JPH07274540A - Layered type electrostatic motor and manufacture of electrode for layered type electrostatic motor - Google Patents
Layered type electrostatic motor and manufacture of electrode for layered type electrostatic motorInfo
- Publication number
- JPH07274540A JPH07274540A JP6057638A JP5763894A JPH07274540A JP H07274540 A JPH07274540 A JP H07274540A JP 6057638 A JP6057638 A JP 6057638A JP 5763894 A JP5763894 A JP 5763894A JP H07274540 A JPH07274540 A JP H07274540A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- phase
- constant pitch
- comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、静電気力を駆動源とす
る３相交流で駆動される積層型静電モータ及びその電極
の製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated electrostatic motor driven by a three-phase alternating current using an electrostatic force as a driving source, and a method for manufacturing its electrodes.
【０００２】[0002]
【従来の技術】従来の電気型アクチュエータは、主とし
て電磁力を駆動力源とするものであった。しかし、それ
らのアクチュエータは永久磁石や電磁コイルの重量が大
きいために、アクチュエータの最も重要な性能指標であ
るパワー密度は小さく、また大きな電流を必要とするた
めに、発熱量が大きかった。2. Description of the Related Art Conventional electric actuators mainly use electromagnetic force as a driving force source. However, since the weight of permanent magnets and electromagnetic coils of these actuators is large, the power density, which is the most important performance index of the actuator, is small, and a large amount of electric current is required, so that the amount of heat generated is large.
【０００３】この問題を解決するために、様々な静電ア
クチュエータが提案されてきた。しかしながら、従来の
静電アクチュエータは、 （ａ）固定子と移動子を有し、その間に吸引力を発生す
るため、摩擦力を軽減するための機構を用いなくては実
際上運転が困難である。 （ｂ）固定子と移動子の間の最適な間隔を保持するため
の機構が必要である。等の問題点があり、アクチュエー
タの重量が大きくなり、軽量にして大きな力を発生する
ことが可能であるという、静電アクチュエータの利点を
生かすことができていない。Various electrostatic actuators have been proposed to solve this problem. However, the conventional electrostatic actuator has (a) a stator and a mover, and an attraction force is generated between them, so that it is practically difficult to operate without using a mechanism for reducing the frictional force. . (B) A mechanism is required to maintain the optimum gap between the stator and the mover. However, the advantage of the electrostatic actuator that the weight of the actuator becomes large, the weight can be reduced and a large force can be generated cannot be utilized.
【０００４】このため、既に、特開平２−２８５９７８
号公報として、「フィルムを利用した静電アクチュエー
タ」が提案されている。更に、この種の静電アクチュエ
ータにおいて、３相交流で駆動される静電アクチュエー
タが特願平４−２２５５５１号として出願されている。
すなわち、図１３に示すように、固定子１には１２０°
位相がずれるように、電極２，３，４が形成され、可動
子５にも１２０°位相がずれるように、電極６，７，８
が形成され、それらの電極に３相交流電源９から、３相
交流が供給されるようになっている。なお、１０は固定
子１に生じる進行波、１１は可動子５に生じる進行波、
１２は可動子５に作用する駆動力である。For this reason, Japanese Patent Laid-Open No. 2-285978 has already been used.
As the publication, "an electrostatic actuator using a film" has been proposed. Further, in this type of electrostatic actuator, an electrostatic actuator driven by a three-phase alternating current has been filed as Japanese Patent Application No. 4-225551.
That is, as shown in FIG.
The electrodes 2, 3 and 4 are formed so as to be out of phase, and the electrodes 6, 7, and 8 are also made to be out of phase with the mover 5 by 120 °.
Are formed, and the three-phase alternating current power supply 9 supplies three-phase alternating current to the electrodes. In addition, 10 is a traveling wave generated in the stator 1, 11 is a traveling wave generated in the mover 5,
Reference numeral 12 is a driving force acting on the mover 5.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記し
た３相交流で駆動される静電アクチュエータにおいて、
その駆動のための電極を配置する場合は、図１４に示す
ように、例えば、固定子２０においては、３相交流が印
加される３個の電極２３，２５，２７が組になった配置
となり、それを形成する場合には、固定子２０の裏面に
形成される共通配線２１から、スルーホール２２を介し
て、上方へ延び直交する方向に分岐したＵ相の電極２３
を形成する。However, in the electrostatic actuator driven by the above-mentioned three-phase alternating current,
When the electrodes for driving the electrodes are arranged, as shown in FIG. 14, for example, in the stator 20, the three electrodes 23, 25, 27 to which a three-phase alternating current is applied are arranged as a set. When forming it, the U-phase electrode 23 extending upward from the common wiring 21 formed on the back surface of the stator 20 through the through hole 22 and branched in the orthogonal direction.
To form.
【０００６】次に、Ｖ相の電極２５は、同一平面上の共
通配線２４から直交する方向に分岐し、Ｕ相の電極２３
と平行になるように形成する。更に、Ｗ相の電極２７
は、同一平面上の共通配線２６から直交する方向に分岐
し、Ｖ相の電極２５と平行になるように形成される。こ
のように、配線するために、Ｖ相の電極２５とＷ相の電
極２７だけであれば、同一平面に配線することができ、
電極の形成が極めて容易であるが、前記したように、Ｕ
相の電極２３を形成する必要があるために、裏面に共通
配線２１を形成し、スルーホール２２を介して、上方へ
延び直交する方向に分岐させる必要があり、その製造工
程数が増加するとともに、固定子２０を形成するための
基板の厚さが増加する。Next, the V-phase electrode 25 branches from the common wiring 24 on the same plane in a direction orthogonal to each other, and the U-phase electrode 23.
It is formed so that it is parallel to. Furthermore, the W-phase electrode 27
Are formed so as to branch from the common wiring 26 on the same plane in a direction orthogonal to each other and to be parallel to the V-phase electrode 25. Thus, for wiring, only the V-phase electrode 25 and the W-phase electrode 27 can be wired on the same plane,
The formation of electrodes is extremely easy, but as mentioned above, U
Since it is necessary to form the phase electrodes 23, it is necessary to form the common wiring 21 on the back surface and to branch upward in the orthogonal direction through the through holes 22, which increases the number of manufacturing steps. , The thickness of the substrate for forming the stator 20 increases.
【０００７】このようにして製造されたものは、特に、
上記の３相電極を多層に積み重ねる積層型の３相駆動静
電モータにおいて、寸法が増大することになり、好まし
いものではなかった。すなわち、その電極構造は、図１
５に示すように、固定子３０の場合、ポリイミドフィル
ム３１上にエッチングにより電極５１〜５３…を有する
配線を行い、その上に絶縁性接着剤３２を形成した後、
その表面をカバーフィルムとしてのポリイミドフィルム
３３で覆うようになっている。The products manufactured in this way are
In the laminated type three-phase drive electrostatic motor in which the above-mentioned three-phase electrodes are stacked in multiple layers, the dimensions increase, which is not preferable. That is, the electrode structure is as shown in FIG.
As shown in FIG. 5, in the case of the stator 30, wiring having the electrodes 51 to 53 is formed on the polyimide film 31 by etching, and after forming the insulating adhesive 32 on the wiring,
The surface is covered with a polyimide film 33 as a cover film.
【０００８】このように構成された電極を有するフィル
ム下層体に更に、この電極を有するフィルム積層体３４
に、電気的接続を行うための配線（図示なし）が施され
たポリイミドフィルム４１上に配線を行い、その上に絶
縁性接着剤４２を形成した後、その表面をカバーフィル
ムとしてのポリイミドフィルム４３で覆うようにしたフ
ィルム積層体４４が、絶縁性接着剤５０により貼り合わ
せられた構造となっている。In addition to the film underlayer having the electrode thus constructed, the film laminate 34 having the electrode is further provided.
In addition, wiring is performed on a polyimide film 41 on which wiring (not shown) for electrical connection is formed, an insulating adhesive 42 is formed on the polyimide film 41, and then the surface of the polyimide film 43 is used as a cover film. The film laminate 44, which is covered with, is laminated with the insulating adhesive 50.
【０００９】このように構成された電極の配線は、図１
６に示すように、ポリイミドフィルム３１上の上側縁に
沿ってＵ相配線５４が形成され、そのＵ相配線５４より
直角に下方に延びるＵ相電極５１が形成されている。ま
た、ポリイミドフィルム３１上の下側縁に沿ってＶ相配
線５５が形成され、そのＶ相配線５５より直角に上方に
延びるＶ相電極５２が形成されている。また、ポリイミ
ドフィルム３１上に形成される第１のＷ相配線６１よ
り、スルーホール６２を介して直角に下方に延びるＷ相
電極５３が形成されている。The wiring of the electrode thus constructed is shown in FIG.
As shown in FIG. 6, a U-phase wiring 54 is formed along the upper edge of the polyimide film 31, and a U-phase electrode 51 extending downward at a right angle from the U-phase wiring 54 is formed. Further, a V-phase wiring 55 is formed along the lower edge of the polyimide film 31, and a V-phase electrode 52 extending upward at a right angle from the V-phase wiring 55 is formed. Further, a W-phase electrode 53 extending downward from the first W-phase wiring 61 formed on the polyimide film 31 at a right angle via a through hole 62 is formed.
