JPH07246702A - Ink jet head and its manufacture - Google Patents

Abstract

PURPOSE:To prevent ink droplets from being discharged unsatisfactorily due to bubbles by providing a stepped part on a substrate consisting of a piezoelectric material with grooves and further installing a sealing member which blocks the outflow of ink to an outside from an opening in the groove communicating with a through hole formed on a lid, between the stepped part and the lid. CONSTITUTION:A sealing member 114 is adhered to a stepped part 112 formed by fabricating a part of the upper surface of a substrate 101 of a piezoelectric material, plural grooves 110 being formed on the upper surface and a positioning groove 145 being formed on both edges of the upper surface. In addition, a lid 120 is adhered to the upper surface of the sealing member 114 and the residual upper surface 103 of the substrate 101. Further, a nozzle plate 130 with nozzle holes 132 is bonded to the edge surface 101a of the substrate 101 with the open grooves 110 and the edge surface 120 of the lid 120 which is flush with the edge surface 101a. The sealing member 114 is provided so as to allow every other openings of the grooves 110 to be closed by adhering the protrusions 118 spaced at every two pitches of the groove 110, to the edge surface 111b of the stepped part on the diaphragm 111 of the groove 110.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of an ink jet printer and a manufacturing method thereof, and more particularly to a structure of a piezoelectric ink jet head using a shear mode and a manufacturing method for forming this structure.

[0002]

2. Description of the Related Art A plurality of grooves are formed on the upper surface of a substrate made of a piezoelectric material, and a lid having an ink supply means is adhered to the upper surface of the substrate. An ink jet head that compresses the ink inside and ejects ink droplets from the ejection holes onto the printing paper to perform printing is described in, for example, Japanese Patent Laid-Open No. 4-307254.

The ink jet head having such a structure is suitable for mounting the ink storage means of the ink cassette on the lid, but on the other hand, it is necessary to block one opening of the groove to prevent the outflow of ink.

For this reason, conventionally, as described in the above-mentioned publication, after the lid is attached to the substrate, solder or silicon resin is injected into the opening for sealing.

[0005]

According to such a structure, the wall of the ink chamber constituted by the groove and the lid is contaminated by the sealing adhesive and becomes a water-repellent surface, and air bubbles are easily generated in the ink chamber. . Then, the air bubbles are mixed in the ink and clogged in the nozzle hole, which causes a problem that the ink cannot be ejected.

On the other hand, when the sealing adhesive is small,
As shown in FIG. 1B or FIG. 7B of Japanese Patent Laid-Open No. 4-307254, a recess branched from the ink flow path is formed in the sealing portion at the rear end of the groove, and bubbles are retained in this recess. As a result, the pressure rise of the ink is prevented and defective ejection occurs. On the contrary, if there is too much sealing adhesive, the ink flow path from the lid to the ink chamber becomes narrow, making it difficult to supply ink and causing ejection failure.

Next, in the ink jet head having such a structure, the ink is supplied to all the grooves as shown in FIGS. 1 and 3 of the above publication, for example. For this reason,
Deformation of one partition causes deformation of the next partition through the ink, and crosstalk of ink droplet ejection is likely to occur.

When it is attempted to increase the printing speed, it becomes difficult to avoid crosstalk, resulting in deterioration of printing quality.

The present invention has been made in order to solve the above-mentioned problems, and avoids the phenomenon of ejection failure or ejection failure of ink droplets caused by bubbles generated and mixed in the groove filled with ink. An object of the present invention is to provide a configuration of an inkjet head and a method for manufacturing the same. It is another object of the present invention to provide an inkjet head structure capable of preventing crosstalk of ink droplet ejection and improving the printing quality of the inkjet head, and a manufacturing method thereof.

[0010]

In order to achieve the above object, the ink jet head of the present invention adopts the following means.

The ink jet head of the present invention has a substrate having a plurality of grooves and made of a piezoelectric material, and a lid having a through hole or a common groove for supplying ink to at least a part of the grooves, and the lid has an upper surface of the groove. An ink jet that is attached to a substrate so as to block the ink and compresses the ink supplied to the groove by piezoelectrically deforming the partition between the grooves to eject ink droplets from a nozzle hole provided at one end of the groove for printing. In the head, a stepped portion is provided on the substrate, a sealing member is provided between the stepped portion and the lid, which blocks the outflow of ink from the opening of the groove to the outside, and connects the through hole provided in the lid or the common groove with the groove. It is characterized by attaching.

