JPH07230680A - Brush attaching and detaching mechanism for washing device - Google Patents

Brush attaching and detaching mechanism for washing device

Info

Publication number
JPH07230680A
JPH07230680A JP6020207A JP2020794A JPH07230680A JP H07230680 A JPH07230680 A JP H07230680A JP 6020207 A JP6020207 A JP 6020207A JP 2020794 A JP2020794 A JP 2020794A JP H07230680 A JPH07230680 A JP H07230680A
Authority
JP
Japan
Prior art keywords
brush
rotating shaft
brush frame
frame body
cleaning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6020207A
Other languages
Japanese (ja)
Inventor
Akira Miyao
明 宮尾
Teruo Moriyama
照雄 守山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6020207A priority Critical patent/JPH07230680A/en
Publication of JPH07230680A publication Critical patent/JPH07230680A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To keep engagement between a brush and a rotary shaft from influence even at whatever degree of bearing from the washing is changed and yet to facilitate brush replacement work on the brush attaching and detaching mechanism for a disk brush type washing device capable of separatably attaching and detaching the side of the rotary shaft and the side of a brush frame body in order to comparatively frequently disk brushes as parts of consumption. CONSTITUTION:The side of the rotary shaft 5 and the side of the brush frame body 2 are freely attachable to and detachable from each other, and the disk brush 1 fitted to the brush frame body 2 is brought into contact with the washing to perform scrubbing. In this washing device, when the side of the rotary shaft 5 and the side of the brush frame body 2, which are the separate parts are to be engaged with each other, a cylinder body 3 fitted to the rotary shaft 5 is lifted up via a spring 4, so that the brush frame body 2 is drawn to the rotary shaft 5 and is held. At this time, the brush frame body 2 is fixed to the rotary shaft 5 under their contact state.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えばガラス基板,シ
リコン基板等を洗浄する洗浄装置に係り、さらに詳細に
は、ディスクブラシを用いてガラス基板等を擦り洗浄す
るこの種装置のブラシ着脱機構に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning device for cleaning, for example, a glass substrate, a silicon substrate or the like, and more specifically, a brush attaching / detaching mechanism for such a device for cleaning a glass substrate or the like by using a disc brush. Regarding

【0002】[0002]

【従来の技術】ロールブラシ式の洗浄装置によってガラ
ス基板,シリコン基板等を洗浄する場合、従来より、ロ
ールブラシの形状に起因する特有の問題として、基板端
部の洗浄に問題のあることが指摘されており、これに代
わって前記したロールブラシ式洗浄装置の問題をなく
し、かつ擦り洗浄効果の大きなディスクブラシ式の洗浄
装置が使用されている。
2. Description of the Related Art When cleaning a glass substrate, a silicon substrate, or the like with a roll brush type cleaning device, it has been pointed out that there is a problem in cleaning the end of the substrate as a peculiar problem caused by the shape of the roll brush. In place of this, a disk brush type cleaning device which eliminates the problems of the roll brush type cleaning device described above and has a large rubbing cleaning effect is used.

【0003】ところで、洗浄ブラシは消耗部品であるた
め、交換頻度が高い。
By the way, since the cleaning brush is a consumable part, it is frequently replaced.

【0004】したがって、ディスクブラシ式の洗浄装置
においても駆動部側と被駆動部側、つまり回転軸側とブ
ラシ枠体側とを分割可能な着脱式とすることがおこなわ
れている。
Therefore, even in the disc brush type cleaning device, the drive side and the driven side, that is, the rotating shaft side and the brush frame side are detachable.

【0005】そして、従来にあっては、例えば実開平4
−96844号公報に記載のように、回転軸とブラシと
の間に空隙を形成し、この空隙内にブラシ保持用のバネ
を設置し、被洗浄物からブラシが受ける反力をブラシ保
持用バネが直接受けるようにしている。
In the prior art, for example, the actual Kaihei 4
As described in JP-A-96844, a gap is formed between the rotary shaft and the brush, and a spring for holding the brush is installed in the gap, so that the reaction force received by the brush from the object to be cleaned is held by the spring for holding the brush. Will receive it directly.

