JPH07308317A - Ultrasonic probe - Google Patents

Abstract

PURPOSE:To prevent a sound medium from penetrating and transmitting into an org. polymer material at the tip of an ultrasonic probe and to prevent the characteristics from deteriorating. CONSTITUTION:A GND electrode 7 and a plus side electrode 8 formed on a piezoelectric element 5 are connected with a signal line 10 and a peripheral line 11 of a coaxial cable 13 with conductive resins 9a-c. This part is sealed and protected with an epoxy resin 12. The resin 12, etc., are protected with a film 30 consisting of a hydrophobic org. inorg. material.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flaw detection or intracavity ultrasonic diagnostic apparatus for obtaining an ultrasonic tomographic image and diagnosing the ultrasonic tomographic image, and more particularly, to a structure of a transmitting / receiving ultrasonic probe tip.

[0002]

2. Description of the Related Art In recent years, ultrasonic probes have shown rapid growth in demand as ultrasonic diagnostic devices for medical use in addition to nondestructive inspection devices. A probe such as an ultrasonic endoscope radiates high-frequency acoustic vibrations from an ultrasonic transducer into a living body, receives the reflected ultrasonic waves, and receives the ultrasonic waves with a slight interface characteristic. By processing different information depending on the difference, it is possible to obtain a cross-sectional image of the inside of the living body.

The ultrasonic vibrator is roughly divided into a piezoelectric element, an acoustic matching layer and a back load material. The ultrasonic oscillator is a device that applies a high-frequency voltage pulse to a piezoelectric element by using an electrode formed on the surface of the piezoelectric element, causes the piezoelectric element to resonate, and causes rapid deformation to generate an ultrasonic pulse. Is. However, in the case of high-frequency and miniaturization such as the ultrasonic probe for blood vessels, the shape of the piezoelectric element becomes small and the thickness becomes very thin,
Various inventions have been proposed because mounting methods and connection methods of ultrasonic transducers have become very difficult. The applicant of the present invention has also proposed the invention described in JP-A-5-300593.

Here, a conventional ultrasonic probe, particularly an ultrasonic probe for an ultrasonic diagnostic apparatus will be specifically described with reference to FIGS. 1 and 2. An acoustic matching layer 4 is provided on the ultrasonic wave emitting surface of the piezoelectric element 5 provided with the surface electrodes 7 and 8, and a back braking material 3 is provided on the anti-radiating surface of the piezoelectric element 5. After the ultrasonic transducer portion 25 is bonded to the conductive housing 6, the surface electrodes 7 and 8 are used as input / output electrodes, so that the housing 6 and the lead wire are connected by the conductive member 9. Then, if necessary, sealing / insulation is performed with an insulating resin.

The housing 6 is connected to the flexible shaft 24 by the silver brazing 14, so that the ultrasonic probe can be driven forward and backward and in the rotational direction with respect to the axial direction of the flexible shaft 24. The ultrasonic probe produced in this way is inserted into a cover called a tubular sheath 29 made of polyethylene or the like, and liquid paraffin, water, physiological saline solution or gel used as an acoustic medium in the sheath. It is inserted into the body cavity in a state of being filled with particulate matter.

It should be noted that, for the conductive member 9, silver solder, solder, conductive adhesive, etc. are used, and the surrounding area is generally sealed with an epoxy resin which is an insulating resin.
However, as described above, with the miniaturization of the ultrasonic probe, a conductive adhesive has been recently used in order to prevent the piezoelectric element from being damaged by heat being applied thereto and to have excellent workability of a minute portion. Is often used. Examples of the electrically conductive adhesive include, for example, those obtained by adding silver powder as an electrically conductive filler at a ratio of 50 parts by weight or more to 100 parts by weight of an epoxy resin as described in JP-A-62-161300. It is common.

