JPH07270295A - Surface property testing device - Google Patents

Abstract

PURPOSE:To accurately measure a sample including one with a curvature using a surface property testing device for evaluating the surface property by scratching the sample surface. CONSTITUTION:An operation control part 3 transmits a control signal to a stage 11 for one-axis traveling and a stage 12 for inclination operation of a device 1 for traveling and performs the traveling control of the stage 11 for one-axis traveling and the rotation control of the stage 12 for inclination operation. By the traveling control, the stage 11 for one-axis traveling linearly moves in the direction marked by an arrow B and by the rotation control, the stage 12 for inclination move rotates in the direction marked by an arrow C. As a result, a stylus 21 scratches a curvature surface 41 of a sample 4 in the direction marked by an arrow D and draws a scratch marking on the surface, at the same time, outputs a signal corresponding to the surface property, and evaluates the surface property of the sample 4 according to the signal. The surface is scratched in a state where the curvature surface 41 of the sample 4 and the stylus 21 are constantly maintained to be a certain angle so that an accurate load can be transferred to the sample 4 and the measurement can be made accurately even if the sample 4 has a curvature.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface texture tester for scratching the surface of a sample to evaluate its surface texture, and is particularly used for evaluating tribological characteristics of the sample surface such as adhesion strength of thin film and friction characteristics of the sample. And a surface texture testing device.

[0002]

2. Description of the Related Art A method is known in which a scratch tester is used to measure the adhesion strength of a thin film applied to the surface of a sample and the frictional properties of the surface of the sample. This scratch testing machine
This is a method of scratching the surface of a sample while applying a load to a stylus (needle) and outputting a signal according to the surface texture of the sample.

FIG. 4 is a diagram schematically showing the structure of a conventional scratch tester. In the figure, a sample stage 53 is fixed on a uniaxial movement stage 52 which is provided so as to be movable in one direction. On the sample stage 53,
The sample 54 to be measured is fixed and set. The scratch tester 51 includes a cantilever 51b and a cartridge body 51c.
A stylus 51 made of diamond is attached to the tip of 1b.
a is attached.

The measurement is carried out by moving the uniaxial movement stage 52 in the direction of arrow L in the figure with the stylus 51a in contact with the surface of the sample 54. A load F is applied to the stylus 51a by using a load cell (not shown). The load F is applied so as to increase in proportion to the passage of time. When the sample 54 moves in the arrow L direction by the movement of the uniaxial movement stage 52, the stylus 51a scratches the surface of the sample 54, draws a scratch on the surface, and outputs a signal corresponding to the surface texture. To do. Cartridge body 51
c converts the signal into an electric signal. The surface quality of the sample 54 is evaluated by the electric signal.

FIG. 5 is a graph of measurement results by the scratch tester. The horizontal axis of the graph represents the load F and the vertical axis represents the electric signal S. When the stylus 51a scratches the surface of the sample 54, an electric signal S as shown in the figure is output. The load F applied to the stylus 51a gradually increases, and the electric signal S also increases as the load F increases.
When the load F reaches F ₁ and the surface structure of the sample 54 is destroyed, the change is detected by the stylus 51a, and the electric signal S rapidly increases at that time. By grasping this change, for example, the adhesion strength of the thin film forming the surface of the sample 54 can be evaluated.

FIG. 6 is a diagram showing a second example of a conventional scratch tester. The difference from the first example is that the tilt stage 56 is inserted between the uniaxial movement stage 55 and the sample stage 57. The tilt stage 56 tilts and sets the sample 54 on the sample stage 57. When the uniaxial movement stage 55 moves and the sample 54 moves in the same direction as the arrow M, since the sample 54 is inclined, the force with which the stylus 51a presses the sample 54 increases in proportion to the movement amount. That is, the load F applied from the stylus 51a to the sample 54 increases and changes with the passage of time without using a load cell,
The same measurement as the first example can be performed.

