JPH07315877A - Heat shielding glass for motor vehicle - Google Patents

Heat shielding glass for motor vehicle

Info

Publication number
JPH07315877A
JPH07315877A JP11719094A JP11719094A JPH07315877A JP H07315877 A JPH07315877 A JP H07315877A JP 11719094 A JP11719094 A JP 11719094A JP 11719094 A JP11719094 A JP 11719094A JP H07315877 A JPH07315877 A JP H07315877A
Authority
JP
Japan
Prior art keywords
film
metal
heat ray
glass
shielding film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11719094A
Other languages
Japanese (ja)
Inventor
Kazuyoshi Noda
和良 野田
Katsuaki Aikawa
勝明 相川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP11719094A priority Critical patent/JPH07315877A/en
Publication of JPH07315877A publication Critical patent/JPH07315877A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225Nitrides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/28Other inorganic materials
    • C03C2217/281Nitrides

Abstract

PURPOSE:To prevent the reduction in the gain characteristics on transmission and reception of electric waves, thus obtain desired and sufficient benefits by providing a heat shielding film mainly made of a metal nitride containing a specific first metal and a second metal on the window glasses for cars. CONSTITUTION:An Ag-Si alloy target is set, for example, in a direct current magnetron sputterer, then a base plate of soda lime glass having an antenna 4 printed is cleaned, dried and placed in a vacuum system. The system is evacuated, an Ar gas is introduced into the system, and electric power is applied to the target to conduct presputtering. Then, the system including the vacuum tank is replaced with an N2 gas and electric power is applied to form an AgSixNy film. Thus, a heat shielding film 5 is obtained that has a sheet resistance of higher than 20kOMEGA/square and is mainly composed of metal nitride containing the first metal selected from Nb, W, Fe, Pt and the like and the second metal selected from Si, B and Al wherein the amount of the second metal is less than 80atom.% based on the total of the first metals, and the film is laminated to the glass 1 for the car windows.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、冷暖房効果を向上させ
るようにするとともに比較的高い可視光透過率を有する
自動車用窓ガラスに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a window glass for an automobile which has a relatively high visible light transmittance while improving the cooling and heating effect.

【0002】[0002]

【従来の技術】近年、自動車には、AM放送やFM放送
などのためのラジオ受信機の他、テレビ受像記や無線電
話などの各種送受信装置が搭載される傾向にある。
2. Description of the Related Art In recent years, in addition to radio receivers for AM broadcasting, FM broadcasting, and the like, automobiles tend to be equipped with various transmission / reception devices such as television receivers and wireless telephones.

【0003】一方、最近では自動車の窓ガラス板がその
面積を大きくして形成される傾向にあり、直射日光など
の熱線が前記窓面を通して入射して車内温度の上昇を招
くなどの不都合を生じている。このような不都合を少し
でも解消するものとして、熱線反射性能の高い金属薄膜
をガラス板に施し、熱線の車内への流入を抑制する手法
が提案され、一部において使用されている。
On the other hand, recently, the window glass plate of an automobile tends to be formed with a large area, and heat rays such as direct sunlight enter through the window surface to cause an inconvenience such as an increase in the temperature inside the vehicle. ing. In order to eliminate such inconvenience as much as possible, there has been proposed a method of applying a metal thin film having a high heat ray reflection property to a glass plate to suppress the inflow of heat rays into the vehicle, and it has been partially used.

【0004】こうした金属薄膜は可視光反射率が高くな
り、可視光透過率が低下するとともにギラギラ感が生じ
るため、実際には反射防止膜が施されて使用されてい
る。例えば、金属薄膜をZnO、SnO2 、TiO2
Bi23 などの金属酸化物によりサンドイッチ状に挟
み、干渉を利用して金属薄膜による反射を低減させ、併
せて耐久性を向上させた形で使用されている。
Since such a metal thin film has a high visible light reflectance, a low visible light transmittance and a glaring feeling, it is actually used after being provided with an antireflection film. For example, a metal thin film may be formed of ZnO, SnO 2 , TiO 2 ,
It is sandwiched between metal oxides such as Bi 2 O 3 and is used in a form in which interference is utilized to reduce reflection by a metal thin film and, at the same time, durability is improved.