On the other hand, as a recent technique, in order to obtain a slip when the ultrasonic probe comes into contact with a human body and to secure the chemical resistance of the acoustic lens, for example, Japanese Patent Laid-Open No. 4-181896.
In the publication, an invention is proposed in which an acoustic lens is coated with a coating material in which PTFE particles are dispersed in an organic binder.

[0008]

However, in the invention described in the above-mentioned JP-A-62-161300, the tip of the ultrasonic probe is immersed in a liquid or gel acoustic medium for acoustic matching. Will be. In the above structure, while using the ultrasonic probe, a phenomenon occurs in which the acoustic medium penetrates directly or through the epoxy resin sealing layer and swells the conductive adhesive.

The conductive adhesive develops conductivity by contact between conductive fillers (silver powder, copper powder, etc.) added in the adhesive due to curing shrinkage of the adhesive made of organic resin such as epoxy. Therefore, there is a problem in that the contact between the conductive fillers is cut off due to the swelling of the adhesive and the conductivity is lost, or the resistance increases and the characteristics deteriorate. Further, the penetration of the acoustic medium into the interior causes not only the deterioration of the conductive adhesive but also the deterioration of the back load material and the acoustic matching layer itself, such as deterioration such as peeling and swelling.

On the other hand, among the acoustic media, physiological saline and ultrasonic gel generally used contain alkali ions, so that they pass through the sealing layer of epoxy resin, such as alumina provided as an acoustic matching layer. There is also a problem of attacking ceramics and electrodes such as PZT, lead titanate, PLZT, lead metaniobate which are piezoelectric elements, and even when using a solder that does not use a conductive adhesive, for example, a problem may occur.

In the invention described in Japanese Patent Laid-Open No. 4-181896, the acoustic lens is coated on the acoustic lens, but the acoustic medium is formed on a portion other than the coated acoustic lens, such as an adhesive layer. Intrudes and causes deterioration. Further, the fluororesin in the above invention is PTF.
Since the E particles and the thermoplastic or thermosetting resin and the curing agent are included, no matter how hydrophobic the PTFE is, if the remaining thermoplastic or thermosetting resin is hydrophilic, the acoustic medium is actually produced from this coating layer. It penetrates inside and causes characteristic deterioration. Although the above publication does not describe the specific components of the fluororesin, none of the commercially available paints solves this problem.

It is an object of the present invention to prevent a liquid or gel acoustic medium from penetrating and penetrating into the organic polymer material at which the tip of the ultrasonic probe is exposed and causing characteristic deterioration. It is to provide an ultrasonic probe.

The object of claim 2 is that the liquid or gel acoustic medium penetrates and permeates the conductive adhesive that connects the piezoelectric element at the tip of the ultrasonic probe and the input / output electrodes, resulting in characteristic deterioration. It is to provide an ultrasonic probe that prevents this.

An object of a third aspect of the present invention is to provide an ultrasonic probe which prevents deterioration of the characteristics of the ultrasonic probe due to high temperature curing exceeding the heat resistance allowable range of the ultrasonic probe.

[0015]

The present invention is directed to a piezoelectric element having ± electrodes on its surface, an acoustic matching layer in contact with the ultrasonic radiation surface of the piezoelectric element, and a backside damping material in contact with the anti-radiation surface of the piezoelectric element. And an input / output electrode for inputting / outputting a current to / from the piezoelectric element, a conductive member connecting the piezoelectric element and the input / output electrode, an insulating resin covering the conductive member, and a housing accommodating each member. In the ultrasonic probe, at least the exposed portion of the ultrasonic probe tip is coated with a film of a hydrophobic organic inorganic material containing silicon oxide or a metal oxide. It is a tentacle.

