JPH07213989A - Spin coating method for surface of synthetic resin substrate - Google Patents

Spin coating method for surface of synthetic resin substrate

Info

Publication number
JPH07213989A
JPH07213989A JP6013697A JP1369794A JPH07213989A JP H07213989 A JPH07213989 A JP H07213989A JP 6013697 A JP6013697 A JP 6013697A JP 1369794 A JP1369794 A JP 1369794A JP H07213989 A JPH07213989 A JP H07213989A
Authority
JP
Japan
Prior art keywords
coating agent
substrate
coating
synthetic resin
resin substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6013697A
Other languages
Japanese (ja)
Inventor
Yoshio Shimizu
能夫 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Priority to JP6013697A priority Critical patent/JPH07213989A/en
Publication of JPH07213989A publication Critical patent/JPH07213989A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent a coating agent from overrunning to the back side of a substrate by keeping specified distance between the tip of a coating agent supply nozzle and the surface of a synthetic resin substrate. CONSTITUTION:A synthetic resin substrate, with its coating surface kept horizontally, is rotated at a low speed. The substrate, after being coated with a cure type coating agent, is then rotated at a high speed to get rid of the excessive coating agent, and the coating agent is cured. In this process, the viscosity of the coating agent is 30-200cps, and the distance between the tip of a coating agent supply nozzle and the surface of the synthetic resin substrate is 0.3-2mm. When the viscosity deviates from the range, a coating film with uniform thickness can hardly be obtained. If the distance exceeds 2mm, the coating agent discharged from the nozzle is repelled on the surface to form droplets, causing the undesirable overrunning of the coating agent onto the back of the substrate.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は合成樹脂基材表面へのス
ピンコーティング方法に関する。詳しくは、透明な合成
樹脂基材に光記録層を設けた光ディスク等の表面に保護
層等のコート層を形成するのに適したスピンコーティン
グ方法に関する。
FIELD OF THE INVENTION The present invention relates to a method for spin coating a surface of a synthetic resin substrate. More specifically, the present invention relates to a spin coating method suitable for forming a coating layer such as a protective layer on the surface of an optical disc having an optical recording layer provided on a transparent synthetic resin substrate.

【0002】[0002]

【従来の技術】近年、大容量メモリーとしてライトワン
ス型、書換可能型等の光記録媒体が注目されている。光
記録媒体は、信号の記録される記録膜を円形の透明合成
樹脂基板(基材)の一面(以下記録膜側)に形成させて
なるが、記録膜への情報の記録、再生は通常その反対側
(基板側)からレーザービーム光によりおこなわれる。
基板上の傷は、レーザー光による情報の記録、再生を阻
害する。
2. Description of the Related Art In recent years, write-once type, rewritable type and other optical recording media have been attracting attention as large capacity memories. An optical recording medium has a recording film on which signals are recorded formed on one surface (hereinafter referred to as the recording film side) of a circular transparent synthetic resin substrate (base material). It is performed by laser beam light from the opposite side (substrate side).
The scratches on the substrate hinder the recording and reproducing of information by laser light.

【0003】そこで、基板表面に耐擦傷性を付与するた
め、紫外線硬化型樹脂等の表面硬度が比較的大きい透明
樹脂被膜(以下樹脂被膜)を形成させる。また、記録膜
側にも記録膜の保護を目的として同様の樹脂被膜を形成
させている。基板側の樹脂被膜はハードコート、記録膜
側の樹脂被膜は保護コートと呼ばれる。基板の表面に紫
外線硬化型樹脂被膜を形成させる方法としては通常、ス
ピンコーティング法が用いられる。
Therefore, in order to impart scratch resistance to the surface of the substrate, a transparent resin film (hereinafter referred to as a resin film) having a relatively high surface hardness such as an ultraviolet curable resin is formed. A similar resin coating is formed on the recording film side for the purpose of protecting the recording film. The resin film on the substrate side is called a hard coat, and the resin film on the recording film side is called a protective coat. A spin coating method is usually used as a method for forming the ultraviolet curable resin film on the surface of the substrate.

