JPH07326852A - Solder bump forming device - Google Patents

Solder bump forming device

Info

Publication number
JPH07326852A
JPH07326852A JP12012294A JP12012294A JPH07326852A JP H07326852 A JPH07326852 A JP H07326852A JP 12012294 A JP12012294 A JP 12012294A JP 12012294 A JP12012294 A JP 12012294A JP H07326852 A JPH07326852 A JP H07326852A
Authority
JP
Japan
Prior art keywords
solder
substrate
cream solder
bump forming
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12012294A
Other languages
Japanese (ja)
Other versions
JP3240831B2 (en
Inventor
Seiji Sakami
省二 酒見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12012294A priority Critical patent/JP3240831B2/en
Publication of JPH07326852A publication Critical patent/JPH07326852A/en
Application granted granted Critical
Publication of JP3240831B2 publication Critical patent/JP3240831B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494Heating methods for reflowing of solder

Abstract

PURPOSE:To provide a solder bump forming device generating no bridge which becomes the cause of short circuit by the fused cream solder flowing to sideways when a bump is formed by heat-melting the cream solder on the electrode of a substrate. CONSTITUTION:The solder bump forming device is composed of a conveyor 4 which conveys a substrate 5 where cream solder 7 is applied on an electrode from the inlet 2 of a heating furnace 1 toward the outlet, preheating heaters 10 and 11 with which the substrate 5 is heated up close to the temperature at which the cream solder 7 is fused, and a heat source 12 with which the cream solder 7 is heated up by a small number of quantity to its fusing temperature or higher by projecting heat ray R to the heated cream solder 7. Accordingly, the cream solder 7 is not fused simultaneously, and as it is fused little by little, no bridge is generated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、基板の電極上に形成さ
れたクリーム半田や半田ボールなどの半田部を加熱溶融
させて半田バンプを形成する半田バンプの形成装置に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solder bump forming apparatus for forming a solder bump by heating and melting a solder portion such as cream solder or a solder ball formed on an electrode of a substrate.

【0002】[0002]

【従来の技術】基板の表面の電極上にバンプ(突出電
極)を形成する工程は、スクリーン印刷装置により電極
上にスポット的にクリーム半田を塗布するか、あるいは
電極上に半田ボールを搭載するなどして半田部を形成す
る工程と、基板をリフロー装置へ送って加熱することに
よって半田部を溶融させ、次いで冷却することにより固
化させる工程から成っている。
2. Description of the Related Art In the process of forming bumps (protruding electrodes) on electrodes on the surface of a substrate, cream solder is applied spotwise on the electrodes by a screen printing device, or solder balls are mounted on the electrodes. Then, a step of forming a solder portion and a step of sending the substrate to a reflow device to heat the substrate to melt the solder portion and then cooling to solidify the solder portion are included.

【0003】リフロー装置は、例えば特開平2−235
568号公報に示されるように、加熱炉の内部にヒー
タ、ファン、コンベアを配設して構成されており、コン
ベアにより基板を本体ボックスの入口から出口へ向って
搬送しながら、ファンにより熱風を基板に吹き当てて、
半田部をその溶融温度以上まで加熱して溶融させるよう
になっている。
A reflow apparatus is disclosed in, for example, Japanese Patent Laid-Open No. 2-235.
As disclosed in Japanese Patent No. 568, a heater, a fan, and a conveyor are arranged inside a heating furnace, and while the substrate is conveyed from the inlet to the outlet of the main body box by the conveyor, hot air is blown by the fan. Spray it onto the board,
The solder portion is heated to the melting temperature or higher to melt it.

【0004】[0004]

【発明が解決しようとする課題】基板には多数個の半田
部が互いに接近した位置に高密度で形成されているが、
従来のリフロー装置ではこれらの多数個の半田部が同時
に溶融温度まで加熱されて一斉に溶融するため、作業能
率がよいという利点があるものの、溶融した半田部が側
方へ流れ出し、相隣る半田部同士がつながって短絡の原
因となるブリッジが生じやすいという問題点があった。
A large number of solder portions are formed in high density at positions close to each other on a board.
In the conventional reflow equipment, these many solder parts are heated to the melting temperature at the same time and melted all at once, so that there is an advantage that the work efficiency is good, but the melted solder parts flow out to the side and the adjacent solder parts There has been a problem that a bridge that easily connects the parts and causes a short circuit easily occurs.

【0005】そこで本発明は上記従来の問題点を解消
し、ブリッジの生じにくい半田バンプの形成装置を提供
することを目的とする。
Therefore, an object of the present invention is to solve the above-mentioned conventional problems and to provide a solder bump forming apparatus in which bridging is less likely to occur.

