JPH07312051A - Production of magnetic head slider and magnetic head slider - Google Patents

Abstract

PURPOSE:To enhance the sliding resistance characteristic of a magnetic head slider and to prevent tacky adhesion this slider with a magnetic recording medium by exposing the surfaces of the slider to gases of xenon fluorides, thereby forming fluorinated films thereon. CONSTITUTION:The fluorinated films 4 are formed on the extreme surfaces of the slider rails 21 and floating surface 22 of the slider 1 formed with thin-film magnetic heads 2 by exposing the surfaces to gases contg. at least one among the xenon difluoride, xenon trifluoride, xenon tetrafluoride and xenon hexafluoride. As a result, the films 4 in which fluorine is incorporated are formable at a high density on the material constituting the slider, by which the sliding resistance characteristic and more particularly the tacky adhesion to the magnetic recording medium are prevented. Protective films 3 are preferably formed of a material different from the material constituting the slider 1 prior to the surface treatment stage by gases of xenon fluorides. The films 3 are preferably formed of amorphous carbon.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider and a method of manufacturing the same, and more particularly to a laminated structure of a magnetic head slider of the type in which the magnetic head slider temporarily or steadily contacts a magnetic recording medium. The manufacturing method is related.

[0002]

2. Description of the Related Art For example, a magnetic recording disk device (hereinafter referred to as a magnetic disk device) used as a mass storage device of an electronic computer or a personal computer records as a disk-shaped magnetic recording medium (hereinafter referred to as a magnetic disk). And a magnetic head slider for reading, a movable part such as a spindle. Among them, in a magnetic recording medium, a magnetic recording film is formed on a non-magnetic substrate, a protective film is formed on the magnetic recording film, and perfluoropolycarbonate is further formed on the protective film in order to enhance sliding resistance and corrosion resistance. It is common practice to form a film in which a high-molecular lubricant such as ether is applied thinly.

The anti-sliding property between the magnetic head slider and the magnetic recording medium depends on how firmly the lubricant film applied on the magnetic recording medium adheres to the surface of the protective film thereunder. It greatly changes depending on. Since the lubricant film of the magnetic recording medium is in a state where the liquid lubricant spreads on the protective film to form a film, if the adhesion between the lubricant film and the protective film is weak, the surface of the lubricant film The lubricant moves due to the tension, fills the space between the magnetic recording medium and the magnetic head slider, and causes the magnetic head slider and the magnetic recording medium to adhere to each other.

In particular, as the distance (flying height) between the magnetic head slider and the magnetic disk during operation has recently been reduced in order to achieve high recording density, the magnetic head slider is stopped while it is stopped due to a change with time of the lubricant film. The phenomenon of magnetic disk sticking is becoming more common. The majority of accidents involving magnetic disk devices in the market are believed to be due to this sticking phenomenon.

Therefore, it has been proposed to repel oil on the surface of the magnetic head slider to repel a film of an oil-based lubricant to prevent an adhesion phenomenon between the magnetic head slider and the magnetic disk. For example, as disclosed in Japanese Patent Application Laid-Open No. 1-251309, a magnetic head slider is proposed in which a Langmuir-Blodgett film is formed on at least the front surface of the magnetic head slider. Further, for example, in Japanese Patent Laid-Open No. 4-76874,
By forming a fluororesin film on the surface of the magnetic head slider,
It has been proposed to prevent adhesion between the magnetic head slider and the magnetic recording medium.

[0006]

In the above-mentioned Japanese Patent Laid-Open No. 1-251309, a Langmuir-Blodgett film selected from fluorine compounds, fatty acids, alcohols, esters and the like is formed on the front surface. However, in this Langmuir-Blodgett film, the monomolecular film is bonded to the surface of the magnetic head slider by the intermolecular force (bonding energy of several tens of J / mol), so that the bonding force with the head slider is normal chemical bond ( Extremely weak compared with binding energy of several hundred J / mol). Therefore, there is a problem that the Langmuir-Blodgett film is easily peeled off by sliding between the magnetic disk and the magnetic head slider. Further, since the molecules that easily form the Langmuir-Blodgett film are organic molecules, most of them have a melting point of 200 ° C. or lower, and few of them can withstand the contact temperature during sliding, which is said to be 300 ° C. or higher.