【0005】[0005]

【発明が解決しようとする課題】Ag系等の金属薄膜を
熱線反射膜として使用した場合、それ自体が電導性を有
しており、シート抵抗値が数Ω/□〜10Ω/□程度で
性質的に電磁遮蔽特性の高いものとなる。一方、前記し
たように、電波は、電磁波であることから、上記した金
属薄膜系の熱線反射膜を施した場合には電磁遮蔽特性高
い熱線反射膜によって電波が遮断されてしまうため、例
えば電波の送受信時のゲイン特性が低下し、必要十分な
利得が得られなくなるという問題があった。
When a metal thin film such as Ag is used as a heat ray reflective film, it has electric conductivity and has a sheet resistance of several Ω / □ to 10 Ω / □. The electromagnetic shielding property is accordingly high. On the other hand, as described above, since the radio wave is an electromagnetic wave, when the above-mentioned metal thin film heat ray reflective film is applied, the radio wave is blocked by the heat ray reflective film having a high electromagnetic shielding property. There is a problem in that the gain characteristic during transmission and reception is deteriorated and a necessary and sufficient gain cannot be obtained.

【0006】本発明は、ガラス面に熱線遮断機能をも付
与しようとする際にみられた従来技術の上記課題を解決
する自動車用熱線遮蔽ガラスの提供を目的とする。
It is an object of the present invention to provide a heat ray-shielding glass for automobiles, which solves the above-mentioned problems of the prior art found when the glass surface is also provided with a heat ray-shielding function.

【0007】[0007]

【課題を解決するための手段】本発明は、熱線遮蔽膜を
設けてなる自動車用熱線遮蔽ガラスであって、前記熱線
遮蔽膜は、20kΩ/□以上のシート抵抗値を有し、N
b、W、Fe、Co、Ni、Ag、Cu、Au、Pdお
よびPtからなる群から選ばれる少なくとも1種の第1
の金属と、Si、BおよびAlからなる群から選ばれる
少なくとも1種の第2の金属とからなる金属窒化物を主
成分とする熱線遮蔽膜であることを特徴とする自動車用
熱線遮蔽ガラスである。
The present invention is a heat ray-shielding glass for automobiles provided with a heat ray-shielding film, wherein the heat ray-shielding film has a sheet resistance value of 20 kΩ / □ or more, and N
at least one first selected from the group consisting of b, W, Fe, Co, Ni, Ag, Cu, Au, Pd and Pt
A heat ray-shielding glass for an automobile, which is a heat ray-shielding film containing, as a main component, a metal nitride consisting of the above metal and at least one second metal selected from the group consisting of Si, B and Al. is there.

【0008】図1は、自動車後部窓用ガラス板に熱線遮
蔽膜5を設けた状態の本発明の熱線遮蔽ガラス1の一例
を示す平面図である。
FIG. 1 is a plan view showing an example of the heat ray shielding glass 1 of the present invention in a state in which a heat ray shielding film 5 is provided on a glass plate for a rear window of an automobile.

【0009】このように熱線遮蔽膜5が設けられる窓ガ
ラス1は、2枚のガラス板もしくは2枚以上のガラス板
をポリビニールブチラール膜等の合わせ中間膜により積
層し、接合した積層構造の合わせガラス、あるいはガラ
ス板の室内側面に耐擦傷性のプラスチックフィルムを張
り合わせたガラスの他、単層構造の単板ガラスも使用で
きる。
As described above, the window glass 1 provided with the heat ray shielding film 5 has a laminated structure in which two glass plates or two or more glass plates are laminated with a laminated intermediate film such as a polyvinyl butyral film and joined. In addition to glass or glass in which a scratch-resistant plastic film is attached to the inner surface of the glass plate, a single-layer glass having a single-layer structure can be used.

【0010】本発明においては、熱線遮蔽膜5が送受信
すべき電波を遮蔽しないようにするために、熱線遮蔽膜
5としては、シート抵抗値が20kΩ/□以上の熱線遮
蔽膜を使用することが特徴である。特に50kΩ/□以
上であればより好ましい。
In the present invention, a heat ray shielding film having a sheet resistance value of 20 kΩ / □ or more is used as the heat ray shielding film 5 so that the heat ray shielding film 5 does not shield the radio waves to be transmitted and received. It is a feature. Particularly, it is more preferable if it is 50 kΩ / □ or more.

