JPH07248212A - Instrument for measuring three-dimensional shape - Google Patents

Abstract

PURPOSE:To improve the measuring accuracy and to shorten a required measuring time by setting a photographing means within a plane including a widthwise direction of a luminous flux on a slit so that a photodetecting part thereof is faced to a to-be-measured object. CONSTITUTION:A light source device 5 is arranged so that a widthwise direction of a slit-like light 51 is at right angles to a transferring direction of a conveyor 4. A camera 2 is set within a plane 1a including the widthwise direction of the slit light 51, with a photodetecting part 21 faced to a to-be-measured object 3. The camera 2 outputs an image signal 2a corresponding to a reflecting light of the slit light 51 reflected by the object 3 and entering the photodetecting part 21. Reflecting mirror constitutional bodies 6A, 6B guides the reflecting lights 51A, 51B reflected from the object 3 so that the whole of an image of the object 3 shown at each reflecting mirror 62A, 62B is detected by the photodetecting part 21 of the camera 2. Accordingly, an integral image of the object which is at the opposite side to the plane is obtained by the camera 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring a three-dimensional shape of an object based on an image, and relates to an improved structure for improving measurement performance.

[0002]

2. Description of the Related Art As one of methods for measuring a three-dimensional shape of an object to be measured (hereinafter sometimes simply referred to as an object) based on an image widely used in industry,
There is a method called a binocular stereoscopic method (stereo method) in which two ITV cameras and other image pickup means (hereinafter, sometimes simply referred to as cameras) are installed at a known angle with respect to an object and imaged. . Find corresponding points between two images,
This is a method of calculating the height of the point based on the difference in the position of the point in each image. Further, there is a light projection method as a method in which one of the above two cameras is replaced with a light source. A semiconductor laser or the like is used as the light source, and a spot-shaped light beam or a slit-shaped light beam (hereinafter, simply referred to as slit light) is used as the shape of the light beam emitted from the light source to move or This is a method of taking an image while rotating and measuring the entire shape. In any case, the well-known principle of triangulation is used as the principle for calculating the height and depth of an object. However, in the case of the stereo method, it may be difficult to detect the corresponding points, so in many conventional cases, the light section method is used, and slit light is used as the light source to detect the object or camera. The slit light is emitted from the direction orthogonal to the moving direction, the camera shoots the object from diagonally above the object, and the object or the camera is moved a plurality of times at intervals so that the plurality of objects can be captured. A method of measuring the three-dimensional shape of an object from an image is used.

A range finder is also known as a means for inputting a three-dimensional shape. This is a device for measuring a three-dimensional shape by means similar to the case of inputting a normal image. In principle, the slit light is scanned at high speed by a galvanometer mirror or the like, and the distance to the object is measured to measure the three-dimensional shape. Furthermore, a method of measuring a three-dimensional shape by irradiating a plurality of pattern lights with a liquid crystal or the like and performing spatial coding is also known.

[0004]

The above-mentioned conventional three-dimensional shape measuring method or the three-dimensional shape measuring apparatus used therefor is capable of measuring the three-dimensional shape of an object, but will be described below. Such problems remain. That is, (1) In the case of a three-dimensional shape measuring apparatus that uses slit light or the like, the object itself may prevent the reflected light of the slit light from reaching the camera depending on the shape of the object. In this case, a part of the image of the object that can be acquired by the camera is missing, and the measurement accuracy of the object shape is reduced. Further, (2) depending on the shape and properties of the object (surface roughness, reflectance, etc.), an image of an edge portion such as a peripheral edge portion of the object often disappears. It was difficult to measure. Also,
(3) When a part of the image of the object including the edges is missing, correction processing is performed to correct the missing part using the acquired image. In some cases, the reflected light from the object becomes weak, and in that case, the existing position of the end or the like becomes uncertain, making it difficult to perform the desired correction process. (4) In the case of a three-dimensional shape measuring apparatus using the light section method, it is necessary to take an image while moving an object or a camera in order to obtain image information of each cross section. A long measurement time was required to obtain the shape information. Furthermore, (5) it is theoretically difficult to obtain a high resolution in the case of a three-dimensional shape measuring device using a range finder, and in the case of a three-dimensional shape measuring device using a liquid crystal or the like, Since it is necessary to obtain a plurality of images in order to raise the height, a long measurement time is required.

The present invention has been made in view of the above-mentioned problems of the prior art, and an object thereof is to provide an improved three-dimensional shape measuring apparatus for improving measurement performance (measurement accuracy, measurement required time, etc.). To provide.

[0006]