【0006】なお、ブラシに関する従来技術は、前記以
外に、例えば特開平2−167106号,実開昭55−
100532号,同55−100533号,実開平4−
125447号公報等に記載されている。
In addition to the above, the prior art relating to the brush is not limited to the above, for example, Japanese Patent Laid-Open No. 167106/55,
No. 100532, No. 55-100533, No. 4
It is described in Japanese Patent No. 125447.

【0007】[0007]

【発明が解決しようとする課題】しかし、前掲実開平4
−96844号公報に代表される洗浄装置のブラシ着脱
機構にあっては、被洗浄物からブラシが受ける反力がバ
ネを圧縮させる向きに働くため、その反力が大きくなる
と、ブラシと回転軸との嵌合が離れる危険性がある。
[Problems to be Solved by the Invention]
In the brush attaching / detaching mechanism of the cleaning device represented by Japanese Patent Publication No. 96844, since the reaction force received by the brush from the object to be cleaned acts in such a direction as to compress the spring, when the reaction force becomes large, the brush and the rotating shaft are There is a risk that the mating of will be separated.

【0008】また、その危険を回避すべく、弾性力のよ
り大きなバネを用いると、回転軸に対するブラシの交換
作業に際し、バネを圧縮するための操作者の負担が大き
くなり、作業がしにくくなるという問題があった。
If a spring having a larger elastic force is used in order to avoid the danger, the burden on the operator for compressing the spring when replacing the brush with respect to the rotary shaft becomes large and the work becomes difficult. There was a problem.

【0009】本発明の目的は、消耗部品であるディスク
ブラシを比較的頻繁に交換すべく、回転軸側とブラシ枠
体側とを分割可能な着脱式とたディスクブラシ式の洗浄
装置において、被洗浄物からの面圧がどのように変化し
てもブラシと回転軸との嵌合には影響がなく、しかもブ
ラシ交換作業の容易なこの種装置のブラシ着脱機構を提
供することにある。
An object of the present invention is to clean a disk brush type cleaning device in which a rotating shaft side and a brush frame side are detachable so that a disk brush which is a consumable part can be replaced relatively frequently. It is an object of the present invention to provide a brush attaching / detaching mechanism of this type of device, which does not affect the fitting of the brush and the rotating shaft regardless of how the surface pressure from the object changes and which facilitates the brush replacement work.

【0010】[0010]

【課題を解決するための手段】前記目的は、回転軸側と
ブラシ枠体側とを着脱自在とし、ブラシ枠体に取り付け
たディスクブラシを被洗浄物に当接させて擦り洗浄をお
こなう洗浄装置において、別部品とした回転軸側とブラ
シ枠体側との嵌合時、回転軸に取り付けた筒状部材が弾
性体を介して持ち上げられて、ブラシ枠体を回転軸に引
きつけながら保持し、回転軸にブラシ枠体を当接させた
状態で固定する構成とすることによって達成される。
SUMMARY OF THE INVENTION The above object is to provide a cleaning device in which a rotating shaft side and a brush frame body side are detachable, and a disc brush attached to the brush frame body is brought into contact with an object to be cleaned for rubbing cleaning. , When the rotating shaft side and the brush frame body side, which are separate parts, are fitted together, the tubular member attached to the rotating shaft is lifted through the elastic body to hold the brush frame body while attracting the rotating shaft. This is achieved by adopting a structure in which the brush frame is fixed in a state of being in contact with the brush frame.

【0011】これを換言すると、前記目的は、別部品と
した回転軸側とブラシ枠体側との嵌合部に、被洗浄物か
らの面圧の変化によってもディスクブラシが軸心方向に
上下動しないディスクブラシ上下動固定手段を備えるこ
とによって達成される。
In other words, the above-mentioned object is that the disc brush moves vertically in the axial direction at the fitting portion between the rotating shaft side and the brush frame side, which are separate parts, even when the surface pressure from the object to be cleaned changes. It is achieved by providing a disc brush vertical movement fixing means.

