JPH07276198A - Grinding machine - Google Patents

Abstract

PURPOSE:To provide a grinding machine with good grinding efficiency by which the uniformity of grinding in relation to grinding workpiece can be adjusted. CONSTITUTION:A table 10 as well as grinding workpiece 70 are rotated forcely and a grinding disc 38 is rotated forcely in the same direction. A grinding head 30 as well as a movable body 20 are reciprocated by a reciprocating device 60 and the position of the rotary axial center 35 of the grinding disc 38 is displaced. By pressurizing by approaching motion, the grinding by the grinding disc 38 is carried out uniformly across the entire area in relation to the grinding surface of grinding workpiece 70 by the compound movement of force rotation with reciprocating motion. The grinding head 30 is moved longitudinally by the operation of a position adjusting device 50 and the grinding position by the grinding disc 38 is adjusted. The pitch of the reciprocating motion is adjusted by the operation of the reciprocating device and the reciprocating range and the reciprocating position of the grinding disc 38 are adjusted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus used for polishing a flat surface of a plate-like object such as a disk, a glass plate, a metal plate or the like.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 4, a polishing apparatus of this type has a machine frame, a polishing disk 80 and a table 81 which are arranged on the machine frame so as to face each other in the vertical direction, and the polishing disk 80. It was composed of a lifting rod 83 connected via a universal joint (ball bearing or the like) 82, a rotary drive device interlocking with the table 81, and the like. And table 81
After setting the object 84 to be polished, the table 81 is forcibly rotated X by the rotation drive device, and the lowering and lowering rod 83 moves the polishing disk 80 closer to and abuts the object 84. The desired flat surface polishing was performed while the polishing disk 80 was rotated Y by the friction.

[0003]

However, according to the above-mentioned conventional structure, since the polishing disk 80 is rotated by rotation Y due to the friction, the polishing efficiency is poor and the polishing uniformity with respect to the object 84 to be polished is uniform. Could not be adjusted.

An object of the present invention is to provide a polishing apparatus which has a high polishing efficiency and can adjust the uniformity of polishing with respect to an object to be polished.

[0005]

In order to achieve the above object, a polishing apparatus of the present invention comprises a machine frame, a polishing disk and a table which are vertically opposed to the machine frame and which can be relatively moved toward and away from each other. And a respective rotary drive device that interlocks with these polishing discs and tables, and a movable body equipped with a polishing head composed of the polishing disc and the rotary drive device, and reciprocates the movable body in the machine frame. A reciprocating device is provided, and a reciprocating pitch thereof is adjustable, and a position adjusting device for moving the polishing head toward and away from the table rotation axis is provided on the movable body.

[0006]

According to the structure of the present invention, after the table and the polishing disk are relatively separated from each other, the objects to be polished are set relatively close to each other while the objects to be polished are set on the table. The polishing disc may be brought into contact with the polishing surface of the. Before such contact, both rotary drive devices and reciprocating devices are operated to rotate and move the respective parts, whereby desired polishing can be performed.

That is, the object to be polished can be forcibly rotated together with the table by the rotary drive device, and the polishing disk can be forcibly rotated in the same direction by the rotary drive device. Then, the position of the rotation axis of the polishing disk can be displaced by reciprocating the polishing head together with the movable body by the reciprocating device. Therefore, by applying pressure by the approaching movement,
By the combined movement of the forced rotation of the object to be polished and the polishing disc and the reciprocating movement of the polishing disc, the polishing by the polishing disc
It can be performed uniformly over the entire polishing surface of the object to be polished.

