JPH07213079A - Ultrasonic movement device - Google Patents

Abstract

PURPOSE:To provide an ultrasonic movement device whose structure is simple and which can be used for a long period by devising the combination of materials and shapes for a vibration member and a drive member. CONSTITUTION:In an ultrasonic movement device, ultrasonic vibrations are excited in a rod-shaped or cylindrical vibration member 1, an object to be moved is brought into contact with the vibration member, and a driving force is obtained. In the ultrasonic movement device, at least two vibration-exciting members 2a, 2b which are vibrated nearly in the direction normal to the side face of the vibration member 1 are provided on the side face, vibrations in different directions are generated in the respective vibration-exciting members, and the object, to be moved, which has been brought into contact with the vibration member 1 is moved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving device having a drive mechanism for converting electric power into a driving force and moving a moving body.

[0002]

2. Description of the Related Art A moving device using ultrasonic vibration has features such as higher energy efficiency than a device using an electric motor or an internal combustion engine and simplification of a machine.

Conventionally, as a moving device using ultrasonic vibration, an ultrasonic motor using flexural vibration of a rod or an electrostrictive rotor ultrasonic motor has been proposed as a device having a simple structure.

The former is a portion that vibrates ultrasonically (hereinafter,
(1) As shown in FIG. 4, a piezoelectric member or a magnetostrictive member (hereinafter referred to as “exciting member” or “vibrator”) that can be independently driven by being divided into at least two parts, as shown in FIG. "Drive member" is represented as a representative) 41
Is sandwiched between members (hereinafter referred to as "vibration members") 42 that do not generate ultrasonic vibration by themselves, such as metal, and flexural vibration is generated by alternately expanding and contracting each part of the drive element in the longitudinal direction of the vibrator. (2) As shown in FIG. 5, at least two or more driving members 51 are adhered to the vibrating member 52, and the driving members are alternately expanded and contracted in the longitudinal direction of the vibrator to generate flexural vibration. 3) As shown in FIG. 6, at least two or more drive electrodes 63 for partially expanding and contracting the member in the longitudinal direction are formed on the side surface of the drive member 61, and these are alternately driven to generate flexural vibration. What is generated, and further (4) as shown in FIG. 7, one end of each of the drive members 71a and 71b is fixed so as to form an angle of 90 degrees with each other in the direction perpendicular to the axial direction of the vibration member 72. 71a, 71b Composite vibrator motor or the like fixed to the fixture 73 to the stationary end is known.

[0005]

However, although the conventional ultrasonic moving devices listed above have a relatively simple structure, strict processing accuracy is required for manufacturing the members constituting the vibrator. There is. Of the above-mentioned conventional techniques, in particular, a structure in which a driving member is sandwiched between vibration members (shown in FIG. 4).
In order to satisfactorily transmit the vibration generated by the driving member 41 to the vibrating member 42, the flatness of the abutting surfaces of the two members 41, 42 is set to an accuracy of several microns or less, and each portion of the driving member 41 is The processing / assembly had to be performed so that the vibration members 42 were equally pressed against each other.

In the structure in which the driving member is bonded to the vibration member (shown in FIG. 5), the thickness of the bonding layer is bonded in order to satisfactorily transfer the displacement generated in the driving member 51 to the vibration member 52. It had to be less than a few microns over the entire surface.

Further, when the vibrating body is composed of only the driving member 61 (shown in FIG. 6), a moving element of the driving member 61 (a guide path when the moving device is a self-propelled type, hereinafter referred to as "moving"). The surface that comes into contact with the "child" is strictly required to have smoothness and wear resistance. However, it is not possible to process piezoelectric ceramics widely used as an ultrasonic wave generation member to meet these requirements. It was difficult.

