JPH07234504A - Photosensitive resin composition - Google Patents

Photosensitive resin composition

Info

Publication number
JPH07234504A
JPH07234504A JP2504194A JP2504194A JPH07234504A JP H07234504 A JPH07234504 A JP H07234504A JP 2504194 A JP2504194 A JP 2504194A JP 2504194 A JP2504194 A JP 2504194A JP H07234504 A JPH07234504 A JP H07234504A
Authority
JP
Japan
Prior art keywords
group
photosensitive resin
sensitizer
resin composition
molecule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2504194A
Other languages
Japanese (ja)
Other versions
JP3428715B2 (en
Inventor
Toru Shibuya
徹 渋谷
Tetsuaki Tochisawa
哲明 栃沢
Mitsuharu Miyazaki
光晴 宮崎
Hideo Kikuchi
英夫 菊地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Gosei Co Ltd
Original Assignee
Toyo Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Gosei Co Ltd filed Critical Toyo Gosei Co Ltd
Priority to JP02504194A priority Critical patent/JP3428715B2/en
Publication of JPH07234504A publication Critical patent/JPH07234504A/en
Application granted granted Critical
Publication of JP3428715B2 publication Critical patent/JP3428715B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Polymerisation Methods In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

PURPOSE:To provide a photosensitive resin composition having high sensitivity, high resolution and good aging stability and being manufactured easily, by forming it while containing a high molecular compound having a component unit expressed by a specified formula and a sensitizer having a cation group inside a molecule. CONSTITUTION:A photosensitive resin composition is formed by containing a high molecular compound having a component unit expressed by the following formula and a sensitizer having a cation group in a molecule. In the formula, X indicates cationic species and (n) indicates 0, 1 or 2. The cation group of the sensitizer having a cation group in a molecule is a quaternary ammonia group. Though (n) in the formula is 0, 1 or 2, they may be used separated or mixed to be used. A reaction mixture of aldehyde and acetol dehyde in which n=0 may be used as it is. Especially, in the case of using reaction mixture of aldehyde and acetol dehyde in which n=0, the manufacture can be facilitated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は感光性樹脂組成物に関
し、更に詳しくは高感度で経時安定性が良く、製造も容
易である水溶性の感光性樹脂組成物に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photosensitive resin composition, and more particularly to a water-soluble photosensitive resin composition having high sensitivity, good stability over time, and easy production.

【0002】[0002]

【従来の技術】従来より、スクリーン印刷版用、カラー
ブラウン管のブラックマトリックスや蛍光体パターン形
成用あるいはCCDやLCDのカラーフィルター形成用
の水溶性感光性樹脂組成物としては、例えばゼラチン,
カゼイン及びグルーのような天然タンパク質に重クロム
酸塩を加えたものや、ポリ酢酸ビニルケン化物のような
水溶性ポリマーにジアゾニウム塩を組み合わせたものが
用いられてきたが、これらの感光性樹脂組成物は公害へ
の配慮が必要となる、経時安定性が悪いなどの欠点を有
している。
2. Description of the Related Art Conventionally, water-soluble photosensitive resin compositions for screen printing plates, for forming a black matrix of a color Braun tube or for forming a phosphor pattern, or for forming a color filter of a CCD or an LCD include, for example, gelatin,
A natural protein such as casein and glue to which a dichromate is added, or a combination of a water-soluble polymer such as polyvinyl acetate saponified with a diazonium salt has been used. Has drawbacks such as needing consideration for pollution and poor stability over time.

【0003】また、ポリビニルピロリドンのような水溶
性ポリマーに水溶性ビスアジド化合物を配合した感光性
樹脂組成物も用いられているが、感度が低いという欠点
を有している。
A photosensitive resin composition prepared by blending a water-soluble bisazide compound with a water-soluble polymer such as polyvinylpyrrolidone is also used, but it has a drawback of low sensitivity.

【0004】この為、高感度な感光性樹脂の開発が進め
られており、例えば、特開平4−26849号,特開平
2−204750号,特開平2−173007号,特開
平2−92905号,特開平1−302348号,特開
平5−197141号及び特開平5−11442号の各
公報などに側鎖にアジド基を含むアジドポリマーが高感
度な感光性樹脂として開示されている。
For this reason, development of a highly sensitive photosensitive resin has been underway, and for example, JP-A-4-26849, JP-A-2-204750, JP-A-2-173007, JP-A-2-92905, JP-A-1-302348, JP-A-5-197141 and JP-A-5-11442 disclose an azido polymer having an azide group in its side chain as a highly sensitive photosensitive resin.

【0005】[0005]

【発明が解決しようとする課題】これらのアジドポリマ
ーは高感度であるが、製造が繁雑である、経時安定性が
良くないなどの問題点が残っている。また、高感度で経
時安定性が良好な水溶性感光性樹脂として、特公昭56
−5761号公報に示されるスチリルピリジウム基ペン
ダントポリビニルアルコール(SbQ−PVAと略称す
る)が知られているが、この感光性樹脂は耐水性が悪
く、現像時に膨潤するため充分な解像度が得られないと
いう欠点がある。
Although these azido polymers have high sensitivity, they still have problems such as complicated production and poor stability over time. Further, as a water-soluble photosensitive resin having high sensitivity and good stability over time, it is disclosed in Japanese Examined Patent Publication No.
A styrylpyridinium group pendant polyvinyl alcohol (abbreviated as SbQ-PVA) disclosed in JP-5761-A is known, but this photosensitive resin has poor water resistance and swells during development, so that sufficient resolution can be obtained. It has the drawback of not having it.

