JPH07292476A - Film formation on one surface of planar body and device therefor - Google Patents

Film formation on one surface of planar body and device therefor

Info

Publication number
JPH07292476A
JPH07292476A JP6083460A JP8346094A JPH07292476A JP H07292476 A JPH07292476 A JP H07292476A JP 6083460 A JP6083460 A JP 6083460A JP 8346094 A JP8346094 A JP 8346094A JP H07292476 A JPH07292476 A JP H07292476A
Authority
JP
Japan
Prior art keywords
plate
masking
film
shaped body
planar body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6083460A
Other languages
Japanese (ja)
Inventor
Takashi Hirotsu
孝 広津
Katsuhiko Iida
勝彦 飯田
Tomoo Kajikawa
智生 梶川
Takuya Sakagami
卓也 坂上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP6083460A priority Critical patent/JPH07292476A/en
Publication of JPH07292476A publication Critical patent/JPH07292476A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001General methods for coating; Devices therefor
    • C03C17/002General methods for coating; Devices therefor for flat glass, e.g. float glass

Abstract

PURPOSE:To attract a planar body consisting of sheet glass, etc., for side windows to a masking plate simply by reducing the pressure in the sealing space between this masking plate and the planar body by bringing the planar body into contact with a sealing part. CONSTITUTION:This device is provided with the masking plate 12 to cover one surface of the planar body consisting of the sheet glass 18 for side windows, etc., and the one surface of the masking plate 12 is provided with the sealing part 14. The sealing part 14 comes into contact with the entire peripheral edge of the planar body and further, the sealing part 14 seals the space 19 between the masking plate 12 and the planar body. A pressure reducing means 16 reduces the pressure in the space 19 and attracts the planar body to the masking plate 12. As a result, the easy masking of the one surface of the planar body is made possible and the film forming operation on the one surface of the planar body is efficiently carried out.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は板状体の片面をマスキン
グして、ディッピング法やスプレー法等でマスキングさ
れた面と反対側の片面のみを、撥水膜、UVカット膜、
熱反膜及び反射防止膜等の機能膜を成膜する板状体片面
の成膜方法及びその装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention masks one side of a plate-like body, and only one side opposite to the side masked by a dipping method, a spray method, etc.
The present invention relates to a film-forming method and apparatus for a single surface of a plate-like body for forming functional films such as a heat-reflective film and an antireflection film.

【0002】[0002]

【従来の技術】従来、板ガラス等の板状体に撥水膜、U
Vカット膜、熱線反射膜、反射防止膜又は導電膜等の機
能膜を成膜する場合、ゾルゲル法等でディッピング成膜
する方法や、スプレー法で成膜する方法が知られてい
る。そして、これらの機能膜を板状体の片面に成膜する
場合、板状体の他方の片面をマスキング用のテープでマ
スキングして一方の片面のみを成膜し、成膜完了後、マ
スキング用のテープを他方の片面から取り除く。このよ
うに、板状体の一方の片面のみを成膜する場合、成膜工
程の前に板状体の他方の片面をマスキング用のテープで
マスキングする必要があり、また板状体の一方の片面を
マスキングしたマスキング用のテープは成膜工程の後に
取り除く必要がある。従って、成膜作業の効率が低いと
いう問題がある。
2. Description of the Related Art Conventionally, a water-repellent film, U
When forming a functional film such as a V-cut film, a heat ray reflection film, an antireflection film, or a conductive film, a dipping film formation method by a sol-gel method or a spray method is known. When these functional films are formed on one side of the plate-shaped body, the other side of the plate-shaped body is masked with a masking tape and only one side is formed, and after the film formation is completed, the masking is performed. Remove the tape from the other side. In this way, when forming a film on only one side of the plate-shaped body, it is necessary to mask the other side of the plate-shaped body with a masking tape before the film forming step. The masking tape with one side masked must be removed after the film formation process. Therefore, there is a problem that the efficiency of the film forming operation is low.