【0011】本発明における熱線遮蔽膜5は、電磁遮蔽
特性を消失させるべく、また、電磁波の拡散を防止する
べく、抵抗値の高い薄膜により形成する必要がある。具
体的には、Nb、W、Fe、Co、Ni、Ag、Cu、
Au、PdおよびPtからなる群から選ばれる少なくと
も1種の第1の金属(以下金属M1という)と、Si、
BおよびAlからなる群から選ばれる少なくとも1種の
第2の金属(以下金属M2という)とからなる金属窒化
物を主成分とする熱線遮蔽膜を用いる。従来のAg金属
と比べて比抵抗が高く、適当な膜厚を選択すると20k
Ω/□以上のシート抵抗値が得られる。
The heat ray shielding film 5 in the present invention needs to be formed of a thin film having a high resistance value in order to eliminate the electromagnetic shielding characteristics and prevent the diffusion of electromagnetic waves. Specifically, Nb, W, Fe, Co, Ni, Ag, Cu,
At least one first metal (hereinafter referred to as metal M1) selected from the group consisting of Au, Pd, and Pt, and Si,
A heat ray-shielding film containing a metal nitride containing at least one second metal (hereinafter referred to as metal M2) selected from the group consisting of B and Al as a main component is used. Higher specific resistance than conventional Ag metal, 20k if proper film thickness is selected
A sheet resistance value of Ω / □ or more can be obtained.

【0012】M2の含有割合が比較的少ない場合(例え
ば、M2の総量がM1の総量に対して原子比で30%未
満)では熱線遮断能が特に優れるため、可視光透過率が
あまり低下しない程度の薄い膜厚において20kΩ/□
以上のシート抵抗値が得られ、かつ熱線遮断機能も十分
に発揮されるので好ましい。
When the content ratio of M2 is relatively small (for example, the total amount of M2 is less than 30% in atomic ratio with respect to the total amount of M1), the heat ray-shielding ability is particularly excellent, and the visible light transmittance does not decrease so much. 20 kΩ / □ at a thin film thickness of
The above sheet resistance values are obtained, and the heat ray blocking function is sufficiently exhibited, which is preferable.

【0013】また、M2の含有割合が比較的多い場合
(例えば、M2の総量がM1の総量に対して原子比で3
0%以上、80%以下の領域)では、熱線遮断性能はや
や劣るが比抵抗が高いため500kΩ/□のシート抵抗
値が得られやすく、特に最適である。すなわち、可視光
吸収が少ないため膜厚を厚くして、光線透過率を高く保
持しつつ、十分な熱線遮断性能が得られるとともに、膜
厚を厚くしても500kΩ/□以上の高いシート抵抗が
得られる。
When the content ratio of M2 is relatively large (for example, the total amount of M2 is 3 in atomic ratio with respect to the total amount of M1).
In the range of 0% or more and 80% or less), the heat ray blocking performance is slightly inferior, but the sheet resistance value of 500 kΩ / □ is easily obtained because of the high specific resistance, which is particularly optimal. That is, since the absorption of visible light is small, the film thickness is increased to maintain a high light transmittance and sufficient heat ray blocking performance is obtained, and even if the film thickness is increased, a high sheet resistance of 500 kΩ / □ or more is obtained. can get.

【0014】本発明の熱線遮蔽膜5としては、上述の熱
線遮蔽機能を単層で使用しよいし、耐久性を向上させる
ための保護膜を設けた少なくとも2層からなってもよ
い。
As the heat ray-shielding film 5 of the present invention, the heat ray-shielding function described above may be used as a single layer, or may be composed of at least two layers provided with a protective film for improving durability.

【0015】図1は熱線遮蔽膜の周辺部をトリミングし
て、車体への電波の拡散防止をより確実にした例である
が、必ずしもトリミングしていなくてもよい。
Although FIG. 1 shows an example in which the periphery of the heat ray shielding film is trimmed to more securely prevent the diffusion of radio waves to the vehicle body, it is not always necessary to trim.