【0006】[0006]

【課題を解決するための手段】このために本発明は、加
熱炉と、この加熱炉の入口から出口へ向って電極上に半
田部が形成された基板を搬送するコンベアと、この基板
を半田部の溶融温度近くまで加熱する予熱ヒータと、溶
融温度近くまで加熱された半田部に熱線を所定の照射幅
で照射することにより、半田部を少数個づつ溶融温度以
上まで加熱して溶融させる加熱源とから半田バンプの形
成装置を構成したものである。
To this end, the present invention is directed to a heating furnace, a conveyor for carrying a substrate having a solder portion formed on an electrode from an inlet to an outlet of the heating furnace, and a solder for the substrate. The preheater that heats the solder to a temperature close to the melting temperature and the solder that has been heated to a temperature near the melting temperature are irradiated with heat rays with a specified irradiation width to heat the solder to a small number above the melting temperature to melt it. A solder bump forming apparatus is configured from a source.

【0007】[0007]

【作用】上記構成において、予熱ヒータにより半田部を
溶融温度近くまで加熱し、次いで加熱源により半田部を
少数個づつ溶融温度以上まで加熱して溶融させ、バンプ
を形成する。
In the above structure, the preheating heater heats the solder portion to a temperature close to the melting temperature, and then a small number of the solder portions are heated to a melting temperature or higher to melt the solder portion to form bumps.

【0008】[0008]

【実施例】次に、図面を参照しながら本発明の一実施例
を説明する。図1は本発明の一実施例の半田バンプの形
成装置の断面図、図2は同半田バンプの形成装置の部分
拡大側面図、図3は同半田バンプの形成装置によるバン
プの形成工程の説明図である。図1において、1は加熱
炉であって、その前面には入口2が開口されており、ま
たその後面には出口3が開口されている。4はコンベア
であって、基板5を入口2から出口3へ向って搬送す
る。図2に示すように、クリーム半田7(半田部)は基
板5の上面に高密度でマトリックス状に多数個形成され
た電極8上に塗布されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will now be described with reference to the drawings. 1 is a sectional view of a solder bump forming apparatus according to an embodiment of the present invention, FIG. 2 is a partially enlarged side view of the solder bump forming apparatus, and FIG. 3 is a description of a bump forming process by the solder bump forming apparatus. It is a figure. In FIG. 1, reference numeral 1 is a heating furnace, and an inlet 2 is opened in the front surface thereof, and an outlet 3 is opened in the rear surface thereof. A conveyor 4 conveys the substrate 5 from the entrance 2 to the exit 3. As shown in FIG. 2, the cream solder 7 (solder portion) is applied on the electrodes 8 formed in high density on the upper surface of the substrate 5 in a matrix.

【0009】図1において、コンベア4の上方には第1
の予熱ヒータ10が配設されており、また下方には第2
の予熱ヒータ11が配設されている。第1の予熱ヒータ
10と第2の予熱ヒータ11は、基板5をクリーム半田
7の溶融温度近くまで加熱する。半田の溶融温度は一般
に183℃程度であり、したがって第1の予熱ヒータ1
0と第2の予熱ヒータ11は、クリーム半田7が150
〜170℃程度になるように基板5を加熱する。
In FIG. 1, a first unit is provided above the conveyor 4.
Is provided with a preheater heater 10 and a second heater is provided below.
The preheater 11 is provided. The first preheater 10 and the second preheater 11 heat the substrate 5 to near the melting temperature of the cream solder 7. The melting temperature of the solder is generally about 183 ° C., and therefore the first preheater 1
0 and the second preheater 11 have the cream solder 7 of 150
The substrate 5 is heated to about 170 ° C.

【0010】加熱炉1のやや後部には加熱源12が設け
られている。13は加熱源12の上方に配設された反射
板である。この加熱源12は、例えばレーザ照射器や集
光させた赤外線照射器であって、上方からクリーム半田
7に熱線Rを照射し、クリーム半田7を急速加熱する。
この加熱源12は、基板5の搬送方向Nにおいて、所定
の照射幅D(図2)を有しており、したがって熱線Rは
すべてのクリーム半田7に同時に照射されず、少数個の
クリーム半田7毎に照射される。加熱炉1の出口3の直
前にはファン14が設けられており、ファン14と加熱
源12は仕切壁15で仕切られている。16はファン1
4を回転させるモータである。このファン14が回転す
ることにより、基板5に風を吹き当てて基板5を冷却す
る。
A heating source 12 is provided at a slightly rear portion of the heating furnace 1. Reference numeral 13 is a reflecting plate disposed above the heating source 12. The heating source 12 is, for example, a laser irradiator or a focused infrared irradiator, and irradiates the cream solder 7 with a heat ray R from above to rapidly heat the cream solder 7.
This heating source 12 has a predetermined irradiation width D (FIG. 2) in the transfer direction N of the substrate 5, so that the heat ray R is not irradiated to all the cream solders 7 at the same time, and a small number of the cream solders 7 are formed. It is irradiated every time. A fan 14 is provided immediately before the outlet 3 of the heating furnace 1, and the fan 14 and the heating source 12 are partitioned by a partition wall 15. 16 is fan 1
4 is a motor that rotates. When the fan 14 rotates, air is blown onto the substrate 5 to cool the substrate 5.

