JPH07301181A - Piezoelectric pump - Google Patents
Piezoelectric pumpInfo
- Publication number
- JPH07301181A JPH07301181A JP6093312A JP9331294A JPH07301181A JP H07301181 A JPH07301181 A JP H07301181A JP 6093312 A JP6093312 A JP 6093312A JP 9331294 A JP9331294 A JP 9331294A JP H07301181 A JPH07301181 A JP H07301181A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- pressure
- pump
- valve
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、医療機器、産業機器、
理化学機器等に用いられる圧電ポンプに関する。The present invention relates to medical equipment, industrial equipment,
The present invention relates to a piezoelectric pump used for physics and chemistry equipment.
【０００２】[0002]
【従来の技術】図１は現在、最も使用されているタイプ
の圧電ポンプの構造を示す縦断面図である。この圧電ポ
ンプは、ケーシング１の内周面に設けた固定用パッキン
７を介して円盤状の圧電振動子（以降、振動子と称す
る）６の外周部を密封支持し、この振動子に交流電圧を
印加して該振動子を振動させることにより、流体を吸込
口２から吸込用チェック弁４を通してポンプ室９内に吸
い込み、このポンプ室９内に吸い込んだ流体を吐出用チ
ェック弁５を通して吐出口３から吐出する構成になって
いる。2. Description of the Related Art FIG. 1 is a longitudinal sectional view showing the structure of a piezoelectric pump of the most used type at present. This piezoelectric pump hermetically supports the outer peripheral portion of a disk-shaped piezoelectric vibrator (hereinafter referred to as a vibrator) 6 via a packing 7 for fixing provided on the inner peripheral surface of the casing 1, and an AC voltage is applied to this vibrator. Is applied to vibrate the vibrator to suck the fluid from the suction port 2 into the pump chamber 9 through the suction check valve 4, and the fluid sucked into the pump chamber 9 is discharged through the discharge check valve 5. It is configured to discharge from 3.
【０００３】振動子６の表面には電極が露出しているの
で、電気絶縁性を確保するために、また流体から振動子
を保護するために、絶縁層８が形成されている。また、
チェック弁には、ボ−ル弁やダックビル型の弁が用いら
れていた。Since the electrodes are exposed on the surface of the vibrator 6, an insulating layer 8 is formed in order to ensure electric insulation and protect the vibrator from fluid. Also,
As the check valve, a ball valve or a duck bill type valve was used.
【０００４】[0004]
【発明が解決しようとする課題】圧電ポンプは従来のポ
ンプに比べて小型・軽量という特長から多方面への応用
が期待されているが、高粘度の流体の移送、高所への流
体の移送などを可能とするために、特に力のより一層の
向上が強く望まれている。一般に、ポンプ性能は振動子
の性能と非常に密接に関連しており、振動子の性能値で
ある振幅、発生力はポンプの吐出流量、吐出圧力に大き
く影響する。Piezoelectric pumps are expected to be applied to various fields because they are smaller and lighter in weight than conventional pumps, but transfer of highly viscous fluids and transfer of fluids to high places are required. It is strongly desired to further improve the power in order to enable the above. Generally, the pump performance is very closely related to the performance of the oscillator, and the amplitude and the generated force, which are the performance values of the oscillator, greatly affect the discharge flow rate and discharge pressure of the pump.
【０００５】振動子の発生力は、直流電圧の印加によっ
て生じる振動子の変位を打ち消すために要する外力の大
きさで定義されるもので、ポンプの吐出圧力の向上を図
るためにはこの発生力を向上させることが有効であると
推察される。振動子の発生力は印加電圧、振動子の厚
さ、圧電セラミック材料の圧電定数に比例するが、圧電
セラミック材料の圧電定数においては従来の材料に対す
る有意な改善は期待できず、また印加電圧の昇圧は振動
子の発生電流の増大につながり駆動中での大きな発熱、
さらには振動子の破損を招く。それゆえ実際的には、ポ
ンプの吐出圧力の向上には厚さを増して発生力を高めた
振動子を用いることが有効な手段となる。しかしなが
ら、従来構造の圧電ポンプにおいては、振動子の厚さを
増しても得られるポンプの吐出圧力はさほど向上せず、
高発生力振動子の使用によるポンプの高吐出圧力化は困
難であった。The generated force of the vibrator is defined by the magnitude of the external force required to cancel the displacement of the vibrator caused by the application of the DC voltage. In order to improve the discharge pressure of the pump, this generated force is required. It is presumed that it is effective to improve. The generated force of the vibrator is proportional to the applied voltage, the thickness of the vibrator, and the piezoelectric constant of the piezoelectric ceramic material.However, the piezoelectric constant of the piezoelectric ceramic material cannot be expected to be significantly improved over conventional materials, and the applied voltage Boosting leads to an increase in current generated by the oscillator, resulting in large heat generation during driving,
Furthermore, the oscillator is damaged. Therefore, in actuality, it is an effective means to improve the discharge pressure of the pump by using a vibrator having an increased thickness and an increased generation force. However, in the piezoelectric pump of the conventional structure, even if the thickness of the vibrator is increased, the discharge pressure of the obtained pump does not improve so much.
