JPH07293956A - Air showering apparatus - Google Patents

Abstract

PURPOSE:To improve comfortableness in an air showering room and to further improve dust removing effect of dusts adhered to a human body and clothing. CONSTITUTION:When a person rises on a footstool 70 and a detecting sensor detects the person, a controller 74 operates an air injecting high-speed fan 52 and closes a supply air damper 60 and an exhaust damper to shut OFF a supply air duct 58 and an exhaust duct 64. Thus, clean air is injected from a jet nozzle 44 into an air showering room 22 while circulating the air of the room 22 by the fan 52, thereby removing dusts adhered to a human body and clothing. When the sensor does not detect a person, the controller 74 stops the fan 52, and opens the damper 60 and the exhaust damper. Thus, a flow of air conditioned air for cooling to pass through the room 22 at a high temperature by heat generated particularly from a motor of the fan 52 during using of the room is formed to exhaust the heat of the room 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air shower device,
In particular, the present invention relates to an air shower device which is installed at the entrance of a clean room and removes dust adhering to a human body and clothes in advance when entering the clean room so as not to be brought into the clean room.

[0002]

2. Description of the Related Art In a clean room such as a processing / assembling factory for electronic parts including semiconductors, a chemical manufacturing factory, a food factory, a hospital, etc., a certain level of cleanliness is required due to its nature. Therefore, since the cleanliness in the clean room is greatly affected by the amount of dust of the person entering the clean room, an air shower device is installed at the entrance of the clean room and is used as a device for removing dust of the human body and clothes. .

As shown in FIG. 3, the conventional air shower apparatus mainly includes an air shower chamber 1, an air jetting high speed fan 2 and 2, an air circulating low speed fan 3 and 3, and high performance filters 4, 4 and 4. (Hereinafter, referred to as HEPA filter). When the person 5 is not in the air shower room 1, that is, when the air shower room 1 is not used, only the low-speed air circulation fan 3 is operated. As a result, the air blown from the low-speed air circulation fan 3 to the ceiling chamber 6 receives the HEPA filter 4, the air shower chamber 1, the underfloor chamber 7, and the high-speed air injection fan 2 provided on the ceiling surface.
Inside, a circulation path is formed to the low speed fan 3 for air circulation through the side chamber 8, and the air in the air shower chamber 1 is purified by filtering with the HEPA filter 4 in this circulation path. On the other hand, when a person 5 enters the air shower room 1, that is, when the air shower room 1 is used, both the low speed fan 3 for air circulation and the high speed fan 2 for air injection are operated. As a result, the air blown out from the high-speed fan 2 for air injection into the side chamber 8 can be removed from the HE in the side chamber 8.
The water is filtered by the PA filter 4, enters the pressure equalizing chamber 9, and is jetted toward the person 5 from a plurality of jet nozzles 10, 10 ... Provided on the side surface of the air shower chamber 1. This removes dust adhering to the human body and clothes, and
Dust is also removed by the flow of the air blown from the low-speed air circulating fan 3.

[0004]

However, since the conventional air shower device only circulates the air in the air shower chamber 1, while the air shower device is being used, the high-speed fan 2 for injecting air is used. Also, the circulating air is heated by the heat generated by the low-speed air circulating fan 3 (in particular, the heat of the motor). Therefore, not only the temperature in the air shower room 1 becomes high, but also the hot air is jetted from the jet nozzle 10, so that the person 5 who enters the air shower room 1 and removes dust is uncomfortable. There is a drawback of giving. Further, if the face of a person in the air shower chamber 1 sweats due to the high temperature air shower chamber 1 or the injection of the high temperature air, there is a drawback that it becomes difficult to remove dust by the sweat.

The present invention has been made in view of the above circumstances, and it is possible to improve the comfort in the air shower room and further improve the dust removing effect of dust adhering to the human body and clothes. The purpose is to provide.