【0012】[0012]

【作用】以上の構成において、回転軸に取り付けた筒状
部材は、弾性体を介して持ち上げられてブラシ枠体を回
転軸に引きつけながら保持し、回転軸にブラシ枠体が当
接した状態で固定される。
In the above structure, the cylindrical member attached to the rotary shaft is lifted through the elastic body to hold the brush frame while attracting the brush frame to the rotary shaft, and the brush frame is in contact with the rotary frame. Fixed.

【0013】[0013]

【実施例】以下、本発明を、図1〜図4の一実施例にも
とづいて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to one embodiment shown in FIGS.

【0014】図1において、ベアリング19により支持
された回転軸5は、図には記載されていない駆動機構に
よって得た回転力を、回転軸5に圧入されたトルク伝達
片6により、ブラシ枠体2に取り付けられた繊維あるい
はスポンジ等からなるディスクブラシ1に伝える。
In FIG. 1, the rotating shaft 5 supported by bearings 19 is rotated by a torque transmitting piece 6 press-fitted into the rotating shaft 5 to rotate the rotational force obtained by a drive mechanism not shown in the drawing. It is transmitted to the disc brush 1 made of fibers or sponge attached to the disc.

【0015】円筒体3がバネ4によって矢印7の向きに
押し上げられることにより、ブラシ1を備えたブラシ枠
体2は、回転軸5の下端面8に面で接して固定される。
When the cylindrical body 3 is pushed up in the direction of the arrow 7 by the spring 4, the brush frame body 2 having the brush 1 is fixed in surface contact with the lower end surface 8 of the rotary shaft 5.

【0016】この状態でバネ4は、常に矢印7の向きに
弾性力を及ぼしており、ブラシ枠体2は回転軸5に安定
的に当接している。
In this state, the spring 4 constantly exerts an elastic force in the direction of the arrow 7, and the brush frame 2 is in stable contact with the rotating shaft 5.

【0017】ブラシ1ならびにブラシ枠体2を取り外す
に際しては、図3において、バネ4に抗する矢印9の向
きに、回転軸5に設けたトルク伝達片6が、ブラシ枠体
2に設けたトルク伝達凹部10から抜け出るまで引く。
When removing the brush 1 and the brush frame 2, the torque transmission piece 6 provided on the rotating shaft 5 in the direction of the arrow 9 against the spring 4 in FIG. Pull until it comes out of the transmission recess 10.

【0018】その後ブラシ枠体2を回転させ、図4に示
すブラシ枠体凸部11を、円筒体凹部12に合わせて引
き抜けば、ブラシ1およびブラシ枠体2を回転軸5から
取り外すことができる。
After that, the brush frame 2 is rotated, and the brush frame convex portion 11 shown in FIG. 4 is pulled out along with the cylindrical concave portion 12, so that the brush 1 and the brush frame body 2 can be removed from the rotary shaft 5. it can.

【0019】円筒体3は、ブラシ枠体2から解放される
と、バネ4の復元力によりスラストカラー17に接する
まで持ち上げられる。その状態を図2に示す。
When the cylindrical body 3 is released from the brush frame 2, it is lifted by the restoring force of the spring 4 until it comes into contact with the thrust collar 17. The state is shown in FIG.

【0020】ブラシ1ならびにブラシ枠体2を回転軸5
に装着するときは、図2および図4に示すように、ブラ
シ枠体凸部11を円筒体凹部12に合わせ、バネ4を圧
縮させて、ブラシ枠体2の底部上面18にトルク伝達片
6が当たるまで押し込む。
The brush 1 and the brush frame 2 are attached to the rotary shaft 5.
2 and 4, the brush frame convex portion 11 is aligned with the cylindrical concave portion 12, the spring 4 is compressed, and the torque transmitting piece 6 is attached to the bottom upper surface 18 of the brush frame body 2. Push it in until it hits.

【0021】続いて、ブラシ枠体2を回転させ、ブラシ
枠体凸部11と円筒体凸部13とを係止て、ブラシ枠体
凸部11を円筒体凸部13のテーパ14上を滑らせるこ
とにより、バネ4の抗力に逆らってブラシ枠体2を円筒
体3に引き寄せることができる。
Then, the brush frame 2 is rotated to lock the brush frame convex portion 11 and the cylindrical body convex portion 13 so that the brush frame convex portion 11 slides on the taper 14 of the cylindrical body convex portion 13. By doing so, it is possible to pull the brush frame body 2 toward the cylindrical body 3 against the drag force of the spring 4.

