JPH07227634A - Cold plate and its manufacture - Google Patents

Abstract

PURPOSE:To reduce a heat transferring resistance of a closely adhered part by inserting a U-shaped pipe or a straight pipe into a through-hole arranged in a plate and make the outer periphery of the pipe surely adhere to the inner wall of the through-hole. CONSTITUTION:The pipe 3 composed of good thermal conductivity material is embedded into the plate 1 composed of good thermal conductivity material and having a prescribed width L to form a cold plate. The pipe 3 is formed to the U-shape having the straight line part 3A and also, the through-holes 2 are arranged to both side end surfaces 1A of the plate 1 and the outer periphery 3C of the straight line part 3A is fixed to the through-hole 2. The fixing is executed by pressing a rod member 10 having larger diameter D than the inner diameter d1 of the straight line part 3A into the inner periphery 3B of the straight line part 3A and making the outer periphery 3C of the straight line part 3A closely adhere to the inner wall 2A of the through-hole 2 to execute the tube-expanding work.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cold plate formed by embedding a pipe made of a metal having a good thermal conductivity in a plate made of a metal having a good thermal conductivity, and a manufacturing method thereof.

In recent years, with the miniaturization and speeding up of electronic components such as semiconductor elements, high density packaging has been achieved, and cold water has been used to ensure stable operation of electronic equipment on which these electronic components are mounted. It has come to be forcibly cooled by such a refrigerant.

As shown in the schematic cooling diagram of the electronic device of FIG. 6, for example, the electronic device 20 is an electronic component 21 such as a semiconductor element.
Is mounted on a printed circuit board 22 and is covered with a cover 23.
Is formed so as to be in close contact with a predetermined surface of the heat radiation plate 24.

The cold plate 25 has a supply port 25A for supplying a coolant 27 such as cold water as shown by an arrow F1 by the arrangement of a pipe 26, and a coolant 27 circulated in the cold plate 25.
Discharge port that discharges as shown by arrow F2 by installing pipe 26
25B is provided.

Therefore, the electronic device 20 is cooled by circulating the coolant 27 through the cold plate 25. Therefore, such a cold plate is formed so as to cool the electronic device with a predetermined cooling efficiency by circulating the refrigerant.

[0006]

2. Description of the Related Art Conventionally, the structure was formed as shown in the conventional explanatory view of FIG. 5 (a) is a plan view, and FIG. 5 (b) is AA of (a).
Sectional view, (c) is a perspective view.

As shown in FIGS. 5 (a) and 5 (b), a flow path meandering between a supply port 32 provided in a plate 30 and an exhaust port 33.
31 was configured to be formed. Also plate
30 is formed by stacking a first plate member 30A and a second plate member 30B, which are made of a metal having a good heat-conducting material such as copper, aluminum or stainless, and fixing them to each other.
A groove 34 is provided in each of the first and second plate members 30A and 30B, and a flow path 31 is formed by superimposing the first and second plate members 30A and 30B.

Therefore, the above-mentioned pipe 26 is connected to the supply port 32 and the exhaust port 33, the refrigerant 27 is supplied from the supply port 32, and the exhaust port
The refrigerant 27 is circulated in the flow path 31 by being discharged from 33, and the plate 30 is cooled.

In the case of FIG. 5 (c), a groove 35A is formed in the first plate 35 made of a metal having a good heat-conducting material such as copper, aluminum or stainless steel, and a good heat-transmitting material such as copper, aluminum or stainless steel is formed. A groove 36A is provided in each of the second plates 36 made of a conductive metal, and the first and second plates 35, 36 are superposed on each other to form a U made of a metal having a good thermal conductivity such as copper, aluminum or stainless steel. Shape pipe 37 groove 35
It is formed so as to be sandwiched by A and 36.

The overlapping of the first and second plates 35 and 36 is such that the screw hole 35B formed in the first plate 35 is formed.
And a mounting hole 36B formed in the second plate 36 by screwing a bolt,
Bases 38 are provided on both ends of the.

Therefore, the aforementioned pipe 26 is connected to the base 38,
The coolant 27 is supplied from one of the ferrules 38 and discharged from the other ferrule 38, and the coolant 27 circulates in the pipe 37 to cool the first and second plates 35, 36.

[0012]

However, by forming the flow path 31 in the plate 30, the first and second plate members 30A, 30B are formed.
Since it is necessary to form the groove 34 in each of them, it becomes expensive.

Further, by sandwiching the pipe 37 by overlapping the first and second plates 35 and 36, a gap is likely to be formed between the contact surfaces of the first and second plates 35 and 36 and the pipe 37, The heat transfer resistance at the contact surface reduces the cooling capacity.