[0006]

In order to achieve the above-mentioned object, the present invention jets clean air from an air blowing nozzle into the air shower chamber while circulating air in the air shower chamber by a high pressure fan, and In an air shower device for removing dust adhering to clothes, an air supply path for supplying clean air-conditioning air to the air shower room, an exhaust path for exhausting air in the air shower room, A first opening / closing means for communicating / blocking an air path, a second opening / closing means for communicating / blocking the exhaust path, a detection sensor for detecting the presence or absence of a person in the air shower chamber, and the detection sensor for detecting a person When detected, the high pressure fan is operated, and the air supply path and the exhaust path are shut off by the first and second opening / closing means, and when the detection sensor does not detect a person, It stops the fan, the first
And control means for communicating the air supply path and the exhaust path by the second opening / closing means to control the conditioned air to flow from the air supply path to the exhaust path via the air shower chamber,
It is characterized by having.

[0007]

According to the present invention, when the detection sensor detects a person, that is, when the air shower room is used, the high pressure fan is operated and the first and second opening / closing means are used to supply air and exhaust air. Block the route. Thus, while circulating the air in the air shower chamber by the high-pressure fan, clean air is ejected from the air blowing nozzle into the air shower chamber to remove dust adhering to the human body and clothes.

When the detection sensor does not detect a person, that is, when the air shower room is not used, the high pressure fan is stopped and the air supply path and the exhaust path are opened by the first and second opening / closing means. The conditioned air for cooling is communicated to flow from the air supply path to the exhaust path via the air shower room. As a result, the heat of the air shower chamber, which has become hot due to the heat generated by the high-pressure fan, particularly the motor, can be discharged during use of the air shower chamber.

If a damper device is used as the first and second opening / closing means and the opening of the second opening / closing means is narrower than the opening of the first opening / closing means, the pressure in the air shower chamber rises. A part of the conditioned air passes through the high pressure fan that forms a circulation path with the air shower room and flows into the air shower room. As a result, the high-pressure fan, which is the cause of heat generation, can be directly cooled, so that the effect of exhausting heat becomes large. Further, if the first and second opening / closing means are damper devices so that the opening degree can be adjusted, the supply amount of the conditioned air is adjusted so as not to overcool the air shower room with the conditioned air for cooling. You can

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of an air shower device according to the present invention will be described in detail below with reference to the accompanying drawings. Figure 1
It is sectional drawing explaining 1st Example of the air shower apparatus of this invention. As shown in FIG. 1, a ceiling plate 24 forming the ceiling surface of the air shower chamber 22 is disposed above the casing 20 formed in a box shape, and the casing 2
A floor plate 26 that forms a floor surface is disposed below 0.
Side plates 28, 28 that form both side surfaces (left and right surfaces in the drawing) of the air shower chamber 1 are provided upright on both sides (left and right positions in the drawing) inside the casing 20. As a result, the air shower chamber 22 is formed inside the casing 20, which is partitioned by the ceiling plate 24, the floor plate 26, and the side plates 28.
A ceiling chamber 30 is formed under the ceiling of the air shower room 22, an underfloor chamber 32 is formed under the floor, and side chambers 34, 34 are formed on the back sides of both side surfaces, respectively. Further, the chambers 36 are provided at the upper and lower four corners of the casing 20, respectively.
A, 36B, 36C and 36D are formed. In addition, an opening 38 is formed on the surface of the ceiling plate 24 in the air shower chamber 22, and a HEPA filter 40 is provided on the ceiling chamber 30 side of the opening 38, and the air shower chamber 22 and the ceiling chamber 30 are connected via the HEPA filter 40. Is ventilated.
Further, the surface of the air shower chamber 22 of the floor plate 26 is partitioned by the grating floor 26A so that it can be ventilated. Further, a plurality of blowout holes 42, 42 ... Are formed in the both side plates 28, and the jet nozzle 44 is provided in the blowout hole 42 with the air shower chamber 22.
Each is installed facing inward. Further, in each side chamber 24, a pressure equalizing chamber 46 communicating with a plurality of outlet holes 42 formed in each side plate 28 is provided, and an HEPA is formed in an opening 48 formed in the pressure equalizing chamber 46. A filter 50 is provided and the side chamber 34 and the pressure equalizing chamber 46 are vented through the HEPA filter 50. Further, among the chambers 36A, 36B, 36C, 36D formed at the four corners of the casing 20, high speed fans 52, 52 for air injection are arranged in the lower two chambers 36C, 36D, respectively. The outlet 52A of the high-speed air jet fan 52 is connected to the communication port 54 formed on the side chamber 34 surface of the floor plate 26, and under the floor via the communication port 56 formed on the underfloor chamber 32 surface of the side plate 28. The air in the chamber 32 is sucked into the suction port 52B of the high-speed air jet fan 52. As a result, the air blown out from the high-speed air jet fan 52 is pressurized in the side chamber 34, passes through the HEPA filter 50, and is pressure-equalized in the pressure equalizing chamber 46, so that the air is sprayed from the jet nozzle 44 to the air shower chamber. It is injected in 22. Further, the air in the air shower room 22 passes through the grating floor 26A to reach the underfloor chamber 32, and forms a circulation path to be sucked into the air jetting high-speed fan 52 again.

