JPH07281015A - Manufacture of laminated optical grating - Google Patents

Abstract

PURPOSE:To manufacture a laminated optical grating such as a laminated diffraction grating in a short time by simple operation. CONSTITUTION:After thin plate like grating raw material 11 and 12 (for example, a soda glass plate and a lead glass plate having a thickness of 0.1mm) different in an optical property are alternately laminated with each other, they are pressurized and thinned in the lamination direction by a press, or after thin plate like composite grating materials composed of a laminated structure of thin plate-like or thin film-like grating raw materials (for example, a soda glass plate having a thickness of 0.1mm and an Au thin film having a thickness of 50 angstroms) different in an optical property are laminated with each other, they are pressurized and thinned in the lamination direction by the press, and a laminated optical grating 13 is manufactured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally relates to thin films of at least two kinds of grating materials (materials for forming a grating) which are optically different from each other, that is, have different optical properties such as refractive index and reflectance. Spectral element, non-linear optics, in which (including ultra-thin films) are arranged (arranged) in a repeating order (regularly) in a predetermined order, for example, in the case of two types, alternate ones The present invention relates to an improvement in a method for producing (manufacturing) a laminated (volume) optical grating for an element, a polarizing element and the like.

[0002]

2. Description of the Related Art A laminated optical grating of this type includes, for example, a laminated diffraction grating for a spectroscopic element, but in the past, two or more optically different grating materials, for example, metal or oxide. And the like are sequentially laminated as thin films through thin film deposition techniques such as physical vapor deposition (PVD) such as vacuum deposition, sputtering and ion plating, and chemical vapor deposition (CVD) such as thermal decomposition and reduction. It is made by.

[0003]

Therefore, in the conventional method for producing a laminated optical grating, the thin film deposition operation must be repeated for the number of laminated thin films, which is troublesome and takes a long time. .

In view of the above problems, it is an object of the present invention to fabricate a laminated optical grating, for example, a laminated diffraction grating in a short time by a simple operation.

[0005]

In order to achieve the above-mentioned object, according to the first method of the present invention, as shown schematically in FIG. After repeatedly stacking the grid materials 11 and 12 in (1), pressure is applied in the stacking direction as indicated by the arrow to thin the wall.

According to the second method of the present invention, as shown in FIG.
As shown schematically in FIG. 1, after stacking a thin plate-like composite lattice material 21 in which at least two optically different lattice materials 22 and 23 are laminated in at least one repeating arrangement unit, and then stacking them as indicated by arrows. Pressurize in the direction to thin the wall.

As shown in FIG. 2, the thin plate-shaped composite lattice material 21 includes one kind of lattice material 22 as a thin plate-shaped base material, and another lattice material 23 laminated in a thin film on the base material. Also, it includes a laminated optical grating 13 or 24 manufactured by the above-mentioned first or second method, or a thin plate-shaped laminated optical grating manufactured by another method.

As the thin plate-shaped grid materials 11, 12, 22 and the thin film-shaped grid material 23, glass (ordinary glass or quartz glass), plastic, metal (including semimetal), alloy, oxides or nitrides of these Amorphous substances such as substances and compounds,
Various materials such as a microcrystalline substance and a crystalline substance can be used. Among these materials, glass and plastic can be used as the grid material 22 forming the base material of the composite grid material 21 as shown in FIG. 2, and the thin film grid material 23 can be metal or alloy. , These oxides, nitrides, and compounds can be used.

Stacked thin plate-like lattice materials 11 and 12
The pressure in the stacking direction of the thin-film composite lattice material 21 or the laminated optical lattices including the laminated optical lattices 13 and 24 may be compressed by a press die, rolled by a roller, or drawn by a die die. Any thin wall, such as
It can be carried out by a stretching operation, and this pressurization can be carried out while the material is heated, if necessary.

The grid material 2 in the composite grid material 21 of FIG.
The thin film-like lattice material 23 can be laminated and adhered onto the entire surface of the lattice material 22 or a part thereof by a thin film adhesion technique such as vacuum deposition, sputtering, ion plating, thermal decomposition and reduction.