【0004】[0004]

【発明が解決しようとする課題】スピンコーティング法
では塗布条件によっては基板(ディスク)の反対側にコ
ート剤が裏回りする現象(返り)が発生することがあ
る。これは基板上へのコート剤供給時にコート剤がディ
スク上で液玉になった場合に発生する。
In the spin coating method, a phenomenon (return) in which the coating agent goes around on the opposite side of the substrate (disk) may occur depending on the coating conditions. This occurs when the coating agent becomes liquid drops on the disc when the coating agent is supplied onto the substrate.

【0005】すなわち、スピンコーティングは、通常、
コーティングしようとする基材(以下「基板」という場
合がある)を低速で回転しつつコート剤を供給ノズルか
ら供給してコート剤を基板表面に置くが、この際合成樹
脂基材は液体との親和性が小さいのでコート剤をはじく
場合がある。合成樹脂基材表面ではじかれたコート剤は
液滴となって低速とは云え回転している基材表面をころ
がり、基材の端に達し、基材の側端縁や裏面に回り込
み、本来コーティングする部分でない部分を汚染するこ
ととなる。
That is, spin coating is usually
While the substrate to be coated (hereinafter sometimes referred to as "substrate") is rotated at a low speed, the coating agent is supplied from the supply nozzle and the coating agent is placed on the surface of the substrate. Since the affinity is small, the coating agent may be repelled. The coating agent repelled by the surface of the synthetic resin substrate turns into droplets, which can be said to be low speed, but rolls on the surface of the rotating substrate, reaches the end of the substrate, and wraps around to the side edges and the back surface of the substrate. This will contaminate the parts that are not coated.

【0006】[0006]

【課題を解決するための手段】本発明者は上記課題を解
決するため鋭意検討をおこなった結果、スピンコーティ
ングの条件を特殊の条件とすることにより問題を解決し
得ることを見いだし、本発明を完成するに至った。本発
明の要旨は、合成樹脂基材のコーティング面をほぼ水平
にして低速で回転させ、硬化型コート剤を塗布した後高
速で回転してコート剤を振り切り、次いでコート剤を硬
化処理する合成樹脂基材表面へのスピンコーティング方
法において、硬化型コート剤として粘度が30〜200
cpsのものを用い、コート剤の塗布に当り、コート剤
の供給ノズルの先端と合成樹脂基材表面との間隔を0.
3〜2mmとしたことを特徴とする合成樹脂基材表面へ
のスピンコーティング方法に存する。
As a result of intensive studies to solve the above-mentioned problems, the present inventor has found that the problems can be solved by making the spin coating conditions special conditions, and It came to completion. The gist of the present invention is a synthetic resin in which a coating surface of a synthetic resin substrate is made substantially horizontal and is rotated at a low speed, a curable coating agent is applied, then the coating material is rotated at a high speed to shake off the coating agent, and then the coating agent is cured. In the method of spin coating on the surface of a base material, the viscosity of the curable coating agent is 30 to 200.
When the coating agent is applied, the gap between the tip of the coating agent supply nozzle and the surface of the synthetic resin substrate is set to 0.
A method of spin coating on the surface of a synthetic resin substrate is characterized in that it is 3 to 2 mm.

【0007】本発明においてスピンコートを施す基材と
しては、代表的には、光ディスクの基板として用いられ
ているポリカーボネート(PC)樹脂、ポリスチレン樹
脂、ポリメチルメタクリレート(PMMA)樹脂等の透
明樹脂基板が挙げられる。本発明において、スピンコー
トに用いるコート剤としてはエネルギー線(例えば、紫
外線)硬化型あるいは熱硬化型等の硬化型樹脂が用いら
れる。
In the present invention, as a base material to be spin-coated, a transparent resin substrate such as a polycarbonate (PC) resin, a polystyrene resin, a polymethylmethacrylate (PMMA) resin, which is typically used as a substrate of an optical disc, is used. Can be mentioned. In the present invention, a curable resin such as an energy ray (for example, ultraviolet ray) curable type or a thermosetting type is used as a coating agent used for spin coating.