The adjustment can be made according to the shape of the object to be polished. That is, by moving the polishing head forward or backward by operating the position adjusting device, the rotation axis of the polishing disk can be moved toward or away from the rotation axis of the table. Can be adjusted. Further, by adjusting the reciprocating pitch by operating the reciprocating device, it is possible to adjust the reciprocating range (length) of the polishing disk and the reciprocating position. As a result, the polishing disk can be forcibly rotated at different displaced reciprocating positions and at different displaced reciprocating positions, so that the polishing surface of the object to be polished can be uniformly polished over the entire area.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 and 2, 1 is a machine frame, and space 2
And a lower machine casing 3 having a box-like shape, and an upper machine casing 4 erected from the upper surface of one side of the lower machine casing 3. On the lower machine casing 3 side, a table 10 has a vertical rotation axis 11
A rotary drive device 12 is provided that is rotatable around the table 10 and is interlocked with the table 10.

That is, an opening 5 is formed in the central portion of the upper plate of the lower machine frame 3, and the reduction gear is passed through this opening 5.
13 is arranged, and the reduction gear 13 is mounted and fixed on the upper plate via a flange portion 14. Then, the rotary shaft 15 is taken out upward from the speed reducer 13, and the table 10 is fixed to the upper end of the rotary shaft 15. A motor 16 is arranged in the space 2 and has a drive shaft 17 and a passive shaft of the speed reducer 13.
18 and 18 are interlockingly connected via an endless transmission device 19. The rotation drive device 12 for the table 10 is constituted by the above 13 to 19.

A movable body 20 is provided on the upper end of the upper machine casing 4. That is, a pair of horizontal guide rails 21 are arranged on the upper surface of the upper machine frame 4 in the direction of approaching and separating from the rotating shaft center 11, and the movable body 20 is mounted on these guide rails 21 via a sliding body 22. It is configured to be supported and guided.

The movable body 20 has a polishing head composed of a polishing disk (grinding stone, polishing cloth, etc.) 38 and a rotary drive unit 40.
A position adjusting device 50 for moving the polishing head 30 toward and away from the rotation axis 11 of the table 10 is provided. That is, a rectangular box-shaped head main body 31 is provided, the base of the head main body 31 is placed on the movable body 20, and the rotary shaft center 11 is guided by an appropriate guide mechanism (not shown). It is configured to move toward and away from each other.

At the free end of the head body 31, a cylindrical shaft 42 is disposed via a bearing 41 so as to be rotatable around a vertical axis 35,
A polishing disc 38 is attached to the lower end of a vertical axis 44, which is spline-fitted 43 on the cylindrical shaft 42, via a universal joint 45. A pair of side plates 32 are erected from the head body 31, and a support plate 33 is provided between the upper portions of the side plates 32. The downward cylinder device supported by the support plates 33 is provided.
34 operating rods are connected to the upper end of the vertical axis 44 via a rotary joint 49. Therefore, by moving the vertical axis 44 up and down by the operation of the cylinder device 34, the polishing disk 38 can be relatively moved toward and away from the table 10 from above.

A downward geared motor 46 is arranged at the base end of the head body 31, and its output shaft 47 and the cylinder shaft 42 are arranged.
The upper end of the gear is linked by an endless transmission device 48 in the form of a timing belt. The above-mentioned 41 to 48 constitute a rotary drive device 40 linked with the polishing disk 38.

The position adjusting device 50 includes a screw shaft 52 in the front-rear direction, which is rotatably attached to a bracket 51 from the movable member 20, and the movable member 20 so that the screw shaft 52 can be screwed.
And the nut body 53 attached to the screw shaft 52.
A rectangular rod-shaped operated portion 54 is formed at the outer end of the. Therefore, the movable body 20 can be moved through the nut body 53 by setting the operating tool on the operated portion 54 and rotating the screw shaft 52 in the forward and reverse directions.

A reciprocating device 60 for reciprocating the movable body 20 is provided on the machine frame 1 so that the reciprocating pitch thereof can be adjusted. That is, an upward geared motor 61 is disposed on one side of the upper machine casing 4, and a disc 63 is attached to the output shaft 62 thereof. A plurality of connecting holes 64 having different distances from the output shaft 62 are formed in the disc body 63, and one end of the crank rod 65 is connected via a vertical pin 66 using one of the connecting holes 64. The other end of the crank rod 65 is connected to a bracket 67 from the movable body 20 via a vertical pin 68.