According to the present invention, the above-mentioned objects are as follows: 1) Image pickup means for inputting reflected light from an object to be measured and outputting an image signal corresponding to the reflected light; The means for placing and transporting the means on a flat mounting surface, and the slit light irradiating the object to be measured from a direction perpendicular to the carrying direction of the means for carrying, and the width direction of the light flux of the means for carrying. The light source device installed so as to be perpendicular to the transport direction, a transmission unit for reflected light that guides the reflected light reflected by the light flux from the light source device to the measurement target object, and the imaging unit outputs In a three-dimensional shape measuring apparatus having an image signal processing means for processing the image signal to calculate the shape of the measurement target object,
The imaging means is installed in a plane including the width direction of the slit-like light beam with its light receiving portion facing the object to be measured, and the transmitting means for reflected light is the width direction of the light beam. A pair of reflecting mirror constructions each having two reflecting mirrors each having a reflecting surface forming a two-dimensional plane in regions opposite to each other with respect to a plane including The reflecting mirror of No. 1 has its reflecting surface directed toward the light receiving portion side of the image pickup means so that one coordinate axis of its two-dimensional plane is parallel to the plane including the width direction of the light flux, and the other coordinate axis of the reflecting surface and the light flux. The second reflecting mirror, which is installed at an obtuse angle with respect to the plane including the width direction of the, and which is provided in each transmitting means for reflected light, has its reflecting surface directed toward the measurement target object side. Coordinate axis parallel to one coordinate axis of the first reflector And is installed at a position for reflecting the reflected light of the light flux reflected from the measurement target object received by the reflective surface toward the reflective surface of the first reflecting mirror, and with respect to the plane including the width direction of the light flux. The reflected light reflected from the object to be measured in the area on the opposite surface side is received by the imaging means,
The image signal processing means inputs image signals corresponding to the reflected light from the respective reflecting mirror components, interpolates these image signals with each other, and processes them to calculate the shape of the object to be measured. Or 2) an image pickup means for inputting reflected light or the like from the measurement target object and outputting an image signal corresponding to the reflected light or the like, and placing the measurement target object or the image pickup means on a flat surface. A conveyance means that is placed on a surface and conveys the object to be measured is irradiated with a slit-shaped first light beam from a direction perpendicular to the conveyance direction of the conveyance means, and the width direction of the first light beam is the direction of the conveyance means. A first light source device installed so as to be perpendicular to the transport direction, and a reflected light that guides reflected light reflected by the first light flux from the first light source device hitting an object to be measured to an imaging means. Transmission means and imaging hand In the three-dimensional shape measuring apparatus including an image signal processing unit that processes the image signal output by the stage to calculate the shape of the measurement target object, the image pickup unit includes the first light source unit that emits light from the first light source unit. The light receiving portion is installed in a plane including the width direction of the light flux with the measurement target object side, and the transmission means for the reflected light includes the width direction of the first light flux where the imaging means is located. A pair of reflecting mirror constituents each having two reflecting mirrors each having a reflecting surface forming a two-dimensional flat surface in regions opposite to each other with respect to the plane, and a first mirror provided in each reflecting mirror constituent
Of the reflecting mirror, the one of the coordinate axes of the two-dimensional plane of which is parallel to the width direction of the first light flux with its reflecting surface facing the light receiving portion of the image pickup means, and the other of the reflecting surface and the first coordinate axis. The angle formed by the plane including the width direction of the light flux is an obtuse angle, and the width direction of the first light flux from the first light source device of the first reflecting mirror included in each reflecting mirror structure is The second reflecting mirrors, which are installed with a gap interposed between the planes including the reflecting mirrors, are provided in the respective reflecting mirror constructs, and the reflecting surface of the second reflecting mirrors faces the object to be measured, and one coordinate axis of the second reflecting mirrors is the first light flux. Of the first light flux reflected by the object to be measured reflected by the reflection surface of the first light flux toward the reflection surface of the first reflecting mirror. Object to be measured in the areas opposite to each other with respect to the plane including the width direction of The reflected light reflected from the body is received by the imaging means, and the transportation means used to transport the measurement target object or the mounting table on which the measurement target object is mounted is at least A slit-shaped opening having a width direction parallel to the width direction of the first light flux is provided in a portion on which the target object is placed. , A second light source device for irradiating a slit-shaped second light beam toward the light receiving portion of the image pickup means through the gap between the opening and the first reflecting mirror is provided. The slit-shaped second light beam supplied by the light source device has a width direction parallel to the width direction of the slit-shaped first light beam, and the image signal processing means includes respective reflecting mirror configurations. From the body An image signal corresponding to the incident light and an image signal corresponding to the slit-shaped second light flux are input, and the respective image signals are interpolated and processed to calculate the shape of the measurement target object. Or 3) an image pickup means for inputting reflected light from the measurement target object and outputting an image signal corresponding to the reflected light, and placing the measurement target object or the image pickup means on a flat mounting surface. The slit light is radiated to the object to be measured from the conveying means that conveys the light in a vertical direction with respect to the conveying direction of the conveying means, and the width direction of this light flux is set to be perpendicular to the conveying direction of the conveying means. Light source device, transmission means for reflected light that guides the reflected light reflected by the light flux from the light source device to the measurement target object, and the shape of the measurement target object by processing the image signal output from the imaging means In the three-dimensional shape measuring apparatus and a processing unit of the image signal for computing,
The light source device is composed of a plurality of individual light source devices that irradiate the slit-shaped light flux, and each of the individual light source devices has a width direction of the light flux that is radiated in a direction perpendicular to the transport direction of the transport means. In addition, the image pickup means is installed in parallel with each other along the carrying direction of the carrying means and at intervals, and the imaging means is a carrying means of the light fluxes radiated by a plurality of individual light source devices provided in the light source device. In the plane including the width direction of the slit light existing in the central portion with respect to the transport direction of the light receiving section, the light receiving section is installed toward the measurement target object side, and the transmitting means for the reflected light is the image pickup means. A pair of reflecting mirror constructions each including two reflecting mirrors each having a reflecting surface forming a two-dimensional plane in regions opposite to each other with respect to a plane including a width direction of a light beam existing at a position,
The first reflecting mirror provided in each reflecting mirror structure has its reflecting surface directed toward the light receiving portion of the image pickup means, and one of the coordinate axes of the two-dimensional plane thereof is parallel to the plane including the width direction of the light beam. An angle formed between the other coordinate axis of the reflecting surface and the plane including the width direction of the light beam is an obtuse angle, and the second reflecting mirror provided in each transmitting means for reflected light is
The reflecting surface is directed toward the object to be measured, one coordinate axis of which is parallel to the coordinate axis of one of the first reflecting mirrors, and the reflected light of the luminous flux reflected from the object to be measured received by the reflecting surface is first reflected. Is installed at a position where it is reflected toward the reflecting surface of the reflecting mirror, and the reflected light reflected from the object to be measured is reflected by the image pickup means in the regions on the opposite sides with respect to the plane including the width direction of the light flux. The image signal processing means is configured to receive light, and the image signals corresponding to the reflected light from the plurality of individual light source devices from the respective reflecting mirror constructions are interpolated and processed to be measured. Or 4) In the means described in the above item 3, the image capturing control means is provided, and the image capturing control means performs image capturing by the image capturing means. When the object or the image pickup means conveyed by the step is arranged between the slit-shaped light fluxes located at both ends in the conveyance direction of the slit light conveyance means by the plurality of individual light source devices and the mutual distance between the adjacent slit light rays. The operation signal is given to the image pickup means in the same cycle as the time required to move a distance equal to the sum,
Or 5) In the means described in the above item 3, in the light source device, the light beams emitted by the individual light source devices are equidistant from each other in the width direction, and the image forming control means is provided. Is the mutual spacing between the slit-shaped light fluxes in which the object carried by the carrying means or the imaging means carries out the imaging by the imaging means with respect to the carrying direction of the carrying means for the slit light by the plurality of individual light source devices. Is configured to give an operation signal to the imaging means in the same cycle as the time required to move by a distance equal to, or 6) input reflected light from the object to be measured and respond to this reflected light. Image sensor for outputting an image signal to be measured, transporting means for mounting and transporting the measurement target object or the imaging means on a flat mounting surface, and irradiating the measurement target object with slit light A light source device, a transmission unit for reflected light that guides reflected light reflected by the light flux from the light source device to an object to be measured, and an image signal output from the imager to process the shape of the object to be measured. In the three-dimensional shape measuring apparatus including an image signal processing means for calculating, the light source device is a first light source device group having a plurality of individual light source devices for irradiating the slit-shaped first light flux group, In each of the individual light source devices, the width direction of the illuminating light flux is horizontal with respect to the mounting surface on which the measurement target object is mounted, and the width directions are parallel to each other and spaced from each other. The transmitting means for the reflected light both have conical reflecting surfaces, and their central axes are perpendicular to the mounting surface of the conveying means.
The first reflecting mirror provided with the two reflecting mirrors installed such that their central axes are concentric with each other and the transmitting means for reflected light has its reflecting surface directed toward the light receiving portion side of the image pickup means. The second reflecting mirror, which is installed and included in the transmitting means for reflected light, has its reflecting surface directed toward the measurement target object side, and has the first light flux group of the first light flux group reflected from the measurement target object received by the reflecting surface. The image pickup means is installed at a position where the reflected light is reflected toward the reflecting surface of the first reflecting mirror, and the image pickup unit directs the light receiving portion thereof toward the object to be measured, and the conical shape of the two reflecting mirrors. The light receiving portion is installed so that the light receiving portion is located on the central axis of the conical surface of the reflection surface. The processing means for the image signal is from the object to be measured input through the transmission means for reflected light. A plurality of image signals corresponding to the reflected light of The signal is interpolated and processed to calculate the shape of the object to be measured, or 7) In the means described in the above item 6, the object is changed from the direction perpendicular to the conveying direction of the conveying means to the object. A second light source device group including a plurality of individual light source devices for irradiating the second slit light group is provided, and the plurality of individual light source devices included in the second light source device group have a width direction of each light flux of the conveying means. The light fluxes are arranged so as to be perpendicular to the transport direction, and the light fluxes thereof are parallel to each other in the width direction thereof along the transport direction of the transport means. An image signal corresponding to the reflected light of the first light flux group from the first light source device group and the reflected light of the second light flux group from the object, which is input via the transmission means for ，
The configuration is such that the image signal corresponding to each reflected light is interpolated and processed to calculate the shape of the object.

[0007]

According to the present invention, (1) the second reflecting mirror provided in each reflecting mirror structure is installed at the position where the light receiving portion for inputting the reflected light of the object of the conventional camera is located. It The slit light reflected from the object is incident on the respective second reflecting mirrors thus installed. Further, the second reflecting mirror and the first reflecting mirror included in each reflecting mirror structure are installed such that one coordinate axes of the reflecting surfaces thereof are parallel to each other, so that the second reflecting mirror is incident on the second reflecting mirror. Then, the reflected light that has been reflected is incident on the first reflecting mirror included in the same reflecting mirror structure while maintaining the state of being reflected from the object. The reflected light reflected by the first reflecting mirror of each reflecting mirror structure is simultaneously incident on the light receiving portion of the image pickup means.

Therefore, the reflected light of the slit light reflected on the areas on the opposite sides of the plane of the object including the width direction of the slit light of the object simultaneously enters the image pickup means. This means that the image pickup means can obtain the respective images obtained when the reflected light from the object is received from the diagonally upper sides opposite to each other with respect to the plane, by the image of one image pickup means. .

When an image of an object is picked up by an image pickup means, for example, when the shape of the object is a dome shape, the reflected light from the object is reflected by a certain part of the object due to the relationship between the position where the reflected light from the object is received and the shape of the object. It may not be possible to make the reflected light incident on the object, but in the image obtained by the image pickup means according to the present invention, the reflected light from one of the reflecting mirror constituents is an object in which the image is lost due to the shadow. Even if there is a portion, an image of this portion can be obtained by an image of reflected light that has passed through the other reflecting mirror structure. This image signal is processed by the image signal processing means by interpolating the image signals of the reflected lights reflected in the areas opposite to each other with respect to the plane, and interpolating the image of the missing object portion. Accurate measurement of objects such as domes is possible. (2) The action of the second slit light supplied by the second light source device is added to the action of the item (1) by the first light source device. The second slit light is emitted between the slit-shaped opening provided on the mounting surface on which the object of the transport means or the mounting table is mounted and the first reflecting mirror provided in each reflecting mirror structure. The light is irradiated toward the light receiving section of the image pickup means through the installed gap. In addition, the second slit light is reflected by the second slit light supplied from the first light source device in the light receiving portion of the image pickup means and is reflected by the respective reflecting mirror components to enter the area. The light is incident on the sandwiched intermediate region.

The image obtained in the intermediate area of the image pickup means is
If there is no object on the opening, the second
It is a slit-shaped image of the slit light as it is. However, when an object is placed on the opening, a part of the second slit light is blocked by the object, so that the image obtained in the intermediate region is also blocked by the object. The part that is left is missing. For example, if the object is placed so that its maximum width is located on the opening, the missing portion of the second slit light is the maximum width of the object, and thus the image of the second slit light causes It is possible to accurately obtain information on the widthwise dimension of the object.

When it is difficult to maintain the measurement accuracy only from the image obtained by the first slit light because the reflected light is weak or the shape of the object changes drastically in the vicinity of the edge of the object, By using the image signal of the second slit light for the correction and interpolation processing of the image signal by the first slit light, it is possible to improve the measurement accuracy. (3) In addition to the action of the above item (1), the action of a plurality of slit light beams emitted from a plurality of individual light source devices which are parallel to each other as a light source device along the transport direction of the transporting means and are provided at intervals. Added.

The slit light emitted from each individual light source device is incident on the image pickup means in the same manner as the reflected light by the slit light described in the item (1). However, unlike the slit light by the light source device described in the item (1), these individual light source devices are installed in parallel with each other and at intervals along the transport direction of the transport means. For this reason, it is assumed that the image obtained by the image pickup means by the slit light emitted from the individual light source device is separated from the image by the slit light described in the item (1) at an interval corresponding to the interval. Will be obtained. For this,
In the image pickup means, a plurality of images corresponding to the plurality of slit lights of the range where the slit lights of the plurality of individual light source devices are shining on the object are obtained by one shooting.