【0016】[0016]

【作用】このようにして、て熱線遮蔽膜5が配置されて
も、この熱線遮蔽膜5自体が抵抗値の高い非電導性の薄
膜により形成されているので電磁遮蔽特性は抑制されて
おり、したがって自動車に搭載される各種送受信装置の
利得性を損なうことはない。またガラス1面は、熱線遮
蔽膜5により覆われているので、直射日光などの熱が車
内へと入射し、室内が温度上昇するのを効果的に阻止で
き、冷房負荷低減などの省エネルギー対策を講じつつ車
内環境の向上に効果的に寄与させうる。
In this way, even if the heat ray shielding film 5 is arranged, since the heat ray shielding film 5 itself is formed of a non-conductive thin film having a high resistance value, the electromagnetic shielding characteristic is suppressed, Therefore, the gain performance of various transmission / reception devices mounted on an automobile is not impaired. Further, since the surface of the glass 1 is covered with the heat ray shielding film 5, it is possible to effectively prevent heat such as direct sunlight from entering the inside of the vehicle to raise the temperature inside the vehicle, and to reduce energy consumption such as cooling load reduction. While taking the measures, it can effectively contribute to improving the environment inside the vehicle.

【0017】[0017]

【実施例】【Example】

[実施例1]直流マグネトロンスパッタ装置内に、ター
ゲットとしてAgとSiとの原子比が3:97の合金タ
ーゲット(10ppmのPを添加したもの)を設置し
た。アンテナプリントが施された2mm厚のソーダライ
ムガラス基を洗浄、乾燥した後真空装置内に入れ6×1
-6torr程度まで排気した。この際基板加熱は行わ
なかった。
[Example 1] An alloy target having an atomic ratio of Ag and Si of 3:97 (containing 10 ppm of P) was installed as a target in a DC magnetron sputtering apparatus. A 2 mm thick soda lime glass substrate with an antenna print is washed and dried, then placed in a vacuum device and 6 x 1
It was evacuated to about 0 -6 torr. At this time, the substrate was not heated.

【0018】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が1×10-3torrになるように調節し、この
状態で、上記ターゲットへ1W/cm2 の電力を印加
し、5分間プレスパッタを実施した。この後真空槽内の
雰囲気をN2 ガスに置換し、圧力を4×10-3torr
となるように調節し、この状態で上記ターゲットへ2W
/cm2 の電力を印加しAgSixy 膜を約10nm
成膜した。
Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to 1 × 10 -3 torr, and in this state, 1 W / cm 2 of electric power was applied to the target for 5 minutes. Pre-sputtering was performed. After that, the atmosphere in the vacuum chamber was replaced with N 2 gas, and the pressure was 4 × 10 −3 torr.
2W to the above target in this state
/ Cm 2 power is applied to the AgSi x N y film to a thickness of about 10 nm.
A film was formed.

【0019】こうして得られたサンプルの分光スペクト
ルを測定したところ、可視光線透過率73. 4%、日射
透過率71.4%、可視光線反射率(ガラス面側)9.
5%、また透過色調はX=0. 3123、Y=0. 32
18でほぼニュートラル色を呈していた。このサンプル
のシート抵抗値は800kΩ/□であった。
When the spectral spectrum of the sample thus obtained was measured, the visible light transmittance was 73.4%, the solar radiation transmittance was 71.4%, and the visible light reflectance (on the glass surface side) was 9.
5%, and the transmitted color tone is X = 0.3123, Y = 0.32.
At 18, the color was almost neutral. The sheet resistance value of this sample was 800 kΩ / □.

【0020】この膜は、スパッタ状態が安定していて、
バッチ毎の膜特性のバラツキがきわめて少なかった。ま
た、このガラスを合わせガラスとして、電波透過性能を
測ったところ、なんら問題点はなかった。
This film has a stable sputtered state,
There was very little variation in the film properties from batch to batch. When this glass was used as a laminated glass and the radio wave transmission performance was measured, there was no problem.

【0021】なお、電波透過性については、シールド効
果、すなわちプリントアンテナガラス基板と比して、電
波が透過しにくくなる程度、を知るためネットワークア
ナライザー(ヒューレットパッカード社製)を用いて測
定した。
The radio wave transparency was measured using a network analyzer (manufactured by Hewlett-Packard Co.) in order to know the shield effect, that is, the degree to which radio waves are less likely to be transmitted as compared with the printed antenna glass substrate.