【0006】本発明は上記従来の問題点を解決しようと
するものであり、その目的とするところは、高感度、高
解像度で経時安定性が良く、更に製造も容易である水溶
性の感光性樹脂組成物を提供することにある。
The present invention is intended to solve the above-mentioned conventional problems, and an object thereof is to provide a water-soluble photosensitive resin having high sensitivity, high resolution, good stability over time, and easy production. It is to provide a resin composition.

【0007】[0007]

【課題を解決するための手段】本発明者らは、前記目的
を達成するために鋭意研究を重ねた結果、下記一般式
(I)で表わされる構成単位を有する高分子化合物と分
子内にカチオン基を有する増感剤とを含有して成る感光
性樹脂組成物がその目的を達成しうることを知見し、こ
れに基づいて本発明を完成するに至った。かかる知見に
基づく本発明の構成は、下記一般式(I)で表わされる
構成単位を有する高分子化合物と分子内にカチオン基を
有する増感剤とを含有することを特徴とする。
Means for Solving the Problems As a result of intensive studies to achieve the above object, the present inventors have found that a polymer compound having a constitutional unit represented by the following general formula (I) and a cation in the molecule It was found that a photosensitive resin composition containing a sensitizer having a group can achieve the object, and based on this, the present invention has been completed. The structure of the present invention based on such findings is characterized by containing a polymer compound having a structural unit represented by the following general formula (I) and a sensitizer having a cationic group in the molecule.

【化2】 [Chemical 2]

【0008】また、上記記載の感光性樹脂組成物におい
て、前記一般式(I)のnが、0であることを特徴とす
る。
Further, in the above-mentioned photosensitive resin composition, n in the general formula (I) is 0.

【0009】さらに、上記記載の感光性樹脂組成物にお
いて、前記分子内にカチオン基を有する増感剤のカチオ
ン基が、4級アンモニウム基であることを特徴とする。
Further, in the above-mentioned photosensitive resin composition, the cation group of the sensitizer having a cation group in the molecule is a quaternary ammonium group.

【0010】以下、本発明を詳細に説明する。The present invention will be described in detail below.

【0011】本発明の組成物に使用される前記一般式
(I)で表わされる構成単位を有する高分子化合物は、
ポリ酢酸ビニルケン化物あるいはビニルアルコールと他
のビニル化合物との水溶性共重合体に、下記(II)で表
わされるアルデヒドもしくは、
The polymer compound having the structural unit represented by the general formula (I) used in the composition of the present invention is
Saponified poly (vinyl acetate) or water-soluble copolymer of vinyl alcohol and other vinyl compound, aldehyde represented by the following (II), or

【化3】 下記一般式(III)で表わされるアセタールを、酸触媒下
で反応させることにより容易に得られる。
[Chemical 3] It can be easily obtained by reacting an acetal represented by the following general formula (III) under an acid catalyst.

【化4】 [Chemical 4]

【0012】前記の反応に用いられるポリ酢酸ビニルケ
ン化物としては、例えば平均重合度200から5,00
0、ケン化度60〜100%のものが好適に用いられ
る。ここで、平均重合度を200から5,000とした
のは、重合度が200より小さい場合、十分な感度を得
られず、また一方、5,000より大きい場合には感光
性組成物の溶液の粘度が高くなり、塗布性が悪くなる、
これを避けるために組成物溶液の濃度を低くして使用す
ると、所望の塗布膜厚を得るのが困難になり、共に好ま
しくないからである。また、、ケン化度を60〜100
%と規定したのは、ケン化度が60%より低いと十分な
水溶性及び水現像性が得られないためである。前記ポリ
酢酸ビニルケン化物は、例えば親水基変性,親油基変
性,アニオン変性,カチオン変性あるいはアセトアセチ
ル基のような反応性基変性などの変性ポリ酢酸ビニルケ
ン化物も用いることができる。
The saponified polyvinyl acetate used in the above reaction is, for example, an average degree of polymerization of 200 to 5,000.
Those having a saponification degree of 0 to 60 to 100% are preferably used. Here, the average degree of polymerization is set to 200 to 5,000, because when the degree of polymerization is less than 200, sufficient sensitivity cannot be obtained, and when it is more than 5,000, the solution of the photosensitive composition is Viscosity increases, and coating properties deteriorate
If the composition solution is used at a low concentration in order to avoid this, it becomes difficult to obtain a desired coating film thickness, and both are not preferable. Further, the saponification degree is 60 to 100.
The definition of "%" is because when the saponification degree is lower than 60%, sufficient water solubility and water developability cannot be obtained. As the saponified polyvinyl acetate, for example, modified polyvinyl acetate saponified by hydrophilic group modification, lipophilic group modification, anion modification, cation modification, or reactive group modification such as acetoacetyl group can be used.