[0011]

In the present invention, stacked thin plate-like grating materials 11 and 12, a composite grating material 21 as shown in FIG. 2, or a thin plate-like laminated optical grating 1 as one of the composite grating materials.
Laminated optical gratings of various sizes, which are integrated in a thinned state by pressurization of 3, 24, etc., whereby the lattice materials are regularly laminated and arranged in a thin film state of various thicknesses, For example, a laminated diffraction grating is manufactured.

[0012]

【Example】

Example 1 As shown in FIG. 3, the thickness is 0.1 mm and the refractive index is 1.
A soda glass plate 31 of 53 and a lead glass plate 12 having a thickness of 0.1 mm and a refractive index of 1.87 are alternately arranged for a total of 50 sheets in total of 1 sheet.
With 100 sheets stacked and a height of 20 mm, 75
It is charged into a furnace maintained at a temperature of 0 ° C., and a first die (stage) lamination having an overall thickness of 2.0 mm is obtained by pressurizing the furnace from above and below with a press die at a pressure of 0.1 MPa for 30 minutes. The mold optical lattice plate 33 was compressed and deformed. Next, this first laminated optical grating plate 33 was folded tenfold in the same furnace to make the total height 20 mm, and then pressed under the same conditions to make the total thickness 2.0 mm. The laminated optical grating plate 34 of No. 2 was produced. The optical grating plate 34 includes a thin film of soda glass having a refractive index of 1.53 and a refractive index of 1.87.
The lead glass thin film has a structure in which a total of 1,000 sheets are laminated at intervals of 1.0 μm, and white light is applied to a laminated optical grating block of an appropriate size (eg, 3 mm square × 2.5 mm thick) cut and molded from this. When projected on, interference was caused due to the difference in optical path length caused by passing through a thin film layer having different refractive index many times, and rainbow color was observed in transmitted light and reflected light.

Example 2 As shown in FIG. 4, a composite of Au deposited by sputtering to a thickness of 50 Å on one surface of a soda glass plate 41 having the same thickness as that used in Example 1 and having a thickness of 0.1 mm. 100 sheets of soda glass plates 41 with Au thin film 42 as a grid material were stacked and placed in a furnace maintained at a temperature of 800 ° C. with a height of 10 mm, and press molds were pressed from above and below in the furnace. Then, a pressure of 0.1 MPa was applied for 30 minutes to prepare a first (step) laminated optical grating plate 43 having a total thickness of 2.5 mm including the ultrathin Au film. The Au ultra-thin film of the first laminated optical grating plate 33 became particles of about 100 nm and was distributed in a plane, and also formed a light reflection surface at intervals of 25 μm.

Next, the first laminated optical grating plate 43 with the Au ultra-thin film is folded in four in the same furnace,
Pressing was performed under the same conditions as above, with the entire height being 10 mm. As a result, 4 at intervals of 6.25 μm
A second laminated optical grating plate 44 having an Au ultrathin film for forming a light-reflecting surface and having a total thickness of 2.5 mm was prepared.

Further, the second laminated diffraction grating plate 44 with the Au ultra-thin film was quadruple folded in the furnace, and pressure was applied under the same conditions as described above. This gives a total thickness of 2.5 mm and a spacing of about 1.25 μm.
A third laminated optical grating plate 45 having 600 Au ultrathin films (light reflecting surface) was completed.

These first to third laminated optical grating plates 4
A laser beam having a wavelength of 670 nm is formed in parallel with the Au ultra-thin film, that is, the light reflecting surface, on a laminated optical grating block of an appropriate size (for example, 3 mm square × 2.5 mm thickness) cut and molded from 3, 44, 45. As a result of investigating the diffraction performance by passing through, the Bragg diffraction condition, that is, 2d sin θ = λ (where λ is the laser beam wavelength)
It was confirmed that

When a white ray was transmitted through these optical grating blocks, a diffraction phenomenon occurred at a diffraction angle according to the wavelength of the light contained in the white ray, and iridescent coloring was observed.

Further, when the optical absorption spectra of these optical grating blocks were measured, an absorption peak appeared at around 500 nm and showed a large third-order nonlinear susceptibility of the order of 10 ^-7 esu.

