JPH07294223A - Shape-measuring apparatus - Google Patents

Abstract

PURPOSE:To measure the data of a height of the surface of a to-be-measured object by a shape-operating means at high speeds with high accuracy, by switching an optical output from both sides of a position-detecting means in a plurality of stages, guiding a slit light by a condenser lens to the position-detecting means, and detecting the condensing position of a scattering light by a photocurrent signal. CONSTITUTION:A position-detecting means 106 and a light output-controlling means 122 for controlling a light output from the slit light sources 101 and 108 are provided in the apparatus. A plurality of first-dimensional light position-detecting elements of a non-splitting type are arranged in the direction of a shorter side of the position-detecting means 106. The slit light sources 101 and 108 are set on both sides of the position-detecting means 106 in the direction of a longer side. A scattering light reflected from a to-be-measured object 104 when a slit light 110 is cast on the object is condensed onto the means 106 by a condenser lens 105. A photodetecting means 107 for outputting a photocurrent signal from the condensed scattering light, a data-selecting means 116, a position-operating means 117, a coordinate-operating means 118, a shape-operating means 125 and an apparatus-controlling means for controlling the whole system are also provided. Since an area forming a blind spot is eliminated and a saturation phenomenon of photodetecting elements is reduced, the data of the height of the surface of the to-be-measured object can be obtained at high speeds with high accuracy.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring device for measuring the shape of an object in a non-contact manner.

[0002]

2. Description of the Related Art As a conventional shape measuring apparatus, a contact type three-dimensional measuring instrument is often used, but a three-dimensional measuring instrument capable of non-contact and high-speed measurement has been developed because it takes a long measuring time. As an example of a non-contact three-dimensional measuring instrument, Japanese Patent Laid-Open No.
Japanese Patent Laid-Open No. 1-111974 proposes a non-contact three-dimensional measuring instrument using laser light.

FIG. 18 shows the basic configuration of the conventional example.
As shown in the figure, the three-dimensional shape of the printed circuit board 1802 to which the component 1801 is attached is measured.
Reference numeral 1803 is a slit illumination light, 1804 and 1805 are CCD cameras for imaging reflected light 1810 and 1811 of the slit illumination light, 1806 and 1807 are height data detection circuits, 1808 is a combining circuit, and 1812 is a moving stage. The operation will be described below.

A linear slit illumination light 1803 is applied to the printed circuit board 1802 from above, and reflected light 1810 from the printed circuit board 1802 and the component 1801.
And 1811 are detected by CCD cameras 1804 and 1805 provided on both sides of the slit illumination light 1803. The CCD cameras 1804 and 1805 are respectively installed at a predetermined angle with the slit illumination light 1803, and measure the three-dimensional shapes of the printed board 1802 and the component 1801 by the principle of the optical cutting method. In addition,
The printed circuit board 1802 is installed on the moving stage 1812, and the slit illumination light 1803 moves in the Y direction by the moving stage 1812.
The entire 3D shape is measured. CCD camera 180
The output signals of 4 and 1805 are input to height data detection circuits 1806 and 1807, respectively, and the height data of the printed circuit board 1802 and the component 1801 are calculated. Also, the brightness data of the reflected light and its peak width are calculated at the same time as the height data.
It is output to 808. The synthesizing circuit 1808 selects one of the height data output from the height data detecting circuits by using the luminance data of the input reflected light and its peak width, and finally outputs the final height data. Height data of the printed circuit board 1802 and the component 1801 are obtained. That is, first, the height data having the larger luminance data is selected, and when the luminance data is saturated, it is not possible to compare the sizes, so that the saturated peak widths W1 and W2 are set as shown in FIG. The height data of the wider one (W1 in the illustrated example) is selected for comparison.

[0005]

As described above, the conventional shape measuring apparatus is provided with CCD cameras on both sides and obtains height data for each of them, so that slit illumination light radiated in the shadow of a part or the like can be imaged. Even if it is not possible to compare with the intensity of the brightness data, the combination of a brightness peak width comparison circuit in the synthesis circuit will reduce the loss The height data can be selected either.

However, when the brightness data is saturated, the brightness peak position of the reflected light cannot be accurately obtained, so it cannot be said that either height data shows accurate height data. . That is, in the three-dimensional measurement using the light-section method, the brightness distribution of the slit reflected light imaged by the camera is not always symmetrical to the left and the right.
As disclosed in 1-96504, there are various methods for accurately obtaining the luminance peak position of a slit image captured for high-accuracy measurement, and when the luminance of reflected light is saturated, Since the peak position cannot be captured and can only be predicted, the height data obtained from the saturated luminance data contains an error. For example, when measuring the height of a component to check whether the component on the printed circuit board is installed correctly, inaccurate height data cannot be used for accurate inspection. No synthetic method can be applied. The present invention solves the above-mentioned problems of the prior art, and an object of the present invention is to provide a shape measuring apparatus capable of reducing measurement error and performing high-speed and highly accurate measurement.

[0007]

In order to achieve this object, the present invention firstly provides an imaging surface formed by arranging a plurality of non-division type one-dimensional optical position detecting elements in the short side direction. The position detecting means, the two sets of slit light source and slit scanning means arranged on both sides of the one-dimensional light position detecting element in the long side direction, the light output control means for controlling the light output from the slit light source, and the slit light Light receiving means for collecting scattered light obtained by reflection from the object to be measured by irradiation on the position detecting means with a condenser lens and outputting a photocurrent signal, data selecting means, position calculating means, coordinate calculating means and data integration It comprises a shape calculation means having means and a device control means for controlling the entire system.

Secondly, the data selecting means determines from the output current sum determining means for determining whether the sum of the photocurrent signals output from the one-dimensional optical position detecting elements two by two is saturated, and the one-dimensional optical position detecting element. Output current determination means for determining whether each of the photocurrent signals output two by two is saturated, and determination results from the output current sum determination means and the output current determination means are sequentially obtained corresponding to different optical outputs. It is composed of current selection means for selecting one photocurrent signal from the photocurrent signals.

Thirdly, the data selecting means is different from the output current sum judging means for judging the magnitude of the sum of the photocurrent signals outputted from the one-dimensional photo position detecting element two by two and the predetermined threshold value. A rearrangement for rearranging the photocurrent signals output from the two-dimensional one-dimensional optical position detecting element two by two using the determination result sequentially output from the output current sum determining means in accordance with the light output. Means and output current determination means for determining whether or not each of the photocurrent signals output from the sorting means in the order of being closer to the threshold value is saturated.

Fourthly, the data integrating means displays height data obtained from the coordinate calculating means and a photocurrent signal corresponding to the height data in a table having x and y coordinate values on two axes as x and y coordinate values of the data. And a maximum photocurrent determining means for determining height data corresponding to the maximum value of the photocurrent signal as an output value for each element of the table.

Fifth, the data unifying means stores the two kinds of height data obtained from the coordinate calculating means and the photocurrent signal corresponding to the height data in two kinds of tables having x and y coordinate values on two axes. First one-side height table creating means and second one-side height table creating means for storing in accordance with the x and y coordinate values of, and two types created by the first and second one-side height table creating means When the tables are integrated, the number-of-data comparison means for comparing the number of data stored for each element of the table with a predetermined threshold value, and the number-of-data comparison means for each element of the table 1st and 2nd
If the number of data elements of both tables is within the threshold value, the data stored in the elements of both tables is output, and if only one of them is within the threshold value, it is within the threshold value. Data determining means for outputting the other data, and maximum photocurrent determining means for determining the height data corresponding to the maximum value in the photocurrent signal output from the use data determining means for each element of the table as the output value. And when the number of data in the first and second tables is neither within the threshold value by the data number comparing means, the value is closest to the average value of the height data already determined as the output value of the neighboring elements on the table. It is composed of neighborhood averaging means for determining height data as an output value.

