JPH07286956A - Deterioration level measuring system and measuring device - Google Patents

Abstract

PURPOSE:To provide a deterioration level measuring system which can measure the deterioration level of the insulating material or the composing material of an apparatus in a nondistructive method without stopping the operation of the apparatus. CONSTITUTION:At least two sorts of single color lights are radiated on the surface of a sample to measure through an optical fiber 9, the reflected lights are led to a light quantity measure 8 through an optical fiber 13, and after the reflection absorbances in the wave lengths are calculated in a deterioration level operation member 1, the reflection absorbance difference or the reflection absorbance ratio of the wave lengths is operated, and furthermore, it is compared and operated with the output from a function generator 15 in which the relation between the deterioration level of the sample to measure, and the reflection absorbance difference or the reflection absorbance ratio of wave lengths, is stored beforehand, so as to decide the deterioration level.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a material deterioration degree measuring system capable of nondestructively measuring the deterioration degree of an insulating material or a structural material used in an equipment without stopping the operation of the equipment in operation. It relates to a measuring device.

[0002]

2. Description of the Related Art As a nondestructive measuring system for evaluating the degree of deterioration of insulating materials and structural materials for rotating electric machines, etc.
As disclosed in Japanese Patent No. 84162, the irradiation light guided from a white standard light source through an optical fiber is reflected by a sensor section made of the same material as the insulating material, and this reflected light is detected through an optical fiber for receiving light. However, a diagnostic device has been proposed which performs colorimetric calculation based on the chromaticity or chromaticity difference based on the L * a * b * colorimetric system. Here, L * is a lightness index and represents brightness, and a * and b * are called chromatic indexes and represent chromaticity (hue and saturation).

Further, as described in Japanese Patent Application Laid-Open No. 3-226651, irradiation light guided by an optical fiber from a white standard light source is transmitted through a sensor section made of the same material as an insulating material, There has also been proposed a colorimetric calculation diagnostic device based on the chromaticity or chromaticity difference based on the L * a * b * colorimetric system, which uses a transmitted light system in which transmitted light is detected through a receiving optical fiber.

[0004]

In the above-mentioned prior art, it is necessary to embed the irradiation optical fiber, the light receiving optical fiber, and the sensor portion in advance in the insulating layer of the device when manufacturing the device such as the rotating electric machine. However, there was an essential problem that it could not be applied to existing equipment that does not have these embedded.

Further, in the colorimetric calculation method based on the chromaticity based on the L * a * b * colorimetric system or the reflected light due to the chromaticity difference, an object to be measured whose surface is soiled by dust or the like or an object to be measured having irregularities In the case of a product, there is a problem that an accurate value cannot be obtained because the influence of the fluctuation of the absolute reflected light amount is great.

An object of the present invention is to solve the above problems and to measure non-destructively the degree of deterioration of insulating materials and structural materials used in equipment without particularly stopping the operation of the equipment in operation. To provide a deterioration degree measuring system and measuring apparatus.

[0007]

As a result of studying the relationship between the degree of deterioration of resin or oil and the optical properties, the present inventors have found that the deterioration due to the change in the intensity of light reflected from the surface of resin or oil due to heat deterioration. We have found a deterioration measurement system that can determine the degree of deterioration and can be applied even to the case where the surface is contaminated with dust or the like, the object having irregularities, or the object having semi-transparency. The present invention has been reached. That is, the gist of the present invention is as follows.

(1) Irradiation light from at least two types of monochromatic light sources having different wavelengths is guided by an irradiation optical fiber to irradiate the surface of the object to be measured, and reflected light from the surface of the object to be measured is received by the optical fiber. Is used to calculate the reflection absorbance (A _λ ) at each wavelength from the output from the light amount measurement unit in the deterioration degree calculation unit by the formula (1), and then the reflection absorbance difference (ΔA _λ ) between the wavelengths is calculated. ) Or the reflection absorbance ratio (A _λ ′) is calculated by the equation (2) or the equation (3), and the relationship between the deterioration degree of the object to be measured and the reflection absorbance difference between wavelengths or the reflection absorbance ratio is stored in advance. The deterioration degree measuring system for a material is characterized in that the deterioration degree is determined by comparing and calculating the output from the function generating section.

[0009]

A _λ = −log (R _λ / 100) (1) ΔA _λ = A _λ1 −A _λ2 (where λ1 <λ2) (2) A _λ ′ = A _λ1 / A _λ2 (however, λ1 <λ2) (3) (The reflectance of the measured object at the wavelength λ (nm) is R
_λ (%)) (2) At least two types of monochromatic light sources having different wavelengths, an optical coupler for guiding the source light to an irradiation optical fiber, and irradiation for irradiating the surface of the object with the light source Optical fiber,
A light-receiving optical fiber that receives reflected light from the surface of the object to be measured and guides it to a light amount measuring unit; a light amount measuring unit that can detect the reflected light intensity at each wavelength and externally output the measured value as an electric signal; After calculating the reflection absorbance (A _λ ) at each wavelength from the output value from the light quantity measurement unit by the above equation (1), the reflection absorbance difference (ΔA _λ ) between the wavelengths or the reflection absorbance ratio (A
_λ ′) is calculated by the equation (2) or the equation (3), and the relation between the deterioration degree of the object to be measured and the reflection absorbance difference between wavelengths or the reflection absorbance ratio is stored in advance from the function generator. A deterioration degree measuring apparatus for a material, comprising a deterioration degree calculation unit for judging a deterioration degree by comparing and calculating an output.

