JPH0722123B2 - Photovoltaic device manufacturing method - Google Patents

Description

Description: FIELD OF THE INVENTION The present invention relates to a method for manufacturing a photovoltaic device having a silicon-containing deposited film as a semiconductor film, and more particularly to an amorphous or polycrystalline form used for the photovoltaic device. And a non-single crystalline silicon-containing deposited film as a semiconductor film.

[Prior art]

For example, for forming an amorphous silicon film, a vacuum deposition method, a plasma CVD method, a CVD method, a reactive sputtering method,
The ion plating method, the photo CVD method, etc. have been tried, and generally, the plasma CVD method is widely used and commercialized.

In addition, the deposited film made of amorphous silicon has electrical and optical characteristics, fatigue characteristics after repeated use or use environment characteristics, and further productivity including uniformity and reproducibility.
In terms of mass productivity, there is room for further improvement in overall characteristics.

The reaction process in forming an amorphous silicon deposited film by the plasma CVD method, which has been generally generalized, is
It was much more complicated than the conventional CVD method, and its reaction mechanism was not clear. There are also many parameters for forming the deposited film (eg, substrate temperature, flow rate and ratio of introduced gas, pressure during formation, high frequency power, electrode structure, structure of reaction vessel, exhaust rate, plasma generation method, etc.) Due to the combination of the parameters of (1), the plasma sometimes became unstable, and the deposited film formed was adversely affected. In addition, the device-specific parameters must be selected for each device, and thus it is difficult to generalize the manufacturing conditions. On the other hand, in order to develop an amorphous silicon film having electrical, optical, photoconductive or mechanical properties that can sufficiently satisfy each application, it is currently best formed by the plasma CVD method. ing.

However, depending on the application of the deposited film, it is necessary to achieve a large area, uniform film thickness, uniform film quality, and mass production with reproducibility by high-speed film formation.
In forming an amorphous silicon deposited film by the plasma CVD method, a large amount of capital investment is required for mass production equipment, the management items for mass production are complicated, the management allowable range is narrow, and the equipment adjustment is delicate. Therefore, these are pointed out as problems to be improved in the future. On the other hand, in the conventional technique using the ordinary CVD method, a high temperature is required, and a deposited film having practical properties has not been obtained.

As described above, in forming an amorphous silicon film, it has been earnestly desired to develop a forming method which can be mass-produced by a low-cost device while maintaining its practicable characteristics and uniformity. The same applies to other functional films such as a silicon nitride film, a silicon carbide film, and a silicon oxide film.

The present invention provides a method for manufacturing a photovoltaic device using a novel deposition film formation method that does not rely on the conventional formation method, while eliminating the above-mentioned drawbacks of the plasma CVD method.

[Object and Summary of Invention]

The object of the present invention is to improve the characteristics of the film to be formed, the film forming speed, the reproducibility, and to make the film quality uniform, and is suitable for a large area of the film, and it is easy to improve the productivity of the film and mass-produce it. Another object of the present invention is to provide a method of manufacturing a photovoltaic device that can achieve the above.

Another object of the present invention is to provide a method for manufacturing a photovoltaic device having an excellent photovoltaic effect and high conversion efficiency.

The above-mentioned object is a method for manufacturing a photovoltaic device having a pair of electrodes and a semiconductor film provided between the electrodes, wherein the semiconductor film is an unactivated silicon compound as a raw material for forming a deposited film. A space for forming a film containing carbon and a halogen-containing compound, which is generated by decomposing the carbon- and halogen-containing compound into heated solid carbon particles, and the silicon compound and the active species that chemically interact with each other. Provided is a method for manufacturing a photovoltaic element, which is characterized in that it is formed into a deposited film obtained by introducing into the inside, and causing discharge energy to act on these to excite the silicon compound and chemically react.