According to the method of manufacturing an ink jet head of the present invention, a plurality of grooves are formed on the upper surface of a substrate made of a piezoelectric material, a conductive film is formed on the surface including the grooves, and then a step portion is formed on the substrate by step processing. And a sealing member is adhered to the stepped portion so as to close the opening of the groove, and then the upper surface of the substrate is surface-ground including the sealing member, and then a parylene film is formed by CVD on the entire upper surface including the groove. After that, the lid is bonded to the surface that has been ground.

The sealing member of the ink jet head of the present invention is provided with a notch, and the through hole or the common groove of the lid is communicated with the groove of the substrate through the notch, and the end face at the end of the notch is on the lower surface of the lid. The end surface of the outlet of the through hole or the common groove is configured to have the same or similar positional relationship with that of the business trip.

The ink jet head sealing member of the present invention is characterized in that it has a protrusion for closing every other opening of the groove, a notch for communicating the remaining groove and a through hole provided in the lid. .

The ink jet head of the present invention is characterized in that a parylene film is formed on the surface of the groove, the sealing member, and the adhesive between the sealing member and the step.

[0016]

According to the ink jet head having the structure of the present invention, the substrate of the ink jet head is provided with the step portion, and the sealing member is attached between the step portion and the lid.

In this way, the ink is prevented from flowing out from the opening of the groove provided in the substrate, and the ink is supplied to the ink groove by connecting the ink through hole provided in the lid or the common groove with the groove to seal the ink. The stop member connects the through hole of the lid and the groove to form an ink chamber along the flow of the ink without forming a concave portion branched from the ink flow path.

According to the present invention, since the sealing member is used for sealing, the protrusion of the adhesive is small, and the wall of the ink chamber is covered with the parylene film.

As a result, the wall of the ink chamber constituted by the groove and the lid is contaminated by the sealing adhesive as in the conventional case and becomes a water repellent surface, and bubbles are easily generated in the ink chamber, and the bubbles are mixed in the ink. However, it is possible to prevent the nozzle hole from being clogged with the ink from being unable to be ejected.

Further, as in the conventional case, the ink flow path becomes narrow due to the amount of the sealing adhesive, making it difficult to supply the ink or forming a concave portion branching from the flow path, in which a bubble is formed. Can be held to prevent an increase in ink pressure and prevent ejection failure.

Further, according to the ink jet head having the structure of the present invention, the sealing member is provided with the projecting portion which closes every other opening of the groove, and the notch portion which connects the remaining groove and the through hole provided in the lid. There is.

Therefore, the ink is not supplied to all the grooves as in the conventional case, but is supplied every other ink. Therefore, even if one partition is deformed, it is prevented that the next partition that is not piezoelectrically driven is deformed to cause crosstalk of ink droplet ejection, and excellent print quality is maintained even in high-speed printing. be able to.

Further, according to the manufacturing method of the present invention, after forming a plurality of grooves on the upper surface of the substrate made of a piezoelectric material, a conductive film is formed on the surface including the grooves, and then a step is formed on the substrate by step processing. And a sealing member is adhered to the stepped portion so as to close the opening of the groove, and then the upper surface of the substrate is surface-ground including the sealing member, and then a parylene film is formed by CVD on the entire upper surface including the groove. Then, the lid is bonded to the surface that has been ground.

As a result, the above-described ink jet head according to the present invention can be manufactured reliably and at a low manufacturing cost.

[0025]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing the structure of an inkjet head according to a first embodiment of the present invention.

A plurality of grooves 110 are formed on the upper surface of the substrate 101 made of a piezoelectric material by processing with a dicing disk, and positioning grooves 145 are formed on both sides of these grooves 110.
The stepped portion 112 is formed by step-processing a part of the upper surface, and the sealing member 114 is adhered to the stepped portion 112 to form the sealing member 1.
A lid 12 on the upper surface 14 and the remaining upper surface 103 of the substrate 101.
0 is glued.

The end surface 10 of the substrate 101 in which the groove 110 is opened
1a and the nozzle plate 13 having a nozzle hole 132 on the end surface 120a of the lid 120 that is flush with the end surface 101a.
0 is glued.