(4) In the above item (3), the image pickup means is provided with an image pickup control means, and the operation means outputs the image pickup means with respect to the conveying direction of the slit light conveying means by the plurality of individual light source devices. The photographing is continuously performed at the same cycle as the time required to move by a distance equal to the sum of the distance between the slit lights located at both ends and the mutual distance between the adjacent slit lights. With this, an image of an object located at a distance equal to the sum of the mutual distances between the slit lights located at both ends and the adjacent slit lights can be acquired by one-time photographing, and thus the image regarding the three-dimensional shape of the entire object can be reduced. It is possible to complete the process depending on the number of times of shooting.

(5) In the above item (3), an image pickup control means is provided, and the image pickup means is moved by the operation signal output from the image pickup control means by a distance equal to the mutual interval between the slit lights by the plurality of individual light source devices. The continuous shooting is performed at the same cycle as the time required to move. As a result, as many images of one part of the object as the number of individual light source devices installed are obtained. By the way, these images are composed of an image obtained first and an image after the object sequentially moves from the position of the object when this image is obtained by the mutual interval of the slit light by the individual light source device. . Therefore, in these images, the angle formed by one portion of the above-mentioned object that is being irradiated with the slit light and the second reflecting mirror becomes different sequentially. That is, it is possible to obtain an image signal when the same portion is observed from a number of different angles.

When the object is photographed by the image pickup means and the shape of the object is uneven, the reflection of the light reflected by the object of a certain part is caused by the relationship between the position of receiving the reflected light from the object and the shape of the object. It may not be possible to make light enter,
In the image obtained by the image pickup means according to the present invention, even if there is an object part where the image is missing due to the reflected light when it is received at a certain angle, the image of this part is not seen at another angle. There is a possibility that it can be obtained by another image received.

Thus, in addition to the operation according to the above item (1), the image signals obtained when the same portion is observed from a plurality of different angles are interpolated and processed to interpolate the image of the missing object portion. By interacting with each other, accurate measurement is possible even for an object having a shape with large irregularities. (6) Each of the light fluxes of the first slit light group by the plurality of individual light source devices included in the first light source device group is slit-shaped, and moreover, with respect to the mounting surface on which the object is mounted, The slit light is horizontal in all width directions and is parallel to each other and spaced apart. The light reflected by each slit light is an annular light that goes around the circumference of the object. The respective reflected lights are sequentially incident on the second reflecting mirror and the first reflecting mirror, and are reflected from the first reflecting mirror, in substantially the same manner as the action of the above item (1). By the way, since the first reflecting mirror and the second reflecting mirror included in the transmitting means for the reflected light are both conical, the reflected light reflected from the first reflecting mirror is the slit light reflected from the object. Stay as it is.

For this reason, the reflected light is a ring that makes a round around the object, and the reflected light from each of the first slit light groups is reflected at the contour position of the object according to the mutual interval of the respective slit light. Corresponds to reflected light. The reflected light from the first reflecting mirror enters the light receiving section of the image pickup means.
Therefore, in the image pickup means, an image representing the shape of the object at each of the contour positions of the part irradiated with the plurality of slit lights,
An image obtained by one image pickup by one image pickup means is obtained, and the three-dimensional shape of the object can be measured by one image pickup by one image pickup means.

(7) The above (6) according to the first light source device group
The action of the second slit light group by the plurality of individual light source devices included in the second light source device group is added to the action of the item. The reflected light by the second slit light group is incident on the image pickup means in the same manner as the reflected light by the slit light described in the item (3). For this reason, the image by the reflected light of the first slit light group of the first light source device group, the second image
The image obtained by the reflected light of the slit light group is obtained in a state where they intersect with each other.

Focusing on the intersection where the image by the first slit light group and the image by the second slit light group intersect, when the intersection side on the image of the second slit light group is considered, they are adjacent to each other. The image between the intersecting points represents the shape of the object between different contour positions irradiated with the slit light by the first slit light groups adjacent to each other. Therefore, by using the image signal from the second slit light group in addition to the image signal from the first slit light group, the object shape between contour lines is interpolated to measure the three-dimensional shape of the object with higher accuracy. Is possible.

[0020]

Embodiments of the present invention will be described in detail below with reference to the drawings. Embodiment 1; FIG. 1 is a side view for explaining a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 1, and FIG. 2 is a block diagram of a processing means shown in FIG. is there. FIG. 3 is a graph of an image obtained as an example by the three-dimensional shape measuring apparatus shown in FIG. 1, and FIG. 3A shows a case where the tip of an object is irradiated with slit light.
(B) shows the case where the slit light is applied to the center of the object, and (c) shows the case where the object has passed the irradiation position of the slit light.

In FIGS. 1 and 2, reference numeral 1 denotes a known ITV camera 2 which is an image pickup means, a known conveyor 4 which is a conveyance means for mounting and conveying an object 3 to be measured, and a light source device 5. The three-dimensional shape measuring apparatus is provided with a transmitting means for reflected light, which is composed of a pair of reflecting mirror constituents 6A, 6B, and a processing means 7 for processing an image signal output from the ITV camera 2. The light source device 5 is mounted on the mounting surface 4a of the conveyor 4 from diagonally above in a direction perpendicular to the carrying direction of the conveyor 4 (indicated by an arrow X in FIG. 1) so as not to interfere with the shooting of the camera 2. It is a device that irradiates the slit light 51, for example, a device that combines a laser light source device and a cylindrical lens. The light source device 5 is installed such that the slit-shaped width direction of the slit light 51 is perpendicular to the transport direction of the conveyor 4. The camera 2 uses the slit light 5
The light receiving portion 21 is installed in the plane 1a (which is a plane perpendicular to the mounting surface 4a) including the width direction of 1 so that the light receiving portion 21 faces the object 3 side and is incident on the light receiving portion 21. Further, the image signal 2a corresponding to the reflected light of the slit light 51 reflected from the object 4 is output.

Each of the pair of reflecting mirror constituents 6A and 6B is provided in a region opposite to each other with respect to the plane 1a, and is provided with two rectangular reflecting mirrors each having a flat reflecting surface. There is. The first reflecting mirror 61A included in one reflecting mirror structure 6A has its reflecting surface 61Aa directed toward the light receiving portion 21 and one side of the rectangular shape parallel to the plane 1a, and the plane of the rectangular reflecting surface 61Aa. The angle θ _61A formed with 1a is an obtuse angle. The second reflecting mirror 62A included in the one reflecting mirror structure 6A has its reflecting surface 62Aa directed toward the object 3 side and has its rectangular side parallel to the rectangular side of the reflecting mirror 61A. It is installed at a position where the reflected light 51A of the slit light 51 reflected from the object 3 received by the reflecting surface 62Aa is reflected toward the reflecting surface 61Aa of the reflecting mirror 61A. The first reflecting mirror 61B included in the other reflecting mirror structure 6B has its reflecting surface 6
1Ba is directed to the light receiving portion 21 side, and one side of the rectangular shape is the plane 1
While being parallel to a, the angle θ _61B formed by the rectangular reflecting surface 61Ba and the plane 1a is an obtuse angle. Second reflecting mirror 62 included in one reflecting mirror structure 6B
B is a slit light reflected from the object 3 received by the reflecting surface 62Ba while the reflecting surface 62Ba is directed toward the object 3 side and one side of the rectangular shape is parallel to the rectangular side of the reflecting mirror 61B. It is installed at a position where the reflected light 51B of 51 is reflected toward the reflecting surface 61Ba of the reflecting mirror 61B. That is, the reflecting mirror structure 6A and the reflecting mirror structure 6B are configured to be plane-symmetric with respect to the plane 1a. The reflecting mirror constructing bodies 6A and 6B convert the respective reflected lights 51A and 51B reflected from the object 3 into the reflecting mirror 6
The light is received by 2A and 62B and reflected toward the reflecting mirrors 61A and 61B. The reflecting mirrors 61A and 61B are reflected by the reflecting mirrors 62A and 6B.
The entire image of the object 3 shown in 2B is the light receiving portion 21 of the camera 2.
The light is received by. The reflecting mirror 61
It does not matter whether or not there is a gap between the side of B on the side of the plane 1a and the side of the reflecting mirror 61A on the side of the plane 1a.

The processing means 7 for processing the image signal 2a comprises an A / D conversion circuit section 71, a plurality of frame memories 72, a processing circuit section 73 and a data bus 74. The A / D conversion circuit unit 71 inputs the image signal 2a, which is an analog signal, converts it into a digital signal, and then the frame memory 7
Output to 2. The frame memory 72 inputs and stores the digitized image signal 2a. Processing circuit unit 73
Takes out the digitized image signal 2a stored in the frame memory 72 through the data bus 74, and operates the image signal 2a according to the well-known triangulation principle.
Calculations such as calculation of the height of the object 3 according to are performed.

The three-dimensional shape measuring apparatus 1 shown in FIGS. 1 and 2.
Is an apparatus having the above-mentioned configuration and measuring the three-dimensional shape of the object 3 using the light section method. In the three-dimensional shape measuring apparatus 1, the object 3 is placed on the placement surface 4a of the conveyor 4 and is conveyed from left to right toward the paper surface in FIG. In the meantime, the plane 1a is crossed vertically, and the slit light 51 is irradiated at that time. Therefore, first of all, the tip end portion thereof is irradiated with the slit light 51 [The position of the object 3 in this state is the part indicated by the symbol X ₁ at the center line of the object 3 drawn by the dotted line in FIG. It is the position where it is. ].
In this state, since the object 3 has a dome shape in this case, the object 3 itself prevents the reflected light 51A from reaching the reflecting mirror 61A. Therefore, the reflected light 51B is received by the light receiving unit 21 of the camera 2.
It will only be.