Further, the driving members 71a, 71 are formed at an angle of 90 degrees in a direction perpendicular to the axial direction of the vibrating member 72.
The composite vibration motor (shown in FIG. 7) in which b is fixed has, for example, one driving member 71a, and
When driving 1a in the axial direction (A ₁ ), this driving force
Acts on the vibrating member 72 (A ₂ ), and also acts on the other driving member 71 _b (A ₃ ). That is,
By driving one driving member 71a, the other driving member 7
Bending stress is applied to 1b, which may cause internal deterioration of the other driving member 71b due to the stress.

Further, in the structure shown in FIG. 7, the vibrating member 7
Since the magnitude of the driving force in 2 is equal to the displacement of each element, that is, each driving member 71a, 71b, it was necessary to apply a high voltage to obtain sufficient displacement.

The present invention has been made in view of these points, and a simple and large driving force can be obtained and a long time can be obtained by paying attention to the combination of the material and shape of the vibrating member and the driving member and the mounting structure thereof. It is an object to provide an ultrasonic moving device that can be used for a period of time.

[0011]

DISCLOSURE OF THE INVENTION The present invention provides an ultrasonic moving device for exciting ultrasonic vibration in a rod-shaped or cylindrical vibrating member, and bringing a moving object into contact therewith to obtain a driving force.
On the side surface of the vibrating member, at least two or more exciting members that vibrate substantially in the surface normal direction and one end of which is in a free state are arranged, and vibrations in different directions are generated in the long side direction of each of the exciting members. Thus, an ultrasonic wave moving device for generating a driving force in a fixed direction on the side surface of the vibrating member is provided.

That is, according to the present invention, on the side surface of the vibrating member, at least two or more exciting members which are vibrated in the surface normal direction and one end of which is in a free state are arranged, and the long sides of the respective exciting members are arranged. Vibrations of different directions generated in different directions are applied to the structural member to generate two or more different bending vibrations in the structural member, and a driving force in a fixed direction is generated on the side surface thereof.

By adopting such a structure that two or more exciting members are attached so as to vibrate in the surface normal direction on the rod-shaped or cylindrical side surface, the materials of the exciting member and the vibrating member can be made different. it can. As a result, a member having high wear resistance can be used in the contact portion of the vibrating member with the moving body, and the durability can be improved. Further, the exciting member can use a fixing means such as a screw for the vibrating member, which facilitates not only manufacturing, but also replacement of the exciting member when it deteriorates. Furthermore, since one end of the excitation member is held in a free state, even if one excitation member is driven, the bending stress is not applied to the other excitation member, and deterioration due to internal stress of the excitation member can be suppressed. It can be driven for a long time. Also,
Since one end of the excitation member is held in a free state, the vibrations of both drive members resonate with the vibration member,
It is possible to obtain vibration (driving force) equal to or greater than the displacement of each driving member (element).

The object to be moved is placed on the vibrating member such that the longitudinal direction of the object is perpendicular to the longitudinal direction of the vibrating member, and the object is moved in the longitudinal direction. The movable object can be smoothly moved by providing the rotatable roller wheel so that only the movable object can be moved.

In order to move the object to be moved more smoothly, the ultrasonic wave moving device can vibrate in a rod-like or cylindrical vibrating member and roughly in the plane normal direction of the vibrating member. You may make it consist of the above-mentioned excitation member and the rotating body which was contact | abutted with the said vibration member excited by the said excitation member, and was rotatably supported.

According to this structure, since the vibrating member is in contact with the rotatable rotor, the driving force generated by the ultrasonic vibration can be transmitted to the rotor with a small loss.

[0017]

Embodiment 1 An embodiment of the present invention will be described below with reference to the drawings. 1 is a perspective view showing a vibrating member of this embodiment, and FIG.
2A is a plan view showing the overall configuration of the ultrasonic moving device of the present embodiment, and FIG. 2B is a front view.

The vibrating member 1 has a diameter of 5 m as shown in FIG.
It is a round bar made of brass with a length of 50 mm and a length of 50 mm. Two female screws 1a, 1b (I
The SO standard M3) is drilled. Both female screws 1a, 1b
Are formed in a direction perpendicular to the axis of the vibrating member 1 and orthogonal to each other.