Also, the method of forming the fluororesin film on the surface of the head slider by coating as described in Japanese Patent Application Laid-Open No. 4-76874 has a problem in that it cannot withstand the contact temperature during sliding because the melting point of the fluororesin film is low. There is.

Therefore, it is a first object of the present invention to provide a method of manufacturing a magnetic head slider capable of preventing sliding resistance, particularly adhesion to a magnetic recording medium.

A second object of the present invention is to provide a magnetic head slider capable of preventing sliding characteristics, particularly sticking to a magnetic recording medium.

[0010]

The first object is to provide a method of manufacturing a magnetic head slider comprising a magnetic head and a slider for supporting the magnetic head, wherein the surface of the slider is xenon difluoride, 3 fluorine. Xenon chloride, xenon tetrafluoride, and xenon hexafluoride are exposed to a gas to achieve surface treatment.

Before the surface treatment step, the surface of the slider is
It is also possible to perform a step of forming a protective film made of a material different from that of the slider. Of course, the surface treatment step is also effective for a magnetic head slider of the type having no protective film.

Surface treatment methods include xenon difluoride, xenon trifluoride, xenon tetrafluoride, and 6
A treatment method of bringing a gas containing at least one of xenon fluoride into contact with the slider, a treatment method of bringing plasma of this gas into contact with the slider, and a treatment method of performing light irradiation in this gas atmosphere can be used. .

As another mode for solving the above first problem, in a method of manufacturing a magnetic head slider including a magnetic head and a slider supporting the magnetic head, the surface of the slider is In a mixed gas atmosphere containing fluorine xenon having 6 or less fluorine atoms, oxygen, and fluorocarbon having 4 or less carbon atoms per molecule,
A manufacturing method having a surface treatment step of irradiating ultraviolet light can be provided.

Here, a thin film type or a bulk type can be used as the magnetic head.

As the slider, a ceramic material, particularly a mixture of Al ₂ O ₃ and TiC, or a material formed of ZrO ₂ , SiC or the like can be used.

When a protective film is formed on the slider,
For example, a protective film made of amorphous carbon can be formed. This method of forming a protective film made of amorphous carbon is performed in an inert gas targeting graphite, or
A method of forming by sputtering in a mixed gas of an inert gas and a hydrocarbon gas such as methane, a hydrocarbon gas,
A method of forming an organic compound such as alcohol, acetone, adamantane or the like alone or by mixing with hydrogen gas, an inert gas and the like by plasma CVD, or by ionizing the organic compound and accelerating it by applying a voltage to make it collide with the substrate. There is a method of forming.

When the protective film is formed on the slider, it is possible to form the protective film made of a cubic boron nitride film by a plasma CVD method using boron hydride, ammonia and hydrogen as raw materials. Is. Furthermore, it is also possible to use a yttria-stabilized zirconium oxide protective film, a silicon oxide protective film, or the like as the protective film.

The second problem is that the magnetic head is
In a magnetic head slider provided with a slider supporting a magnetic head, at least a part of the surface of the slider,
This is achieved by a magnetic head slider having a fluorine-containing film obtained by fluorinating the material forming the surface portion of the slider.

Further, a protective film for improving sliding characteristics can be arranged on the surface of the slider. In this case, the fluorine-containing film is a film which is disposed on the protective film and which is made by fluorinating the material forming the protective film. Further, the fluorine-containing film is preferably a film in which only the surface layer of the protective film is fluorinated. Furthermore, the fluorine-containing film may have a concentration gradient such that the fluorine content is higher toward the surface layer and the fluorine content is gradually decreased in the depth direction.

As the protective film, for example, a carbon film, especially an amorphous carbon film can be used. Other plasma CV using borohydride, ammonia and hydrogen as raw materials
It is also possible to use a cubic boron nitride film that can be formed by the D method, and further, a yttria-stabilized zirconium oxide film, a silicon oxide film, or the like. The amorphous carbon film also includes a diamond-like hard carbon film.

[0021]

According to the method of manufacturing the magnetic head slider of the present invention,
The surface portion of the slider is directly fluorinated by treating the surface of the slider with a gas containing at least one of xenon difluoride, xenon trifluoride, xenon tetrafluoride, and xenon hexafluoride. As a result, a film containing fluorine is formed on the surface of the slider.