It has been difficult to increase the discharge pressure of the pump by using the oscillator of high generating force.
【０００６】一方、圧電ポンプを商用電源で駆動する
と、従来使用されている弁では圧電振動子の駆動周波数
である５０Ｈｚまたは６０Ｈｚに追従して開閉動作をし
ていないため、流体漏れを生じ、吐出圧力を低下させて
いることがわかった。On the other hand, when the piezoelectric pump is driven by a commercial power source, the conventionally used valve does not open and close by following the driving frequency of the piezoelectric vibrator of 50 Hz or 60 Hz, so that fluid leakage occurs and the discharge is performed. It turned out that it was reducing the pressure.
【０００７】[0007]
【課題を解決するための手段】上記のような現状に鑑
み、本発明者らは高吐出圧力の圧電ポンプを得るべく鋭
意検討を重ねた結果、本発明を完成するに至った。In view of the above situation, the present inventors have conducted intensive studies to obtain a piezoelectric pump having a high discharge pressure, and as a result, completed the present invention.
【０００８】すなわち、本発明は、圧電振動子の外周部
をその振動子の径にあったパッキンを取り付けたケ−シ
ングで挟みこみ固定し、そのケ−シングの片側に流体吸
込口および流体吐出口を設け、これら各々に吸込用、吐
出用チェック弁を設けてポンプ室を形成してなる圧電ポ
ンプにおいて、圧電振動子を厚さ０．３ｍｍ以下の樹脂
膜で被覆してなる圧電ポンプ、圧電振動子の外周部をそ
の振動子の径にあったパッキンを取り付けたケ−シング
で挟みこみ固定し、そのケ−シングの片側に流体吸込口
および流体吐出口を設け、これら各々に吸込用、吐出用
チェック弁を設けてポンプ室を形成してなる圧電ポンプ
において、上記吸込用、吐出用チェック弁に開口圧（正
圧で弁が開く圧力）が、０．０１ｋｇ／ｃｍ2以下、か
つ、耐圧（逆圧に弁が耐えられる圧力）が１ｋｇ／ｃｍ
2以上の特性を持つ傘型弁を用いたことを特徴とする圧
電ポンプ、および圧電振動子の外周部をその振動子の径
にあったパッキンを取り付けたケ−シングで挟みこみ固
定し、そのケ−シングの片側に流体吸込口および流体吐
出口を設け、これら各々に吸込用、吐出用チェック弁を
設けてポンプ室を形成してなる圧電ポンプにおいて、上
記吸込用、吐出用チェック弁に開口圧（正圧で弁が開く
圧力）が、０．０１ｋｇ／ｃｍ2以下、かつ、耐圧（逆
圧に弁が耐えられる圧力）が１ｋｇ／ｃｍ2以上の特性
を持つ傘型弁を用い、かつ、傘型弁の中心が圧電振動子
の直径上に存在し、弁の傘部がポンプ室壁面を介して重
なりあっていることを特徴とする圧電ポンプに関する。That is, according to the present invention, the outer peripheral portion of the piezoelectric vibrator is sandwiched and fixed by a casing having a packing having a diameter corresponding to the vibrator, and a fluid suction port and a fluid discharge port are provided on one side of the casing. A piezoelectric pump having an outlet and a suction chamber and a discharge check valve provided at each of the outlets to form a pump chamber, wherein the piezoelectric vibrator is coated with a resin film having a thickness of 0.3 mm or less. The outer peripheral part of the vibrator is sandwiched and fixed by a casing with a packing that fits the diameter of the vibrator, and a fluid suction port and a fluid discharge port are provided on one side of the casing. In a piezoelectric pump having a discharge check valve and a pump chamber formed therein, the suction and discharge check valves have an opening pressure (the pressure at which the valve opens with a positive pressure) of 0.01 kg / cm 2 or less, and Pressure resistance (for back pressure) Can withstand pressure) 1kg / cm
Piezoelectric pump characterized by using an umbrella-type valve having two or more characteristics, and the outer peripheral part of the piezoelectric vibrator is sandwiched and fixed by a casing equipped with packing matching the diameter of the vibrator, In a piezoelectric pump in which a fluid suction port and a fluid discharge port are provided on one side of the casing, and a suction and discharge check valve is provided in each of these to form a pump chamber, the suction and discharge check valves are opened. Use an umbrella-type valve having a pressure (pressure at which the valve opens with positive pressure) of 0.01 kg / cm 2 or less and pressure resistance (pressure at which the valve can withstand reverse pressure) of 1 kg / cm 2 or more, and The present invention relates to a piezoelectric pump, wherein the center of the umbrella-shaped valve is located on the diameter of the piezoelectric vibrator, and the umbrella portion of the valve is overlapped with the pump chamber wall surface.
【０００９】以下に、本発明を詳しく説明する。The present invention will be described in detail below.