【0003】一方、特開平5−59563号公報におい
て、テープでマスキングしないで板ガラス等の板状体の
片面だけを成膜する成膜方法が公開されている。この成
膜方法は、板状体に沿って形成された空間を減圧密閉状
態に維持し、パッキン部材の両側部に板状体を吸着させ
て板状体の片面のみにディッピング成膜を行うものであ
る。この成膜方法によれば、ディッピング工程前のテー
プによるマスキング作業とディッピング工程後のマスキ
ング用のテープの除去作業とを行う必要がないので、成
膜作業を効率よくおこなうことができる。
On the other hand, Japanese Patent Application Laid-Open No. 5-59563 discloses a film forming method for forming a film on only one surface of a plate-like body such as a plate glass without masking with a tape. In this film forming method, the space formed along the plate-like body is maintained in a vacuum-sealed state, the plate-like body is adsorbed on both sides of the packing member, and dipping film formation is performed only on one surface of the plate-like body. Is. According to this film forming method, since it is not necessary to perform the masking work with the tape before the dipping process and the removing work of the masking tape after the dipping process, the film forming work can be performed efficiently.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、特開平
5−59563号公報の成膜方法は平板の板状体に適用
することができるが、例えばサイドウインド用板ガラス
のように複曲面状に形成された板ガラス(すなわち、縦
方向と横方向とにそれぞれ曲げ成形された板ガラス)
や、その他の曲面状に形成された曲面状の板状体には適
用することができないという問題がある。
However, the film forming method disclosed in Japanese Patent Laid-Open No. 5-59563 can be applied to a flat plate, but is formed into a double curved surface such as a side window plate glass. Flat glass (that is, flat glass that has been bent in the vertical and horizontal directions, respectively)
Also, there is a problem that it cannot be applied to a curved plate-shaped body formed into another curved surface.

【0005】本発明はこのような事情に鑑みてなされた
もので、板状体、特に曲面状の板状体の片面への成膜作
業を効率よく行うことができる板状体片面の成膜方法及
びその装置を提供することを目的とする。
The present invention has been made in view of the above circumstances, and is capable of efficiently performing a film forming operation on one surface of a plate-like body, particularly a curved plate-like body. It is an object to provide a method and an apparatus thereof.

【0006】[0006]

【課題を解決するための手段】本発明は、前記目的を達
成するために、板状体の外形形状に対応したシール部が
設けられたマスキング板に板状体の片面を当接して、前
記マスキング板と前記板状体の片面との間の空間を前記
シール部でシールし、この状態で前記シールされた空間
を減圧して前記板状体を前記マスキング板に吸着し、前
記板状体の片面と反対側の片面を成膜することを特徴と
する板状体片面の成膜方法、及びこの方法を実施する装
置である。
According to the present invention, in order to achieve the above object, one side of a plate-shaped body is brought into contact with a masking plate provided with a seal portion corresponding to the outer shape of the plate-shaped body, The space between the masking plate and one surface of the plate-like body is sealed by the seal portion, and in this state, the sealed space is depressurized to adsorb the plate-like body to the masking plate, The method for forming a film on one surface of a plate-like body, characterized in that the film is formed on one surface on the opposite side to the one surface, and an apparatus for carrying out this method.

【0007】[0007]

【作用】本発明によれば、板状体の片面を覆うことが可
能なマスキング板を備え、マスキング板の片面にシール
部を設けた。シール部は板状体の全周縁に接触するよう
に形成され、マスキング板と板状体との間の空間をシー
ルする。また、減圧手段はシールされた空間を減圧して
板状体を吸着する。このように、板状体をシール部に接
触させて、マスキング板と板状体との間の空間を減圧す
るだけで、板状体をマスキング板に吸着できるので、板
状体の片面マスキングを容易に行うことができる。
According to the present invention, the masking plate capable of covering one side of the plate-shaped body is provided, and the seal portion is provided on one side of the masking plate. The seal portion is formed so as to contact the entire peripheral edge of the plate-shaped body, and seals the space between the masking plate and the plate-shaped body. The decompression means decompresses the sealed space and adsorbs the plate-shaped body. In this way, the plate-shaped body can be adsorbed to the masking plate simply by bringing the plate-shaped body into contact with the seal portion and depressurizing the space between the masking plate and the plate-shaped body. It can be done easily.