【0022】[実施例2]直流マグネトロンスパッタ装
置内に、ターゲットとしてNbとSiとの原子比が9:
1の合金ターゲットを設置した。アンテナプリントが施
された2mm厚のソーダライムガラス基板を洗浄、乾燥
した後真空装置内に入れ6×10-6torr程度まで排
気した。この際基板加熱は行わなかった。
[Embodiment 2] In the DC magnetron sputtering apparatus, the atomic ratio of Nb and Si as a target was 9:
The alloy target of No. 1 was installed. The soda-lime glass substrate having a thickness of 2 mm and having the antenna printed thereon was washed and dried, and then placed in a vacuum device and evacuated to about 6 × 10 −6 torr. At this time, the substrate was not heated.

【0023】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が2×10-3torrになるように調節し、この
状態で、上記ターゲットへ2W/cm2 の電力を印加
し、5分間プレスパッタを実施した。この後真空槽内の
雰囲気をArとO2 の混合ガス(Ar:O2 =5:1)
に置換し、圧力を2×10-3torrになるように調節
し、この状態で上記ターゲットへ5W/cm2 の電力を
印加し、NbSixy膜を約10nm成膜した。
Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to be 2 × 10 -3 torr, and in this state, 2 W / cm 2 of electric power was applied to the target for 5 minutes. Pre-sputtering was performed. After this, the atmosphere in the vacuum chamber was changed to a mixed gas of Ar and O 2 (Ar: O 2 = 5: 1).
And the pressure was adjusted to 2 × 10 −3 torr. In this state, an electric power of 5 W / cm 2 was applied to the target to form a NbSi x O y film with a thickness of about 10 nm.

【0024】こうして得られたサンプルの分光スペクト
ルを測定したところ、可視光線透過率30.0%、日射
透過率35. 0%可視光線反射率(ガラス面側)17.
0%、また透過色調はX=0. 3111、Y=0. 31
40でほぼグレー色を呈していた。このサンプルのシー
ト抵抗値は10MΩ/□以上であった。
The spectroscopic spectrum of the sample thus obtained was measured to find that the visible light transmittance was 30.0%, the solar radiation transmittance was 35.0%, and the visible light reflectance (glass surface side) was 17.
0%, and the transmitted color tone is X = 0.3111, Y = 0.31.
At 40, it was almost gray. The sheet resistance value of this sample was 10 MΩ / □ or more.

【0025】この膜は、スパッタ状態が安定していて、
バッチ毎の膜特性のバラツキがきわめて少なかった。ま
た、このガラスを合わせガラスとして、電波透過性能を
測ったところ、なんら問題点はなかった。
This film has a stable sputtered state,
There was very little variation in the film properties from batch to batch. When this glass was used as a laminated glass and the radio wave transmission performance was measured, there was no problem.

【0026】[比較例1]直流マグネトロンスパッタ装
置内に、ターゲットとしてTiとSiとの原子比が7:
3の合金ターゲットを設置した。アンテナプリントが施
された2mm厚のソーダライムガラス基板を洗浄、乾燥
した後真空装置内に入れ6×10-6torr程度まで排
気した。この際基板加熱は行わなかった。
[Comparative Example 1] In a DC magnetron sputtering apparatus, the target atomic ratio of Ti and Si was 7:
3 alloy targets were installed. The soda-lime glass substrate having a thickness of 2 mm and having the antenna printed thereon was washed and dried, and then placed in a vacuum device and evacuated to about 6 × 10 −6 torr. At this time, the substrate was not heated.

【0027】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が2×10-3torrになるように調節し、この
状態で、上記ターゲットへ5W/cm2 の電力を印加
し、5分間プレスパッタを実施した。この後真空槽内の
雰囲気をArとN2 とO2 の混合ガス(Ar:N2 :O
2 =5:5:1)に置換し、圧力を2×10-3torr
になるように調節し、この状態で上記ターゲットへ5W
/cm2 の電力を印加し、TiSixyz 膜を約2
0nm成膜した。
Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to 2 × 10 -3 torr, and in this state, 5 W / cm 2 of electric power was applied to the target for 5 minutes. Pre-sputtering was performed. After that, the atmosphere in the vacuum chamber was changed to a mixed gas of Ar, N 2 and O 2 (Ar: N 2 : O).
2 = 5: 5: 1) and the pressure is 2 × 10 −3 torr.
5W to the above target in this state
/ Cm 2 of electric power is applied to the TiSi x O y N z film to about 2
A 0 nm film was formed.