[Embodiment]

In the method of the present invention, discharge energy such as plasma is used as the energy for exciting and reacting the raw material for forming the deposited film. However, since active species are introduced into the film formation space as one of the raw materials, compared with the conventional method. It is possible to form a film even with a low discharge energy, and the deposited film that is formed is not substantially adversely affected by an etching action or other abnormal discharge action.

Further, according to the present invention, a more stable CVD method can be realized by arbitrarily controlling the atmospheric temperature of the film forming space and the substrate temperature as desired.

If desired, light energy and / or heat energy can be used in combination with the discharge energy.
The light energy can be applied to the whole period using an appropriate optical system, or can be applied selectively and controlled to only a desired portion, so that the formation position and film thickness of the deposited film on the substrate can be increased. Etc. can be easily controlled. Further, as the heat energy, heat energy converted from light energy can also be used.

One of the differences between the method of the present invention and the conventional CVD method is a space different from the film formation space in advance (hereinafter referred to as a decomposition space).
Is to use activated species activated in. As a result, it is possible to dramatically increase the film formation rate compared to the conventional CVD method, and it is possible to further lower the substrate temperature during the formation of the deposited film. Membranes can be provided industrially in large quantities and at low cost.

Incidentally, the active species in the present invention, by causing a chemical interaction with the compound of the deposited film forming raw material or its excited decomposition product, for example to impart energy, or to cause a chemical reaction, It refers to one having an action of promoting the formation of a deposited film.
Therefore, the active species may or may not include a component that constitutes the deposited film to be formed.

In the present invention, the active species from the decomposition space introduced into the film formation space has a life of 5 seconds or longer, more preferably 15 seconds or longer, and most preferably 30 seconds or longer, from the viewpoints of productivity and ease of handling. Those are selected and used according to desire.

The silicon compound used as the raw material for forming a deposited film used in the present invention is preferably in a gas state before being introduced into the film formation space, or is preferably introduced in a gas state. For example, when a liquid compound is used, an appropriate vaporizer can be connected to the compound supply source to vaporize the compound, and then the compound can be introduced into the film formation space. As the silicon compound, silanes and siloxanes in which hydrogen, oxygen, halogen, or a hydrocarbon group is bonded to silicon can be used. Especially chain and cyclic silane compounds,
A compound in which a part or all of the hydrogen atoms of the chain or cyclic silane compound is replaced with a halogen atom is suitable.

Specifically, for example, SiH ₄ , Si ₂ H ₆ , Si ₃ H ₈ , Si ₄ H ₁₀ , Si
SipH ₂ p ₊₂ (p is 1 or more, preferably 1 to ₅₎ such as ₅ H ₁₂ and Si ₆ H ₁₄ .
It is an integer of 15, more preferably 1-10. ) Linear silane compound, SiH ₃ SiH (SiH ₃ ) SiH ₃ , SiH ₃ SiH
(SiH ₃ ) Si ₃ H ₇ , Si ₂ H ₅ SiH (SiH ₃ ) Si ₂ H ₅ etc.SipH ₂ p
A branched chain silane compound represented by ₊₂ (p has the above-mentioned meaning), and a part or all of hydrogen atoms of these linear or branched chain silane compounds are substituted with halogen atoms. Compound, Si ₃ H ₆ , Si ₄ H ₈ , Si ₅ H ₁₀ , Si ₆ H ₁₂
Such as SiqH ₂ q (q is 3 or more, preferably an integer of 3 to 6), some or all of the hydrogen atoms of the cyclic silane compound are replaced with other cyclic silanyl groups, and / or A compound substituted with a cyclic silanyl group, as an example of a compound in which some or all of the hydrogen atoms of the silane compounds exemplified above are substituted with halogen atoms, SiH ₃ F, SiH ₃ Cl, SiH ₃ B
SirHsXt such as r and SiH ₃ I (X is a halogen atom, r is 1 or more, preferably 1 to 10, more preferably an integer of 3 to 7, s
+ T = 2r + 2 or 2r. And a halogen-substituted chain or cyclic silane compound represented by the formula (1). These compounds may be used alone or in combination of two or more.