As the monochromatic light used as the light source, an LED having a peak wavelength in the wavelength range of 660 to 850 nm is easily available, and the life is long and the performance is stable, which is preferable. In particular, 660,780,800,820,830,850
An LED light source of nm or the like is suitable. In a light source having a wavelength other than the above range, the detector (light quantity measuring unit) may be in the overrange and photometry may not be possible while the degree of deterioration of the measured object is relatively small. When the object to be measured is originally a highly transparent acrylic resin, polycarbonate resin, or the like, it is more preferable to use light having a wavelength of 800 nm or less such as 660, 780, and 800 nm. On the other hand, for the alkyd resin, the unsaturated polyester resin, or the epoxy resin that is discolored immediately to black, or the opaque resin including the pigment, etc., the object to be measured is 780, 800, 820, 830, It is more preferable to use a wavelength in the near infrared region such as 850 nm.

In the present invention, since it is not necessary to embed the irradiation optical fiber and the light receiving optical fiber in the equipment in advance, these optical fibers are not particularly required to have their own heat resistance. A plastic optical fiber having a large diameter can be used, which is advantageous in improving the light receiving ability.

(3) Irradiation light from a halogen lamp that emits white continuous light is guided by an irradiation optical fiber to irradiate the surface of the object to be measured, and reflected light from the surface of the object to be measured is received using an optical fiber for receiving light. It is led to a light quantity measuring unit having a spectroscope, and after calculating the reflection absorbance (A _λ ) at each wavelength from the output from the light quantity measuring unit in the deterioration degree computing unit by the formula (1), the reflection absorbance difference between arbitrary two wavelengths. (ΔA _λ ) or the reflection absorbance ratio (A _λ ′) is calculated by the equation (2) or the equation (3), and the relationship between the deterioration degree of the object to be measured and the reflection absorbance difference between the wavelengths or the reflection absorbance ratio is calculated in advance. The deterioration degree measuring system for a material is characterized in that the deterioration degree is judged by comparing and calculating the output from the function generating section in which is stored.

[0013]

A _λ = −log (R _λ / 100) (1) ΔA _λ = A _λ1 −A _λ2 (where λ1 <λ2) (2) A _λ ′ = A _λ1 / A _λ2 (however, λ1 <λ2) (3) (The reflectance of the measured object at the wavelength λ (nm) is R
_λ (%)) (4) Light source of a halogen lamp that emits white continuous light, an irradiation optical fiber that irradiates the light from the light source onto the surface of the object to be measured, and receives reflected light from the surface of the object to be measured. An optical fiber for receiving light which is guided to a light quantity measuring section having a spectroscope, a light quantity measuring section capable of detecting the intensity of reflected light at each wavelength dispersed by the spectroscope and outputting the measurement value as an electric signal to the outside, and the light quantity measuring section After calculating the reflection absorbance (A _λ ) at each wavelength from the output value from (1), the reflection absorbance difference (ΔA _λ ) between any two wavelengths or the reflection absorbance ratio (A _λ ′) can be _calculated from the above (2). ) Or (3), and further compare and calculate the output from the function generator that stores the relationship between the deterioration degree of the DUT and the reflection absorbance difference between wavelengths or the reflection absorbance ratio in advance. Equipped with a deterioration degree calculator that determines the deterioration degree by In the deterioration degree measurement device of materials, characterized in that the.

(5) An input means for receiving the thickness (t, mm) of the object to be measured is provided, and the irradiation light from at least two types of monochromatic light sources having different wavelengths is guided by the irradiation optical fiber. Irradiate the surface of the object to be measured, guide the reflected light from the surface of the object to be measured to the light quantity measuring section using the optical fiber for reception, and in the deterioration degree calculating section, from the output from the light quantity measuring section, the reflection loss at each wavelength (L After calculating _λ , dB / mm) by the equation (4), the reflection loss difference (ΔL _λ , dB / mm) between the wavelengths is calculated by the equation (5), and the deterioration degree of the measured object and each wavelength are calculated in advance. In the material deterioration degree measuring system, the deterioration degree is determined by comparing and calculating the output from the function generating unit that stores the relationship with the reflection loss difference between them.

[0015]

L _λ = − (10 / t) log (R _λ / 100) (4) ΔL _λ = L _λ1 −L _λ2 (where λ1 <λ2) (5) (at wavelength λ (nm) The reflectance of the DUT is R
_λ (%)) Incidentally, the input means for receiving the input of the thickness is further for inputting the light transmittance of the object to be measured or the presence / absence of thickness correction, and the input means receives the input. When the light transmittance is 50% or more, or when the thickness correction “existence” is instructed, the value of the thickness accepted by the input means is adopted as the thickness t in the equation (4), When the light transmittance received by the input means is less than 50%, or when the instruction for the thickness correction “absent” is received, 10 is adopted as the thickness t in the expression (4). That is, it is substantially equivalent to the equation (1).

[0016]

In general, the change in the reflection absorbance spectrum due to the thermal deterioration of the organic material made of a single material is represented by the change shown in FIG. As shown in the figure, since the reflection absorbance significantly increases on the short wavelength side of the visible region with deterioration,
660 due to restrictions on the measurement range of the detector (light quantity measurement unit)
In the wavelength region of less than nm, it becomes substantially difficult to continuously measure the reflection absorbance of the material used until the end of the life of the device. This increase in reflection absorbance on the short wavelength side is mainly due to an increase in electron transition absorption loss due to the thermal oxidation deterioration reaction of the material.