【００１０】同様に、ポリイミドフィルム３１上に形成
される第２のＷ相配線６３より、スルーホール６４を介
して直角に上方に延びる、次のＷ相電極５３が形成され
ている。これと同様に、可動子７０も構成されている。
したがって、従来の固定子３０及び可動子７０は、２層
のフィルム積層体３４，４４の構造にせざるをえなかっ
た。Similarly, a second W-phase electrode 53 extending vertically upward from the second W-phase wiring 63 formed on the polyimide film 31 through the through hole 64 is formed. Similarly, the mover 70 is also configured.
Therefore, the conventional stator 30 and mover 70 had to have the structure of the two-layer film laminated bodies 34 and 44.
【００１１】このように、電極が構成されていないフィ
ルム積層体４４は、有効に利用されておらず、無駄なス
ペースとなり、積層型の３相駆動静電モータにおいて
は、その積層数が増加するにともない、無駄なスペース
が増加して、そのデメリットが顕著となる。すなわち、
固定子及び可動子ともに、フィルムが厚くなり、電極の
積層密度が低減され、一般的に力密度の低下を招く。As described above, the film laminated body 44 having no electrodes is not effectively utilized, resulting in a wasted space, and the number of laminated layers is increased in the laminated type three-phase drive electrostatic motor. As a result, the wasted space increases, and the disadvantages become noticeable. That is,
In both the stator and the mover, the film becomes thick, the stacking density of the electrodes is reduced, and the force density is generally lowered.
【００１２】また、固定子３０の電極と可動子７０の電
極が対向するキャップＧ1 では、静電力が強く作用する
が、固定子３０の電極５１〜５３の背面側と、可動子７
０の背面側とのキャップＧ2 では、静電力は弱く作用す
ることになり、不平衡な静電力となり、固定子３０及び
可動子７０の各層に作用する応力にも、バラツキが生じ
るとともに、総合的な力密度の低下を招くといった問題
があった。In the cap G 1 where the electrode of the stator 30 and the electrode of the mover 70 face each other , the electrostatic force acts strongly, but the back side of the electrodes 51 to 53 of the stator 30 and the mover 7 are moved.
In the cap G 2 with the back side of 0, the electrostatic force acts weakly and becomes an unbalanced electrostatic force, and the stress acting on each layer of the stator 30 and the mover 70 also varies, and However, there is a problem in that the power density is lowered.
【００１３】本発明は、このような問題点を解決するた
めに、固定子及び可動子の両面に作用する応力を均一に
するとともに、電極の積層密度を高め、力密度の向上を
図り得る積層型静電モータ及びその電極の製造方法を提
供することを目的とする。In order to solve such a problem, the present invention makes the stress acting on both surfaces of the stator and the mover uniform, increases the lamination density of the electrodes, and improves the power density. An electrostatic motor and a method for manufacturing the electrode thereof are provided.
【００１４】[0014]
【課題を解決するための手段】本発明は、上記目的を達
成するために、 （Ａ）絶縁体内に電極が形成される固定子とそれらの固
定子間に配置され、絶縁体内に電極が形成される可動子
が多段に配置され、３相交流が印加されるスライド型の
静電モータにおいて、（ａ）共通配線から直角方向に延
び一定のピッチで形成される櫛歯状の第１の電極と、前
記共通配線と対向する側の共通配線から直角方向に延び
前記第１の電極と所定間隔を有し平行に形成される同じ
く一定のピッチで形成される櫛歯状の第２の電極と、裏
面から接続部を介して前記第２の電極と所定間隔を有し
平行に形成される同じく一定のピッチで形成される櫛歯
状の第３の電極とを有し、これらの電極が両面に形成さ
れる固定子と、（ｂ）共通配線から直角方向に延び一定
のピッチで形成される櫛歯状の第１の電極と、前記共通
配線と対向する側の共通配線から直角方向に延び前記第
１の電極と所定間隔を有し平行に形成される同じく一定
のピッチで形成される櫛歯状の第２の電極と、裏面から
接続部を介して前記第２の電極と所定間隔を有し平行に
形成される同じく一定のピッチで形成される櫛歯状の第
３の電極とを有し、前記第１の電極、第２の電極及び第
３の電極が両面に形成される可動子とを設けるようにし
たものである。In order to achieve the above-mentioned object, the present invention provides (A) a stator having electrodes formed in an insulator and a stator disposed between the stators to form electrodes in the insulator. In a slide type electrostatic motor in which movable elements are arranged in multiple stages and a three-phase alternating current is applied, (a) comb-shaped first electrodes extending in a direction perpendicular to a common wire and formed at a constant pitch. And a comb-teeth-shaped second electrode that is formed in parallel with the first electrode and extends in a direction perpendicular to the common wiring on the side facing the common wiring and that is also formed at a constant pitch. , A comb-teeth-shaped third electrode which is formed in parallel with the second electrode from the back surface through a connecting portion and has a predetermined distance, and these electrodes are formed on both sides. And (b) a common wire extending perpendicularly from the stator Pitch-shaped first electrodes formed at a pitch, and extending in a direction perpendicular to the common wiring on the side opposite to the common wiring, and having a predetermined interval and formed in parallel with each other at a constant pitch. And the comb-teeth-shaped second electrode formed in parallel with the second electrode from the back surface via the connecting portion with the second electrode at a predetermined interval. And a mover having the first electrode, the second electrode and the third electrode formed on both surfaces thereof.
【００１５】（Ｂ）絶縁体内に電極が形成される固定子
とそれらの固定子間に配置され、絶縁体内に電極が形成
される可動子が多段に配置され、３相交流が印加される
回転型の静電モータにおいて、（ａ）外周部に形成され
る共通配線から径方向へ延びる一定のピッチで形成され
る放射状の第１の電極と、内周部に形成される共通配線
から径方向へ延びて前記第１の電極と組み合わされ、同
じく一定のピッチで形成される放射状の第２の電極と、
裏面から接続部を介して前記第２の電極と所定間隔を有
し平行に形成される同じく一定のピッチで形成される櫛
歯状の第３の電極とを有し、これらの電極が両面に形成
される固定子と、（ｂ）外周部に形成される共通配線か
ら径方向へ延びる一定のピッチで形成される放射状の第
１の電極と、内周部に形成される共通配線から径方向へ
延びて前記第１の電極と組み合わされ、同じく一定のピ
ッチで形成される放射状の第２の電極と、裏面から接続
部を介して前記第２の電極と所定間隔を有し平行に形成
される同じく一定のピッチで形成される櫛歯状の第３の
電極とを有し、前記第１の電極、第２の電極及び第３の
電極が両面に形成される回転子とを設けるようにしたも
のである。(B) A stator in which electrodes are formed in an insulator and a mover in which electrodes are formed in the insulator are arranged in multiple stages, and rotation in which three-phase alternating current is applied (A) Radial first electrodes formed at a constant pitch and extending in a radial direction from a common wire formed in an outer peripheral portion and a common wire formed in an inner peripheral portion in a radial direction A radial second electrode that extends in the direction of and is combined with the first electrode and is also formed at a constant pitch.
It has a comb-teeth-shaped third electrode which is formed in parallel with the second electrode at a predetermined distance from the back surface via a connecting portion, and these electrodes are formed on both surfaces. The stator formed, (b) radial first electrodes formed at a constant pitch extending from the common wiring formed on the outer peripheral portion in the radial direction, and the radial direction extending from the common wiring formed on the inner peripheral portion Is formed in parallel with the second electrode extending from the rear surface through a connecting portion and a radial second electrode that is also formed at a constant pitch in combination with the first electrode. And a rotor having a comb-teeth-shaped third electrode that is also formed at a constant pitch, and the first electrode, the second electrode, and the third electrode are formed on both surfaces. It was done.
【００１６】（Ｃ）絶縁体内に電極が形成される固定子
とそれらの固定子間に配置され、絶縁体内に電極が形成
される可動子が多段に配置され、３相交流が印加される
積層型多相駆動静電モータの電極の製造方法において、
（ａ）第１の導電膜のベタパターン上に絶縁膜を形成す
る工程と、（ｂ）該絶縁膜の所定の部位に穴を形成する
工程と、（ｃ）該穴を埋めるバンプを形成する工程と、
（ｄ）該バンプにより接続される第２の導電膜のベタパ
ターンを接着材により接着する工程と、（ｅ）前記第１
及び第２の導電膜のベタパターンをエッチングし、Ｕ相
電極と、Ｖ相電極と、Ｗ相電極を所定ピッチでそれぞれ
形成する工程と、（ｆ）その両面上に絶縁性の樹脂を形
成し絶縁層を形成する工程とを施すようにしたものであ
る。(C) A laminated structure in which a stator having electrodes formed in an insulator and a mover arranged between the stators and having electrodes formed in the insulator are arranged in multiple stages, and a three-phase alternating current is applied. In a method of manufacturing electrodes of a multi-phase drive electrostatic motor,
(A) a step of forming an insulating film on the solid pattern of the first conductive film, (b) a step of forming a hole in a predetermined portion of the insulating film, and (c) a bump filling the hole. Process,
(D) a step of adhering a solid pattern of a second conductive film connected by the bumps with an adhesive, and (e) the first
And a step of etching the solid pattern of the second conductive film to form the U-phase electrode, the V-phase electrode, and the W-phase electrode respectively at a predetermined pitch, and (f) forming an insulating resin on both surfaces thereof. And a step of forming an insulating layer.