One ends of quadrangular prismatic excitation members 2a and 2b are fitted into the female screws 1a and 1b, respectively. Each of the excitation members 2a and 2b is a commercially available laminated piezoelectric element having a stepped knurled screw formed at one end thereof using an adhesive made of epoxy resin. Female screws 1a, 1b of member 1
Are fitted to each.

In the present invention, in addition to the brass, the vibrating member 1 may be made of a metal member such as copper, aluminum, duralumin, steel, stainless steel, or the like.
Further, as the excitation member, not only the above-mentioned laminated piezoelectric element but also, for example, a piezoelectric element other than the laminated piezoelectric element, a magnetostrictive vibrator, a voice coil or the like can be used.

The vibrating member 1 is mounted on the support members 22a and 22b in the vicinity of both longitudinal ends thereof so as not to move freely in the horizontal direction and to prevent vibration. The supports 22a and 22b are fixed on the base 20 via leaf springs 23a and 23b. The vibration generated by the vibrating member 1 is absorbed by the leaf springs 23a and 23b and is not transmitted to the base 20.

As shown in FIGS. 2A and 2B, when the vibrating member 1 is placed on the supports 22a and 22b, one end of the exciting members 2a and 2b is left free.

The moving object 24 has a cylindrical shape in this embodiment, and is placed on the vibrating member 1 so that its longitudinal direction is perpendicular to the longitudinal direction of the vibrating member 1. ing. The object to be moved 24 is in contact with roller wheels 25a and 25b provided on two upper surfaces thereof, and the roller wheels 25a and 25b are rotatably supported by the shaft supporting members 26a and 2b.
It is pivotally supported by 6b.

The movable object 24 is the leaf spring 23 described above.
The vibrating member 1 is pressed from below by the urging forces of a and 23b. As described above, in the states shown in FIGS. 2A and 2B, when the vibrating member 1 is excited by applying alternating voltages having phases different from each other by 90 degrees to the vibrating members 2a and 2b, the moving body is moved. Object 24 is shown in FIG.
The translational movement was started in the direction indicated by the arrow in (b) (rightward in the figure).

When the phase of the AC voltage applied to both the excitation members 2a and 2b was reversed, the object 24 to be moved started translational movement in the opposite direction (leftward in the figure). As described above, according to the first embodiment, since a member having high wear resistance such as brass can be used as the vibrating member 1, the durability of the ultrasonic moving device itself can be improved. In addition, with respect to the vibration member 1, the excitation members 2a and 2b
Since it is screwed, the exciter members 2a and 2b can be easily replaced even if they deteriorate due to long-term use.

Further, in the first embodiment, the excitation members 2a,
Since one end of 2b is held in a free state, even if one excitation member (for example, 2a) is driven, the bending stress is not applied to the other excitation member (for example, 2b), and the excitation member (for example, 2b) is not applied. Can be prevented from deterioration due to internal stress of
It can be driven for a long time. Further, since one end of each of the excitation members 2a and 2b is held in a free state, the vibrations of both drive members 2a and 2b resonate with the vibration member 1, and each drive member 2a and 2b (element ) Vibration (driving force) equal to or greater than the displacement can be obtained.

[0027]

[Embodiment 2] FIG. 3A is a plan view showing an ultrasonic wave moving device according to another embodiment of the present invention, and FIG. 3B is a front view thereof.

Since the vibrating member 1 used in the second embodiment is the same as that described in the first embodiment (FIGS. 1 and 2), the description thereof will be omitted. In addition, a support tool 2 that supports the vibration member 1
2a and 22b, the leaf springs 23a and 23b, and the base 20 are the same as those described in the first embodiment (FIG. 2), and thus the description thereof is omitted.