【0028】こうして得られたサンプルの分光スペクト
ルを測定したところ、可視光線透過率73. 1%、日射
透過率70. 0%、可視光線反射率(ガラス面側)8.
5%、また透過色調はX=0. 3200、Y=0. 33
09で黄色がかったグレー色を呈していた。上記と同様
にして形成した熱線遮蔽膜のシート抵抗値は26kΩ/
□であった。
The spectroscopic spectrum of the sample thus obtained was measured, and the visible light transmittance was 73.1%, the solar radiation transmittance was 70.0%, and the visible light reflectance (glass surface side) was 8.
5%, and the transmitted color tone is X = 0.3200, Y = 0.33.
At 09, it had a yellowish gray color. The sheet resistance value of the heat ray shielding film formed in the same manner as above is 26 kΩ /
It was □.

【0029】この膜は、スパッタ状態が不安定で、スパ
ッタ時のO2 の微妙な変化で膜特性、特に、透過色調が
変化してしまい、バッチ毎の膜特性のバラツキが大きか
った。また、このガラスを合わせガラスとして、電波透
過性能を測ったところ、なんら問題点はなかったが、ガ
ラスアンテナ性能を測ったところ、電波利得の減少が測
定された。
This film had an unstable sputtering state, and the film characteristics, especially the transmission color tone, changed due to a slight change in O 2 during sputtering, and the film characteristics varied greatly from batch to batch. When this glass was used as a laminated glass and the radio wave transmission performance was measured, there was no problem, but when the glass antenna performance was measured, a decrease in radio wave gain was measured.

【0030】[比較例2]直流マグネトロンスパッタ装
置内に、ターゲットとしてNbターゲットを設置した。
アンテナプリントが施された2mm厚のプリントアンテ
ナ付きソーダライムガラス基を洗浄、乾燥した後真空装
置内にいれ6×10-6torr程度まで排気した。この
際基板加熱は行わなかった。
[Comparative Example 2] An Nb target was set as a target in a DC magnetron sputtering apparatus.
The soda lime glass substrate with a printed antenna having a thickness of 2 mm and having an antenna print was washed and dried, then put in a vacuum apparatus and evacuated to about 6 × 10 -6 torr. At this time, the substrate was not heated.

【0031】次にアルゴンガスを真空槽内へ導入し、そ
の圧力が2×10-3torrになるように調節し、この
状態で、上記ターゲットへ2W/cm2 の電力を印加
し、5分間プレスパッタを実施した。この後真空槽内の
雰囲気をArとO2 の混合ガス(Ar:O2 =5:1)
に置換し、圧力を2×10-3torrになるように調節
し、この状態で上記ターゲットへ5W/cm2 の電力を
印加し、NbOx 膜を約30nm成膜した。
Next, argon gas was introduced into the vacuum chamber, the pressure was adjusted to be 2 × 10 -3 torr, and in this state, 2 W / cm 2 of electric power was applied to the target for 5 minutes. Pre-sputtering was performed. After this, the atmosphere in the vacuum chamber was changed to a mixed gas of Ar and O 2 (Ar: O 2 = 5: 1).
And the pressure was adjusted to 2 × 10 −3 torr. In this state, a power of 5 W / cm 2 was applied to the target to deposit a NbO x film of about 30 nm.

【0032】こうして得られたサンプルの分光スペクト
ルを測定したところ、可視光線透過率35.0%、日射
透過率45.0%、可視光線反射率(ガラス面側)1
7.0%、また透過色調はX=0. 3220、Y=0.
3220でほぼグレー色を呈していた。上記と同様にし
て形成した熱線遮蔽膜のシート抵抗値は10MΩ/□以
上であった。
The spectroscopic spectrum of the sample thus obtained was measured to find that the visible light transmittance was 35.0%, the solar radiation transmittance was 45.0%, and the visible light reflectance (glass surface side) was 1.
7.0%, and the transmitted color tone is X = 0.32020, Y = 0.
At 3220, it was almost gray. The sheet resistance value of the heat ray shielding film formed in the same manner as above was 10 MΩ / □ or more.

【0033】この膜について、電波透過性能を測ったと
ころ、特に問題点はなかった。しかし、スパッタ状態が
不安定で、スパッタ時のO2 の微妙な変化で膜特性、特
に、透過色調が変化してしまい、バッチ毎の膜特性のバ
ラツキが大きかった。
When the radio wave transmission performance of this film was measured, there was no particular problem. However, the sputtering state was unstable, and the film characteristics, particularly the transmission color tone, changed due to a slight change in O 2 during the sputtering, resulting in large variations in the film characteristics from batch to batch.