Further, as the deterioration degree increases, the reflection absorbance A
_{Since λ} increases toward the shorter wavelength side, the reflection absorbance difference ΔA _λ (= A _λ1 −A _λ2 ) between any two wavelengths or the reflection absorbance ratio A _λ ′ (= A _λ1 / A _λ2 ) is also the same. To increase. Here, λ1 <λ2. For example, in FIG.
Reflection absorbance difference Δ between wavelength λ1 (nm) and wavelength λ2 (nm)
_Let A _λ be α1, α2, α3 in order from the material with the highest degree of deterioration.
Then, the relationship of α1>α2> α3 is established. The same applies to the reflection absorbance ratio A _λ ′. FIG. 5 shows a reflection absorbance spectrum when measured on the surface of an insulating material having no surface stain and a reflectance absorbance spectrum measured when measured on the surface of an insulating material having the same degree of deterioration and surface stain. Reflection absorbance difference Δ between wavelength λ1 and wavelength λ2
A _λ is Δα when there is no surface stain, Δ when there is surface stain
Assuming α ′, Δα≈Δα ′ regardless of the presence or absence of contamination if the insulating material has the same degree of deterioration. Although surface contamination changes (may increase or decrease) the absolute intensity of reflected light, it is generally considered to have a small wavelength dependence, and in particular, it is considered to be constant regardless of wavelength in the measurement wavelength region of the present invention. Good. The same is true for measurements on uneven surfaces. Thus, by using the reflection absorbance difference ΔA _λ between two wavelengths as defined in the present invention, the degree of deterioration can be measured with almost no influence of the surface contamination of the object to be measured and the shape thereof. The same effect can be applied to the above-described reflection absorbance ratio A _λ ′.

In the case of a resin or the like having a light transmittance of 50% or more, not only the surface reflected light but also the light reflected by the back surface after passing through the resin is affected. Therefore, it is necessary to correct the thickness of the resin or the like (optical path length). When the light transmittance is less than 50%, the proportion of light reflected on the back surface decreases, and the influence of light reflected from the back surface becomes almost negligible. Therefore, when the light transmittance is less than 50%, it is not necessary to correct the thickness. In this case, in equation (4), t
= 10 may be applied. In this way, by correcting the reflected light intensity of the resin or the like having a light transmittance of 50% or more with the thickness (optical path length), more accurate deterioration diagnosis by reflected light can be performed.

Further, as described in Japanese Patent Laid-Open No. 3-226651, the deterioration degree is generally represented by a conversion time θ. By expressing it as the conversion time θ, it means that even if the materials have various thermal histories, if θ is the same, the degree of deterioration is the same. The conversion time θ (h) is defined by the equation (6).

[0020]

[Equation 13]

Here, ΔE is the apparent activation energy (J / mol) of thermal degradation, R is the gas constant (J / K / mol), T
Is the absolute temperature (K) of heat deterioration, and t is the deterioration time (h). ΔE of resin, oil, etc. can be easily calculated by plotting the change of the reflection absorbance difference ΔA _{λ1 λ2} with respect to several kinds of deterioration temperatures.

Further, if the converted time at the life point of the equipment using the resin or the oil obtained in advance is θ ₀ , the difference Δθ (= θ ₀ −
θ) is the converted time corresponding to the remaining life, and is a measure for determining the degree of deterioration. That is, the remaining life Δθ (h) is expressed by the equation (7).

[0023]

[Equation 14]

From the equation (7), if the operating temperature condition of the device after the time t is determined, the remaining life time Δt (= t ₀ -t) can be obtained.

[0025]

EXAMPLES The present invention will be described in detail below with reference to examples.

(Embodiment 1) FIG. 1 is a block diagram showing the configuration of a deterioration degree measuring system. In FIG. 1, the deterioration degree calculation unit 1 automatically transmits the switching command signals of the switching units 3, 4, and 5 to the switching control unit 2 in accordance with the measurement procedure. First,
The reference light quantity for each wavelength is measured. The reference optical fiber 7 has the same length as the measuring optical fiber (irradiating optical fiber 9 + receiving optical fiber 13).
The monochromatic light having the peak wavelength λ1 generated from the light source 6 is transmitted from the switching unit 3 to the switching unit 4, and further from the reference optical fiber 7 to the switching unit 5 to the light amount measuring unit 8. The light amount measuring unit 8 measures the reference light amount I ₁ of the monochromatic light having the peak wavelength λ1 from the light source 6 and outputs the measured value to the deterioration degree calculating unit 1. The deterioration degree calculation unit 1 stores the reference light amount I ₁ of the light source 6. Similarly, the same operation is performed using monochromatic light having a peak wavelength λ2 different from λ1 generated from the light source 14, and the deterioration degree calculation unit 1 stores the reference light amount I _{2 of the} light source 14. Next, the amount of reflected light on the surface of the insulating material is measured. The monochromatic light having the peak wavelength λ1 from the light source 6 passes through the switching unit 3 and the switching unit 4, and further is transmitted through the irradiation optical fiber 9 to be irradiated on the surface of the insulating material 11 in the reflected light measuring unit 10. The reflected light measurement unit 10 has a structure for blocking external stray light as shown in FIG.
The light receiving optical fiber 13 receives the reflected light 12 from the surface of the insulating material 11, the transmitted light is sent to the light amount measuring unit 8 through the switching unit 5, the reflected light amount I ₁ ′ is measured, and the deterioration degree calculation unit 1
The result I ₁ ′ is output at. In the deterioration degree calculation unit 1, λ1
The reflectance R _λ1 (= 100 × I ₁ ′ / I ₁ ) at
Remembered. Similarly, the same operation is performed using monochromatic light having a peak wavelength λ2 different from λ1 generated from the light source 14, and the deterioration degree calculation unit 1 performs reflectance R at λ2.
_{λ 2} (= 100 × I ₂ ′ / I ₂ ) is calculated and stored. In this way, since the reflectances at the wavelengths λ1 and λ2 are obtained, the deterioration degree computing unit 1 obtains the reflection absorbance difference ΔA _λ (= A _λ1 −A _λ2 ) between the two wavelengths. The function generating section 15 stores in advance a reflection absorbance difference corresponding to the degree of deterioration of the insulating material as a master curve as shown in FIG. 4, and outputs it to the deterioration degree calculating section 1. From the stored function value and the measured reflection absorbance difference ΔA _λ , the deterioration degree calculation unit 1
, The deterioration degree is determined by comparison calculation and output as a measurement result to an external printer (not shown) or the like. A calculation flowchart for determining the degree of deterioration is shown in FIG.