In the present invention, as the compound containing carbon and halogen introduced into the decomposition space, for example, a compound in which a part or all of hydrogen atoms of a chain or cyclic hydrocarbon is substituted with a halogen atom is used, and specifically, For example, CuY ₂ u ₊₂ (u is 1
The above integer Y is F, Cl, Br or I. ) A chain carbon halide represented by CvY ₂ v (v is an integer of 3 or more, Y
Has the aforementioned meaning. ), A cyclic carbon halide represented by CuHxYy (u and Y have the above-mentioned meanings. X + y =
2u or 2u + 2. ) And a chain or cyclic compound.

Specifically, for example, CF ₄ , (CF ₂ ) ₅ , (CF ₂ ) ₆ , (CF ₂ )
₄ , C ₂ F ₆ , C ₃ F ₈ , CHF ₃ , CH ₂ F ₂ , CCl ₄ (CCl ₂ ) ₅ , CB
Examples include r ₄ , (CBr ₂ ) ₅ , C ₂ Cl ₆ , and C ₂ Cl ₃ F _{3, which} are in a gas state or can be easily gasified.

Further, in the present invention, in addition to the active species produced by decomposing the compound containing carbon and halogen, the active species produced by decomposing the compound containing silicon and halogen can be used in combination. As the compound containing silicon and halogen, for example, a compound in which a part or all of hydrogen atoms of a chain or cyclic silane compound is substituted with a halogen atom is used, and specifically, for example, SixZ ₂ v
₊₂ (v is an integer of 1 or more, Z is F, Cl, Br, or I), a chain silicon halide, SivZ ₂ v (v is an integer of 3 or more, and Z has the above-mentioned meaning. .) And a chain or cyclic compound represented by SivHxZy (v and Y have the above-mentioned meanings, and x + y = 2v or 2v + 2).

Specifically, for example, SiF ₄ , (SiF ₂ ) ₅ , (SiF ₂ ) ₆ , (SiF
F ₂ ) ₄ , Si ₂ F ₆ , Si ₃ F ₈ , SiHF ₃ , SiH ₂ F ₂ , SiCl ₄ (SiC
l ₂ ) ₅ , SiBr ₄ , (SiBr ₂ ) ₅ , Si ₂ Cl ₆ , Si ₂ Cl ₃ F _{3 and the} like in a gas state or easily gasifiable.

In order to generate the active species, in addition to the compound containing carbon and halogen (and the compound containing silicon and halogen), other silicon compounds such as silicon simple substance, hydrogen, and halogen compounds (for example, F ₂ gas) may be added if necessary. , Cl ₂ gas, gasified Br ₂ , I ₂ etc.) can be used together.

In the present invention, as a method for generating active species in the decomposition space, discharge energy in consideration of each condition and device,
Excitation energy such as heat energy or light energy is used.

Active species are generated by adding decomposition energy such as heat, light, and discharge in the decomposition space to the above.

In the present invention, the ratio of the amount of the silicon compound as the raw material for forming the deposited film in the film forming space and the active species from the decomposition space is appropriately determined according to the desired conditions such as the deposition conditions and the type of the active species, but is preferably 10 : 1 to 1:10 (introduction flow rate ratio) is suitable, and more preferably 8: 2 to 4: 6.

In the present invention, in addition to silicon compounds, hydrogen gas as a raw material for film formation, halogen compounds (for example, F ₂ gas, Cl
It is also possible to introduce _two gases, gasified Br ₂ , I ₂ etc.), an inert gas such as argon or neon into the film forming space and use them. When a plurality of these source gases are used, they can be mixed in advance and introduced into the film formation space, or these source gases can be individually supplied from independent supply sources to the film formation space. It can also be introduced.