【００１０】本発明においては、圧電振動子を厚さ０．
３ｍｍ以下の樹脂膜で被覆。絶縁することを一つの特徴
としている。この条件を満たすことにより、流体からの
保護、電気絶縁性の確保を果たしながら振動子の発生力
をロスなく流体に伝えて吐出圧力を向上させることが可
能となる。絶縁層が０．３ｍｍよりも厚い場合、振動子
を薄くすることによってポンプの吐出圧力を高めること
は可能であるが、振動子のインピーダンスが低下する
分、駆動中の発熱が大きくなり最終的には振動子の破損
を招くため、本手法によって吐出圧力が向上しうる範囲
は非常に限られたものになる。In the present invention, the piezoelectric vibrator has a thickness of 0.
Covered with a resin film of 3 mm or less. Insulation is one of the features. By satisfying this condition, it is possible to improve the discharge pressure by transmitting the generated force of the vibrator to the fluid without loss while protecting the fluid and ensuring electrical insulation. If the insulating layer is thicker than 0.3 mm, it is possible to increase the discharge pressure of the pump by thinning the vibrator, but the impedance of the vibrator decreases, and the heat generated during driving increases and finally Causes damage to the vibrator, so that the range in which the discharge pressure can be improved by this method is extremely limited.
【００１１】これに対して絶縁層を薄くすることは、振
動子の発生力を効果的にポンプの吐出圧力に反映させる
ものと考えられ、ポンプの高吐出圧力化にとって極めて
有効な手段となる。しかしながら、振動子の電気絶縁性
等を確保するためには絶縁層は確実に形成されていなけ
ればならず、その厚さは０．０５ｍｍ以上であることが
望ましい。On the other hand, thinning the insulating layer is considered to effectively reflect the generated force of the vibrator in the discharge pressure of the pump, and is an extremely effective means for increasing the discharge pressure of the pump. However, in order to ensure the electrical insulation of the vibrator, the insulating layer must be surely formed, and its thickness is preferably 0.05 mm or more.
【００１２】絶縁層を形成する材料としては、シリコン
ゴムのような弾性体よりもエポキシ、塩化ビニール、ポ
リイミド等の比較的弾性の低い絶縁性高分子樹脂を用い
るのが望ましい。また、絶縁層の形成法としては、振動
子に樹脂の前駆体（モノマー等）を塗布して熱または光
によって硬化させる方法、あるいは粘着剤を塗布してあ
る樹脂フィルムを貼付する方法などがあげられる。As a material for forming the insulating layer, it is desirable to use an insulating polymer resin having relatively low elasticity such as epoxy, vinyl chloride, polyimide, etc. rather than an elastic body such as silicon rubber. Examples of the method for forming the insulating layer include a method in which a resin precursor (monomer or the like) is applied to the oscillator and cured by heat or light, or a method in which a resin film coated with an adhesive is attached. To be
【００１３】本発明においては、高吐出圧の圧電ポンプ
を得るため、吸込用および吐出用チェック弁として、開
口圧（正圧で弁が開く圧力）が、０．０１ｋｇ／ｃｍ2
以下、かつ、耐圧（逆圧に弁が耐えられる圧力）が１ｋ
ｇ／ｃｍ2以上の特性を持つ傘型弁を用いることをもう
一つの特徴としている。In the present invention, in order to obtain a piezoelectric pump having a high discharge pressure, the opening pressure (the pressure at which the valve opens at a positive pressure) is 0.01 kg / cm 2 as a check valve for suction and discharge.
Below, and withstand pressure (pressure that the valve can withstand reverse pressure) is 1k
Another feature is to use an umbrella type valve having a characteristic of g / cm 2 or more.
【００１４】傘型弁の開口圧としては、０．０１ｋｇ／
ｃｍ2以下が望ましい。開口圧が０．０１ｋｇ／ｃｍ2を
こえると、弁が振動子の周波数に追従することができ
ず、ポンプの自吸力、吐出量が低下してしまう。一方、
傘型弁の耐圧としては、１ｋｇ／ｃｍ2以上が望まし
い。耐圧が１ｋｇ／ｃｍ2未満であると、流体を長い距
離または高い位置に圧送するとき、圧電ポンプの吐出用
チェック弁にかなりの圧力がかかり漏れを生じ、それに
よって、ポンプの吐出圧力が低下してしまう。The opening pressure of the umbrella type valve is 0.01 kg /
cm 2 or less is desirable. If the opening pressure exceeds 0.01 kg / cm 2 , the valve cannot follow the frequency of the oscillator, and the self-priming force of the pump and the discharge amount are reduced. on the other hand,
The pressure resistance of the umbrella valve is preferably 1 kg / cm 2 or more. When the pressure resistance is less than 1 kg / cm 2 , when the fluid is pumped to a long distance or a high position, a considerable amount of pressure is applied to the discharge check valve of the piezoelectric pump to cause a leak, which lowers the discharge pressure of the pump. Will end up.
