JPH0727051A - Vacuum rotary machine - Google Patents

Abstract

PURPOSE:To provide a vacuum rotary machine in which a vacuum pressure in a vacuum chamber can be maintained to eliminate necessity for performing exhaust work at restoration time in the case of removing a vacuum exhaust mechanism from a rotor. CONSTITUTION:Partly in an exhaust hole 3 of a vacuum rotary machine, an exhaust hole opening/closing means 10 capable of opening/closing this exhaust hole 3 is provided. For instance, as the exhaust hole opening/closing means 10, a pressing member 11 is pressed in toward the exhaust hole 3 from the peripheral side of a rotor 1, and an elastic unit 12 is pressed to close the exhaust hole 3. An opening/closing member is pressed in toward the exhaust hole 3 from the peripheral side of the rotor 1 and closely attached to a recessed part provided partly in the exhaust hole 3, to close it. Or by rotating an opening/closing valve containing an elastic unit having a through hole, the exhaust hole 3 is closed. A halfway part of the exhaust hole 3 is divided, and by drawing out the divided end part to a peripheral surface of the rotor 1 connected to a pipe, the opening/closing valve is provided partly in the pipe.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum sealing technique for a rotary machine that rotates or vacuum heat-insulates in a vacuum atmosphere.

[0002]

2. Description of the Related Art Conventionally, as a method for maintaining the pressure of a vacuum chamber provided inside a rotor in a vacuum rotating machine, a method of exhausting and vacuum-sealing before rotationally driving or a method of rotationally driving However, there is a method of exhausting from an exhaust mechanism provided at the end of the rotor.

FIG. 8 is a sectional view showing an example of a rotor and a vacuum exhaust mechanism of a vacuum rotary machine adopting the latter method. As shown in FIG. 8, inside the rotor 1,
A vacuum chamber 2 is formed coaxially with the rotation axis of the rotor 1, and an exhaust hole 3 extending from the end of the vacuum chamber 2 to the end surface of the rotor 1 is formed. A vacuum exhaust mechanism 5 is coupled to the end surface of the rotor 1 via a vacuum sealing material 4, whereby an exhaust passage 6 provided in the vacuum exhaust mechanism 5 and an exhaust hole of the rotor 1 are connected. It communicates with 3. Then, in this way, the vacuum chamber 2 is evacuated by the vacuum evacuation mechanism 5 in a state where the rotor 1 and the vacuum evacuation mechanism 5 are coupled. The vacuum rotary machine having such a configuration is provided with the exhaust path 6
Since the configuration is simple and there is little change in shape that causes resistance to the exhaust passage 6, it has advantages such as high exhaust efficiency.

[0004]

The conventional vacuum rotating machine shown in FIG. 8 has the following problems. That is, when the evacuation mechanism 5 connected to the rotor 1 loses its evacuation function due to a failure or the like, or when the evacuation mechanism 5 is inspected, the evacuation mechanism 5 is evacuated.
Need to be removed from the rotor 1. However, in such a case, if the vacuum exhaust mechanism 5 is removed as it is from the combined state as shown in FIG. 8, the vacuum chamber 2 is opened to the atmosphere, and the vacuum state is broken.
Therefore, at the time of restoration in which the vacuum evacuation mechanism 5 is attached again and the rotation drive is restarted, it is necessary to newly evacuate the vacuum chamber 2 to improve the vacuum pressure, and quick restoration cannot be performed. In particular, when the vacuum chamber 2 includes a complicated and narrow gap portion in terms of its function, it takes a long time to improve the vacuum pressure by the exhaust work at the time of restoration.

The present invention has been proposed in order to solve the above problems of the prior art, and its purpose is to:
It is an object of the present invention to provide a vacuum rotating machine that can maintain a vacuum pressure in a vacuum chamber when a vacuum exhaust mechanism is removed from a rotor and does not need to perform an exhaust operation at the time of restoration.

[0006]

According to a first aspect of the present invention, there is provided a vacuum rotating machine, wherein a rotor, a vacuum chamber formed inside the rotor so as to be coaxial with a rotation axis of the rotor, and the rotation from the vacuum chamber. In a vacuum rotating machine with an exhaust hole extending to the end face of the child,
An exhaust hole opening / closing means capable of opening / closing the exhaust hole is provided in a part of the exhaust hole.