The sealing member 114 is a plate-shaped member having a plurality of cutouts 116 provided at intervals of two pitches of the groove 110 and a projection 118 between the cutouts 116. The protrusion 118 is formed on the end surface 111 of the step portion of the partition wall 111 of the groove 110.
Every other opening of the groove 110 is closed by adhering to b.

The lid 120 has a common ink reservoir 122,
A plurality of through holes 124 that individually communicate the ink reservoir 122 and the notch 116 are provided. Furthermore, the lid 12
An upper plate 152 having an ink introduction hole 151 is attached to 0.

FIG. 2 shows the groove 110 passing through the center of the notch 116.
FIG. 3 is a cross-sectional view showing a state cut along a plane parallel to and perpendicular to a substrate 101. Note that FIG. 2 is a side view A- shown in FIG.
The cross section in the A line is shown.

As shown in FIG. 2, the notch 116 is formed in the through hole 1
It is connected to 24 so as to be displaced in the ink flowing direction. Therefore, the space formed by the lid 120 and the sealing member 114 has a shape that follows the flow of ink.

In this way, ink is supplied to the even-numbered grooves 110d (hereinafter referred to as ink grooves) except the positioning groove 145 (see FIG. 1) to fill the ink.

FIG. 3 is a sectional view showing a section taken along the line BB in FIG. 5, and is a sectional view taken along an odd numbered groove 110c (hereinafter referred to as a dummy groove) from the end of the substrate 101 except for the positioning groove 145. Is.

The dummy groove 110c is closed by the projection 118 of the sealing member 114, and ink is not supplied.

FIG. 4 is a cross-sectional view showing a cross section taken along the line CC of FIG. 5, showing a cross section taken along the partition wall 111. As shown in FIG. 4, the end portion 111b of the partition wall and the end surface of the protruding portion 118 of the sealing member 114 are joined together.

As shown in FIG. 15, the inner surface of the groove 110 is separated into the drive electrodes 108 by a method described later.
Is formed, and the parylene film 109 is coated on the drive electrode 108 to prevent the deterioration of the ink due to the energization of the ink.

Further, the parylene film 10 on the drive electrode 108
9 is a sealing member 114, as shown in FIG. 14 and described later.
The inner wall of the ink chamber is prevented from being water repellent together with the parylene film 109 that covers the surface of the ink groove 110d.
(See FIGS. 1 and 2) Prevents the generation of bubbles inside.

Even when air bubbles are mixed into the ink from the outside, the space formed by the ink groove 110d has a shape along the flow of the ink as described above.

Therefore, as in the conventional case, the ink flow path becomes narrow due to the amount of the adhesive for sealing, making it difficult to supply the ink, or a concave portion branched from the flow path is generated. The bubbles are retained in the ink to prevent the ink pressure from rising and no ejection failure occurs.

FIG. 6 is a sectional view showing a side surface of the substrate 101 opposite to the surface on which the nozzle plate 132 is attached. In addition, in FIG. 6, the sealing member 114 and the parylene film 109 are not shown.

As shown in FIG. 6, the groove 11 in the partition wall 111.
The drive electrode 108 formed on the inner surface of 0 and the terminal electrode 106 formed on the inner surface of the shallow groove 110 of the step portion 112 are formed so as to be electrically connected.

Then, as shown in FIG. 7, the anisotropic conductive film 1 is formed.
An external electrode 167 made of a film-shaped printed wiring board 165 is pressed against the terminal electrode 106 via 60 to electrically connect the terminal electrode 1065 and the external electrode 167.

8 and 9 are sectional views showing a section perpendicular to the groove 110. As shown in FIG. The arrows in FIGS. 8 and 9 indicate the polarization direction of the piezoelectric material.

In the first embodiment of the present invention, the substrate 1
In 01, the lower part of the groove 110 from the central part is the lower substrate member 101b, and the upper part is the upper substrate member 10b.
It is 1c.

Here, as shown in FIGS. 8 and 9, the lower substrate member 101b is polarized upward, and the upper substrate member 101 is polarized.
c is polarized downward. The drive electrode 108 is formed on the inner surface of the groove 110.

The operation of the ink jet head according to the first embodiment of the present invention having the above construction will be described below.

As shown in FIG. 9, one of the ink grooves 1
The drive electrode 108d of 10d and the dummy grooves 11 on both sides thereof.
0c of the drive electrode 108c, so that the drive electrode 108c of the dummy groove 110c has a high potential.
7 (see FIG. 7), a drive voltage 170 is applied.