【0008】[0008]

【実施例】以下添付図面に従って本発明に係る板状体片
面の成膜方法及びその装置について詳説する。なお、実
施例においては一例としてサイドウインド用板ガラスに
撥水膜を成膜する場合について説明する。図1は本発明
に係る板状体片面の成膜装置の斜視図、図2は板ガラス
が板状体片面の成膜装置に吸着された状態を示す平面
図、図3はそのA−A断面図である。図1に示すように
板状体片面の成膜装置10はマスキング板12、シール
部14、及び減圧手段16を備えている。マスキング板
12は自動車のサイドウインド用板ガラス18の形状と
同様に略5角形状に形成され、このマスキング板12は
サイドウインド用板ガラス18より大きく形成されてい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method and apparatus for forming a film on one side of a plate-like body according to the present invention will be described in detail below with reference to the accompanying drawings. In the examples, the case of forming a water-repellent film on a side window plate glass will be described as an example. FIG. 1 is a perspective view of a plate-shaped body single-sided film forming apparatus according to the present invention, FIG. 2 is a plan view showing a state in which plate glass is adsorbed by a plate-shaped body single-sided film forming apparatus, and FIG. It is a figure. As shown in FIG. 1, the film forming apparatus 10 for one surface of a plate-shaped body includes a masking plate 12, a seal portion 14, and a pressure reducing means 16. The masking plate 12 is formed in a substantially pentagonal shape similar to the shape of the side window plate glass 18 of an automobile, and the masking plate 12 is formed larger than the side window plate glass 18.

【0009】さらに、マスキング板12はサイドウイン
ド用板ガラス18と同様に複曲面状に形成されている。
マスキング板12の略中央には開口穴12Aが形成さ
れ、開口穴12Aには後述する逆止弁20(図3参照)
が設けられている。マスキング板12の上端部には突片
21、21が形成され、突片21には開口穴21Aが形
成されている。なお、マスキング板12は一例としてF
RP(ガラス繊維補強材を熱硬化性樹脂で積層した板
材)で形成される。
Further, the masking plate 12 is formed into a double curved surface like the side window plate glass 18.
An opening hole 12A is formed substantially in the center of the masking plate 12, and a check valve 20 described later (see FIG. 3) is formed in the opening hole 12A.
Is provided. Projecting pieces 21, 21 are formed on the upper end of the masking plate 12, and an opening hole 21A is formed in the projecting piece 21. The masking plate 12 is, for example, F
It is formed of RP (a plate material in which a glass fiber reinforcing material is laminated with a thermosetting resin).

【0010】シール部14は、例えば軟質ゴムで枠体に
形成され、この枠体はサイドウインド用板ガラス18の
外周と略同様の形状に形成されている。シール部14は
マスキング板12の裏面に付着されている。また、シー
ル部14の外周はサイドウインド用板ガラス18の外周
より大きく形成され、シール部14の内周はサイドウイ
ンド用板ガラス18の外周より小さく形成されている。
従って、シール部14はサイドウインド用板ガラス18
の外周縁に接触する(図2参照)。これにより、マスキ
ング板12、シール部14及びサイドウインド用板ガラ
ス18で密閉空間19が形成される(図3参照)。
The seal portion 14 is formed of, for example, soft rubber in a frame body, and the frame body is formed in a shape substantially similar to the outer periphery of the side window plate glass 18. The seal portion 14 is attached to the back surface of the masking plate 12. The outer periphery of the seal portion 14 is formed larger than the outer periphery of the side window plate glass 18, and the inner periphery of the seal portion 14 is formed smaller than the outer periphery of the side window plate glass 18.
Therefore, the seal portion 14 is the side window plate glass 18
The outer peripheral edge of the (see FIG. 2). Thereby, the closed space 19 is formed by the masking plate 12, the seal portion 14, and the side window plate glass 18 (see FIG. 3).

【0011】減圧手段16は前述した逆止弁20を有
し、逆止弁20はマスキング板12の開口穴12Aに取
り付けられている。逆止弁20にはホース22の左端部
が着脱自在に支持され、ホース22の右端部には真空ポ
ンプ24が連通されている。従って、真空ポンプ24は
ホース22及び逆止弁20を介して密閉空間19に連通
される。これにより、真空ポンプ24が作動すると密閉
空間19が減圧され、密閉空間19を減圧した後ホース
22を逆止弁20から容易に取り外すことができる。こ
の場合、開口穴12Aには逆止弁20が取り付けられて
いるので、密閉空間19は減圧状態に維持される。
The pressure reducing means 16 has the above-described check valve 20, and the check valve 20 is attached to the opening hole 12A of the masking plate 12. A left end of a hose 22 is detachably supported by the check valve 20, and a vacuum pump 24 is connected to a right end of the hose 22. Therefore, the vacuum pump 24 is connected to the closed space 19 via the hose 22 and the check valve 20. As a result, when the vacuum pump 24 operates, the closed space 19 is depressurized, and the hose 22 can be easily removed from the check valve 20 after depressurizing the closed space 19. In this case, since the check valve 20 is attached to the opening hole 12A, the closed space 19 is maintained in a reduced pressure state.