【0022】なお、図示実施例に示すように、円筒体凸
部13にテーパ14を形成し、ブラシ枠体凸部11を前
記テーパ14上を滑らせることにより、バネ4の抗力に
逆らっての円筒体3のブラシ枠体2への引寄せを、小さ
い力でスムーズにおこなわしめることができる。
As shown in the illustrated embodiment, a taper 14 is formed on the cylindrical convex portion 13 and the brush frame convex portion 11 is slid on the taper 14 to counteract the resistance of the spring 4. The pulling of the cylindrical body 3 to the brush frame 2 can be smoothly performed with a small force.

【0023】そして、ブラシ枠体凸部11と円筒体凸部
13との係合後、トルク伝達片6をブラシ枠体のトルク
伝達凹部10に挿入してブラシ枠体2と円筒体3との嵌
合が終了する。
Then, after the brush frame convex portion 11 and the cylindrical body convex portion 13 are engaged, the torque transmission piece 6 is inserted into the torque transmission concave portion 10 of the brush frame body to connect the brush frame body 2 and the cylindrical body 3. The mating is complete.

【0024】なお、ブラシ枠体2を回転させ、ブラシ枠
体凸部11を円筒体凸部13のテーパ14上を滑らせる
に際し、円筒体3が回転軸5上を回転しないように、回
転軸5には溝15を設け、この溝15に円筒体3からピ
ン16を通すようにしている。
When rotating the brush frame 2 and sliding the brush frame convex portion 11 on the taper 14 of the cylindrical convex portion 13, the rotary shaft 5 is prevented from rotating on the rotary shaft 5. A groove 15 is provided in the groove 5, and the pin 16 is inserted from the cylindrical body 3 into the groove 15.

【0025】以上の構成によれば、消耗部品であるブラ
シ1を比較的頻繁に交換すべく、回転軸5側とブラシ枠
体2側とを分割可能な着脱式とした場合であっても、一
旦回転軸5側とブラシ枠体2側とを一体的に取り付けた
場合、回転軸5に取り付けた円筒体3は、バネ4を介し
て持ち上げられてブラシ枠体2を回転軸5に引きつけな
がら保持し、回転軸5にブラシ枠体2が当接した状態で
固定されるため、被洗浄物からの面圧がどのように変化
しても、ブラシ1と回転軸5との嵌合には何等影響はな
い。
According to the above construction, even if the rotating shaft 5 side and the brush frame 2 side are detachable so that the brush 1 which is a consumable part can be replaced relatively frequently, When the rotating shaft 5 side and the brush frame 2 side are once attached integrally, the cylindrical body 3 attached to the rotating shaft 5 is lifted up via the spring 4 to attract the brush frame 2 to the rotating shaft 5. Since the brush frame 2 is held and fixed in a state where the brush frame 2 is in contact with the rotary shaft 5, no matter how the surface pressure from the object to be cleaned changes, the brush 1 and the rotary shaft 5 can be fitted with each other. It has no effect.

【0026】なお、図示実施例において、ブラシ枠体2
は、その底部上面18を介して回転軸5の下端面8と面
接触しているため、ブラシ部の軸心方向への安定性は非
常に良く、被洗浄物に対して横ブレせず、均一な洗浄効
果を得ることができる。
In the illustrated embodiment, the brush frame 2
Is in surface contact with the lower end surface 8 of the rotary shaft 5 via the bottom surface 18 thereof, the stability of the brush in the axial direction is very good, and the brush does not laterally shake against the object to be cleaned. A uniform cleaning effect can be obtained.