(Embodiment 2) FIG. 6 shows three wavelengths (λ1 to λ).
The block diagram of the deterioration degree measurement system which used 3) simultaneously is shown. Even if three wavelengths are transmitted in one optical fiber, the system operates well because the light has no coherence. A filter corresponding to each wavelength is incorporated in the light quantity measuring unit 8, and the light quantity at each wavelength can be instantaneously measured by operating the filter in a time division manner. The lights of the respective wavelengths are simultaneously sent through the optical coupler 16 into the irradiation optical fiber 9. Similar to the first embodiment, the amount of reference light and the amount of reflected light for each wavelength are measured. The light receiving optical fiber 13 receives the reflected light 12 from the surface of the insulating material 11, the transmitted light is sent to the light amount measuring unit 8, the reflected light amount is measured, and the result is output to the deterioration degree calculation unit 1. In the deterioration degree calculation unit 1,
The reflectances R _{λ1 to} R _{λ3 at the} wavelengths _{λ1 to λ3} are calculated and stored. In this way, wavelength λ1 to wavelength λ3
Therefore, the deterioration calculating unit 1 obtains the reflection absorbance difference ΔA _λ (= A _λ −A _λ ′) between any two wavelengths in the data between the three wavelengths. The function generating section 15 stores in advance a reflection absorbance difference corresponding to the degree of deterioration of the insulating material as a master curve as shown in FIG. 4, and outputs it to the deterioration degree calculating section 1. From the stored function value and the actually measured reflection absorbance difference ΔA _λ , the deterioration degree calculator 1 compares and determines the deterioration degree, and outputs the result as a measurement result to the outside.

(Embodiment 3) FIG. 7 shows a block diagram of a deterioration degree measuring system using a white light source (halogen lamp) as a light source. Even if a white light source (halogen lamp) is used as the light source,
The system works well. The light quantity measuring unit 8 incorporates a spectroscope composed of an interference filter, and
The amount of light at 0 to 900 nm) can be measured instantly. Similar to Example 1, the amount of reference light and the amount of reflected light for each wavelength (500 to 900 nm) are measured. The light receiving optical fiber 13 receives the reflected light 12 from the surface of the insulating material 11,
The transmitted light is sent to the light quantity measuring unit 8, the reflected light quantity is measured, and the result is output to the deterioration degree calculating unit 1. Degradation degree calculation unit 1
Then, the reflectance R ₅₀₀ at a wavelength of ₅₀₀ to 900 nm
R ₉₀₀ is continuously calculated and stored. In this way
Since the reflectance in the wavelength range of 500 to 900 nm is obtained, the deterioration degree calculator 1 determines the reflection absorbance difference ΔA _λ (= A _λ −A _λ ′) between any two wavelengths. The function generating section 15 stores in advance a reflection absorbance difference corresponding to the degree of deterioration of the insulating material as a master curve as shown in FIG. 4, and outputs it to the deterioration degree calculating section 1. From the stored function value and the measured reflection absorbance difference ΔA _λ , the deterioration degree calculation unit 1
Is compared to determine the degree of deterioration, and is output as a measurement result to the outside.

In each of the above-mentioned embodiments, the case of a solid insulating material has been described, but the deterioration degree can be measured in the same manner for a liquid material such as oil.