【0013】ビニルアルコールと共重合され得るビニル
モノマーとしては、例えばN−ビニルピロリドン,アク
リルアミドなどを挙げることができる。
Examples of vinyl monomers copolymerizable with vinyl alcohol include N-vinylpyrrolidone and acrylamide.

【0014】このようなポリ酢酸ビニルケン化物類と一
般式(II)又は(III)の化合物とを酸触媒の存在下に反
応させる際には、例えばホルムアルデヒド,アセトアル
デヒド,プロピオンアルデヒド,ブチルアルデヒド,ベ
ンズアルデヒドなどのアルデヒド類もしくはこれらのア
セタール類を同時に反応させることもできる。
When reacting such saponified polyvinyl acetate with the compound of the general formula (II) or (III) in the presence of an acid catalyst, for example, formaldehyde, acetaldehyde, propionaldehyde, butyraldehyde, benzaldehyde, etc. The aldehydes or the acetals thereof can be simultaneously reacted.

【0015】ポリ酢酸ビニルケン化物類に対する一般式
(I)又は(II)のアジド化合物の導入率はモノマー単
位あたり0.1 〜5.0 モル%程度が好ましい。ここで、導
入率をモノマー単位あたり0.1 〜5.0 モル%程度とした
のは、0.1モル%より少ない場合は十分な硬化膜を得る
ことが出来ず、また5.0 モル%より多いと、アジドの分
解による窒素ガスの発生が多くなり、感光膜の基板への
接着性が低下するからである。
The introduction ratio of the azide compound of the general formula (I) or (II) to the saponified polyvinyl acetate is preferably about 0.1 to 5.0 mol% per monomer unit. Here, the introduction rate is set to about 0.1 to 5.0 mol% per monomer unit, because when it is less than 0.1 mol%, a sufficient cured film cannot be obtained, and when it is more than 5.0 mol%, the azide is decomposed. This is because the generation of nitrogen gas increases and the adhesion of the photosensitive film to the substrate decreases.

【0016】一般式(II)及び(III)におけるnは、0.
1 又は2であるが、これらをそれぞれ単独でも混合して
用いても良いが、n=0のアルデヒドとアセトアルデヒ
ドの反応混合物をそのまま用いても良い。特に、n=0
のアルデヒドとアセトアルデヒドの反応混合物を用いた
場合は、その製造が容易となる。また、n=1,2のも
のは、n=0のアジド化合物より吸収波長が長波になる
ため、光反応性が更に向上する点で好ましい。
N in the general formulas (II) and (III) is 0.
Although they may be 1 or 2, these may be used alone or as a mixture, or a reaction mixture of an aldehyde with n = 0 and acetaldehyde may be used as it is. In particular, n = 0
When the reaction mixture of the aldehyde and acetaldehyde is used, its production becomes easy. Further, n = 1 and 2 are preferable in that the photoreactivity is further improved because the absorption wavelength is longer than that of the n = 0 azide compound.

【0017】一般式(I)に於けるXは、カチオン種を
表わすが、例えばLi,Na,K,アンモニウムなどを
挙げることができる。
X in the general formula (I) represents a cation species, and examples thereof include Li, Na, K and ammonium.

【0018】本発明組成物で使用される増感剤は、例え
ばアンモニウム基,フォスホニウム基,スルホニウム基
およびオキソニウム基のようなカチオン基を分子内に少
なくとも1個有する増感剤であるが、製造が容易な点で
アンモニウム基が好ましい。このような増感剤の好適な
具体例(S−1〜S−25)を、以下に挙げる。
The sensitizer used in the composition of the present invention is a sensitizer having at least one cation group such as ammonium group, phosphonium group, sulfonium group and oxonium group in the molecule. An ammonium group is preferable because it is easy. Specific preferred examples (S-1 to S-25) of such a sensitizer are shown below.

【0019】[0019]

【化5】 [Chemical 5]

【0020】[0020]

【化6】 [Chemical 6]

【0021】[0021]

【化7】 [Chemical 7]

【0022】[0022]

【化8】 [Chemical 8]

【0023】[0023]

【化9】 [Chemical 9]

【0024】[0024]

【化10】 [Chemical 10]

【0025】[0025]

【化11】 [Chemical 11]

【0026】本発明組成物において、一般式(I)で表
わされる構成単位に対する分子内にカチオン基を有する
増感剤の配合割合は、10〜90モル%位が好適であ
る。これは、10モル%未満であると、多少の増感効果
は得られるが、アジド基の光反応速度が遅く、導入した
アジド基の性能が十分に発揮されない点で好ましくな
く、また90モル%を超えると、水現像性が低下した
り、基板との接着性が低下したりする点で好ましくない
からである。又、90モル%位以上添加しても、更なる
増感効果も得られないからである。
In the composition of the present invention, the compounding ratio of the sensitizer having a cationic group in the molecule to the structural unit represented by the general formula (I) is preferably about 10 to 90 mol%. If it is less than 10 mol%, some sensitizing effect can be obtained, but it is not preferable in that the photoreaction rate of the azide group is slow and the performance of the introduced azide group is not sufficiently exhibited. This is because if it exceeds the range, the water developability is lowered and the adhesiveness to the substrate is lowered, which is not preferable. Further, even if it is added in an amount of about 90 mol% or more, no further sensitizing effect can be obtained.