It is also possible to dope the deposited film formed by the method of the present invention with an impurity element. Preferable examples of the impurity element to be used include p-type impurities such as elements of Group III A of the periodic table, such as B, Al, Ga, In and Tl, and n-type impurities include those of the periodic table. Group V element A,
For example, N, P, As, Sb, Bi and the like can be mentioned as preferable ones, but B, Ga, P, Sb and the like are most suitable. The amount of impurities to be doped is appropriately determined according to desired electrical / optical characteristics.

As the compound containing such an impurity element as a component, it is preferable to select a compound which is in a gas state at room temperature and atmospheric pressure, or is a gas at least under the conditions for forming a deposited film, and which can be easily vaporized by an appropriate vaporizer. . Examples of such _{compounds, PH 3, P 2 H 4} , PF 3, PF 5, PCl 3, AsH 3, AsF 3, A
sF ₅ , AsCl ₃ , SbH ₃ , SbF ₅ , SiH ₃ , BF ₃ , BCl ₃ , BBr ₃ , B ₂ H
₆ , B ₄ H ₁₀ , B ₅ H ₉ , B ₅ H ₁₁ , B ₆ H ₁₀ , B ₆ H ₁₂ , AlCl _{3 and the} like. The compound containing an impurity element may be used alone or in combination of two or more.

To introduce a compound containing an impurity element as a component into the film formation space, the compound is introduced in advance by mixing with the silicon compound or the like, or these raw material gases are individually introduced from a plurality of independent gas supply sources. be able to.

Next, the present invention will be described by taking an example of an electrophotographic image forming member as a reference example of a method of forming a deposited film used in the method of the present invention.

FIG. 1 is a schematic diagram for explaining a configuration example of a photoconductive member given as a reference example.

The photoconductive member 10 shown in FIG. 1 can be applied as an image forming member for electrophotography, and includes an intermediate layer 12 optionally provided on a support 11 for a photoconductive member, and The photosensitive layer 13 has a layer structure.

The support 11 may be conductive or electrically insulating. Examples of the conductive support include metals such as NiCr, stainless steel, Al, Cr, Mo, Au, Ir, Nb, Ta, V, Ti, Pt, and Pd, and alloys thereof.

As the electrically insulating support, a film or sheet of synthetic resin such as polyester, polyethylene, polycarbonate, cellulose acetate, polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene or polyamide, glass, ceramic, paper or the like is usually used. . It is preferable that at least one surface of these electrically insulating supports is subjected to a conductive treatment, and another layer is provided on the surface side subjected to the conductive treatment.

For example, if it is glass, its surface is NiCr, Al, Cr, Mo,
Au, Ir, Nb, Ta, V, Ti, Pt, Pd, In ₂ O ₃ , SnO ₂ , ITO
NiCr, Al, Ag, Pb, Zn, Ni, Au, Cr, in the case of conducting treatment by providing a thin film of (In ₂ O ₃ + SnO ₂ ) or synthetic resin film such as polyester film,
The surface of the metal is subjected to conductive treatment by treatment with a metal such as Mo, Ir, Mb, Ta, V, Ti, Pt by vacuum vapor deposition, electron beam vapor deposition, sputtering or the like, or by laminating treatment with the metal. The shape of the support may be any shape such as a cylindrical shape, a belt shape, a plate shape, and the shape is determined as desired. For example, the photoconductive member 10 shown in FIG. If used as a member, in the case of continuous high-speed copying, it is desirable to have an endless belt shape or a cylindrical shape.

For example, the intermediate layer 12 effectively blocks the inflow of carriers from the support 11 side into the photosensitive layer 13 and is generated in the photosensitive layer 13 by the irradiation of electromagnetic waves, and moves toward the support 11 side. It has a function of allowing the photocarrier to easily pass from the photosensitive layer 13 side to the support 11 side.

