JPH0723554A - Linear actuator - Google Patents
Linear actuatorInfo
- Publication number
- JPH0723554A JPH0723554A JP14329093A JP14329093A JPH0723554A JP H0723554 A JPH0723554 A JP H0723554A JP 14329093 A JP14329093 A JP 14329093A JP 14329093 A JP14329093 A JP 14329093A JP H0723554 A JPH0723554 A JP H0723554A
- Authority
- JP
- Japan
- Prior art keywords
- drive coil
- coil
- linear actuator
- current
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electromagnets (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は直線型アクチュエータに
かかり、特に、磁気記録ヘッド用のアクチュエータに関
する。FIELD OF THE INVENTION This invention relates to linear actuators, and more particularly to actuators for magnetic recording heads.
【０００２】[0002]
【従来の技術】従来、磁気記録ヘッド用のアクチュエー
タとして直線型アクチュエータと回転型アクチュエータ
がある。直線型アクチュエータでは、永久磁石の内側に
導電性のショートリングを設け、駆動コイルに通電した
ときに生じる磁界を部分的に打ち消す誘導電流を誘起さ
せることにより、電流の立上り特性を良くして応答性を
向上している。しかし、この場合の電流の立上がり特性
は、駆動コイルとショートリングの形状に依存するイン
ダクタンスにより決まり、これらの形状や空間配置の構
造上の制約により応答性の向上に上限ができるという問
題がある。これに関連した直線型アクチュエータは、特
開平1−27668号公報に開示されている。2. Description of the Related Art Conventionally, there are linear type actuators and rotary type actuators as actuators for magnetic recording heads. In a linear actuator, a conductive short ring is provided inside the permanent magnet to induce an induced current that partially cancels the magnetic field generated when the drive coil is energized, improving the current rising characteristics and improving the responsiveness. Has improved. However, the current rising characteristic in this case is determined by the inductance depending on the shapes of the drive coil and the short ring, and there is a problem that the response can be improved to an upper limit due to structural restrictions on these shapes and space arrangement. A linear actuator related to this is disclosed in JP-A-1-27668.
【０００３】[0003]
【発明が解決しようとする課題】本発明の目的は、従来
のショートリング付きの直線型アクチュエータが有して
いた、応答性を向上する上で構造上の制約からくる限界
を解消し、応答性の良い直線型アクチュエータを提供す
ることにある。SUMMARY OF THE INVENTION An object of the present invention is to overcome the limitations of the conventional linear actuator with a short ring due to structural restrictions in improving the responsiveness, and to improve the responsiveness. To provide a good linear actuator.
【０００４】[0004]
【課題を解決するための手段】上記問題点を解消するた
め、ショートリングに誘導電流を生じさせて駆動コイル
の磁界を部分的に打ち消す代りに、駆動コイルの磁界の
一部を強制的に打ち消して電流の立上がり特性を向上さ
せる。In order to solve the above problems, instead of inducing an induced current in the short ring to partially cancel the magnetic field of the drive coil, a part of the magnetic field of the drive coil is forcibly canceled. Improve the current rising characteristics.
【０００５】駆動コイルの磁界の一部を強制的に打ち消
す方法として、駆動コイルの可動範囲にコイルを設置
し、このコイルに外部制御回路から強制的に電流を流す
ことにより発生する磁界を用いる。（以下では、このコ
イルを反磁界コイルと呼ぶことにする。）As a method of forcibly canceling a part of the magnetic field of the drive coil, a coil is installed in the movable range of the drive coil, and a magnetic field generated by forcibly passing a current from the external control circuit to this coil is used. (Hereinafter, this coil will be called a demagnetizing field coil.)