【0027】本発明の組成物には上述の高分子化合物以
外の高分子化合物、特にピロリドンやアミド構造のよう
なアジド基と光反応を起こしやすい基を含む高分子化合
を配合することにより、更に感度を高めることもでき
る。この高分子化合物の一例としては、例えばポリビニ
ルピロリドン、ダイアセトンアクリルアミドとアクリル
アミドとの共重合体、ポリアクリルアミド等を挙げるこ
とが出来る。
The composition of the present invention may be further blended with a polymer compound other than the above-mentioned polymer compounds, particularly a polymer compound containing azide group such as pyrrolidone or amide structure and a group susceptible to photoreaction. It can also increase sensitivity. Examples of this polymer compound include polyvinylpyrrolidone, a copolymer of diacetone acrylamide and acrylamide, and polyacrylamide.

【0028】また、本発明の組成物には、塗膜の強度、
耐水性などの性質の改良するために高分子エマルジョン
を混合することができる。このような高分子エマルジョ
ンとしては、例えば、ポリ酢酸ビニルエマルジョン,酢
酸ビニル−エチレン共重合体エマルジョン,酢酸ビニル
−アクリル酸エステル共重合体エマルジョン,ポリスチ
レンエマルジョン,エチレン−ブタジエン共重合体エマ
ルジョン,スチレン−アクリル酸エステル共重合体エマ
ルジョン,アセトニトリル−ブタジエン共重合体エマル
ジョン,クロロプレン重合体エマルジョン,ポリ塩化ビ
ニルエマルジョン,シリコーン樹脂エマルジョン,ポリ
ウレタンエマルジョン等を挙げることができる。
Further, the composition of the present invention has the following properties:
Polymeric emulsions can be mixed to improve properties such as water resistance. Examples of such polymer emulsions include polyvinyl acetate emulsion, vinyl acetate-ethylene copolymer emulsion, vinyl acetate-acrylic acid ester copolymer emulsion, polystyrene emulsion, ethylene-butadiene copolymer emulsion, styrene-acryl. Examples thereof include acid ester copolymer emulsion, acetonitrile-butadiene copolymer emulsion, chloroprene polymer emulsion, polyvinyl chloride emulsion, silicone resin emulsion, polyurethane emulsion and the like.

【0029】本発明の組成物には、その他必要に応じ、
塗布性や現像性を改良する界面活性剤、接着性を改善す
る接着助剤、ハレーションを防止する染料や顔料、さら
に保存安定剤,消泡剤等も適宜配合することができる。
In the composition of the present invention, if necessary,
Surfactants that improve coatability and developability, adhesion aids that improve adhesion, dyes and pigments that prevent halation, storage stabilizers, defoamers, and the like can be appropriately added.

【0030】本発明の組成物は、前述した側鎖にアジド
基を有する高分子化合物および分子内にカチオン基を有
する増感剤ならびに必要に応じた各種の配合剤を、水を
主体とする溶剤に溶解あるいは分散させることにより調
製することができる。
The composition of the present invention comprises the above-mentioned polymer compound having an azido group in the side chain, a sensitizer having a cationic group in the molecule and, if necessary, various compounding agents in a solvent containing water as a main component. It can be prepared by dissolving or dispersing in.

【0031】この際用いられる溶剤としては、一般には
水が用いられるが、これに50重量%以下の割合で水に
可溶な溶剤、例えば、メチルアルコール,エチルアルコ
ール,イソプロピルアルコール,アセトン,テトラヒド
ロフラン,ジオキサン,ジメチルホルムアミド、N−メ
チルピロリジノンなどの水可溶性剤、エチレングリコー
ルモノメチルエーテル、エチレングリコールモノエチル
エーテル等を加えることができる。
As the solvent used at this time, water is generally used, and a solvent soluble in water at a ratio of 50% by weight or less, such as methyl alcohol, ethyl alcohol, isopropyl alcohol, acetone, tetrahydrofuran, Water-soluble agents such as dioxane, dimethylformamide and N-methylpyrrolidinone, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether and the like can be added.

【0032】上述のようにして得られた本発明の感光性
樹脂組成物は、用途に応じて、アルミニウムやステンレ
ス等の金属板、スクリーンメッシュ、紙、ガラス板、半
導体基板、その他任意の基材上に、例えば0.5〜10
00μmの乾燥厚さとなるように塗布し、乾燥して使用
される。
The photosensitive resin composition of the present invention obtained as described above is a metal plate such as aluminum or stainless steel, a screen mesh, paper, a glass plate, a semiconductor substrate, or any other base material depending on the application. On top, for example 0.5-10
It is applied so as to have a dry thickness of 00 μm, dried and used.