A vacuum rotating machine according to a second aspect is the first aspect.
In the configuration described in (1), particularly, as the exhaust hole opening / closing means, a pressing member operably arranged in the rotor radial direction from the outer peripheral side of the rotor toward the exhaust hole, and a rotor radius of the pressing member. An elastic body disposed at the inner end in the direction is used. In this vacuum rotating machine, the pressing member opens the exhaust hole when located at the outer side in the rotor radial direction, and presses the elastic body when moved to the inner position in the rotor radial direction. Then, the outer dimension thereof is enlarged to close the exhaust hole.

A vacuum rotating machine according to a third aspect is the first aspect.
In the configuration described in (1) above, in particular, as the exhaust hole opening / closing means, an opening / closing member operably arranged in the rotor radial direction from the outer peripheral side of the rotor toward the exhaust hole, and a part of the exhaust hole. A recess provided at a position facing the opening / closing member is used. In this vacuum rotary machine, the opening / closing member opens the exhaust hole when it is located at the outer side in the rotor radial direction, and comes into close contact with the recess when it is moved to the inner side in the rotor radial direction. Is configured to close the exhaust hole.

A vacuum rotating machine according to a fourth aspect is the first aspect.
In the configuration described in (1) above, an on-off valve inserted in the rotor radial direction from the outer peripheral side of the rotor toward the exhaust hole is used as the exhaust hole opening / closing means. The exhaust hole insertion portion of the on-off valve is composed of an elastic body having a diameter smaller than that of the exhaust hole and having a through hole capable of communicating with the exhaust hole. The on-off valve has a rotating shaft in the radial direction of the rotor, and has an open position where the through hole communicates with the exhaust hole, and a blockage that closes the exhaust hole by bringing the elastic body into close contact with the inner surface of the exhaust hole. It is configured to move rotationally between positions.

A vacuum rotating machine according to a fifth aspect is the first aspect.
In the configuration described in (1) above, in particular, the exhaust hole is divided into two parts, and the two divided ends are respectively drawn to the outer peripheral surface of the rotor, and the outer peripheral part of the rotor is A pipe connecting the two divided ends of the exhaust hole is provided, and an opening / closing valve provided in a part of the pipe is used as the exhaust hole opening / closing means.

[0011]

According to the vacuum rotating machine of the present invention configured as described above, the exhaust hole can be optionally closed by the exhaust hole opening / closing means provided in a part of the exhaust hole for vacuum sealing. . Therefore, when the vacuum exhaust mechanism is removed from the rotor, the exhaust hole opening / closing means closes the exhaust hole and vacuum-seals the vacuum pressure in the vacuum chamber.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A plurality of embodiments of the vacuum rotating machine according to the present invention will be specifically described below with reference to FIGS. Here, FIG. 1 is a sectional view showing a rotor and a vacuum exhaust mechanism of the vacuum rotating machine of the first embodiment, FIG. 2 is a sectional view showing a vacuum sealed state of the rotor of FIG. 1, and FIG. Sectional drawing which shows the vacuum sealed state of the rotor of the vacuum rotary machine of 2nd Example, FIG.
Sectional drawing which shows the vacuum sealed state of the rotor of the vacuum rotary machine of 3rd Example, FIG.5 and FIG.6 is sectional drawing which shows the open state and vacuum sealed state of the rotor of the vacuum rotary machine of 4th Example. Figure, Figure 7
[FIG. 8] A sectional view showing a vacuum sealed state of a rotor of a vacuum rotating machine of a fifth embodiment.

(1) First Embodiment ... FIGS. 1 and 2 The vacuum rotating machine according to the first embodiment has a structure as shown in FIGS. That is, first, as shown in FIG.
Inside the rotor 1, a vacuum chamber 2 is formed coaxially with the rotation axis of the rotor 1, and an exhaust hole 3 extending from the end of the vacuum chamber 2 to the end face of the rotor 1 is formed. There is. A vacuum exhaust mechanism 5 is coupled to the end surface of the rotor 1 via a vacuum sealing material 4, whereby an exhaust passage 6 provided in the vacuum exhaust mechanism 5 and an exhaust hole of the rotor 1 are connected. Three
And are in communication.