【００１５】また、小型の圧電ポンプを製造するために
は、傘型弁の中心が圧電振動子の直径上に存在し、弁の
傘部がポンプ室壁面を介して重なりあっていることが好
ましく、この点も本発明の特徴の一つである。Further, in order to manufacture a small piezoelectric pump, it is preferable that the center of the umbrella-shaped valve exists on the diameter of the piezoelectric vibrator and that the umbrella portion of the valve overlaps with the wall surface of the pump chamber. This is also one of the features of the present invention.
【００１６】本発明の圧電振動子を構成する圧電体とし
ては、セラミックス系、有機系のものが使用でき、具体
的には、セラミックス系ではチタン酸鉛、チタン酸ジル
コン酸鉛等、有機系ではポリフッ化ビニリデン等が挙げ
られる。より好ましくは、誘電率３０００以上、電気機
械結合係数Ｋｐ５０％以上の圧電板を金属板を介してそ
の両側に分極方向を揃えて接着し、直径が２０〜８０ｍ
ｍ、振動子の厚さが１．０〜２５ｍｍ、静電容量が１５
０〜２００ｎＦの特性をもつものがよい。As the piezoelectric body constituting the piezoelectric vibrator of the present invention, ceramic-based or organic-based ones can be used. Specifically, ceramic-based lead titanate, lead titanate zirconate, etc., and organic-based ones can be used. Examples thereof include polyvinylidene fluoride. More preferably, a piezoelectric plate having a dielectric constant of 3,000 or more and an electromechanical coupling coefficient of Kp50% or more is bonded to both sides of the metal plate with the polarization directions aligned and the diameter is 20 to 80 m.
m, the thickness of the vibrator is 1.0 to 25 mm, and the capacitance is 15
It is preferable to have a characteristic of 0 to 200 nF.
【００１７】ポンプの吐出口はできるだけ固定用パッキ
ンに近いほうが好ましい。望ましくはポンプの吐出口の
外周部の最も固定用パッキンに近い位置を、固定用パッ
キンの内端の０〜５ｍｍ以内に取り付けるのがよい。吐
出口の外周部の最も固定用パッキンに近い位置を固定用
パッキンの内端の５ｍｍより遠い位置に設けると、ポン
プ室内を空の状態から駆動したとき、空気が吐出口と固
定用パッキンとの間に溜り、該パッキンから遠ざかるに
従い溜まる空気の量も増え、空気を除去するのも困難と
なることがある。It is preferable that the discharge port of the pump is as close to the fixing packing as possible. Desirably, the outermost portion of the discharge port of the pump is attached to a position closest to the fixing packing within 0 to 5 mm from the inner end of the fixing packing. When the position closest to the fixing packing on the outer peripheral portion of the discharge port is provided at a position farther than 5 mm at the inner end of the fixing packing, when the pump chamber is driven from an empty state, air is discharged between the discharge port and the fixing packing. The amount of air that collects in the gap and increases as the distance from the packing increases, and it may be difficult to remove the air.
【００１８】[0018]
【実施例】次に本発明を実施例により説明する。EXAMPLES The present invention will now be described with reference to examples.
【００１９】実施例１ Ｐｂ、Ｚｒ、Ｔｉ、Ｌａからなる複合酸化物を焼結して
直径５０ｍｍ、厚さ０．６ｍｍの円盤状に機械加工を施
し、その両面に電極を焼き付け、分極処理を施して、比
誘電率３９００、電気機械結合係数ｋｐ６０％の圧電特
性を有する円盤状の圧電セラミック板を作製した。この
圧電セラミック板２枚を厚さ０．１ｍｍのリン青銅板を
介して分極方向を揃えて接着し、電気的に２枚の圧電セ
ラミック板が並列になるようにリード線を取り付けて振
動子を得た。得られた振動子を、直径３７．５ｍｍのＯ
リングで固定する治具にセットし、電極面の中心から半
径２ｍｍ内の領域を荷重点として発生力を調べた結果、
その値は３．０ｋｇｆであった。なお発生力の測定にお
いては振動子に直流２００Ｖを印加した。Example 1 A composite oxide composed of Pb, Zr, Ti and La was sintered and machined into a disk shape with a diameter of 50 mm and a thickness of 0.6 mm, and electrodes were baked on both sides of the disk and polarized. By doing so, a disk-shaped piezoelectric ceramic plate having a dielectric constant of 3900 and an electromechanical coupling coefficient of kp60% and having piezoelectric characteristics was produced. The two piezoelectric ceramic plates are bonded with a phosphor bronze plate having a thickness of 0.1 mm in the same polarization direction, and lead wires are attached so that the two piezoelectric ceramic plates are electrically parallel to each other to form a vibrator. Obtained. The obtained vibrator was replaced with O having a diameter of 37.5 mm.
It was set on a jig to be fixed with a ring, and the generated force was examined with the area within a radius of 2 mm from the center of the electrode surface as the load point.
The value was 3.0 kgf. In the measurement of the generated force, DC of 200 V was applied to the vibrator.
【００２０】この振動子の全面にエポキシ樹脂の前駆体
を塗布、硬化させて厚さ０．２ｍｍのエポキシ樹脂の絶
縁層を形成した。A precursor of epoxy resin was applied and cured on the entire surface of this vibrator to form an insulating layer of epoxy resin having a thickness of 0.2 mm.