Here, the length between the vertical pins 66 and 68 can be adjusted by making the crank rod 65 a turnbuckle type or by changing the connecting position of the crank rod 65 to the vertical pin 66. Is configured. The geared motor 61 and the disc body 63 are covered with a cover 69. Further, the periphery and the lower part of the table 10 are also surrounded by a drainage duct 25 which also serves as a cover.

The operation of the above embodiment will be described below. When the vertical axis 44 is raised by the contracting movement of the cylinder device 34 and the polishing disk 38 is separated from the table 10 as shown in FIG. 1, a rectangular plate-shaped object (object to be polished) 70 is placed on the table 10. Set. In this state, the cylinder device 34 is extended and the polishing disk 38 side is lowered via the vertical axis 44, whereby the polishing disk 38 can be lightly contacted with the upper surface of the rectangular plate-shaped object 70. Before such contact, the motors 16, 46, 61 are operated to rotate or move the respective parts to perform desired polishing.

That is, the motor 16 in the rotary drive device 12
Rotation of the rotary shaft 15 via the endless transmission 19 and the speed reducer 13.
The table 10, which is transmitted to and fixed to this rotating shaft 15,
That is, the rectangular plate 70 is rotated at low speed around the rotation axis 11.
Let Further, the rotation of the geared motor 46 in the rotary drive device 40 on the polishing disk 38 side is controlled by the endless transmission device 48 from the cylindrical shaft.
42, the spline fitting 43, the vertical axis 44, and the universal joint 45 are transmitted to the polishing disk 38, and the polishing disk 38 is rotated at a high speed B about the vertical axis 35 in the same direction as the lower side.

The rotation of the geared motor 61 of the reciprocating device 60 causes the vertical pin 66 in the eccentric position to rotate via the disc body 63, whereby the crank rod 65 is pushed and pulled while swinging. As a result, a movable body connected to the crank rod 65 through the vertical pin 68 and the bracket 67.
20 is supported and guided by the guide rail 21 and is reciprocated, whereby the polishing head 30 supported by the movable body 20 is reciprocated at high speed.
Let

The upper surface of the rectangular plate-like object 70 is polished based on the operation of each part as described above. That is, a rectangular plate 70
In addition, the polishing disk 38 is forcibly rotated in the same direction at a low speed A and at a high speed B, and the polishing head 30 having the polishing disk 38 is reciprocated laterally C to rotate the rotation axis of the polishing disk 38. The position of the vertical axis 35, which is the heart, is displaced.

Therefore, in this state, by applying a load by the extension of the cylinder device 34, the forced rotation A and B between the rectangular plate 70 and the polishing disk 38 and the polishing disk
By the combined movement of the reciprocating motion C of 38, the polishing disk 38 can be brought into contact with the upper surface of the rectangular plate-like object 70 uniformly over the entire upper surface, and thus polishing can be performed without causing polishing residue. The polishing is performed while supplying (spraying) water, oil, or a polishing liquid, at which time water or the like is collected through the drainage duct 25,
The cover 69 can prevent the particles from scattering and adhering to the reciprocating device 60.

For example, when the object to be polished is a rectangular plate 71 as shown in FIG. 3, the adjustment is performed according to the shape (length). That is, the operation tool is set on the operated portion 54 of the position adjusting device 50, the screw shaft 52 is rotated in the forward and reverse directions, and the nut body 53 is rotated.
The movable body 20 is moved forward or backward via the. As a result, the vertical axis 35 of the polishing disk 38 can be moved toward or away from the rotational axis 11 of the table 10, and the polishing position of the polishing disk 38 can be adjusted accordingly.

