JPH07262949A - Ion source apparatus - Google Patents

Abstract

PURPOSE:To simplify the structure of an ion source apparatus, make the apparatus compact and light, and make cleaning work of electrodes easy by fixing an O-ring put between respective polymerized synthetic resin materials and each synthetic resin material unitedly by a screw. CONSTITUTION:Respectively circular supporting frames 24, 25, 26 are fixed by screws in the circumferential part of an accelerating electrode 7, a decelerating electrode 8, and a groundging electrode 9 which compose an ion extracting electrode. Lead wires 27, 28, 29 connected with the supporting frames 24-26, resp. and current leading-in terminals 30, 31, 32 are fixed in respective supporting frame one by one by hardening circular synthetic resin materials 33, 34, 35. At that time the synthetic resin material for the electrode 7 integrally fixes a water cooling pipe 16 to cool the electrode. O-rings 36, 37 are then put between the neighboring synthetic resin materials 33 and 34, and 34 and 35 and each synthetic resin materials 33-35 are polymerized and fixed integrally by a screw 38. The synthetic resin materials 33-35 are put air-tightly between a flange of a box body 39 of an arc chamber and a box body 40 of a film.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ion source device which supports a plurality of ion extracting electrodes.

[0002]

2. Description of the Related Art A circuit configuration of a conventional ion source device will be described with reference to FIG. Reference numeral 1 is an arc chamber, 2 is two current introducing terminals penetrating a housing 3 of the arc chamber 1, 4 is a filament connected to both terminals 2 inside the housing 3, and 5 is both terminals 2 outside the housing 3. Filament power supply connected to, 6 is +
The pole is connected to the housing 3, and the pole is the filament electrode 5.
It is an arc power supply connected to the pole.

Reference numerals 7, 8 and 9 are accelerating electrodes, decelerating electrodes, and ground electrodes constituting the ion extracting electrode 10, and 11 is a positive electrode having a resistance of 1.
Is an accelerating power source connected to the accelerating electrode 7 via 2,
The pole is grounded, and the positive pole is connected to the negative pole of the arc power supply 6. Reference numeral 13 is a deceleration power source in which the-pole is connected to the deceleration electrode 8 and the + pole is grounded.

A heating current is supplied to the filament 4 from the filament power source 5 and an arc voltage is applied from the arc power source 6, whereby the thermoelectrons emitted from the filament 4 are accelerated and the gas in the arc chamber 1 is ionized. Then, plasma is generated. Further, an ion beam is extracted from the plasma by the electric field formed by the acceleration electrode 7, the acceleration power source 11, the deceleration electrode 8, the deceleration power source 14, and the ground electrode 9.

Next, the supporting portion of the ion extracting electrode 10 shown in FIG. 2 will be described with reference to FIG. Reference numeral 14 denotes an annular acceleration flange, which supports the acceleration electrode 7 via a collar-shaped acceleration electrode support frame 15. Reference numeral 16 denotes an electrode water cooling pipe for cooling the acceleration electrode 7, which is supported by the acceleration flange 14.
Reference numeral 17 denotes a ground electrode support frame that supports the ground electrode 9, and 18 denotes an insulating spacer provided between the ground electrode support frame 17 and the deceleration electrode 8, which supports the deceleration electrode 8.

Reference numeral 19 is a ground flange that supports the ground electrode support frame 17, 20 is an insulating spacer that fixes the acceleration flange 14 and the ground flange 19 via O-rings 21 on both sides, and 22 is provided so as to penetrate the ground flange 19. It is a current introduction terminal and is connected to the deceleration electrode 8 via the lead wire 23.

[0007]

The above-mentioned conventional supporting means have the problems that the structure is complicated, that they are large and they are heavy. The present invention has been made in consideration of the above points, and an object of the present invention is to provide an ion source device having a simple structure, a small size, a small weight, and an easy cleaning operation for each electrode.

[0008]

In order to solve the above-mentioned problems, the ion source device of the present invention comprises a plurality of electrodes for extracting ions, a support frame fixed to the peripheral portion of each electrode, For each support frame, the support frame, the lead wire connected to the support frame, and the annular synthetic resin in which the current introduction terminal connected to the lead wire is fixed and fixed, and each of the above-mentioned synthesized composites It is provided with an O-ring interposed between the resins and a screw integrally fixing the synthetic resins.