In the conventional scratch tester having such a configuration, when the surface of the sample 54 is flat, the load F applied from the stylus 51a to the surface of the sample 54 and the normal force acting on the surface of the sample 54 are In order to maintain a constant angle, the accurate load F is transmitted to the sample 54, and the measurement is also performed accurately.

[0008]

However, when the surface of the sample 54 has a curvature, the stylus 51a is used.
Therefore, the load F applied to the surface of the sample 54 and the normal force acting on the surface of the sample 54 constantly change, so that the accurate load F is not transmitted to the sample 54. Therefore, the conventional scratch tester has a problem that a sample having a curvature cannot be accurately measured.

The present invention has been made in view of the above points, and an object of the present invention is to provide a surface texture testing apparatus capable of accurately measuring even a sample having a curvature.

[0010]

In order to solve the above problems, the present invention provides a surface texture tester for scratching a sample surface to evaluate the surface texture thereof, which is provided for uniaxial movement so as to be movable in one direction. A stage, a tilting stage fixed to the uniaxial movement stage, having a rotating body part, and a stage surface formed on the rotating body part performing a tilting operation in response to rotation of the rotating body part; A sample stage that is fixed to the stage surface of the operation stage and sets a sample having a curved surface, a scratch test unit that scratches the curved surface of the sample using a stylus and outputs an electric signal according to the surface texture, and A control signal is sent to the uniaxial movement stage and the tilting movement stage to control the movement of the uniaxial movement stage and the tilting movement stage. And a stage operation control unit that causes the stylus to scan along a curved surface of the sample by controlling the rotation of the sample. To be done.

[0011]

The uniaxial movement stage is provided so as to be movable in one direction. Further, the tilting movement stage is fixed on the uniaxial movement stage. The tilting stage has a rotating body portion, and a stage surface formed on the rotating body portion performs a tilting operation in accordance with the rotation of the rotating body portion. The sample stage is fixed to the stage surface of the tilt motion stage. A sample having a curved surface is set on the sample stage. The scratch test section scratches the curved surface of the sample on the sample stage using a stylus and outputs an electric signal according to the surface texture.

The stage operation control section sends a control signal to the uniaxial movement stage and the tilt movement stage to control the movement of the uniaxial movement stage and the rotation of the tilt movement stage. By this movement control and rotation control, the sample moves so that the stylus scans along the curved surface of the sample.

That is, the sample surface and the stylus are always held at a constant angle even when the sample moves, and in this state, the stylus scratches the sample surface. Therefore, the angle between the load applied from the stylus to the sample surface and the normal force acting on the sample surface is also kept constant, and an accurate load is transmitted to the sample. Therefore, even if the sample has a curvature, the measurement can be performed with high accuracy.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram schematically showing a configuration of a surface texture testing device of the present invention, showing a side surface thereof. In the figure, a surface texture testing device of the present invention comprises a moving device 1 for moving a sample 4, and a scratch testing machine 2 for scratching the surface of the sample 4 with a stylus 21 and outputting an electric signal according to the surface texture. , And an operation control unit 3 that controls the operation of the moving apparatus 1.

The moving device 1 comprises a uniaxial moving stage 1
1. Tilt motion stage (angle correction goniometer stage)
12 and the sample stage 13. The uniaxial movement stage 11 is a stage that is provided so as to be movable in one direction, and its drive is performed by a stepping motor 110 provided on the end face side of the uniaxial movement stage 11.

The tilting movement stage 12 is composed of a support base portion 1
21 and a rotating body portion 122. The bottom surface side of the support base portion 121 is in contact with the upper end surface of the uniaxial movement stage 11 and screwed, and the uniaxial movement stage 11 and the tilting movement stage 12 are integrally fixed by the screwing.