Further, in the reciprocating device 60, the connection by the vertical pin 66 is disconnected, and one end of the crank rod 65 is connected through the vertical pin 66 by using the target connecting hole 64. Further, the length between the vertical pins 66 and 68 is adjusted by a turnbuckle operation or a change in the connecting position of the crank rod 65 to the vertical pin 66. By these operations,
The movable body 20, that is, the range (length) of the reciprocating motion of the polishing disk 38, and the position where the reciprocating motion C is performed can be adjusted.

By such adjustment, the polishing disk 38 is
A rectangular plate-shaped object is forcibly rotated at the displaced polishing position and within the range of different reciprocating motion, and further at the displaced reciprocating position.
The contact of 71 with the upper surface can be performed uniformly over the entire upper surface, and therefore polishing can be performed without causing polishing residue. At that time, the reciprocating movement C of the polishing disk 38 is performed on the long side and the short side of the rectangular plate 71.
Are configured to be synchronized. Accordingly, it is possible to prevent the polishing disk 38 from being too close to the outer side of the rectangular plate-like object 71 on the short side and impairing the flatness of the rectangular plate-like object 71.

The position adjusting device 50 and the reciprocating device 60 need not be adjusted at the same time, and only one of them may be adjusted depending on the shape and size of the object to be polished. In the polishing work as described above, the rotation speed of each motor 16, 46, 61 side, that is, the number of rotations of the table 10, the polishing disk 38, etc., can be arbitrarily adjusted by, for example, operating the operation panel. It is possible to obtain a sliding speed that is as uniform as possible with respect to the object.

In the above embodiment, the movable body by the reciprocating device 60
Although the reciprocating motion C of 20 is performed linearly, the reciprocating motion C may be performed in a swinging manner. In addition to the rectangular plate-like object 70 and the rectangular plate-like object 71, various shapes such as a round shape can be handled.

In the above-mentioned embodiment, the polishing disc and the table can be relatively moved closer to and away from each other by raising and lowering the polishing disc, but this may be a type of raising and lowering the table.

[0029]

According to the present invention having the above structure, the polishing disk is polished with respect to the polishing surface of the object to be polished by the combined movement of the forced rotation of the object to be polished and the polishing disk and the reciprocating motion of the polishing disk. Can be uniformly performed over the entire area, and thus a polishing surface with no polishing residue and no directionality can be obtained. Moreover, it is possible to easily adjust the polishing position by the polishing disk and the range of the reciprocating motion of the polishing disk and the position of the reciprocating motion according to the shape of the object to be polished.

[Brief description of drawings]

FIG. 1 is a partially cutaway side view of a polishing apparatus according to an embodiment of the present invention.

FIG. 2 is a partially cutaway plan view of the polishing apparatus.

FIG. 3 is a schematic plan view showing another polishing state of the polishing apparatus.

FIG. 4 is a schematic perspective view of a main part of a polishing apparatus showing a conventional example.

[Explanation of symbols]

 1 machine frame 10 table 11 rotary shaft center 12 rotary drive device 15 rotary shaft 16 motor 20 movable body 30 polishing head 31 head body 34 cylinder device 35 vertical axis 38 polishing disk 40 rotary drive device 44 vertical axis 45 universal joint 46 geared motor 50 Position adjusting device 52 Screw shaft 53 Nut body 60 Reciprocating device 61 Geared motor 63 Disc body 64 Connection hole 65 Crank rod 70 Rectangular plate-shaped object (object to be polished) 71 Rectangular plate-shaped object (object to be polished) A Low speed rotation B High-speed rotation C Reciprocating motion

Claims (1)

[Claims] 1. A machine frame, a polishing disk and a table which are vertically opposed to each other in the machine frame, and which can be relatively moved toward and away from each other, and respective rotary drive devices which interlock with the polishing disk and the table. A movable body equipped with a polishing head composed of the polishing disk and a rotary drive device is provided, and a reciprocating device for reciprocating the movable body is provided in the machine frame, and the reciprocating pitch thereof is adjustable. A polishing apparatus, wherein the movable body is provided with a position adjusting device for moving the polishing head toward and away from the rotation axis of the table.