【0027】[0027]

【発明の効果】本発明によれば、消耗部品であるディス
クブラシを比較的頻繁に交換すべく、回転軸側とブラシ
枠体側とを分割可能な着脱式とし、ガラス基板等を洗浄
する場合に、ロールブラシ式の洗浄装置のように基板端
部の洗浄に問題がなく、しかも擦り洗浄効果の大きなデ
ィスクブラシ式の洗浄装置を用いた場合に、従来のよう
に、被洗浄物からブラシが受ける反力がバネを圧縮させ
る向きに働いてその反力が大きい場合の問題点、すなわ
ちブラシと回転軸との嵌合が離れるといった危険性をな
くして常に安定した回転力が得られ、しかもその危険性
を回避するのに弾性力のより大きなバネを用いる必要が
なく、すなわち回転軸に対するブラシの交換作業に際
し、バネを圧縮するための操作者の負担が大きくなり、
作業がしにくくなるような弾性力の大きなバネを使用す
ることなく、容易にブラシを交換することができる。
According to the present invention, in order to replace the disc brush which is a consumable part relatively frequently, the rotating shaft side and the brush frame side are detachable so that the glass substrate can be cleaned. In the case of using a disk brush type cleaning device that has no problem in cleaning the substrate end portion like a roll brush type cleaning device and has a large scrubbing cleaning effect, the brush is received from the object to be cleaned as in the conventional case. The problem when the reaction force acts in the direction of compressing the spring and the reaction force is large, that is, there is no risk of the brush and the rotating shaft being disengaged from each other, and a stable rotating force can always be obtained, and that danger It is not necessary to use a spring having a larger elastic force in order to avoid the property, that is, when replacing the brush with respect to the rotating shaft, the burden on the operator for compressing the spring becomes large,
The brush can be easily replaced without using a spring having a large elastic force that makes work difficult.

【0028】以上要するに、本発明によれば、被洗浄物
からの面圧がどのように変化してもブラシと回転軸との
嵌合には影響がなく、しかもブラシ交換作業の容易な洗
浄装置のブラシ着脱機構を得ることができる。
In summary, according to the present invention, no matter how the surface pressure from the object to be cleaned changes, the fitting between the brush and the rotary shaft is not affected, and the brush replacement operation is easy. The brush attaching / detaching mechanism can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る洗浄装置用ブラシ着脱機構の一実
施例を示す使用状態の縦断面図である。
FIG. 1 is a vertical sectional view of a cleaning device brush attaching / detaching mechanism according to an embodiment of the present invention in use.

【図2】図1に示すブラシ着脱機構のブラシ取外し完
了、およびブラシ装着開始時の縦断面図である。
FIG. 2 is a vertical cross-sectional view of the brush attaching / detaching mechanism shown in FIG. 1 when brush removal is completed and when brush attachment is started.

【図3】同じく図1に示すブラシ着脱機構のブラシ取外
し時の縦断面図である。
FIG. 3 is a vertical sectional view of the brush attaching / detaching mechanism shown in FIG. 1 when the brush is removed.

【図4】図1に示すブラシ着脱機構の分解斜視図であ
る。
FIG. 4 is an exploded perspective view of the brush attaching / detaching mechanism shown in FIG.

【符号の説明】[Explanation of symbols]