【００１７】（Ｄ）絶縁体内に電極が形成される固定子
とそれらの固定子間に配置され、絶縁体内に電極が形成
される可動子が多段に配置され、４相交流が印加される
スライド型の積層型静電モータにおいて、（ａ）共通配
線から直角方向に延び一定のピッチで形成される櫛歯状
の第１の電極と、前記共通配線と対向する側の共通配線
から直角方向に延び前記第１の電極と所定間隔を有し平
行に形成される同じく一定のピッチで形成される櫛歯状
の第２の電極と、裏面から接続部を介して前記第２の電
極と所定間隔を有し平行に形成される同じく一定のピッ
チで形成される櫛歯状の第３の電極と、裏面から接続部
を介して前記第３の電極と所定間隔を有し平行に形成さ
れる同じく一定のピッチで形成される櫛歯状の第４の電
極とを有し、前記第１の電極、第２の電極、第３の電極
及び第４の電極が両面に形成される固定子と、（ｂ）共
通配線から直角方向に延び一定のピッチで形成される櫛
歯状の第１の電極と、前記共通配線と対向する側の共通
配線から直角方向に延び前記第１の電極と所定間隔を有
し平行に形成される同じく一定のピッチで形成される櫛
歯状の第２の電極と、裏面から接続部を介して前記第２
の電極と所定間隔を有し平行に形成される同じく一定の
ピッチで形成される櫛歯状の第３の電極と、裏面から接
続部を介して前記第３の電極と所定間隔を有し平行に形
成される同じく一定のピッチで形成される櫛歯状の第４
の電極とを有し、前記第１の電極、第２の電極、第３の
電極及び第４の電極が両面に形成される可動子とを設け
るようにしたものである。(D) A slider in which electrodes are formed in the insulator and a mover in which electrodes are formed in the insulator are arranged in multiple stages, and a slide to which a four-phase alternating current is applied. (A) a comb-teeth-shaped first electrode extending in a right angle direction from a common wire and formed at a constant pitch, and a common wire on a side facing the common wire in a right angle direction. A second comb-like electrode that is extended in parallel with the first electrode and is formed in parallel with the first electrode, and is also formed at a predetermined distance from the back surface via a connecting portion. And a third comb-like electrode formed in parallel at a constant pitch, and the third electrode formed in parallel with the third electrode from the back surface via the connecting portion. A comb-teeth-shaped fourth electrode formed at a constant pitch, The first electrode, the second electrode, the third electrode, and the fourth electrode are formed on both sides of the stator, and (b) the comb-teeth-shaped first electrode extending in a right angle direction from the common wiring at a constant pitch. A first electrode and a second comb-shaped second electrode extending in a direction perpendicular to the common wiring on the side facing the common wiring and formed in parallel with the first electrode at a predetermined interval and formed at a constant pitch. The second electrode through the connection part from the back surface
And a third comb-shaped electrode that is also formed in parallel with a predetermined interval and is also formed at a constant pitch, and has a predetermined interval and is parallel to the third electrode from the back surface through a connecting portion. Comb-tooth-shaped fourth, which is also formed at a constant pitch
And a mover having the first electrode, the second electrode, the third electrode, and the fourth electrode formed on both surfaces thereof.
【００１８】（Ｅ）絶縁体内に電極が形成される固定子
とそれらの固定子間に配置され、絶縁体内に電極が形成
される可動子が多段に配置され、４相交流が印加される
回転型の積層型静電モータにおいて、（ａ）外周部に形
成される共通配線から径方向へ延びる一定のピッチで形
成される放射状の第１の電極と、内周部に形成される共
通配線から径方向へ延びて前記第１の電極と組み合わさ
れ、同じく一定のピッチで形成される放射状の第２の電
極と、裏面から接続部を介して前記第２の電極と所定間
隔を有し平行に形成される同じく一定のピッチで形成さ
れる櫛歯状の第３の電極と、裏面から接続部を介して前
記第３の電極と所定間隔を有し平行に形成される同じく
一定のピッチで形成される櫛歯状の第４の電極とを有
し、前記第１の電極、第２の電極、第３の電極及び第４
の電極が両面に形成される固定子と、外周部に形成され
る共通配線から径方向へ延びる一定のピッチで形成され
る放射状の第１の電極と、内周部に形成される共通配線
から径方向へ延びて前記第１の電極と組み合わされ、同
じく一定のピッチで形成される放射状の第２の電極と、
裏面から接続部を介して前記第２の電極と所定間隔を有
し平行に形成される同じく一定のピッチで形成される櫛
歯状の第３の電極と、裏面から接続部を介して前記第３
の電極と所定間隔を有し平行に形成される同じく一定の
ピッチで形成される櫛歯状の第４の電極とを有し、前記
第１の電極、第２の電極、第３の電極及び第４の電極が
両面に形成される回転子とを設けるようにしたものであ
る。(E) A stator in which electrodes are formed in the insulator and a mover in which electrodes are formed between the stators are arranged in multiple stages, and rotation in which four-phase alternating current is applied (A) radial first electrodes formed at a constant pitch extending radially from the common wiring formed on the outer peripheral portion and the common wiring formed on the inner peripheral portion A radial second electrode that extends in the radial direction and is combined with the first electrode and is also formed with a constant pitch, and a second electrode that is parallel to the second electrode through a connecting portion from the back surface. A third comb-teeth-shaped electrode which is also formed at a constant pitch, and a third electrode which is formed in parallel with the third electrode from the back surface through a connecting portion at a predetermined interval and also at a constant pitch. A comb-teeth-shaped fourth electrode, and the first electrode A second electrode, the third electrode and the fourth
The electrodes are formed on both surfaces, the radial first electrodes are formed at a constant pitch and extend radially from the common wiring formed on the outer peripheral portion, and the common wiring formed on the inner peripheral portion. Radial second electrodes that extend in the radial direction and are combined with the first electrodes and are also formed at a constant pitch;
A comb-teeth-shaped third electrode, which is formed in parallel with the second electrode at a predetermined interval from the back surface and has a predetermined distance, and a comb-teeth-shaped electrode formed from the back surface through the connection portion. Three
And a fourth comb-like electrode that is also formed in parallel with a predetermined interval and is also formed at a constant pitch. The first electrode, the second electrode, the third electrode, and The fourth electrode is provided with a rotor formed on both surfaces.
【００１９】（Ｆ）絶縁体内に電極が形成される固定子
とそれらの固定子間に配置され、絶縁体内に電極が形成
される可動子が多段に配置され、４相交流が印加される
積層型静電モータの電極の製造方法において、第１の導
電膜のベタパターン上に絶縁膜を形成する工程と、該絶
縁膜の所定の部位に穴を形成する工程と、該穴を埋める
バンプを形成する工程と、該バンプにより接続される第
２の導電膜のベタパターンを接着材により接着する工程
と、前記第１及び第２の導電膜のベタパターンをエッチ
ングし、Ａ相電極と、Ｂ相電極と、Ｃ相電極と、Ｄ相電
極を所定ピッチでそれぞれ形成する工程と、その両面上
に絶縁性の樹脂を形成し絶縁層を形成する工程とを施す
ようにしたものである。(F) A laminated structure in which a stator having electrodes formed in an insulator and a mover having electrodes formed in the insulator are arranged in multiple stages and a four-phase alternating current is applied. In a method of manufacturing an electrode of a vacuum electrostatic motor, a step of forming an insulating film on a solid pattern of a first conductive film, a step of forming a hole in a predetermined portion of the insulating film, and a bump filling the hole. A step of forming, a step of adhering a solid pattern of the second conductive film connected by the bumps with an adhesive, a step of etching the solid patterns of the first and second conductive films, an A-phase electrode, and B The step of forming the phase electrode, the C-phase electrode, and the D-phase electrode at a predetermined pitch, and the step of forming an insulating resin on both surfaces thereof to form an insulating layer are performed.
【００２０】[0020]
【作用】本発明によれば、上記したように、固定子とそ
れらの固定子間に配置される可動子が多段に配置され、
３相交流が印加される静電モータにおいて、両面に３相
電極が形成される電極構造としたので、固定子及び可動
子の両面に作用する応力を均一にするとともに、電極の
積層密度を高め、力密度の向上を図ることができる。According to the present invention, as described above, the stators and the movers arranged between the stators are arranged in multiple stages,
In an electrostatic motor to which a three-phase alternating current is applied, the electrode structure is such that three-phase electrodes are formed on both sides, so that the stress acting on both sides of the stator and mover is made uniform and the stacking density of the electrodes is increased. Therefore, the power density can be improved.
【００２１】同様に、両面に４相電極が形成される電極
構造とすることもできる。したがって、３相電極又は４
相電極が形成される絶縁体を薄型にすることができ、全
体的に軽量にして、コンパクトな静電モータを得ること
ができる。Similarly, an electrode structure in which four-phase electrodes are formed on both surfaces can be used. Therefore, three-phase electrodes or four
The insulator on which the phase electrodes are formed can be made thin, and the overall weight can be reduced to obtain a compact electrostatic motor.
【００２２】[0022]
【実施例】以下、本発明の実施例を図を参照しながら詳
細に説明する。図１は本発明の第１の実施例を示すスラ
イド型の積層型３相駆動静電モータの要部断面図、図２
はその静電モータの全体斜視図である。図２に示すよう
に、スライド型の積層型３相駆動静電モータは、固定子
１００を備え、この固定子１００は、複数段に配置さ
れ、連結体１９１により一体化される。固定子１００に
は後述する３相電極が形成され、３相交流電源（図示な
し）により、３相交流電圧が印加される。例えば、連結
体１９１の後面に容器１９２を設け、その容器１９２に
３相交流電源が内蔵される。Embodiments of the present invention will now be described in detail with reference to the drawings. 1 is a cross-sectional view of a main part of a slide type stacked type three-phase drive electrostatic motor showing a first embodiment of the present invention.