In the present embodiment, in addition to the above structure, an exhaust hole opening / closing mechanism (exhaust hole opening / closing means) 10 is further provided in a part of the exhaust hole 3. As shown in FIG. 2, the exhaust hole opening / closing mechanism 10 includes a pressing member 11
And an elastic body 12. Of these, the pressing member 11
Is inserted in the rotor radial direction from the outer peripheral surface of the rotor 1 toward the exhaust hole 3 and is operably arranged in the rotor radial direction. A pressing portion 11a is provided. A vacuum sealing material 13 is arranged between the pressing member 11 and the rotor 1. On the other hand, the elastic body 12 is arranged at the inner end portion of the pressing member 11,
It is configured to be pressed by the pressing portion 11a of the pressing member 11. Further, a screw 14 that presses the pressing member 11 and a holding member 15 that holds the screw 14 are provided outside the outer end portion of the pressing member 11, and the holding member 15 is provided on the outer surface of the rotor 1. It is fixed.

In the embodiment constructed as described above, when the vacuum rotating machine is driven to rotate, the vacuum exhaust mechanism 5 is connected to the end face of the rotor 1 and the pressing member 11 is held at the outer position. The exhaust hole 3 is opened, and the exhaust hole 3 is communicated with the exhaust passage 6 of the vacuum exhaust mechanism 5. Then, in this state, the vacuum chamber 2 is evacuated by the vacuum evacuation mechanism 5. On the other hand, when the vacuum exhaust mechanism 5 is removed from the rotor 1, by tightening the screw 14, the pressing member 1
The outer end portion of 1 is pressed to push the pressing member 11 inward. As the pressing member 11 moves inward, the elastic member 12 is pressed by the pressing portion 11a at the inner end thereof.
Is pressed to increase the outer diameter of the elastic body 12.
The elastic body 12 thus expanded allows the exhaust hole 3 to be closed and vacuum-sealed.

Therefore, if the vacuum exhaust mechanism 5 is removed in this state, the vacuum chamber 2 is not exposed to the atmosphere as in the conventional case, and the vacuum pressure of the vacuum chamber 2 can be maintained. It is not necessary to newly exhaust the vacuum chamber 2 at the time of recovery after mounting and restarting the rotation drive.
A quick recovery is possible.

(2) Second Embodiment ... FIG. 3 The vacuum rotary machine of the second embodiment has a structure as shown in FIG. That is, the exhaust hole opening / closing mechanism 10 of the present embodiment, as shown in FIG. 3, has the pressing portion 11a at the inner end of the pressing member 11.
The outer shape of is a gentle curved surface with a small curvature,
A screw portion 11b is integrally provided on the outer end side of the pressing member 11, and the screw portion 11b is held by a holding member 15 fixed to the outer surface of the rotor 1. The rest of the configuration is exactly the same as that of the first embodiment.

In this embodiment constructed as described above, when the vacuum rotary machine is driven to rotate, the vacuum exhaust mechanism 5 is connected to the end face of the rotor 1 and the pressing member 11 is connected, as in the first embodiment. By holding in the outer position, the exhaust hole 3
Is opened, and the exhaust hole 3 is communicated with the exhaust passage 6 of the vacuum exhaust mechanism 5. Then, in this state, the vacuum chamber 2 is evacuated by the vacuum evacuation mechanism 5. On the other hand, when the vacuum exhaust mechanism 5 is removed from the rotor 1, the screw portion 1 of the pressing member 11
By tightening 1b, the pressing member 11 is pushed inward while rotating. The pressing member 11 presses the elastic body 12 by the pressing portion 11a at the inner end of the elastic body 12 along with the inward movement.
Increase the outer diameter dimension of. With the elastic body 12 thus expanded, the exhaust hole 3 can be closed and vacuum-sealed as in the first embodiment.