【０００６】[0006]
【作用】駆動コイルと本発明による反磁界コイルを備え
た直線型アクチュエータの回路図を図２に示す。駆動コ
イル２のインダクタンスをＬ、抵抗をＲとし、反磁界コ
イル１のインダクタンスをＬｓ、抵抗をＲｓとする。ま
た、駆動コイルと反磁界コイルの相互インダクダンスを
Ｍとする。駆動コイルに接続された制御回路は、電流を
立ち上げるための定電圧Ｖを印加する回路である。反磁
界コイルに接続された制御回路は、駆動コイルと逆向き
の磁界を発生させるための定電圧−Ｅを印加する回路で
ある。電圧を印加してからの時間をｔ、駆動コイルと反
磁界コイルの電流をそれぞれＩ(t)，Ｉs(t)とすると回
路方程式として数１，数２を得る。A circuit diagram of a linear actuator having a drive coil and a demagnetizing coil according to the present invention is shown in FIG. The inductance of the drive coil 2 is L, the resistance is R, the inductance of the diamagnetic field coil 1 is Ls, and the resistance is Rs. Further, the mutual inductance of the drive coil and the demagnetizing field coil is M. The control circuit connected to the drive coil is a circuit that applies a constant voltage V for raising a current. The control circuit connected to the demagnetizing field coil is a circuit for applying a constant voltage -E for generating a magnetic field in the direction opposite to that of the drive coil. When the time after applying the voltage is t, and the currents of the drive coil and the diamagnetic field coil are I (t) and Is (t), respectively, Equations 1 and 2 are obtained as circuit equations.
【０００７】[0007]
【数１】 [Equation 1]
【０００８】[0008]
【数２】 [Equation 2]
【０００９】これらからｔ＝０での電流Ｉ(t)の電流の
増加率が求められ、駆動コイルの立上がり特性を評価で
きる。数１においてＥ＝０とすることにより、従来のシ
ョートリングのアクチュエータについても立上がり特性
が評価でき、結果をまとめると表１となる。From these, the current increase rate of the current I (t) at t = 0 is obtained, and the rising characteristic of the drive coil can be evaluated. By setting E = 0 in Equation 1, the rising characteristics of the conventional short ring actuator can be evaluated, and the results are summarized in Table 1.
【００１０】[0010]
【表１】 [Table 1]
【００１１】すなわち、反磁界コイル利用時の電流増加
率の分子のＭＥ／Ｌｓの分だけ、立上がり特性を向上さ
せることができる。That is, the rising characteristics can be improved by the amount of ME / Ls of the numerator of the current increase rate when the demagnetizing field coil is used.
【００１２】[0012]
【実施例】本発明による直線型アクチュエータを図１に
示す。ヨーク４は二つの同心円筒を組み合わせて一体と
し、永久磁石３，反磁界コイル１を固定する。ヨークの
内筒と反磁界コイルの隙間に駆動コイル２がある。この
駆動コイルは軸方向に動く構造である。反磁界コイルと
駆動コイルには、お互いに逆向きに電流が流れるように
それぞれ電圧を印加する。1 shows a linear actuator according to the present invention. The yoke 4 is formed by combining two concentric cylinders into one body, and fixes the permanent magnet 3 and the demagnetizing field coil 1. The drive coil 2 is located in the gap between the inner cylinder of the yoke and the demagnetizing coil. This drive coil has a structure that moves in the axial direction. Voltages are applied to the diamagnetic field coil and the drive coil such that currents flow in opposite directions.
【００１３】駆動コイルに電流を流すと、空心部には軸
方向に磁界が発生する。反磁界コイルには逆向きに電流
を流すので、これにより駆動コイルとは逆向きの磁界が
発生し、駆動コイルが作る磁界を部分的に打ち消して小
さくする。したがって駆動コイルに発生する逆起電力が
小さくなるので、駆動コイルの電流の立上がり特性を良
くすることができる。When a current is applied to the drive coil, a magnetic field is generated in the air core in the axial direction. Since a current flows through the diamagnetic field coil in the opposite direction, a magnetic field in the opposite direction to that of the drive coil is generated, and the magnetic field created by the drive coil is partially canceled to reduce the magnetic field. Therefore, since the counter electromotive force generated in the drive coil is reduced, the rising characteristic of the current of the drive coil can be improved.