Therefore, the former configuration shown in FIG. 5 (a) has a problem of being expensive, and the latter configuration shown in FIG. 5 (c) has a problem of lowering cooling efficiency. . Therefore, it is an object of the present invention to reduce the cost by rationalizing the manufacturing and to improve the cooling efficiency.

[0015]

FIG. 1 is an explanatory view of the principle of the first invention, and FIG. 2 is an explanatory view of the principle of the second invention.

As shown in FIG. 1, a plate 1 having a predetermined width L made of a good heat conductive material and a pipe 3 made of a good heat conductive material are provided, and the pipe 3 is a cold plate embedded in the plate 1. And the pipe 3 has a straight portion 3A.
Both sides of the plate 1 are formed in U shape
1A is provided with a through hole 2 penetrating in the width direction so that the outer periphery 3C of the straight line portion 3A is fixed to the through hole 2, and as shown in FIG. Plate 1 and
Straight pipe 4 made of good heat conductive material and bent pipe
5 is a cold plate in which the straight pipe 4 connected to the bent pipe 5 is embedded in the plate 1, and the straight pipe 4 and the bent pipe
5 is formed so that the connection with 5 meanders, and through holes 2 penetrating in the width direction are provided in both end faces 1A of the plate 1,
The outer periphery 4A of the straight pipe 4 is fixed to the through hole 2, and the good thermal conductive material is a metal material of copper, aluminum or stainless, and the straight portion 3A After the straight part 3A is inserted into the through hole 2, the rod member 10 having a diameter D, which is larger than the inner diameter d1 of the straight part 3A, is press-fitted into the inner circumference 3B of the straight part 3A. 2, so that the outer circumference 3C of the straight portion 3A is closely adhered to the inner wall 2A of the pipe 2, and the straight pipe 4 is fixed after the straight pipe 4 is inserted into the through hole 2. Diameter D that is larger than the inner diameter d2 of
The rod member 10 of is press-fitted into the inner circumference 4B of the straight pipe 4,
The inner wall 2A of the through hole 2 is manufactured so that the outer periphery 4A of the straight pipe 4 is closely attached to the inner wall 2A.

The above-mentioned problems can be solved by the above structure and manufacturing.

[0018]

[Function] That is, a through hole 2 is provided in a plate 1 made of a metal of good heat conduction material, a U-shaped pipe 3 or a straight pipe 4 is inserted into the through hole 2, and a pipe is formed on the inner wall 2A of the through hole 2.
The outer circumference 3C of 3 and the outer circumference 4A of the straight pipe 4 are fixed to each other.

Further, by fixing the outer circumference 3C of the pipe 3 or the outer circumference 4A of the straight pipe 4 to the inner wall 2A of the through hole 2 respectively, the pipe 3 or the straight pipe 4 may be inserted into the through hole 2 and then the pipe 3 The rod member 10 is press-fitted into the inner circumference 3B of 3 or the inner circumference 4B of the straight pipe 4 so as to be expanded.

When fixed by such a pipe expanding process,
The number of constituent parts can be reduced, and moreover, the outer circumference 3C or 4A can be surely brought into close contact with the inner wall 2A of the through hole 2, and the heat transfer resistance can be reduced to improve the cooling efficiency.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to FIGS. FIG. 3 is an explanatory view of an embodiment according to the first invention,
(a) is a perspective view, (b1) to (b3) are explanatory views of the manufacturing process, FIG. 4 is an explanatory view of an embodiment according to the second aspect of the present invention, (a) is a perspective view, and (b1) to (b1) b3) is an explanatory view of the manufacturing process. Throughout the drawings, the same reference numerals denote the same objects.

According to the present invention, as shown in FIG.
A through hole 2 is formed in both end surfaces 1A of a plate 1 with a thickness T and width L made of a metal of good heat conducting material such as aluminum or stainless steel, and the through hole 2 has good heat resistance of copper, aluminum or stainless steel. Insert the U-shaped pipe 3 made of conductive metal, and insert the outer periphery 3C of the straight part 3A of the pipe 3 into the through hole.
The pipe 3 is formed so as to be embedded in the plate 1 so as to be fixed to the inner wall 2A of the pipe 2.

Further, at both ends of the pipe 3, the pipes 26 are provided with connection ports 6 through which the refrigerant 27 is circulated in the pipe 3. Therefore, the plate 1 is cooled by the circulation of the coolant 27 in the pipe 3, and the electronic device 20 can be cooled by the plate 1.

In such a configuration, the pipe 3 and the through hole 2
If it is not firmly adhered to the pipe 3, the heat transfer resistance generated between the pipe 3 and the through hole 2 becomes large, and the refrigerant of a predetermined temperature 27
Even if it is circulated, the cooling capacity of the plate 1 will actually decrease.