【0011】この半田バンプの形成装置は上記のように
構成されており、次に動作を説明する。基板5はコンベ
ア4により加熱炉1の入口2から出口3へ向って搬送さ
れ、その間に、第1の予熱ヒータ10と第2の予熱ヒー
タ11により、基板5はクリーム半田7の溶融温度近く
である150〜170℃程度まで徐々に加熱される。次
にクリーム半田7は加熱源12の下方を通過するが、そ
の際、加熱源12から熱線Rが照射されることにより、
クリーム半田7は溶融温度(183℃)以上まで急速に
加熱される。当初、クリーム半田7は図3(a)に示す
ように断面角形状であるが、加熱源12の熱線に加熱さ
れて溶融することにより、図3(b)に示すように形が
崩れて不定形となる。続いて溶融したクリーム半田7は
自身の表面張力により半球形となる(図3(c))。次
に基板5はファン14の下方を通過するが、その際、風
が吹き当てられて冷却され、クリーム半田7は固化して
半球形のバンプ7となり、加熱炉1から送り出される。
The solder bump forming apparatus is constructed as described above, and its operation will be described below. The substrate 5 is conveyed by the conveyor 4 from the inlet 2 to the outlet 3 of the heating furnace 1, while the first preheater 10 and the second preheater 11 keep the substrate 5 close to the melting temperature of the cream solder 7. It is gradually heated up to about 150 to 170 ° C. Next, the cream solder 7 passes under the heating source 12, but at this time, the heating wire 12 irradiates the heat ray R,
The cream solder 7 is rapidly heated to the melting temperature (183 ° C.) or higher. Initially, the cream solder 7 has a square cross-section as shown in FIG. 3A, but when it is heated by the heating wire of the heating source 12 and melted, the shape is collapsed as shown in FIG. It becomes a fixed form. Subsequently, the melted cream solder 7 becomes a hemisphere due to its own surface tension (FIG. 3C). Next, the substrate 5 passes below the fan 14, at which time the air is blown to cool the cream solder 7, and the cream solder 7 solidifies into hemispherical bumps 7 and is sent out from the heating furnace 1.

【0012】上記動作において、図2に示すように、熱
線Rには一定の照射幅Dがある。したがって熱線Rはす
べてのクリーム半田7に同時に照射されず、少数個のク
リーム半田7毎、望ましくは1ケ所のクリーム半田7毎
に照射される。このためすべてのクリーム半田7は同時
に一斉には溶融せず、横一列毎に少数個づつ溶融するの
で、ブリッジは生じにくいものであり、殊に基板5の搬
送方向Nに相前後するクリーム半田7同士にはブリッジ
は生じにくい。またクリーム半田7が溶融する際には、
コンベア4による基板5の搬送を完全停止させるか、若
しくは搬送速度を低下させてもよいものであり、このよ
うにすることにより、搬送時の振動によって溶融したク
リーム半田7が側方へ流出してブリッジが生じるのをよ
り防止できる。また本発明は第1の予熱ヒータ10や第
2の予熱ヒータ11で熱せられた熱風を基板5に吹き当
てるためのファンの設置を禁止するものではないが、本
実施例のようにファンを除去することが可能であり、し
たがって基板5が熱風にあおられてコンベア4から脱落
したり、基板5が熱風にあおられることによりがたつい
て溶融したクリーム半田7が側方へ流動し、ブリッジが
生じるのを解消できる。
In the above operation, as shown in FIG. 2, the heat ray R has a constant irradiation width D. Therefore, the heat ray R is not applied to all the cream solders 7 at the same time, but is applied to each of the small number of cream solders 7, preferably to each of the cream solders 7 at one place. For this reason, all the cream solders 7 do not melt at the same time at the same time, but a small number of them melt in each horizontal row, so that bridging is unlikely to occur. A bridge is unlikely to occur between them. When the cream solder 7 melts,
The conveyance of the substrate 5 by the conveyer 4 may be completely stopped or the conveyance speed may be reduced. By doing so, the cream solder 7 melted by the vibration during the conveyance flows out to the side. It is possible to further prevent a bridge from occurring. Although the present invention does not prohibit the installation of a fan for blowing the hot air heated by the first preheater 10 and the second preheater 11 onto the substrate 5, the fan is removed as in this embodiment. Therefore, the substrate 5 is hit by the hot air to fall off the conveyor 4, or the cream solder 7 melted due to the substrate 5 being hit by the hot air flows laterally to form a bridge. Can be eliminated.