In the ceiling chamber 30, conditioned air for cooling is supplied from an air conditioner (not shown) to the ceiling chamber 30.
An air supply duct 58 for supplying the air is provided inside the air supply duct 5.
An air supply damper 60 that adjusts the amount of air supply and a backflow prevention damper 62 that prevents the backflow of air from the ceiling chamber 30 to the air supply duct 58 are provided in the inside of the unit 8. On the other hand, the underfloor chamber 32 is provided with an exhaust duct 64 for exhausting the air in the air shower chamber 22 to the outside of the air shower device through the underfloor chamber 32, and the exhaust duct 64 includes an exhaust damper 66 for adjusting the exhaust amount. And the exhaust duct 64 to the underfloor chamber 3
A backflow prevention damper 68 is provided to prevent backflow of air into the inside 2. As a result, the conditioned air supplied from the air conditioner through the air supply duct 58 into the ceiling chamber 30 is filtered by the HEPA filter 40 provided on the ceiling surface to become clean conditioned air, which is supplied to the air shower room 22. Be worried. The conditioned air supplied to the air shower chamber 22 forms a first conditioned air path that is exhausted to the outside of the air shower device by the exhaust duct via the underfloor chamber 32. Further, if the opening degree of the exhaust damper 66 is made smaller than the opening degree of the air supply damper 60, the pressure in the air shower chamber 22 rises, so that in addition to the first conditioned air path, the underfloor chamber 3
A part of the conditioned air in 2 reaches the inside of the side chamber 34 by penetrating the inside of the high speed fan 52 for air injection, and then flows from the jet nozzle 44 to the air shower chamber 22 via the HEPA filter 50 and the pressure equalizing chamber 46. 2 air-conditioned air paths are formed.

Further, a step 70 is provided on the grating floor 26A of the air shower room 22, a detection sensor 71 for detecting the load applied to the step 70 is provided on the step 70, and the detection sensor 71 is connected by a signal cable 72. It is connected to the controller 74. Also, the controller 7
4 is each signal cable 76, 78, 80, 82
The air injection high-speed fan 52, the air supply damper 60, and the exhaust damper 66 are connected to the respective drive units via the. When a load is applied to the step 70 and the detection sensor 71 detects a person, the controller 74 operates the high-speed air injection fan 52 and closes the air supply damper 60 and the exhaust damper 66 to supply the air supply duct 58 and the exhaust duct. Control to shut off 64. Further, when the load applied to the step 70 disappears and the detection sensor no longer detects a person, the controller 74 stops the high-speed air injection fan 52, opens the air supply damper 60 and the exhaust damper 66, and opens the air supply duct 58 and the exhaust gas. The duct 64 is connected to control the conditioned air from the air conditioner to flow from the air supply duct 58 to the exhaust duct 64 via the air shower chamber 22.

The operation of the air shower device of the present invention constructed as above will be described. When a person 84 enters the air shower room 22 and rides on the step 70, the detection sensor 71 detects the presence of the person. Controller 7 based on the detection signal
4 operates the high-speed fan 52 for air injection, closes the air supply damper 60 and the exhaust damper 66, and supplies the air supply duct 5
8 and the exhaust duct 64 are shut off. As a result, the high-pressure air blown into the side chamber 34 from the high-speed fan 52 for air injection passes through the HEPA filter 50 and the pressure equalizing chamber 46, and then from the jet nozzle 44 to the air shower chamber 2.
It is jetted toward the person 84 in 2. Due to this air injection, dust adhering to the human body and clothes is removed. Then, the air in the air shower chamber 22 in which the dust concentration is temporarily increased due to the dust being blown off is removed from the underfloor chamber 32.
The air is injected into the high-speed fan 52 for air injection through the air passage. At this time, the high speed fan 52 for injecting air sucks the air in the underfloor chamber 32, so that the underfloor chamber 32 has a negative pressure, but the backflow prevention damper 68 provided in the exhaust duct 64 prevents the exhaust duct 64 from flowing. Air is the underfloor chamber 32
Prevent backflow into the interior. Then, the air sucked by the high-speed fan 52 for air injection is returned to the side chamber 34 again.
The dust concentration in the air shower chamber 22 is reduced to the original level by being circulated while being blown out to the air and being filtered by the HEPA filter 50. This completes the removal of the dust adhering to the person 84.