【0033】これらの塗膜には、紫外線、例えば波長3
00〜500nmのような活性光線を照射して照射部を硬
化させた後、非照射部を水等により除去すれば、パター
ン画像が得られて、例えば、スクリーン印刷版、カラー
ブラウン管のブラックマトリックスや螢光体パターン形
成、CCDやLCDのカラーフィルター、印刷のカラー
プルーフや各種エッチングレジスト等として利用でき
る。
These coatings have ultraviolet rays, for example, a wavelength of 3
After irradiating the irradiated part with an actinic ray such as 0 to 500 nm to cure the irradiated part, the non-irradiated part is removed with water or the like to obtain a pattern image. It can be used as a fluorescent material pattern formation, a color filter for CCD and LCD, a color proof for printing, various etching resists and the like.

【0034】[0034]

【実施例】次に実施例により、本発明の内容を更に詳細
に説明する。
EXAMPLES Next, the contents of the present invention will be described in more detail with reference to examples.

【0035】(合成例) 合成例1〈アジド基を含有する高分子化合物P−1〉 ポリビニルアルコール(GH−17:日本合成化学工業
製)50gを水200mlに溶解した。p−アジドベン
ズアルデヒド−o−スルホン酸の2.4%水溶液を17
0g加え、50℃で10時間反応させた。反応後冷却さ
せ、5%NaOH水溶液19.5g添加し、中和処理を
してアセタール化を完了し、高分子化合物P−1の水溶
液を得た。上記水溶液をアセトン再沈し、UV吸収より
ポリビニルアルコールへのp−アジドベンズアルデヒド
−o−スルホン酸ナトリウムの導入率を測定したとこ
ろ、1.6モル%であった。
(Synthesis Example) Synthesis Example 1 <Polymer compound P-1 containing an azide group> 50 g of polyvinyl alcohol (GH-17: manufactured by Nippon Synthetic Chemical Industry) was dissolved in 200 ml of water. 17% of a 2.4% aqueous solution of p-azidobenzaldehyde-o-sulfonic acid was added.
0 g was added and reacted at 50 ° C. for 10 hours. After the reaction, the mixture was cooled and 19.5 g of a 5% aqueous solution of NaOH was added, and the mixture was neutralized to complete the acetalization to obtain an aqueous solution of the polymer compound P-1. The aqueous solution was reprecipitated with acetone, and the rate of introduction of sodium p-azidobenzaldehyde-o-sulfonate into polyvinyl alcohol was measured by UV absorption, and it was 1.6 mol%.

【0036】合成例2〈アジド基を含有する高分子化合
物P−2〉 ポリビニルアルコール(EG−30:日本合成化学工業
製)50gを水200mlに溶解した。p−アジドベン
ズアルデヒド−o−スルホン酸ナトリウム1.03gと
p−アジドベンズアルデヒド−o−スルホン酸の2.4
%水溶液を170g加え、30℃で24時間反応させ
た。反応後冷却させ、5%NaOH水溶液19.5g添
加し、中和処理をしてアセタール化を完了し、高分子化
合物P−2の水溶液を得た。上記水溶液をアセトン再沈
し、UV吸収よりポリビニルアルコールへのp−アジド
ベンズアルデヒド−o−スルホン酸ナトリウムの導入率
を測定したところ、2.0モル%であった。
Synthesis Example 2 <Polymer compound P-2 containing an azide group> 50 g of polyvinyl alcohol (EG-30: manufactured by Nippon Synthetic Chemical Industry) was dissolved in 200 ml of water. 1.03 g of sodium p-azidobenzaldehyde-o-sulfonate and 2.4 of p-azidobenzaldehyde-o-sulfonic acid
% Aqueous solution (170 g) was added and reacted at 30 ° C. for 24 hours. After the reaction, the mixture was cooled and 19.5 g of a 5% NaOH aqueous solution was added, and the mixture was neutralized to complete acetalization to obtain an aqueous solution of polymer compound P-2. The aqueous solution was reprecipitated with acetone, and the rate of introduction of sodium p-azidobenzaldehyde-o-sulfonate into polyvinyl alcohol was measured by UV absorption, and it was 2.0 mol%.