Sixth, the maximum photocurrent determining means excludes the maximum value and the minimum value of the height data from the input data, and the maximum of the photocurrent signal among the data from the extreme value excluding means. It is composed of extreme value exclusion maximum photocurrent determining means for determining the height corresponding to the value as the output value.

Seventh, the position calculation means stores a plurality of position correction values corresponding to the light receiving position for each one-dimensional optical position detecting element in accordance with the distance to the object to be measured. It comprises a storage means and a position correction value selection means for selecting one correction value according to the distance from the plural kinds of position correction values.

[0014]

According to the present invention, according to the above structure, first, the light output is switched from the both sides of the position detecting means in a plurality of stages to irradiate the slit light to the object to be measured and the scattered light obtained by being reflected from the object to be measured is generated. The condensing lens guides the position to the position detecting means, and the condensing position of the scattered light on the position detecting means which changes according to the unevenness of the height on the object to be detected is detected by the photocurrent signal, and the shape calculating means is used from the photocurrent signal. Height data of the surface of the object to be measured can be acquired at high speed and with high accuracy.

Secondly, the output current sum judging means judges the magnitude of the sum of the photocurrent signals outputted from the one-dimensional photo position detecting element by two and the predetermined threshold value, and the output current judging means judges. One photocurrent signal is obtained from the photocurrent signals that are sequentially obtained corresponding to different photooutputs from the determination results by determining whether each photocurrent signal output from the one-dimensional photoposition detection element is saturated. Is selected by the current selection means, the optimum photocurrent signal can be selected from the photocurrent signals obtained by switching the multi-stage optical output and measuring.

Thirdly, the output current sum judging means judges the magnitude of the sum of the photocurrent signals output from the one-dimensional photo position detecting element by two and the predetermined threshold value, and corresponds to different light outputs. Then, by using the determination result sequentially output from the output current sum determining means, the rearranging means rearranges the photocurrent signals output from the one-dimensional photo-position detecting element two by two in the order of being closer to the threshold value. By determining whether or not each photocurrent signal is saturated in the order of being closer to the threshold value by the determination means, the optimum photocurrent signal can be selected more efficiently.

Fourthly, in the data integrating means, the height data obtained from the coordinate calculating means and the photocurrent signal corresponding to the height data obtained in the table having the x and y coordinate values on the two axes are converted into the x and y coordinates of the data. By storing the height data corresponding to the maximum value of the photocurrent signal for each element of the table as the output value, the data measured from both sides can be integrated and the measurement data can be thinned.

Fifth, in the data integration means, two kinds of height data obtained from the coordinate calculation means in two kinds of tables having x and y coordinate values on two axes and a photocurrent signal corresponding to the height data. Is stored according to the x and y coordinate values of the data,
When the two types of tables are integrated, the number of data stored for each element of the tables is compared with a predetermined threshold value, and if both data numbers are within the threshold value, both tables are compared. Output the data stored in the element of, and in the case of one, output the data within the threshold value, and determine the height data corresponding to the maximum value of the photocurrent signal from the data as the output value. If the number of data is not within the threshold value, the height data closest to the average value of the height data in the vicinity is determined as the output value, so that the data measured from both sides can be integrated more reliably. It can be performed.

Sixth, the maximum photocurrent judging means excludes the maximum value and the minimum value of the height data from the input data, and the height corresponding to the maximum value of the photocurrent signal is excluded from the excluded data. By determining the height as the output value, data measured from both sides can be integrated with higher reliability.

Seventh, the position calculation means stores, for each one-dimensional optical position detecting element, a plurality of types of position correction values corresponding to the light receiving position according to the distance to the object to be measured. By selecting one correction value according to the distance from the position correction values of various types, it is possible to perform appropriate correction according to the unevenness change of the object to be measured, and perform highly accurate measurement in a wide range.

[0021]

【Example】

(First Embodiment) A first embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block connection diagram of a shape measuring apparatus according to a first embodiment of the present invention. In FIG. 1, 10
1 and 108 are laser slit light sources, and 102 and 1
09 is a slit scanning means, 103 and 110 are slit lights, 104 is an object to be measured, 105 is a condenser lens, 106
Is a position detecting means, and 107 is a light receiving means. The laser slit light source 101 and the slit scanning means 102 are arranged on the left side of the position detecting means 106, and the laser slit light source 108
The slit scanning unit 109 and the slit scanning unit 109 are arranged at symmetrical positions on the right side of the position detecting unit 106. Further, 111 and 112 are photocurrent signals from the light receiving means 107, 125 is shape calculating means for calculating three-dimensional shape information from the photocurrent signals,
121 is a control MPU for controlling the whole, 122 is a light output control driver for controlling the light output of the laser slit light sources 101 and 108, 123 is a scanner control driver for controlling the slit scanning means 102 and 109, and 124 is M.
A PU bus, and as a component of the shape calculation unit 125, 113 is an I / I that changes a photocurrent signal into a voltage signal.
V conversion means, 114 is an A / D conversion means for converting a voltage signal into a digital signal, 115 is a memory A for temporarily storing a digital signal, 116 is a data selection means, 117
Is a position calculation means, 118 is a coordinate calculation means for calculating a three-dimensional shape, 119 is a memory B for storing the shape calculation result, and 120 is a data integration means.

FIG. 2 is a block diagram of the position detecting means 106 constituting the image pickup surface of the light receiving means 107. An image pickup surface is configured by arranging 128 non-divided one-dimensional optical position detection sensors 201 in the short side direction. In this embodiment, a PSD (Position Sensi) is used for the non-division type one-dimensional optical position detection sensor 201.
tive Detector: semiconductor position detection element) is used,
The incident position of the scattered light of the slit light from the DUT which is incident on the PSD can be obtained by utilizing the characteristic that the current flowing through the electrodes 202 and 203 of the element is inversely proportional to the distance between the electrodes. That is, the position data can be calculated using the equation (1) from the currents I1 and I2 flowing through the electrodes 202 and 203.

Position data = K · (I1-I2) / (I1 + I2) --------- (1) Note that K is a coefficient for normalization.

By configuring the image pickup surface of the light receiving means 107 in this way, the scattered light of the slit light can be picked up at a higher speed than in the conventional image pickup method using a CCD camera. That is, in the conventional imaging method using the CCD camera, 33 ms is required to image one screen (for example, vertical scanning 480 lines), which is about 60 μs when converted to the imaging time of one point. On the other hand, according to this embodiment, the response speed of the one-dimensional optical position detection sensor in each line is about 10 μs.
Therefore, by providing the I / V conversion means corresponding to each sensor, high-speed measurement about 6 times faster than the conventional method can be realized.

FIG. 3 is a diagram showing the constituent elements of the A / D conversion means 114. The eight signals 301 from the I / V conversion means 113 in the preceding stage are time-divisionally integrated by the multiplexer 302 to form one signal. The memory A is converted into a digital signal by the A / D converter 303, and the memory A by the memory write control circuit 304.
Written at 115. The A / D conversion means 114 is composed of 32 components shown in FIG.
The currents I1 and I2 flowing through both electrodes 202 and 203 are A / D converted, respectively. This A / D conversion and memory writing are executed in a little over 1 μs per signal, and the sensor response speed of about 10 μs is realized.