Further, a piezoelectric element having ± electrodes on its surface, an acoustic matching layer in contact with the ultrasonic wave emitting surface of the piezoelectric element, a back damping material in contact with the anti-radiating surface of the piezoelectric element, and an electric current are input to and output from the piezoelectric element. In an ultrasonic probe comprising an input / output electrode, a conductive adhesive connecting the piezoelectric element and the input / output electrode, an insulating resin covering the conductive adhesive, and a housing for housing each member, at least the ultrasonic probe An ultrasonic probe characterized in that a piezoelectric element, an input / output electrode and a conductive adhesive at the tip of the ultrasonic probe are covered with a film of a hydrophobic organic inorganic material containing silicon oxide or metal oxide. Is.

Further, the hydrophobic organic inorganic material is an ultrasonic probe characterized by containing silicon oxide or a metal oxide and being hardened at a low temperature of 150 ° C. or lower.

According to the first aspect of the present invention, the hydrophobic organic inorganic material covering the exposed organic polymer material at the tip of the ultrasonic probe protects the organic polymer material and does not transmit the acoustic medium. Or, because it is extremely difficult to penetrate, it prevents deterioration of each component of the ultrasonic probe.

It is not always necessary for the hydrophobic organic inorganic material to cover the entire tip portion in a film form, and it is possible to selectively select a portion which the acoustic medium does not want to touch directly or a portion where the acoustic medium easily penetrates. A film may be formed and covered. Therefore, it is effective to cover the exposed electrodes, the acoustic matching layer and the piezoelectric element made of ceramics, the epoxy resin portion for sealing and the acoustic matching, and the like.

The film thickness of the hydrophobic organic polymer material must be thick enough to prevent the transmission of the acoustic medium.
In addition, it must be thin enough not to deteriorate the acoustic characteristics. Specifically, 0.5 μm or more is desirable to prevent permeation of the acoustic medium, and 1 μm to prevent deterioration of acoustic characteristics.
The following is desirable.

According to a second aspect of the present invention, when an acoustic medium that does not corrode ceramics or the like is used, a hydrophobic adhesive covering a conductive adhesive connecting the piezoelectric element at the tip of the ultrasonic probe and the input / output electrodes is used. The organic organic inorganic material protects the conductive adhesive itself and does not or hardly penetrates the acoustic medium, and thus prevents deterioration of conductivity due to swelling in the acoustic medium. In addition, since the film made of the hydrophobic organic polymer material does not rub against other members such as the sheath and is not detached or broken due to peeling or friction, stable performance can be secured. Further, it is not always necessary to cover in a film shape, and instead of the epoxy resin for sealing, it may be filled for the purpose of sealing.

According to the third aspect of the present invention, the low temperature curable hydrophobic organic inorganic material is cured at a low temperature within the heat resistance allowable range of the ultrasonic probe, and the ultrasonic probe functions normally. The hydrophobic organic inorganic material is at least an organosilicon compound (for example, a silylisocyanate compound, a chlorosilane compound and perhydropolysilazane), or an organometallic compound other than silicon (for example, an aluminum alcoholate compound, an aluminum chelate compound and a cyclic compound). Aluminum compounds such as aluminum oligomers, alumina sol, titanate compounds, Zr alcoholate compounds, etc.) can be obtained.

However, the solvent-soluble organic inorganic material must be soluble in the diluent solvent but insoluble in the liquid or gel acoustic medium. It should be insoluble in water, aqueous solutions such as physiological saline, and alcoholic solutions. In particular, when such a condition is satisfied, a liquid substance that is easy to form and a cured film are insoluble in the acoustic medium, but a film with high durability is obtained, and deterioration of the ultrasonic probe is prevented. become.

Further, it is desirable that the boiling point of the solvent is not so high that it is possible to dry at 150 ° C. or lower. It is particularly desirable that it can be dried at 100 ° C. or lower. Further, the hydrophobic organic inorganic material,
Although it has a high moisture-proof and waterproof property, it cannot be said that acoustic media other than water are difficult to permeate all acoustic media. Even if the above acoustic medium is used, it is possible to prevent the deterioration of the ultrasonic probe. The transmission amount of the hydrophobic organic inorganic material through the acoustic medium is “0.0” under an environment of 20 ° C.
5 g / cm ² · 24 hours ”or less,
Particularly preferably, it is “0.002 g / cm ² · 24 hours” or less.

