of the second aspect of the present invention, due to the presence of the middle folding arm device, the total length of the loading / unloading device stored in the lifting body can be shortened, and thus the width of the loading / unloading device can be reduced and the entire equipment can be made compact. it can.

[Brief description of drawings]

FIG. 1 is a front view of a main part of a load storage facility according to an embodiment of the present invention.

FIG. 2 is a plan view of a main part of the same cargo storage facility.

FIG. 3 is a schematic plan view of the same cargo storage facility.

[Explanation of symbols]

 1 Shelf 2 Frame main body 3 Storage section 4 Receiving member 5 Depth direction 6 Container (load) 10 Loading / unloading device 12 Post 13 Elevating body 15 Vertical axis 16 Rotating table 17 Table drive 18 Inclination axis 20 Loading / unloading tool 21 Middle folding arm Device 22 Cargo support 24 Arm drive 28 First link 31 Second link

Claims (2)

[Claims] 1. A shelf and a loading / unloading device, wherein the shelf has a storage section that can store a load inclining in a depth direction.
The loading / unloading device includes a loading / unloading tool for loading / unloading a load,
A load storage facility characterized in that it is configured to move in and out along an inclination direction of the storage section. 2. The loading / unloading device is composed of a lifting body and a loading / unloading tool provided on the lifting body, and the loading / unloading tool is provided around an inclination axis in a direction orthogonal to the tilting direction of the storage section. 2. A middle-branch arm device having a base end which is arranged to be pivoted on the elevating body, and a load support portion connected to a free end of the middle-branch arm device. Load storage equipment.