FIG. 4 shows the principle of triangulation, which is a basic measurement principle for measuring the three-dimensional shape of an object to be measured by the shape measuring apparatus of the present invention. As shown in the figure, laser beam 4
01 is irradiated on the point P402 on the object, and the reflected light 403 at that time is imaged by the imaging means 404. At this time, the screen of the image pickup means 404 caused by the unevenness of the surface of the object to be measured.
By extracting the amount of movement of the image on the scanning line 405, the crossing angles θb and θd between the baseline AB 406 and the reflected light 403 are obtained, and these values and the irradiation angle of the laser beam 401, that is, the baseline AB 406 and Intersection angle θa with the laser beam 401
And θc and the length L of the base line AB 406, the three-dimensional coordinate information of the object surface can be obtained.

The operation of the shape measuring device configured as described above will be described below. The laser light source 101 and the slit scanning means 102 irradiate the object 104 with slit light 103. At this time, the optical output of the laser slit light source 101 is the optical output control driver 122.
It is set to the first output value of the output values of three predetermined levels by the control signal from. Slit light 103
The scattered light reflected from the object to be measured 104 by the irradiation of 1 is imaged by the light receiving means 107 including the condenser lens 105 and a plurality of position detecting means 106 arranged. The photocurrent signals 111 and 112 from the position detection means 106 are
Each is converted into a voltage signal by the I / V conversion means 113, and further converted into a digital signal by the A / D conversion means 114 at a timing of a predetermined synchronization signal at about 10 μs per slit, and written in the memory A 115. Then, the slit scanning means 102 moves the slit light 103 to a different position on the object to be measured 104 according to a control signal from the scanner control driver 123, and the above-mentioned memory A11.
By repeating the signal processing up to 5, the entire surface of the DUT 104 is slit-scanned at high speed. When the slit scanning of the entire surface of the DUT 104 at the first light output value is completed, the light output of the laser slit light source 101 is next determined by the control signal from the light output control driver 122 in three predetermined output values. Is set to the second value of. Then, as in the case of the first light output value, the DUT 1 at the second light output value 1
04 Slit scanning of the entire surface is performed, each photocurrent signal is converted into a digital signal, and written in the memory A115. Then, similarly, the light output of the laser slit light source 101 is set to the third value of the three predetermined output values by the control signal from the light output control driver 122 in the same manner. Slit scanning of the entire surface of the measurement object 104 is performed, each photocurrent signal is converted into a digital signal, and is written in the memory A115.

Next, in the data selecting means 116, among the digitized photocurrent signals at the three kinds of light output values stored in the memory A115, for each one-dimensional light position detecting element (PSD) of each slit. , One type of photocurrent signal is selected. Then, the position calculating means 117 calculates the scattered light incident position of each PSD of each slit based on the equation (1) from the digital signal of each PSD of each selected slit, and calculates this as the position signal of the measurement point. Based on the principle of triangulation shown in FIG. 4, the coordinate calculation means 118 calculates three-dimensional shape information of each measurement point of the object 104 to be measured with respect to a predetermined coordinate system and writes it in the memory B119. In the present embodiment, as a method of selecting one kind of photocurrent signal from the digitized photocurrent signals with three kinds of photooutput values in the data selecting means, in the present embodiment, light from two photocurrent output terminals is selected. The maximum sum of current values was selected so as not to exceed a predetermined saturation threshold.

As described above, the light output of the slit light 103 from the laser slit light source 101 and the slit scanning means 102 is switched in three stages and irradiated, an appropriate photocurrent value is selected at each measurement point, and the value is used. After the three-dimensional coordinate measurement result of the surface of the object to be measured 104 is obtained, the slit light 110 is irradiated onto the object to be measured 104 by the laser slit light source 108 and the slit scanning means 109. In this case as well, the flow of operation is the same as in the case of irradiation of the slit light 103 by the laser slit light source 101 and the slit scanning means 102 described above, the light output is switched in three stages and irradiation is performed, and an appropriate photocurrent value is obtained at each measurement point. Is selected, the three-dimensional coordinate calculation of the surface of the DUT 104 is performed using the selected value, and the calculation result is written in the memory B119.

In this way, when the three-dimensional coordinate calculation from both directions is completed, the data integration means 120 integrates the data measured from both directions to reduce the blind spot area. In this example, when data in both directions could be measured, the average value of both data was integrated. Note that this series of operations is controlled by the control MPU 121,
By these operations, the area that becomes the dead zone is reduced, and the saturation phenomenon of the light receiving element due to the influence of the material of the DUT and the inclination of the measurement surface is less likely to occur. The three-dimensional shape of the measured object can be acquired at high speed and with high accuracy.

As described above, according to the present embodiment, the position detecting means having the image pickup surface constituted by arranging a plurality of non-divided one-dimensional light position detecting elements in the short side direction thereof and the one-dimensional light detecting device. Two sets of slit light sources and slit scanning means arranged on both sides in the long side direction of the position detection element, light output control means for controlling the light output from the slit light source, and reflection from the object to be measured by irradiation of slit light. The light receiving means for collecting the scattered light obtained by the condenser lens to the position detecting means and outputting the photocurrent signal, and the shape calculating means having the data selecting means, the position calculating means, the coordinate calculating means and the data integrating means, the whole. The device control means that controls the system reduces the blind spot area and reduces the saturation phenomenon of the light receiving element, and the height data of the surface of the object to be measured can be acquired at high speed and with high accuracy. Recognition査等 it is possible to be done in high-speed, high-accuracy.

In this embodiment, the light output was first changed in three steps in the measurement from the left side, and then the light output was changed in three steps in the measurement from the right side. The same effect can be obtained even if the left and right are measured with the same light output, and then the light output is changed to measure left and right. Further, the slit light is projected and scanned on the surface of the object to be measured by the slit scanning means after changing the light output, but this order does not limit the present invention, and the slit light scanning by the slit scanning means is intermittently performed. The same effect can be obtained by performing the measurement and changing the light output in three steps while stopping the scanning, and the number of control steps of the light output is three steps in the present embodiment. You may increase or decrease the number of control steps according to the material and shape,
It does not limit the present invention in any way.

(Second Embodiment) A second embodiment of the present invention will be described below with reference to the drawings.

FIG. 5 is a block diagram of the data selecting means 116 which is a constituent element of the shape calculating means 125 in FIG. 1 showing the structure of the shape measuring apparatus of the first embodiment of the present invention. Other configurations and operations are the same as those of the first embodiment of the present invention, and the configuration diagram and operation description are omitted.

In FIG. 5, the maximum value selector 501
Two photocurrent signals of the one-dimensional optical position detecting element (I₁ Fifty
8, I₂ 509) Memory A for the number of times the light output is changed
Take out from 115, I₁And I₂And the larger value
Is elected. Next, the output current signal saturation determination means 503
The larger value of the photocurrent signal is not saturated.
Bell. The current signal that serves as a reference for determining whether or not it is saturated
The sign value is stored in advance in the threshold value storage means A502.
If this value is taken out and it is larger than that value,
Considered to be in harmony. Appears to determine if it is saturated
Explain the reason why the current signal is used instead of the force current signal sum
It Position by the one-dimensional optical position detecting element 601 shown in FIG.
The detection is based on the photocurrent output signal (I₁, I₂) Is the distance between each electrode
It is inversely proportional to. With position calculation means 117
Is a photocurrent output signal I from both electrodes ₁, I₂The present invention
Using the formula (1) shown in the first embodiment, position data (x /
L) is calculated. Therefore, even if the same output current sum
I₁, I₂Since there is a bias in the
Saturation judgment is performed from. Considered not saturated here
Output current signal sum calculator A504
Then, the sum (I₁＋ I₂, Output current signal sum). So
The result of is stored in the memory C505. Then preset
The value of the output current sum corresponding to the optimum received light amount is stored in the threshold value storage.
Stored in memory C505 after being retrieved from column B506
The output current signal sum is compared with a comparator 507.
In the comparator 507, the sum of the output currents and the
Calculate the difference from the output current sum stored in memory C505
Therefore, the data with the smallest difference is selected. that time
If the absolute value of the difference is about the same, it corresponds to the optimum received light amount.
Output current stored in memory C505.
Select the one with the largest force current signal sum. Note that as shown in FIG.
Output current signal saturation determination means 503 and output current signal summation
Output B signal sum calculator by operating the output device B701 in parallel
The result of B701 is stored in the memory D702, and the output current
From the result of the signal saturation judgment means 503 to the deletion judgment device 703.
Memory E704 after deleting saturated data
In the comparator 507 and stores the data in the comparator 507.
Even if selected, the same effect can be obtained.