(Embodiment 4) FIG. 8 is a block diagram showing the functional arrangement of a deterioration degree measuring apparatus. In FIG. 8, the deterioration degree calculation unit 1 uses a notebook type personal computer having a hard disk unit 15 built therein. First, the reference light amount for each wavelength is measured. The reference light amount was measured by placing an alumina oxide plate at the position of the insulating material 11. There is no problem even if white plain paper or a chrome-plated metal plate is used without using the alumina oxide plate. Peak wavelength 660n generated from light source 6
The monochromatic light of m passes through the two plastic optical couplers 16, is guided to the irradiation optical fiber 9, and is reflected on the alumina oxide plate. The reflected light is transmitted to the light quantity measuring unit 8 through the light receiving optical fiber 13. The light quantity measuring unit 8 uses an optical power meter with a built-in photodiode. The light amount measuring unit 8 measures the reference light amount I ₁ of the monochromatic light having the peak wavelength of 660 nm from the light source 6, and outputs the measured value to the deterioration degree calculating unit 1 as an analog voltage value from the pin jack. The personal computer of the deterioration degree calculation unit 1 cannot directly input analog output data.
A bit A / D (analog / digital) converter 19 is connected to the expansion connector. 12-bit A / D converter 19
Has the ability to capture a voltage value of 5 volts by dividing it into 4096 (= 2 ¹² ). The deterioration degree calculation unit 1 stores the reference light amount I ₁ of the light source 6 in the memory. Similarly,
The same operation is performed using the monochromatic light having the peak wavelength of 780 nm generated from the light source 14, and the reference light amount I _{2 of the} light source 14 is stored in the deterioration degree calculation unit 1. Similarly, the same operation is performed using the monochromatic light having the peak wavelength of 850 nm generated from the light source 18, and the reference light amount I _{3 of the} light source 18 is stored in the deterioration degree calculation unit 1. next,
The amount of reflected light on the surface of the insulating material is measured. The monochromatic light having the peak wavelength of 660 nm from the light source 6 passes through the two plastic optical couplers 16 and is guided to the irradiation optical fiber 9 to be irradiated on the surface of the insulating material 11 in the reflected light measuring unit 10. The reflected light measurement unit 10 has a structure for blocking external stray light as shown in FIG. The light receiving optical fiber 13 receives the reflected light from the surface of the insulating material 11, the transmitted light is sent to the light amount measuring unit 8, the reflected light amount I ₁ ′ is measured, and the result I ₁ ′ is output to the deterioration degree calculation unit 1. To be done. In the deterioration degree calculation unit 1,
Reflectance at 660 nm R ₆₆₀ (= 100 × I ₁ ′ /
I ₁ ) is calculated and stored in the memory. Similarly, the same operation is performed using the monochromatic light having the peak wavelength of 780 nm generated from the light source 14, and the deterioration degree calculation unit 1 performs 780
The reflectance R ₇₈₀ (= 100 × I ₂ ′ / I ₂ ) in nm is calculated and stored in the memory. Similarly, the same operation is performed using the monochromatic light having the peak wavelength of 850 nm generated from the light source 18, and the deterioration degree calculation unit 1 calculates the reflectance R ₈₅₀ (= 100 × I ₃ ′ / I ₃ ) at ₈₅₀ nm. It is stored in memory. In this way, 660, 780,
Since the reflectance at 850 nm is obtained, the deterioration degree calculator 1 calculates the difference in reflection absorbance between arbitrary two wavelengths ΔA _λ (=
A _λ1 −A _λ2 ) is obtained. In the function generator 15 including a hard disk unit, a reflection absorbance difference corresponding to the degree of deterioration of the insulating material as shown in FIG. 4 is stored in advance as a master curve and is output to the deterioration degree calculator 1. This stored function value and the measured reflection absorbance difference ΔA _λ
The deterioration degree calculation unit 1 compares and calculates the deterioration degree from the value of 1, and outputs it as a measurement result to an external printer (not shown) or the like.

In this embodiment, the deterioration measuring device for materials using three wavelengths has been described, but the measuring device operates well even with only two wavelengths.

(Embodiment 5) Using the deterioration measuring system similar to that of Embodiment 1, the wavelengths λ1 and λ2 of the insulating material 11 are measured.
After obtaining the reflectance at, the deterioration degree calculation unit 1 obtains the reflection absorbance ratio A _λ ′ (= A _λ1 / A _λ2 ) between the two wavelengths. The function generation unit 15 stores in advance a reflection absorbance ratio corresponding to the deterioration degree of the insulating material as a master curve as shown in FIG. 9, and outputs it to the deterioration degree calculation unit 1. From the stored function value and the actually measured reflection / absorption ratio A _λ ′, the deterioration degree calculation unit 1 performs a comparison calculation to determine the deterioration degree, and outputs it to an external printer (not shown) or the like as a measurement result.

(Embodiment 6) Using the deterioration degree measuring system similar to that in Embodiment 2, wavelengths λ1 to λ3 of the insulating material 11 are measured.
After obtaining the reflectance at, the deterioration degree computing unit 1 obtains the reflection absorbance ratio A _λ ′ (= A _λ1 / A _λ2 ) between any two wavelengths of the data between the three wavelengths. The function generation unit 15 stores in advance a reflection absorbance ratio corresponding to the deterioration degree of the insulating material as a master curve as shown in FIG. 9, and outputs it to the deterioration degree calculation unit 1. From the stored function value and the actually measured reflection / absorbance ratio A _λ ′, the deterioration degree calculator 1 compares and determines the deterioration degree, and outputs the result as a measurement result to the outside.

(Embodiment 7) Using a deterioration degree measuring system similar to that of Embodiment 3, wavelengths of insulating material 11 of 500 to 900 are used.
After obtaining the reflectance in nm, the deterioration calculating unit 1 calculates the reflection absorbance ratio between two arbitrary wavelengths A _λ ′ (= A _{λ 1} /
A _λ2 ) is calculated. The function generation section 15 stores in advance a reflection absorbance ratio corresponding to the degree of deterioration of the insulating material as a master curve as shown in FIG.
Output to. From the stored function value and the actually measured reflection / absorption ratio A _λ ′, the deterioration degree calculation unit 1 performs a comparison operation to determine the deterioration degree, and outputs it as a measurement result to the outside.

In each of the above-mentioned embodiments, the case of a solid insulating material has been described, but the deterioration degree can be measured in the same manner for a liquid material such as oil.

(Embodiment 8) Using the deterioration degree measuring apparatus similar to that of Embodiment 4, the insulating materials 11, 660, 780 and 850 are used.
After obtaining the reflectance in nm, the deterioration calculating unit 1 calculates the reflection absorbance ratio between two arbitrary wavelengths A _λ ′ (= A _{λ 1} /
A _λ2 ) is calculated. In the function generator 15 including a hard disk unit, a reflection absorbance ratio corresponding to the degree of deterioration of the insulating material as shown in FIG. 9 is stored in advance as a master curve and is output to the deterioration degree calculator 1. From the stored function value and the actually measured value of the reflection / absorption ratio A _λ ′, the deterioration degree calculation unit 1 performs a comparison calculation to determine the deterioration degree, and outputs it to an external printer (not shown) as a measurement result.

In this embodiment, the material deterioration measuring device using three wavelengths has been described, but the measuring device works well even with only two wavelengths.