Here, the image frame 9 obtained by the camera 2
Will be explained. In FIG. 3, 911 is an image frame for the reflected light 51A, and 912 is an image frame for the reflected light 51B. In the three-dimensional shape measuring apparatus 1, the reflected light 51A and the reflected light 5 are reflected by one camera 2.
It is possible to obtain images for both reflected lights of 1B. By the way, when the center line of the object 3 is located at the position X ₁ , the image frame 9 obtained by the camera 2 does not exist in the image frame 911 for the reason described above, and the image frame 912 is not present in the image frame 912. , The image 31 by the reflected light 51B corresponding to the case where the center line of the object 3 is at the position X _1.
Only 1b is present. The image in this image frame 9 is output from the camera 2 as an image signal 2a,
It is digitized via the D conversion circuit unit 71 and then stored in one frame memory 72.

As the conveyance of the object 3 progresses, the position where the center line of the object 3 is at the portion indicated by the reference symbol X ₂ , that is, the position where the center line of the object 3 coincides with the plane 1a [the position of the object 3 in this state is 1A is drawn by a solid line. ], The reflected lights 51A and 51B are reflected by the reflecting mirror 61, respectively.
Reach A, 61B. In this case, as shown in FIG. 3B, in the image frame 911, there is the image 312a by the reflected light 51A corresponding to the case where the center line of the object 3 is at the position X ₂ , and the image frame During 912,
The image 312b by the reflected light 51B corresponding to the case where the center line of the object 3 is located at the position of X ₂ exists. The image in the image frame 9 is also output from the camera 2 as the image signal 2a and stored in another one of the frame memories 72.

Further, as the object 3 is further conveyed, the rear end of the object 3 passes through the position of the plane 1a [the position of the object 3 in this state is shown by the dotted line in FIG. 1 (a). The position where the center line is at the portion indicated by the reference symbol X ₃ . ], And the reflected light 51
A and 51B respectively reflect on the mounting surface 4a and then reach the reflecting mirrors 61A and 61B. In this case,
As shown in (c), in the image frame 911, the image 31 by the reflected light 51A corresponding to the position of the mounting surface 4a.
3a exists, and in the image frame 912, the mounting surface 4a
The image 313b by the reflected light 51B corresponding to the position is present. The image in the image frame 9 is also output from the camera 2 as the image signal 2a and is further stored in another frame memory 72.

It should be noted that in FIG. 1, avoiding complication
However, the position X shown in FIG.
₁~ X₃The image signal 2a of the object 3 in a place other than
Stored in the frame memory 72 as needed
Of course. In this way, the frame memory 72
Organize the image signals 2a related to the objects 3 etc. stored in
Described, position X₁Near and position X₁And position X₂
At a position intermediate between and, there is no image due to the reflected light 51A.
No, but in this case, there is an image due to reflected light 51B
To do. Also, position X₂Reflections at and near
There is an image by the light 51A and an image by the reflected light 51B
To do. Furthermore, position X₂Position X from near ₃Things leading up to
At the position of the body 3, there is no image by the reflected light 51B.
However, in this case, there is an image due to the reflected light 51A.
It

The image signal 2a stored in the frame memory 72 is taken out by the processing circuit section 73 and subjected to arithmetic processing. For example, based on the image signal 2a related to the position of the mounting surface 4a recorded in the image signal 2a at the position 313, the slit light 51 is emitted at that position recorded in the image signal 2a at the position 311. The height of the part of the object 3 is calculated by the principle of triangulation. Further, the image signal 2a due to the reflected light 51B near the position X ₁ , the image signal 2a due to the reflected lights 51A and 51B at the position X ₂ and its vicinity, and the reflected light 51A between the position X ₂ and the position X _3. The image signal 2a is integrated and processed. Keeping in mind that the image signal 2a of the reflected light 51A and the image signal 2a of the reflected light 51B are the image signals 2a of the parts on the opposite sides of the object 3 in the transport direction, Even if a part of the image is missing, the image of the missing object part can be interpolated by comprehensively processing these image signals 2a obtained by the three-dimensional shape measuring apparatus 1. As a result, even if the shape of the object 3 is a dome shape, the shape of the entire object 3 can be accurately measured.

Embodiment 2; FIG. 4 is a side view for explaining a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 2, and FIG. 5 is a three-dimensional shape shown in FIG. 7 is a graph of an image obtained as an example with the measuring device, and FIG.
FIG. 4 is a graph illustrating an image interpolation method. 4 to 6, the same parts as those of the three-dimensional shape measuring apparatus according to the embodiment of the present invention corresponding to claim 1 shown in FIGS. 1 to 3 are designated by the same reference numerals, and the description thereof will be omitted. In FIG. 4, reference numeral 1A replaces the reflecting mirror components 6A and 6B and the conveyor 4 with respect to the three-dimensional shape measuring apparatus 1 according to one embodiment of the present invention corresponding to claim 1 shown in FIGS. Thus, the three-dimensional shape measuring apparatus apparatus is configured such that the reflecting mirror constituent bodies 6C and 6D and the conveyor 4A are used and the second light source apparatus 5Y is provided. In this case, the light source device 5
Is the first light source device.

Reflecting mirror structure 6 of reflecting mirror structures 6C and 6D
The difference with respect to A and 6B is that in the reflector structure 6C and 6D, a gap G is always formed between the side of the reflecting mirror 61B on the plane 1a side and the side of the reflecting mirror 61A on the plane 1a side. There is a need. The difference between the conveyor 4 </ b> A and the conveyor 4 is that the opening 41 is formed at least in a portion where the object 3 is placed. The opening 41 has a slit shape having a width direction parallel to the plane 1a. The light source device 5Y is installed on the opposite surface side of the light receiving unit 21 of the camera 2 of the conveyor 4A, and irradiates the second slit light 59 by parallel rays toward the light receiving unit 21 through the opening 41 and the gap G. This slit light 59
Has a width direction parallel to the width direction of the first slit light 51.

The three-dimensional shape measuring apparatus 1A shown in FIG. 4 has the above-mentioned configuration, and is an apparatus for measuring the three-dimensional shape of the object 3 by using the optical cutting method. Here, in the three-dimensional shape measuring apparatus 1A, the image frame 9 obtained by the camera 2
A will be described. As shown in FIG. 5, in the three-dimensional shape measuring apparatus 1A, unlike the case of the three-dimensional shape measuring apparatus 1, since the gap G exists, the reflected light 51
A space corresponding to the space G exists between the image frame 921 for A and the image frame 922 for the reflected light 51B. Slit light 5 at the part of this interval
The image frame 923 in which the image of 9 is formed is obtained.

The image of the slit light 59 obtained in the image frame 923 is a slit-shaped image of the slit light 59 as it is when the object 3 is not present on the opening 41. However, when the object 3 is placed on the opening 41 shown in FIG. 4, the intermediate part of the slit light 59 is shielded by the object 3, so that the slit light obtained in the image frame 923 is obtained. The image by 59 is
As indicated by reference numeral 591 in FIG. 5, the portion W shielded by the object 3 is missing. For example, if the object 3 is placed so that its maximum width is located on the opening 41, the missing portion W of the slit light 59 can be directly obtained as the maximum width of the object 3. .

Depending on the shape of the object 3, the image frame 9
21. In many cases, it is not possible to obtain all the images including the end portion of the object 3 from the image of the object 3 obtained in the image frame 922. However, in the three-dimensional shape measuring apparatus 1A, the image signal 2 corresponding to the image frame 9A
The arithmetic processing can be performed in the processing circuit unit 73 using a. An arithmetic processing method in the processing circuit unit 73 in the three-dimensional shape measuring apparatus 1A will be described with reference to FIG. In the image 311b of the object 3 shown in FIG. 6, the reflected light 51B at the end portion of the object 3 is weakened due to the shape / property of the object 3, and thus the image of the end portion of the object 3 is obtained. Not not. That is, in the image 311b, the image from the point P to the end point B of the image 311b corresponding to the point A in FIG. 6 is missing on the surface corresponding to the mounting surface 4a. Therefore, it is necessary to interpolate between the points P and B. In this case, since there is no data on the point B, this interpolation work must be performed by estimation, etc., and the accuracy of measuring the shape of the object 3 must be affected by how the points P and beyond are interpolated. There is no place. Three-dimensional shape measuring device 1A
In, the image 591 by the slit light 59 having the maximum width W of the object 3 as a missing portion is simultaneously obtained,
The maximum width W of the object 3 is accurately measured. The end point B of the image 311b can be obtained as the boundary point of the missing portion of the image 591. By interpolating from the point P to the point B based on the point B based on this measured data,
It is possible to accurately interpolate the shape of the edge of the object 3 and the vicinity of the edge. As the interpolation method between the points P and B, linear interpolation, curve interpolation, or an appropriate interpolation method suitable for the features of the object 3 can be used.

Embodiment 3; FIG. 7 is a side view for explaining a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claims 3 to 5, and FIG. 8 is a cubic diagram shown in FIG. It is a graph of an image as an example obtained by the original shape measuring device,
FIG. 9 is a detailed view of the R portion in FIG. 7 to 9
In FIG. 3, the same parts as those of the three-dimensional shape measuring apparatus according to the embodiment of the present invention corresponding to claim 1 shown in FIGS.

In FIG. 7, reference numeral 1B denotes a three-dimensional shape measuring apparatus 1 according to an embodiment of the present invention corresponding to claim 1 shown in FIGS. 1 and 2, in addition to a light source apparatus 5 as a light source apparatus. The three-dimensional shape measuring apparatus apparatus is provided with the light source devices 5C to 5F and, if necessary, the imaging control means 8. Each light source device 5
C to 5F are the same light source device as the light source device 5, and similarly to the light source device 5, the light sources are obliquely above the conveying direction of the conveyor 4 so as not to interfere with the photographing of the camera 2. In parallel with the slit light 51 by the device 5,
The slit lights 51C to 51F are emitted respectively. The light source devices 5C to 5F have slit light 51 and slit light 51C to
As shown in FIG. 7, 51F and 51F are installed to have an equal interval L ₀ .