Since xenon fluoride has a high reactivity and is excellent in introducing fluorine, the material on the surface of the slider, which is usually made of ceramics or a non-magnetic metal compound, is bonded to fluorine by a strong chemical bond. Conventionally, by exposing the object to the ion implantation method or fluorine gas, a method of fluorinating the surface of the object is known, but the density of fluorine bonded to the surface of the object by these methods is low, It did not show sufficient oil repellency. Further, the use of fluorine gas has a problem in safety. In the production method of the present invention, by using xenon fluoride,
On the surface of the slider, it is possible to form a film in which the material forming the slider contains fluorine at a high density. As a result, sufficient oil repellency can be obtained and adhesion with the magnetic recording medium can be prevented.

Further, since the film containing fluorine formed on the slider by the manufacturing method of the present invention is a film in which the surface of the slider itself is directly fluorinated, it is firmly adhered to the slider and film peeling hardly occurs. . Further, this film containing fluorine has a high melting point, unlike the conventional resin film or Langmuir-Blodgett film made of an organic compound, because it is a material that constitutes the slider itself is fluorinated. Can withstand high temperatures during sliding.

Further, in the method of manufacturing a magnetic head slider of the present invention, when the step of forming the protective film is performed before the surface treatment step, the surface portion of the protective film is fluorinated, and the surface of the protective film is fluorinated. A magnetic head slider in which a film containing fluorine is arranged is manufactured. Since the protective film and the film containing fluorine are firmly bonded to each other, the film is unlikely to peel off. Specifically, for example, when a protective film made of amorphous carbon is used, a single bond can be formed between carbon and fluorine. This binding energy is a strong bond of about 500 J / mol. Therefore, unlike the Langmuir-Blodgett film, the lubrication characteristics do not deteriorate due to the movement and scattering of the molecules. For this reason, it is possible to maintain the sliding resistance with respect to the recording medium for a long period of time and prevent the situation where the recording head slider and the recording medium adhere to each other through the lubricant while the magnetic recording medium is stopped. .

As a method of manufacturing a magnetic head slider according to another aspect of the present invention, the surface of the slider is made to contain xenon fluoride having 6 or less fluorine atoms per molecule and oxygen.
When a manufacturing method having a surface treatment step of irradiating with ultraviolet light in an atmosphere of a mixed gas containing a fluorocarbon having 4 or less carbon atoms per molecule is used, a film containing fluorine on the slider. Is formed. In this case, the xenon fluoride in the gas acts to suppress the reaction rate, thereby increasing the concentration of fluorine contained in the film and obtaining sufficient oil repellency. Further, as compared with the film formed by coating, the adhesion to the head slider is higher and the sliding resistance is improved.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A magnetic head slider according to an embodiment of the present invention will be described below with reference to the drawings. In this embodiment, a magnetic head slider for recording and reproducing a magnetic disk as a recording medium will be described, but it can be used for a magnetic head slider used for another magnetic recording medium such as a magnetic tape.

(Embodiment 1) The structure of a magnetic head slider according to the first embodiment of the present invention will be described with reference to FIGS. The magnetic head slider of this embodiment includes a slider 1 and a thin film magnetic head 2. The thin film magnetic head 2 is formed on the end surface of the slider 1. A protective film 3 and a fluorinated film 4 are sequentially formed on a slider rail surface 21 and an air bearing surface 22 of the slider 1 facing the magnetic disk. In this embodiment, the slider 1 is made of a mixture of Al ₂ O ₃ and TiC (hereinafter referred to as Al ₂ O ₃ -T).
iC). The protective film 3 was made of amorphous carbon, and the fluorinated film 4 was made of amorphous carbon containing fluorine. The thin film magnetic head 2 is formed by laminating an insulating layer, a lower magnetic pole layer, a gap layer, a coil layer wrapped with an insulating layer, an upper magnetic pole layer, and a protective layer in this order.

The magnetic head slider having this structure was manufactured by the following method. First, Al ₂ which is the base material of the slider 1
O on the ₃ -TiC wafer, to form a thin film head. The thin film head was formed by laminating an insulating layer, a lower magnetic pole layer, a gap layer, a coil layer wrapped with an insulating layer, an upper magnetic pole layer, and a protective layer in this order on a wafer.