(Embodiment 9) FIG. 11 shows a thickness input means 20.
It is a block diagram which shows the structure of the deterioration measuring system which has. In FIG. 11, the deterioration degree calculation unit 1 automatically transmits the switching command signals of the switching units 3, 4, and 5 to the switching control unit 2 in accordance with the measurement procedure. First, the reference light amount for each wavelength is measured. The reference optical fiber 7 has the same length as the measuring optical fiber (irradiating optical fiber 9 + receiving optical fiber 13). The monochromatic light having the peak wavelength λ1 generated from the light source 6 is transmitted from the switching unit 3 to the switching unit 4, and further from the reference optical fiber 7 to the switching unit 5 to the light amount measuring unit 8. In the light quantity measuring unit 8, the light source 6
Reference light amount I ₁ of monochromatic light having a peak wavelength λ1 from
Is measured and the measured value is output to the deterioration degree calculation unit 1. The deterioration degree calculation unit 1 stores the reference light amount I ₁ of the light source 6. Similarly, the same operation is performed using monochromatic light having a peak wavelength λ2 different from λ1 generated from the light source 14,
The reference light amount I of the light source 14 in the deterioration degree calculation unit 1
₂ is memorized. Next, the amount of reflected light on the surface of the insulating material is measured. The monochromatic light having the peak wavelength λ1 from the light source 6 passes through the switching unit 3 and the switching unit 4, and further is transmitted through the irradiation optical fiber 9 to be irradiated on the surface of the insulating material 11 in the reflected light measuring unit 10. The reflected light measurement unit 10 has a structure for blocking external stray light as shown in FIG. The light receiving optical fiber 13 receives the reflected light 12 from the surface of the insulating material 11, the transmitted light is sent to the light amount measuring unit 8 through the switching unit 5, the reflected light amount I ₁ ′ is measured, and the deterioration degree calculating unit 1 The result I ₁ ′ is output. In the deterioration degree calculation unit 1, the reflectance R at λ1
_{λ 1} (= 100 × I ₁ ′ / I ₁ ) is calculated and stored. Similarly, the same operation is performed using monochromatic light having a peak wavelength λ2 different from λ1 generated from the light source 14, and the deterioration degree calculation unit 1 performs reflectance R _λ2 (= 100 × I) at _λ2.
2 '/ I ₂ ) is calculated and stored. In this way, the reflectance at the wavelength λ1 and the reflectance at the wavelength λ2 are obtained, so that the deterioration degree calculator 1 calculates the reflection loss difference ΔL _λ (= L) between the two wavelengths.
_{.lambda.1 -L.lambda.2} ) is obtained. The function generator 15 includes
The reflection loss difference corresponding to the deterioration degree of the insulating material as shown in 2 is stored in advance as a master curve, and is output to the deterioration degree calculation unit 1. The deterioration degree calculator 1 compares the stored function value and the actually measured reflection loss difference ΔL _λ to determine the deterioration degree, and outputs the measured result to an external printer (not shown) or the like. FIG. 13 shows a graph showing a state of data variation depending on the presence or absence of thickness correction for an insulating film having a transmittance of 50%. In FIG. 13, a is a plot without thickness correction, and b is a plot with thickness correction.
It can be seen that the variation in the data was significantly reduced by the thickness correction.

[0039]

According to the present invention, it is possible to nondestructively measure the degree of deterioration of an insulating material or a structural material used in a device without stopping the operation of the device in actual operation. Further, it becomes possible to obtain a deterioration degree measuring system applicable to a measured object whose surface is contaminated with dust or the like, or a measured object having irregularities.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a deterioration degree measuring system according to a first embodiment.

FIG. 2 is a schematic perspective view showing an optical fiber measurement end portion of the first embodiment.

FIG. 3 is an example of a reflection absorbance spectrum of an insulating material.

FIG. 4 is an example of a reflection-absorption-difference master curve that serves as a reference for determining the degree of deterioration.

FIG. 5 is a graph showing the relationship between the presence or absence of surface contamination and the reflection absorbance spectrum.

FIG. 6 is a block diagram showing the configuration of a deterioration degree measuring system according to a second embodiment.

FIG. 7 is a block diagram showing a configuration of a deterioration degree measuring system according to a third embodiment.

FIG. 8 is a block diagram showing the configuration of a deterioration degree measuring device according to a fourth embodiment.

FIG. 9 is an example of a reflection / absorption ratio master curve that is used as a criterion for determining the degree of deterioration.

FIG. 10 is a flowchart of calculation for determining the degree of deterioration.

FIG. 11 is a block diagram showing the configuration of a deterioration degree measurement system according to a ninth embodiment.

FIG. 12 is an example of a reflection loss difference master curve that serves as a reference for deterioration degree determination.

FIG. 13 is a graph showing the presence or absence of thickness correction for an insulating film having a transmittance of 50%.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Deterioration degree calculation part, 2 ... Switching control part, 3, 4, 5 ... Switching part, 6 ... Light source (wavelength λ1), 7 ... Reference optical fiber, 8 ... Light quantity measuring part, 9 ... Irradiation optical fiber, 10 ... Reflected light measuring section, 11 ... Insulating material, 12 ... Reflected light, 13 ... Receiving optical fiber, 14 ... Light source (wavelength λ2), 15 ... Function generating section, 16 ... Optical coupler, 17 ... Light source (halogen lamp) , 18 ... Light source (850 nm), 19 ... 12 bit A
/ D converter, 20 ... Thickness input means.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shinichi Akasaka 7-1-1 Omika-cho, Hitachi City, Ibaraki Hitachi Ltd. Hitachi Research Laboratory (72) Inventor Makoto Shimodera 1-chome Kandanishikicho, Chiyoda-ku, Tokyo 6 In Hitachi Building System Service Co., Ltd. (72) Inventor, Juichi Miya Miya, 1-chome Kanda Nishikicho, Chiyoda-ku, Tokyo 6 In Hitachi Building System Service Co., Ltd. (72) Minokichi Miura 1-chome, Kanda Nishiki, Chiyoda-ku, Tokyo Address 6 Hitachi Building System Service Co., Ltd.