【0008】エネルギー硬化型樹脂としてはアクリレー
トまたはメタクリレート基を単一あるいは複数個有する
化合物よりなるもの、例えばエポキシアクリレートやウ
レタンアクリレート等を主成分としたものが好適に用い
られる。また、熱硬化型樹脂としてはシリコーン系、エ
ポキシ系等が用いられる。本発明において、硬化性樹脂
の塗布時の粘度としては30〜200cps(センチポ
イズ)、好ましくは50〜100cpsの範囲である。
As the energy curable resin, a resin composed of a compound having a single or a plurality of acrylate or methacrylate groups, for example, a resin containing epoxy acrylate or urethane acrylate as a main component is preferably used. Further, as the thermosetting resin, silicone type, epoxy type or the like is used. In the present invention, the viscosity of the curable resin when applied is in the range of 30 to 200 cps (centipoise), preferably 50 to 100 cps.

【0009】粘度がこの範囲を外れる場合には、均一な
膜厚のコーティングを得ることが難かしくなる。上記コ
ート剤を塗布するスピンコーティング条件としては、樹
脂基材のコーティング形成面をほぼ水平に保ち、ディス
クを5〜30rpm、好ましくは10〜20rpmで回
転させておき、コート剤供給ノズルの先端とディスクの
間の高さ(間隔)を0.3〜2.0mm、好ましくは
0.5〜1.5mmでディスク外周よりコート剤を塗布
する。
If the viscosity is out of this range, it becomes difficult to obtain a coating having a uniform film thickness. The spin-coating conditions for applying the above-mentioned coating agent include keeping the coating forming surface of the resin substrate substantially horizontal and rotating the disk at 5 to 30 rpm, preferably 10 to 20 rpm, and the tip of the coating agent supply nozzle and the disk. The coating agent is applied from the outer circumference of the disc at a height (spacing) of 0.3 to 2.0 mm, preferably 0.5 to 1.5 mm.

【0010】ノズル先端の高さが上記高さより大きい場
合には、ノズルより吐出されたコート剤が基材表面では
じかれ基材面上で液玉を形成し易くなり、コート剤の基
材反対面への返りを発生するので好ましくない。上記ス
ピンコーティングの他の条件としては特に制限を設ける
ものではないが、一般にコート剤供給ノズルの内径は
0.5〜2mm、好ましくは0.5〜1mmのものが用
いられる。コート剤塗布時の回転数は基板の径により変
わるが、上記の回転数は直径150mm以下の基板の場
合である。
When the height of the tip of the nozzle is larger than the above height, the coating agent discharged from the nozzle is repelled by the surface of the base material to easily form liquid droplets on the surface of the base material. It is not preferable because it causes a return to the surface. Other conditions for the spin coating are not particularly limited, but the inner diameter of the coating agent supply nozzle is generally 0.5 to 2 mm, preferably 0.5 to 1 mm. The number of rotations at the time of applying the coating agent varies depending on the diameter of the substrate, but the above number of rotations is for a substrate having a diameter of 150 mm or less.

【0011】コート剤の吐出圧は粘度、ノズル径等によ
って異なるが、通常はタンク圧力で1〜1.5kgf/
cm2 程度である。タンク圧力とはコート剤を収容した
タンクに加える圧力であり、タンクとノズルとの間には
フィルター等が介在する場合があり、ノズルでの圧力を
直接表わしていない。ノズルからの吐出時のコート剤の
線速で云えば、ノズル径によって変わるが、通常0.2
〜1m/秒程度である。
The discharge pressure of the coating agent varies depending on the viscosity, nozzle diameter, etc., but is usually 1 to 1.5 kgf / tank pressure.
It is about cm 2 . The tank pressure is a pressure applied to the tank containing the coating agent, and a filter or the like may be interposed between the tank and the nozzle, and does not directly represent the pressure at the nozzle. The linear velocity of the coating agent at the time of discharging from the nozzle varies depending on the nozzle diameter, but is usually 0.2
It is about 1 m / sec.