[0009]

In the ion source device of the present invention configured as described above, the support frame is fixed to the peripheral portions of the plurality of electrodes for extracting ions, and each support frame is connected to the support frame and the support frame. The lead wire and the current introducing terminal connected to the lead wire,
It is fixed by being fixed by a ring-shaped synthetic resin, and each synthetic resin is O
Since it is polymerized via a ring and each synthetic resin is fixed integrally with a screw, it does not require a flange and insulating spacer as well as various set screws as in the past, and the structure is simple, compact and lightweight. Yes, and very easy to make. Furthermore, by removing the screws, each synthetic resin,
That is, since each electrode is disassembled and can be taken out independently, cleaning work of each electrode is facilitated.

[0010]

EXAMPLE One example will be described with reference to FIG.
In the figure, the same reference numerals as those in FIG. 2 and FIG. 3 indicate the same or corresponding ones, and annular supporting frames 24, 24 are formed on the peripheral portions of the accelerating electrode 7, the decelerating electrode 8 and the ground electrode 9 which form the ion extracting electrode 10, 25, 26 are fixed by screws, and each support frame 24, 25, 26 has its own support frame 24,
25, 26, lead wires 27, 28, 29 connected to the support frames 24, 25, 26, and current introduction terminals 30, 3
1 and 32 are fixed and fixed by annular synthetic resins 33, 34 and 35. At this time, the synthetic resin 33 of the acceleration electrode 7
Also fixes the water cooling pipe 16 for cooling the acceleration electrode 7 integrally.

Next, the adjacent synthetic resins 33, 34, 3
O-rings 36 and 37 are interposed between 4 and 35, and the synthetic resins 33, 34 and 35 are superposed and fixed integrally by screws 38. And each synthetic resin 33,34,3 which became one
5 is airtightly interposed between the flange of the casing 39 of the arc chamber and the casing 40 for film formation.

[0012]

Since the present invention is configured as described above, it has the following effects. The ion source device of the present invention includes a plurality of electrodes 7, 8, 9 for extracting ions.
Support frames 24, 25, 26 are fixed to the peripheral portions of the support frames 24, 25, 26, respectively.
5, 26, the lead wires 27, 28, 29 connected to the support frames 24, 25, 26, and the current introducing terminals 30, 31, 32 connected to the lead wires 27, 28, 29 are annular composites. The resin 33, 34, 35 is fixed and fixed, each synthetic resin 33, 34, 35 is polymerized via the O-rings 36, 37, and each synthetic resin 33, 34, 35 is integrally fixed by a screw 38. Therefore, it does not require flanges, insulating spacers, and various setscrews as in the past.
It has a simple structure, is small and lightweight, and is extremely easy to manufacture. By removing the upper screw 38, each synthetic resin 33, 34, 35, that is, each electrode 7,
Since the electrodes 8 and 9 are disassembled and can be taken out independently, the cleaning work of the electrodes 7, 8 and 9 can be easily performed.

[Brief description of drawings]

FIG. 1 is a cutaway front view of an embodiment of the present invention.

FIG. 2 is a circuit configuration diagram of a conventional example.

FIG. 3 is a cut front view of a conventional example.

[Explanation of symbols]

 7 Acceleration Electrode 8 Deceleration Electrode 9 Grounding Electrode 24, 25, 26 Support Frame 27, 28, 29 Lead Wires 30, 31, 32 Current Introducing Terminals 33, 34, 35 Synthetic Resin 36, 37 O-ring 38 Screw

Claims (1)

[Claims] 1. A plurality of electrodes for extracting ions, a support frame fixed to a peripheral portion of each electrode, each support frame, the support frame, and a lead wire connected to the support frame. , An annular synthetic resin in which the current introducing terminal connected to the lead wire is fixed and fixed, an O-ring interposed between the polymerized synthetic resins, and a screw integrally fixing the synthetic resin. And an ion source device.