Therefore, when the pipe 3 is embedded in the plate 1, first, as shown in (b1) of FIG.
A through hole 2 is formed in the through hole 2, and the straight portion 3A of the U-shaped pipe 3 is inserted into the through hole 2 as shown by an arrow B. Next, as shown in FIG.
As shown in 2), the rod member 10 is press-fitted along the inner circumference 3B of the pipe 3 as indicated by arrow C. In this case, the diameter D of the tip of the rod member 10 is formed slightly larger than the diameter d1 of the inner circumference 3B, and the pipe member 10 is expanded by press fitting it into the inner circumference 3B, and the outer circumference 3C of the straight portion 3A of the pipe 3 is subjected. To the inner wall 2A of the through hole 2. Finally, as shown in (b3) of FIG. 3, connection ports 6 are formed at both ends of the U-shaped pipe 3 so as to be connected to the pipe 26.

Actually, the thickness T is 15 m due to the aluminum material.
m, 9.70 mm in diameter for plate 1 with width L of 100 mm
Through hole 2 is made, and the outer diameter is 9.52 mm and the inner diameter is d1 depending on the copper material.
Insert pipe 3 formed into 8.00, outer diameter D is 8.20mm
By expanding the pipe 3 by press-fitting the rod member 10 into the inner circumference 3B of the pipe 3, the outer circumference 3C of the straight part 3A and the inner wall 2A of the through-hole 2 are adhered by X-ray fluoroscopy. As a result of observing the properties, it was confirmed that the outer circumference 3C and the inner wall 2A were in good contact with each other without forming a gap.

Further, when the thickness T of the plate 1 is formed to be 10, 12, 13 mm, the pipe 3 having an outer diameter of 8.00 mm and an inner diameter d1 of 6.40 mm is inserted into the through hole 2 having a diameter of 8.10 mm, and the rod member 10 The outer diameter D of
It was confirmed that good adhesion can be obtained even when the pipe expanding process is performed under the condition of 6.55 mm as described above.

Further, in the case of FIG. 4 (a), the thickness T and the width L are made of a metal of a good heat conductive material such as copper, aluminum or stainless steel.
Through-holes that penetrate the width direction on both end faces 1A of plate 1
2 and insert a straight pipe 4 made of a metal of good heat conductive material such as copper, aluminum or stainless into the through hole 2, and the outer circumference 4A of the straight pipe 4 is fixed to the inner wall 2A of the through hole 2, The straight pipes 4 are arranged in parallel at a predetermined interval so as to be embedded in the plate 1 and the bent pipes 5 are connected between the straight pipes 4.

Further, the above-mentioned piping 26 is provided at one end of the straight pipes 4 located at both ends of the arranged straight pipes 4.
A connection port 6 for connecting the straight pipe 4 is provided, and the other end of the straight pipe 4 located at both ends of the arranged straight pipe 4 and
A connecting port 7 to which the bent pipe 5 is connected is provided between one end of the straight pipe 4 in the middle and the other end of the straight pipe 4 in the middle.
The bent pipes 5 are formed to be connected to each other via.

Therefore, the plate 1 is formed with a flow path in which the refrigerant 27 is circulated so as to meander by the straight pipe 4 and the bent pipe 5, and the refrigerant is passed through the pipe 26.
By supplying and discharging 27, the plate 1 is cooled, and the electronic device 20 is cooled by the plate 1.

The fixation of the straight pipe 4 in this case is as follows.
As shown in (b1) of FIG. 4, first, the through hole 2 is formed in the plate 1.
The straight pipe 4 is inserted into the through hole 2 as shown by arrow B. Next, as shown in (b2) of FIG. 4, the rod member 10 is press-fitted along the inner circumference 4B of the straight pipe 4 as indicated by an arrow C. In this case, the diameter D of the tip of the rod member 10 is formed slightly larger than the diameter d2 of the inner circumference 4B, and the pipe member 10 is expanded by press-fitting it into the inner circumference 4B, and the outer circumference 4A of the straight pipe 4 is penetrated into a through hole. Attach it to the inner wall 2A of 2. Finally, as shown in (b3) of FIG. 4, a connection port 6 is formed at one end of the straight pipes 4 located at both ends of the arranged straight pipes 4 so that the connection with the pipe 26 is performed. In addition, a connecting port 7 is formed at the other end of the straight pipe 4 located at both ends of the arranged straight pipes 4 and at one end and the other end of the straight pipe 4 located in the middle. The bent pipe 5 is connected to the straight pipe 4, and the straight pipe 4 and the bent pipe 5 are connected to each other.

