JPH07324912A - Measuring apparatus of length - Google Patents

Abstract

PURPOSE:To eliminate an error in measurement of length and thereby to improve the accuracy in measurement of length. CONSTITUTION:The apparatus is constituted of a table 1 on the first surface of which a substance 2 to be measured in length is set, a marker plate 4 which is disposed on the second surface side of the table 1 and has markers of a prescribed measuring unit, the first reading means 3 which is disposed on the first surface side of the table 1 and reads at least two arbitrary points on the substance 2 and the second reading means 5 which is disposed on the second surface side of the table 1 and reads values of the markers corresponding to the two points on the marker plate 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scale device, and more particularly,
The present invention relates to a measuring device having improved measuring accuracy.

[0002]

2. Description of the Related Art As a conventional measuring device, for example, FIG.
And shown in FIG. This measuring device includes an XY table 1 that moves in X and Y directions on a base, and an XY table.
The object to be measured 2 placed on the table 1 and the reading device 3 such as a CCD camera arranged on the XY table 1 for reading at least two arbitrary points of the object to be measured 2 with visible light or the like. ing.

In the scale device having the above structure, when the XY table 1 on which the object to be measured 2 is placed moves relative to the reading device 1, the reading device 1 causes the object to be measured 2 to move.
At least two arbitrary points of are read by visible light or the like.
At this time, by separately reading the movement amount of the XY table 1, for example, by reading the scale attached to the base,
It is possible to measure between two points of the object to be measured 2.

[0004]

However, according to the conventional scale measuring device, since the scale attached to the XY table and the base is read, an error occurs in the scale value and the scale accuracy is lowered. There is.

Therefore, an object of the present invention is to provide a measuring device which can improve the measuring accuracy.

[0006]

SUMMARY OF THE INVENTION In view of the above problems, the present invention has a table on which a measured object is placed on a first surface and a second surface side of the table in order to improve measuring accuracy. And a marker plate having a marker of a predetermined scale unit, a first reading unit arranged on the first surface side of the table and reading at least two arbitrary points of the object to be measured, and a first reading unit of the table. Two
And a second measuring means arranged on the surface side of the marker plate for reading the values of the markers corresponding to the two points on the marker plate.

The table and the marker plate described above are common to each other.
Performing a two-dimensional or two-dimensional movement, the first and second reading means are arranged on the same vertical line of the first and second surfaces of the table. Further, instead of moving the table and the marker plate, the table and the marker plate may be fixed and the first and second reading means may be moved one-dimensionally or two-dimensionally.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The measuring device of the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 and FIG. 2 show an embodiment of the measuring device of the present invention. This measuring device includes an XY table 1 that moves in the X and Y directions, an object to be measured 2 (workpiece such as a punch and a lead frame) placed on one surface of the XY table 1, and an object to be measured. A reading device 3 such as a CCD camera that reads at least two arbitrary points of the scale 2 with visible light or the like, and a value of a marker 4A of a marker plate 4 which will be described later and is arranged on the other surface side of the XY table 1 with visible light or the like. It is composed of a reading device 5 such as a CCD camera for reading, and a marker plate 4 arranged between the XY table 1 and the reading device 5 and performing a common motion with the XY table 1.

The marker plate 4 is constructed by having markers 4A on the surface in units of scale (coordinates in this embodiment).

The reading devices 3 and 5 are arranged on the same vertical line on both sides of the XY table 1. The reading values of the reading devices 3 and 5 are calculated by the calculation device 6.

In the scale device having the above-described structure, when the XY table 1 on which the object to be measured 2 is placed is moved in the X and Y directions with respect to the reading devices 3 and 5, the reading device 3 is measured. The reading device 5 reads at least two arbitrary points of the scale 2, the reading device 5 reads the value of the marker 4A corresponding to the arbitrary two points of the measured object 2 of the marker plate 4, and the arithmetic device 6 is based on the read values. Then, the length between two points of the object to be measured 2 is calculated.

As described above, the reading devices 3 and 5 arranged on the same vertical line read two arbitrary points on the object to be measured 2 and the amount of movement of the XY table 1. Even if the XY table 1 is deformed, the measurement error is eliminated, and the measurement accuracy can be improved.

In the above embodiment, the XY table 1 is used.
Although the marker plate 4 is moved, the XY table 1 and the marker plate 4 may be fixed and the reading devices 3 and 5 may be moved. Further, the reading device 5 may be configured by a magnetic sensor that reads the marker plate 4 configured by a magnetic scale.

[0015]

As described above, according to the measuring apparatus of the present invention, the table on which the object to be measured is placed on the first surface and the table arranged on the second surface side of the table are provided with a predetermined size. A marker plate having a marker for each measurement unit, a first reading unit arranged on the first surface side of the table for reading at least two arbitrary points of the object to be measured, and a second reading unit arranged on the second surface side of the table. Is
Since it comprises the second reading means for reading the values of the markers corresponding to the two points on the marker plate, it is possible to improve the measuring accuracy.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is a top view showing an embodiment of the present invention.

FIG. 3 is a side view showing a conventional measuring device.

FIG. 4 is a top view showing a conventional measuring device.

[Explanation of symbols]

 1 XY table 2 object to be measured 3 reader 4 marker plate 4A marker 5 reader 6 arithmetic unit

Claims (3)

[Claims] 1. A table on which a measured object is placed on a first surface, a marker plate arranged on the second surface side of the table and having a marker of a predetermined measuring unit, and a table of the table. First reading means arranged on the first surface side and reading at least two arbitrary points of the object to be measured; and two points on the marker plate arranged on the second surface side of the table. Second reading the value of the marker corresponding to
A measuring device comprising a reading means of. 2. The table and the marker plate perform a common one-dimensional or two-dimensional motion, and the first and second reading means are the first and second ones.
The measuring device according to claim 1, wherein the measuring device is arranged on the same vertical line of the plane of the. 3. The table and the marker plate are fixed in a predetermined relative relationship, and the first and second reading means are the first and second reading means.
The scale device according to claim 1, wherein the scale device performs one-dimensional or two-dimensional movement while being arranged on the same perpendicular line of the plane.