JPH0725721Y2 - ローダ・アンローダ装置 - Google Patents
ローダ・アンローダ装置Info
- Publication number
- JPH0725721Y2 JPH0725721Y2 JP1987137386U JP13738687U JPH0725721Y2 JP H0725721 Y2 JPH0725721 Y2 JP H0725721Y2 JP 1987137386 U JP1987137386 U JP 1987137386U JP 13738687 U JP13738687 U JP 13738687U JP H0725721 Y2 JPH0725721 Y2 JP H0725721Y2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- stocker
- control unit
- head
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012546 transfer Methods 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 210000000078 claw Anatomy 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004886 head movement Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987137386U JPH0725721Y2 (ja) | 1987-09-08 | 1987-09-08 | ローダ・アンローダ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987137386U JPH0725721Y2 (ja) | 1987-09-08 | 1987-09-08 | ローダ・アンローダ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6442475U JPS6442475U (enrdf_load_stackoverflow) | 1989-03-14 |
| JPH0725721Y2 true JPH0725721Y2 (ja) | 1995-06-07 |
Family
ID=31398763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987137386U Expired - Lifetime JPH0725721Y2 (ja) | 1987-09-08 | 1987-09-08 | ローダ・アンローダ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725721Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2853925B2 (ja) * | 1991-07-19 | 1999-02-03 | 三菱電機株式会社 | Ｉｃテスト装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4817273A (en) * | 1987-04-30 | 1989-04-04 | Reliability Incorporated | Burn-in board loader and unloader |
-
1987
- 1987-09-08 JP JP1987137386U patent/JPH0725721Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6442475U (enrdf_load_stackoverflow) | 1989-03-14 |
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