Claims (15)

[Claims] 1. An irradiation optical fiber guides irradiation light from at least two types of monochromatic light sources having different wavelengths to irradiate the surface of the object to be measured, and the reflected light from the surface of the object to be measured is received by an optical fiber for receiving light. It is led to the light amount measuring unit using the light absorption amount measuring unit, and the reflection absorbance (A _λ ) at each wavelength is calculated by the formula (1) from the output from the light amount measuring unit in the deterioration degree calculating unit, and then the reflection absorbance difference (ΔA _λ ) between the respective wavelengths. Is calculated by the equation (2), and the degree of deterioration is determined by comparing and calculating the output from the function generator that stores the relationship between the degree of deterioration of the DUT and the reflection absorbance difference between wavelengths in advance. A material deterioration measuring system characterized by the above. [Number 1] _{A λ = -log (R λ /} 100) ... (1) ΔA λ = A λ1 -A λ2 ( However, .lambda.1 <.lambda.2) reflections ... (2) (wavelength lambda object to be measured in (nm) Rate R
_λ (%)) 2. The material deterioration degree measuring system according to claim 1, wherein a light source having a peak wavelength of 660 nm or more and 850 nm or less is used as the monochromatic light source. 3. The light emitted from a halogen lamp that emits white continuous light is guided by an irradiation optical fiber to irradiate the surface of the object to be measured, and the reflected light from the surface of the object is spectrally separated using an optical fiber for receiving light. Led to a light quantity measuring unit having a vessel, and after calculating the reflection absorbance (A _λ ) at each wavelength from the output from the light quantity measuring unit in the deterioration degree calculating unit by the formula (1), the reflection absorbance difference between arbitrary two wavelengths ( ΔA _λ ) is calculated by the equation (2), and the deterioration degree is calculated by comparing and calculating the output from the function generating unit that stores the relationship between the deterioration degree of the DUT and the reflection absorbance difference between wavelengths in advance. A deterioration degree measuring system for materials, which is characterized by determining. [Number 2] _{A λ = -log (R λ /} 100) ... (1) ΔA λ = A λ1 -A λ2 ( However, .lambda.1 <.lambda.2) reflections ... (2) (wavelength lambda object to be measured in (nm) Rate R
_λ (%)) 4. At least two types of monochromatic light sources having different wavelengths, and an optical coupler that guides the light sources to an irradiation optical fiber,
An irradiation optical fiber for irradiating the surface of the object to be measured with the light source light, an optical fiber for receiving light which receives reflected light from the surface of the object to be measured and guides it to a light amount measuring section, and detects reflected light intensity at each wavelength. Then, after calculating the reflected light absorbance (A _λ ) at each wavelength from the output value from the light amount measurement unit and the output value from the light amount measurement unit by the formula (1), the difference in the reflected light absorbance between the respective wavelengths (ΔA _λ ) is calculated by the equation (2), and the output from the function generating unit that stores the relationship between the deterioration degree of the object to be measured and the reflection absorbance difference between wavelengths in advance is compared and calculated. A deterioration degree measuring device for a material, comprising: a deterioration degree calculating section for judging the degree of deterioration. (3) A _λ = −log (R _λ / 100) (1) ΔA _λ = A _λ1 −A _λ2 (where λ1 <λ2) (2) (Reflection of the measured object at the wavelength λ (nm)) Rate R
_λ (%)) 5. The material deterioration degree measuring device according to claim 4, wherein an LED light source having a peak wavelength of 660 nm or more and 850 nm or less is used as the monochromatic light source. 6. A light source of a halogen lamp for irradiating continuous white light, an irradiation optical fiber for irradiating the surface of the object to be measured with the light of the light source, and a quantity of light having a spectroscope for receiving reflected light from the surface of the object to be measured. An optical fiber for receiving light to be guided to the measuring section, a light quantity measuring section capable of externally outputting the measured value as an electric signal by detecting the reflected light intensity at each wavelength dispersed by the spectroscope, and an output value from the light quantity measuring section Reflection absorbance at each wavelength (A
_λ ) is calculated by the equation (1), then the reflection absorbance difference (ΔA _λ ) between two arbitrary wavelengths is calculated by the equation (2), and the deterioration degree of the DUT and the reflection absorbance difference between the respective wavelengths are calculated in advance. A deterioration degree measuring device for a material, comprising: a deterioration degree calculating section for judging a deterioration degree by comparing and calculating an output from a function generating section that stores the relationship of Equation 4] _{A λ = -log (R λ /} 100) ... (1) ΔA λ = A λ1 -A λ2 ( However, .lambda.1 <.lambda.2) reflections ... (2) (wavelength lambda object to be measured in (nm) Rate R
_λ (%)) 7. An irradiation optical fiber guides irradiation light from at least two types of monochromatic light sources having different wavelengths to irradiate the surface of the object to be measured, and reflected light from the surface of the object to be measured is received by an optical fiber for receiving light. It is led to a light quantity measuring section using the light quantity measuring section, and the reflection absorbance (A _λ ) at each wavelength is calculated by the formula (1) from the output from the light quantity measuring section in the deterioration degree calculating section, and then the reflection absorbance ratio between each wavelength (A _λ ′) ) Is calculated by the equation (3), and the degree of deterioration is determined by comparing and calculating the output from the function generator that stores the relationship between the degree of deterioration of the object to be measured and the reflection absorbance ratio between wavelengths in advance. A material deterioration measuring system characterized by: Equation 5] _{A λ = -log (R λ /} 100) ... (1) A λ '= A λ1 / A λ2 ( However, λ1 <λ2) ... (3 ) ( a wavelength lambda of the object to be measured in (nm) R is the reflectance