【００２１】次にこの振動子を用いて図１と同様の構造
の圧電ポンプを組み立てた。すなわち、絶縁層で被覆さ
れた振動子を、外径５０ｍｍ、内径４６ｍｍ、厚さ０．
３ｍｍのシリコンゴムからなる固定用パッキンを介し
て、アルミニウムからなる平板ケーシングで挟んだ。こ
こでケーシングには吸込口及び吐出口としてノズルを設
けており、それらのノズルにはダックビル型のチェック
弁をそれぞれに取り付けた。Next, using this vibrator, a piezoelectric pump having the same structure as that shown in FIG. 1 was assembled. That is, a vibrator covered with an insulating layer has an outer diameter of 50 mm, an inner diameter of 46 mm, and a thickness of 0.
It was sandwiched between flat plate casings made of aluminum via a packing for fixing made of 3 mm silicon rubber. Nozzles are provided in the casing as suction ports and discharge ports, and duckbill-type check valves are attached to these nozzles.
【００２２】実施例２ 実施例１において使用した圧電セラミック板のサイズを
直径５０ｍｍ、厚さ１．０ｍｍに変えて振動子を作製し
た。実施例１と同様の測定方法で発生力を測定した結
果、５ｋｇｆであった。この振動子の全面に実施例１と
同様にして厚さ０．２ｍｍのエポキシ樹脂の絶縁層を形
成し、この振動子を用いて実施例１と同様にして圧電ポ
ンプを作製した。Example 2 A vibrator was produced by changing the size of the piezoelectric ceramic plate used in Example 1 to a diameter of 50 mm and a thickness of 1.0 mm. As a result of measuring the generated force by the same measuring method as in Example 1, it was 5 kgf. An epoxy resin insulating layer having a thickness of 0.2 mm was formed on the entire surface of this vibrator in the same manner as in Example 1, and a piezoelectric pump was manufactured in the same manner as in Example 1 using this vibrator.
【００２３】実施例３ 実施例１と同様の振動子の全面にシリコンゴムの前駆体
を塗布し、硬化させて厚さ０．２ｍｍのシリコンゴムの
絶縁層を形成した。次にこの振動子を用いて実施例１と
同様にして圧電ポンプを作製した。Example 3 The same precursor as in Example 1 was coated with a precursor of silicon rubber and cured to form a 0.2 mm thick insulating layer of silicon rubber. Next, using this vibrator, a piezoelectric pump was manufactured in the same manner as in Example 1.
【００２４】実施例４ 実施例２と同様の振動子の全面に実施例３と同様にして
厚さ０．２ｍｍのシリコンゴムの絶縁層を形成した。次
にこの振動子を用いて実施例１と同様にして圧電ポンプ
を作製した。Example 4 In the same manner as in Example 3, an insulating layer of silicon rubber having a thickness of 0.2 mm was formed on the entire surface of the vibrator similar to that in Example 2. Next, using this vibrator, a piezoelectric pump was manufactured in the same manner as in Example 1.
【００２５】比較例１ 実施例１と同様の振動子の全面にシリコンゴムの前駆体
を塗布し、硬化させて厚さ２．０ｍｍのシリコンゴムの
絶縁層を形成した。これを用いて実施例１と同様にして
圧電ポンプを作製した。Comparative Example 1 A precursor of silicon rubber was applied to the entire surface of the same oscillator as in Example 1 and cured to form an insulating layer of silicon rubber having a thickness of 2.0 mm. Using this, a piezoelectric pump was manufactured in the same manner as in Example 1.
【００２６】比較例２ 実施例２と同様の振動子の全面に比較例１と同様にして
厚さ２．０ｍｍのシリコンゴムの絶縁層を形成した。こ
れを用いて実施例１と同様にして圧電ポンプを作製し
た。Comparative Example 2 An insulating layer of silicon rubber having a thickness of 2.0 mm was formed in the same manner as in Comparative Example 1 on the entire surface of a vibrator similar to that of Example 2. Using this, a piezoelectric pump was manufactured in the same manner as in Example 1.
【００２７】実施例１〜４、比較例１および２で得た圧
電ポンプに２００Ｖ、５０Ｈｚの商用電源を接続して２
５℃の水を流した時の最大吐出圧力を測定した。結果を
表１に示す。The piezoelectric pumps obtained in Examples 1 to 4 and Comparative Examples 1 and 2 were connected to a commercial power source of 200 V and 50 Hz, and 2
The maximum discharge pressure when flowing water at 5 ° C was measured. The results are shown in Table 1.