[0025]

[Embodiment 1] FIGS. 3 to 8 show the present embodiment, FIGS. 3 and 4 are perspective views showing a method for producing a transducer portion of an ultrasonic probe, and FIGS. 5 and 6 show the produced vibration. 7 and 8 are sectional views of the ultrasonic probe.

An acoustic matching layer 4 made of an epoxy resin as shown in FIG. 3 is provided on the GND electrode 7 side of the piezoelectric element 5 having the GND electrode 7 and the + side electrode 8 formed on the surface thereof, and a tungsten filler is contained therein. Back load material 1 made of epoxy resin +
It is formed on the side electrode 8 side to produce a laminated body. Then, FIG.
Cut with a precision cutting machine as shown by arrow 40 in FIG.
One small vibrator unit 25 as shown in FIG. In addition,
In FIG. 5, only the back load material 1 made of epoxy resin containing tungsten filler is used as the back braking material 3.
FIG. 6 shows a back load material 1 made of an epoxy resin containing a tungsten filler and a back load material 2 made of an epoxy resin not containing tungsten for insulation as a back braking material 3.

As shown in FIG. 7, a transducer portion 25 (hereinafter referred to as a transducer) is adhered and fixed onto an insulating plate 19 which is fixed to a housing 6 in which a metal pipe is processed with an adhesive, and is attached to a side surface portion of the transducer 25. The exposed thick electrode portion is connected through the conductive resin 9. At that time, the GND electrode 7 on the sound radiation surface side is once connected to the housing 6 with the conductive resin 9a, and the circumference line 11 of the coaxial cable 13 passing through the flexible shaft 24 at the housing 6 pipe portion.
Are connected by a conductive resin 9b. On the other hand, the wiring of the + side electrode 8 is connected to the coaxial cable signal line 10 by the conductive resin 9c on the back load material 1 in order to ensure insulation with the housing 6. The probe 18 was produced.

The conductive resin portion 9 is an epoxy resin 1
The structure is sealed and protected by 2. Also, the housing 6
The flexible shaft 24 and the flexible shaft 24 are brazed by the silver brazing 14, and the housing 6 is made of corrosion-resistant stainless steel plated with electroless nickel. The ultrasonic probe 18 manufactured in this manner is used as an organic silicon compound, here a silane coupling agent KBM-503.
(Shin-Etsu Chemical Co., Ltd.) dipping in a 3% ethanol diluted solution, and after pulling up 1
Heat treatment was performed for a period of time to complete the ultrasonic probe 18 protected by the film 30 containing silicon oxide (see FIG. 8).

The operation of this embodiment will be described below. By providing the film 30 of the hydrophobic organic inorganic material on the entire surface of the ultrasonic probe 18, the acoustic medium becomes the ultrasonic probe 18.
Prevents intrusion into the interior. Therefore, the acoustic medium does not swell the conductive resins 9a to 9c and does not deteriorate the conductivity. In addition, an ultrasonic gel containing physiological saline or generally used alkali ions in the acoustic medium passes through the sealing layer of the epoxy resin, and ceramics such as alumina which is an acoustic matching layer or a piezoelectric element is used. Some P
It does not attack the ceramics such as ZT, lead titanate, PLZT and lead metaniobate, or the electrodes. In addition, since silicon oxide is chemically stable and the acoustic impedance of the coating material is low in terms of acoustic characteristics,
It does not deteriorate the acoustic characteristics.

According to this embodiment, it is possible to obtain a high-performance ultrasonic probe which is small in size, has high durability, and is free from deterioration of characteristics and materials due to the acoustic medium. In particular, since the entire ultrasonic probe is covered with a film of a hydrophobic organic inorganic material, the ultrasonic probe is consequently more durable than conventional ones against sterilization by gas or steam.