Then, the partition walls 11 on both sides of the ink groove 110d are formed.
1 deforms toward the inside and reduces the volume of the ink groove 110d.

By rapidly performing this operation, ink droplets can be ejected from the nozzle holes 132 (see FIG. 1) to perform printing.

Next, as shown in FIG.
Is removed and the discharge switch 180 is closed to bring it into a non-driving state,
The partitions 111 on both sides of the ink groove 110d are restored to their original state so that the next printing can be performed.

When this restoration is rapid, the partition wall 111 is deformed outward due to overshoot, and the volume of the adjacent groove 110 is reduced.

In the prior art in which the ink grooves are adjacent to each other, this overshoot causes a phenomenon in which an unexpected ink drop is ejected from the nozzle of the adjacent ink groove, that is, crosstalk.

In order to prevent this crosstalk, it is necessary to select the resistance R of the discharge circuit and secure a certain recovery time, and there is a limit to increase the printing speed.

However, in the case of the first embodiment of the present invention, the ink grooves 110d for filling the ink are not directly adjacent to each other.

For this reason, after the printing operation, the partition wall 111 is rapidly returned, and the partition wall 11 is deformed to the outside of the ink groove 110d due to overshoot, and the adjacent dummy groove 11 is formed.
Even if the volume of 0d changes, the partition wall 111 on the opposite side of the dummy groove 110d does not deform, the volume of the other ink groove 110d adjacent to the opposite side of the dummy groove 110d does not change, and crosstalk does not occur. .

Therefore, in the ink jet head of the first embodiment of the present invention, it is possible to eliminate the ejection failure due to the bubbles in the ink groove 110d. further,
It has the advantage that printing can be performed at higher speed than in the past.

Next, a method of manufacturing the ink jet head in the embodiment of the present invention will be described.

The manufacturing method of the embodiment of the present invention will be described with reference to FIG.
As shown in FIG. 5, the upper substrate material 101c is adhered to the lower substrate material 101b, which is made of a piezoelectric material made of PZT and which has been subjected to polarization treatment in advance, to form the substrate 101.

Thereafter, as shown in FIG. 11, a cutting process using a dicing disk is performed to form the groove 110 and the positioning groove 145.

Next, a conductive film 102 made of a metal film as shown in FIG. 11 is formed on the upper surface of the substrate 101 including the groove 110.
Are formed by a vacuum evaporation method.

Next, as shown in FIG. 12, a step 112 is formed on the substrate 101 by cutting by milling. At this time, the bottom 112c of the groove is left.

Next, as shown in FIG.
The sealing member 114 as shown in FIG.

At this time, the lower surface of the sealing member 114 is the step portion 1.
Twelve processed surfaces 112b are adhered to each other, and the protrusions 118 of the sealing member 114 are brought into contact with the step end surfaces 111b of the partition walls 111 of the groove 110 so that they are adhered by an adhesive.

At this time, the bottom 112 of the shallow groove of the step 112
The gap between the c and the lower surface of the sealing member 114 is also filled with the adhesive 126 as shown in FIG. 14 to prevent the ink from flowing out from the joint portion.

Then, the protrusion 118 and the step end surface 111b
As shown in FIG. 2, the joint with the through hole 12 of the lid 152 is
4 and the notch 116 of the sealing member 114 are sufficiently separated from the overlapping position. Therefore, the adhesive protruding from this joint does not substantially narrow the ink passage.

The positioning of the sealing member 114 with respect to the groove 110 is performed by the positioning groove 145 provided on the substrate 101 at the time of bonding.
The dowel 1 provided on the lower surface of the sealing member 114 shown in FIG.
Since it is performed by inserting 50, positioning can be performed with high accuracy.

A positioning hole 128 for a lid is provided on the upper surface of the sealing member 114. A dowel (not shown) is provided on the lower surface of the lid 120 shown in FIG.
The dowel (not shown) is inserted into the positioning hole 128 to position the lid 120.

Next, the upper surface of the sealing member 114 and the substrate 1
The upper surface 103 other than the stepped portion 112 of 01 is machined by surface grinding to remove the conductive film 102 on the upper surface other than the groove 110 of the substrate 101, and to make the sealing member 114 flush with the surface.