【0012】また、図1上で25はゴム製のボタンであ
り、ボタン25はサイドウインド用板ガラス18のコー
ナ部に必要に応じて形成される穴18A、18A…を塞
ぐために使用される。なお、サイドウインド用板ガラス
18の穴18A、18A…がシール部14の側面上に位
置するようにシール部14を形成すれば、ボタン25を
使用せずに、穴18A、18A…をシール部14でシー
ルすることができる。
Further, in FIG. 1, reference numeral 25 is a rubber button, and the button 25 is used to close holes 18A, 18A ... Formed in the corners of the side window plate glass 18 as needed. If the seal portion 14 is formed so that the holes 18A, 18A ... Of the side window plate glass 18 are located on the side surfaces of the seal portion 14, the holes 18A, 18A ... Can be sealed with.

【0013】前記の如く構成された板状体片面の成膜装
置10は、図4に示すディッピング式成膜装置30に複
数枚まとめて吊下げられて液槽44内に浸漬される。デ
ィッピング式成膜装置30のフレーム32にはボールね
じ34が回動自在に立設され、ボールねじ34は駆動モ
ータ36に回転力を伝達可能に連結されている。ボール
ねじ36には昇降体38がねじ結合され、昇降体38に
吊りバー40が取り付けられている。吊りバー40の両
端部には吊りフック28、28が取り付けられ、吊りフ
ック28、28は突片21、21の開口穴21A、21
Aに嵌入される。これにより、板状体片面の成膜装置1
0は昇降体38に連結され、この状態で昇降体38を下
降させると板状体片面の成膜装置10が液槽44内に浸
漬される。なお、図4上で46はディッピング式成膜装
置30の操作部である。
A plurality of the plate-shaped body single-sided film forming apparatus 10 configured as described above are suspended in a dipping-type film forming apparatus 30 shown in FIG. 4 and immersed in a liquid tank 44. A ball screw 34 is rotatably erected on the frame 32 of the dipping type film forming apparatus 30, and the ball screw 34 is connected to a drive motor 36 so as to be able to transmit a rotational force. An elevating body 38 is screwed to the ball screw 36, and a lifting bar 40 is attached to the elevating body 38. The hanging hooks 28, 28 are attached to both ends of the hanging bar 40, and the hanging hooks 28, 28 have opening holes 21A, 21 of the projecting pieces 21, 21.
Inserted in A. As a result, the film-forming apparatus 1 for one surface of the plate-like body
0 is connected to the elevating body 38, and when the elevating body 38 is lowered in this state, the film forming apparatus 10 on one surface of the plate-shaped body is immersed in the liquid tank 44. Incidentally, reference numeral 46 in FIG. 4 denotes an operation unit of the dipping type film forming apparatus 30.

【0014】次に、板状体片面の成膜装置10をディッ
ピング式成膜装置30の液槽44内に浸漬してサイドウ
インド用板ガラス18の表面のみに撥水膜を成膜する場
合について説明する。先ず、サイドウインド用板ガラス
18をシール部14の表面上に載置して真空ポンプ24
を作動する。これにより、密閉空間19が減圧されサイ
ドウインド用板ガラス18がシール部14に吸着され
る。次に、逆止弁20からホース22を取り外して、板
状体片面の成膜装置10をディッピング式成膜装置30
に昇降可能に取り付ける。
Next, a case will be described in which the film forming apparatus 10 on one surface of the plate-like body is immersed in the liquid tank 44 of the dipping type film forming apparatus 30 to form a water-repellent film only on the surface of the side window plate glass 18. To do. First, the side window plate glass 18 is placed on the surface of the seal portion 14, and the vacuum pump 24
To operate. As a result, the closed space 19 is decompressed and the side window plate glass 18 is adsorbed to the seal portion 14. Next, the hose 22 is removed from the check valve 20, and the film forming apparatus 10 on one side of the plate-shaped body is set to the dipping type film forming apparatus 30.
To be able to move up and down.