Therefore, if the vacuum exhaust mechanism 5 is removed in this state, the vacuum pressure in the vacuum chamber 2 can be maintained as in the first embodiment. Therefore, the vacuum exhaust mechanism 5 is attached again and the rotation drive is resumed. Occasionally, it is not necessary to newly evacuate the vacuum chamber 2, and quick recovery is possible. Further, in this embodiment, since the threaded portion 11b is formed at the end of the pressing member 11, the number of parts can be reduced and the construction is simplified as compared with the first embodiment in which the screw 14 is separately provided. There is an advantage that you can.

(3) Third Embodiment FIG. 4 The vacuum rotary machine of the third embodiment has a structure as shown in FIG. That is, the exhaust hole opening / closing mechanism 10 of the present embodiment is configured so that the opening / closing member 16 is brought into close contact with the recess 3 a provided in the exhaust hole 3, as shown in FIG. 4. Of these, the opening / closing member 16 is inserted in the rotor radial direction from the outer peripheral surface of the rotor 1 toward the exhaust hole 3 and is movably arranged in the rotor radial direction. Has
A contact portion 16a is provided which is narrowed toward the tip. Further, a vacuum sealing material 13 is arranged between the opening / closing member 16 and the rotor 1. On the other hand, the recess 3a of the exhaust hole 3
Is arranged at a position facing the contact portion 16a of the opening / closing member 16 and has a shape corresponding to the tip shape of the contact portion 16a of the opening / closing member 16. Further, on the outside of the outer end portion of the opening / closing member 16, a screw 14 for pressing the opening / closing member 16 is provided.
The screw 14 is held by a holding member 16 fixed to the outer surface of the rotor 1.

In the embodiment constructed as described above, when the vacuum rotating machine is driven to rotate, the vacuum exhaust mechanism 5 is connected to the end face of the rotor 1 and the opening / closing member 16 is held at the outer position. The exhaust hole 3 is opened, and the exhaust hole 3 is communicated with the exhaust passage 6 of the vacuum exhaust mechanism 5. Then, in this state, the vacuum chamber 2 is evacuated by the vacuum evacuation mechanism 5. On the other hand, when the vacuum exhaust mechanism 5 is removed from the rotor 1, by tightening the screw 14, the opening / closing member 1
The outer end portion of 6 is pressed to push the opening / closing member 16 inward. Then, the contact portion 16a at the inner end of the opening / closing member 16
By closely contacting with the recess 3a of the exhaust hole 3, the exhaust hole 3 can be closed and vacuum-sealed.

Therefore, if the vacuum exhaust mechanism 5 is removed in this state, the vacuum chamber 2 can be removed as in the first and second embodiments.
Since the vacuum pressure can be maintained, it is not necessary to newly perform the evacuation work of the vacuum chamber 2 at the time of restoration in which the vacuum evacuation mechanism 5 is attached again and the rotation drive is restarted, and quick restoration can be performed. In particular, the exhaust hole opening / closing mechanism 10 of the present embodiment has a structure in which the opening / closing member 16 is brought into close contact with the recess 3a of the exhaust hole 3, so that the number of parts can be further reduced as compared with the second embodiment, and the structure is further simplified. There is an advantage that it can be realized.

(4) Fourth Embodiment ... FIGS. 5 and 6 The vacuum rotating machine according to the fourth embodiment has a structure as shown in FIGS. That is, the exhaust hole opening / closing mechanism 10 of the present embodiment uses the opening / closing valve 17 as shown in FIGS. 5 and 6. The on-off valve 17 is inserted in the rotor radial direction from the outer peripheral surface of the rotor 1 toward the exhaust hole 3, and the exhaust hole insertion portion has a smaller diameter than the exhaust hole 3 and can communicate with the exhaust hole 3. The elastic body 18 has a through hole 18a. The on-off valve 17 has a rotary shaft in the radial direction of the rotor, and closes the exhaust hole 3 by bringing the elastic body 18 into close contact with the inner surface of the exhaust hole 3 and the open position where the through hole 18 a communicates with the exhaust hole 3. It is configured to rotate relative to the closed position. Further, between the on-off valve 17 and the rotor 1,
The vacuum sealing material 13 is arranged. On the other hand, an operating portion 17a capable of rotating the opening / closing valve 17 is integrally formed on the outer end portion of the opening / closing valve 17, and the operating portion 17a is
It is rotatably held by the holding member 15.

