JPH07272663A - Test piece heating and pulling device - Google Patents
Test piece heating and pulling deviceInfo
- Publication number
- JPH07272663A JPH07272663A JP6058499A JP5849994A JPH07272663A JP H07272663 A JPH07272663 A JP H07272663A JP 6058499 A JP6058499 A JP 6058499A JP 5849994 A JP5849994 A JP 5849994A JP H07272663 A JPH07272663 A JP H07272663A
- Authority
- JP
- Japan
- Prior art keywords
- test piece
- heating
- sample
- pulling
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、分析電子顕微鏡に係
り、あらゆる材料の加熱引っ張り試験における試料内部
もしくは試料表面の微細構造の変化の観察に好適な試料
加熱引っ張り装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an analytical electron microscope and, more particularly, to a sample heating and pulling apparatus suitable for observing changes in the microstructure inside or on the surface of a sample in a heating and pulling test of all materials.
【0002】[0002]
【従来の技術】従来、分析電子顕微鏡内で、実開昭49−
96867号公報,特願平3−277450号公報,特願平4−23332
4号公報および特願平4−161946号公報などにみられるよ
うに、試料の加熱を行うことが出来るものは存在した
が、これらは引っ張り機構を備えていない。また、特願
昭51−41353号公報や実願昭51−73742号公報などにみら
れるように、試料の引っ張り試験は行えるものは存在し
たが、これらは加熱機構を備えていない。このように、
分析電子顕微鏡内で試料の加熱と引っ張りを同時に行う
ことができる装置は存在しなかった。類似の技術として
は、試料ホールダ内に加熱炉と試料引っ張り機構を設け
た特開昭48−94361号公報や実開昭50−46061号公報があ
るが、分析と観察を両立させるための分析電子顕微鏡に
は、構造上適用することは不可能である。2. Description of the Related Art Conventionally, in an analytical electron microscope, actual
Japanese Patent Application No. 96867, Japanese Patent Application No. 3-277450, Japanese Patent Application No. 4-23332
As can be seen in Japanese Patent Application Laid-Open No. 4 and Japanese Patent Application No. 4-161946, there are materials that can heat a sample, but these do not have a pulling mechanism. Further, as shown in Japanese Patent Application No. 51-41353 and Japanese Utility Model Application No. 51-73742, there are some that can perform a tensile test of a sample, but these do not have a heating mechanism. in this way,
There was no device that could simultaneously heat and pull a sample in an analytical electron microscope. As a similar technique, there are Japanese Patent Laid-Open No. 48-94361 and Japanese Utility Model Laid-Open No. 50-46061 in which a heating furnace and a sample pulling mechanism are provided in a sample holder. It cannot be structurally applied to a microscope.
【0003】[0003]
【発明が解決しようとする課題】本発明の目的は、試料
を加熱しながら引っ張り応力を加え、高温における応力
下での試料内部および表面の微細構造の変化を観察する
ための、試料ホールダを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a sample holder for applying a tensile stress while heating the sample and observing changes in the microstructure inside and on the surface of the sample under stress at high temperature. To do.
【0004】[0004]
【課題を解決するための手段】試料ホールダ内に、固定
部と可動部をもうける。その固定部と可動部の間に伸縮
性のある加熱ヒータを設置する。試料は、加熱ヒータと
平行に接近させて、同様に固定部と可動部に接着する。A fixed part and a movable part are provided in a sample holder. An elastic heater is installed between the fixed part and the movable part. The sample is brought close to the heater in parallel and is similarly bonded to the fixed part and the movable part.
【0005】[0005]
【作用】上記構成によれば、加熱ヒータの輻射熱により
引っ張り中の試料を加熱することが出来る。この時、試
料と加熱ヒータは平行に設置されているため、試料と加
熱ヒータの距離は変わらない。そのため、一定の加熱温
度での試料への引っ張り応力の印加が可能である。According to the above construction, the sample being pulled can be heated by the radiant heat of the heater. At this time, since the sample and the heater are installed in parallel, the distance between the sample and the heater does not change. Therefore, tensile stress can be applied to the sample at a constant heating temperature.
【0006】[0006]
【実施例】以下、発明の実施例を図面を用いて説明す
る。Embodiments of the present invention will be described below with reference to the drawings.