_λ (%)) 8. The deterioration measuring system for a material according to claim 7, wherein a light source having a peak wavelength of 660 nm or more and 850 nm or less is used as the monochromatic light source. 9. The irradiation light from a halogen lamp that emits white continuous light is guided by an irradiation optical fiber to irradiate the surface of the object to be measured, and the reflected light from the surface of the object to be measured is separated using an optical fiber for receiving light. To a light amount measuring unit having a vessel, and the deterioration calculating unit calculates the reflection absorbance (A _λ ) at each wavelength from the output from the light amount measuring unit by the formula (1), and then the reflection absorbance ratio between arbitrary two wavelengths ( A _λ ′) is calculated by the equation (3), and the output from the function generating unit that stores the relationship between the degree of deterioration of the object to be measured and the reflection / absorption ratio between wavelengths in advance is compared and calculated. A deterioration degree measuring system for materials, which is characterized by judging the degree. (6) A _λ = −log (R _λ / 100) (1) A _λ ′ = A _λ1 / A _λ2 (where λ1 <λ2) (3) (measurement target at wavelength λ (nm)) R is the reflectance
_λ (%)) 10. At least two kinds of monochromatic light sources having different wavelengths, an optical coupler for guiding the light source light to an irradiation optical fiber, and an irradiation optical fiber for irradiating the surface of the object to be measured with the light source light. A light-receiving optical fiber that receives reflected light from the surface of the object to be measured and guides it to a light amount measuring unit; a light amount measuring unit that can detect the reflected light intensity at each wavelength and externally output the measured value as an electric signal; The reflection absorbance (A _λ ) at each wavelength is calculated by the equation (1) from the output value from the light quantity measurement unit, and the reflection absorbance ratio (A _λ ′) between the wavelengths is calculated by the equation (3). It is characterized by comprising a deterioration degree calculation unit for determining the deterioration degree by comparing and calculating the output from the function generating unit that stores the relationship between the deterioration degree of the measurement object and the reflection absorbance ratio between the respective wavelengths. Material deterioration measuring device. Equation 7] _{A λ = -log (R λ /} 100) ... (1) A λ '= A λ1 / A λ2 ( However, λ1 <λ2) ... (3 ) ( a wavelength lambda of the object to be measured in (nm) R is the reflectance
_λ (%)) 11. The monochromatic light source has a wavelength of 660 nm.
11. The material deterioration degree measuring device according to claim 10, wherein an LED light source having a peak wavelength of not less than 850 nm is used. 12. A light source of a halogen lamp for irradiating continuous white light, an irradiation optical fiber for irradiating the surface of the object to be measured with the light of the light source, and a light quantity having a spectroscope for receiving reflected light from the surface of the object to be measured. An optical fiber for receiving light to be guided to the measuring section, a light quantity measuring section capable of externally outputting the measured value as an electric signal by detecting the reflected light intensity at each wavelength dispersed by the spectroscope, and an output value from the light quantity measuring section After calculating the reflection absorbance (A _λ ) at each wavelength by the equation (1), the reflection absorbance ratio between any two wavelengths (A _λ ′) is calculated by the equation (3), and the deterioration degree of the measured object is calculated in advance. A deterioration degree measuring device for a material, comprising a deterioration degree calculating section for judging a deterioration degree by comparing and calculating an output from a function generating section which stores a relationship with a reflection absorbance ratio between respective wavelengths. . A _λ = −log (R _λ / 100) (1) A _λ ′ = A _λ1 / A _λ2 (where λ1 <λ2) (3) (measurement object at wavelength λ (nm) R is the reflectance
_λ (%)) 13. An object to be measured which has an input means for receiving an input of a thickness (t, mm) of an object to be measured and guides irradiation light from at least two kinds of monochromatic light sources having different wavelengths by an irradiation optical fiber. Irradiate the surface of the object, guide the reflected light from the surface of the object to be measured to the light quantity measuring section by using the light receiving optical fiber, and in the deterioration degree calculating section, from the output from the light quantity measuring section, the reflection loss at each wavelength (L _λ , DB / mm) by the formula (4), and then the reflection loss difference (ΔL _λ , dB / mm) between the wavelengths is calculated by the formula (5). The deterioration degree measuring system for a material, wherein the deterioration degree is determined by comparing and calculating the output from the function generating unit that stores the relationship with the reflection loss difference. L _λ = − (10 / t) log (R _λ / 100) (4) ΔL _λ = L _λ1 −L _λ2 (where λ1 <λ2) (5) (at wavelength λ (nm) The reflectance of the DUT is R
_λ (%)) 14. The input means for receiving the input of the thickness further receives the light transmittance of the object to be measured or the input of the presence / absence of thickness correction, and the light transmittance received by the input means is When the value is 50% or more, or when the thickness correction “present” is instructed, the value of the thickness accepted by the input means is adopted as the thickness t in the equation (4), and the thickness of the input means is changed. 14. When the received light transmittance is less than 50%, or when the instruction for thickness correction “absent” is received, 10 is adopted as the thickness t in the expression (4). Degradation measuring system for the described materials. 15. The monochromatic light source has a wavelength of 660 nm.
14. The material deterioration degree measuring system according to claim 13, wherein a light source having a peak wavelength of not less than 850 nm is used.