FIG. 3 is an overall perspective view of the electrostatic motor. As shown in FIG. 2, the slide type stacked type three-phase drive electrostatic motor includes a stator 100. The stator 100 is arranged in a plurality of stages and integrated by a connecting body 191. A three-phase electrode described later is formed on the stator 100, and a three-phase AC voltage is applied by a three-phase AC power supply (not shown). For example, a container 192 is provided on the rear surface of the connection body 191, and a three-phase AC power supply is built in the container 192.
【００２３】一方、２００は可動子であり、複数段に配
置され、連結体２９１により一体化される。可動子２０
０には３相電極が形成され、３相交流電源（図示なし）
より、３相交流電圧が印加される。例えば、連結体２９
１の後面に容器２９２を設けて、この容器２９２内に３
相交流電源を内蔵させるようにしてもよい。図１に示す
ように、固定子１００，１１０は、Ｕ相電極１０３，Ｖ
相電極１０４，Ｗ相電極１０５を所定ピッチで形成され
た下層１０２と、Ｕ相電極１０７，Ｖ相電極１０８，Ｗ
相電極１０９を所定ピッチで形成された上層１０６を有
する積層体１０１，１１１から構成されている。On the other hand, reference numeral 200 denotes a mover, which is arranged in a plurality of stages and is integrated by a connecting body 291. Mover 20
A 3-phase electrode is formed at 0, and a 3-phase AC power supply (not shown)
Therefore, a three-phase AC voltage is applied. For example, the connecting body 29
1 is provided with a container 292 on the rear surface thereof, and 3
You may make it incorporate a phase alternating current power supply. As shown in FIG. 1, the stators 100 and 110 include U-phase electrodes 103 and V.
Lower layer 102 in which phase electrode 104 and W phase electrode 105 are formed at a predetermined pitch, U phase electrode 107, V phase electrode 108, W
The phase electrodes 109 are composed of laminated bodies 101 and 111 each having an upper layer 106 formed at a predetermined pitch.
【００２４】この固定子１００，１１０上には可動子２
００，２１０が対向する。この可動子２００，２１０
は、Ｕ相電極２０３，Ｖ相電極２０４，Ｗ相電極２０５
を所定ピッチで形成された下層２０２と、Ｕ相電極２０
７，Ｖ相電極２０８，Ｗ相電極２０９を所定ピッチで形
成された上層２０６を有する積層体２０１，２１１から
構成されている。A mover 2 is provided on the stators 100 and 110.
00 and 210 face each other. This mover 200, 210
Is a U-phase electrode 203, a V-phase electrode 204, a W-phase electrode 205
The lower layer 202 formed at a predetermined pitch and the U-phase electrode 20
7, a V-phase electrode 208, and a W-phase electrode 209 are composed of stacked bodies 201 and 211 each having an upper layer 206 formed at a predetermined pitch.
【００２５】このように、固定子１００，１１０及び可
動子２００，２１０には、両面に３相電極が形成されて
いる。次に、本発明の第１の実施例を示す積層型３相駆
動静電モータの電極の製造方法について説明する。図３
は本発明の積層型３相駆動静電モータの電極の製造工程
断面図、図４は積層型３相駆動静電モータの電極の平面
図である。As described above, the stators 100 and 110 and the movers 200 and 210 have three-phase electrodes formed on both surfaces. Next, a method for manufacturing the electrodes of the laminated type three-phase drive electrostatic motor showing the first embodiment of the present invention will be described. Figure 3
Is a cross-sectional view of the manufacturing process of the electrode of the laminated type three-phase drive electrostatic motor of the present invention, and FIG. 4 is a plan view of the electrode of the laminated type three-phase drive electrostatic motor.
【００２６】まず、図３（ａ）に示すように、第１の導
電膜のベタパターン３００上に、絶縁膜としてのポリイ
ミド膜３０１を形成する。次に、図３（ｂ）に示すよう
に、そのポリイミド膜３０１の所定の部位に、穴３０３
を形成し、この穴３０３を埋めるバンプ３０４を形成す
る。次に、図３（ｃ）に示すように、そのバンプ３０４
により接続されるように、ポリイミド膜３０１側にポリ
イミド３１２により、第２の導電膜のベタパターン３１
１を接着する。つまり、バンプ３０４は接続部を形成す
る。First, as shown in FIG. 3A, a polyimide film 301 as an insulating film is formed on the solid pattern 300 of the first conductive film. Next, as shown in FIG. 3B, a hole 303 is formed at a predetermined portion of the polyimide film 301.
And a bump 304 that fills the hole 303 is formed. Next, as shown in FIG.
The solid pattern 31 of the second conductive film is formed on the polyimide film 301 side by the polyimide 312 so as to be connected by
Glue 1 That is, the bump 304 forms a connection portion.
【００２７】次に、図３（ｄ）に示すように、両面に形
成された第１の導電膜のベタパターン３００及び第２の
導電膜のベタパターン３１１をエッチングにより、Ｕ相
電極３０５，３１５，３０８，３１８、Ｖ相電極３０
６，３１６、Ｗ相電極３０７，３１７を所定ピッチでそ
れぞれ形成する。最後に、図３（ｅ）に示すように、両
面上に絶縁性の樹脂を形成し、絶縁層３２１，３２２を
形成する。Next, as shown in FIG. 3D, the U-phase electrodes 305 and 315 are formed by etching the solid pattern 300 of the first conductive film and the solid pattern 311 of the second conductive film formed on both surfaces. , 308, 318, V-phase electrode 30
6, 316 and W-phase electrodes 307, 317 are formed at a predetermined pitch. Finally, as shown in FIG. 3E, insulating resin is formed on both surfaces to form insulating layers 321 and 322.
【００２８】次に、本発明の積層型３相駆動静電モータ
の電極の表面構成を見ると、第１層は、図４（ａ）に示
すように、絶縁体４０１上の一方の側縁に沿ったＵ相配
線４１２、絶縁体４０１上のもう一方の側縁に沿ったＶ
相配線４１３を形成する。そのＵ相配線４１２からは対
向する側に向かって直角方向に延びる櫛歯状のＵ相電極
４１４が、Ｖ相配線４１３からは対向する側に向かって
直角方向に延びる櫛歯状のＶ相電極４１５がそれぞれ延
びている。更に、Ｗ相電極４１６が裏面より接続部（バ
ンプ）４０６，４０７を介して接続される。Next, looking at the surface configuration of the electrodes of the laminated type three-phase drive electrostatic motor of the present invention, the first layer is, as shown in FIG. 4A, one side edge on the insulator 401. Phase wiring 412 along with, V along the other side edge on insulator 401
The phase wiring 413 is formed. A comb-teeth-shaped V-phase electrode 414 extending in a right angle direction from the U-phase wiring 412 toward the opposite side, and a comb-teeth-shaped V-phase electrode extending from the V-phase wiring 413 in a right angle direction toward the opposite side. 415 respectively extend. Further, the W-phase electrode 416 is connected from the back surface via the connection portions (bumps) 406 and 407.
【００２９】一方、第２層は、図４（ｂ）に示すよう
に、絶縁体４０１上の一方の側縁に沿ったＷ相配線４２
１、絶縁体４０１上のもう一方の側縁に沿ったＶ相配線
４２２を形成する。そのＷ相配線４２１からは対向する
側に向かって直角方向に延びる櫛歯状のＷ相電極４２５
が、Ｖ相配線４２２からは対向する側に向かって直角方
向に延びる櫛歯状のＶ相電極４２４がそれぞれ延びてい
る。更に、Ｕ相電極４２３が裏面より接続部（バンプ）
４０８，４０９を介して接続される。On the other hand, the second layer is, as shown in FIG. 4B, the W-phase wiring 42 along one side edge on the insulator 401.
1. Form the V-phase wiring 422 along the other side edge on the insulator 401. Comb-shaped W-phase electrode 425 extending in a right angle direction from the W-phase wiring 421 toward the opposite side.
However, from the V-phase wiring 422, comb-teeth-shaped V-phase electrodes 424 that extend in the direction perpendicular to the opposite sides extend. Further, the U-phase electrode 423 is connected from the back surface to the connection portion (bump).
It is connected via 408 and 409.
【００３０】次に、本発明の第２の実施例について図５
〜７を用いて説明する。図５は本発明の第２の実施例を
示す回転型の静電モータの一部破断斜視図、図６はその
固定子の平面図、図７は図６のＣ〜Ｄ線断面図である。
これらの図に示すように、この実施例の回転型の静電モ
ータは、軸５０８を有し、外周部に形成されるほぼ円周
状の共通配線５０３から、内部の径方向へ延びるＵ相電
極５０４と、内周部に形成されるリング状の共通配線５
０６から、外部の径方向へ延びるＶ相電極５０７と、裏
面から接続部５１１を介してＷ相電極５１２が形成され
る。なお、５０２はＶ相の共通配線５０３への接続配
線、５０５はＵ相の共通配線５０６への接続配線であ
る。Next, a second embodiment of the present invention will be described with reference to FIG.
The description will be made using ~ 7. FIG. 5 is a partially broken perspective view of a rotary electrostatic motor showing a second embodiment of the present invention, FIG. 6 is a plan view of a stator thereof, and FIG. 7 is a sectional view taken along line C-D of FIG. .