During the circulation of the air, the temperature of the air shower chamber 22 rises due to the heat generated from the motor for the high-speed air jet fan 52, and the temperature inside the air shower chamber 22 rises. If the face of the person 84 in the air shower chamber 22 sweats due to the high temperature air shower chamber 22 or the jetting of the hot air, dust is hard to be removed by the sweat.

Therefore, in the air shower device of the present invention,
When the person 84 finishes removing dust and gets off the step 70 and the detection sensor 71 detects that the load on the step 70 is released,
The signal is output to the controller 74. Then, the controller 74 stops the operation of the high-speed air injection fan 52 and opens the air supply damper 58 and the exhaust damper 66. Thereby, the conditioned air from the air conditioner is supplied into the ceiling chamber 30 through the air supply duct 58. The conditioned air supplied into the ceiling chamber 30 is filtered by the HEPA filter 40 provided on the ceiling surface of the air shower room 22 and supplied into the air shower room 22 as clean air. The air that has conditioned the inside of the air shower chamber 22 passes through the underfloor chamber 32 and is exhausted to the outside of the air shower device by the exhaust duct 64. At this time, the air supply duct 58
Since the backflow prevention damper 62 is provided inside and the backflow prevention damper 68 is provided inside the exhaust duct 64, the backflow of the conditioned air is prevented from deteriorating the cleanliness inside the air shower chamber 22.

By the flow of this conditioned air, the heat trapped in the air shower chamber 22 can be exhausted, and
Since the air can be ventilated while maintaining the cleanliness of the air shower room 22, the person who enters the air shower room 22 next does not feel uncomfortable. Therefore, the inside of the air shower room 22 can be maintained in a comfortable environment. Further, if the opening degree of the exhaust damper 66 is made smaller than the opening degree of the air supply damper 60, a part of the conditioned air flowing from the air shower chamber 22 to the underfloor chamber 32 is prevented from flowing through the high-speed air injection fan 52. Form. As a result, the air injection high-speed fan 52, which is a heat generation source, can be directly cooled, so that exhaust heat can be more effectively performed. Further, by supplying the conditioned air into the air shower room 22, if the inside of the air shower room 22 becomes too cold, the opening degree of the air supply damper 60 is adjusted to supply the conditioned air amount into the air shower room 22. Adjust.

Next, a second embodiment of the air shower device of the present invention will be described. The same members and devices as those in the first embodiment are designated by the same reference numerals for description. In the second embodiment, when the air shower chamber 22 is used, the air blown out from the high-speed air jet fan 52 is jetted from the jet nozzle 44 to the air shower chamber 22 and also from the ceiling chamber 30. It is designed to be blown into the inside of 22. That is, in the upper two chambers 36A, 36B of the four corner chambers 36A, 36B, 36C, 36D formed in the casing 20, the chambers 36A, 36B surfaces of the ceiling plate 24 are formed by the grating plate 24A, and A communication port 86 is formed on the surface of the ceiling chamber 30 of the side plate 28, and a relief damper 88 that can swing about the upper end as a fulcrum is provided in each communication port 86. The relief damper 88 has a mechanism that closes when the pressure on the ceiling chamber 30 side is higher than the pressure on the chambers 36A and 36B side and opens when the pressure is lower.