The rotating body portion 122 has an arc surface (curvature surface) 1.
22a and a stage surface 122b formed facing the arc surface 122a, and has a columnar shape with an arc cross section as a whole. The arc surface 122a is the support base portion 1
It is rotatably attached to the 21 side. A scale 122c is engraved on the arc surface 122a.
The rotation angle of the rotating body portion 122 can be known from c. The rotary body portion 122 is rotationally driven by the stepping motor 1 provided on the end face side of the support base portion 121.
The rotating body portion 122 rotates in response to the rotation of the stepping motor 120, and the stage surface 122b tilts in response to the rotation.

The sample stage 13 is placed on the stage surface 122b.
Are fixed together with screws. A sample 4 having a curved surface 41 is set on the sample stage 13. The setting is such that the deepest portion (central portion) 41a of the curved surface 41 of the sample 4 is on the normal line N ₀ at the deepest portion (central portion) 122d of the curved surface 122a in the state where the rotating body portion 122 is not rotating. To be located.

The scratch tester 2 includes a cantilever 22.
And a cartridge body 23, and the stylus 21 made of diamond is attached to the tip of the cantilever 22.
Is attached. The stylus 21 is placed so as to contact the curved surface 41 of the sample 4 set on the sample stage 13. A load F is applied to the stylus 21 in the direction of arrow A using a load cell (not shown). The load F is applied so as to increase in proportion to the passage of time. When the sample 4 moves in response to the linear movement of the uniaxial movement stage 11 and the rotation of the tilting movement stage 12, the stylus 21 scratches the curvature surface 41 of the sample 4 and the While drawing scratches, it outputs a signal according to the surface texture. The cartridge body 23 converts the signal into an electric signal. The surface quality of the sample 4 is evaluated by the electric signal.

The operation control section 3 sends a control signal to the uniaxial movement stage 11 and the tilting movement stage 12 to control the movement of the uniaxial movement stage 11 and the tilting movement stage 1.
2 rotation control is performed. The movement of the uniaxial movement stage 11 and the rotation of the tilt movement stage 12 are performed in the same direction,
By the movement control of the uniaxial movement stage 11, the uniaxial movement stage 11 linearly moves in the arrow B direction, and by the rotation control of the tilt movement stage 12, the tilt movement stage 12 rotates in the arrow C direction. As a result, stylus 2
1 scratches the curvature surface 41 of the sample 4 in the direction of arrow D. This movement control and rotation control will be described with reference to FIG.

FIG. 2 is an illustration of movement control and rotation control. In the figure, it is assumed that the sample 4 having the curvature surface 41 having the radius of curvature R (mm) is scratched in the direction of arrow D at the movement distance X (mm) and the movement time Y (min). here,
The moving speed of the uniaxial moving stage 11 in the direction of arrow B is V
1 (μm / sec), V1, Y and X have
Since 1000V1 × 60Y = X is satisfied, the moving speed V1 of the uniaxial moving stage 11 is expressed by the following equation (3).

[0022]

V1 = (1/60000) · X / Y (3) On the other hand, the rotation angle of the sample 4 around the center of curvature O when the sample 4 moves X (mm) is α ( Degree), α / 36
Since 0 = X / 2πR holds, α = 360 · X / 2π
It becomes R. Since this angle α is rotated at Y (min), the rotation speed V2 (degree / se of the tilt movement stage 12 is
c) is expressed by the following equation (4).

[0023]

## EQU00004 ## V2 = (360.X / 2.pi.R) / (Y.60) (4) Thus, the movement distance X when scratching the sample 4 is:
Based on the moving time Y and the radius of curvature R of the sample 4, the moving speed V1 of the uniaxial moving stage 11 and the tilting stage 12
The rotation speed V2 of Numerical examples of each of the above data include, for example, the radius of curvature R of the sample 4 = 30 mm, the moving distance X of the uniaxial moving stage 11 = 6 mm, the moving time of 5 minutes, the moving speed of 20 μm / sec, and the moving time of the tilting moving stage 12. The rotation speed is 0.04 degrees / sec for 5 minutes.