In this embodiment constructed as described above, when the vacuum rotating machine is driven to rotate, the vacuum exhaust mechanism 5 is connected to the end face of the rotor 1 as in the case of the first embodiment, as shown in FIG. Further, the on-off valve 17 is held in the open position, the through hole 18a of the elastic body 18 is communicated with the exhaust hole 3, and the exhaust hole 3 is communicated with the exhaust passage 6 of the vacuum exhaust mechanism 5. Then, in this state, the vacuum chamber 2 is evacuated by the vacuum evacuation mechanism 5. On the other hand, when the vacuum exhaust mechanism 5 is removed from the rotor 1, the opening / closing valve 17 is rotated 90 degrees from the open position by rotating the operating portion 17a by 90 degrees, and moved to the closed position as shown in FIG. . As a result, the elastic body 18 of the opening / closing valve 17 is brought into close contact with the inner surface of the exhaust hole 3, whereby the exhaust hole 3 can be closed and vacuum-sealed.

Therefore, if the vacuum exhaust mechanism 5 is removed in this vacuum-sealed state, as in the first to third embodiments,
Since the vacuum pressure in the vacuum chamber 2 can be maintained, it is not necessary to newly exhaust the vacuum chamber 2 at the time of restoration in which the vacuum evacuation mechanism 5 is attached again and the rotational drive is restarted, and quick restoration is possible. Further, the exhaust hole opening / closing mechanism 10 of the present embodiment is
Since the opening / closing operation of the exhaust hole 3 can be easily performed only by rotating the opening / closing valve 17 by 90 degrees, there is also an advantage that the operability is excellent.

(5) Fifth Embodiment ... FIG. 7 The vacuum rotating machine according to the fifth embodiment has a structure as shown in FIG. That is, in this embodiment, as shown in FIG. 7, a pipe 19 is provided on the outer peripheral portion of the rotor 1, and an opening / closing valve 20 provided in a part of the pipe 19 is provided with the exhaust hole opening / closing mechanism 1
Used as 0. More specifically, in the present embodiment,
The exhaust hole 3 is divided into two exhaust holes 21 and 22 by a part thereof, and the two divided end portions 21 a and 22 a are respectively drawn to the outer peripheral surface of the rotor 1 and connected by a pipe 19.

In this embodiment constructed as described above, when the vacuum rotating machine is driven to rotate, the vacuum exhaust mechanism 5 is connected to the end face of the rotor 1 and the on-off valve 20 is opened, as in the first embodiment. Through the pipe 19, exhaust holes 21 on both sides,
22 is communicated, and the exhaust holes 21 and 22 are communicated with the exhaust passage 6 of the vacuum exhaust mechanism 5. Then, in this state, the vacuum chamber 2 is evacuated by the vacuum evacuation mechanism 5. On the other hand, when the vacuum exhaust mechanism 5 is removed from the rotor 1, the opening / closing valve 20
It is possible to block the pipe 19 by closing the exhaust pipes 21, 22, so that the exhaust holes 21 and 22 on both sides are blocked and vacuum-sealed.

Therefore, if the vacuum evacuation mechanism 5 is removed in this state, the vacuum chamber 2 is removed as in the first to fourth embodiments.
Since the vacuum pressure can be maintained, it is not necessary to newly perform the evacuation work of the vacuum chamber 2 at the time of restoration in which the vacuum evacuation mechanism 5 is attached again and the rotation drive is restarted, and quick restoration can be performed.

(6) Other Embodiments In each of the above embodiments, the specific shape and material of each member constituting the exhaust hole opening / closing mechanism 10 can be freely selected. Further, the present invention is not limited to the above-mentioned respective embodiments, and the specific constitution of the exhaust hole opening / closing means can be appropriately changed.

[0030]

As described above, according to the present invention,
Since the exhaust hole can be optionally closed and vacuum-sealed by improving the simple structure of providing the exhaust hole opening / closing means in a part of the exhaust hole, when removing the vacuum exhaust mechanism from the rotor, It is possible to provide a vacuum rotating machine that can maintain the vacuum pressure in the chamber and does not need to perform an exhaust operation at the time of restoration.