【0015】すなわち、マスキング板12の突片21、
21に形成された開口穴21A、21Aを吊りフック2
8に吊り下げる。次に、操作部46を操作し、駆動モー
タ36を正回転してボールねじ34を正回転する。これ
により、昇降体38が下降して板状体片面の成膜装置1
0が液槽44内に浸漬される。マスキング板12を一定
時間、液槽44内に浸漬した後、駆動モータ36を逆回
転して液槽44内に浸漬した板状体片面の成膜装置10
を液槽44内から引き上げる。これにより、板状体片面
の成膜装置10に吸着されたサイドウインド用板ガラス
18の片面にのみ撥水膜が成膜される。
That is, the protruding piece 21 of the masking plate 12,
The opening holes 21A, 21A formed in 21 are used to suspend the hook 2
Suspend to 8. Next, the operating portion 46 is operated to rotate the drive motor 36 in the forward direction to rotate the ball screw 34 in the forward direction. As a result, the elevating body 38 descends and the film-forming apparatus 1 for one surface of the plate-shaped body
0 is immersed in the liquid tank 44. After the masking plate 12 is immersed in the liquid tank 44 for a certain period of time, the drive motor 36 is rotated in the reverse direction to be immersed in the liquid tank 44.
Is pulled up from the liquid tank 44. As a result, the water-repellent film is formed only on one surface of the side window plate glass 18 adsorbed by the film forming apparatus 10 on one surface of the plate-shaped body.

【0016】前記実施例においてはサイドウインド用板
ガラス18の片面に撥水膜を成膜する場合について説明
したが、これに限らず、UVカット膜、熱線反射膜、反
射防止膜又は導電膜等のその他の用途の薄膜をサイドウ
インド用板ガラスの片面に成膜する場合に適用すること
ができる。また、前記実施例においてはサイドウインド
用板ガラス18の片面に撥水膜を成膜する場合について
説明したが、これに限らず、自動車のフロント用板ガラ
スやその他の一般の板ガラス等の片面に成膜する場合に
使用してもよく、また、樹脂製の板状体や金属製の板状
体等を成膜する場合に使用することも可能である。
In the above embodiment, the case where the water repellent film is formed on one surface of the side window plate glass 18 has been described, but the invention is not limited to this, and a UV cut film, a heat ray reflective film, an antireflection film, a conductive film, or the like may be used. It can be applied when a thin film for other uses is formed on one side of a side window plate glass. Further, although the case where the water repellent film is formed on one surface of the side window plate glass 18 has been described in the above embodiment, the present invention is not limited to this, and the film is formed on one surface of the automobile front plate glass or other general plate glass. It may also be used in the case of forming a film, or may be used in the case of forming a film of a resin plate or a metal plate.

【0017】なお、前記実施例では本発明に係る板状体
片面の成膜装置を、複数個同時に液槽に浸漬するディッ
ピング式成膜装置に適用する場合について説明したが、
これに限らず、本発明に係る板状体片面の成膜装置を例
えばスプレー式の成膜装置等のようなその他の成膜装置
に適用することも可能である。
In the above embodiment, the case where the film-forming apparatus for one surface of the plate-like body according to the present invention is applied to the dipping-type film-forming apparatus in which a plurality of plate-like materials are simultaneously immersed in the liquid tank has been described.
The present invention is not limited to this, and the plate-shaped body single-sided film forming apparatus according to the present invention can be applied to other film forming apparatuses such as a spray type film forming apparatus.

【0018】[0018]

【発明の効果】以上説明したように本発明に係る板状体
片面の成膜方法及びその装置によれば、板状体をシール
部に接触させて、マスキング板と板状体との間の密閉空
間を減圧手段で減圧するだけで、板状体をマスキング板
に吸着できるので、板状体の片面マスキングを容易に行
うことができる。これにより、板状体の片面への成膜作
業を効率よく行うことができる。
As described above, according to the method for forming a film on one surface of a plate-like body and the apparatus therefor according to the present invention, the plate-like body is brought into contact with the seal portion so that the space between the masking plate and the plate-like body is increased. Since the plate-like body can be adsorbed to the masking plate only by decompressing the closed space with the decompressing means, one-side masking of the plate-like body can be easily performed. Thereby, the film forming operation on one surface of the plate-shaped body can be efficiently performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る板状体片面の成膜装置の斜視図FIG. 1 is a perspective view of a film forming apparatus for one surface of a plate-like body according to the present invention.

【図2】本発明に係る板状体片面の成膜装置にサイドウ
インド用板ガラスが吸着された状態を示す正面図
FIG. 2 is a front view showing a state in which a side window plate glass is adsorbed by a plate-shaped body single-sided film forming apparatus according to the present invention.