【００２８】[0028]
【表１】 [Table 1]
【００２９】実施例５ 本実施例で用いた圧電ポンプの構成を図２に示す。圧電
振動子としては、Ｐｂ，Ｚｒ，Ｔｉ，Ｌａからなる複合
酸化物を焼結して機械加工を施した、誘電率３０００、
電気機械結合係数Ｋｐ６２％の圧電素子２枚の両面に電
極を塗布し、リン青銅板を介して分極方向を揃えて貼り
合わせたものに、交流電圧を印加するためのリ−ド線を
取り付け、その表面を電気的に絶縁するためにエポキシ
樹脂をコーティングした。圧電振動子の直径は５０ｍｍ
φ、厚さ（エポキシ樹脂塗布後）は１．５ｍｍであっ
た。Embodiment 5 FIG. 2 shows the structure of the piezoelectric pump used in this embodiment. As the piezoelectric vibrator, a complex oxide of Pb, Zr, Ti, and La is sintered and machined, and the dielectric constant is 3000.
Electrodes were applied to both sides of two piezoelectric elements having an electromechanical coupling coefficient Kp of 62%, and the lead wires for applying an AC voltage were attached to the ones in which the polarization directions were aligned and bonded via a phosphor bronze plate, The surface was coated with an epoxy resin to electrically insulate it. The diameter of the piezoelectric vibrator is 50 mm
φ and the thickness (after applying the epoxy resin) were 1.5 mm.
【００３０】ケ−シングには吸込口と吐出口が設けら
れ、それぞれには吸込用傘型弁、吐出用傘型弁を取り付
けた。本実施例では、開口圧が０．００５ｋｇ／ｃ
ｍ2、耐圧１．１ｋｇ／ｃｍ2を示す傘型弁を用いた。The casing is provided with a suction port and a discharge port, and a suction umbrella type valve and a discharge umbrella type valve are attached to each of them. In this embodiment, the opening pressure is 0.005 kg / c.
An umbrella type valve having m 2 and a pressure resistance of 1.1 kg / cm 2 was used.
【００３１】また、ポンプ室と吸込口、吐出口をつなぐ
連通孔としては、直径２ｍｍの孔を弁の中心部から６ｍ
ｍの位置に８個設けた。As a communication hole connecting the pump chamber, the suction port, and the discharge port, a hole having a diameter of 2 mm is 6 m from the center of the valve.
Eight of them were provided at the position of m.
【００３２】本発明の圧電ポンプを用いて水を流した場
合のポンプ特性の測定結果を表２に示す。なお、圧電振
動子には、２００Ｖ、５０Ｈｚの交流電圧を印加した。Table 2 shows the measurement results of the pump characteristics when water was flowed using the piezoelectric pump of the present invention. An alternating voltage of 200 V and 50 Hz was applied to the piezoelectric vibrator.
【００３３】比較例３ 実施例５の傘型弁のかわりにボ−ル弁を用いた他は、す
べて実施例５と同様に行った。結果を表２に示す。Comparative Example 3 The procedure of Example 5 was repeated except that a ball valve was used instead of the umbrella valve of Example 5. The results are shown in Table 2.
【００３４】比較例４ 実施例５の傘型弁のかわりに、開口圧が０．０５ｋｇ／
ｃｍ2である傘型弁を用いた他は、すべて実施例５と同
様に行った。結果を表２に示す。Comparative Example 4 Instead of the umbrella type valve of Example 5, the opening pressure was 0.05 kg /
The same procedure as in Example 5 was carried out except that an umbrella valve having a cm 2 was used. The results are shown in Table 2.
【００３５】[0035]
【表２】 [Table 2]
【００３６】実施例６ 本実施例で用いた圧電ポンプの構成を図３に示す。この
圧電ポンプは従来の圧電ポンプと比較して非常に小型化
されたものであり、医療機器、産業機器および理化学機
器等への組込（内蔵）用として好適なものである。固定
用パッキンとしては外径２５ｍｍ、内径２１ｍｍ、厚さ
３００μｍのシリコンゴムを使用し、圧電振動子は、Ｐ
ｂ，Ｚｒ，Ｔｉ，Ｌａからなる複合酸化物を焼結して機
械加工を施した、誘電率３９００、電気機械結合係数Ｋ
ｐ６０％の圧電素子２枚の両面に電極を塗布し、リン青
銅板を介して分極方向を揃えて貼り合わせたものに、交
流電圧を印加するためのリ−ド線を取り付けたものから
なる。この圧電振動子にはその表面を電気的に絶縁する
ためにエポキシ樹脂をコーティングした。なお、振動子
の直径は２５ｍｍφ、厚さ（エポキシ樹脂塗布後）は
１．０ｍｍであった。ケ−シングには吸込口と吐出口が
設けられ、それぞれには吸込用傘型弁、吐出用傘型弁を
取り付けた。本実施例では、開口圧が０．００５ｋｇ／
ｃｍ2、耐圧１．１ｋｇ／ｃｍ2を示す傘型弁を用い、弁
の中心が圧電振動子の直径上に存在し、かつ、お互いの
傘部分の一部がポンプ室の隔壁をはさんで重なるように
設置した。Embodiment 6 The structure of the piezoelectric pump used in this embodiment is shown in FIG. This piezoelectric pump is much smaller than conventional piezoelectric pumps, and is suitable for being incorporated (built-in) in medical equipment, industrial equipment, physicochemical equipment, and the like. The fixing packing is made of silicone rubber having an outer diameter of 25 mm, an inner diameter of 21 mm, and a thickness of 300 μm.