【0037】合成例3〈アジド基を含有する高分子化合
物P−3〉 p−アジドベンズアルデヒド−o−スルホン酸ナトリウ
ム10g(0.046モル)とアセトアルデヒド10.
14g(0.23モル)を水160mlに溶解した。こ
れを2〜3℃まで冷却してから、10%水酸化ナトリウ
ム水溶液9.2gを加え、2〜3℃で4時間、更に60
℃で1時間半攪拌し反応させた。得られた反応混合物に
食塩を加え塩析させた後、イソプロピルアルコール/水
から精製してオレンジ色の結晶を得た。この結晶を高速
液体クロマトグラフィーで分析したところ、p−アジド
アルデヒド−o−スルホン酸ナトリウム(一般式(II)
に於いて、n=0,X=Naである。)38.5%,p
−アジドシンナムアルデヒド−o−スルホン酸ナトリウ
ム(一般式(II)においてn=1,X=Naである。)
34.2%、及び一般式(II)に於いて、n=2以上
(X=Na)のアルデ0ド15.6%の混合物であるこ
とが示された。ポリビニルアルコール(EG−30:日
本合成化学工業製)50gを水200mlに溶解し、こ
れに上記のオレンジ色の結晶4.3g及びリン酸1.5
gを加え、40℃で15時間反応させた。反応混合物を
イオン交換樹脂で処理することにより、リン酸触媒を除
去し、アジド基を含有する高分子化合物P−3の水溶液
を作成した。
Synthesis Example 3 <Polymer compound P-3 containing azido group> 10 g (0.046 mol) of sodium p-azidobenzaldehyde-o-sulfonate and acetaldehyde 10.
14 g (0.23 mol) was dissolved in 160 ml of water. After cooling this to 2 to 3 ° C., 9.2 g of a 10% sodium hydroxide aqueous solution was added, and the mixture was further treated at 2 to 3 ° C. for 4 hours and further 60
The reaction was carried out by stirring for 1 hour and a half at ° C. Salt was added to the obtained reaction mixture for salting out, followed by purification from isopropyl alcohol / water to obtain orange crystals. When the crystals were analyzed by high performance liquid chromatography, they were found to be sodium p-azidoaldehyde-o-sulfonate (general formula (II)
In, n = 0 and X = Na. ) 38.5%, p
-Azidocinnamaldehyde-sodium o-sulfonate (n = 1, X = Na in the general formula (II))
34.2%, and in the general formula (II), it was shown to be a mixture of 15.6% of aldode having n = 2 or more (X = Na). 50 g of polyvinyl alcohol (EG-30: manufactured by Nippon Synthetic Chemical Industry) was dissolved in 200 ml of water, and 4.3 g of the above orange crystals and 1.5 of phosphoric acid were dissolved in the solution.
g was added and reacted at 40 ° C. for 15 hours. The reaction mixture was treated with an ion exchange resin to remove the phosphoric acid catalyst to prepare an aqueous solution of polymer compound P-3 containing an azide group.

【0038】合成例4〈アジド基を含有する高分子化合
物P−4〉 合成例2のEG−30をアクリルアミド変性ポリビニル
アルコール(EP−240:電気化学工業製)に変更し
た以外は合成例2と全く同様に操作して、アジド基を含
有する高分子化合物P−4の水溶液を得た。
Synthesis Example 4 <Polymer compound P-4 containing azide group> Synthesis Example 2 except that EG-30 of Synthesis Example 2 was changed to acrylamide-modified polyvinyl alcohol (EP-240: manufactured by Denki Kagaku Kogyo). By operating in exactly the same manner, an aqueous solution of polymer compound P-4 containing an azide group was obtained.

【0039】合成例5〈アジド基を含有する高分子化合
物P−5〉 ポリビニルアルコール(GH−17:日本合成化学工業
製)50gを水200mlに溶解した。p−アジドベン
ズラルデヒド−o−スルホン酸ナトリウムの2.4%水
溶液170g及びクロトンアルデヒド3.6gを加え、
30℃で24時間反応させた。反応後冷却させ、5%水
酸化ナトリウム水溶液19.5gで中和させることによ
り、アジド基を含有する高分子化合物P−5の水溶液を
得た。
Synthesis Example 5 <Polymer compound P-5 containing azide group> 50 g of polyvinyl alcohol (GH-17: manufactured by Nippon Synthetic Chemical Industry) was dissolved in 200 ml of water. 170 g of a 2.4% aqueous solution of sodium p-azidobenzaldehyde-o-sulfonate and 3.6 g of crotonaldehyde were added,
The reaction was carried out at 30 ° C for 24 hours. After the reaction, the mixture was cooled and neutralized with 19.5 g of a 5% aqueous sodium hydroxide solution to obtain an aqueous solution of polymer compound P-5 containing an azide group.

【0040】〔実施例1〜20〕次に上記合成例1〜5
で得られた高分子化合物を用いて、実施例1〜20及び
比較例1〜3を実施した。
[Examples 1 to 20] Next, the above Synthesis Examples 1 to 5
Examples 1 to 20 and Comparative Examples 1 to 3 were carried out using the polymer compound obtained in.

【0041】感度 合成例1〜5で得られたアジド基を含む高分子化合物P
−1〜P−4の水溶液10g、表に示すカチオン基を有
する増感剤及び水7gを混合、溶解及びろ過し感光性組
成物を調製した。これらの組成物をガラス基板上にスピ
ンコートで塗布して、70℃で20分間乾燥することに
より、1.2μmの膜厚の感光層を形成した。照度5.
0mW/cm2 (オーク製作所製紫外線照度計UV−M
01でUV35センサーを使用して測定)の超高圧水銀
灯の光のもとに、富士ステップガイドを通して露光し
た。露光後1分間水洗現像し、1%メチレンブルーによ
り硬化膜を染色し、硬化ステップ段数により感度を評価
した。この結果を、「表1」に示す。
Sensitivity Polymer compound P containing azide group obtained in Synthesis Examples 1 to 5
A photosensitive composition was prepared by mixing 10 g of an aqueous solution of -1 to P-4, a sensitizer having a cationic group shown in the table and 7 g of water, dissolving and filtering. These compositions were applied onto a glass substrate by spin coating and dried at 70 ° C. for 20 minutes to form a photosensitive layer having a film thickness of 1.2 μm. Illuminance 5.
0 mW / cm 2 (UV illuminance meter UV-M manufactured by Oak Manufacturing Co., Ltd.
Exposure was performed through a Fuji step guide under the light of an ultra-high pressure mercury lamp (measured using a UV35 sensor at 01). After exposure, the film was washed with water for 1 minute and developed, the cured film was dyed with 1% methylene blue, and the sensitivity was evaluated by the number of curing steps. The results are shown in "Table 1".