The photographing control means 8 controls the execution of photographing by the camera 2 to the slit light group 51Σ (hereinafter, slit light 51,
When collectively referring to 51C to 51F, they may be referred to as such. ), The object 3 moves by a distance equal to the distance L ₂ + the distance L ₀ between the slit lights (the slit light 51C and the slit light 51F in the case of the three-dimensional shape measuring apparatus 1B) located at both ends. A device that gives the camera 2 a photographing signal 8a that causes the camera 2 to perform photographing in the same period as that required or in the same period as the time required for the object 3 to move by a distance equal to the interval L _0. is there.

The three-dimensional shape measuring apparatus 1B shown in FIG. 7 has the above-mentioned configuration, and is an apparatus for measuring the three-dimensional shape of the object 3 by using the optical cutting method. The slit lights 51C to 51F emitted from the light source devices 5C to 5F illuminate the object 3 in the same manner as the slit light 51 from the light source device 5.
The object 3 irradiated with the slit lights 51C to 51F reflects the reflected lights 51CA to 51FA and 51, respectively.
Reflects CB to 51FB. A reflected light group 51ΣA including reflected lights 51A and 51B by the slit light 51 (hereinafter, when the reflected lights 51A and 51CA to 51FA are collectively referred to,
Sometimes I say this. ) And the reflected light group 51ΣB
(Hereinafter, when the reflected lights 51B, 51CB to 51FB are generically referred to, this may be said.) Is the same as that of the slit lights 51, 51C to 51F, while maintaining the relationship of equal spacing L _0. The light receiving section 21 via the structural bodies 6A, 6A
Incident on.

Here, the image frame 9B obtained by the camera 2 in the three-dimensional shape measuring apparatus 1B will be described.
As shown in FIG. 8, in the three-dimensional shape measuring apparatus 1B, unlike the case of the three-dimensional shape measuring apparatus 1, since the light source devices 5, 5A to 5F are installed as light source devices, the image frame 931 The image 312Σa formed by the reflected light 51ΣA exists in the image frame, and the image 312Σb formed by the reflected light 51ΣB exists in the image frame 932. The image in this image frame 9B is converted into an image signal 2a by the camera 2
Is output from the A / D converter circuit unit 71, digitized through the A / D conversion circuit unit 71, and then stored in one frame memory 72.

When the photographing control means 8 is one which outputs a photographing signal 8a for causing the camera 2 to photograph at the same cycle as the time required for the object 3 to move by a distance equal to the interval L ₂ + L ₀ , When acquiring an image of a key portion of the object 3 over the entire length L ₁ in the X direction in FIG. 7, comparing with the case of the three-dimensional shape measuring apparatus 1,
It is possible to reduce the number of times of shooting by the camera 2 to the number of times of shooting n based on the relationship of (Expression 1).

[0041]

## EQU1 ## (L ₂ + L ₀ ) × n ≧ L ₁ (1) Further, as the image capturing control means 8, the object 3 is moved by a distance equal to the interval L _0. A case of using the one that outputs the shooting signal 8a for causing the camera 2 to shoot at the same cycle as the required time will be described with reference to FIG. It is assumed that the position of the object 3 is at the position shown by the solid line in FIG. 9 at a certain shooting timing. Position Q is the position irradiated by the slit light 5D at that time. The object 3 is, for example, L
The position Q on the object 3 after moving by ₀ × m (m = 2 in the case shown in FIG. 9) is illuminated by the slit light 5E.

The angles at which the second reflecting mirror 62A and the second reflecting mirror 62B receive the reflected light corresponding to the slit light 5D reflected on the mounting surface 4a are angles θ _1A and θ _1B , respectively. The reflected light corresponding to the slit light 5E reflected on the placing surface 4a is reflected by the second reflecting mirror 62A and the second reflecting mirror 62A.
The angles of receiving light at B are angles θ _2A and θ _2B , respectively.
That is, each time the object 3 moves by a distance equal to the interval L ₀ , the object 3 is photographed by the camera 2 and the image signals 2a corresponding to them are stored in the frame memory 72, so that the objects 3 are observed. It is possible to obtain images of the same part of the object 3 having different angles.

When the object 3 is photographed by the camera 2, when the shape of the object 3 has irregularities, the relationship between the position where the reflected light from the object 3 is received and the shape of the object 3 makes the object of a certain part It may not be possible to make the reflected light reflected at 3 enter, but in the image obtained by the three-dimensional shape measuring apparatus 1B, the reflected light when received at a certain angle is shaded and thus becomes an image. Even if there is a missing object part, there is a possibility that the image of this part can be obtained from another image received at another angle.

Thus, the image signals 2a when light is received at the same point from a large number of different angles are interpolated and processed, and the images of the missing object portions are interpolated to form a shape having large irregularities. The accurate measurement of the object 3 can be performed. Embodiment 4; FIG. 10 is a side view illustrating a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 6, and FIG. 11 is a three-dimensional shape measuring apparatus shown in FIG. It is a graph of an image obtained as an example. Note that FIG.
0 is drawn assuming that the convey direction of the conveyor is perpendicular to the paper surface. 10 and 11, the same parts as those of the three-dimensional shape measuring apparatus according to the embodiment of the present invention corresponding to claim 1 shown in FIGS. 1 to 3 are designated by the same reference numerals, and the description thereof will be omitted. In FIG. 10, reference numeral 1C denotes a light source device 5 and a transmission means for reflected light with respect to the three-dimensional shape measuring apparatus 1 according to an embodiment of the present invention corresponding to claim 1 shown in FIGS. This is a three-dimensional shape measuring apparatus apparatus in which a first light source device group 5G and a reflecting mirror constituting body 6G which is a transmitting means for reflected light are used instead of the certain reflecting mirror constituting bodies 6A and 6B.

The first light source device group 5G uses the light source device 5 as an individual light source device device, and the slit light 51a, 51b, 51c irradiated by each light source device 5 has a width direction
Both of them are installed so as to be horizontal with respect to the placement surface 4a on which the object 3 is placed, parallel to each other, and equidistant from each other by the mutual spacing H ₀ . In addition, the light source device 5 includes the slit lights 51a, 51b, 51c.
In order to irradiate the entire circumference of the object 3 with a wide area, a plurality of units are installed for each slit light 51a, 51b, 51c.

The reflecting mirror structure 6G includes a pair of a first reflecting mirror 61G and a second reflecting mirror 62G each having a conical reflecting surface. The reflecting mirror 61G has its reflecting surface 61Ga directed toward the light receiving portion 21 and its central axis line is perpendicular to the mounting surface 4a of the conveyor 4, and the central axis line coincides with the center of the light receiving portion 21. is set up. Further, the reflecting mirror 62G has its reflecting surface 62Ga directed toward the object 3 side, and its central axis is concentric with the central axis of the reflecting mirror 61G and is reflected from the object 3 received by the reflecting surface 62Ga. Slit light group 51G (hereinafter, when the slit lights 51a, 51b, 51c are collectively referred to,
Sometimes I say this. ) Is installed at a position where the reflected light group 51GA of) is reflected toward the reflection surface 61Ga of the reflection mirror 61G. That is, the reflector structure 6G is the object 3
The reflected light group 51GA reflected from is received by the reflecting mirror 62G, is reflected toward the reflecting mirror 61G, and is reflected by the reflecting mirror 61G.
Is the entire image of the object 3 reflected on the reflecting mirror 62G
The light is received by the light receiving section 21 of.

The individual reflected lights of the reflected light group 51GA reflected by the slit light group 51G on the object 3 are all the objects 3
Is a ring that goes around the circumference of the
The individual reflected light of the GA is the mutual distance H between the slit lights 51a, 51b, 51c of the slit light group 51G.
It corresponds to the reflected light reflected at the contour position of the object 3 according to ₀ . By the way, since the reflecting mirror 61G and the reflecting mirror 62G are conical with their central axes being concentric, the reflecting mirror 61G
The reflected light reflected by is the reflected light group 51G reflected by the object 3.
The state of A is maintained.

The three-dimensional shape measuring apparatus 1C shown in FIG. 10 has the above-mentioned configuration, and is an apparatus for measuring the three-dimensional shape of the object 3 by using the optical cutting method. Three-dimensional shape measuring device 1
In C, when the object 3 placed on the placing surface 4a of the conveyor 4 is conveyed by the conveyor 4 and the central portion of the object 3 reaches the position immediately below the light receiving unit 21, the image capturing by the camera 2 is performed. Then, the image of the object 3 is obtained. here,
An image frame 9C obtained by the camera 2 in the three-dimensional shape measuring apparatus 1C will be described. As shown in FIG. 11, in the three-dimensional shape measuring apparatus 1C, unlike the case of the three-dimensional shape measuring apparatus 1, since the horizontal slit light group 51G is emitted from the periphery of the object 3, the reflected light by the slit light group 51G is generated. The group 51GA also has a ring shape that goes around the object 3. The reflected light by each reflected light group 51GA is the slit light 51a, 51b, 51c of each slit light group 51G.
It appears as contour lines of the object 3 according to the mutual distance H ₀ of.
That is, in the image frame 9C, the images of the object 3 corresponding to the slit lights 51a, 51b, and 51c,
The images are obtained as images 38a, 38b, 38c which are contour lines. The image of the image frame 9C is output from the camera 2 as the image signal 2a and stored in one frame memory 72.