【0013】本発明は上記実施例に限定されないのであ
って、例えばクリーム半田7に代えて電極8上に半田ボ
ールをフラックスで粘着しこの半田ボールを加熱溶融さ
せてバンプを形成してもよい。また加熱源の個数は何個
でもよいものである。さらに加熱源に所定の直径のスポ
ットレーザ光を照射するレーザ発振器を使用し、このス
ポットレーザ光をクリーム半田へ順次照射して1ケ所づ
つクリーム半田を溶融するように構成してもよい。
The present invention is not limited to the above-described embodiment. For example, instead of the cream solder 7, solder balls may be adhered to the electrodes 8 with flux and the solder balls may be heated and melted to form bumps. The number of heating sources may be any number. Further, a laser oscillator that irradiates a spot laser beam having a predetermined diameter may be used as a heating source, and the spot laser beam may be sequentially irradiated to the cream solder to melt the cream solder one by one.

【0014】[0014]

【発明の効果】以上説明したように本発明によれば、予
熱ヒータにより基板を予め半田部の溶融温度近くまで加
熱し、続いて加熱源の熱線により半田部を加熱して少数
個づつ溶融させることができるので、短絡の原因になる
ブリッジが生じるのを防止しながら、形状のよいバンプ
を形成できる。
As described above, according to the present invention, the substrate is preheated by the preheater to a temperature close to the melting temperature of the solder portion, and then the solder portion is heated by the heating wire of the heating source to melt the solder in small numbers. Therefore, a bump having a good shape can be formed while preventing the occurrence of a bridge that causes a short circuit.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の半田バンプの形成装置の断
面図
FIG. 1 is a sectional view of a solder bump forming apparatus according to an embodiment of the present invention.

【図2】本発明の一実施例の半田バンプの形成装置の部
分拡大側面図
FIG. 2 is a partially enlarged side view of a solder bump forming apparatus according to an embodiment of the present invention.

【図3】本発明の一実施例の半田バンプの形成装置によ
るバンプの形成工程の説明図
FIG. 3 is an explanatory view of a bump forming process by a solder bump forming apparatus according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 加熱炉 2 入口 3 出口 4 コンベア 5 基板 7 クリーム半田(半田部) 8 電極 10 第1の予熱ヒータ 11 第2の予熱ヒータ 12 加熱源 1 Heating Furnace 2 Inlet 3 Outlet 4 Conveyor 5 Substrate 7 Cream Solder (Solder) 8 Electrode 10 First Preheater 11 Second Preheater 12 Heating Source

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】加熱炉と、この加熱炉の入口から出口へ向
って電極上に半田部が形成された基板を搬送するコンベ
アと、この基板を半田部の溶融温度近くまで加熱する予
熱ヒータと、溶融温度近くまで加熱された半田部に熱線
を所定の照射幅で照射することにより、半田部を少数個
づつ溶融温度以上まで加熱して溶融させる加熱源とを備
えたことを特徴とする半田バンプの形成装置。
1. A heating furnace, a conveyor for carrying a substrate having a solder portion formed on an electrode from an inlet to an outlet of the heating furnace, and a preheating heater for heating the substrate to a temperature close to the melting temperature of the solder portion. , A solder characterized by comprising a heating source that heats and melts a small number of solder portions to a melting temperature or higher by irradiating the solder portion heated to near the melting temperature with a heat ray with a predetermined irradiation width. Bump forming device.
JP12012294A 1994-06-01 1994-06-01 Apparatus and method for forming solder bumps Expired - Fee Related JP3240831B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12012294A JP3240831B2 (en) 1994-06-01 1994-06-01 Apparatus and method for forming solder bumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12012294A JP3240831B2 (en) 1994-06-01 1994-06-01 Apparatus and method for forming solder bumps

Publications (2)

Publication Number Publication Date
JPH07326852A true JPH07326852A (en) 1995-12-12
JP3240831B2 JP3240831B2 (en) 2001-12-25

Family

ID=14778515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12012294A Expired - Fee Related JP3240831B2 (en) 1994-06-01 1994-06-01 Apparatus and method for forming solder bumps

Country Status (1)

Country Link
JP (1) JP3240831B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1117323A (en) * 1997-06-23 1999-01-22 Matsushita Electric Ind Co Ltd Reflow equipment of conductive ball

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1117323A (en) * 1997-06-23 1999-01-22 Matsushita Electric Ind Co Ltd Reflow equipment of conductive ball

Also Published As

Publication number Publication date
JP3240831B2 (en) 2001-12-25

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