【００１４】このことを回路方程式を解いて、電流の立
上がり特性を電流増加率で表した結果が、表１である。
本発明の反磁界コイルにより、電流増加率の分子のＭＥ
／Ｌｓの分だけ、立上がり特性を向上させることができ
る。この項は印加電圧の一次式なので、反磁界コイルの
印加電圧を高くするほど駆動コイルの電流の立上がり特
性を良くすることができる。電流の時間変化を表すと図
３のようになる。Table 1 shows the result obtained by solving the circuit equation and expressing the rising characteristics of the current by the current increase rate.
The diamagnetic field coil of the present invention allows the ME of a molecule having an increased current rate to be increased.
The rising characteristic can be improved by the amount of / Ls. Since this term is a linear expression of the applied voltage, the higher the applied voltage of the diamagnetic field coil, the better the rising characteristics of the current of the drive coil. The time change of the current is shown in FIG.
【００１５】このように、本実施例によれば反磁界コイ
ルにより、駆動コイルの電流の立上り特性を良くするこ
とができる。As described above, according to the present embodiment, the demagnetizing field coil can improve the current rising characteristic of the drive coil.
【００１６】[0016]
【発明の効果】本発明によれば、直線型アクチュエータ
の応答性を向上させることができる。According to the present invention, the response of the linear actuator can be improved.
【図１】本発明の実施例の部分断面図。FIG. 1 is a partial cross-sectional view of an embodiment of the present invention.
【図２】本発明の回路図。FIG. 2 is a circuit diagram of the present invention.
【図３】駆動コイルの電流の時間変化を表す特性図。FIG. 3 is a characteristic diagram showing a change over time of a current of a drive coil.
１…反磁界コイル、２…駆動コイル、３…永久磁石、４
…ヨーク。1 ... Demagnetizing field coil, 2 ... Drive coil, 3 ... Permanent magnet, 4
…yoke.
Claims (2)
イルが設置されている直線型アクチュエータにおいて、
永久磁石の空心部に駆動コイルの磁界を部分的に打ち消
す磁界を強制的に発生する手段を設けたことを特徴とす
る直線型アクチュエータ。1. A linear actuator in which a drive coil is installed in a magnetic field created by a permanent magnet,
A linear actuator characterized in that a means for forcibly generating a magnetic field for partially canceling the magnetic field of the drive coil is provided in the air-core part of the permanent magnet.
生する手段が、前記駆動コイルと反対方向に強制的に電
流を流し、前記駆動コイルの磁界を部分的に打ち消す磁
界を発生させるコイルである直線型アクチュエータ。2. The coil according to claim 1, wherein the means for forcibly generating the magnetic field forcibly supplies a current in a direction opposite to the direction of the drive coil and generates a magnetic field for partially canceling the magnetic field of the drive coil. Is a linear actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14329093A JPH0723554A (en) | 1993-06-15 | 1993-06-15 | Linear actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14329093A JPH0723554A (en) | 1993-06-15 | 1993-06-15 | Linear actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0723554A true JPH0723554A (en) | 1995-01-24 |
Family
ID=15335295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14329093A Pending JPH0723554A (en) | 1993-06-15 | 1993-06-15 | Linear actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0723554A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021516357A (en) * | 2018-03-09 | 2021-07-01 | エーエスエムエル ネザーランズ ビー．ブイ． | Positioning system for lithographic equipment |
-
1993
- 1993-06-15 JP JP14329093A patent/JPH0723554A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021516357A (en) * | 2018-03-09 | 2021-07-01 | エーエスエムエル ネザーランズ ビー．ブイ． | Positioning system for lithographic equipment |
| US11156925B2 (en) | 2018-03-09 | 2021-10-26 | Asml Netherlands B.V. | Positioning system for a lithographic apparatus |
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