1…ディスクブラシ、2…ブラシ枠体、3…円筒体、4
…バネ、5…回転軸、6…トルク伝達片、7…バネ4の
円筒体3に与える弾性力、8…回転軸5の下端面、9…
バネ4に抗する力の向き、10…トルク伝達凹部、11
…ブラシ枠体2の凸部、12…円筒体3の凹部、13…
円筒体3の凸部、14…テーパ、15…溝、16…ピ
ン、17…スラストカラー、18…ブラシ枠体2の底部
上面、19…ベアリング。
1 ... Disc brush, 2 ... Brush frame, 3 ... Cylindrical body, 4
... Spring, 5 ... Rotating shaft, 6 ... Torque transmitting piece, 7 ... Elastic force applied to the cylindrical body 3 of the spring 4, 8 ... Lower end surface of the rotating shaft 5, 9 ...
Direction of force against spring 4, 10 ... Torque transmitting recess, 11
... the convex portion of the brush frame 2, 12 ... the concave portion of the cylindrical body 3, 13 ...
Convex portion of cylindrical body 3, 14 ... Taper, 15 ... Groove, 16 ... Pin, 17 ... Thrust collar, 18 ... Bottom surface of brush frame body 2, 19 ... Bearing.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 回転軸側とブラシ枠体側とを着脱自在と
し、ブラシ枠体に取り付けたディスクブラシを被洗浄物
に当接させて擦り洗浄をおこなう洗浄装置において、 別部品とした回転軸側とブラシ枠体側との嵌合時、回転
軸に取り付けた筒状部材が弾性体を介して持ち上げられ
て、ブラシ枠体を回転軸に引きつけながら保持し、回転
軸にブラシ枠体を当接させた状態で固定するよう構成し
たことを特徴とする洗浄装置のブラシ着脱機構。
1. A cleaning device, wherein a rotating shaft side and a brush frame side are detachable, and a disc brush attached to the brush frame body is brought into contact with an object to be cleaned to perform rubbing cleaning, the rotating shaft side being a separate component. When mating with the brush frame body side, the tubular member attached to the rotating shaft is lifted via the elastic body, holds the brush frame body while attracting it to the rotating shaft, and brings the brush frame body into contact with the rotating shaft. A brush attachment / detachment mechanism for a cleaning device, which is configured to be fixed in a closed state.
【請求項2】 回転軸側とブラシ枠体側とを着脱自在と
し、ブラシ枠体に取り付けたディスクブラシを被洗浄物
に当接させて擦り洗浄をおこなう洗浄装置において、 別部品とした回転軸側とブラシ枠体側との嵌合部に、被
洗浄物からの面圧の変化によってもディスクブラシが軸
心方向に上下動しないディスクブラシ上下動固定手段を
備えることを特徴とする洗浄装置のブラシ着脱機構。
2. A cleaning device, wherein a rotary shaft side and a brush frame side are detachable, and a disc brush attached to the brush frame body is brought into contact with an object to be cleaned to perform rubbing cleaning, the rotary shaft side being a separate component. A brush attachment / detachment for a cleaning device, characterized in that a disc brush vertical movement fixing means for preventing the disc brush from moving up and down in the axial direction even when the surface pressure changes from the object to be cleaned is provided in the fitting portion between the brush frame and the brush frame side. mechanism.
【請求項3】 回転軸側とブラシ枠体側とを着脱自在と
し、ブラシ枠体に取り付けたディスクブラシを被洗浄物
に当接させて擦り洗浄をおこなう洗浄装置において、 回転軸の下端寄り外周に、当該回転軸と一体的に回転す
る筒状部材を設けるとともに、前記回転軸と筒状部材と
の間に弾性体を介装し、回転軸の下面には、回転軸側と
ブラシ枠体側との嵌合終了時にブラシ枠体の底面に設け
たトルク伝達凹部と係止するトルク伝達片を設け、他
方、下面にディスクブラシを取り付けたブラシ枠体の上
面には、回転軸側の筒状部材を軸心方向に抜き差し可能
とする穴部を設けるとともに、前記筒状部材にブラシ枠
体を嵌入してこのブラシ枠体を軸心方向と直交方向に回
転した場合に、前記筒状部材の周囲に間欠的に設けた円
筒体凸部と係止するブラシ枠体凸部を間欠的に設け、回
転軸側とブラシ枠体側との嵌合終了時に前記トルク伝達
凹部がトルク伝達片に係止して、回転軸の下端面とブラ
シ枠体の底部上面とを接触させ、ブラシ枠体を回転軸に
引き付ける向きに弾性体の弾性力が働くよう構成したこ
とを特徴とする洗浄装置のブラシ着脱機構。
3. A cleaning device in which a rotary shaft side and a brush frame side are detachable, and a disk brush attached to the brush frame body is brought into contact with an object to be cleaned to perform rubbing cleaning. A cylindrical member that rotates integrally with the rotating shaft is provided, and an elastic body is interposed between the rotating shaft and the cylindrical member, and the lower surface of the rotating shaft has a rotating shaft side and a brush frame side. The torque transmitting piece that engages with the torque transmitting concave portion provided on the bottom surface of the brush frame at the end of fitting is attached to the upper surface of the brush frame with the disk brush attached to the lower surface. Is provided with a hole that allows insertion and removal in the axial direction, and when the brush frame is fitted into the tubular member and the brush frame is rotated in the direction orthogonal to the axial direction, the circumference of the tubular member The block that engages with the cylindrical protrusion that is intermittently provided on the The frame convex portion is provided intermittently, and the torque transmitting concave portion is locked to the torque transmitting piece at the end of the fitting between the rotating shaft side and the brush frame side, and the lower end surface of the rotating shaft and the upper surface of the bottom portion of the brush frame body. A brush attaching / detaching mechanism for a cleaning device, characterized in that the elastic force of the elastic body acts in a direction in which the brush frame is brought into contact with the rotating shaft so as to be attracted to the rotating shaft.
【請求項4】 請求項3において、回転軸の下端面は、
ブラシ枠体の底部上面と面接触している洗浄装置のブラ
シ着脱機構。
4. The lower end surface of the rotating shaft according to claim 3,
A brush attachment / detachment mechanism for a cleaning device that is in surface contact with the upper surface of the bottom of the brush frame.
【請求項5】 請求項3または請求項4において、回転
軸側の筒状部材外周に間欠的に設けた円筒体凸部の上面
に、前記筒状部材にブラシ枠体を嵌入してこのブラシ枠
体を軸心方向と直交方向に回転するに際し、嵌合開始方
向から嵌合終了方向に向けて肉厚が漸増するテーパを形
成した洗浄装置のブラシ着脱機構。
5. The brush according to claim 3, wherein a brush frame is fitted into the tubular member on the upper surface of a cylindrical convex portion provided intermittently on the outer periphery of the tubular member on the rotating shaft side. A brush attaching / detaching mechanism for a cleaning device, wherein a taper is formed such that the wall thickness gradually increases from the fitting start direction to the fitting end direction when the frame body is rotated in a direction orthogonal to the axial direction.
【請求項6】 請求項1〜請求項5のいずれか1項に記
載のブラシ着脱機構を備えた洗浄装置。
6. A cleaning device comprising the brush attaching / detaching mechanism according to claim 1. Description:
JP6020207A 1994-02-17 1994-02-17 Brush attaching and detaching mechanism for washing device Pending JPH07230680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6020207A JPH07230680A (en) 1994-02-17 1994-02-17 Brush attaching and detaching mechanism for washing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6020207A JPH07230680A (en) 1994-02-17 1994-02-17 Brush attaching and detaching mechanism for washing device

