JPH07245337A - Wafer housing carrier - Google Patents

Abstract

PURPOSE:To provide a wafer housing carrier which horizontally houses wafers in housing grooves, is transported together with the wafers, and can prevent the wafers from slipping down while the carrier is transported. CONSTITUTION:In a wafer housing carrier which horizontally houses wafers in housing grooves 31a and is transported together with the wafers, a wafer slipping-down preventing mechanism 32 which makes wafers 11 to be freely taken out from and put in the grooves 31a when the mechanism 32 receives an upward force and inhibits the wafers from being taken out front and put in the grooves 31a when the mechanism 21a is released from the upward force.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer storage carrier in which a wafer is horizontally stored in a storage groove and is transported together with the wafer, and more particularly to a wafer storage carrier capable of preventing a slipping accident of the wafer during transportation.

[0002]

2. Description of the Related Art As shown in FIG. 2, a conventional wafer storage carrier 20 stores a wafer 11 in a horizontal storage groove 21a and carries it together with the wafer 11.

[0003]

By the way, as shown in FIG. 2, the conventional wafer storage carrier 20 has a structure in which the inlet / outlet 21b for loading / unloading the wafer 11 into / from the storage groove 21a is always open.

For this reason, when the wafer storage carrier 20 is transported, if the entrance 21b is accidentally tilted forward, the wafer 11 often slips from the storage groove 21a and is damaged.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a wafer accommodating carrier capable of preventing a slipping accident of a wafer during transportation.

[0006]

As shown in FIG. 1, the above-mentioned object is to store a wafer in a storage groove in a horizontal state, and in the case of receiving a upward force in a wafer storage carrier carried together with the wafer. Is provided with a wafer slip-prevention mechanism 32 that allows the wafer 11 to be freely loaded and unloaded into and from the storage groove 31a, and prevents the wafer 11 from being loaded and unloaded from the storage groove 31a when the above-mentioned force is released. Achieved by the featured wafer storage carrier.

[0007]

As shown in FIG. 1, when an upward force is applied to the sliding rods 32c and 32c 'of the wafer slip-prevention mechanism 32, the sliding rods 32c and 32c' move upward to move the slanting plate 32.
The opening / closing plate 32a is moved in the arrow X direction via b and 32b ', and the opening / closing plate 32a' is moved in the arrow X'direction to open the storage groove 31a of the carrier body 31.

In this state, the wafer 11 can be freely taken in and out of the storage grooves 31a, 31a 'of the wafer storage carrier. On the other hand, if the above-mentioned force is released, the upper springs 32d, 32d 'and the lower springs 32e, 32e' of the wafer slip-prevention mechanism 32 cooperate with each other to slide rods 32c, 32.
While pressing c'down, the opening / closing plate 32a is moved to the arrow X ', the opening / closing plate 32a' is moved to the arrow X, and the storage grooves 31a and 31a 'are closed.

In this state, the opening / closing plates 32a, 32
a 'interferes and it becomes impossible to take the wafer 11 in and out of the storage groove 31a.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A wafer storage carrier according to an embodiment of the present invention will be described below with reference to FIG. In the present specification, the same parts, the same materials and the like are designated by the same reference numerals throughout the drawings.

As shown in FIG. 1, a wafer accommodating carrier 30 according to an embodiment of the present invention comprises a carrier main body 31 and a wafer slipping prevention mechanism 32 corresponding to the conventional wafer accommodating carrier 20.

The wafer slip prevention mechanism 32 characterizes the present invention, and includes the opening / closing plates 32a and 32a 'and the skew plate 3.
2b, 32b ', sliding rods 32c, 32c', upper spring 3
2d and 32d 'and lower springs 32e and 32e' are included.

The above-mentioned opening / closing plates 32a, 32a 'are upper springs 32d, 32d' whose one ends are fixed to the carrier body 31.
And the lower springs 32e and 32e 'are connected to the other ends, and when the upper springs 32d and 32d' and the lower springs 32e and 32e 'have free lengths, as shown in FIG. The storage grooves 31a, 31a 'of the above are closed (closed) from the front surface, and the sliding rods 32c, 32c' are
It is slidably held by a bearing 32g and its top is fixed to the above-mentioned opening / closing plates 32a, 32a ', and the lower surface is in contact with the slanting plates 32f, 32f' having a downward slope in a smooth state, and is freely movable in the vertical direction. In addition, the collar portions C and C ′ are prevented from coming off from the carrier body 31 by coming into contact with the bearing 32g when moving downward.

As shown in FIG. 1A, the wafer storage carrier 30 according to the embodiment of the present invention as shown in FIG.
If it is placed on a plane such as 2, the sliding bars 32c, 32c 'pushed upward move the opening / closing plate 32a in the arrow X (left direction on the paper) via the skew plates 32b, 32b', and The opening / closing plate 32a 'is moved in the direction of the arrow X' (to the right in the drawing), and the storage groove 31a of the carrier body 31 is opened (opened).

Therefore, in this state, the wafer 11 can be freely taken in and out of the storage groove 31a of the carrier body 31 of the wafer storage carrier 30. On the other hand, in order to transport the wafer storage carrier 30 to another place, as shown in FIG.
As shown in (b), if lifted from the table 12,
Upper springs 32d, 32d 'and lower springs 32e, 32
e ′ cooperates to push down the sliding rods 32c and 32c ′ and move the open / close plate 32a to the arrow X ′ (to the right in the drawing).
And the opening / closing plate 32a ′ is moved in the direction of arrow X (left direction on the paper surface) to close (close) the storage groove 31a of the carrier body 31.

In this state, the wafer storage carrier 3
Even if 0 is tilted forward, the storage groove 31a of the carrier body 31
The wafer 11 held by the abutments does not slide down by coming into contact with the opening / closing plates 32a and 32a '.

[0017]

As described above, the present invention makes it possible to provide a wafer accommodating carrier capable of preventing a wafer slip accident during transportation.

Therefore, if the wafer storage carrier of the present invention is introduced to improve the manufacturing of a semiconductor device, the damage accident of the wafer can be reduced.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view of a wafer storage carrier according to an embodiment of the present invention.

FIG. 2 is a schematic explanatory view of a conventional wafer storage carrier.

[Explanation of symbols]

 11 wafer 12 table 20 wafer storage carrier 21a storage groove 21b entrance / exit 30 wafer storage carrier 31 carrier body 31a storage groove 32 wafer slip prevention mechanism 32a, 32a 'opening / closing plate 32b, 32b' slanting plate 32c, 32c 'sliding rod C, C ′ Collar part 32d, 32d ′ Upper spring 32e, 32e ′ Lower spring 32g Bearing

Claims (1)

[Claims] 1. A wafer is horizontally stored in a storage groove,
In the wafer storage carrier that is transported together with this wafer, when the force in the upward direction is received, the wafer (11) can be freely taken in and out of the storage groove (31a), and when the force is released, A wafer storage carrier, comprising a wafer slip prevention mechanism (32) for preventing the wafer (11) from being taken in and out of the storage groove (31a).