CN108281340A - Direct-current discharge ion source - Google Patents
Direct-current discharge ion source Download PDFInfo
- Publication number
- CN108281340A CN108281340A CN201810235184.8A CN201810235184A CN108281340A CN 108281340 A CN108281340 A CN 108281340A CN 201810235184 A CN201810235184 A CN 201810235184A CN 108281340 A CN108281340 A CN 108281340A
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- CN
- China
- Prior art keywords
- cooling wall
- ion source
- cathode
- direct
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Particle Accelerators (AREA)
Abstract
The present invention provides a kind of direct-current discharge ion source, including：Mounting flange, the air inlet pipe across the mounting flange, cooling water pipe and the discharge cavity in the air inlet pipe, cooling water pipe end is set, the discharge cavity includes with slit anode canister, set on the cathode with slit anode canister both ends and the cooling wall being connect with cooling water pipe, cathode connection device is embedded on the cooling wall, the band slit anode canister both sides are embedded in the cooling wall of top and in the cooling wall of lower part respectively, and gas is imported by the air inlet pipe and is closed in the discharge cavity.Electronics is after emission of cathode, certain initial velocity is obtained by the acceleration of electric field on negative and positive clearance between poles, the invention enables electronics to greatly increase in the travel before withering away of being rebuffed, improve the probability of each electronics and space neutral particle encounter, the concentration for improving plasma in discharge cavity allows this discharging structure also can regular picture under very low air pressure.
Description
Technical field
The present invention relates to the small-sized charged particle emitter of ultrahigh vacuum equipment more particularly to a kind of direct-current discharge ions
Source.
Background technology
Particle accelerator is a kind of device being used for accelerating charged particle, accelerates obtained high energy band by particle accelerator
Charged particle is used by people to production isotope, generates X-ray, particle photograph, research atomic nucleus, research elementary particle and therapeutic treatment
Deng.Source of the particle source as accelerator charged particle, the quality of its performance can to accelerator intensity, beam emittance,
Beam loss, charged particle service life etc. generate strong influence.The one kind of ion source as particle source, they are utilized for accelerating
Device provides ion.Cyclotron makes charged particle make circumnutation using magnetic field, accelerates repeatedly through high-frequency electric field during exercise
Device, be the important instrument in high-energy physics and medical field.
According to different use condition and purposes, a plurality of types of ion sources are had been developed that.There is arc to put using wide
Ionize component, PIG ion sources, double-plasma ion source etc..For heavy ion avcceleration, more ripe has electron cyclotron resonace
Ion source (ECR) and electron beam ion source (EBIS).After this item content of the patent is direct-current discharge ion source and magnetic field combination
As one kind of Penning ion source, it is applied in cyclotron.But the existing general volume of ion source is larger and structure is multiple
It is miscellaneous, fail to be widely popularized.
Invention content
According to technical problem set forth above, and provide it is a kind of simple and compact for structure, it is convenient for installation and maintenance and can provide surely
Surely the direct-current discharge ion source discharged.The present invention tries hard to be the anticathode distance of reduction, to be positioned in permanent magnet, and
Penning discharge occurs if the magnetic fields by magnet, the density of plasma can increase sharply.The skill that the present invention uses
Art means are as follows：
A kind of direct-current discharge ion source, including：Mounting flange, the air inlet pipe across the mounting flange, cooling water pipe and
Discharge cavity in the air inlet pipe, cooling water pipe end is set, and the discharge cavity includes band slit anode canister, it is narrow to be set to the band
The cathode at seam anode canister both ends and cooling wall connect with cooling water pipe, it is described embedded with cathode connection device on the cooling wall
Band slit anode canister both sides are embedded in respectively in the cooling wall of top and in the cooling wall of lower part, and gas is imported by the air inlet pipe and quilt
It is closed in the discharge cavity, tracheae gos deep into cooling wall, and cooling wall is equipped with intake channel.
Further, the top cooling wall is fixed in upper cover plate by screw, and the lower part cooling wall is solid by screw
It is connected to lower cover, the top cooling wall is fixed with the lower part cooling wall by positioning pin and three positioning screws.
Further, the cathode connection device includes cathode connection screw and cathode terminal, the cathode connection spiral shell
Inner ceramic washer and external ceramic washer are installed, the cathode terminal is set to the external ceramic between nail and cooling wall
On the outside of washer, outer zigzag lock washer is installed on the cathode connection screw., binding post, which connects wires to be powered, passes through wiring spiral shell
Nail passes to cathode.
Further, it is equipped with adjust pad among the cathode and the inner ceramic washer.
Further, supporting rod is equipped between the cooling wall and the mounting flange.
Further, the supporting rod is four, wherein top cooling wall is goed deep into two supporting rod one end, the other end with it is solid
Determine flange welding, another two supporting rod one end are goed deep into the cooling wall of lower part, and the other end is welded with mounting flange, connects the fixation
The cooling water pipe is installed among two supporting rods of flange and top cooling wall, the air inlet is installed between two cooling water pipes
Pipe；It connects and the cooling water pipe, two cooling water pipes is installed among two supporting rods of the mounting flange and lower part cooling wall
Between the air inlet pipe is installed.