Sintered complex oxide composed of b, Zr, Ti, La and machined, dielectric constant 3900, electromechanical coupling coefficient K
Electrodes are applied to both surfaces of two p60% piezoelectric elements, and they are attached by aligning the polarization directions through a phosphor bronze plate, and a lead wire for applying an AC voltage is attached. This piezoelectric vibrator was coated with an epoxy resin to electrically insulate its surface. The vibrator had a diameter of 25 mmφ and a thickness (after applying the epoxy resin) of 1.0 mm. The casing was provided with a suction port and a discharge port, and a suction umbrella type valve and a discharge umbrella type valve were attached to each. In this embodiment, the opening pressure is 0.005 kg /
cm 2, using an umbrella-type valve showing the breakdown voltage 1.1 kg / cm 2, there center of the valve are on the diameter of the piezoelectric vibrator, and a portion of the umbrella portion of each other across the partition wall of the pump chamber It installed so that it might overlap.
【００３７】作成した圧電ポンプのサイズは、３５ｍｍ
（縦）×３５ｍｍ（横）×２５ｍｍ（高さ）と非常に小
型であったにもかかわらず、この圧電ポンプに水を流し
た場合のポンプ特性は、吐出量１００ｍｌ／分、吐出圧
力０．３ｋｇ／ｃｍ2であった。なお、圧電振動子に
は、２００Ｖ、５０Ｈｚの交流電圧を印加した。The size of the prepared piezoelectric pump is 35 mm.
Despite being a very small size (vertical) × 35 mm (horizontal) × 25 mm (height), the pump characteristics when water is flowed through this piezoelectric pump have a discharge rate of 100 ml / min and a discharge pressure of 0. It was 3 kg / cm 2 . An alternating voltage of 200 V and 50 Hz was applied to the piezoelectric vibrator.
【００３８】[0038]
【発明の効果】本発明の圧電ポンプによれば、圧電振動
子の絶縁層を薄くすることによって振動子の発生力がロ
スなく流体に伝わるので、厚さを増して発生力を高めた
振動子を用いることにより、より高い吐出圧力を得るこ
とが可能になる。また、圧電ポンプのチェック弁として
傘型弁を用いることにより、圧電ポンプの小型化も容易
となり、さらに特定の物性を有する傘型弁を用いること
により、圧電振動子の振動数に弁が追従して開閉動作を
するのでポンプ効率を向上することができ、ポンプ特性
である自吸力、吐出量、吐出圧力を上げることができ
る。According to the piezoelectric pump of the present invention, since the generated force of the vibrator is transmitted to the fluid without loss by thinning the insulating layer of the piezoelectric vibrator, the vibrator whose thickness is increased to increase the generated force By using, it becomes possible to obtain a higher discharge pressure. Also, by using an umbrella-type valve as a check valve for the piezoelectric pump, it is easy to downsize the piezoelectric pump, and by using an umbrella-type valve having specific physical properties, the valve follows the frequency of the piezoelectric vibrator. Since the opening and closing operations are performed by the opening and closing operation, the pump efficiency can be improved, and the self-suction force, the discharge amount, and the discharge pressure, which are pump characteristics, can be increased.
【図１】 本発明の圧電ポンプの構造を示す断面図であ
る。FIG. 1 is a sectional view showing a structure of a piezoelectric pump of the present invention.
【図２】 本発明の圧電ポンプの構造を示す断面図であ
る。FIG. 2 is a cross-sectional view showing the structure of the piezoelectric pump of the present invention.
【図３】 本発明の圧電ポンプの構造を示す断面図であ
る。FIG. 3 is a cross-sectional view showing the structure of the piezoelectric pump of the present invention.
１ ： ケーシング ２ ： 吸込口 ３ ： 吐出口 ４ ： 吸込用チェック弁 ５ ： 吐出用チェック弁 ６ ： 圧電振動子 ７ ： 固定用パッキン ８ ： 絶縁層 ９ ： ポンプ室 1: Casing 2: Suction port 3: Discharge port 4: Suction check valve 5: Discharge check valve 6: Piezoelectric vibrator 7: Fixing packing 8: Insulating layer 9: Pump chamber
Claims (3)
あったパッキンを取り付けたケ−シングで挟みこみ固定
し、そのケ−シングの片側に流体吸込口および流体吐出
口を設け、これら各々に吸込用、吐出用チェック弁を設
けてポンプ室を形成してなる圧電ポンプにおいて、 圧電振動子を厚さ０．３ｍｍ以下の樹脂膜で被覆してな
る圧電ポンプ。1. An outer peripheral portion of a piezoelectric vibrator is sandwiched and fixed by a casing having packing attached to the diameter of the vibrator, and a fluid suction port and a fluid discharge port are provided on one side of the casing. A piezoelectric pump in which a check chamber for suction and a check valve for discharge are provided in each of them to form a pump chamber, wherein a piezoelectric vibrator is covered with a resin film having a thickness of 0.3 mm or less.