The wafer on which the magnetic head was formed was cut and shaped into a slider shape, and a slider rail 51 was formed. After that, the slider rail surface 21 is
The protective film 3 and the fluorinated film 4 were formed on the air bearing surface 22. First, a slider rail surface 21 and an air bearing surface 2 are formed by a sputtering apparatus using a graphite target.
An amorphous carbon protective film 3 having a thickness of 0.02 μm was formed on the surface 2. At this time, the surfaces other than the slider rail surface 21 and the air bearing surface 22 were masked by a holder to form the protective film 3 only on the slider rail surface 21 and the air bearing surface 22. After that, the magnetic head slider together with the holder is moved into a chamber, the chamber is evacuated, and then xenon difluoride is introduced to move the slider rail surface 21 and the air bearing surface 22 of the magnetic head slider to 0.04 Pa · s at room temperature. The gas was exposed to xenon difluoride gas (gas pressure x time). afterwards,
The magnetic head slider was taken out of the vacuum chamber.

The surface of the protective film 3 of the magnetic head slider is E
When analyzed by SCA (X-ray photoelectron spectroscopy), carbon and fluorine peaks were detected. In the C1s peak,
A peak attributed to CFx bond (x = 1 to 3) is observed at 290 eV, and the amorphous carbon fluorinated film 4 is formed on the surface of the amorphous carbon protective film 3. confirmed. The concentration of fluorine was constant at 51 at% within the range of 8 nm from the outermost surface. Deeper than this,
No peak of fluorine was detected, and the thickness of the fluorinated film 4 was 8
It was found to be nm.

On the Al ₂ O ₃ --TiC wafer,
A sample having the protective film 3 and the fluorinated film 4 formed under the same conditions as described above was prepared, and the contact angle to water was measured to be 108 °, which showed water repellency equivalent to that of polytetrafluoroethylene, and the surface was densely fluorinated. It was verified that the atoms are bonded.

Further, the magnetic head slider of this embodiment was dipped in a fluorine-based solvent, ultrasonically cleaned for 10 minutes and then withdrawn, and the fluorine atom concentration on the surface of the protective film before and after cleaning was measured again by ESCA. No decrease in fluorine atom concentration was observed before and after washing.

In addition, the magnetic head slider of this embodiment is
When the fluorine atom concentration on the surface was similarly measured by ESCA after leaving it in the air atmosphere of 50 ° C. and 10% RH for 10 hours, there was no decrease before and after the leaving.

The dynamic friction coefficient of the magnetic head slider of this example was measured using a magnetic disk. This magnetic disk has a thickness of 0.
5 μm chromium base film, 0.05 μm thick cobalt.
A nickel alloy film and an amorphous carbon film having a thickness of 0.02 μm are sequentially formed, and a perfluoropolyether-based polymer lubricant is applied to a thickness of 3 nm by a solution dipping method. The rotational speed of the magnetic disk at the time of measurement was 1 rpm, the head slider load was 8 gf, and the tangential force applied to the head slider at a position with a radius of 40 mm was measured with a strain gauge sensor to obtain a dynamic friction coefficient. As a result, the dynamic friction coefficient of the magnetic head slider of this example was 0.03.
From this, it was found that the magnetic head slider of the present example is less likely to adhere to the film of the perfluoropolyether polymer lubricant due to its sufficient oil repellency.

Further, a contact start / stop test (abbreviated as CSS test) was conducted as an evaluation of sliding resistance. As is well known, the CSS test is a test in which the disk is rotated with the head slider in contact with the disk surface, the head is floated, and then the disk is stopped again at regular intervals, as is well known. Is. The condition of the CSS test is that the head slider load is 8 g.
f, radius 40 mm, rising time to the maximum rotation speed (5400 rpm) of 3 seconds, maximum rotation speed of 3 seconds, falling time to stop 3 seconds, stop time 3 seconds. As a result, no damage was found on the surface of the magnetic disk even after CSS was repeated 100,000 times. In addition, the above-mentioned dynamic friction coefficient
It was 0.04 when measured repeatedly 100,000 times, and it was confirmed that the increase in the dynamic friction coefficient was suppressed by the fluorine atoms strongly bonded to the head slider surface.