Further, the band slit anode canister is oxygen-free copper anode canister, is cylinder table inside the band slit anode canister
Face is equipped with slit side and is mounted on outside.
The present invention has the following advantages：
1, the device build is smaller, saves space, and easy to use, reduction vacuumizes consumed energy；
2, the apparatus structure is simple, and easy to operate automation easy to implement, without filament, service life is long, and it discharges
Chamber is divide into upper part and lower part, and is easy for installation and maintenance；
3, magnetic field and anode electric moter voltage adjustable range are wide, and are in lower voltage range, can effectively avoid process
The ray radiation of middle generation pollutes, and ensures worker safety；
4, the not additional heat source of the device cathode, structure is simpler compact, sustainable reliable work；
5, it is used in accelerator, the line injected system of no complexity, gas ionization rate is higher.
The present invention can be widely popularized in high-energy physics and medical field based on the above reasons.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to do simply to introduce, it should be apparent that, the accompanying drawings in the following description is this hair
Some bright embodiments for those of ordinary skill in the art without having to pay creative labor, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is schematic structural view of the invention.
Fig. 2 is discharge cavity schematic diagram of the present invention.
Fig. 3 is discharge cavity part of the present invention half-section diagram.
Fig. 4 is sectional view of the present invention along anode canister axis direction.
Fig. 5 is sectional view of the present invention perpendicular to anode canister axis direction.
In figure：1-discharge cavity；2-band slit anode canisters；3-cathodes；4-upper cover plates；5-top cooling walls；Under 6-
Portion's cooling wall；7-lower covers；8-supporting rods；9-cooling water pipes；10-air inlet pipe；11-mounting flanges；12-positioning spiral shells
Nail；13-cathode connection screws；14-cathode terminals；15-external ceramic washers；16-inner ceramic washers；17-adjustment
Gasket；18-outer zigzag lock washers；19-holding screws.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
The every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
As shown in Figs. 1-5, a kind of direct-current discharge ion source, including：Mounting flange 11, across the mounting flange 11 into
Tracheae 10, cooling water pipe 9 and the discharge cavity 1 in the air inlet pipe 10,9 end of cooling water pipe is set, the discharge cavity 1 includes band
Slit anode canister 2, set on the cathode 3 with slit anode canister both ends and the cooling wall being connect with cooling water pipe 9, the cooling
Cathode connection device is embedded on wall, 2 both sides of band slit anode canister are embedded in respectively in top cooling wall 5 and lower part cooling wall 6
Interior, gas is imported by the air inlet pipe 10 and is closed in the discharge cavity 1.
The top cooling wall 5 is fixed in upper cover plate 4 by holding screw 19, and the lower part cooling wall 6 passes through clamp screw
Nail 19 is fixed in lower cover, and the top cooling wall 5 is consolidated with the lower part cooling wall 6 by positioning pin and positioning screw 12
It is fixed.
The cathode connection device includes cathode connection screw 13 and cathode terminal 14, the cathode connection screw 13 with
Inner ceramic washer 16 and external ceramic washer 15 are installed, cathode terminal 14 is set to the external ceramic pad between cooling wall
On the outside of circle 15, outer zigzag lock washer 18 is installed on the cathode connection screw 13.
It is equipped with adjust pad 17 among the cathode 3 and the inner ceramic washer 16.
Supporting rod 8 is equipped between the cooling wall and the mounting flange 11.
The supporting rod 8 is four, wherein top cooling wall 5, the other end and mounting flange are goed deep into two 8 one end of supporting rod
11 welding, 8 one end of another two supporting rods are goed deep into lower part cooling wall 5, and the other end is welded with mounting flange 11, connects the fixation
The cooling water pipe 9 is installed among flange 11 and two supporting rods 8 of top cooling wall 5, institute is installed between two cooling water pipes 9
State air inlet pipe 10；It connects and the cooling water pipe 9 is installed among the mounting flange 11 and two supporting rods 8 of lower part cooling wall 6,
The air inlet pipe 10 is installed between two cooling water pipes 9.
The band slit anode canister 2 is oxygen-free copper anode canister, and 2 inside of the band slit anode canister is periphery, is equipped with
Slit side is mounted on outside.