As a result, as shown in FIG. 6, the drive electrode 108 can be formed for each groove 110,
Further, as shown in FIG. 1, the upper surface of the sealing member 114 and the partition wall 1
The upper surface of 11 is flush with the upper surface.

Next, CV is formed on the entire upper surface including the groove 110.
A parylene film is formed by D (chemical vapor deposition method).

FIG. 14 is an enlarged sectional view showing the vicinity of the sealing member 114 in the section along the ink groove 110d, and FIG. 15 is an enlarged sectional view showing the vicinity of the groove in the section perpendicular to the groove 110. is there.

The parylene film 109 is the driving electrode 1 of the groove 110.
08, the sealing member 114, the bottom surface 112c of the shallow groove of the step 112, and the exposed portion of the adhesive 126 filled between the lower surfaces of the sealing member 114 are covered.

Next, the lid 120 is adhered to the upper surface including the sealing member 114. At this time, the positioning can be performed as described above.

Next, as shown in FIG. 1, a nozzle plate 130 having nozzle holes 132 is adhered to the end surface 101a of the substrate 101 where the groove 110 is opened and the end surface 120a of the lid 120 which is flush with the end surface 101a.

The upper plate 152 is adhered to the upper surface of the lid 120, although the order of the steps is not particularly limited.

In this way, the ink jet head of the first embodiment of the present invention can be manufactured reliably and easily.

Next, an ink jet head in the second embodiment of the present invention will be described with reference to the drawings. The ink jet head in the second embodiment of the present invention is an improvement and modification of the ink jet head in the first embodiment.

As shown in FIG. 16, the substrate 101, the sealing member 114, and the nozzle plate 130 having the same structure as in the first embodiment.
Then, a lid 220 having a structure different from that of the first embodiment is adhesively bonded to form an inkjet head.

Here, the lid 220 has an ink introducing hole 251.
And a common groove 230 communicating with all the notches 116 of the sealing member 114. Furthermore, a dowel (not shown) for positioning is provided on the lower surface of the lid 220.

The substrate 1 is manufactured by the same process as in the first embodiment.
The sealing member 114 is adhered to the step 112 of No. 01, and the surface is ground to form a parylene film.

Thereafter, the dowel is inserted into the lid positioning hole 128 on the upper surface of the sealing member 114, whereby the sealing member 1
14 while ensuring the positional relationship of the lid 220 with respect to the substrate 1.
The lid 220 is adhered to the upper surfaces of 01 and the sealing member 114.

FIG. 17 shows the substrate 1 along the ink groove 110d.
It is sectional drawing which shows the cross section perpendicular | vertical to 01, and respond | corresponds to FIG.

The notch 116 of the sealing member 114 and the ink groove 110d form an ink flow path similar to that of the first embodiment, and ink is supplied from the common groove 230 provided in the lid 220 to supply the ink groove. 110d is filled with ink.

FIG. 18 shows the substrate 1 along the dummy groove 110d.
FIG. 4 is a cross-sectional view showing a cross section perpendicular to 01 and corresponds to FIG. 3.

As in the first embodiment, the dummy groove 110c is blocked by the projection 118 of the sealing member 114, and ink is not supplied.

The printing operation of the second embodiment of the present invention is the first
The detailed description is omitted because it is exactly the same as the embodiment of FIG. The inkjet head of the second embodiment of the present invention also
It has the same advantages as the first embodiment, the number of parts is reduced, and the structure is simplified.

An ink jet head in the third embodiment of the present invention will be described with reference to the drawings.

As shown in FIG. 19, the third embodiment of the present invention is a nozzle plate having a substrate 301, a sealing member 314 and a nozzle hole 332 which are different in construction from those of the first and second embodiments. 330 and the lid 220 having the same structure as that of the second embodiment are formed by adhesive bonding.

The substrate 301 has the same structure as the substrate 101 of the first and second embodiments except that it has no positioning groove.

The sealing member 314 is a flat plate member having a wide common notch 316 in the center and arm portions 318 at both ends thereof. The lid positioning hole 128 is provided on the upper surface of the sealing member 314, and the dowel (not shown) provided on the lower surface of the lid 220 is inserted to position the lid 220.

The common notch 316 of the sealing member 314 has a width dimension larger than that facing all the grooves 110.