As shown in these figures, the rotary electrostatic motor of this embodiment has a shaft 508, and a U-phase extending in the inner radial direction from a substantially circular common wiring 503 formed on the outer peripheral portion. The electrode 504 and the ring-shaped common wiring 5 formed on the inner peripheral portion
From 06, a V-phase electrode 507 extending in the outer radial direction and a W-phase electrode 512 are formed from the back surface via a connecting portion 511. 502 is a connection wiring to the V-phase common wiring 503, and 505 is a connection wiring to the U-phase common wiring 506.
【００３１】そして、図７に示すように、両面に３相電
極が構成される固定子５０１上には可動子６０１、その
上に固定子７０１、その上に可動子８０１と多段に配置
される。そして、可動子６０１，８０１は回転軸５２０
に支持され、固定子５０１，７０１に対して、回転自在
に配置される。図８は本発明の第３の実施例を示すスラ
イド型の積層型４相駆動静電モータの一部破断斜視図で
ある。As shown in FIG. 7, a movable element 601 is arranged on a stator 501 having three-phase electrodes on both sides, a stator 701 is arranged on the movable element 601, and a movable element 801 is arranged thereon in multiple stages. . The movers 601 and 801 have the rotating shaft 520.
And is rotatably arranged with respect to the stators 501 and 701. FIG. 8 is a partially cutaway perspective view of a slide type laminated 4-phase drive electrostatic motor showing a third embodiment of the present invention.
【００３２】図８に示すように、固定子１１００，１１
１０は、Ａ相電極１１０２，Ｂ相電極１１０３，Ｃ相電
極１１０４、Ｄ相電極１１０５を所定ピッチで形成され
た下層１１３１と、Ａ相電極１１０６，Ｂ相電極１１０
７，Ｃ相電極１１０８、Ｄ相電極１１０９を所定ピッチ
で形成された上層１１２１を有する積層体１１０１，１
１１１から構成されている。As shown in FIG. 8, the stators 1100, 11
Reference numeral 10 denotes a lower layer 1131 in which an A phase electrode 1102, a B phase electrode 1103, a C phase electrode 1104, and a D phase electrode 1105 are formed at a predetermined pitch, an A phase electrode 1106, and a B phase electrode 110.
7, a C-phase electrode 1108, and a D-phase electrode 1109 are formed at a predetermined pitch.
It is composed of 111.
【００３３】この固定子１１００，１１１０上には可動
子１２００，１２１０が対向する。この可動子１２０
０，１２１０は、Ａ相電極１２０２，Ｂ相電極１２０
３，Ｃ相電極１２０４，Ｄ相電極１２０５を所定ピッチ
で形成された下層１２３２と、Ａ相電極１２０６，Ｂ相
電極１２０７，Ｃ相電極１２０８，Ｄ相電極１２０９を
所定ピッチで形成された上層１２２１を有する積層体１
２０１，１２１１から構成されている。The movers 1200 and 1210 face the stators 1100 and 1110, respectively. This mover 120
0 and 1210 are A phase electrode 1202 and B phase electrode 120.
3, a lower layer 1232 having C-phase electrodes 1204 and D-phase electrodes 1205 formed at a predetermined pitch, and an upper layer 1221 having A-phase electrodes 1206, B-phase electrodes 1207, C-phase electrodes 1208, and D-phase electrodes 1209 formed at a predetermined pitch. Stack 1 having
It is composed of 201 and 1211.
【００３４】このように、固定子１１００，１１１０及
び可動子１２００，１２１０には、両面に４相電極が形
成されている。また、本発明の第３の実施例を示す積層
型４相駆動静電モータの電極の製造方法は、前記した図
３と同様である。その静電モータの電極の表面構成を見
ると、第１層は、図９（ａ）に示すように、絶縁体１３
０１上の一方の側縁に沿ったＡ相配線１３１２、絶縁体
１３０１上のもう一方の側縁に沿ったＢ相配線１３１３
を形成する。そのＡ相配線１３１２からは対向する側に
向かって直角方向に延びる櫛歯状のＡ相電極１３１４
が、Ｂ相配線１３１３からは対向する側に向かって直角
方向に延びる櫛歯状のＢ相電極１３１５がそれぞれ延び
ている。更に、Ｃ相電極１３１６が裏面より接続部（バ
ンプ）１３０６を介して、Ｄ相電極１３１７が裏面より
接続部（バンプ）１３０７を介して、それぞれ接続され
る。As described above, the stators 1100 and 1110 and the movers 1200 and 1210 have four-phase electrodes formed on both surfaces. The method of manufacturing the electrodes of the laminated four-phase drive electrostatic motor according to the third embodiment of the present invention is the same as that shown in FIG. Looking at the surface configuration of the electrodes of the electrostatic motor, the first layer is the insulator 13 as shown in FIG.
A-phase wiring 1312 along one side edge on 01, B-phase wiring 1313 along the other side edge on insulator 1301
To form. A comb-shaped A-phase electrode 1314 extending in a right angle direction from the A-phase wiring 1312 toward the opposite side.
However, from the B-phase wiring 1313, comb-tooth-shaped B-phase electrodes 1315 extending in the direction perpendicular to the facing sides respectively extend. Further, the C-phase electrode 1316 is connected from the back surface via the connection portion (bump) 1306, and the D-phase electrode 1317 is connected from the back surface via the connection portion (bump) 1307.
【００３５】一方、第２層は、図９（ｂ）に示すよう
に、絶縁体１３０１上の一方の側縁に沿ったＣ相配線１
３２１、絶縁体１３０１上のもう一方の側縁に沿ったＤ
相配線１３２２を形成する。そのＣ相配線１３２１から
は対向する側に向かって直角方向に延びる櫛歯状のＣ相
電極１３２５が、Ｄ相配線１３２２からは対向する側に
向かって直角方向に延びる櫛歯状のＤ相電極１３２６が
それぞれ延びている。更に、Ａ相電極１３２３が裏面よ
り接続部（バンプ）１３０８を介して、Ｂ相電極１３２
４が裏面より接続部（バンプ）１３１０を介して、それ
ぞれ接続される。On the other hand, the second layer is, as shown in FIG. 9B, the C-phase wiring 1 along one side edge on the insulator 1301.
321, D along the other side edge of the insulator 1301
The phase wiring 1322 is formed. A comb-teeth-shaped C-phase electrode 1325 extending in a right angle direction from the C-phase wiring 1321 toward the opposite side, and a comb-teeth-shaped D-phase electrode extending in a right angle direction from the D-phase wiring 1322 toward the opposite side. 1326 respectively extends. Further, the A-phase electrode 1323 is connected to the B-phase electrode 132 from the back surface via the connecting portion (bump) 1308.
4 are connected to each other from the back surface via the connection portions (bumps) 1310.
【００３６】図１０は本発明の第４の実施例を示す回転
型の静電モータの一部破断斜視図、図１１はその固定子
の平面図、図１２は図１１のＣ〜Ｄ線断面図である。こ
れらの図に示すように、この実施例の回転型の静電モー
タは、軸１５０８を有し、外周部に形成されるほぼ円周
状の共通配線１５０３から、内部の径方向へ延びるＡ相
電極１５０４と、裏面から接続部１５１３を介して形成
されるＢ相電極１５１４と、内周部に形成されるリング
状の共通配線１５０６から、外部の径方向へ延びるＣ相
電極１５０７と、裏面から接続部１５１１を介して形成
されるＤ相電極１５１２とが形成される。なお、１５０
２はＡ相の共通配線１５０３への接続配線、１５０５は
Ｃ相の共通配線１５０６への接続配線である。FIG. 10 is a partially cutaway perspective view of a rotary electrostatic motor showing a fourth embodiment of the present invention, FIG. 11 is a plan view of a stator thereof, and FIG. 12 is a sectional view taken along line C--D of FIG. It is a figure. As shown in these figures, the rotary electrostatic motor of this embodiment has a shaft 1508, and an A-phase extending in the inner radial direction from a substantially circular common wiring 1503 formed in the outer peripheral portion. The electrode 1504, the B-phase electrode 1514 formed from the back surface via the connecting portion 1513, the ring-shaped common wiring 1506 formed in the inner peripheral portion, the C-phase electrode 1507 extending in the outer radial direction, and the back surface A D-phase electrode 1512 formed via the connecting portion 1511 is formed. Note that 150
Reference numeral 2 is a connection wiring to the A-phase common wiring 1503, and reference numeral 1505 is a connection wiring to the C-phase common wiring 1506.
【００３７】そして、図１０に示すように、両面に４相
電極が構成される固定子１５０１上には可動子１６０
１、その上に固定子１７０１、その上に可動子１８０１
と多段に配置される。そして、可動子１６０１，１８０
１は回転軸１５２０に支持され、固定子１５０１，１７
０１に対して、回転自在に配置される。なお、上記実施
例では、下層に形成される電極の位置と、上層に形成さ
れる電極の位置が一致したものを示したが、下層の電極
と上層の電極は必ずしも、一致した位置にある必要がな
く、また、固定子と移動子で、そのずれが必ずしも同じ
でなくてもよいことは言うまでもない。Then, as shown in FIG. 10, a movable element 160 is provided on a stator 1501 having four-phase electrodes on both sides.