【0007】本発明を透過電子顕微鏡に実施した場合の
試料ホールダ先端部の断面図を図1に示す。図1におい
て、試料1は試料押さえ固定部2と試料押さえ可動部3
をまたぐように貼付けられる。電源4から流れる電流
は、加熱電流制御装置5,電流計6を介し、加熱部ター
ミナル可動部7に入り、加熱ヒータ8を通って、加熱部
ターミナル固定部9へと流れる。電流は、電流計6から
加熱電流検出比較装置10により常に検出され、加熱電
流制御装置5によって一定に保たれる。試料1は、加熱
ヒータ8の輻射熱によって一定温度に加熱される。加熱
部ターミナル固定部9から試料押さえ固定部2へ、加熱
部ターミナル可動部7から試料押さえ可動部3への漏電
を防ぐために、それぞれの間には絶縁体11,12が設
けられている。一体化した試料押さえ可動部3,絶縁体
12,加熱部ターミナル可動部7は試料引っ張り機構1
3により移動され、これにより、試料1に引っ張り応力
が印加される。この時、試料1に照射されていた電子線
束14は、試料1の加熱引っ張り変形像15となり、蛍
光板16に投影される。試料の温度は、その近傍に配置
された熱電対検出器17で検出し、温度計18により測
定する。FIG. 1 is a sectional view of the tip of the sample holder when the present invention is applied to a transmission electron microscope. In FIG. 1, a sample 1 is a sample pressing fixed part 2 and a sample pressing movable part 3
It is affixed so that it straddles. The current flowing from the power source 4 enters the heating unit terminal movable unit 7 via the heating current control device 5 and the ammeter 6, passes through the heating heater 8, and flows to the heating unit terminal fixing unit 9. The current is constantly detected by the heating current detection / comparison device 10 from the ammeter 6 and kept constant by the heating current control device 5. The sample 1 is heated to a constant temperature by the radiant heat of the heater 8. Insulators 11 and 12 are provided between the heating section terminal fixing section 9 and the sample pressing fixed section 2 in order to prevent electric leakage from the heating section terminal moving section 7 to the sample pressing moving section 3. The integrated sample holding movable part 3, the insulator 12, the heating part terminal movable part 7 are the sample pulling mechanism 1
The sample 1 is moved by 3, so that tensile stress is applied to the sample 1. At this time, the electron beam bundle 14 irradiated on the sample 1 becomes a heated tensile deformation image 15 of the sample 1 and is projected on the fluorescent plate 16. The temperature of the sample is detected by a thermocouple detector 17 arranged in the vicinity thereof and measured by a thermometer 18.
【0008】[0008]
【発明の効果】本発明によれば、あらゆる材料の加熱引
っ張り試験における試料表面もしくは内部の微細構造の
変化を正確に観察することが出来る。これにより、あら
ゆる材料において、任意の温度下での材料強度の変化な
どを正確に把握,検討することが出来るなどの効果があ
る。EFFECTS OF THE INVENTION According to the present invention, it is possible to accurately observe changes in the microstructure of the sample surface or inside in the heat tensile test of all materials. As a result, it is possible to accurately grasp and study changes in the material strength of any material under any temperature.
【図1】本発明の一実施例を示す概略断面図である。FIG. 1 is a schematic sectional view showing an embodiment of the present invention.
1…試料、2…試料押さえ固定部、3…試料押さえ可動
部、4…電源、5…加熱電流制御装置、6…電流計、7
…加熱部ターミナル可動部、8…加熱ヒータ、9…加熱
部ターミナル固定部、10…加熱電流検出比較装置、1
1,12…絶縁体、13…試料引っ張り機構、14…電
子線束、15…加熱引っ張り変形像、16…蛍光板、1
7…熱電対検出器、18…温度計。DESCRIPTION OF SYMBOLS 1 ... Sample, 2 ... Sample pressing fixed part, 3 ... Sample pressing movable part, 4 ... Power supply, 5 ... Heating current control device, 6 ... Ammeter, 7
... Heating part terminal movable part, 8 ... Heating heater, 9 ... Heating part terminal fixed part, 10 ... Heating current detection comparison device, 1
1, 12 ... Insulator, 13 ... Sample pulling mechanism, 14 ... Electron beam flux, 15 ... Heat pull deformation image, 16 ... Fluorescent plate, 1
7 ... Thermocouple detector, 18 ... Thermometer.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 上野 武夫 茨城県勝田市堀口字長久保832番地2 日 立計測エンジニアリング株式会社内 (72)発明者 浮穴 基英 茨城県勝田市大字市毛882番地 株式会社 日立製作所計測器事業部内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Takeo Ueno Inventor Takeo Ueno 832 Nagakubo, Horiguchi, Katsuta-shi, Ibaraki 2 Nissei Measurement Engineering Co., Ltd. Hitachi Measuring Instruments Division
Claims (2)
っ張りによる試料表面もしくは試料内部の微細構造変化
を観察するための試料引っ張り装置において、試料引っ
張り機構に試料に非接触なラセン状加熱ヒータを設けた
ことを特徴とする試料加熱引っ張り装置。1. In a sample pulling device for pulling an observation sample in a sample chamber and observing a microstructure change on the sample surface or inside the sample due to the pulling, a helical heating heater which is not in contact with the sample is provided in the sample pulling mechanism. A sample heating and pulling device characterized by being provided.
て、加熱引っ張り中の試料表面近傍の温度の測定が可能
なことを特徴とする試料加熱引っ張り装置。2. The sample heating and pulling apparatus according to claim 1, wherein the temperature near the surface of the sample during heating and pulling can be measured.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6058499A JPH07272663A (en) | 1994-03-29 | 1994-03-29 | Test piece heating and pulling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6058499A JPH07272663A (en) | 1994-03-29 | 1994-03-29 | Test piece heating and pulling device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07272663A true JPH07272663A (en) | 1995-10-20 |
Family
ID=13086123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6058499A Pending JPH07272663A (en) | 1994-03-29 | 1994-03-29 | Test piece heating and pulling device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07272663A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009032598A (en) * | 2007-07-27 | 2009-02-12 | Sumitomo Electric Ind Ltd | Stage for test piece, and analyzing method of test piece |
US8309851B2 (en) | 2009-02-24 | 2012-11-13 | Hitachi Cable, Ltd. | Insulated wire and manufacturing method of the same |
-
1994
- 1994-03-29 JP JP6058499A patent/JPH07272663A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009032598A (en) * | 2007-07-27 | 2009-02-12 | Sumitomo Electric Ind Ltd | Stage for test piece, and analyzing method of test piece |
US8309851B2 (en) | 2009-02-24 | 2012-11-13 | Hitachi Cable, Ltd. | Insulated wire and manufacturing method of the same |
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