As described above, according to this embodiment, the optimum photocurrent output signal can be selected from the data in which the light output is changed in multiple stages, and the measurement accuracy can be improved.

(Embodiment 3) A third embodiment of the present invention will be described below with reference to the drawings.

FIG. 8 is a block diagram of the data selecting means 116 which is a constituent element of the shape calculating means 125 in FIG. 1 showing the structure of the shape measuring apparatus of the first embodiment of the present invention. Other configurations and operations are the same as those of the first embodiment of the present invention, and the configuration diagram and operation description are omitted.

In FIG. 8, the output current signal sum calculator B8
In 01, two photocurrent signals (I ₁ 508, I ₂ 509) of the one-dimensional photo position detection element are taken out from the memory A115 by the number of times the light output is changed, and the sum (I ₁ + I ₂ , sum of output current signals) is obtained. Ask. The result is stored in the memory F802. Next, the value of the output current sum corresponding to the preset optimum received light amount is taken out from the threshold value storage means B803,
The output current signal sum stored in the memory F and the comparator 80
Compare in 4. The comparator 804 calculates the difference between the output current sum corresponding to the optimum received light amount and the output current sum stored in the memory F802. Based on this difference, the sorting means 806 can find the number of times the light output is changed in the optimum order. The optimum order means that the difference between the sum of the output current signals corresponding to the optimum amount of received light and the sum of the output currents stored in the memory F802 is smaller, and ranking is performed. At that time, if the absolute values of the differences are about the same, the sum of the output current signals stored in the memory F802 is selected to be larger than the sum of the output currents corresponding to the optimum amount of received light. Next, the output current signal saturation determination means 809 checks whether or not the larger value of the photocurrent signal is saturated, in the optimum order. Which of the photocurrent signals (I ₁ , I ₂ ) is larger is checked by the maximum value selector 805 and stored in the memory G 808. The current signal value serving as a criterion for determining whether or not it is saturated is stored in the threshold value storage unit A807 in advance, and if this value is taken out and is larger than that value, it is considered to be saturated. if,
If the photocurrent output signal of the first data arranged in the optimum order is not saturated, the first data arranged in the optimum order is selected and determined without making a determination in the data in the order lower than that.
If it is saturated, check the second data in the optimal order. If it is not saturated, the second data arranged in the optimal order is used. If it is saturated, repeat as 3rd. Although the role of the output current signal saturation determination means 809 is in the optimum order, it is necessary to exclude the data in which each output current is saturated. This is because the one-dimensional optical position detecting element 60 shown in FIG. 6 used in this embodiment.
The position detection by 1 uses a photocurrent output signal (I ₁ , I ₂ ) that is inversely proportional to the distance between the electrodes. In the position calculation means 117, photocurrent output signals I ₁ and I ₂ from between both electrodes are generated.
The position data (x / L) is calculated using the equation (1) shown in the first embodiment of the present invention. Therefore, even if the same output current is summed, I ₁ and I ₂ are biased depending on the position, so that the saturation judgment is performed from the larger value of the photocurrent signal.

As described above, according to the present embodiment, the optimum photocurrent output signal can be selected from the data in which the light output is changed in multiple stages, and the measurement accuracy can be improved.

(Embodiment 4) A fourth embodiment of the present invention will be described below with reference to the drawings.

FIG. 9 is a block diagram of the data integrating means 120 which is a constituent element of the shape calculating means 125 in FIG. 1 showing the structure of the shape measuring apparatus of the first embodiment of the present invention. Other configurations and operations are the same as those of the first embodiment of the present invention, and the configuration diagram and operation description are omitted.

In FIG. 9, reference numeral 901 denotes the height data obtained from the coordinate calculating means 118 and a photocurrent signal corresponding to the height data in a table having x and y coordinate values on two axes, the x and y of the data. Height table creating means for storing in accordance with coordinate values, 902 is maximum photocurrent determining means for determining height data corresponding to the maximum value of the photocurrent signal for each element of the table as an output value, and 903 is maximum photocurrent determination. Height image generation means for collecting output values for each element of the table from the means 902 to generate a height image and outputting the height image to the memory B119, 9
Reference numeral 04 is the height data and photocurrent signal obtained from the coordinate calculation means 118, and 905 is the height image output by the data integration means 120.

The operation of the shape measuring apparatus configured as described above will be described below. First, the height table creating means 901 uses the height data obtained from the coordinate calculating means 118 and the photocurrent signal 904 corresponding to the height data.
In a table with x and y coordinate values on two axes,
Store according to the y-coordinate value. FIG. 10 is an explanatory diagram of the table. Reference numeral 1001 is a table, 1002 is an element of the table, 1003 is height data obtained from the coordinate calculating means 118, and height data and photocurrent signals in which the photocurrent signal 904 corresponding to the height data is sequentially stored in pairs. This is a storage area. Next, the maximum photocurrent determination means 902 finds the maximum value of the photocurrent signal in parallel for each element of the table, and determines the corresponding height data as the output value. The height image generation means 903 collects the output values for each element of the table from the maximum photocurrent determination means 902 to generate a height image 905 and outputs it to the memory B119. FIG. 11 is an explanatory diagram of the height image 905 obtained by the above operation. In FIG. 11, 1
101 is a height image, 1102 is a maximum photocurrent determination means 90.
It is the height data output from 2. Height image 1101
In, the horizontal axis corresponds to the x coordinate value and the vertical axis corresponds to the y coordinate value.

As described above, according to this embodiment, the height data obtained from the coordinate calculating means 118 and the photocurrent signal corresponding to the height data are stored in a table having x and y coordinate values on two axes. A height table creating means 901 for storing in accordance with the x and y coordinate values, and a maximum photocurrent determining means 902 for determining height data corresponding to the maximum value of the photocurrent signal for each element of the table as an output value. Maximum photocurrent determination means 90
By providing the height image generation means 903 which collects the output values for each element of the table from No. 2 and outputs the height image to the memory B119, the laser is measured in each data when the laser is irradiated from only one direction. The data on the blind spots that are generated when the object is not irradiated or when the reflected light of the laser is not detected by the PSD due to the shape of the object to be measured can complement each other. Further, it is possible to reduce the noise included in the height data when the laser is irradiated from only one direction. Furthermore, it is possible to generate image format data that can be easily processed after measurement.

In the present embodiment, the maximum photocurrent determination means processes the elements of the table in parallel, but it goes without saying that they may be processed sequentially.

(Fifth Embodiment) A fifth embodiment of the present invention will be described below with reference to the drawings.