The intermediate layer 12 is made of amorphous silicon containing hydrogen atoms (H) and / or halogen atoms (X) (hereinafter a-
It is written as Si (H, X). ), And contains a p-type impurity such as B or a p-type impurity such as P as a substance that controls electrical conductivity.

In the present invention, the content of the substances that control conductivity such as B and P contained in the intermediate layer 12 is preferably 0.001
~ 5 x 10 ⁴ atomic ppm, more preferably 0.5 to 1 x 10 ⁴ atom
ic ppm, optimally 1 to 5 × 10 ³ atomic ppm is desirable.

When the intermediate layer 12 is formed, the formation of the photosensitive layer 13 can be continuously performed. In that case, as a raw material for forming the intermediate layer, the active species generated in the decomposition space, a silicon compound in a gaseous state, and if necessary, a compound containing hydrogen, a halogen compound, an inert gas and an impurity element as a component The intermediate layer 12 may be formed on the support 11 by introducing gas and the like separately into the film formation space in which the support 11 is installed and using discharge energy.

The compound containing carbon and halogen that is introduced into the decomposition space to form the active species when the intermediate layer 12 is formed easily forms the active species such as CF ₂ ^* at high temperature.

The layer thickness of the intermediate layer 12 is preferably 30Å to 10µ, more preferably 40Å to 8µ, and most preferably 50Å to 5µ.

The photosensitive layer 13 is made of, for example, A-Si (H, X), and has both a charge generating function of generating photocarriers by irradiation of laser light and a charge transporting function of transporting the charges.

The thickness of the photosensitive layer 13 is preferably 1 to 100 μ, more preferably 1 to 80 μ, and most preferably 2 to 50 μ.

The photosensitive layer 13 is an i-type a-Si (H, X) layer, but has a polarity (for example, n-type) different from the polarity of the substance that governs the conductivity properties contained in the intermediate layer 12, if desired. May be contained in the intermediate layer 12, or, if the actual amount contained in the intermediate layer 12 is large, the substance that controls the conductive properties of the same polarity should be made much smaller than that amount. It may be contained.

In the formation of the photosensitive layer 13, as in the case of the intermediate layer 12, a compound containing carbon and halogen is introduced into the decomposition space, and active species are generated by decomposing these at high temperature and introduced into the film formation space. To be done. Separately from this, a silicon compound in a gas state and, if necessary, hydrogen, a halogen compound, an inert gas, a gas of a compound containing an impurity element as a component, and the like are formed on the support 11 to form a film. The intermediate layer 12 may be formed on the support 11 by introducing it into a space and using discharge energy.

FIG. 2 is a schematic diagram showing a PIN diode debye (photovoltaic device) type example using an a-Si deposited film doped with an impurity element manufactured by carrying out the method of the present invention.

In the figure, 21 is a substrate, 22 and 27 are thin film electrodes, 23 is a semiconductor film, and an n-type a-Si layer 24, an i-type a-Si layer 25, and a p-type a-Si layer 25.
-Si layer 26. 28 is a conducting wire.

The substrate 21 is semiconductive, preferably electrically insulating. As the semiconductive substrate, for example, Si, Ge
And the like. As the thin film electrodes 22 and 27, for example, NiCr, Al, Cr, Mo, Au, Ir, Nb, Ta, V, Ti, Pt,
It can be obtained by providing a thin film of Pd, In ₂ O ₃ , SnO ₂ , ITO (In ₂ O ₃ + SnO ₂ ) or the like on the substrate by a process such as vacuum deposition, electron beam deposition or sputtering. The thickness of the electrodes 22 and 27 is preferably 30 to 50 × 10 ⁴ Å, more preferably 1
It is desirable that it is 0 to 5 × 10 ³ Å.

If necessary, the film body forming the a-Si semiconductor layer 23 may be an n-type
24 or p-type 26 is formed by doping the n-type impurity or the p-type impurity of the impurity elements, or both impurities in the layer to be formed, while controlling the amount of the impurity element at the time of forming the layer. To be done.