1. Stator 1701 on it, mover 1801 on it
And arranged in multiple stages. Then, the movers 1601 and 180
1 is supported by a rotary shaft 1520, and stators 1501 and 17
01 is rotatably arranged. In the above example, the position of the electrode formed in the lower layer and the position of the electrode formed in the upper layer were shown to be the same, but the electrode of the lower layer and the electrode of the upper layer are not necessarily at the same position. Needless to say, there is no need for the shifts of the stator and the mover to be the same.
【００３８】更に、固定子及び移動子の電極、絶縁層の
積層構造、その積層方法は前記した実施例に限定するも
のではなく、種々の変形が可能である。また、電極へ供
給される相数及び交流波形も種々変化させることができ
る。なお、本発明は上記実施例に限定されるものではな
く、本発明の趣旨に基づいて種々の変形が可能であり、
これらを本発明の範囲から排除するものではない。Further, the laminated structure of the electrodes of the stator and the mover, the insulating layer, and the laminating method thereof are not limited to the above-mentioned embodiments, but various modifications can be made. Further, the number of phases supplied to the electrodes and the AC waveform can be variously changed. The present invention is not limited to the above-mentioned embodiment, and various modifications can be made based on the spirit of the present invention.
They are not excluded from the scope of the present invention.
【００３９】[0039]
【発明の効果】以上、詳細に説明したように、本発明に
よれば、次のような効果を奏することができる。 （１）固定子とそれらの固定子間に配置される可動子が
多段に配置され、３相又は４相交流が印加される静電モ
ータにおいて、両面に３相電極又は４相電極が形成され
る電極構造としたので、固定子及び可動子の両面に作用
する応力を均一にするとともに、電極の積層密度を高
め、力密度の向上を図ることができる。As described in detail above, according to the present invention, the following effects can be obtained. (1) In an electrostatic motor in which stators and movers arranged between the stators are arranged in multiple stages and a three-phase or four-phase alternating current is applied, three-phase electrodes or four-phase electrodes are formed on both surfaces. Since the electrode structure is adopted, it is possible to make the stress acting on both surfaces of the stator and the mover uniform, increase the stacking density of the electrodes, and improve the power density.
【００４０】（２）また、３相電極又は４相電極が形成
される絶縁体を薄型にすることができ、軽量にして、コ
ンパクトな静電モータを得ることができる。(2) Further, the insulator on which the three-phase electrode or the four-phase electrode is formed can be made thin, and the weight can be reduced to obtain a compact electrostatic motor.
【図１】本発明の第１の実施例を示すスライド型の積層
型３相駆動静電モータの要部断面図である。FIG. 1 is a cross-sectional view of a main part of a slide type stacked type three-phase drive electrostatic motor showing a first embodiment of the present invention.
【図２】本発明の第１の実施例を示すスライド型の積層
型３相駆動静電モータの全体斜視図である。FIG. 2 is an overall perspective view of a slide-type laminated type three-phase drive electrostatic motor showing a first embodiment of the present invention.
【図３】本発明のスライド型の積層型３相駆動静電モー
タの電極の製造工程断面図である。FIG. 3 is a cross-sectional view of manufacturing steps of electrodes of a slide-type laminated type three-phase drive electrostatic motor of the present invention.
【図４】本発明のスライド型の積層型３相駆動静電モー
タの電極の表面構成を示す図である。FIG. 4 is a diagram showing a surface configuration of electrodes of a slide type laminated type three-phase drive electrostatic motor of the present invention.
【図５】本発明の第２の実施例を示す回転型の積層型３
相駆動静電モータの一部破断斜視図である。FIG. 5 is a rotary stacking mold 3 showing a second embodiment of the present invention.
It is a partially broken perspective view of a phase drive electrostatic motor.
【図６】本発明の第２の実施例を示す回転型の積層型３
相駆動静電モータの固定子の平面図である。FIG. 6 is a rotary stacking mold 3 showing a second embodiment of the present invention.
It is a top view of the stator of a phase drive electrostatic motor.
【図７】図６のＣ〜Ｄ線断面図である。FIG. 7 is a sectional view taken along line C-D of FIG.
【図８】本発明の第３の実施例を示すスライド型の積層
型４相駆動静電モータの一部破断斜視図である。FIG. 8 is a partially cutaway perspective view of a slide type laminated type four-phase drive electrostatic motor showing a third embodiment of the present invention.
【図９】本発明の第３の実施例を示すスライド型の積層
型４相駆動静電モータの電極の表面構成を示す図であ
る。FIG. 9 is a diagram showing a surface configuration of electrodes of a slide type laminated type four-phase drive electrostatic motor showing a third embodiment of the present invention.
【図１０】本発明の第４の実施例を示す回転型の積層型
４相駆動静電モータの一部破断斜視図である。FIG. 10 is a partially cutaway perspective view of a rotary type laminated 4-phase drive electrostatic motor according to a fourth embodiment of the present invention.
【図１１】本発明の第４の実施例を示す回転型の積層型
４相駆動静電モータの固定子の平面図である。FIG. 11 is a plan view of a stator of a rotary type four-phase drive electrostatic motor according to a fourth embodiment of the present invention.
【図１２】図１１のＣ〜Ｄ線断面図である。FIG. 12 is a sectional view taken along line C-D of FIG. 11.
【図１３】従来の静電アクチュエータの構成図である。FIG. 13 is a configuration diagram of a conventional electrostatic actuator.
【図１４】従来の静電アクチュエータの電極配線の平面
図である。FIG. 14 is a plan view of electrode wiring of a conventional electrostatic actuator.
【図１５】従来の静電アクチュエータの電極の断面図で
ある。FIG. 15 is a cross-sectional view of electrodes of a conventional electrostatic actuator.
【図１６】従来の静電アクチュエータの電極配線の平面
図である。FIG. 16 is a plan view of electrode wiring of a conventional electrostatic actuator.
１００，１１０，５０１，７０１，１１００，１１１
０，１５０１，１７０１固定子 １０１，１１１，２０１，２１１，１１０１，１１１
１，１２０１，１２１１積層体 １０２，２０２，１１３１，１２３２ 下層 １０３，１０７，２０３，２０７，３０５，３０８，３
１５，３１８，４１４，４２３，５０４ Ｕ相電極 １０４，１０８，２０４，２０８，３０６，３１６，４
１５，４２４，５０７Ｖ相電極 １０５，１０９，２０５，２０９，３０７，３１７，４
１６，４２５，５１２Ｗ相電極 １０６，２０６，１１２１，１２２１ 上層 １９１，２９１ 連結体 １９２，２９２ 容器 ２００，２１０，６０１，８０１，１２００，１２１
０，１６０１，１８０１可動子 ３００ 第１の導電膜のベタパターン ３０１ ポリイミド膜 ３０３ 穴 ３０４ バンプ ３１１ 第２の導電膜のベタパターン ３１２ ポリイミド ３２１，３２２ 絶縁層 ４０１，１３０１ 絶縁体 ４１２ Ｕ相配線 ４１３，４２２ Ｖ相配線 ４２１ Ｗ相配線 ４０６，４０７，４０８，４０９，５１１，１３０６，
１３０７，１３０８，１３１０，１５１３，１５１１
接続部（バンプ） ５０２，５０５，１５０２，１５０５ 接続配線 ５０３，５０６，１５０３，１５０６ 共通配線 ５０８，１５０８ 軸 ５２０ 回転軸 １１０２，１１０６，１２０２，１２０６，１３１２，
１３１４，１３２３，１５０４ Ａ相電極 １１０３，１１０７，１２０３，１２０７，１３１３，
１３１５，１３２４，１５１４ Ｂ相電極 １１０４，１１０８，１２０４，１２０８，１３１６，
１３２５，１５０７Ｃ相電極 １１０５，１１０９，１２０５，１２０９，１３１７，
１３２６，１５１２Ｄ相電極 １３２１ Ｃ相配線 １３２２ Ｄ相配線100, 110, 501, 701, 1100, 111
0,1501,1701 stator 101,111,201,211,1101,111
1,1201,1211 laminated body 102,202,1131,1232 lower layer 103,107,203,207,305,308,3
15, 318, 414, 423, 504 U-phase electrode 104, 108, 204, 208, 306, 316, 4
15,424,507V phase electrode 105,109,205,209,307,317,4
16,425,512W phase electrode 106,206,1121,1221 Upper layer 191,291 Connection body 192,292 Container 200,210,601,801,1200,121
0,1601,1801 mover 300 Solid pattern of first conductive film 301 Polyimide film 303 Hole 304 Bump 311 Solid pattern of second conductive film 312 Polyimide 321,322 Insulating layer 401,1301 Insulator 412 U-phase wiring 413, 422 V-phase wiring 421 W-phase wiring 406, 407, 408, 409, 511, 1306
1307, 1308, 1310, 1513, 1511
Connection part (bump) 502, 505, 1502, 1505 Connection wiring 503, 506, 1503, 1506 Common wiring 508, 1508 Shaft 520 Rotation shaft 1102, 1106, 1202, 1206, 1312
1134, 1233, 1504 A-phase electrode 1103, 1107, 1203, 1207, 1313
1135, 1324, 1514 B-phase electrodes 1104, 1108, 1204, 1208, 1316
1325, 1507 C-phase electrodes 1105, 1109, 1205, 1209, 1317,
1326, 1512 D-phase electrode 1321 C-phase wiring 1322 D-phase wiring
Claims (6)
れらの固定子間に配置され、絶縁体内に電極が形成され
る可動子が多段に配置され、３相交流が印加されるスラ
イド型の積層型静電モータにおいて、（ａ）共通配線か
ら直角方向に延び一定のピッチで形成される櫛歯状の第
１の電極と、前記共通配線と対向する側の共通配線から
直角方向に延び前記第１の電極と所定間隔を有し平行に
形成される同じく一定のピッチで形成される櫛歯状の第
２の電極と、裏面から接続部を介して前記第２の電極と
所定間隔を有し平行に形成される同じく一定のピッチで
形成される櫛歯状の第３の電極とを有し、前記第１の電
極、第２の電極及び第３の電極が両面に形成される固定
子と、（ｂ）共通配線から直角方向に延び一定のピッチ
で形成される櫛歯状の第１の電極と、前記共通配線と対
向する側の共通配線から直角方向に延び前記第１の電極
と所定間隔を有し平行に形成される同じく一定のピッチ
で形成される櫛歯状の第２の電極と、裏面から接続部を
介して前記第２の電極と所定間隔を有し平行に形成され
る同じく一定のピッチで形成される櫛歯状の第３の電極
とを有し、前記第１の電極、第２の電極及び第３の電極
が両面に形成される可動子とを具備することを特徴とす
る積層型静電モータ。1. A slide type in which a stator having electrodes formed in an insulator and a mover having electrodes formed in the insulator are arranged in multiple stages and a three-phase alternating current is applied. (A) a comb-teeth-shaped first electrode extending in a right angle direction from a common wiring and formed at a constant pitch, and (a) extending in a right angle direction from a common wiring opposite to the common wiring. A second comb-like electrode formed in parallel with the first electrode at a predetermined interval and also formed at a constant pitch, and a predetermined interval from the back surface via the connecting portion to the second electrode. And a comb-shaped third electrode that is also formed in parallel and has a constant pitch, and the first electrode, the second electrode, and the third electrode are formed on both surfaces. And (b) comb-like teeth extending in a direction perpendicular to the common wiring and formed at a constant pitch Of the first electrode and the common wiring on the side opposite to the common wiring, extending in a direction perpendicular to the first wiring, and being formed in parallel with the first electrode at a predetermined interval and having a comb-tooth shape formed at the same constant pitch. A second electrode, and a comb-teeth-shaped third electrode that is formed in parallel with the second electrode at a predetermined distance from the back surface via a connecting portion and is also formed at a constant pitch, A laminated electrostatic motor, comprising: a mover having the first electrode, the second electrode, and the third electrode formed on both surfaces thereof.