【0012】コート剤を基材表面に塗布した後基材を高
速回転し、コート剤を振り切る。この工程でコート剤の
均一な厚さを得る。高速回転は通常1000〜6000
rpm程度の範囲で行なわれるが、粘度、得ようとする
膜厚等により選択される。スピンコーティングによって
形成されたコート剤の液膜の硬化条件は各コート剤にあ
った硬化方法を用いれば良く、例えばエネルギー硬化
型、すなわち紫外線硬化型であれば紫外線を照射し、電
子線硬化型であれば電子線を照射し、また、熱硬化型で
あれば加熱処理などの方法が適用される。
After applying the coating agent on the surface of the substrate, the substrate is rotated at a high speed to shake off the coating agent. In this step, a uniform thickness of the coating agent is obtained. High speed rotation is usually 1000-6000
It is carried out in the range of about rpm, and is selected depending on the viscosity, the film thickness to be obtained, and the like. The coating agent liquid film formed by spin coating may be cured by using a curing method suitable for each coating agent. For example, in the case of energy curing type, that is, ultraviolet curing type, ultraviolet rays are irradiated and electron beam curing type is used. If there is, an electron beam is applied, and if it is a thermosetting type, a method such as heat treatment is applied.

【0013】硬化後形成されるコート膜の膜厚は、光デ
ィスクの保護膜の場合には0.5〜100μ程度、好ま
しくは、1〜50μ程度である。さらには1〜20μ程
度が好ましく、これ以上厚くするとコート膜の収縮応力
等の影響による基板の変形が生じる場合があり、薄すぎ
るとコート膜の硬度等の耐久性が低下するので好ましく
ない。
The thickness of the coat film formed after curing is about 0.5 to 100 μm, preferably about 1 to 50 μm in the case of a protective film for an optical disk. Further, it is preferably about 1 to 20 μm, and if it is made thicker than this, the substrate may be deformed due to the contraction stress of the coat film, and if it is too thin, durability such as hardness of the coat film is deteriorated, which is not preferable.

【0014】本発明の方法を光ディスク等に適用する場
合ポリカーボネート等の合成樹脂基材表面に適用される
が、光ディスクの場合には基板に金属等の記録層が設け
られている面があるが、この金属等の表面を本発明の方
法でコーティングしても良い。但し、金属表面は濡れ性
が良いので、ノズルと金属表面の間隔を大きくしてもあ
まり問題は生じない。また、基材の表面に他の樹脂層を
設けてある場合にも、本発明の方法でこの樹脂層上にコ
ーティングを施すことができる。
When the method of the present invention is applied to an optical disc or the like, it is applied to the surface of a synthetic resin substrate such as polycarbonate. In the case of an optical disc, there is a surface on which a recording layer such as a metal is provided on the substrate. The surface of this metal or the like may be coated by the method of the present invention. However, since the metal surface has good wettability, there is not much problem even if the distance between the nozzle and the metal surface is increased. Further, even when another resin layer is provided on the surface of the base material, the resin layer can be coated by the method of the present invention.

【0015】[0015]

【実施例】以下に本発明の実施例を5.25インチ(1
30mmφ)の光ディスク基板(基材)について述べる
が、本発明はその要旨を越えない限り、以下の実施例に
よってその範囲を制約されるものではない。
EXAMPLE An example of the present invention will be described below with reference to 5.25 inches (1
An optical disk substrate (base material) having a size of 30 mmφ will be described, but the scope of the present invention is not limited by the following examples unless the gist thereof is exceeded.

【0016】実施例1 径130mmφ、厚さ1.2mmのポリカーボネート基
板上に無機質材料からなる書換可能型の光磁気記録膜を
形成し、その反対側(基板側)に紫外線硬化型のコート
剤をノズルの高さを種々に変え、他のスピンコーティン
グ条件は表1に示す固定条件でスピンコーティングをお
こなった。作成したディスクは、目視検査でディスク表
面を観察し、コート剤のディスク反対面への返りの有無
の確認を行なった。表2にこの検査結果を示す。
Example 1 A rewritable type magneto-optical recording film made of an inorganic material was formed on a polycarbonate substrate having a diameter of 130 mmφ and a thickness of 1.2 mm, and an ultraviolet curable coating agent was formed on the opposite side (substrate side). The nozzle height was changed variously, and other spin coating conditions were fixed under the fixed conditions shown in Table 1 for spin coating. With respect to the prepared disc, the disc surface was observed by visual inspection to confirm whether or not the coating agent was returned to the opposite face of the disc. Table 2 shows the test results.