In order to form the n-type, i-type and p-type a-Si layers, a compound containing carbon and halogen is introduced into the decomposition space by the method of the present invention, and these are decomposed at a high temperature, for example CF.
Active species such as ₂ ^* are generated and introduced into the film formation space. Separately from this, a silicon compound in a gas state and, if necessary, an inert gas and a gas of a compound containing an impurity element as components are introduced into the film forming space in which the support 11 is installed, and discharge is performed. It may be formed by using energy. The thickness of the n-type and p-type a-Si layer, preferably 100 to 10 ⁴ Å, more preferably in the range of 300~2000Å it is desirable.

The thickness of the i-type a-Si layer is preferably 500.
The range of ˜10 ⁴ Å, more preferably 1000 to 10000 Å is desirable.

Specific examples and reference examples of the present invention will be shown below.

Example 1 Using the apparatus shown in FIG.
Type, p-type and n-type a-Si deposited films were formed.

In FIG. 3, 101 is a deposition chamber in which a desired substrate 103 is placed on a substrate support 102 inside.

Reference numeral 104 is a heater for heating the substrate, which is supplied with power via a conductive wire 105 to generate heat. The substrate temperature is not particularly limited, but in carrying out the method of the present invention, it is preferably 50 to 150.
It is desirable that the temperature is ℃, more preferably 100 to 150 ℃.

Reference numerals 106 to 109 denote gas supply sources, which are provided in accordance with the number of silicon compounds and, if necessary, hydrogen, halogen compounds, inert gases, and compounds containing impurity elements as components. When using a liquid one of the raw material compounds, an appropriate vaporizer is provided. Gas source 106 in the figure
To 109, a branch pipe, a b flow meter, a c pressure gauge for measuring the pressure on the high-pressure side of each flow meter, d or e Is a valve for adjusting each gas flow rate. 110 is a gas introduction pipe to the film forming space, and 111 is a gas pressure gauge. In the figure, 112 is a decomposition space, 113
Is an electric furnace, 114 is a solid C grain, 115 is an introduction pipe of a compound containing carbon and halogen in a gaseous state which is a raw material of active species,
The active species generated in the decomposition space 112 is introduced into the film formation space 101 via the introduction pipe 116.

Reference numeral 117 denotes a discharge energy generator, which includes a matching box 117a, a high frequency introducing cathode electrode 117b, and the like.

The discharge energy from the discharge energy generator 117 is
The substrate 103 is acted upon by the source gas or the like flowing in the direction of arrow 119 to excite and react the gas or the like of the film forming source.
A deposited film of a-Si is formed on the entire surface or a desired portion.
In the figure, 120 is an exhaust valve and 121 is an exhaust pipe. First, the polyethylene terephthalate film substrate 103 was placed on the support base 102, the interior of the deposition space 101 was evacuated using an exhaust device, and the pressure was reduced to 10 ⁻⁶ Torr. At the substrate temperature shown in Table 1, using a gas supply source 106, Si ⁵ H ₁₀ 150 SCCM or a gas obtained by mixing this with PH ₃ gas or B ₂ H ₆ gas (both diluted with 1000 ppm hydrogen gas) 40 SCCM is used. It was introduced into the deposition space.

Further, the decomposition space 102 is filled with solid C particles 114, and the electric furnace 113
Heating by heating a C, the inlet pipe 115 of CF ₄ from the cylinder thereto by blowing with CF _4, to produce a CF ₂ ^* active species, through the inlet tube 116, is introduced into the deposition space 101 .

Plasma was applied from the discharge device while maintaining the atmospheric pressure in the film formation space 101 at 0.1 Torr to form a non-doped or doped a-Si film (film thickness 700 Å). The film formation rate was 35Å / sec.

