JPH0729642Y2 - 半導体ケ−ス内異物除去装置 - Google Patents

半導体ケ−ス内異物除去装置

Info

Publication number
JPH0729642Y2
JPH0729642Y2 JP766687U JP766687U JPH0729642Y2 JP H0729642 Y2 JPH0729642 Y2 JP H0729642Y2 JP 766687 U JP766687 U JP 766687U JP 766687 U JP766687 U JP 766687U JP H0729642 Y2 JPH0729642 Y2 JP H0729642Y2
Authority
JP
Japan
Prior art keywords
semiconductor case
foreign matter
semiconductor
vacuum source
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP766687U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63115225U (enExample
Inventor
智郁 中野
弘 菅野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP766687U priority Critical patent/JPH0729642Y2/ja
Publication of JPS63115225U publication Critical patent/JPS63115225U/ja
Application granted granted Critical
Publication of JPH0729642Y2 publication Critical patent/JPH0729642Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP766687U 1987-01-21 1987-01-21 半導体ケ−ス内異物除去装置 Expired - Lifetime JPH0729642Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP766687U JPH0729642Y2 (ja) 1987-01-21 1987-01-21 半導体ケ−ス内異物除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP766687U JPH0729642Y2 (ja) 1987-01-21 1987-01-21 半導体ケ−ス内異物除去装置

Publications (2)

Publication Number Publication Date
JPS63115225U JPS63115225U (enExample) 1988-07-25
JPH0729642Y2 true JPH0729642Y2 (ja) 1995-07-05

Family

ID=30791332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP766687U Expired - Lifetime JPH0729642Y2 (ja) 1987-01-21 1987-01-21 半導体ケ−ス内異物除去装置

Country Status (1)

Country Link
JP (1) JPH0729642Y2 (enExample)

Also Published As

Publication number Publication date
JPS63115225U (enExample) 1988-07-25

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