【図3】図2のA−A断面図3 is a sectional view taken along line AA of FIG.

【図4】本発明に係る板状体片面の成膜装置を撥水液槽
内に浸漬するディッピング式成膜装置の斜視図
FIG. 4 is a perspective view of a dipping type film forming apparatus in which the film forming apparatus for one surface of a plate-like body according to the present invention is immersed in a water repellent liquid tank.

【符号の説明】[Explanation of symbols]

10…板状体片面の成膜装置 12…マスキング板 14…シール部 16…減圧手段 18…サイドウインド用板ガラス(板状体) 19…マスキング板と板状体との間の空間 DESCRIPTION OF SYMBOLS 10 ... Plate-forming device on one side of plate-like body 12 ... Masking plate 14 ... Sealing part 16 ... Pressure reducing means 18 ... Side window plate glass (plate-like body) 19 ... Space between masking plate and plate-like body

フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 G02B 1/10 (72)発明者 坂上 卓也 神奈川県川崎市川崎区田町2丁目4番1号 旭硝子株式会社京浜工場内Continuation of the front page (51) Int.Cl. 6 Identification number Internal reference number FI Technical indication location G02B 1/10 (72) Inventor Takuya Sakagami 2-4 Tamachi, Kawasaki-ku, Kanagawa Prefecture Asahi Glass Keihin Co., Ltd. in the factory

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 板状体の外形形状に対応したシール部が
設けられたマスキング板に板状体の片面を当接して、前
記マスキング板と前記板状体の片面との間の空間を前記
シール部でシールし、 この状態で前記シールされた空間を減圧して前記板状体
を前記マスキング板に吸着し、 前記板状体の片面と反対側の片面を成膜することを特徴
とする板状体片面の成膜方法。
1. A masking plate provided with a seal portion corresponding to the outer shape of a plate-shaped body is brought into contact with one surface of the plate-shaped body to form a space between the masking plate and one surface of the plate-shaped body. It is characterized in that it is sealed by a sealing part, and in this state, the sealed space is decompressed to adsorb the plate-shaped body to the masking plate, and one surface of the plate-shaped body opposite to one side is formed into a film. Method for forming film on one side of plate-like body
【請求項2】 板状体の片面を覆うマスキング板と、 前記マスキング板の前記板状体と対向する面に設けられ
て前記板状体の全周縁に接触し、前記マスキング板と前
記板状体との間の空間をシールするシール部と、 前記シールされた空間を減圧して前記板状体を前記マス
キング板に吸着する減圧手段と、 を備えたことを特徴とする板状体片面の成膜装置。
2. A masking plate that covers one side of a plate-shaped body, and a masking plate and the plate-shaped body that are provided on a surface of the masking plate that faces the plate-shaped body and contact the entire peripheral edge of the plate-shaped body. A sealing part for sealing a space between the body and a decompression means for decompressing the sealed space to adsorb the plate-like body to the masking plate; Deposition apparatus.
JP6083460A 1994-04-21 1994-04-21 Film formation on one surface of planar body and device therefor Pending JPH07292476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6083460A JPH07292476A (en) 1994-04-21 1994-04-21 Film formation on one surface of planar body and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6083460A JPH07292476A (en) 1994-04-21 1994-04-21 Film formation on one surface of planar body and device therefor

Publications (1)

Publication Number Publication Date
JPH07292476A true JPH07292476A (en) 1995-11-07

Family

ID=13803082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6083460A Pending JPH07292476A (en) 1994-04-21 1994-04-21 Film formation on one surface of planar body and device therefor

Country Status (1)

Country Link
JP (1) JPH07292476A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007276656A (en) * 2006-04-07 2007-10-25 Nippon Sheet Glass Co Ltd Vehicular window glass
EP3981570A1 (en) * 2020-10-06 2022-04-13 SABIC Global Technologies B.V. System and method of shielding a part from a coating application

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007276656A (en) * 2006-04-07 2007-10-25 Nippon Sheet Glass Co Ltd Vehicular window glass
EP3981570A1 (en) * 2020-10-06 2022-04-13 SABIC Global Technologies B.V. System and method of shielding a part from a coating application
WO2022073998A1 (en) * 2020-10-06 2022-04-14 Sabic Global Technologies B.V. System and method of shielding a part from a coating application

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