Further, a magnetic disk manufactured in the same manner as the above-mentioned magnetic disk is used, and the head slider is stopped with the same head slider load and radial position as above.
A test (this is referred to as an adhesive test) was conducted in which the maximum friction coefficient for 0.5 seconds of standing up when left for a week and then rotated at a rotation speed of 1 rpm was measured.
A friction coefficient of 0.04 was obtained.

The above-mentioned adhesion test was conducted at 60 ° C. and 80% R
A friction coefficient of 0.05 was obtained from a test conducted in an H environment (this is called a high temperature and high humidity adhesion test).

As described above, in the method of manufacturing the magnetic head slider of this embodiment, the surface of the amorphous carbon protective film 3 can be directly fluorinated by using xenon difluoride to form the fluorinated film 4. Is. Therefore, the fluorinated film 4 is firmly attached to the protective film 3, and therefore, the risk of film peeling is low. Further, the melting point of the fluorinated film 4 is the same as that of the amorphous carbon protective film 3, and it can sufficiently withstand the high temperature when sliding on the magnetic disk.

Further, it has been found that the magnetic head slider has a low dynamic friction coefficient and high durability because it is provided with the fluorinated film 4 having a high fluorine concentration. As a result, the sliding resistance with the magnetic disk, especially the dynamic friction coefficient with the surface of the magnetic disk and the reduction of the adhesion are achieved, thereby exhibiting excellent lubrication characteristics over time and high reliability and weather resistance. A magnetic head slider could be realized.

(Second Embodiment) A magnetic head slider according to a second embodiment of the present invention will be described with reference to FIGS.

The magnetic head slider of this embodiment comprises a slider 11 and a thin film magnetic head 12. The thin film magnetic head 12 is formed on the end surface of the slider 11. A fluorinated film 14 is formed on the air bearing surface 121 where the slider 11 faces the magnetic disk. In this embodiment, the slider 11 is made of Al ₂ O ₃ —TiC. The fluorinated film 14 is composed of amorphous carbon in which a perfluoroalkyl group is mixed. Thin film magnetic head 12
Is similar to the thin film magnetic head 2 of the first embodiment.

The magnetic head slider having this structure was manufactured by the following method. First, Al ₂ O ₃ -Ti of the slider base material
A thin film head similar to that of the first embodiment is formed on the C wafer. After that, after cutting the wafer into the dimensions of the slider, xenon difluoride 25% and methane 7
A 5% mixed gas of 5 Pa was flowed at a flow rate of 30 sccm,
RF discharge was performed at 0 W for 15 seconds. As a result, the above-described plasma of the mixed gas was generated, the reactant was deposited on the air bearing surface 121, and the fluorinated film 14 was formed. Then, the air bearing surface 121 is processed as shown in FIG.
Formed 2.

An ESCA analysis of the outermost surface of the magnetic head slider of the present embodiment manufactured in this way shows that the air bearing surface 1
21 is a layer of amorphous carbon in which a perfluoroalkyl group is mixed from the outermost surface to a depth of about 10 nm (fluorinated film 1
It was found that 4) was formed.

The contact angle of water on the outermost surface of the air bearing surface 121 was measured to be 109 ° in the same manner as in Example 1. Also, in the ultrasonic cleaning experiment in the same fluorine-based solvent as in Example 1, no chemical change on the outermost surface of the protective film or quantitative change in fluorine was observed.

The dynamic friction coefficient of the magnetic head slider of this example was 0.03 when measured under the same conditions as in Example 1 using a magnetic disk. Further, even if the load of the head slider was increased to 10 gf, the dynamic friction coefficient was 0.035, which proves that the magnetic head slider of the present example is excellent in sliding resistance when the load is increased.

When the CSS test under the same conditions as in Example 1 is performed,
The dynamic friction coefficient after CSS 100,000 times was 0.04.
Furthermore, when an adhesion test and a high temperature and high humidity adhesion test were performed under the same conditions as in Example 1, the friction coefficients were 0.04 and 0.0, respectively.
It became 4.