FIG. 12 is a block diagram of the data integration means 120 which is a component of the shape calculation means 125 in FIG. 1 showing the configuration of the shape measuring apparatus of the fifth embodiment of the present invention.
Other configurations and operations are the same as those of the first embodiment of the present invention, and the configuration diagram and operation description are omitted. In FIG. 12, reference numeral 1201 denotes the height data obtained by using the slit light 103 from the laser slit light source 101 in the table A having the x and y coordinate values on two axes and the height data obtained from the coordinate slitting means 101. First one-side height table creating means 1202 for storing a photocurrent signal corresponding to the height data in accordance with the x and y coordinate values of the data, and 1202 a laser slit light source 108 on a table B having x and y coordinate values on two axes. Second one-side height table creating means for storing height data obtained by using the slit light 110 from FIG. 1 and a photocurrent signal corresponding to the height data according to the x and y coordinate values of the data,
Reference numeral 203 denotes the first and second one-side height table creating means 12
Two types of tables A and B created in 01 and 1202
A data number comparing means 1204 for comparing the number of data stored for each element of the table with a predetermined threshold value when integrating the data, and 1204 a data number comparing means 1203 for each element of the table. When the number of data elements of A and B are both within the threshold value, the data stored in the elements of both tables is used, and when only one of them is within the threshold value, it is within the threshold value. The use data determining means 1205 that determines to use the other data determines the maximum value of the photocurrent signal from the use data determining means 1204 for each element of the table, and determines the corresponding height data as the output value. Judgment means 1206 collects the output values of the elements from the maximum photocurrent judgment means 1205 for each element on the table to generate a temporary height image. Bull A, temporary height image generating means output value for the number is not within both the threshold data to be the pixel undecided enter the pending tag as the pixel value of B, 12
07 is the height closest to the average value of the already determined pixel values of the 8 neighboring pixels on the temporary height image, in order to determine the pixel value at the pixel to which the undetermined tag is input on the temporary height image. Averaging means for deciding the size data as pixel values and inputting them to the temporary height image, 1208 is an undetermined pixel determining means for determining the presence of pixels whose pixel values are undetermined tags in the temporary height image, and 1209 is A fixed height image generation means for outputting the temporary height image as a fixed height image to the memory B119, 12
Reference numeral 10 denotes data obtained by using the slit light 103 from the laser slit light source 101, out of two types of height data and photocurrent signals obtained from the coordinate calculation means 118, 121.
Reference numeral 1212 is data obtained by using the slit light 110 from the laser slit light source 108 out of two types of height data and photocurrent signals obtained from the coordinate calculation means 118.
Is a height image output by the data integration means 120.

The operation of the shape measuring apparatus configured as described above will be described below. First, the first one-side height table creating means 1201 uses the slit light 103 from the laser slit light source 101 among the data obtained from the coordinate calculating means 118 and the light corresponding to the height data. The current signal 1210 is stored in a table A in the same means having x and y coordinate values on two axes as data x and y.
Store according to the coordinate value. In the same manner, the second one-side height table creating means 1202 uses the laser slit light source 108.
The height data obtained by using the slit light 110 from the above and a photocurrent signal 1211 corresponding to the height data,
The data is stored in a table B in the same means having x and y coordinate values on two axes according to the x and y coordinate values of the data. Next, when the number-of-data comparing unit 1203 integrates the two types of tables A and B created in the first and second one-side height table creating units 1201 and 1202, each of the elements of the tables are parallel to each other. The number of stored data is compared with a predetermined threshold value. The used data determination means 1204 parallelizes the data of each element of the table in the data number comparison means 1203 and when the data numbers of the elements of the tables A and B are both within the threshold value, the data stored in the elements of both tables are compared. If only one of them is within the threshold value, the data within the threshold value is output. The maximum photocurrent determining means 1205 finds the maximum value of the photocurrent signal from the use data determining means 1204 in parallel for each element of the table, and determines the corresponding height data as the output value. The temporary height image generating means 1206 collects the output values of the respective elements on the table from the respective maximum photocurrent determining means 1205 and generates a temporary height image. At this time, an undecided tag is input as a pixel value to the provisional height image for a pixel whose output value has not yet been determined because the number of data in the tables A and B is not within the threshold value in the data number comparison means 1203. deep. The neighborhood averaging unit 1207 sequentially scans the provisional height image, and determines the pixel value in the pixel to which the undetermined tag is input on the provisional height image. The height data closest to the average value of the already determined pixel values of is determined as the pixel value, and the determined pixel value is input to the temporary height image instead of the undetermined tag. The undetermined pixel determination means 1208 determines whether or not a pixel whose pixel value is an undetermined tag exists in the provisional height image, and when it exists, returns to the neighborhood averaging means 1207 again to determine the pixel value. If the undetermined pixel determination unit 1208 does not include a pixel whose pixel value is an undetermined tag, the determined height image generation unit 1209 outputs the temporary height image as a height image 1212 to the memory B119. In the above operation, it is determined whether the number of data is within the threshold value for each element of the table, and the determination method of the pixel value is divided into the maximum photocurrent determination means 1205 and the neighborhood averaging means 1207 based on the determination result. When the number of data measured in an element of a certain table is extremely large or extremely small compared with the number of measured data, it is determined that the inclination of the measurement surface on the object to be measured is largely inclined from the vertical with respect to the optical axis of the light receiving means 107. This is because it can be inferred and the reliability of the height data decreases. Therefore, first determine a highly reliable pixel value with an element whose number of data is an appropriate number within the threshold value, and then with many elements of low reliability whose number of data is other than the threshold value. Improves the robustness against noise by selecting the data closest to the already determined highly reliable data.

As described above, the slit light 103 from the laser slit light source 101 among the data obtained from the coordinate calculating means 118 in the table A having the x and y coordinate values on the two axes.
And a first one-side height table creating means 1201 for storing the height data obtained by using the photocurrent signal and the photocurrent signal corresponding to the height data according to the x and y coordinate values of the data.
Laser slit light source 1 on table B having coordinate values on 2 axes
Second one-side height table creating means 1202 for storing the height data obtained by using the slit light 110 from 08 and the photocurrent signal corresponding to the height data according to the x and y coordinate values of the data. When the two types of tables A and B created by the first and second one-sided height table creating means 1201 and 1202 are integrated, the number of data stored for each element of the tables is predetermined. Data number comparing means 1203 for comparing with the threshold value and the data number comparing means 1203 for each element of the table
If the number of data elements of both is within the threshold value, the data stored in the elements of both tables is output, and if only one of them is within the threshold value, Usage data determination means 1204 for outputting data
And use data determination means 1204 for each element of the table
From the maximum photocurrent determination means 1205 for determining the maximum value of the photocurrent signal from the respective elements and determining the corresponding height data as the output value, and the output value for each element on the table from each maximum photocurrent determination means 1205. An tentative height image is generated, and the data number comparing means 1203 inputs the undecided tag as a pixel value to the pixel whose output value is undecided because both the data numbers of the tables A and B are larger than the threshold value. Temporary height image generation means 1
206 and 8 on the temporary height image to determine the pixel value in the pixel to which the undecided tag is input on the temporary height image.
Neighborhood averaging means 1207 that determines the height data closest to the average value of the already determined pixel values of neighboring pixels as a pixel value and inputs it to the temporary height image, and the pixel value in the temporary height image is undetermined. An undetermined pixel determination unit 1208 that determines the presence of a pixel that is a tag, and a fixed height image generation unit 12 that outputs a temporary height image to the memory B119 as a fixed height image.
By providing No. 09, in each data obtained by irradiating the laser from only one direction, when the laser is not applied to the object to be measured, or the reflected light of the laser is P depending on the shape of the object to be measured.
Data of blind spots generated when not detected by SD can be complemented with each other, and noise included in height data when a laser is irradiated from only one direction can be reduced, resulting in higher accuracy of height. You can get the data. Furthermore, it is possible to generate image format data that can be easily processed after measurement.