The arm portion 318 is brought into contact with both end portions of the step portion end surface 313 formed by the step processing of the substrate 301 where the groove 10 is not formed, and the lower surface of the sealing member 314 is attached to the substrate 301.
The sealing member 314 is fixed to the substrate 301 with an adhesive so as to come into contact with the stepped portion 312.

After performing surface grinding to form a parylene film, a lid 220 is adhered to the upper surfaces of the substrate 301 and the sealing member 314.

FIG. 20 is a cross sectional view showing a vertical cross section along an arbitrary groove 110. At this time, FIG. 19 and FIG.
As shown in FIG.
4 and the common cutout 316, and the groove 110 and the sealing member 3
It is possible to fill the space formed by the 14 common notches 316 with the ink flowing in from the ink introduction hole 251.

Since this space is formed along the flow of ink as in the first and second embodiments, it is possible to eliminate the bubbles in the ink without accumulating them.

Further, since the inner wall of the ink chamber is also covered with the parylene film as in the first embodiment, it is possible to similarly prevent the generation of bubbles.

The operation of the third embodiment of the present invention will be described next. 21 and 22 are cross-sectional views showing a cross section perpendicular to the groove 110 of the inkjet head according to the third embodiment of the present invention.

As shown in FIGS. 21 and 22, all the grooves 110 are filled with ink. The direction of polarization of the substrate 301 is the same as in the previous embodiments.

As shown in FIG. 21, the drive electrode 108 of the groove 110 of interest and the grooves 110L on both sides of the groove 110,
A drive voltage 170 is applied between the drive electrodes 108L and 108R of 110R so that the drive electrode 108 has a higher potential.

As a result, the partition walls 11 on both sides of the groove 110 are formed.
Deforms toward the outside, expands the volume of the groove 110, and sucks ink by the expanded amount.

Next, as shown in FIG. 22, the drive voltage 17
0 is removed and the discharge switch 180 is closed to bring it into a non-driving state,
The partition walls 111 on both sides of the groove 110 are returned to the original state.

At this time, the ink in the groove 110 filled with the ink is compressed, and the ink is ejected from the nozzle holes 332 of the nozzle plate 332 for printing.

If the above operation is performed too rapidly, undesired ejection of ink droplets from adjacent grooves 110 due to crosstalk occurs in the ink suction process.

However, crosstalk can be prevented by selecting the charging / discharging resistance R and setting it at an appropriate operating speed.

The ink jet head of the third embodiment of the present invention is disadvantageous in increasing the printing speed as compared with the first embodiment, but has the same advantages except for this.
Further, the number of parts is small and the structure is simple.

Further, as compared with the second embodiment, the ink jet head of the third embodiment of the present invention does not require the positioning groove in the substrate 301, so that the processing is easy.

[0107]

As is apparent from the above description, according to the present invention, a lid having a plurality of grooves on the upper surface of a substrate made of a piezoelectric material and having a through hole or a common groove is bonded on the upper surface of the substrate. In an inkjet head that performs printing by compressing the ink in the groove by using piezoelectric deformation of the partition wall of the groove that fills the ink and ejecting ink droplets from the ejection holes onto the printing paper, it occurs in the groove that fills the ink. It is possible to avoid the phenomenon that the ink droplets cannot be ejected due to the mixed air bubbles, the ejection failure occurs, and the ejection failure due to the sealing adhesive protruding.

Further, according to the ink jet head of the present invention, it is possible to prevent the occurrence of crosstalk in the ejection of ink droplets and improve the print quality of the ink jet head in high speed printing.

Moreover, according to the manufacturing method of the present invention, such an ink jet head can be manufactured reliably and easily.

[Brief description of drawings]

FIG. 1 is a perspective view showing a structure of an inkjet head according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the structure of the inkjet head according to the first embodiment of the present invention.

FIG. 3 is a cross-sectional view showing the structure of the inkjet head according to the first embodiment of the present invention.

FIG. 4 is a cross-sectional view showing the structure of the inkjet head according to the first embodiment of the present invention.

FIG. 5 is a cross-sectional view showing the structure of the inkjet head according to the first embodiment of the present invention.

FIG. 6 is a cross-sectional view showing an electrode structure of the inkjet head according to the first embodiment of the present invention.

FIG. 7 is a cross-sectional view showing a connection configuration between a terminal electrode and an external electrode of the inkjet head according to the first embodiment of the present invention.