As described above, in the method of manufacturing the magnetic head slider of the second embodiment, the amorphous carbon film containing fluorine (fluorinated film 14) can be easily formed in one step. . Further, the obtained magnetic head slider, like the magnetic head slider of the first embodiment, has the sliding resistance property with respect to the magnetic disk, in particular, the reduction of the coefficient of dynamic friction with the surface of the magnetic disk and the alleviation of adhesion, It exhibits excellent lubrication characteristics over time and has high reliability and weather resistance.

(Embodiment 3) A magnetic head slider according to a third embodiment of the present invention will be described.

The magnetic head slider of this embodiment is provided with an amorphous carbon protective film on the air bearing surface of an alumina / titanium carbide slider, and a thin film containing a mixture of perfluoropolyether and perfluoroalkyl polymer on the protective film. Is equipped with.

A method of manufacturing this magnetic head slider will be described. In the same manner as in Example 1, a thin film head was formed on a slider / alumina / titanium carbide wafer and then shaped into a slider, and the surface was made to have a thickness of 0 by plasma CVD using methane as a raw material. .02μ
m of amorphous carbon was formed as a protective film. Then, 0.08 Pa of tetrafluoromethane, 0.1 Pa of oxygen, and 0.01 Pa of difluorinated xenon were introduced into a vacuumed chamber with a closed quartz window, and a low-pressure mercury lamp of 50 W was irradiated for 10 minutes. Then, the reaction gas was degassed and the magnetic head slider was taken out. That is, in this embodiment, a thin film in which perfluoropolyether and perfluoroalkyl polymer are mixed is formed by a chemical vapor deposition method using ultraviolet irradiation from a mercury lamp.

When the outermost surface of the magnetic head slider of this embodiment prepared in this way is analyzed by ESCA, FT-IR (Fourier transform infrared absorption spectroscopy), etc., the surface 5
It was revealed that a thin film in which the perfluoropolyether and the perfluoroalkyl polymer were mixed was formed in nm. This polyether contains a large number of side chains,
It was also revealed that they have a structure in which they are crosslinked with each other.

The contact angle of water on the outermost surface was 109 °. Also, in the ultrasonic cleaning experiment in the same fluorine-based solvent as in Example 1, no chemical change on the outermost surface of the protective film or quantitative change in fluorine was observed.

When the dynamic friction coefficient of the magnetic head slider of this example was measured under the same conditions as in Example 1 and using the same magnetic disk, it was 0.035. The dynamic friction coefficient after the CSS test 100,000 times was 0.05. In addition, the friction coefficient after the adhesion test and the high temperature and high humidity adhesion test is 0.0, respectively.
It was found to be 5, 0.06, which is superior in sliding resistance to the magnetic head slider provided with the perfluoropolyether thin film formed by the conventional coating method. This is because the thin film in which the perfluoropolyether and the perfluoroalkyl polymer of the magnetic head slider of this embodiment are mixed is formed by chemical vapor deposition, and therefore the adhesion to the lower protective film is good. It is thought that this is due to the large number of crosslinks.

When forming a fixed surface-lubricating thin film of carbon, oxygen, and fluorine (thin film of a mixture of perfluoropolyether and perfluoroalkyl polymer of Example 3) fixed on the protective film, a fluorine film was formed. Xenon compounds,
By irradiating with ultraviolet light while changing the mixing ratio of oxygen and fluorocarbon continuously or intermittently, the surface lubricity with a concentration gradient in fluorine so that the ratio of fluorine to carbon increases toward the surface A thin film can be formed. For example, in the case of this example, if the partial pressure of fluorocarbon in the mixed gas is increased, the ratio of the perfluoroalkyl polymer in the formed film will increase. Also, increasing the partial pressure of oxygen increases the proportion of perfluoropolyether in the membrane. Furthermore, if the partial pressure of xenon fluoride is increased,
The reaction rate of gas is suppressed, and the concentration of fluorine contained in the film increases. Therefore, when the fluorine has a concentration gradient such that the proportion of fluorine increases toward the surface, it can be achieved by gradually increasing the partial pressure of xenon fluoride in the mixed gas.