The image signal 2a stored in the frame memory 72 is taken out to the processing circuit section 73, and the known values such as the dimension of the mutual interval H ₀ are also used for the object 3
The calculation processing of the three-dimensional shape is performed. The three-dimensional shape measuring apparatus 1C measures the three-dimensional shape of the object 3 by obtaining an image representing the shape of the plurality of objects 3 at equal height positions by one image capturing using the one camera 2. Can be performed in a short time.

In the above description of the fourth embodiment, the first
Although the number of slit light groups 51G included in the light source device group 5G is three, the number is not limited to this, and may be four or more, for example. By increasing the number of slit lights 51G, it is possible to improve the measurement accuracy of the three-dimensional shape of the object 3. Fifth Embodiment: FIG. 12 is a side view for explaining a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 7, and FIG. 13 is a side view seen from the arrow S in FIG. FIG. 14 is a graph of an image as an example obtained by the three-dimensional shape measuring apparatus shown in FIGS. 12 and 13. Note that FIG. 12 is drawn assuming that the convey direction of the conveyor is perpendicular to the paper surface. 12 and 13, in FIGS.
A three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 1 shown in FIG. 3 and a three-dimensional shape according to an embodiment of the present invention corresponding to claim 6 shown in FIGS. The same parts as those of the measuring device are designated by the same reference numerals, and the description thereof will be omitted.

In FIGS. 12 and 13, 1D is the same as in FIG.
In addition to the three-dimensional shape measuring apparatus 1C according to the embodiment of the present invention corresponding to claim 6 shown in FIG.
It is a three-dimensional shape measuring device device in which H is additionally used. The second light source device group 5H uses at least two sets of light source devices 5 as individual light source devices, and each of the light source devices 5 does not interfere with the shooting of the camera 2 in the conveying direction of the conveyor 4 (see FIG. 13 is indicated by an arrow X), and the slit lights 51d, 51 are applied to the mounting surface 4a of the conveyor 4 from diagonally above and opposite to each other.
It is installed to irradiate e. In addition, in the second light source device group 5H, the slit-shaped width directions of the slit lights 51d and 51e are perpendicular to the conveying direction of the conveyor 4, and these slit lights 51d and 51e are in the width direction. , Are installed so as to be parallel to each other while maintaining a distance L _D along the conveying direction of the conveyor 4.

The second slit light group 51H emitted by the second light source device group 5H (hereinafter, this may be said when the slit lights 51d and 51e are collectively referred to).
When it hits the object 3, it is reflected as a reflected light group 51HA. The reflected light group 51HA is received by the light receiving unit 21 of the camera 2 via the reflecting mirror structure 6G, similarly to the reflected light group 51GA by the first light source device group 5G. An image obtained by the camera 2 by these reflected lights is output from the camera 2 as an image signal 2a and stored in one frame memory 72.

The three-dimensional shape measuring apparatus 1D shown in FIGS. 12 and 13 has the above-mentioned configuration, and is an apparatus for measuring the three-dimensional shape of the object 3 using the optical cutting method. Also in the three-dimensional shape measuring apparatus 1D, the object 3 is conveyed by the conveyor 4 and the camera 2 captures an image of the object 3 at the timing when the central portion of the object 3 reaches the position immediately below the light receiving unit 21. Here, the image frame 9D obtained by the camera 2 in the three-dimensional shape measuring apparatus 1D will be described. As shown in FIG. 14, in the three-dimensional shape measuring apparatus 1D, an image in a state in which the image by the reflected light group 51HA is added to the image of the three-dimensional shape measuring apparatus 1C is obtained. That is, in the image frame 9D, the images 38d of the object 3 corresponding to the slit lights 51d and 51e, respectively.
38e is obtained as shown in FIG. Image 38a,
38b and 38c show outlines when the object 3 is horizontally cut, so to speak, while images 38d and 38e are shown.
Shows a contour line when the object 3 is cut in a vertical direction, so to speak. For this purpose, the images 38a, 38b, 38
The intersections where c and the image 38d or the image 38e intersect are on the same vertical plane.

Thus, the image 38, each of which is a contour line
By adding the images 38d and 38e to a, 38b, and 38c, information about the shape of the object 3 between these contour lines can be obtained, so that the shape between the contour lines is corrected and the accuracy is higher. It is possible to measure the three-dimensional shape of an object. In the above description of the fifth embodiment, the number of slit light groups 51H included in the second light source device group 5H is two, but the number of slit light groups 51H is not limited to this.
For example, the number may be three or more. By increasing the number of slit lights 51H, it is possible to further improve the measurement accuracy of the three-dimensional shape of the object 3. When the number of slit lights 51H is increased, it is necessary to add separation processing of each image line segment on the image data according to the increased number.

Although the conveyor 4 conveys the object 3 in the above description of the first to fifth embodiments, the present invention is not limited to this. For example, the object 3 may be stationary. Therefore, the camera 2 may be placed on the conveyor 4 and moved.

[0056]

Since the present invention has the above-mentioned structure, it has the following effects. That is, the image pickup means is installed in a plane including the width direction of the slit light, with its light receiving portion facing the measurement target object side, and the transmission means for reflected light is set in the width direction of the slit light. A pair of reflecting mirror construction bodies each having two reflecting mirrors each having a reflecting surface forming a two-dimensional plane in regions opposite to each other with respect to the plane including the first reflecting mirror construction body; The reflecting mirror has a reflecting surface directed toward the light receiving portion of the image pickup means and one of the coordinate axes of the two-dimensional plane is parallel to the plane including the width direction of the slit light, and the other of the reflecting surface is The second reflecting mirror, which is installed at an obtuse angle with respect to the plane including the width direction of the slit light, and which is provided in each transmitting means for reflected light,
The reflecting surface is directed toward the object to be measured, one coordinate axis of which is parallel to one coordinate axis of the first reflecting mirror, and the reflected light of the slit light reflected from the object to be measured received by the reflecting surface is The reflected light reflected from the object to be measured is installed at a position where the reflected light is reflected toward the reflecting surface of the first reflecting mirror, and is reflected from the object to be measured in regions opposite to each other with respect to the plane including the width direction of the slit light. The image signal processing means receives the image signals corresponding to the reflected light from the respective reflecting mirror components, and interpolates these image signals with each other. The reflected light corresponding to the slit light reflected from the areas opposite to each other with respect to the above-mentioned plane of the object is configured to calculate the shape of the measurement target object by processing It enters the light receiving portion of the imaging means via the reflecting mirror constructs respectively. As a result, the imaging means
An image of the object on the opposite side with respect to the plane will be integrally obtained.

Therefore, in the image obtained by the image pickup means according to the present invention, even if there is an object portion where the image is missing, the reflected light from one of the reflecting mirror constituents becomes a shadow. An image of this portion can be obtained by an image of reflected light that has passed through the other reflecting mirror structure. These image signals are processed by the image signal processing means by interpolating the image signals of the reflected lights reflected in the areas on the opposite sides of the plane, and interpolating the image of the missing object portion. By matching, it becomes possible to improve the accuracy of three-dimensional shape measurement of an object such as accurate measurement of an object having a dome shape.

The image pickup means is installed in a plane including the width direction of the first slit light emitted from the first light source device, with its light receiving portion facing the object to be measured side.
The transmission means for reflected light has reflection surfaces each forming a two-dimensional plane in the regions on the opposite sides with respect to the plane including the width direction of the first slit light on which the imaging means is located.
The first reflecting mirror, which is composed of a pair of reflecting mirror constituent bodies provided with one reflecting mirror, and each reflecting mirror constituent body has one of its two-dimensional planes with its reflecting surface facing the light receiving portion side of the imaging means And the other coordinate axis of the reflecting surface and the plane including the width direction of the first slit light form an obtuse angle, and Of the first reflecting mirror of the mirror structure,
The second reflecting mirrors, which are installed with a gap between the flat surface sides including the width direction of the first slit light from the first light source device, and which are provided in the respective reflecting mirror constituent bodies, have reflecting surfaces thereof. Toward the object to be measured and one of the coordinate axes thereof is parallel to the width direction of the first slit light, and the reflected light of the first slit light reflected from the object to be measured received by the reflecting surface is first reflected. Is installed at a position where it reflects toward the reflecting surface of the reflecting mirror, and the reflected light reflected from the object to be measured is reflected in the areas on the opposite sides with respect to the plane including the width direction of the first slit light. The imaging means is configured to receive the light, and the transportation means provided for the transportation of the measurement target object or the mounting table on which the measurement target object is mounted has at least a portion on which the measurement target object is mounted. This first pickpocket Is intended to provide a slit-shaped opening having a width direction is parallel to the width direction having the bets light,
A second slit light is radiated toward the light receiving portion of the image pickup means through the gap between the opening and the first reflecting mirror, on the opposite side of the light receiving portion of the image pickup means of the conveying means. A light source device is installed, the second slit light supplied by the second light source device has a width direction parallel to the width direction of the first slit light, and the image signal processing means is The image signal corresponding to the reflected light from each reflector structure and the image signal corresponding to the second slit light are input, and the respective image signals are interpolated and processed to calculate the shape of the object to be measured. In this case, the first
In addition to the first slit light from the light source device, the second slit light supplied by the second light source device is supplied. Since this second slit light is emitted toward the light receiving portion of the image pickup means through the object, a part of the second slit light received by the light receiving portion is blocked by the object. It becomes a thing.