In the present embodiment, the data number comparing means, the used data determining means and the maximum photocurrent determining means are processed in parallel for each element of the table, but it goes without saying that they may be processed sequentially.

Although the neighborhood averaging means refers to 8 neighboring pixels on the provisional height image, the number of neighboring pixels to be referenced does not limit the present invention.

(Embodiment 6) A sixth embodiment of the present invention will be described below with reference to the drawings.

FIG. 13 is a block diagram of the data integrating means 120 which is a constituent element of the shape calculating means 125 in FIG. 1 showing the structure of the shape measuring apparatus of the sixth embodiment of the present invention.
Other configurations and operations are the same as those of the first embodiment of the present invention, and the configuration diagram and operation description are omitted.

In FIG. 13, 1301 is height data obtained by using the slit light 103 from the laser slit light source 101 in the data obtained from the coordinate calculating means 118 in the table A having x and y coordinate values on two axes. And a first one-sided height table creating means for storing the photocurrent signal corresponding to the height data according to the x and y coordinate values of the data,
Reference numeral 302 denotes height data obtained by using the slit light 110 from the laser slit light source 108 in a table B having x and y coordinate values on two axes and a photocurrent signal corresponding to the height data, x and y of the data. A second one-side height table creating means 1303 for storing in accordance with the coordinate value is used when integrating two types of tables A and B created in the first and second one-side height table creating means 1301 and 1302. 130, a data number comparing means for comparing the number of data stored for each element of the table with a predetermined threshold value;
4 is a data number comparing means 1303 for each element of the table.
If the number of data elements of both tables A and B is within the threshold value, the data stored in the elements of both tables is output. If only one of them is within the threshold value, the threshold value is output. The used data determination means for outputting the data that is within 1300 is an extreme value exclusion means for removing the maximum value and the minimum value of the height data from the data of the used data determination means 1304 for each element of the table, and 1306 is an extreme value. Of the data from the excluding means 1305, the extremum excluding maximum photocurrent determining means for determining the height data corresponding to the maximum value of the photocurrent signal as the output value, 1307 is the extremal excluding maximum photocurrent determining means 1
Output values for each element on the table from 306 are collected to generate a temporary height image, and the output value is undecided because the number of data in tables A and B is neither within the threshold value in the data number comparing means 1303. A provisional height image generation means for inputting an undecided tag to a pixel as a pixel value, 1308 is a provisional height image for determining a pixel value in a pixel to which an undecided tag is input on the provisional height image. Neighbor averaging means 1309 for determining the height data closest to the average value of the already determined pixel values of the eight neighboring pixels as the pixel value and inputting it to the temporary height image.
Is an undetermined pixel determination means for determining the presence of a pixel whose pixel value is an undetermined tag in the provisional height image, and 1310 is a confirmed height image which is output to the memory B119 as a determined height image of the provisional height image. The generating means 1311 is the slit light 10 from the laser slit light source 101 of the two types of height data and photocurrent signal obtained from the coordinate calculating means 118.
Data obtained by using the coordinate calculation means 1
Slit light 110 from the laser slit light source 108 of the two types of height data and photocurrent signal obtained from 18
1313 is data integration means 1
20 is a height image output by 20.

The operation of the shape measuring apparatus configured as described above will be described below. First, the first one-sided height table creating means 1301 uses the slit light 103 from the laser slit light source 101 among the data obtained from the coordinate computing means 118 and the light corresponding to the height data. The current signal 1311 is stored in a table A having x and y coordinate values on two axes according to the x and y coordinate values of the data. Similarly, the second one-side height table creating means 1302 outputs height data obtained by using the slit light 110 from the laser slit light source 108 and a photocurrent signal 1312 corresponding to the height data, x, y. The coordinate values are stored in a table B having two axes according to the x, y coordinate values of the data. Next, the data number comparing means 1303 uses the first and second one-side height table creating means 1301 and 1302.
When the two types of tables A and B created in the table are integrated, the number of data stored in parallel for each element of the tables is compared with a predetermined threshold value. The used data determination means 1304 uses the data number comparison means 1303 in parallel for each element of the table and when the data numbers of the elements of the tables A and B are both within the threshold value, the data stored in the elements of both tables are compared. If only one of them is within the threshold value, the data within the threshold value is output. The extreme value excluding means 1305 first finds the maximum value and the minimum value from the height data of the usage data determining means 1304 in parallel for each element of the table, and the height data and photocurrent signal corresponding to these maximum value and minimum value. Is excluded from the data of the used data determination means 1304.
The extreme value exclusion maximum photocurrent determination means 1306 finds the maximum value of the photocurrent signal in the data from the extreme value exclusion means 1305 in parallel for each element of the table, and determines the corresponding height data as the output value. In the above operation, by eliminating the maximum and minimum values of the height data before obtaining the height data corresponding to the maximum value of the photocurrent signal, variations in the measured height data are absorbed, making it more reliable. High height image 1
313 can be generated. Next, the provisional height image generation means 1307 collects the output values of the respective elements on the table from the extreme value excluded maximum photocurrent determination means 1306 to generate a provisional height image. At this time, an undecided tag is input to the provisional height image as a pixel value for a pixel whose output value has not yet been determined because the number of data in the tables A and B is not within the threshold value in the data number comparison means 1303. deep. The neighborhood averaging unit 1308 sequentially scans the temporary height image, and determines the pixel value in the pixel in which the undecided tag is input on the temporary height image. The height data closest to the average value of the already determined pixel values of is determined as the pixel value, and the determined pixel value is input to the temporary height image instead of the undetermined tag. The undetermined pixel determination unit 1309 determines whether or not there is a pixel whose pixel value is an undetermined tag in the provisional height image, and when it exists, returns to the neighborhood averaging unit 1308 again to determine the pixel value. If there is no pixel whose pixel value is an undetermined tag in the undetermined pixel determination means 1309, the confirmed height image generation means 1310 outputs the temporary height image to the memory B119 as the height image 1313.

As described above, the slit light 103 from the laser slit light source 101 is included in the data obtained from the coordinate calculating means 118 in the table A having the x and y coordinate values on two axes.
And a first one-side height table creating means 1301 for storing the height data obtained by using the above and the photocurrent signal corresponding to the height data according to the x, y coordinate values of the data, and x, y.
Laser slit light source 1 on table B having coordinate values on 2 axes
Second one-side height table creating means 1302 for storing height data obtained by using the slit light 110 from 08 and a photocurrent signal corresponding to the height data according to the x and y coordinate values of the data. , The number of data stored for each element of the tables when the two types of tables A, B created in the first and second one-side height table creating means 1301, 1302 are integrated is predetermined. Data number comparing means 1303 for comparing with the threshold value and the data number comparing means 1303 for each element of the table
If the number of data elements of B is both within the threshold value, the data stored in the elements of both tables is output. If only one of them is within the threshold value, it is within the threshold value. Data determination means 130 for outputting the data of
4 and used data determination means 130 for each element of the table
4 excluding the maximum and minimum values of the height data from the data, and the height data corresponding to the maximum value of the photocurrent signal among the data from the extreme value excluding means 1305 is determined as the output value. Extremum Exclusion Maximum Photocurrent Determination Means 130
6 and the output value of each element on the table from each extremum-excluded maximum photocurrent determination means 1306 are collected to generate a temporary height image, and the data number comparison means 1303 sets the data numbers of the tables A and B together. In the provisional height image generation means 1307 for inputting an undetermined tag as a pixel value to a pixel whose output value is not determined because it is not within the threshold value, and in a pixel to which an undetermined tag is input on the provisional height image. In order to determine the pixel value, the neighborhood averaging means that determines the height data closest to the average value of the already determined pixel values of the 8 neighboring pixels on the provisional height image as the pixel value and inputs it to the provisional height image. 1308, an undetermined pixel determination unit 1309 that determines the presence of a pixel whose pixel value is an undetermined tag in the provisional height image, and a determined height that outputs the provisional height image to the memory B119 as a determined height image. Image generation means 131 By providing the data, the blind spot data generated when the laser is not applied to the object to be measured or the reflected light of the laser is not detected by the PSD due to the shape of the object to be measured in each data obtained by irradiating the laser from only one direction is provided. It is possible to compensate for each other, and it is possible to reduce noise included in the height data when the laser is irradiated from only one direction.