【0042】[0042]

【表1】 この表1の結果から判る様に、本発明の実施例1〜21
に係る感光性組成物はいずれも比較例1〜3の増感剤を
加えないものにくらべて高感度であることが、判明し
た。
[Table 1] As can be seen from the results of Table 1, Examples 1 to 21 of the present invention
It was found that all of the photosensitive compositions according to (1) had higher sensitivity than those of Comparative Examples 1 to 3 in which no sensitizer was added.

【0043】解像度 実施例1の組成物とSbQ−PVA(SPP−H−1
3:東洋合成工業製)を前述と同様にしてガラス基板上
に塗布、乾燥し、1.2μmの膜厚の感光層を形成し
た。この感光層に50μm中のパターンのクロムマスク
を密着させ露光し、水現像した。得られた50μm中の
パターンをノマルスキー微分干渉顕微鏡で観察したとこ
ろ、SbQ−PVAではパターン表面にしわが観察され
たが、実施例1の組成物ではパターン表面はきれいであ
った。また感光層とクロムマスクの間に0.15mmのギ
ャップを設けて露光し、同様に観察したところ、実施例
1の組成物ではきれいなパターンが得られたが、SbQ
−PVAでは多数のフリンジが観察された。
Resolution Composition of Example 1 and SbQ-PVA (SPP-H-1)
3: manufactured by Toyo Gosei Co., Ltd.) was coated on a glass substrate and dried in the same manner as described above to form a photosensitive layer having a thickness of 1.2 μm. A chrome mask having a pattern of 50 μm was brought into close contact with the photosensitive layer, exposed, and developed with water. When the obtained pattern in 50 μm was observed with a Nomarski differential interference microscope, wrinkles were observed on the pattern surface with SbQ-PVA, but the pattern surface was clean with the composition of Example 1. Further, exposure was performed with a gap of 0.15 mm provided between the photosensitive layer and the chrome mask, and the same observation was performed, but a clear pattern was obtained with the composition of Example 1, but SbQ
-Multiple fringes were observed with PVA.

【0044】〔実施例21〜32〕次に上記合成例1で
得られた高分子化合物を用いて、実施例21〜32を実
施した。感度 合成例1で得られたアジド基を含む高分子化合物P−1
の水溶液10gと、表2に示す増感剤及び水7gを混
合、溶解及びろ過し、感光製組成物を調製し、上述の実
施例と全く同様に操作して、感度を評価した。この結果
を、「表2」に示す。
Examples 21 to 32 Next, Examples 21 to 32 were carried out using the polymer compound obtained in Synthesis Example 1 above. Polymer compound P-1 containing an azide group obtained in Sensitivity Synthesis Example 1
A photosensitizing composition was prepared by mixing 10 g of the above aqueous solution with a sensitizer and 7 g of water shown in Table 2, dissolving and filtering, and the sensitivity was evaluated by operating in exactly the same manner as in the above-mentioned Examples. The results are shown in "Table 2".

【0045】[0045]

【表2】 [Table 2]

【0046】この表2の結果から、本発明の実施例21
から32に係る感光性樹脂組成物は、何れも比較例1の
増感剤を加えないものに較べて、高感度であることが実
証された。
From the results of Table 2, Example 21 of the present invention was obtained.
It was demonstrated that the photosensitive resin compositions according to Nos. 32 to 32 have higher sensitivity than those of Comparative Example 1 in which the sensitizer was not added.

【0047】[0047]

【発明の効果】以上説明したように、本発明の感光性樹
脂組成物は高感度、高解像度で経時安定性が良く、更に
製造も容易であり、例えば、スクリーン印刷版、カラー
ブラウン管のブラックマトリックスや螢光体パターン形
成、CCDやLCDのカラーフィルター、印刷のカラー
プルーフや各種エッチングレジスト等として用いて好適
である。
As described above, the photosensitive resin composition of the present invention has high sensitivity, high resolution, good stability over time, and is easy to produce. For example, a screen printing plate or a black matrix of a color cathode ray tube. It is suitable for use as a phosphor pattern formation, a color filter for CCD and LCD, a color proof for printing, various etching resists, and the like.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 菊地 英夫 千葉県船橋市米ケ崎町563番地 東洋合成 工業株式会社感光材研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hideo Kikuchi 563 Yonegasaki-cho, Funabashi-shi, Chiba Toyo Gosei Kogyo Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 下記一般式(I)で表わされる構成単位
を有する高分子化合物と分子内にカチオン基を有する増
感剤とを含有することを特徴とする感光性組成物。 【化1】
1. A photosensitive composition comprising a polymer compound having a structural unit represented by the following general formula (I) and a sensitizer having a cationic group in the molecule. [Chemical 1]
【請求項2】 請求項1記載の感光性樹脂組成物におい
て、前記一般式(I)のnが、0であることを特徴とす
る感光性樹脂組成物。
2. The photosensitive resin composition according to claim 1, wherein n in the general formula (I) is 0.
【請求項3】 請求項1記載の感光性樹脂組成物におい
て、前記分子内にカチオン基を有する増感剤のカチオン
基が、4級アンモニウム基であることを特徴とする感光
性樹脂組成物。
3. The photosensitive resin composition according to claim 1, wherein the cation group of the sensitizer having a cationic group in the molecule is a quaternary ammonium group.
JP02504194A 1994-02-23 1994-02-23 Photosensitive resin composition Expired - Fee Related JP3428715B2 (en)