れらの固定子間に配置され、絶縁体内に電極が形成され
る可動子が多段に配置され、３相交流が印加される回転
型の積層型静電モータにおいて、（ａ）外周部に形成さ
れる共通配線から径方向へ延びる一定のピッチで形成さ
れる放射状の第１の電極と、内周部に形成される共通配
線から径方向へ延びて前記第１の電極と組み合わされ、
同じく一定のピッチで形成される放射状の第２の電極
と、裏面から接続部を介して前記第２の電極と所定間隔
を有し平行に形成される同じく一定のピッチで形成され
る櫛歯状の第３の電極とを有し、前記第１の電極、第２
の電極及び第３の電極が両面に形成される固定子と、
（ｂ）外周部に形成される共通配線から径方向へ延びる
一定のピッチで形成される放射状の第１の電極と、内周
部に形成される共通配線から径方向へ延びて前記第１の
電極と組み合わされ、同じく一定のピッチで形成される
放射状の第２の電極と、裏面から接続部を介して前記第
２の電極と所定間隔を有し平行に形成される同じく一定
のピッチで形成される櫛歯状の第３の電極とを有し、前
記第１の電極、第２の電極及び第３の電極が両面に形成
される回転子とを具備することを特徴とする積層型静電
モータ。2. A rotary type in which a stator having electrodes formed in an insulator and a mover arranged between the stators and having electrodes formed in the insulator are arranged in multiple stages and three-phase alternating current is applied. In the laminated electrostatic motor of (a), the radial first electrodes are formed at a constant pitch and extend radially from the common wiring formed on the outer peripheral portion, and the diameter is defined by the common wiring formed on the inner peripheral portion. Direction and is combined with the first electrode,
A radial second electrode which is also formed at a constant pitch, and a comb tooth-shaped electrode which is formed in parallel with the second electrode from the back surface through a connecting portion at a predetermined interval and also at a constant pitch. A third electrode of the first electrode, the second electrode
A stator on which both electrodes and a third electrode are formed,
(B) Radial first electrodes formed at a constant pitch extending radially from the common wiring formed on the outer peripheral portion, and first radial electrodes extending radially from the common wiring formed on the inner peripheral portion. A radial second electrode that is also formed at a constant pitch in combination with an electrode and a second electrode that is formed in parallel with the second electrode from the back surface through a connecting portion at a predetermined interval and at a constant pitch And a rotor having a first electrode, a second electrode and a third electrode formed on both surfaces thereof. Electric motor.
れらの固定子間に配置され、絶縁体内に電極が形成され
る可動子が多段に配置され、３相交流が印加される積層
型多相駆動静電モータの電極の製造方法において、
（ａ）第１の導電膜のベタパターン上に絶縁膜を形成す
る工程と、（ｂ）該絶縁膜の所定の部位に穴を形成する
工程と、（ｃ）該穴を埋めるバンプを形成する工程と、
（ｄ）該バンプにより接続される第２の導電膜のベタパ
ターンを接着材により接着する工程と、（ｅ）前記第１
及び第２の導電膜のベタパターンをエッチングし、Ｕ相
電極と、Ｖ相電極と、Ｗ相電極を所定ピッチでそれぞれ
形成する工程と、（ｆ）その両面上に絶縁性の樹脂を形
成し絶縁層を形成する工程とを施すことを特徴とする積
層型静電モータの電極の製造方法。3. A laminated type in which a stator having electrodes formed in an insulator and a mover arranged between the stators and having electrodes formed in the insulator are arranged in multiple stages and a three-phase alternating current is applied. In the method of manufacturing electrodes of a multi-phase drive electrostatic motor,
(A) a step of forming an insulating film on the solid pattern of the first conductive film, (b) a step of forming a hole in a predetermined portion of the insulating film, and (c) a bump filling the hole. Process,
(D) a step of adhering a solid pattern of a second conductive film connected by the bumps with an adhesive, and (e) the first
And a step of etching the solid pattern of the second conductive film to form the U-phase electrode, the V-phase electrode, and the W-phase electrode respectively at a predetermined pitch, and (f) forming an insulating resin on both surfaces thereof. And a step of forming an insulating layer.
れらの固定子間に配置され、絶縁体内に電極が形成され
る可動子が多段に配置され、４相交流が印加されるスラ
イド型の積層型静電モータにおいて、（ａ）共通配線か
ら直角方向に延び一定のピッチで形成される櫛歯状の第
１の電極と、前記共通配線と対向する側の共通配線から
直角方向に延び前記第１の電極と所定間隔を有し平行に
形成される同じく一定のピッチで形成される櫛歯状の第
２の電極と、裏面から接続部を介して前記第２の電極と
所定間隔を有し平行に形成される同じく一定のピッチで
形成される櫛歯状の第３の電極と、裏面から接続部を介
して前記第３の電極と所定間隔を有し平行に形成される
同じく一定のピッチで形成される櫛歯状の第４の電極と
を有し、前記第１の電極、第２の電極、第３の電極及び
第４の電極が両面に形成される固定子と、（ｂ）共通配
線から直角方向に延び一定のピッチで形成される櫛歯状
の第１の電極と、前記共通配線と対向する側の共通配線
から直角方向に延び前記第１の電極と所定間隔を有し平
行に形成される同じく一定のピッチで形成される櫛歯状
の第２の電極と、裏面から接続部を介して前記第２の電
極と所定間隔を有し平行に形成される同じく一定のピッ
チで形成される櫛歯状の第３の電極と、裏面から接続部
を介して前記第３の電極と所定間隔を有し平行に形成さ
れる同じく一定のピッチで形成される櫛歯状の第４の電
極とを有し、前記第１の電極、第２の電極、第３の電極
及び第４の電極が両面に形成される可動子とを具備する
ことを特徴とする積層型静電モータ。4. A slide type in which a stator having electrodes formed in an insulator and a mover arranged between the stators and having electrodes formed in the insulator are arranged in multiple stages and a four-phase alternating current is applied. (A) a comb-teeth-shaped first electrode extending in a right angle direction from a common wiring and formed at a constant pitch, and (a) extending in a right angle direction from a common wiring opposite to the common wiring. A second comb-like electrode formed in parallel with the first electrode at a predetermined interval and also formed at a constant pitch, and a predetermined interval from the back surface via the connecting portion to the second electrode. A third comb-teeth-shaped electrode which is also formed in parallel and has a constant pitch, and a third electrode which is formed in parallel with the third electrode from the back surface through a connecting portion and has a predetermined distance. And a fourth electrode having a comb-teeth shape formed at a pitch of A stator having electrodes, a second electrode, a third electrode, and a fourth electrode formed on both surfaces; and (b) a comb-teeth-shaped first electrode extending in a right angle direction from the common wiring and formed at a constant pitch. An electrode and a comb-teeth-shaped second electrode that extends in a direction perpendicular to the common wiring on the side opposite to the common wiring and is formed in parallel with the first electrode at a predetermined interval and formed at the same constant pitch. And a comb-teeth-shaped third electrode that is formed in parallel with the second electrode at a predetermined interval from the back surface through the connection portion, and is formed in parallel with the second electrode, and from the back surface through the connection portion. A third comb-shaped fourth electrode that is formed in parallel with the third electrode at a predetermined interval and is also formed at a constant pitch, and includes the first electrode, the second electrode, and the third electrode. And a movable element having a fourth electrode formed on both surfaces thereof.