Then, the obtained undoped or p-type a-Si film sample was placed in a vapor deposition tank, and a comb-shaped Al gearup electrode (length 250 μ, width 5 mm) was formed at a vacuum degree of 10 ⁻⁵ Torr, and then an applied voltage was applied.
The dark current was measured at 10 V, the dark conductivity σd was obtained, and the a-Si film was evaluated. The results are shown in Table 1.

Examples 2 to 4 Linear Si ₄ H ₁₀ , branched Si ₄ H ₁₀ , or H ₆ Si instead of Si ⁵ H _10
The same a-Si film as in Example 1 was formed except that ₆ F ₆ was used. The dark conductivity was measured and the results are shown in Table 1.

From Table 1, according to the present invention, an a-Si film having excellent electrical characteristics, that is, a high σ value can be obtained even at a low substrate temperature, and an a-Si film sufficiently doped can be obtained.

Reference Example 1 Using the device shown in FIG. 4, the first operation is performed as follows.
A drum-shaped electrophotographic image forming member having a film structure as shown in the drawing was prepared.

In FIG. 4, 201 is a film forming space, 202 is a decomposition space, and 203.
Is an electric furnace, 204 is a solid Si particle, 205 is a raw material introduction pipe for active species, 206 is an active species introduction pipe, 207 is a motor, 208 is a heater, 209 is a blowing pipe, 210 is a blowing pipe, 211 is Al.
A cylinder, 212 is an exhaust valve. Also, 213
Reference numerals 216 to 216 are source gas supply sources similar to those in 106 to 109 in FIG. 1, and 217 is a gas introduction pipe.

An Al cylinder 211 is hung in the film forming space 210, a heater 208 is provided inside it, and it can be rotated by a motor 207. Reference numerals 218 and 218 denote discharge energy generators, each of which includes a matching box 218a and a high frequency introducing cathode electrode 218b.

Also, the decomposition space 202 is filled with solid C particles 204, and the electric furnace 203
By heating to dissolve C and blow CF ₄ from the cylinder into it to generate CF ₂ ^* active species, which is then introduced into the introduction tube 2
It is introduced into the film forming space 201 via 06.

On the other hand, Si ₂ H ₆ and H ₂ are introduced into the film formation space 201 through the introduction pipe 217. Plasma is applied from the discharge device while maintaining the atmospheric pressure in the film formation space 201 at 1.0 Torr.

The Al cylinder 211 is heated and held at 280 ° C. by the heater 208, is rotated, and exhaust gas is exhausted through the exhaust valve 212. In this way, the photosensitive layer 13 is formed.

In addition, the intermediate layer is H ₂ / B ₂ H ₆ (B ₂ H ₆
Of 0.2%) was introduced to form a film with a film thickness of 2000Å.

Reference Comparative Example 1 CF ₄ and Si ₂ H ₆ , H ₂ and B ₂ H were prepared by a general plasma CVD method.
₆ to _6, a high frequency device of 13.56 MHz was provided in the film forming space 201 of FIG. 4 to form an amorphous silicon deposited film.

Table 2 shows the manufacturing conditions and performance of the drum-shaped electrophotographic image forming members obtained in Reference Example 1 and Reference Comparative Example 1.

Example 5 The PIN diode shown in FIG. 2 was produced by using Si ₃ H ₆ as a silicon compound and using the apparatus shown in FIG.

First, placing a polyethylene naphthalate film 21 was deposited an ITO film 22 of 1000A to the support, the pressure was reduced to 10 ^-6 Torr, CF ₂ ^* active species for the same introducing pipe 116 as in Example 1, also From the inlet pipe 110 to Si ₃ H ₆ 150SCCM, phosphine gas (PH ₃
1000ppm hydrogen dilution) was introduced, and halogen gas from another system 2
N-type a-Si film doped with P by introducing 0SCCM and applying plasma from the discharge device while keeping at 0.1 Torr
24 (film thickness 700Å) was formed.