When the polarization ratios of these optical grating blocks were measured, a large value of 200 or more was shown.

Example 3 Instead of Au, Pt, Pd, Al, Ag, Cu, S
Except that n, Pb, Si, and C were vapor-deposited by sputtering, a laminated optical grating block with three types of ultrathin films was produced under the same conditions as in Example 2, and the same laser beam and white color as in Example 2 were produced for each. Similar results were obtained when light rays were transmitted.

Example 4 By stacking 100 composite lattice materials made of soda glass plates to which a thin film of tin oxide having a thickness of 20 nm was deposited by Sn sputtering in an oxygen gas atmosphere,
Under the same conditions as in Example 2, heating and pressurization were performed to prepare three types of laminated optical grating blocks having a light reflecting surface on which light-transparent ultrathin Sn oxide particle particles are distributed. Although these optical gratings are transparent from any direction, they diffract only at angles and wavelengths that satisfy Bragg's diffraction conditions,
A coloring phenomenon was observed.

Example 5 Instead of Sn, Ag, Al, Cu, Pb, Ti, Z
Using r, Sb, As, Zn, and fluoride and phosphate under the same conditions as in Example 4, three types of laminated optical grating blocks were produced, respectively, and the same results as in Example 4 were obtained. was gotten.

Example 6 Under the same conditions as in Example 4, except that the SnSb oxide or ITO was deposited by sputtering, 3
When various kinds of laminated optical grating blocks were produced, they were transparent and had conductivity.

[0024]

As is apparent from the above description, according to the method of the present invention, basically, an operation that is easy to control, that is, a pressing operation in a stacked state of thin plate-like lattice materials or composite lattice materials is performed. Since a laminated optical grating such as a laminated diffraction grating is manufactured according to the above, the number of laminated thin films of a wide range of grating materials, thin film thickness, and optical grating size (thickness, length, width)
Can be manufactured easily and in a short time, and therefore inexpensively and with high precision.

Further, according to the method of the present invention, there is virtually no limit to the usable lattice material, and each can be used in an arbitrary amount. Therefore, if necessary, a transparent or colored material, Alternatively, it is possible to manufacture an optical grating having conductive properties or ferromagnetism, or to significantly reduce the amount of expensive grating material used.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view of a first method of the present invention.

FIG. 2 is a schematic explanatory view of a second method of the present invention.

FIG. 3 is a schematic explanatory view of a method according to a first embodiment of the present invention.

FIG. 4 is a schematic explanatory view of a method according to a second embodiment of the present invention.

[Explanation of symbols]

 11 Laminated Lattice Material 12 Laminated Lattice Material 13 Laminated Optical Grating 21 Laminated Composite Lattice Material 22 Laminated Lattice Material 23 Thin Film Lattice Material 24 Laminated Optical Grating 31 Soda Glass Plate 32 Lead Glass Plate 33 First laminated optical element 34 Second laminated optical element 41 Soda glass plate 42 Au thin plate 43 First laminated optical lattice plate 44 Second laminated optical lattice plate 45 Third laminated optical lattice plate

Claims (6)

[Claims] 1. A method for producing a laminated optical grating, which comprises repeatedly stacking at least two types of thin plate-like grating materials which are optically different from each other, and then applying pressure in the stacking direction to reduce the thickness. 2. A thin plate-like composite lattice material in which at least two optically different lattice materials are laminated in at least one repeating arrangement unit is stacked, and then pressure is applied in the stacking direction to reduce the thickness. , Method for manufacturing stacked optical grating. 3. The laminated optical system according to claim 2, wherein the thin-plate composite lattice material is one in which one kind of lattice material is used as a thin-plate base material, and another lattice material is laminated in a thin film form on the base material. How to make a lattice. 4. The method for producing a laminated optical grating according to claim 2, wherein the thin plate-shaped composite grating material is a laminated optical grating. 5. The method for producing a laminated optical grating according to claim 4, wherein the laminated optical grating is produced by the method according to claim 1. 6. The method for producing a laminated optical grating according to claim 4, wherein the laminated optical grating is produced by the method according to claim 2.