Further, when forming a thin film in which the perfluoropolyether and the perfluoroalkyl polymer of Example 3 are mixed, a mixed gas of xenon fluoride, oxygen and fluorocarbon is irradiated in the ultraviolet range. When the wavelength of light is gradually shortened, it is possible to form a surface-lubricating thin film in which fluorine has a concentration gradient such that the ratio of fluorine to carbon increases on the surface. This is because the decomposition reaction of the mixed gas is promoted and the amount of fluorine radicals is increased by shortening the wavelength. Also, by gradually increasing the intensity of the irradiation light, the action of accelerating the decomposition reaction of the mixed gas can be obtained. Therefore, as in the case where the wavelength is shortened, a film having a higher proportion of fluorine on the surface is obtained. Can be formed.

(Embodiment 4) A magnetic head slider according to a fourth embodiment of the present invention will be described.

The magnetic head slider of the present embodiment has the following structure: on the air bearing surface of the slider made of alumina / titanium carbide,
It has a film made of alumina / titanium carbide containing fluorine.

A method of manufacturing the magnetic head slider of this embodiment will be described. A thin film head was formed on a slider / alumina / titanium carbide wafer as in Example 1, and then cut and shaped into a slider shape. After that, a magnetic head slider masking the surface other than the air bearing surface was placed in a vacuum chamber with a quartz window, 0.008 Pa of xenon difluoride was introduced, and argon laser light (wavelength 514 with wavelength 514 was emitted from the quartz window in a completely sealed state. (0.5 nm) was focused on a quartz lens (f = 100 mm) outside the chamber and irradiated on the air bearing surface of the slider. At this time, the holder on which the slider was fixed was driven by the step motor so that the entire surface of the air bearing surface and the side surface of the rail were also irradiated with the argon laser light. The irradiation time was set to 5 seconds per unit area. That is, the surface treatment of this embodiment is performed by heating the surface with an argon laser beam.

The surface of the formed magnetic head slider is ES
An F1s peak was observed when analyzed by CA. As a result, it was confirmed that the outermost surface of the slider made of alumina / titanium carbide was fluorinated and changed to alumina / titanium carbide containing C—F bonds. The concentration of fluorine is 60 at within a depth of several nm from the outermost surface.
%Met. The contact angle with water was 110 °, indicating strong water repellency. As in Example 1, no change was observed in the chemical composition of the surface when ultrasonically cleaned with a fluorine-based solvent.
In addition, the magnetic head slider of this embodiment is set to 150 ° C. for 10
When the fluorine atom concentration on the surface was similarly measured by ESCA after leaving it in an air atmosphere of% RH for 10 hours, there was no decrease before and after leaving.

When the dynamic friction coefficient was measured under the same conditions as in Example 1 and using the same magnetic disk, it was 0.03.

When the CSS test of the magnetic head slider of this example was conducted using the same magnetic disk as the conditions of Example 1, the dynamic friction coefficient after 100,000 times was 0.04. Furthermore, the friction coefficients after the adhesion test and the high temperature adhesion test under the same conditions as in Example 1 were 0.04 and 0.04, respectively.

In the magnetic head slider of this embodiment, the surface portion of the air bearing surface of the slider made of alumina / titanium carbide is directly reacted with fluorine to change it to alumina / titanium carbide containing C--F bonds. A film containing fluorine is formed. Therefore, since this film is a part that was a part of the slider body before the processing, the connection with the slider body is very strong and the film peeling hardly occurs. Furthermore, the melting point of alumina-titanium carbide containing C-F bond is
Almost the same as titanium carbide, it has a high melting point, so there is no risk of deterioration during sliding. As described above, it is possible in this embodiment to directly introduce fluorine to the surface of the slider to form a film containing a C—F bond.
This is because xenon fluoride is used.

(Comparative Example 1) As a comparative example, a magnetic head slider having a protective film of amorphous carbon on the air bearing surface was manufactured. The slider substrate, thin film head forming method, slider processing, and amorphous carbon protective film forming method were the same as in Example 1.

The characteristics of the magnetic head slider of this comparative example were evaluated under the same evaluation test conditions as in Example 1. The results are shown below.

(1) The coefficient of dynamic friction was 0.20.

(2) When the CSS test was conducted, the dynamic friction coefficient after 100,000 times increased to 0.55. (3) In the adhesion test, the friction coefficient was 0.60.

(4) In the high temperature and high humidity adhesion test, the head slider gimbal was damaged during the measurement of the friction coefficient, and the measurement was impossible. This is probably due to the extreme adhesion between the head slider and the magnetic disk.