Then, the i-type a-Si film 25 (film thickness 5000Å) is formed by the same method as that of the n-type a-Si film except that the introduction of PH ₃ gas is stopped.
Was formed.

Then, diborane gas (B ₂ H ₆ 1000 ppm hydrogen diluted) 40 SCCM was formed together with H ₂ gas, and the p-type a-Si film 26 (film thickness 700 Å) doped with B was formed under the same conditions as the n-type otherwise.
Further, an Al electrode 27 having a film thickness of 1000 Å was formed on this p-type film by vacuum vapor deposition to obtain a PIN type diode.

IV of the diode device (area: 1 cm ² ) thus obtained
The characteristics were measured and the rectification characteristics and the photovoltaic effect were evaluated.
The results are shown in Fig. 3.

Also in terms of light irradiation characteristics, introducing light from the substrate side,
With a light irradiation intensity AMI (about 100 mW / cm ² ), a conversion efficiency of 8.5% or more, an open-ended voltage of 0.92 V, and a short-circuit current of 10.5 mA / cm ² were obtained.

Examples 6 to 8 The same as Example 6 except that linear Si ₄ H ₁₀ , branched Si ₄ H ₁₀ , or H ₆ Si ₆ F ₆ was used as the silicon compound instead of Si ₃ H ₆ . A PIN diode (photovoltaic device) was produced.
The rectification characteristics and the photovoltaic effect were evaluated, and the results are shown in Table 3.

From Table 3, according to the present invention, it is possible to obtain an a-Si deposited film having good optical and electrical characteristics even at a substrate temperature lower than the conventional one.

〔The invention's effect〕

According to the method for manufacturing a photovoltaic element of the present invention, the deposited film to be formed has improved electrical, optical, photoconductive and mechanical properties, and high-speed film formation is possible at a low substrate temperature. In addition, the reproducibility in film formation is improved, the film quality can be improved and the film quality can be made uniform, and it is advantageous for increasing the area of the film, and it is possible to easily achieve improvement in film productivity and mass production. be able to. Further, it is possible to form a film on a substrate having poor heat resistance, and it is possible to shorten the process by low temperature treatment.

In addition, the photovoltaic element formed by the method for producing a photovoltaic element of the present invention has an excellent photoelectric effect, and the conversion efficiency is also extremely excellent.

[Brief description of drawings]

FIG. 1 is a schematic diagram for explaining a configuration example of an electrophotographic image forming member shown as a reference example of the present invention. FIG. 2 is a schematic diagram for explaining a configuration example of a PIN diode manufactured by using the method of the present invention. FIG. 3 and FIG. 4 are schematic diagrams for explaining the constitution of the apparatus for carrying out the method of the present invention used in the examples. 10 ... Electrophotographic image forming member, 11 ... Substrate, 12 ... Intermediate layer, 13 ... Photosensitive layer, 21 ... Substrate, 22,27 ... Thin film electrode, 24 ... N-type a-Si layer, 25 ... i-type a-Si layer, 26 ... p-type a-Si layer, 101,201 ... film formation space, 111,202 ... decomposition space, 106,107,108,109,213,214,215,216 ... gas supply source, 103,211 ... substrate, 117,218 ... discharge energy Generator.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigeru Ohno 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (56) Reference JP-A-57-72317 (JP, A) 29th Response Union Conference Proceedings (1982-4-1), p. 499

Claims (1)

[Claims] 1. A method of manufacturing a photovoltaic device having a pair of electrodes and a semiconductor film provided between the electrodes, wherein the semiconductor film is a non-activated silicon compound which is a raw material for forming a deposited film. And an active species which is generated by blowing a compound containing carbon and halogen into the heated solid carbon particles and decomposing the compound containing carbon and halogen, and an active species which chemically interacts with the silicon compound, are separately formed. A method for manufacturing a photovoltaic element, which comprises introducing into a space, causing discharge energy to act on these to excite the silicon compound, and forming a deposited film obtained by a chemical reaction.