あったパッキンを取り付けたケ−シングで挟みこみ固定
し、そのケ−シングの片側に流体吸込口および流体吐出
口を設け、これら各々に吸込用、吐出用チェック弁を設
けてポンプ室を形成してなる圧電ポンプにおいて、 上記吸込用、吐出用チェック弁に開口圧（正圧で弁が開
く圧力）が、０．０１ｋｇ／ｃｍ2以下、かつ、耐圧
（逆圧に弁が耐えられる圧力）が１ｋｇ／ｃｍ2以上の
特性を持つ傘型弁を用いたことを特徴とする圧電ポン
プ。2. An outer peripheral portion of a piezoelectric vibrator is sandwiched and fixed by a casing having a packing having a diameter corresponding to that of the oscillator, and a fluid suction port and a fluid discharge port are provided on one side of the casing. In a piezoelectric pump in which a check chamber for suction and a check valve for discharge are provided in each of these to form a pump chamber, the check valve for suction and discharge has an opening pressure (a pressure at which the valve opens at a positive pressure) of 0.01 kg / cm 2 or less, and a piezoelectric pump, wherein a breakdown voltage (pressure valve in the opposite pressure withstand test) using an umbrella-type valve having a 1 kg / cm 2 or more properties.
あったパッキンを取り付けたケ−シングで挟みこみ固定
し、そのケ−シングの片側に流体吸込口および流体吐出
口を設け、これら各々に吸込用、吐出用チェック弁を設
けてポンプ室を形成してなる圧電ポンプにおいて、 上記吸込用、吐出用チェック弁に開口圧（正圧で弁が開
く圧力）が、０．０１ｋｇ／ｃｍ2以下、かつ、耐圧
（逆圧に弁が耐えられる圧力）が１ｋｇ／ｃｍ2以上の
特性を持つ傘型弁を用い、かつ、 傘型弁の中心が圧電振動子の直径上に存在し、弁の傘部
がポンプ室壁面を介して重なりあっていることを特徴と
する圧電ポンプ。3. A piezoelectric vibrator is fixed by sandwiching the outer peripheral portion of the piezoelectric vibrator with a casing fitted with a packing suitable for the diameter of the piezoelectric oscillator, and providing a fluid suction port and a fluid discharge port on one side of the casing. In a piezoelectric pump in which a check chamber for suction and a check valve for discharge are provided in each of these to form a pump chamber, the check valve for suction and discharge has an opening pressure (a pressure at which the valve opens at a positive pressure) of 0.01 kg / cm 2 or less, and, using the umbrella valve that withstand (pressure valve in the opposite pressure withstand) has a 1 kg / cm 2 or more characteristics, and the center of the umbrella valve is present on the piezoelectric vibrator diameter A piezoelectric pump in which the valve head portion is overlapped with the pump chamber wall surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09331294A JP3460301B2 (en) | 1994-05-02 | 1994-05-02 | Piezo pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09331294A JP3460301B2 (en) | 1994-05-02 | 1994-05-02 | Piezo pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07301181A true JPH07301181A (en) | 1995-11-14 |
| JP3460301B2 JP3460301B2 (en) | 2003-10-27 |
Family
ID=14078806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09331294A Expired - Fee Related JP3460301B2 (en) | 1994-05-02 | 1994-05-02 | Piezo pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3460301B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100427758C (en) * | 2004-03-01 | 2008-10-22 | 阿尔卑斯电气株式会社 | Liquid pump |
| JP2012176379A (en) * | 2011-02-28 | 2012-09-13 | Yoshino Kogyosho Co Ltd | Trigger type liquid injector |
| CN105465590A (en) * | 2015-12-16 | 2016-04-06 | 太原重工股份有限公司 | Lubricating system and equipment with same |
| CN108175883A (en) * | 2018-01-31 | 2018-06-19 | 吉林大学 | A kind of novel bionic valve heart pump based on piezoelectric fibre composite material driving |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008133100A1 (en) * | 2007-04-20 | 2008-11-06 | Alps Electric Co., Ltd. | Diaphragm pump |
-
1994
- 1994-05-02 JP JP09331294A patent/JP3460301B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100427758C (en) * | 2004-03-01 | 2008-10-22 | 阿尔卑斯电气株式会社 | Liquid pump |
| JP2012176379A (en) * | 2011-02-28 | 2012-09-13 | Yoshino Kogyosho Co Ltd | Trigger type liquid injector |
| CN105465590A (en) * | 2015-12-16 | 2016-04-06 | 太原重工股份有限公司 | Lubricating system and equipment with same |
| CN108175883A (en) * | 2018-01-31 | 2018-06-19 | 吉林大学 | A kind of novel bionic valve heart pump based on piezoelectric fibre composite material driving |
| CN108175883B (en) * | 2018-01-31 | 2023-09-26 | 吉林大学 | Novel bionic valve heart pump based on piezoelectric fiber composite material drive |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3460301B2 (en) | 2003-10-27 |
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