The coating agent is not limited to the silane coupling agent used in this embodiment, and any hydrophobic organic inorganic material may be used. For the organic silicon compound, tetraisocyanate silane (Si (NCO) ₄ ) ethanol is used. NT-L2003 (Nissan Chemical Co., Ltd.) for dilute solution, alkoxysilane (Si (OR) ₄ ) and organic metal compounds
Manufactured by Tonen Polysilazane PHP-2 (manufactured by Tonen Corporation),
Advanced hard coat (manufactured by Tonen Corporation) is also effective. In addition to the dipping method, spraying is also effective.

[0032]

Second Embodiment FIG. 9 is a sectional view of an ultrasonic probe showing the present embodiment. The ultrasonic probe main body of this embodiment has an acoustic matching layer 4
Is an alumina flat plate, and is manufactured in the same manner as in Example 1 except that the GND electrode 7 is bonded and laminated with an epoxy resin (see FIG. 7). In order to cover the epoxy sealing resin 12 of the ultrasonic probe 18 manufactured in this way,
Organosilicon compound Here, silane coupling agent KBM
A 503 (Shin-Etsu Chemical Co., Ltd.) 3% ethanol diluted solvent is applied with a brush. At this time, brush coating is performed with the acoustic matching layer 4 removed. Then, it was dried at 100 ° C. for 1 hour to form a film 30 of a hydrophobic organic inorganic material, and the ultrasonic probe 18 was completed.

The operation of this embodiment will be described below. The ultrasonic probe not coated with the hydrophobic organic inorganic material penetrates the epoxy resin in which the acoustic medium is exposed and penetrates into the inside. However, in this embodiment, the acoustic medium is obtained by coating the portion of the ultrasonic probe 18 where the epoxy-based sealing resin 12 is exposed with a coating agent that forms a film containing silicon oxide having extremely low moisture permeability. Are prevented from entering the inside of the ultrasonic probe 18.

Therefore, among the acoustic mediums, acoustic mediums other than physiological saline or ultrasonic gel containing alkali ions,
For example, when liquid paraffin, water and other alcoholic solutions are used, the acoustic medium does not swell the conductive resins 9a to 9c and does not deteriorate the conductivity. Further, since the acoustic matching layer 4 which is an ultrasonic wave emitting surface is not coated, a thick film can be formed without considering acoustic characteristics, and particularly long-term durability is improved. Further, it is possible to reduce the amount of expensive coating agent used as compared with the case of coating the entire surface.

According to this embodiment, the same effect as that of the first embodiment can be obtained. Furthermore, higher durability is obtained.
In addition, it is possible to reduce the price.

As a matter of course, the hydrophobic organic inorganic material is not limited to the material used in the present embodiment, but the material used in the first embodiment can be applied and is unique to each material. The effect exists as well. As a coating method, coating with a dispenser is also effective in addition to brush coating.

[0037]

Third Embodiment FIG. 10 is a sectional view of an ultrasonic probe showing the present embodiment. In this embodiment, the ultrasonic probe similar to that of the first embodiment is used except that the conductive resins 9a to 9c are replaced by solders 9'a to 9c and the epoxy resin is not used for sealing. It is prepared in the same manner as in Example 1. The acoustic matching layer 4, the solders 9'a to 9c, the exposed surfaces of the surface electrodes 7 and 8 of the ultrasonic probe 18 manufactured in this way, and an input connected to the surface electrode. An organosilicon compound placed in a syringe so as to cover the exposed surface of the output electrode 10, here, a silane coupling agent KBM-503.
A 3% ethanol diluted solution (manufactured by Shin-Etsu Chemical Co., Ltd.) is dropped and coated, and then dried at 100 ° C. for 1 hour to form a film 31 of a hydrophobic organic inorganic material to form the ultrasonic probe 18. Was completed.