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028382A1 (en) * 1997-05-13 2000-05-18 Toyo Gosei Kogyo Co., Ltd. Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of the compounds or compositions
EP1138328A1 (en) * 2000-03-29 2001-10-04 Eli Lilly And Company Limited Naphthalene derivatives as CNS drugs
JP2002097226A (en) * 2000-09-25 2002-04-02 Toppan Printing Co Ltd Water-soluble photosensitive polymer and water-soluble photosensitive resin composition
JP2002322430A (en) * 2001-02-23 2002-11-08 Fuji Photo Film Co Ltd Curable composition and hard coated article
EP1318177A2 (en) * 2001-12-05 2003-06-11 Dyomics GmbH Compound, in particular marker-dye, based on polymethines
EP1348690A1 (en) * 2002-03-29 2003-10-01 Toyo Gosei Kogyo Co., Ltd. Cinnamaldehyde compound having an azido group
EP1535969A2 (en) 2003-11-26 2005-06-01 Dyomics GmbH Coumarin based new polymethine dyes with adjustable Stoke's-Shift
EP1837704A2 (en) * 2006-03-23 2007-09-26 FUJIFILM Corporation Resist composition and pattern forming method using the same
JP2017098298A (en) * 2015-11-18 2017-06-01 日本酢ビ・ポバール株式会社 Protective agent for semiconductor laser dicing and method of manufacturing semiconductor using the same
JP2017098299A (en) * 2015-11-18 2017-06-01 日本酢ビ・ポバール株式会社 Protective agent for semiconductor laser dicing and method of manufacturing semiconductor using the same
KR20210103680A (en) * 2020-02-14 2021-08-24 대구대학교 산학협력단 Amphiphilic Compound and Composition for Detecting Heparin Comprising the Same

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000028382A1 (en) * 1997-05-13 2000-05-18 Toyo Gosei Kogyo Co., Ltd. Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of the compounds or compositions
EP1138328A1 (en) * 2000-03-29 2001-10-04 Eli Lilly And Company Limited Naphthalene derivatives as CNS drugs
JP2002097226A (en) * 2000-09-25 2002-04-02 Toppan Printing Co Ltd Water-soluble photosensitive polymer and water-soluble photosensitive resin composition
JP2002322430A (en) * 2001-02-23 2002-11-08 Fuji Photo Film Co Ltd Curable composition and hard coated article
EP1318177A2 (en) * 2001-12-05 2003-06-11 Dyomics GmbH Compound, in particular marker-dye, based on polymethines
EP1318177A3 (en) * 2001-12-05 2003-07-16 Dyomics GmbH Compound, in particular marker-dye, based on polymethines
EP1348690A1 (en) * 2002-03-29 2003-10-01 Toyo Gosei Kogyo Co., Ltd. Cinnamaldehyde compound having an azido group
US6768027B2 (en) 2002-03-29 2004-07-27 Toyo Gosei Kogyo Co. Ltd. Cinnamaldehyde compound having an azido group
EP1535969A2 (en) 2003-11-26 2005-06-01 Dyomics GmbH Coumarin based new polymethine dyes with adjustable Stoke's-Shift
EP1837704A2 (en) * 2006-03-23 2007-09-26 FUJIFILM Corporation Resist composition and pattern forming method using the same
JP2008065296A (en) * 2006-03-23 2008-03-21 Fujifilm Corp Resist composition and pattern forming method using the same
EP1837704A3 (en) * 2006-03-23 2008-07-09 FUJIFILM Corporation Resist composition and pattern forming method using the same
US7691560B2 (en) 2006-03-23 2010-04-06 Fujifilm Corporation Resist composition and pattern forming method using the same
JP2017098298A (en) * 2015-11-18 2017-06-01 日本酢ビ・ポバール株式会社 Protective agent for semiconductor laser dicing and method of manufacturing semiconductor using the same
JP2017098299A (en) * 2015-11-18 2017-06-01 日本酢ビ・ポバール株式会社 Protective agent for semiconductor laser dicing and method of manufacturing semiconductor using the same
KR20210103680A (en) * 2020-02-14 2021-08-24 대구대학교 산학협력단 Amphiphilic Compound and Composition for Detecting Heparin Comprising the Same

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