By inputting each of these data to the operation control unit 3, the speed of the sample 4 with respect to the stylus 21 is kept constant, and the stylus 21 scans along the curved surface 41 of the sample 4 and scratches the curved surface 41. To do. This scanning is performed in a state where the curved surface 41 of the sample 4 and the stylus 21 are always held at a constant angle. Therefore, the angle between the load F applied from the stylus 21 to the curved surface 41 of the sample 4 and the normal force acting on the curved surface 41 of the sample 4 is also kept constant, and an accurate load is transmitted to the sample 4. . Therefore, even if the sample 4 has a curvature, the measurement can be performed with high accuracy.

FIG. 3 is a diagram showing a second embodiment of the present invention. The same components as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted. The difference from the first embodiment is that in the moving device 1a, the uniaxial moving stage 1
1 and the tilting movement stage 12 between the tilting stage 1
This is the point where 5 is interposed. The tilting stage 15 is screwed to both the uniaxial movement stage 11 and the tilting movement stage 12, and is fixed integrally.

The setting of the sample 40 on the sample stage 13 is performed in the same manner as in the first embodiment. That is, the sample 4 is placed on the normal line N ₁ at the deepest portion 122d of the curvature surface 122a in a state where the rotating body portion 122 is not rotating.
It is performed so that the deepest part 410a of the 0 curvature surface 410 is located.

In the present embodiment, since the tilting stage 15 is interposed, the sample 40 on the sample stage 13 is already tilted and set when the tilting movement stage 12 is in the initial position where it does not rotate. When the sample 40 moves in the direction of the arrow G in response to the movement of the uniaxial movement stage 11 in the direction of the arrow E, since the sample 40 is inclined, the force with which the stylus 21 presses the sample 40 is proportional to the amount of movement thereof. Increase. That is, the stylus 21 to the sample 4
The load F applied to 0 increases and changes with the passage of time without using a load cell, and the same measurement as in the first embodiment can be performed. This change in the load F is expressed using the following equation (5).

[0028]

[Formula 5] F = k · V · Y · tan θ (5) where k: elastic coefficient of cantilever 22 V: sample moving speed Y: sample moving time θ: tilt angle of tilt stage 15 tilt The inclination angle θ of the stage 15 is set to, for example, about 3 degrees, and if it is desired to increase the degree of change of the load F,
The inclination angle θ may be increased, and conversely, when the degree of change is desired to be smaller, the inclination angle θ may be decreased.

Although the initial value of the load F is set to zero in the above description, a constant load F may be applied from the outside. The operation control section 3 sends a control signal to the uniaxial movement stage 11 and the tilting movement stage 12 to control the movement of the uniaxial movement stage 11 and the rotation of the tilting movement stage 12 as in the first embodiment. Take control.
By the movement control of the uniaxial movement stage 11, the uniaxial movement stage 11 linearly moves in the arrow E direction. By this movement control, the entire moving device 1a moves linearly.
Further, the rotation control of the tilt movement stage 12 causes the tilt movement stage 12 to rotate in the arrow H direction. As a result, the stylus 21 scans along the curved surface 410 of the sample 40 in the direction of arrow I and scratches.

Also in the movement control and the rotation control in the case of the present embodiment, the above equations (1) and (2) are established.
Here, if the numerical example of each data is raised, for example, the sample 40
Radius of curvature R = 50 mm, moving distance X of uniaxial moving stage 11 = 5 mm, moving time 5 minutes, moving speed 16.7 μ
m / sec, the movement time of the tilting movement stage 12 is 5 minutes,
The rotation speed is 0.02 degrees / sec.

Thus, even in the case of the surface texture tester of the type in which the load F is changed by setting the sample 40 at an angle, the stylus 21 is moved accurately along the curved surface 410 of the sample 40. Therefore, the sample 40 having a curvature can be measured with high accuracy.