【0034】[0034]

【発明の効果】以上述べたように本発明によれば、熱線
遮断膜は抵抗値の高い薄膜により形成されているので、
電磁遮蔽性を消失させることができ、したがって熱線遮
断膜の影響によるアンテナ導体の利得特性の低下を防止
でき、熱線の車内への入射を阻止つつ、電波透過被膜と
しても優れた利得特性を発揮できる。しかも、スパッタ
状態が安定していて、バッチ毎の膜特性のバラツキがき
わめて少ないという効果を有する。
As described above, according to the present invention, the heat ray blocking film is formed of a thin film having a high resistance value.
The electromagnetic shielding property can be eliminated, and therefore the gain characteristic of the antenna conductor can be prevented from deteriorating due to the influence of the heat ray shielding film, and the excellent gain characteristic can be exhibited as a radio wave transmission film while preventing the heat ray from entering the vehicle. . Moreover, the sputtered state is stable, and there is an effect that there is very little variation in film characteristics between batches.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一例を示す平面図FIG. 1 is a plan view showing an example of the present invention.

【符号の説明】[Explanation of symbols]

1:窓ガラス 4:アンテナ導体 5:熱線遮蔽膜 1: Window glass 4: Antenna conductor 5: Heat ray shielding film

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】熱線遮蔽膜を設けてなる自動車用熱線遮蔽
ガラスであって、前記熱線遮蔽膜は、20kΩ/□以上
のシート抵抗値を有し、Nb、W、Fe、Co、Ni、
Ag、Cu、Au、PdおよびPtからなる群から選ば
れる少なくとも1種の第1の金属と、Si、BおよびA
lからなる群から選ばれる少なくとも1種の第2の金属
とからなる金属窒化物を主成分とする熱線遮蔽膜である
ことを特徴とする自動車用熱線遮蔽ガラス。
1. A heat ray-shielding glass for automobiles provided with a heat ray-shielding film, wherein the heat ray-shielding film has a sheet resistance value of 20 kΩ / □ or more, and Nb, W, Fe, Co, Ni,
At least one first metal selected from the group consisting of Ag, Cu, Au, Pd and Pt, and Si, B and A
A heat ray-shielding glass for an automobile, which is a heat ray-shielding film containing a metal nitride containing at least one second metal selected from the group consisting of 1 as a main component.
【請求項2】熱線遮蔽膜において、第2の金属の総量が
第1の金属の総量に対して原子比で80%以下であるこ
とを特徴とする請求項1の自動車用熱線遮蔽ガラス。
2. The heat ray-shielding glass for automobiles according to claim 1, wherein in the heat ray-shielding film, the total amount of the second metal is 80% or less in atomic ratio with respect to the total amount of the first metal.
JP11719094A 1994-05-30 1994-05-30 Heat shielding glass for motor vehicle Pending JPH07315877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11719094A JPH07315877A (en) 1994-05-30 1994-05-30 Heat shielding glass for motor vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11719094A JPH07315877A (en) 1994-05-30 1994-05-30 Heat shielding glass for motor vehicle

Publications (1)

Publication Number Publication Date
JPH07315877A true JPH07315877A (en) 1995-12-05

Family

ID=14705638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11719094A Pending JPH07315877A (en) 1994-05-30 1994-05-30 Heat shielding glass for motor vehicle

Country Status (1)

Country Link
JP (1) JPH07315877A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9975805B2 (en) 2011-10-28 2018-05-22 Corning Incorporated Glass articles with infrared reflectivity and methods for making the same
US10116035B2 (en) 2015-04-30 2018-10-30 Corning Incorporated Electrically conductive articles with discrete metallic silver layers and methods for making same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9975805B2 (en) 2011-10-28 2018-05-22 Corning Incorporated Glass articles with infrared reflectivity and methods for making the same
US11535555B2 (en) 2011-10-28 2022-12-27 Corning Incorporated Glass articles with infrared reflectivity and methods for making the same
US10116035B2 (en) 2015-04-30 2018-10-30 Corning Incorporated Electrically conductive articles with discrete metallic silver layers and methods for making same

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