The operation of this embodiment will be described below. By coating the input / output electrode 10 or the acoustic matching layer 4 portion of the ultrasonic probe with a coating agent that forms a film containing silicon oxide having extremely low moisture permeability, the acoustic medium comes into contact with the electrode and the acoustic matching layer. Is preventing things. Therefore, even when using an acoustic medium such as a physiological saline solution or an ultrasonic gel that contains alkali ions, which have particularly excellent acoustic characteristics, among the acoustic media, deterioration of the ultrasonic probe 18 is prevented without invading each member. Will prevent it.

According to the present embodiment, it is possible to obtain a high-performance ultrasonic probe which is small in size, has high durability, and is free from deterioration of characteristics and materials due to the acoustic medium.

[0040]

[Fourth Embodiment] FIG. 11 is a sectional view of an ultrasonic probe according to the present embodiment. This embodiment will be described with reference to FIGS. As shown in FIG. 3, the acoustic matching layer 4 made of epoxy resin is applied to the piezoelectric element 5, the back load material 1 made of epoxy resin containing tungsten filler is formed, and a laminated body is produced. Next, the solid line portion 40 in FIG. 4 is cut by a precision cutting machine to produce one small transducer 25 as shown in FIGS. 5 and 6.

Then, as shown in FIG. 7, this transducer 25 is adhered and fixed onto the insulating plate 19 fixed to the housing 6 in which the metal pipe is processed with an adhesive, and the thick electrode portion exposed on the side surface of the transducer 25. To be connected via the conductive resin 9. At that time, GND on the sound radiation side
The electrode 7 is once connected to the housing 6 with a conductive resin 9a,
The conductive resin 9 is attached to the circumference line 11 of the coaxial cable 13 passing through the flexible shaft 24 at the housing 6 pipe portion.
It is connected by b. On the other hand, the wiring of the + side electrode 8 is connected to the coaxial cable signal line 10 by the conductive resin 9c on the back load material 1 in order to ensure the insulation with the housing 6. The acoustic probe 18 was produced.

The ultrasonic probe 1 produced in this way
After masking the housing 6 and the acoustic matching layer 4 with a masking tape, 8 is immersed (dipping) in a 3% ethanol diluted solution of an organosilicon compound, here, a silane coupling agent KBM-503 (manufactured by Shin-Etsu Chemical Co., Ltd.). ), And after being pulled up, heat treatment is performed at 100 ° C. for 1 hour to protect the ultrasonic probe 1 with the film 30 containing silicon oxide.
Completed 8. After that, remove the masking tape,
The remaining gap of the housing 6 was sealed and protected by the epoxy resin 12 (see FIG. 11). Further, the housing 6 and the flexible shaft 24 are brazed in advance by the silver solder 14, and the housing 6 is made of corrosion-resistant stainless steel plated with electroless nickel.

The operation of this embodiment will be described below. By coating the ultrasonic probe 18 with a coating agent that forms a film containing silicon oxide having extremely low moisture permeability, it is possible to prevent the acoustic medium from entering the inside of the ultrasonic probe 18. Therefore, the acoustic medium is the conductive resin 9a-
It does not swell c and does not deteriorate the conductivity. Further, in the acoustic medium, a physiological saline solution containing an alkali ion or an ultrasonic gel penetrates the sealing layer of the epoxy resin and invades the ceramics such as PZT and PLZT which are piezoelectric elements and the electrodes. There is no chance that it will end. Further, since the coating film 30 is sealed with the epoxy resin 12, it is possible to prevent defects such as the coating coming into contact with the sheath and missing, and the durability is further improved.

According to the present embodiment, it is possible to obtain a high-performance ultrasonic probe which is small in size and has particularly high durability without deterioration of characteristics and materials due to the acoustic medium.

The coating film may be directly formed on a member which is not desired to be brought into contact with the acoustic medium. For example, when the conductive resins 9a to 9c and the piezoelectric element 5 are protected, the acoustic matching layer 4 is not provided. It is also possible to assemble, further coat, and then provide the acoustic matching layer 4.