In the present embodiment, the data number comparing means, the used data judging means, the extremal value excluding means and the extremal value excluding maximum photocurrent judging means are processed in parallel for each element of the table, but they may be processed sequentially. It goes without saying that it is good.

Although the neighborhood averaging means refers to 8 neighboring pixels on the provisional height image, the number of neighboring pixels to be referenced does not limit the present invention.

(Embodiment 7) A seventh embodiment of the present invention will be described below with reference to the drawings.

FIG. 14 shows the position calculating means 117 which is a component of the shape calculating means 125 in FIG. 1 showing the structure of the shape measuring apparatus of the first embodiment of the present invention. In the figure, a position correction circuit 1401 is newly provided. The other configurations and operations are the same as those of the first embodiment of the present invention, and the configuration diagram and operation description are omitted.

In FIG. 14, the position calculation circuit 1407 is used by using the photocurrent signal 1408 from the data selection means 116.
The position (value of x / L in FIG. 6) on the light receiving surface of the one-dimensional light position detecting element is calculated by
In 2, the area to which the one-dimensional optical position detecting element belongs is determined. In parallel with this, the result of the position calculation circuit 1407 is read, and the distance calculation unit 1403 calculates the distance (z) to the object to be measured. The distance range selecting means 1404 determines to which of the predetermined ranges the distance belongs. The position correction table reference unit 1405 determines a correction value based on the results of the distance range selection unit 1404 and the light receiving position region determination unit 1402. Using this correction value, the correction value calculator 1406 uses the position calculation circuit 14
The sum with the position on the light receiving surface of the one-dimensional optical position detecting element read from 07 is obtained. This is performed for the number of one-dimensional photodetectors.

In FIG. 15, the light receiving position area determining means 14
02 will be described in detail. The light receiving surface 1501 of the one-dimensional light detecting element is divided into n + 1 ranges of 0 to n at the light receiving position,
It is determined in which range the position on the light receiving surface calculated by the position calculation circuit 1407 falls.

In FIG. 16, distance range selection means 1404
Will be described in detail. In this embodiment, the range of the distance is divided into three according to the distance from the image sensor 1601 as shown in the figure. The distance calculated by the distance calculation unit 1403 is l
If the range is 0 to 11, distance range selection means 1404
In, the reference plane A1602 is selected. If it is within the range of l1 to l2, it is the range of the reference plane B1603, and if it is within the range of the reference distance l2 or more, it is the range of the reference plane C1604. Note that each range is not evenly spaced,
The reference plane is not at the center of the range.

In FIG. 17, the position correction table reference unit 1
405 will be described in detail. The position correction table reference unit 1405 uses the correction values (A01 to A01) based on the parameters x and y.
n3) is determined. Parameter x is distance range selection means 1
404, and the parameter y is determined by the light receiving position area determining means 1402. The position correction table 1701 in the figure is a table in which these are summarized. The values (A01 to An3) in the position correction table 1701 are the respective areas (0 to 0) of the light receiving surface 1501 of the one-dimensional optical position detection element on each reference surface.
(n, see FIG. 15) is the difference between the position actually hit when slit light is applied to the center and the position calculated from the two photocurrent signals (I ₁ , I ₂ ) of the one-dimensional photo position detecting element.

As described above, according to this embodiment, by dividing the light receiving position region of the one-dimensional photodetector element into n, it is possible to correct the difference in error depending on the position of the light receiving position. In addition, since the width of slit light on the object to be measured differs depending on the distance by using a plurality of reference planes, it is possible to deal with a change in the error to be corrected. By preparing a correction table, it is possible to correct characteristic unevenness between elements.

[0068]

As described above, according to the present invention, firstly, there is provided a position detecting means having an image pickup surface formed by arranging a plurality of non-divided one-dimensional optical position detecting elements in the short side direction thereof. Two sets of slit light sources and slit scanning means arranged on both sides of the three-dimensional light position detection element in the long side direction, light output control means for controlling the light output from the slit light source, and slit light irradiation from above the object to be measured. Light receiving means for collecting scattered light obtained by reflection on a position detecting means by a condenser lens and outputting a photocurrent signal, and shape calculating means having data selecting means, position calculating means, coordinate calculating means and data integrating means. The device control means that controls the entire system reduces the area that becomes a blind spot, and prevents the phenomenon of saturation of the light receiving element due to the influence of the material of the measured object or the inclination of the measurement surface, thus increasing the surface of the measured object. Speed data It can be acquired with high accuracy.

Secondly, the output current sum judging means judges the magnitude of the sum of the photocurrent signals outputted from the one-dimensional photo position detecting element by two and the predetermined threshold value, and the output current judging means judges. One photocurrent signal is obtained from the photocurrent signals that are sequentially obtained corresponding to different photooutputs from the determination results by determining whether each photocurrent signal output from the one-dimensional photoposition detection element is saturated. Is selected by the current selection means, the optimum photocurrent signal can be selected from the photocurrent signals obtained by switching the multi-stage optical output and measuring.

Thirdly, the output current sum determining means determines the magnitude of the sum of the photocurrent signals output from the two-dimensional one-dimensional optical position detecting elements two by two and a predetermined threshold value to cope with different light outputs. Then, by using the determination result sequentially output from the output current sum determining means, the rearranging means rearranges the photocurrent signals output from the one-dimensional photo-position detecting element two by two in the order of being closer to the threshold value. The determination unit determines whether or not each photocurrent signal is saturated in the order closer to the threshold value, so that the optimum photocurrent signal can be selected more efficiently.

Fourth, in the data integration means, the height data obtained from the coordinate operation means and the photocurrent signal corresponding to the height data obtained in the table having the x and y coordinate values on the two axes are converted into the x and y coordinates of the data. By storing the height data corresponding to the maximum value of the photocurrent signal for each element of the table as the output value, the data measured from both sides can be integrated and the measurement data can be thinned.

Fifth, in the data integrating means, two kinds of height data obtained from the coordinate calculating means in two kinds of tables having x and y coordinate values on two axes and a photocurrent signal corresponding to the height data. Is stored according to the x and y coordinate values of the data,
When the two types of tables are integrated, the number of data stored for each element of the tables is compared with a predetermined threshold value, and if both data numbers are within the threshold value, both tables are compared. Output the data stored in the element of, and in the case of one, output the data within the threshold value, and determine the height data corresponding to the maximum value of the photocurrent signal from the data as the output value. If the number of data is not within the threshold value, the height data closest to the average value of the height data in the vicinity is determined as the output value, so that the data measured from both sides can be integrated more reliably. It can be performed.

Sixth, the maximum photocurrent determination means excludes the maximum value and the minimum value of the height data from the input data, and the height corresponding to the maximum value of the photocurrent signal is excluded from the excluded data. By determining the height as the output value, data measured from both sides can be integrated with higher reliability.