Concrete operations：The flanged joint of the mounting flange 11 and ultravacuum chamber of direct-current discharge ion source, by direct-current discharge
Ion source is put into the vacuum chamber for being equipped with permanent magnet.Direct-current discharge ion source be it is a kind of it is reciprocal concussion electron excitation electronics touch
Hit type ion source.It is filled with inside direct-current discharge ion source and waits for ionized gas, when electric discharge, the high-intensity magnetic field of steady is from direct-current discharge ion
Source axially through being subject to discharge voltage between cathode 3 and anode canister 2.Electronics is after the transmitting of cathode 3, on negative and positive clearance between poles
Certain initial velocity is obtained by the acceleration of electric field.Movement of the electronics in anode canister 2 can be decomposed into perpendicular to anode
The movement of 2 axis of cylinder and the movement for being parallel to 2 axis of anode canister：On the direction of 2 axis of anode canister, electronics is by the moon
It is spinned wherein movement by the constraint of electric field, magnetic field in the region of discharge of anode composition；Meanwhile being parallel to anode canister 2
On axis direction, electronics is shaken by axial electric field force effect in cathode 3 and between cathode 3 back and forth.Therefore, electronics is touching
Travel before wall is withered away greatly increases, and improves the probability of each electronics and space neutral particle encounter, improves electric discharge
The concentration of plasma in chamber 1 so that this discharging structure also can regular picture under very low air pressure.Gas in discharge cavity 1
Pressure and plasma density are all higher than the vacuum environment in outside.That there are one open area and anode canister 2 is narrow for 1 side wall of discharge cavity
Stitch position consistency.Therefore, the ion in anode canister 2 can project discharge cavity 1 along slit.If being not added with magnetic field direct-current discharge ion
Source can also discharge, and the density of an ion beam increases after adding magnetic field.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Present invention has been described in detail with reference to the aforementioned embodiments for pipe, it will be understood by those of ordinary skill in the art that：Its according to
So can with technical scheme described in the above embodiments is modified, either to which part or all technical features into
Row equivalent replacement；And these modifications or replacements, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (7)
1. a kind of direct-current discharge ion source, including：Mounting flange, the air inlet pipe across the mounting flange, cooling water pipe, it is special
Sign is, further includes：Be set to the air inlet pipe, cooling water pipe end discharge cavity, the discharge cavity include band slit anode
Cylinder is embedded with the moon on the cathode with slit anode canister both ends and the cooling wall being connect with cooling water pipe, the cooling wall
Pole termination, the band slit anode canister both sides are embedded in the cooling wall of top and in the cooling wall of lower part respectively, and gas passes through institute
Air inlet pipe is stated to import and be closed in the discharge cavity.
2. direct-current discharge ion source according to claim 1, which is characterized in that the top cooling wall passes through holding screw
It is fixed in upper cover plate, the lower part cooling wall is fixed in lower cover, the top cooling wall and the lower part by holding screw
Cooling wall is fixed by positioning pin and positioning screw.
3. direct-current discharge ion source according to claim 1, which is characterized in that the cathode connection device includes that cathode connects
Line screw and cathode terminal are equipped with inner ceramic washer and external ceramic pad between the cathode connection screw and cooling wall
Circle, the cathode terminal are set on the outside of the external ceramic washer, and outer zigzag lock is equipped on the cathode connection screw
Tight washer.
4. direct-current discharge ion source according to claim 3, which is characterized in that the cathode and the inner ceramic washer
Centre is equipped with adjust pad.
5. direct-current discharge ion source according to claim 1, which is characterized in that the cooling wall and the mounting flange it
Between be equipped with supporting rod.
6. direct-current discharge ion source according to claim 5, which is characterized in that the supporting rod is four, wherein two
Supporting rod one end is goed deep into the cooling wall of top, and the other end is welded with mounting flange, and lower part cooling is goed deep into another two supporting rod one end
In wall, the other end is welded with mounting flange, is connected and is installed institute among two supporting rods of the mounting flange and top cooling wall
Cooling water pipe is stated, the air inlet pipe is installed between two cooling water pipes；Connect two of the mounting flange and lower part cooling wall
The cooling water pipe is installed among supporting rod, the air inlet pipe is installed between two cooling water pipes.
7. direct-current discharge ion source according to claim 1, which is characterized in that the band slit anode canister is oxygen-free copper sun
Pole cylinder, the band slit anode canister inside is periphery, is equipped with slit side and is mounted on outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810235184.8A CN108281340A (en) | 2018-03-21 | 2018-03-21 | Direct-current discharge ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810235184.8A CN108281340A (en) | 2018-03-21 | 2018-03-21 | Direct-current discharge ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108281340A true CN108281340A (en) | 2018-07-13 |
Family
ID=62810195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810235184.8A Withdrawn CN108281340A (en) | 2018-03-21 | 2018-03-21 | Direct-current discharge ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108281340A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111809153A (en) * | 2020-06-18 | 2020-10-23 | 中国科学院高能物理研究所 | Slit coating device |
-
2018
- 2018-03-21 CN CN201810235184.8A patent/CN108281340A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111809153A (en) * | 2020-06-18 | 2020-10-23 | 中国科学院高能物理研究所 | Slit coating device |
| CN111809153B (en) * | 2020-06-18 | 2024-04-02 | 中国科学院高能物理研究所 | Slit coating device |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180713 |
|
| WW01 | Invention patent application withdrawn after publication |