[Brief description of drawings]

FIG. 1 is a sectional view showing a rotor and a vacuum exhaust mechanism of a vacuum rotating machine according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a vacuum sealed state of the rotor of FIG.

FIG. 3 is a sectional view showing a vacuum sealed state of a rotor of a vacuum rotating machine according to a second embodiment of the present invention.

FIG. 4 is a sectional view showing a vacuum sealed state of a rotor of a vacuum rotating machine according to a third embodiment of the present invention.

FIG. 5 is a sectional view showing an open state of a rotor of a vacuum rotating machine according to a fourth embodiment of the present invention.

6 is a sectional view showing a vacuum sealed state of a rotor of the vacuum rotating machine of FIG.

FIG. 7 is a sectional view showing a vacuum sealed state of a rotor of a vacuum rotating machine according to a fifth embodiment of the present invention.

FIG. 8 is a sectional view showing an example of a rotor and a vacuum exhaust mechanism of a conventional vacuum rotary machine.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Rotor 2 ... Vacuum chamber 3 ... Exhaust hole 3a ... Recessed part 4 ... Vacuum sealing material 5 ... Vacuum exhaust mechanism 6 ... Exhaust passage 10 ... Exhaust hole opening / closing mechanism 11 ... Pressing member 11a ... Pressing part 11b ... Screw part 12 ... Elastic body 13 ... Vacuum sealing material 14 ... Screw 15 ... Holding member 16 ... Opening / closing member 16a ... Adhesive part 17 ... Opening / closing valve 17a ... Operation part 18 ... Elastic body 18a ... Through hole 19 ... Piping 20 ... Opening valve 21, 22 ... Exhaust holes 21a, 22a ... Divided end portions

Claims (5)

[Claims] 1. A vacuum rotary machine comprising a rotor, a vacuum chamber formed inside the rotor coaxially with a rotation axis thereof, and an exhaust hole extending from the vacuum chamber to an end face of the rotor. A vacuum rotating machine characterized in that an exhaust hole opening / closing means capable of opening / closing the exhaust hole is provided in a part of the exhaust hole. 2. A pressing member as the exhaust hole opening / closing means, which is arranged so as to be operable in the rotor radial direction from the outer peripheral side of the rotor toward the exhaust hole, and a rotor radial inner end of the pressing member. When the pressing member is located at an outer position in the rotor radial direction, the exhaust hole is opened, and the pressing member is moved to an inner position in the rotor radial direction. The vacuum rotating machine according to claim 1, wherein the elastic body is configured to be pressed to expand its outer dimension and close the exhaust hole. 3. An opening / closing member arranged as the exhaust hole opening / closing means so as to be operable in the rotor radial direction from the outer peripheral side of the rotor toward the exhaust hole, and the opening / closing member in a part of the exhaust hole. When the opening / closing member is located at the outer side in the rotor radial direction, the exhaust hole is opened and moved to the inner side in the rotor radial direction. In this case, the vacuum rotating machine according to claim 1, wherein the vacuum rotating machine is configured to be in close contact with the recess to close the exhaust hole. 4. An on-off valve inserted in the rotor radial direction from the outer peripheral side of the rotor toward the exhaust hole is used as the exhaust hole opening / closing means, and the exhaust hole insertion portion of the on-off valve is The opening / closing valve is formed of an elastic body having a diameter smaller than that of the exhaust hole and having a through hole capable of communicating with the exhaust hole, and the opening / closing valve has a rotating shaft in a radial direction of the rotor and an opening position for communicating the through hole with the exhaust hole. 2. The vacuum rotating machine according to claim 1, wherein the vacuum rotating machine is configured to rotate between an elastic body and the closed position that closes the exhaust hole by bringing the elastic body into close contact with the inner surface of the exhaust hole. 5. The exhaust hole is partially divided into two parts, and the two divided ends are respectively drawn to the outer peripheral surface of the rotor, and the exhaust hole is provided in the outer peripheral part of the rotor. 2. A vacuum rotary machine according to claim 1, wherein a pipe connecting between the two divided end portions of the pipe is provided, and an opening / closing valve provided in a part of the pipe is used as the exhaust hole opening / closing means. .