FIG. 8 is a cross-sectional view showing the operation of the partition wall of the groove of the inkjet head according to the first embodiment of the present invention, showing a restored state.

FIG. 9 is a cross-sectional view showing the operation of the partition wall of the groove of the inkjet head according to the first embodiment of the present invention, showing a compressed state.

FIG. 10 is a perspective view showing a method of manufacturing an inkjet head according to the first embodiment of the present invention, showing a bonded state of upper and lower substrates.

FIG. 11 is a perspective view showing a method of manufacturing an inkjet head according to the first embodiment of the present invention, showing a state after the groove processing of the substrate.

FIG. 12 is a perspective view showing a method of manufacturing an inkjet head according to the first embodiment of the present invention, showing a state in which a substrate and a sealing member are joined.

FIG. 13 is a perspective view showing the method of manufacturing the inkjet head in the first embodiment of the present invention, showing the method of joining the substrate and the sealing member, and showing the state of the lower surface of the sealing member.

FIG. 14 is a cross-sectional view showing a method of coating with a parylene film in the first example of the present invention, showing a state of coating the sealing member.

FIG. 15 is a cross-sectional view showing the method of coating with a parylene film in the first example of the present invention, showing the state of coating of the sealing member.

FIG. 16 is a perspective view showing the structure of an inkjet head according to the second embodiment of the present invention.

FIG. 17 is a cross-sectional view showing the internal structure of an inkjet head according to the second embodiment of the present invention, showing a cross section taken along an ink groove.

FIG. 18 is a cross-sectional view showing the internal structure of an inkjet head according to the second embodiment of the present invention, showing a cross section taken along a dummy groove.

FIG. 19 is a perspective view showing the structure of an inkjet head according to a third embodiment of the present invention.

FIG. 20 is a cross-sectional view showing an internal structure along a groove of an inkjet head according to a third embodiment of the present invention.

FIG. 21 is a cross-sectional view showing the operation of the partition walls of the grooves of the inkjet head in the third embodiment of the present invention, showing the suction state.

FIG. 22 is a cross-sectional view showing the operation of the partition wall of the groove of the inkjet head according to the third embodiment of the present invention, showing a restored state.

[Explanation of symbols]

 101 Substrate 102 Conductive Film 110 Groove 110c Dummy Groove 110d Ink Groove 111 Partition Wall 112 Step 114 Sealing Member 116 Notch 118 Protrusion 120 Lid 124 Through Hole 132 Nozzle Hole

Claims (5)

[Claims] 1. A substrate made of a piezoelectric material having a plurality of grooves, and a lid having a through hole for supplying ink to the groove or a common groove, the lid being attached to the substrate so as to close the upper surface of the groove,
In an ink jet head that performs printing by compressing ink supplied to the grooves by piezoelectrically deforming the partition walls between the grooves and ejecting ink droplets from a nozzle hole provided at one end of the groove, a step is provided on the substrate, An ink jet head characterized in that a sealing member for preventing ink from flowing out from the opening of the groove to the outside and for communicating the through hole provided in the lid or the common groove and the groove is attached between the step portion and the lid. 2. A plurality of grooves are formed on the upper surface of a substrate made of a piezoelectric material, a conductive film is formed on the surface including the grooves, and then a step is formed on the substrate by step processing, and the groove is formed on the step. The sealing member is adhered so as to close the opening, and then the surface of the upper surface of the substrate and the upper surface of the sealing member are subjected to surface grinding, and then a parylene film is formed on the entire upper surface of the substrate including the groove by CVD. Then, the lid is bonded to the surface that has been subjected to surface grinding, and then the method for manufacturing an inkjet head. 3. The sealing member is provided with a notch, and the through hole of the lid or the common groove is communicated with the groove of the substrate through the notch, and the end face at the end of the notch is the through hole in the lower surface of the lid. The inkjet head according to claim 1, wherein the inkjet head is configured so as to have the same positional relationship with the end face of the outlet of the common groove or the same business trip. 4. The sealing member comprises a protrusion that closes every other opening of the groove, and a notch that connects the remaining groove and a through hole formed in the lid. Inkjet head according to Item 3. 5. The parylene film is formed on the groove, the sealing member, and the surface of the adhesive between the sealing member and the step portion, as claimed in claim 1, claim 3, or claim 4. Inkjet head to do.