れらの固定子間に配置され、絶縁体内に電極が形成され
る可動子が多段に配置され、４相交流が印加される回転
型の積層型静電モータにおいて、（ａ）外周部に形成さ
れる共通配線から径方向へ延びる一定のピッチで形成さ
れる放射状の第１の電極と、内周部に形成される共通配
線から径方向へ延びて前記第１の電極と組み合わされ、
同じく一定のピッチで形成される放射状の第２の電極
と、裏面から接続部を介して前記第２の電極と所定間隔
を有し平行に形成される同じく一定のピッチで形成され
る櫛歯状の第３の電極と、裏面から接続部を介して前記
第３の電極と所定間隔を有し平行に形成される同じく一
定のピッチで形成される櫛歯状の第４の電極とを有し、
前記第１の電極、第２の電極、第３の電極及び第４の電
極が両面に形成される固定子と、（ｂ）外周部に形成さ
れる共通配線から径方向へ延びる一定のピッチで形成さ
れる放射状の第１の電極と、内周部に形成される共通配
線から径方向へ延びて前記第１の電極と組み合わされ、
同じく一定のピッチで形成される放射状の第２の電極
と、裏面から接続部を介して前記第２の電極と所定間隔
を有し平行に形成される同じく一定のピッチで形成され
る櫛歯状の第３の電極と、裏面から接続部を介して前記
第３の電極と所定間隔を有し平行に形成される同じく一
定のピッチで形成される櫛歯状の第４の電極とを有し、
前記第１の電極、第２の電極、第３の電極及び第４の電
極が両面に形成される回転子とを具備することを特徴と
する積層型静電モータ。5. A rotary type in which a stator having electrodes formed in an insulator and a mover arranged between the stators and having electrodes formed in the insulator are arranged in multiple stages and a four-phase alternating current is applied. In the laminated electrostatic motor of (a), the radial first electrodes are formed at a constant pitch and extend radially from the common wiring formed on the outer peripheral portion, and the diameter is defined by the common wiring formed on the inner peripheral portion. Direction and is combined with the first electrode,
A radial second electrode which is also formed at a constant pitch, and a comb tooth-shaped electrode which is formed in parallel with the second electrode from the back surface through a connecting portion at a predetermined interval and also at a constant pitch. And a comb-teeth-shaped fourth electrode that is formed in parallel with the third electrode at a predetermined distance from the back surface through a connection portion and is also formed at a constant pitch. ,
A stator having the first electrode, the second electrode, the third electrode, and the fourth electrode formed on both surfaces, and (b) a fixed pitch extending in a radial direction from a common wire formed on an outer peripheral portion. A radial first electrode that is formed and a combination of the first electrode that extends in the radial direction from the common wiring formed on the inner peripheral portion,
A radial second electrode which is also formed at a constant pitch, and a comb tooth-shaped electrode which is formed in parallel with the second electrode from the back surface through a connecting portion at a predetermined interval and also at a constant pitch. And a comb-teeth-shaped fourth electrode that is formed in parallel with the third electrode at a predetermined distance from the back surface through a connection portion and is also formed at a constant pitch. ,
A laminated electrostatic motor, comprising: a rotor having the first electrode, the second electrode, the third electrode, and the fourth electrode formed on both surfaces.
れらの固定子間に配置され、絶縁体内に電極が形成され
る可動子が多段に配置され、４相交流が印加される積層
型静電モータの電極の製造方法において、（ａ）第１の
導電膜のベタパターン上に絶縁膜を形成する工程と、
（ｂ）該絶縁膜の所定の部位に穴を形成する工程と、
（ｃ）該穴を埋めるバンプを形成する工程と、（ｄ）該
バンプにより接続される第２の導電膜のベタパターンを
接着材により接着する工程と、（ｅ）前記第１及び第２
の導電膜のベタパターンをエッチングし、Ａ相電極と、
Ｂ相電極と、Ｃ相電極と、Ｄ相電極を所定ピッチでそれ
ぞれ形成する工程と、（ｆ）その両面上に絶縁性の樹脂
を形成し絶縁層を形成する工程とを施すことを特徴とす
る積層型静電モータの電極の製造方法。6. A laminated type in which a stator having electrodes formed in an insulator and a mover arranged between the stators and having electrodes formed in the insulator are arranged in multiple stages and a four-phase alternating current is applied. In the method of manufacturing an electrode of an electrostatic motor, (a) a step of forming an insulating film on the solid pattern of the first conductive film;
(B) forming a hole in a predetermined portion of the insulating film,
(C) a step of forming a bump that fills the hole; (d) a step of adhering a solid pattern of a second conductive film connected by the bump with an adhesive; (e) the first and second steps
Etching the solid pattern of the conductive film of
The present invention is characterized by performing a step of forming a B-phase electrode, a C-phase electrode, and a D-phase electrode at a predetermined pitch, respectively, and (f) a step of forming an insulating resin on both surfaces thereof to form an insulating layer. Method for manufacturing electrodes of laminated electrostatic motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05763894A JP3426690B2 (en) | 1994-03-28 | 1994-03-28 | Laminated electrostatic motor and method of manufacturing electrodes thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05763894A JP3426690B2 (en) | 1994-03-28 | 1994-03-28 | Laminated electrostatic motor and method of manufacturing electrodes thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07274540A true JPH07274540A (en) | 1995-10-20 |
| JP3426690B2 JP3426690B2 (en) | 2003-07-14 |
Family
ID=13061439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05763894A Expired - Fee Related JP3426690B2 (en) | 1994-03-28 | 1994-03-28 | Laminated electrostatic motor and method of manufacturing electrodes thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3426690B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7239065B2 (en) * | 2003-07-08 | 2007-07-03 | Tibion Corporation | Electrostatic actuator with fault tolerant electrode structure |
| US9131873B2 (en) | 2009-02-09 | 2015-09-15 | Alterg, Inc. | Foot pad device and method of obtaining weight data |
| US9474673B2 (en) | 2007-02-14 | 2016-10-25 | Alterg, Inc. | Methods and devices for deep vein thrombosis prevention |
| US9889058B2 (en) | 2013-03-15 | 2018-02-13 | Alterg, Inc. | Orthotic device drive system and method |
| US10179078B2 (en) | 2008-06-05 | 2019-01-15 | Alterg, Inc. | Therapeutic method and device for rehabilitation |
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|---|---|---|---|---|
| JPH02285978A (en) * | 1989-04-24 | 1990-11-26 | Res Dev Corp Of Japan | Electrostatic actuator using film |
| JPH03159584A (en) * | 1989-11-17 | 1991-07-09 | Masafumi Yano | Power generator making use of electrostatic force |
| JPH04225551A (en) * | 1990-12-27 | 1992-08-14 | Nippon Precision Circuits Kk | Semiconductor device and production thereof |
| JPH05260766A (en) * | 1991-06-05 | 1993-10-08 | Matsushita Electric Works Ltd | Electrostatic actuator |
| JPH07123743A (en) * | 1993-10-28 | 1995-05-12 | Nippon Mektron Ltd | Flat micro-actuator |
| JPH07194147A (en) * | 1993-12-28 | 1995-07-28 | Kanagawa Kagaku Gijutsu Akad | Electrostatic motor |
-
1994
- 1994-03-28 JP JP05763894A patent/JP3426690B2/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02285978A (en) * | 1989-04-24 | 1990-11-26 | Res Dev Corp Of Japan | Electrostatic actuator using film |
| JPH03159584A (en) * | 1989-11-17 | 1991-07-09 | Masafumi Yano | Power generator making use of electrostatic force |
| JPH04225551A (en) * | 1990-12-27 | 1992-08-14 | Nippon Precision Circuits Kk | Semiconductor device and production thereof |
| JPH05260766A (en) * | 1991-06-05 | 1993-10-08 | Matsushita Electric Works Ltd | Electrostatic actuator |
| JPH07123743A (en) * | 1993-10-28 | 1995-05-12 | Nippon Mektron Ltd | Flat micro-actuator |
| JPH07194147A (en) * | 1993-12-28 | 1995-07-28 | Kanagawa Kagaku Gijutsu Akad | Electrostatic motor |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7239065B2 (en) * | 2003-07-08 | 2007-07-03 | Tibion Corporation | Electrostatic actuator with fault tolerant electrode structure |
| US9474673B2 (en) | 2007-02-14 | 2016-10-25 | Alterg, Inc. | Methods and devices for deep vein thrombosis prevention |
| US10179078B2 (en) | 2008-06-05 | 2019-01-15 | Alterg, Inc. | Therapeutic method and device for rehabilitation |
| US9131873B2 (en) | 2009-02-09 | 2015-09-15 | Alterg, Inc. | Foot pad device and method of obtaining weight data |
| US9889058B2 (en) | 2013-03-15 | 2018-02-13 | Alterg, Inc. | Orthotic device drive system and method |
| US11007105B2 (en) | 2013-03-15 | 2021-05-18 | Alterg, Inc. | Orthotic device drive system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3426690B2 (en) | 2003-07-14 |
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