Also in this case, the plate 1 made of an aluminum material with a thickness T of 15 mm and a width L of 100 mm is used as described above.
A through hole 2 with a diameter of 9.70 mm is provided on the outside, and the outer diameter is 9.
Insert a straight pipe 4 with a diameter of 52 mm and an inner diameter d1 of 8.00 and press-fit a rod member 10 with an outer diameter D of 8.20 mm into the inner circumference 4B to expand the straight pipe 4 and perform X-ray fluoroscopy after pipe expansion. Depending on the outer circumference 4A of straight pipe 4,
When the adhesion with the inner wall 2A of the through hole 2 was observed, the outer circumference 4A,
It was confirmed that the inner wall 2A and the inner wall 2A were in good contact with each other without forming a gap.

Further, when the thickness T of the plate 1 is formed to be 10, 12, 13 mm, a straight pipe 4 having an outer diameter of 8.00 mm and an inner diameter d1 of 6.40 mm is inserted into the through hole 2 having a diameter of 8.10 mm to form a rod member. Ten
It was confirmed that good adhesion can be obtained even when the pipe expansion processing is performed in the same manner as described above under the condition that the outer diameter D of 6.55 mm.

Therefore, in either of the configurations shown in FIGS. 3 and 4, a through hole is formed in the plate, a U-shaped pipe or a straight pipe is inserted into the through hole, and the pipe is expanded.
Since it is formed by fixing the U-shaped pipe or straight pipe to the inner wall of the through hole, the number of components is small and it can be manufactured at low cost. Furthermore, the outer periphery of the U-shaped pipe or straight pipe is the inner wall of the through hole. The heat transfer resistance is reduced and the cooling efficiency can be improved by firmly adhering to.

[0035]

As described above, according to the present invention,
By inserting a U-shaped pipe or straight pipe into the through hole provided in the plate and making sure that the outer periphery of the U-shaped pipe or straight pipe is closely adhered to the inner wall of the through hole by expansion processing, there are few components Moreover, the heat transfer resistance of the contact portion can be reduced.

Therefore, compared with the conventional case, the cost can be reduced and the cooling efficiency can be improved, and the practical effect is great.

[Brief description of drawings]

FIG. 1 is an explanatory view of the principle of the first invention.

FIG. 2 is an explanatory view of the principle of the second invention.

FIG. 3 is an explanatory diagram of an embodiment according to the first invention.

FIG. 4 is an explanatory diagram of an embodiment according to the second invention.

FIG. 5 is a conventional explanatory diagram.

[Fig. 6] Schematic diagram of cooling of electronic devices

[Explanation of symbols]

 1 plate 2 through hole 3 pipe 4 straight pipe 5 bent pipe 1A side end face 2A inner wall 3A straight part 3B, 4B inner circumference 3C, 4A outer circumference

Claims (5)

[Claims] 1. A plate (1) having a predetermined width (L) made of a good heat conducting material and a pipe (3) made of a good heat conducting material, wherein the pipe (3) is embedded in the plate (1). In the cold plate, the pipe (3) is formed in a U shape having a straight portion (3A), and both end faces (1A) of the plate (1) have a through hole (2 ) Is provided, and the outer periphery (3C) of the linear portion (3A) is fixed to the through hole (2). 2. A plate (1) having a predetermined width (L) made of a good heat conducting material and a straight pipe (4) made of a good heat conducting material.
And a bent pipe (5), wherein the straight pipe (4) connected to the bent pipe (5) is a cold plate embedded in the plate (1), and the straight pipe (4) The plate is formed so that the connection with the bent pipe (5) is meandering and
A through hole (2) penetrating in the width direction is provided on both end faces (1A) of (1), and an outer periphery (4A) of the straight pipe (4) is formed in the through hole (2).
Cold plate characterized by sticking to. 3. The cold plate according to claim 1 or 2, wherein the good heat conductive material is a metal material of copper, aluminum or stainless steel. 4. The straight part (3A) according to claim 1, wherein the straight part (3A) is fixed after the straight part (3A) is inserted into the through hole (2).
A rod member (10) having a diameter (D) larger than the inner diameter (d1) of (3A) is press-fitted into the inner circumference (3B) of the straight portion (3A), and the inner wall (2) of the through hole (2) is
A method for manufacturing a cold plate, which is carried out by a pipe expanding process in which the outer periphery (3C) of the linear portion (3A) is closely attached to (A). 5. The straight pipe according to claim 2.
(4) is fixed to the straight pipe (4) through the through hole (2)
And then insert a rod member (10) having a diameter (D) larger than the inner diameter (d2) of the straight pipe (4) into the straight pipe (4).
(4) Cold-pressed into the inner circumference (4B) of the through hole (2) and the outer wall (4A) of the straight pipe (4) is closely attached to the inner wall (2A) Plate manufacturing method.