【0017】[0017]

【表1】 [Table 1]

【0018】[0018]

【表2】 [Table 2]

【0019】以上の結果より、コート剤供給ノズルとデ
ィスクの間の高さを2mm以下、好ましくは、1.5m
m以下に規定することによりコート剤の基材反対面への
返りを低減させることが出来る。
From the above results, the height between the coating agent supply nozzle and the disk is 2 mm or less, preferably 1.5 m.
By setting the thickness to m or less, the return of the coating agent to the surface opposite to the base material can be reduced.

【0020】[0020]

【発明の効果】本発明の方法によれば、コート剤の基材
反対面への返りを防止でき、光デイスク等、合成樹脂を
基材とする板材の表面コートにおける歩留まりを上げる
ことができる。
EFFECTS OF THE INVENTION According to the method of the present invention, it is possible to prevent the coating agent from returning to the surface opposite to the base material, and it is possible to increase the yield in the surface coating of a plate material such as an optical disk having a synthetic resin as a base material.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 合成樹脂基材のコーティング面をほぼ水
平にして低速で回転させ、硬化型コート剤を塗布した後
高速で回転してコート剤を振り切り、次いでコート剤を
硬化処理する合成樹脂基材表面へのスピンコーティング
方法において、硬化型コート剤として粘度が30〜20
0cpsのものを用い、コート剤の塗布に当り、コート
剤の供給ノズルの先端と合成樹脂基材表面との間隔を
0.3〜2mmとしたことを特徴とする合成樹脂基材表
面へのスピンコーティング方法。
1. A synthetic resin substrate in which a coating surface of a synthetic resin substrate is substantially horizontal and is rotated at a low speed, a curable coating agent is applied, the coating material is rotated at a high speed to shake off the coating agent, and then the coating agent is cured. In the spin coating method on the material surface, the viscosity is 30 to 20 as a curable coating agent.
The spin on the surface of the synthetic resin substrate is characterized in that the space between the tip of the nozzle for supplying the coating agent and the surface of the synthetic resin substrate is 0.3 to 2 mm when applying the coating agent of 0 cps. Coating method.
【請求項2】 硬化型コート剤が紫外線硬化型樹脂であ
ることを特徴とする請求項1に記載のスピンコーティン
グ方法。
2. The spin coating method according to claim 1, wherein the curable coating agent is an ultraviolet curable resin.
【請求項3】 基材の直径が150mm以下であること
を特徴とする請求項1又は2に記載のスピンコーティン
グ方法。
3. The spin coating method according to claim 1, wherein the substrate has a diameter of 150 mm or less.
【請求項4】 低速での回転が5〜30rpmで行なわ
れることを特徴とする請求項1乃至3のいずれかに記載
のスピンコーティング方法。
4. The spin coating method according to claim 1, wherein the low speed rotation is performed at 5 to 30 rpm.
【請求項5】 高速での回転が1000〜6000rp
mで行なわれることを特徴とする請求項1乃至4のいず
れかに記載のスピンコーティング方法。
5. Rotation at high speed is 1000 to 6000 rp
5. The spin coating method according to claim 1, wherein the spin coating method is performed at m.
JP6013697A 1994-02-07 1994-02-07 Spin coating method for surface of synthetic resin substrate Pending JPH07213989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6013697A JPH07213989A (en) 1994-02-07 1994-02-07 Spin coating method for surface of synthetic resin substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6013697A JPH07213989A (en) 1994-02-07 1994-02-07 Spin coating method for surface of synthetic resin substrate

Publications (1)

Publication Number Publication Date
JPH07213989A true JPH07213989A (en) 1995-08-15

Family

ID=11840395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6013697A Pending JPH07213989A (en) 1994-02-07 1994-02-07 Spin coating method for surface of synthetic resin substrate

Country Status (1)

Country Link
JP (1) JPH07213989A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010113761A (en) * 2008-11-06 2010-05-20 Fuji Electric Device Technology Co Ltd Spin-coating method and controller of spin-coating apparatus
JP4864903B2 (en) * 2005-12-21 2012-02-01 株式会社トクヤマ Spin coating method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4864903B2 (en) * 2005-12-21 2012-02-01 株式会社トクヤマ Spin coating method
JP2010113761A (en) * 2008-11-06 2010-05-20 Fuji Electric Device Technology Co Ltd Spin-coating method and controller of spin-coating apparatus

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