[0046]

The effect of the present invention is that the liquid or gel acoustic medium penetrates and permeates at least the organic polymer material of which the ultrasonic probe tip is exposed to cause deterioration of characteristics. It has been possible to provide an ultrasonic probe that prevents it.
The effect of claim 2 is to prevent the liquid or gel acoustic medium from penetrating and penetrating into the conductive adhesive connecting the piezoelectric element at the tip of the ultrasonic probe and the input / output electrodes to cause characteristic deterioration. It was possible to provide an ultrasonic probe that does. Claim 3
As a result, the ultrasonic probe can be provided which prevents the characteristics of the ultrasonic probe from being deteriorated due to high temperature curing exceeding the heat resistance allowable range of the ultrasonic probe.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a conventional example.

FIG. 2 is a sectional view showing a conventional example.

FIG. 3 is a perspective view showing a first embodiment.

FIG. 4 is a perspective view showing a first embodiment.

FIG. 5 is a cross-sectional view showing the first embodiment.

FIG. 6 is a cross-sectional view showing the first embodiment.

FIG. 7 is a cross-sectional view showing the first embodiment.

FIG. 8 is a cross-sectional view showing the first embodiment.

FIG. 9 is a cross-sectional view showing a second embodiment.

FIG. 10 is a cross-sectional view showing a third embodiment.

FIG. 11 is a cross-sectional view showing a fourth embodiment.

[Explanation of symbols]

 1 Back Load Material 3 Back Damping Material 4 Acoustic Matching Layer 5 Piezoelectric Element 6 Housing 7 GND Electrode 8 + Side Electrode 9a, 9b, 9c Conductive Resin 13 Coaxial Cable 25 Transducer Section 30, 31 Hydrophobic Organic Inorganic Material

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor ▲ Hiji ▼ Masaido 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (72) Inventor Naoto Shiga 2-43 Hatagaya, Shibuya-ku, Tokyo No. 2 Olympus Optical Co., Ltd. (72) Inventor Norihiko Sawada 2-43, Hatagaya, Shibuya-ku, Tokyo No. 43-2 Olympus Optical Co., Ltd. (72) Inventor Katsuhiro Wakabayashi 2-chome Hatagaya, Shibuya-ku, Tokyo No. 43-2 Olympus Optical Co., Ltd.

Claims (3)

[Claims] 1. A piezoelectric element having ± electrodes on its surface, an acoustic matching layer in contact with the ultrasonic wave emitting surface of the piezoelectric element, a backside damping material in contact with the anti-emissive surface of the piezoelectric element, and inputting / outputting current to / from the piezoelectric element. An ultrasonic probe comprising: an input / output electrode; a conductive member connecting the piezoelectric element and the input / output electrode; an insulating resin covering the conductive member; and a housing accommodating each member, at least the ultrasonic wave. An ultrasonic probe, wherein an exposed portion of the probe tip is covered with a film of a hydrophobic organic inorganic material containing silicon oxide or metal oxide. 2. A piezoelectric element having ± electrodes on its surface, an acoustic matching layer in contact with the ultrasonic radiation surface of the piezoelectric element, a backside damping material in contact with the anti-radiation surface of the piezoelectric element, and inputting / outputting current to / from the piezoelectric element. In an ultrasonic probe comprising an input / output electrode, a conductive adhesive connecting the piezoelectric element and the input / output electrode, an insulating resin covering the conductive adhesive, and a housing for housing each member, at least the ultrasonic probe An ultrasonic probe characterized in that a piezoelectric element, an input / output electrode and a conductive adhesive at the tip of the ultrasonic probe are covered with a film of a hydrophobic organic inorganic material containing silicon oxide or metal oxide. . 3. The ultrasonic probe according to claim 1, wherein the hydrophobic organic inorganic material contains silicon oxide or a metal oxide and is cured at a low temperature of 150 ° C. or lower.