JPH073310Y2 - 半導体差圧測定装置 - Google Patents

半導体差圧測定装置

Info

Publication number
JPH073310Y2
JPH073310Y2 JP14041288U JP14041288U JPH073310Y2 JP H073310 Y2 JPH073310 Y2 JP H073310Y2 JP 14041288 U JP14041288 U JP 14041288U JP 14041288 U JP14041288 U JP 14041288U JP H073310 Y2 JPH073310 Y2 JP H073310Y2
Authority
JP
Japan
Prior art keywords
diaphragm
chamber
measurement
sensor chip
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14041288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260837U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
賢一 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP14041288U priority Critical patent/JPH073310Y2/ja
Publication of JPH0260837U publication Critical patent/JPH0260837U/ja
Application granted granted Critical
Publication of JPH073310Y2 publication Critical patent/JPH073310Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP14041288U 1988-10-27 1988-10-27 半導体差圧測定装置 Expired - Lifetime JPH073310Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14041288U JPH073310Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14041288U JPH073310Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Publications (2)

Publication Number Publication Date
JPH0260837U JPH0260837U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-05-07
JPH073310Y2 true JPH073310Y2 (ja) 1995-01-30

Family

ID=31404556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14041288U Expired - Lifetime JPH073310Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Country Status (1)

Country Link
JP (1) JPH073310Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0260837U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-05-07

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