[0032]

As described above, according to the present invention, the uniaxial movement stage and the tilting movement stage are used together to move the sample. Therefore, the angle formed between the sample surface and the stylus can be changed. At any time, it can be held constant at all times and an accurate load can be transmitted to the sample, and even a sample having a curved surface can be measured with the same high precision as in the case of a flat sample.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing a configuration of a surface texture testing device of the present invention.

FIG. 2 is an explanatory diagram of movement control and rotation control.

FIG. 3 is a diagram showing a second embodiment of the present invention.

FIG. 4 is a diagram schematically showing a configuration of a conventional scratch tester.

FIG. 5 is a graph of measurement results by a scratch tester.

FIG. 6 is a diagram showing a second example of a conventional scratch tester.

[Explanation of symbols]

1, 1a Moving device 2 Scratch tester 3 Operation control unit 4, 40 Sample 11 Uniaxial moving stage 12 Tilt operating stage (angle correcting goniometer stage) 13 Sample stage 15 Tilt stage 21 Stylus 22 Cantilever 23 Cartridge body 41, 410 curvature surface 41a, 410a deepest part of curvature surface 110,120 stepping motor 121 support base part 122 rotor part 122d rotor part deepest part of curvature surface

Claims (5)

[Claims] 1. A surface texture testing apparatus for scratching a surface of a sample to evaluate the surface texture thereof, comprising: a uniaxial moving stage movably provided in one direction; and a rotator part fixed to the uniaxial moving stage. And a tilting stage having a stage surface formed on the rotator part that tilts in response to rotation of the rotator part, and a sample having a curvature surface fixed to the stage surface of the tilting stage. A sample stage for setting, a scratch tester for scratching the curved surface of the sample using a stylus and outputting an electric signal according to the surface texture, and sending a control signal to the uniaxial moving stage and the tilting stage. Then, the sample is moved by controlling the movement of the uniaxial movement stage and the rotation control of the tilt movement stage. , Surface texture test apparatus characterized by having a stage movement control unit to perform scanning along the curvature surface of the sample to the stylus. 2. The sample stage is arranged such that the deepest part of the curved surface of the sample is located on the normal line of the deepest part of the curved surface of the rotary body part when the rotary body part is not rotating. The surface texture test apparatus according to claim 1, wherein the sample is set in the sample. 3. The surface texture testing apparatus according to claim 1, wherein the movement of the uniaxial movement stage and the rotation of the rotating body portion of the tilt movement stage are performed in the same direction. 4. The stage operation control unit defines the stage for uniaxial movement and the stage for tilting movement by the following expression (1).
2. The surface texture testing device according to claim 1, wherein the surface texture testing device is operated at a constant speed represented by (2) and (2). [Equation 1] V1 = (1/60000) · X / Y ···· (1) [Equation 2] V2 = (360 · X / 2πR) / (Y · 60) ··· (2) Here, V1: moving speed of the uniaxial moving stage (μm /
sec) V2: Rotational speed of the tilting stage (degrees / sec) X: Moving distance of sample (mm) Y: Moving time of sample (min) R: Radius of curvature of sample (mm) 5. A surface texture tester for scratching a sample surface to evaluate the surface texture thereof, comprising: a uniaxial moving stage movably provided in one direction; and a uniaxial moving stage fixed at a predetermined angle. An inclined stage having an inclined upper end surface, and a stage surface fixed to the upper end surface of the inclined stage and having a rotating body portion and formed on the rotating body portion perform an inclining operation according to the rotation of the rotating body portion. A tilting stage, a sample stage that is fixed to the stage surface and sets a sample having a curved surface, and a scratch test unit that scratches the curved surface of the sample using a stylus and outputs an electric signal according to the surface texture. And a control signal is sent to the uniaxial movement stage and the tilt movement stage to control movement of the uniaxial movement stage. And a stage operation control unit that moves the sample by controlling the rotation of the tilt operation stage and causes the stylus to scan along the curved surface of the sample. apparatus.