According to the air shower device thus constructed, the relief damper 88 closes the communication port 86 by the pressure of the conditioned air supplied to the ceiling chamber 30 when the air shower chamber 22 is not used. Ceiling chamber 3
The conditioned air supplied to 0 is all supplied into the air shower chamber 22 and exhausted from the exhaust duct 64 to the outside of the air shower device. Further, when the opening degree of the exhaust damper 66 is made smaller than the opening degree of the air supply damper 60, a part of the conditioned air which is divided by the underfloor chamber 32 and penetrates the high-speed air injection fan 52 is sent to the side chamber 34. , HEPA filter 5
0, it flows from the jet nozzle 44 into the air shower chamber 22 through the pressure equalizing chamber 46. Furthermore, the side chamber 3
Part of the conditioned air sent to No. 4 is the grating plate 24.
Although it tries to flow into the chambers 36A and 36B through A, the flow velocity becomes small due to pressure loss in the grating plate 24A. Therefore, the pressure on the ceiling chamber 30 side is larger than that of the chambers 36A and 36B, and the relief damper 88 remains closed, so that the supply of the conditioned air into the ceiling chamber 30 is not disturbed. On the other hand, the air shower room 22
The high-pressure air blown out from the high-speed fan 52 for air injection into the side chamber 34 while using the jet nozzle 4 passes through the HEPA filter 50, the pressure equalizing chamber 46, and the jet nozzle 4
It is jetted from 4 to the person 84. Further, a part of the air in the side chamber 34 reaches the chambers 36A and 36B through the grating plate 24A, pushes the relief chamber 88 open and flows into the ceiling chamber 30, HE.
It is blown into the air shower chamber 22 through the PA filter 40. At this time, the air supply damper 60 of the air supply duct 58 and the exhaust damper 66 of the exhaust duct 64 are connected to the controller 7
It is closed by the instruction from 4. As a result, in addition to the air jetted from the jet nozzle 44, people 84
Since air is blown toward, the dust removal effect can be improved. Further, when the air shower room 22 is not used, a comfortable environment can be formed in the air shower room 22 as in the first embodiment.

In the present embodiment, the air circulation path for circulating the air between the air shower chamber 22 and the high-speed air jet fan 52 is formed by the ceiling chamber 30, the underfloor chamber 32, the side chamber 34, and the like. However, it may be formed by connecting with an air pipe.

[0020]

As described above, according to the air shower device of the present invention, in addition to the conventional function as the air shower device, when the air shower chamber is not used, the air shower device for cooling the air shower chamber is provided. By supplying clean conditioned air, the heat trapped in the air shower room can be discharged.

As a result, it is possible to maintain a comfortable environment in the air shower room while maintaining the function as the air shower device, so that the person who has entered the air shower room does not feel uncomfortable. Further, it is possible to prevent the dust from being hard to be removed by sweat, so that the dust removing effect can be improved.

[Brief description of drawings]

FIG. 1 shows a first air shower device according to the present invention.
Sectional view illustrating an embodiment

FIG. 2 is a second view of the air shower device according to the present invention.
Sectional view illustrating an embodiment

FIG. 3 is a vertical cross-sectional view illustrating a conventional air shower device.

[Explanation of symbols]

 22 ... Air shower room 24 ... Ceiling plate 26 ... Floor plate 28 ... Side plate 30 ... Ceiling chamber 32 ... Underfloor chamber 34 ... Side chamber 40, 50 ... HEPA filter 44 ... Jet nozzle 46 ... Pressure equalizing chamber 52 ... Air injection high-speed fan 58 ... Air supply duct 60 ... Air supply damper 62, 68 ... Backflow prevention damper 70 ... Step 71 ... Detection sensor 74 ... Controller 84 ... Person 88 ... Relief damper

Claims (2)

[Claims] 1. An air shower device for removing dust adhering to a human body and clothes by ejecting clean air from an air blowing nozzle into an air shower chamber while circulating air in the air shower chamber by a high pressure fan. An air supply path for supplying clean air-conditioning air to the air shower chamber, an exhaust path for exhausting the air in the air shower room, a first opening / closing means for connecting and blocking the air supply path, and the exhaust Second opening / closing means for connecting / disconnecting a path, a detection sensor for detecting the presence / absence of a person in the air shower room, and when the detection sensor detects a person, the high pressure fan is operated and the first And the second opening / closing means shuts off the air supply path and the exhaust path, and when the detection sensor does not detect a person, the high pressure fan is stopped and the first and second opening and closing means are stopped. Control means for communicating the air supply path and the exhaust path by a closing means and controlling the conditioned air to flow from the air supply path to the exhaust path via the air shower chamber. Air shower device. 2. The air shower device according to claim 1, wherein a damper device is used as the first and second opening / closing means.