Therefore, if the object is placed so that its maximum width is located on the opening, the portion where the second slit light is missing is the maximum width of the object, and the second slit light causes The image makes it possible to obtain accurate information on the widthwise dimension of the object. By using the information on the widthwise dimension of the object, it becomes easy to execute the correction process for the shape of the end portion of the object, and the calculation process can be executed in a short time.

The light source device is composed of a plurality of individual light source devices for irradiating slit light. In each of the light source devices, the width direction of the slit light for irradiation is perpendicular to the carrying direction of the carrying means. In addition, the image pickup means is installed in parallel with each other along the carrying direction of the carrying means and at intervals, and the imaging means is a carrying means of the slit light emitted by a plurality of individual light source devices provided in the light source device. In the plane including the width direction of the slit-shaped slit light existing in the central portion with respect to the transport direction of, the light receiving portion is installed toward the measurement target object side, and the transmission means for reflected light is A pair of reflecting mirror structures provided with two reflecting mirrors each having a reflecting surface forming a two-dimensional plane in regions opposite to each other with respect to the plane including the width direction of the slit light in which the imaging unit is located. The first reflecting mirror, which is formed of a body and is provided in each reflecting mirror constructing body, has its reflecting surface directed toward the light receiving portion of the image pickup means and has one coordinate axis of its two-dimensional plane parallel to the width direction of the slit light. At the same time, the angle between the other coordinate axis of the reflecting surface and the plane including the width direction of the slit light is set to form an obtuse angle, and the second reflecting mirror included in each transmitting means for reflected light is The reflecting surface is directed toward the object to be measured and one coordinate axis thereof is parallel to the width direction of the slit light, and the reflected light of the slit light reflected by the object to be measured received by the reflecting surface is reflected by the first reflecting mirror. The image pickup means is installed at a position where the reflected light is reflected toward the reflection surface, and the reflected light reflected from the measurement target object in regions opposite to each other with respect to the plane including the width direction of the slit light. By The image signal processing means interpolates and processes the image signals corresponding to the reflected light from each of the reflecting mirror constituents using the plurality of individual light source devices as light sources. In this case, in addition to the slit light from the light source device according to the above item, the width direction from each individual light source device is the slit light by calculating the shape of the measurement target object. The slit light parallel to the width direction of is supplied. Reflected light corresponding to the plurality of slit lights is incident on the light receiving unit of the imaging device. Therefore, in the image pickup device, a plurality of images corresponding to the plurality of slit light beams in the range where the slit light beams of the plurality of individual light source devices are applied can be obtained by one shot. As a result, image information relating to the shape of the object can be acquired with a small number of times of photography, and it becomes possible to shorten the measurement time of the three-dimensional shape of the object.

In the above item, the photographing control means is provided, and the photographing control means performs the photographing by the image pickup means, and the object to be measured or the image pickup means conveyed by the conveying means has both ends of the slit light by the plurality of individual light source devices. It is configured to give an operation signal to the image pickup means in the same cycle as the time required to move by a distance equal to the sum of the distance between the slit lights located at As a result, when obtaining an image of the object in the transport direction of the transport means, the image can be acquired with the smallest number of times of photography, and the measurement time of the three-dimensional shape of the object can be shortened.

In the above item, in the light source device, the slit light beams emitted by the individual light source devices are equidistant from each other in the width direction, and the image pickup control means is provided. When the object to be measured carried by the carrying means or the imaging means
By providing the image pickup means with an operation signal to be performed in the same cycle as the time required to move the slit light beams by the plurality of individual light source devices by a distance equal to the mutual interval between the slit light beams. An image of the same region of the same number of objects as the number of installed individual light source devices is obtained when the same region is observed at different angles. Generally, when observing the shape of an object with unevenness,
Depending on the relationship between the position where the reflected light from the object is received and the shape of the object, an image of a part of the object may not be obtained. Even in such a case, the three-dimensional shape according to the present invention may be obtained. According to the measuring device, there is a possibility that an image of such a part can be obtained by obtaining images observed at different angles.

Therefore, by using the image signals obtained when observing the same region at different angles from each other and interpolating and processing the image signals of the missing regions, the image signals of the missing regions are interpolated with each other, thereby forming a large unevenness. It is possible to accurately measure the three-dimensional shape of the object. The light source device is a first light source device group having a plurality of individual light source devices for irradiating the first slit light group, and each of the individual light source devices has a width direction of the slit light to irradiate, which is a measurement target object. Are placed in a horizontal direction with respect to a mounting surface on which they are mounted, and are installed in parallel with each other and at intervals, and the transmitting means for reflected light both have conical reflecting surfaces. A first axis provided with a transmission means for reflected light, comprising two reflecting mirrors installed such that the central axis is perpendicular to the placement surface on which the object is placed and the central axes are concentric. The reflecting mirror is installed with its reflecting surface facing the light receiving section of the image pickup means, and the second reflecting mirror included in the transmitting means for reflected light has its reflecting surface facing the measurement target object side and its reflecting surface. The first reflected from the object to be measured received at It is installed at a position where the reflected light of the slit light group is reflected toward the reflecting surface of the first reflecting mirror, and the image pickup unit directs its light receiving portion toward the object to be measured, and the two reflecting mirrors are arranged. It is installed so that the center of the light receiving portion is located on the central axis of the conical reflection surface having the conical shape, and the image signal processing means is input through the transmission means for reflected light. By inputting a plurality of image signals corresponding to the reflected light from the measurement target object, by interpolating these image signals with each other and processing them to calculate the shape of the measurement target object, By irradiating the entire circumference of the object with a plurality of slit light groups whose width directions are spaced from each other and horizontal to each other, it is possible to obtain an image corresponding to the contour line position of the object by one-time photographing. Become. This makes it possible to reduce the time required to measure the three-dimensional shape of the object.

In the above item, a second light source device is provided, which irradiates the object to be measured with the second slit light group in a direction perpendicular to the carrying direction of the carrying means.
In the plurality of individual light source devices included in the second light source device group, the width direction of each slit light is perpendicular to the carrying direction of the carrying means, and the slit light is In the width direction, they are installed so as to be parallel to each other along the transporting direction of the transporting means, and the image signal processing means is the first one from the measurement target object input through the transmitting means for reflected light. The image signals corresponding to the reflected light of the first slit light group and the reflected light of the second slit light group by the first light source device group are input, and the image signals corresponding to the respective reflected light are interpolated with each other. By performing the processing to calculate the shape of the object to be measured, the second light source device group irradiates in addition to the image corresponding to the contour line position of the object by the first light source device group. By slit light group, It obtained an image related object shape between the serial contour position of. By performing the interpolation calculation of the shape of the object between the contour lines by using the image signal by the second slit light group, it becomes possible to further improve the measurement accuracy in the three-dimensional shape measurement.

[Brief description of drawings]

FIG. 1 is a side view illustrating a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 1.

FIG. 2 is a block diagram of processing means shown in FIG.

FIG. 3 is a graph of an image obtained as an example by the three-dimensional shape measuring apparatus shown in FIG. 1, where (a) is the case where the tip of the object is irradiated with slit light, and (b) is the object. When the slit light is radiated to the center of the object, (c) is the case where the object has passed through the slit light irradiation position

FIG. 4 is a side view illustrating a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 2;

5 is a graph of an image obtained as an example by the three-dimensional shape measuring apparatus shown in FIG.

FIG. 6 is a graph illustrating an image interpolation method.

FIG. 7 is a side view illustrating a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claims 3 to 5.

8 is a graph of an image as an example obtained by the three-dimensional shape measuring apparatus shown in FIG.

FIG. 9 is a detailed view of the R part in FIG.

FIG. 10 is a side view illustrating a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 6;

11 is a graph of an image obtained as an example by the three-dimensional shape measuring apparatus shown in FIG.

FIG. 12 is a side view illustrating a three-dimensional shape measuring apparatus according to an embodiment of the present invention corresponding to claim 7;

FIG. 13 is a side view seen from the arrow S in FIG.

FIG. 14 is a graph of an image obtained as an example with the three-dimensional shape measuring apparatus shown in FIGS.

[Explanation of symbols]

 1 three-dimensional shape measuring device 1a plane 2 ITV camera (imaging means) 21 light receiving part 2a image signal 3 object (object to be measured) 4 conveyor (conveying means) 4a mounting surface 5 light source device 51 slit light (slit-like light flux) 51A Reflected light 51B Reflected light 6A Reflective mirror constituent (reflected light transmitting means) 6B Reflective mirror constituent (reflected light transmitting means) 7 Processing means

Claims (7)