As described above, any one of the characteristics is obtained in Examples 1 to 4.
However, it is confirmed that the surface treatment of the present invention is effective.

Although the fluorinated film is formed on the magnetic head slider in the above-described embodiments, the sliding characteristics are not limited to the magnetic head slider, but may be a magnetic recording medium or a powder such as a toner carrier of a copying machine. For an object on which a fluorinated film is formed for the purpose of improving the above, it is possible to form the fluorinated film on the surface by the same method as in the above-mentioned embodiment.

[0070]

As described above, according to the present invention, a fluorine-introduced film can be formed on the outermost surface of the magnetic head slider, and as a result, the sliding resistance is improved, especially on the magnetic disk surface. By reducing the dynamic friction coefficient and reducing the adhesion, it was possible to manufacture a magnetic head slider exhibiting excellent lubricating characteristics over time and having high reliability and weather resistance.

[Brief description of drawings]

FIG. 1 is a perspective view of a magnetic head slider according to a first embodiment of the present invention.

FIG. 2 is a partial cross-sectional view of the magnetic head slider of FIG.

FIG. 3 is a perspective view of a magnetic head slider according to a second embodiment of the present invention.

FIG. 4 is a partial cross-sectional view of the magnetic head slider of FIG.

[Explanation of symbols]

1, 11 ... Slider, 2,12 ... Thin film magnetic head, 3 ...
Protective film, 4, 14 ... Fluorinated film, 21 ... Slider rail surface, 22, 121 ... Air bearing surface, 51, 152 ... Rail.

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[Procedure amendment]

[Submission date] June 8, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be amended] Title of invention

[Correction method] Change

[Correction content]

Title: Method for manufacturing magnetic head slider and magnetic head slider

Claims (12)

[Claims] 1. A method of manufacturing a magnetic head slider comprising a magnetic head and a slider supporting the magnetic head, wherein the surface of the slider is xenon difluoride, xenon trifluoride, xenon tetrafluoride, And a method of manufacturing a magnetic head slider, which comprises a surface treatment step of performing surface treatment by exposing to a gas containing at least one of xenon hexafluoride. 2. The method according to claim 1, further comprising a step of forming a protective film made of a material different from a material forming the slider on the surface of the slider before the surface treatment step. Method of manufacturing magnetic head slider. 3. The method of manufacturing a magnetic head slider according to claim 2, wherein the protective film is formed of amorphous carbon. 4. The method of manufacturing a magnetic head slider according to claim 1, wherein the surface treatment is a treatment of irradiating the surface of the slider with light in an atmosphere of the gas. 5. A magnetic head slider comprising a magnetic head and a slider for supporting the magnetic head, wherein at least a part of the surface of the slider is fluorinated with a material forming a surface portion of the slider. A magnetic head slider having a fluorine-containing film. 6. The protective film according to claim 5, wherein a protective film for improving sliding characteristics is disposed on a surface portion of the slider, the fluorine-containing film is disposed on the protective film, and the protective film is provided. A magnetic head slider characterized by being a fluorinated film of a constituent material. 7. The magnetic head slider according to claim 6, wherein the protective film is made of amorphous carbon. 8. The magnetic head slider according to claim 6, wherein the protective film is made of any one of silicon oxide, zirconium oxide and cubic boron nitride. 9. A method of manufacturing a magnetic head slider comprising a magnetic head and a slider supporting the magnetic head, wherein the surface of the slider is made of xenon fluoride having 6 or less fluorine atoms per molecule. , In a mixed gas atmosphere containing oxygen and fluorocarbons having 4 or less carbon atoms per molecule,
A method of manufacturing a magnetic head slider, comprising a surface treatment step of irradiating ultraviolet light. 10. The method of manufacturing a magnetic head slider according to claim 9, wherein the surface treatment is a treatment of generating plasma of the mixed gas and irradiating ultraviolet light in the plasma. 11. The method of manufacturing a magnetic head slider according to claim 9, wherein light is irradiated while changing a ratio of xenon fluoride contained in the gas. 12. A method of manufacturing a magnetic head slider according to claim 9, wherein irradiation is performed while changing the wavelength of the ultraviolet light.