Publications (1)

Publication Number Publication Date
JPH07230680A true JPH07230680A (en) 1995-08-29

Family

ID=12020727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6020207A Pending JPH07230680A (en) 1994-02-17 1994-02-17 Brush attaching and detaching mechanism for washing device

Country Status (1)

Country Link
JP (1) JPH07230680A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0959719A1 (en) * 1996-08-29 1999-12-01 Ontrak Systems, Inc. A brush assembly apparatus
CN106378320A (en) * 2016-11-09 2017-02-08 安徽千禧精密轴承制造有限公司 Bearing inner ring cleaning device
CN106670149A (en) * 2016-12-23 2017-05-17 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Cleaning brush driving shaft structure of chemical mechanical polishing (CMP) post cleaning equipment and using method
CN106733792A (en) * 2016-12-12 2017-05-31 北京中电科电子装备有限公司 A kind of cleaning device for semiconductor grinding station

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0959719A1 (en) * 1996-08-29 1999-12-01 Ontrak Systems, Inc. A brush assembly apparatus
EP0959719A4 (en) * 1996-08-29 2006-01-11 Lam Res Corp A brush assembly apparatus
CN106378320A (en) * 2016-11-09 2017-02-08 安徽千禧精密轴承制造有限公司 Bearing inner ring cleaning device
CN106733792A (en) * 2016-12-12 2017-05-31 北京中电科电子装备有限公司 A kind of cleaning device for semiconductor grinding station
CN106670149A (en) * 2016-12-23 2017-05-17 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Cleaning brush driving shaft structure of chemical mechanical polishing (CMP) post cleaning equipment and using method
CN106670149B (en) * 2016-12-23 2019-05-17 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Cleaning equipment cleaning brush driving axle construction and application method after CMP

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