Seventh, the position calculating means stores, for each one-dimensional light position detecting element, a plurality of kinds of position correction values corresponding to the light receiving position according to the distance to the object to be measured. By selecting one correction value according to the distance from the position correction values of various types, it is possible to perform appropriate correction according to the unevenness change of the object to be measured, and it is possible to perform high-precision measurement in a wide range. It is possible to realize an excellent shape measuring device that enables efficient recognition and inspection of an object having a three-dimensional shape.

[Brief description of drawings]

FIG. 1 is a block connection diagram of a shape measuring apparatus according to a first embodiment of the present invention.

FIG. 2 is a detailed plan view of the position detecting means in the first embodiment of the present invention.

FIG. 3 is a detailed block diagram of the A / D conversion means in the first embodiment of the present invention.

FIG. 4 Geometrical layout diagram showing the principle of triangulation

FIG. 5 is a block connection diagram of a data selecting means in the second embodiment of the present invention.

FIG. 6 is a detailed conceptual diagram of a one-dimensional optical position detecting element according to an embodiment of the present invention.

FIG. 7 is a block connection diagram of data selecting means in the second embodiment of the present invention.

FIG. 8 is a block connection diagram of data selecting means in a third embodiment of the present invention.

FIG. 9 is a block connection diagram of a data integrating means in a fourth embodiment of the present invention.

FIG. 10 is a conceptual diagram of a table in the fourth embodiment of the present invention.

FIG. 11 is a conceptual diagram of a height image according to the fourth embodiment of the present invention.

FIG. 12 is a block connection diagram of data integration means in the fifth embodiment of the present invention.

FIG. 13 is a block connection diagram of data integration means in a sixth embodiment of the present invention.

FIG. 14 is a block connection diagram of a position calculating means in a seventh embodiment of the present invention.

FIG. 15 is a diagram of light receiving position area division in the seventh embodiment of the present invention.

FIG. 16 is a diagram of distance range division in the seventh embodiment of the present invention.

FIG. 17 is a detailed conceptual diagram of a position correction table according to the seventh embodiment of the present invention.

FIG. 18 is a block connection diagram of a conventional shape measuring device.

FIG. 19 is a conceptual diagram illustrating the operation of a synthesis circuit of a conventional shape measuring device.

[Explanation of symbols]

 101 laser slit light source 102 slit scanning means 103 slit light 104 object to be measured 105 condensing lens 106 position detecting means 107 light receiving means 108 laser slit light source 109 slit scanning means 110 slit light 111 photocurrent signal 112 photocurrent signal 113 I / V conversion Means 114 A / D conversion means 115 Memory A 116 Data selection means 117 Position calculation means 118 Coordinate calculation means 119 Memory B 120 Data integration means 121 Control MPU 122 Optical output control driver 123 Scanner control driver 124 MPU bus 125 Shape calculation means

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yukifumi Tsuda 3-10-1 Higashisanda, Tama-ku, Kawasaki City, Kanagawa Prefecture Matsushita Giken Co., Ltd.

Claims (7)

[Claims] 1. A position detecting means having an image pickup surface configured by arranging a plurality of non-divided one-dimensional optical position detecting elements having two photocurrent output terminals in a short side direction thereof, and the one-dimensional position detecting means. Two sets of optical position detection elements arranged on both sides in the long side direction,
A slit light source that generates slit light and a slit scanning means that projects and scans the slit light on an object to be measured, a light output control means that controls the light output from the slit light source, and the measured object by scanning the slit light. A light receiving means for collecting scattered light obtained by reflecting from an object on the position detecting means by a condenser lens, and outputting the photocurrent signal two by two from the plurality of one-dimensional light position detecting elements arranged. , Shape calculation means for calculating the height data of the object to be measured by the photocurrent signal from the light receiving means, and slit scanning and shape calculation at different light outputs under the control of the light output control means. And device control means for controlling the entire system so as to sequentially perform slit scanning by the two sets of optical scanning means, wherein the shape calculation means comprises a plurality of scanning operations at different optical outputs. Data selecting means for selecting one photocurrent signal from the photocurrent signals sequentially obtained by dot scanning, and a light receiving position of the scattered light is calculated from the photocurrent signal selected by the data selecting means. Position calculating means, coordinate calculating means for calculating the height data of the object to be measured from the light receiving position information from the position calculating means, and two kinds of coordinate calculating means obtained from the coordinate calculating means by the two sets of optical scanning. A shape measuring apparatus comprising a data integrating means for integrating height data. 2. An output current sum judging means for judging the magnitude of a sum of photocurrent signals output from the one-dimensional optical position detecting element two by two and a predetermined threshold value, the data selecting means. From the output current determination means for determining whether each of the photocurrent signals output from the one-dimensional optical position detection element two by two is saturated, and the determination results from the output current sum determination means and the output current determination means. The shape measuring apparatus according to claim 1, further comprising a current selecting unit that selects one photocurrent signal from the photocurrent signals sequentially obtained corresponding to different light outputs. 3. An output current sum judging means for judging whether the sum of the photocurrent signals output from the two-dimensional one-dimensional light position detecting element and the predetermined threshold value is larger or smaller by the data selecting means, Using the determination results sequentially output from the output current sum determination means corresponding to different optical outputs, the photocurrent signals output from the one-dimensional optical position detection element two by two are arranged in the order close to the threshold value. The rearrangement means for rearranging, and the output current judging means for judging whether or not each of the photocurrent signals output from the rearranging means in the order of being closer to the threshold value is saturated. Shape measuring device. 4. The data unifying means sets height data obtained from the coordinate calculating means and a photocurrent signal corresponding to the height data in a table having x, y coordinate values on two axes as x, y coordinate values of the data. 3. A height table creating means for storing the height data corresponding to the maximum value and a maximum photocurrent determining means for determining height data corresponding to the maximum value of the photocurrent signal as an output value for each element of the table. 2. The shape measuring device according to 2 or 3. 5. The data integrating means obtains from the coordinate calculating means in two types of tables having x and y coordinate values on two axes.
First one-side height table creating means and second one-side height table creating means for storing different kinds of height data and photocurrent signals corresponding to the height data according to the x and y coordinate values of the data; When the two types of tables created by the first and second one-side height table creating means are integrated, the number of data stored for each element of the tables is compared with a predetermined threshold value. And the data number comparing means for each element of the tables, if the data numbers of the elements of the first and second tables are both within the threshold value, the data is stored in the elements of both tables. Outputs data, and if only one of them is within the threshold value, outputs the data that is within the threshold value. The maximum photocurrent determining means for determining the height data corresponding to the maximum value in the photocurrent signal as the output value, and the data number comparing means for the data numbers in the first and second tables are both within the threshold value. If not, it has a neighborhood averaging means for determining the height data closest to the average value of the height data already determined as the output value of the neighboring elements on the table as the output value. Shape measuring device. 6. The maximum photocurrent determining means excludes the maximum value and the minimum value of the height data from the inputted data, and the maximum of the photocurrent signal among the data from the extreme value excluding means. 6. The shape measuring apparatus according to claim 4, further comprising: an extremum-excluded maximum photocurrent determining unit that determines a height corresponding to the value as an output value. 7. A position correction value storage in which the position calculation means stores a plurality of types of position correction values corresponding to the light receiving position for each one-dimensional optical position detecting element in accordance with the distance from the object to be measured. 7. A unit and a position correction value selection unit for selecting one correction value according to the distance from the plurality of types of position correction values.
The shape measuring device described.