[Claims] 1. An image pickup means for inputting reflected light from an object to be measured and outputting an image signal corresponding to the reflected light, and an object to be measured or the image pickup means mounted on a flat mounting surface. The slit-shaped light beam is radiated to the object to be measured from the vertical direction with respect to the transfer direction of the transfer device and the width direction of this light beam is set to be perpendicular to the transfer direction of the transfer device. Shape of the object to be measured by processing the image signal output from the imager In the three-dimensional shape measuring apparatus having an image signal processing means for calculating, the image pickup means is installed with its light receiving portion facing the object to be measured in a plane including the width direction of the slit-like light flux. Was done The transmitting means for reflected light includes a pair of two reflecting mirrors each having a reflecting surface forming a two-dimensional plane in regions opposite to each other with respect to a plane including the width direction of the light flux. The first reflecting mirror provided in each reflecting mirror constituting body has its reflecting surface directed toward the light receiving portion side of the image pickup means, and one of the coordinate axes of the two-dimensional plane is set in the width direction of the light flux. The second reflection is provided parallel to the plane including the second reflection axis and the other coordinate axis of the reflection surface and the plane including the width direction of the light beam form an obtuse angle, and the transmission means for each reflected light is provided. The mirror has its reflecting surface directed toward the object to be measured and has its one coordinate axis parallel to one coordinate axis of the first reflecting mirror, and the reflection of the light flux reflected from the object to be measured received by the reflecting surface. Aim the light at the reflective surface of the first reflector Is installed in a position to reflect the reflected light is reflected from each of the measuring object in a region on the opposite side each other with respect to the plane containing the width direction of the light beam is intended to be received by the imaging means,
The image signal processing means inputs image signals corresponding to the reflected light from the respective reflecting mirror components, interpolates these image signals with each other, and processes them to calculate the shape of the object to be measured. A three-dimensional shape measuring device characterized by the above. 2. An image pickup means for inputting reflected light or the like from an object to be measured and outputting an image signal corresponding to the reflected light or the like,
Conveying means for mounting and transporting the measurement target object or the imaging means on a flat mounting surface, and irradiating the measurement target object with the slit-shaped first light flux from a direction perpendicular to the transport direction of the transporting means. At the same time, the first light source device is installed so that the width direction of the first light flux is perpendicular to the transport direction of the transport means, and the first light source device includes the first light source device.
A transmitting means for reflected light that guides the reflected light reflected by the luminous flux of the object to be measured to the image pickup means, and an image signal processing means for processing the image signal output from the image pickup means to calculate the shape of the object to be measured. In the provided three-dimensional shape measuring apparatus, the image pickup means is installed with its light receiving portion facing the measurement target object side in a plane including the width direction of the first light flux emitted from the first light source device. The transmitting means for the reflected light is two pieces each having a reflecting surface forming a two-dimensional flat surface in a region opposite to each other with respect to the plane including the width direction of the first light flux in which the image pickup means is located. The first reflecting mirror provided in each of the reflecting mirror constructs has one of its two-dimensional planes with its reflecting surface facing the light receiving portion side of the image pickup means. The coordinate axes are parallel to the width direction of the first light flux. In addition, the angle between the other coordinate axis of the reflecting surface and the plane including the width direction of the first light flux forms an obtuse angle, and the first reflecting mirror of each reflecting mirror structure is The second reflecting mirrors that are installed with a gap between the flat surface sides including the width direction of the first light flux from the first light source device and that are provided in the respective reflecting mirror constructing bodies,
The reflecting surface is directed toward the object to be measured and one of the coordinate axes is parallel to the width direction of the first light beam, and the reflected light of the first light beam reflected by the object to be measured received by the reflecting surface is first reflected. Is installed at a position where it reflects toward the reflecting surface of the reflecting mirror, and the reflected light reflected from the object to be measured in regions opposite to each other with respect to the plane including the width direction of the first light flux, The image pickup means receives the light, and the transport means provided for transporting the measurement target object or the mounting table on which the measurement target object is mounted has at least a portion on which the measurement target object is mounted. Is provided with a slit-shaped opening having a width direction parallel to the width direction of the light flux of, and the opening and the first reflecting mirror are provided on the opposite side of the conveying means to the light receiving portion of the image pickup means. Said gap between A second light source device for irradiating the second light flux having a slit shape toward the light receiving portion of the imaging means is installed, and the second light flux having a slit shape supplied by the second light source device is , A width direction parallel to the width direction of the slit-shaped first light flux, and the image signal processing means includes image signals corresponding to the reflected light from the respective reflecting mirror constituents, and slit-shaped first light beams. A three-dimensional shape measuring apparatus characterized in that an image signal corresponding to a second light flux is input, and the respective image signals are interpolated and processed to calculate the shape of an object to be measured. 3. An image pickup means for inputting reflected light from an object to be measured and outputting an image signal corresponding to the reflected light, and the object to be measured or the image pickup means is mounted on a flat mounting surface. The slit-shaped light beam is radiated to the object to be measured from the vertical direction with respect to the transfer direction of the transfer device and the width direction of this light beam is set to be perpendicular to the transfer direction of the transfer device. Shape of the object to be measured by processing the image signal output from the imager In the three-dimensional shape measuring apparatus having an image signal processing means for calculating, the light source device comprises a plurality of individual light source devices for irradiating the slit-shaped light flux, and each individual light source device irradiates Each of the width directions of the luminous fluxes is perpendicular to the transport direction of the transport means, and the light fluxes are installed in parallel with each other along the transport direction of the transport means and at intervals. Of the light beams emitted by the plurality of individual light source devices provided in the light source device, the light receiving part is measured in a plane including the width direction of the slit-shaped light beam that is present at the substantially central portion in the transport direction of the transport means. The transmitting means for the reflected light is installed toward the object side, and the transmitting means for the reflected light has two-dimensional planes in the areas opposite to each other with respect to the planes including the width direction of the light flux existing at the position of the image pickup means. The first reflecting mirror is composed of a pair of reflecting mirror constituent bodies provided with two reflecting mirrors each having a reflecting surface, and the reflecting surface of the first reflecting mirror is directed toward the light receiving portion side of the image pickup means. One of the coordinate axes of the two-dimensional plane It is installed parallel to the plane including the width direction of the light beam, and the angle between the other coordinate axis of the reflecting surface and the plane including the width direction of the light beam is an obtuse angle. The second reflecting mirror provided has its reflection surface directed toward the object to be measured and has one coordinate axis parallel to the coordinate axis of one of the first reflecting mirrors, and is reflected from the object to be measured received by the reflecting surface. It is installed at a position that reflects the reflected light of the light flux toward the reflection surface of the first reflecting mirror, and is reflected from the measurement target object in regions that are opposite to each other with respect to the plane including the width direction of the light flux. The reflected light is received by the image pickup means, and the image signal processing means outputs the image signal corresponding to the reflected light from the plurality of individual light source devices from the respective reflecting mirror structures. In which treated by interpolating calculates the shape of the measurement object you are,
A three-dimensional shape measuring device characterized in that 4. The three-dimensional shape measuring apparatus according to claim 3, further comprising: imaging control means, wherein the imaging control means executes the imaging by the imaging means, and the measurement target object or the imaging means transported by the transportation means Moving by a distance equal to the sum of the distance between the slit-shaped light fluxes located at both ends in the transport direction of the slit-shaped light fluxes by the plurality of individual light source devices and the mutual spacing between the adjacent slit-shaped light fluxes A three-dimensional shape measuring apparatus characterized in that it gives an operation signal to the image pickup means in the same cycle as the time required for the movement. 5. The three-dimensional shape measuring apparatus according to claim 3, wherein in the light source device, the light beams emitted by the individual light source devices are spaced at equal intervals in the width direction, and the imaging control means is provided. The photographing control means includes a plurality of individual light source devices for measuring the object to be imaged or the imaging means for performing the imaging by the imaging means with respect to the transportation direction of the transportation means for the slit-shaped light fluxes by the plurality of individual light source devices. A three-dimensional shape measuring apparatus characterized in that it gives an operation signal to the image pickup means at the same cycle as the time required to move a distance equal to the mutual distance between the slit-shaped light beams. 6. An image pickup means for inputting reflected light from an object to be measured and outputting an image signal corresponding to the reflected light, and the object to be measured or the image pickup means is mounted on a flat mounting surface. A conveying means for conveying the object to be measured, a light source device for irradiating the measurement target object with a slit-shaped light beam, and a transfer means for reflected light that guides the reflected light reflected by the light beam from the light source device to the measurement object object, In the three-dimensional shape measuring apparatus, comprising: an image signal processing unit that processes an image signal output from the image capturing unit to calculate the shape of the measurement target object, the light source device irradiates the slit-shaped first luminous flux group. A plurality of individual light source devices having a plurality of individual light source devices, each of the individual light source devices having a width direction of a luminous flux radiated in a horizontal direction with respect to a mounting surface on which a measurement target object is mounted. And each Are installed so that their width directions are parallel to each other and spaced from each other, and the transmission means for reflected light both have conical reflection surfaces,
The central axes of these are perpendicular to the mounting surface of the transporting means, and further, the two reflecting mirrors are installed so that the central axes thereof are concentric. The first reflecting mirror provided is installed with the reflecting surface thereof facing the light receiving portion side of the image pickup means, and the second reflecting mirror is provided in the transmitting means for reflected light.
Of the reflecting mirror of the first light flux group is directed toward the measurement target object side, and the reflected light of the first light flux group reflected from the measurement target object received by the reflection surface is directed toward the reflection surface of the first reflection mirror. The image pickup means is disposed at a position where the light receiving portion is directed toward the object to be measured, and at the same time, on the central axis of the conical shape of the conical reflecting surface of the two reflecting mirrors. The light receiving unit is installed so that the image signal processing unit receives a plurality of image signals corresponding to the reflected light from the measurement target object input through the reflected light transmission unit. Then, the three-dimensional shape measuring apparatus is characterized in that these image signals are interpolated and processed to calculate the shape of the object to be measured. 7. The three-dimensional shape measuring apparatus according to claim 6, comprising a plurality of individual light source devices for irradiating the object to be measured with the slit-shaped second luminous flux groups in a direction perpendicular to the carrying direction of the carrying means. In the plurality of individual light source devices provided with the second light source device group, the width direction of each light beam is perpendicular to the carrying direction of the carrying means, and these light beams are In the width direction, they are installed so as to be parallel to each other along the carrying direction of the carrying means, and the image signal processing means is the first object from the object to be measured input via the transmitting means for reflected light. Image signals corresponding to the reflected light of the first light flux group and the reflected light of the second light flux group by the one light source device group are input, and the image signals corresponding to the respective reflected light are interpolated with each other. Object to be processed and measured A three-dimensional shape measuring apparatus, which is for calculating the shape of a.