In the second embodiment, above the vibrating member 1,
A horizontal U-shaped support frame 36 is arranged, and the support frame 3
A rotary body 34, which is rotatable around the shaft support hole 39, is attached to the shaft support hole 39 formed in the shaft 6.

The rotating body 34 is in contact with the side surface of the vibrating member 1 at the lowermost portion of the peripheral surface thereof. Thus, FIG.
In the states shown in (a) and (b), the excitation member 2
When the vibrating member 1 was excited by applying alternating voltages having a phase difference of 90 degrees to a and 2b, the rotating body 34 was rotated in the direction indicated by the arrow in FIG. 2B (counterclockwise direction in the figure). Started.

When the phase of the AC voltage applied to both excitation members 2a and 2b was reversed, the rotating body 34 started to rotate in the opposite direction (clockwise in the figure). Although illustration of the object to be moved is omitted in FIG. 3, if the object to be moved is placed on the rotating body 34, the object to be moved is rotated rightward or leftward in the drawing as the rotating body 34 rotates. Can be moved to.

According to the second embodiment, since the rotating body 34 is rotated by the vibrating member 1, there is flexibility in selecting the shape and material of the object to be moved. For example, any shape such as a columnar object or a columnar object can be selected. You can also move things.
Further, it becomes possible to move even an elastic body, wood, or the like that absorbs vibration.

Further, since the vibrating member 1 is brought into contact with only the rotating body 34, the durability of the vibrating member 1 can be enhanced by selecting the material of the rotating body 34.

[0034]

According to the present invention, it is possible to obtain an ultrasonic moving device having a simple structure and capable of being used for a long period of time.

[Brief description of drawings]

FIG. 1 is a perspective view showing a vibrating member used in an embodiment of the present invention.

FIG. 2 is a plan view (a) and a front view (b) of the ultrasonic moving device according to the first embodiment of the present invention.

FIG. 3 is a plan view (a) and a front view (b) of an ultrasonic wave moving device according to a second embodiment of the present invention.

FIG. 4 is a perspective view showing a structure of a conventional vibrator.

FIG. 5 is a perspective view showing a structure of a conventional vibrator.

FIG. 6 is a perspective view showing a structure of a conventional vibrator.

FIG. 7 is a diagram showing an example of a conventional ultrasonic motor.

[Explanation of symbols]

 1 ·· Vibration member 1a, 1b · · Female screw 2a, 2b · · Excitation member 20 · · Base 22a, 22b · · Supporting device 23a, 23b · · Leaf spring 24 · · Moving object 25a, 25b · · Roller Vehicles 26a, 26b ··· Shaft support member 34 · · Rotating body 36 · · Support frame 39 · · Shaft support holes 41, 51, 61, 71a, 71b · · Drive member 42, 52, 72 · · Vibration member 63 · · Electrode 73 ・ ・ Fixed stand

Claims (5)

[Claims] 1. An ultrasonic moving device for exciting ultrasonic vibration on a rod-shaped or cylindrical vibrating member and bringing a moving object into contact with the vibrating member to obtain a driving force. At least two excitation members that oscillate in the normal direction and one end of which is in a free state are arranged, and vibrations in different directions are generated in the long side direction of each of the excitation members to generate a constant direction on the side surface of the vibration member. An ultrasonic wave moving device characterized by generating a driving force of. 2. An object to be moved is placed on an upper part of the vibrating member, and the object to be moved has a longitudinal direction perpendicular to the longitudinal direction of the vibrating member on the vibrating member. The ultrasonic moving device according to claim 1, further comprising a rotatable roller wheel that is mounted on the vehicle and is movable only in the longitudinal direction of the moving object. 3. A vibrating member having a rod shape or a tubular shape, two or more exciting members capable of vibrating substantially in the surface normal direction of the vibrating member, and contacting the vibrating member excited by the exciting member. An ultrasonic moving device comprising a rotating body rotatably supported. 4. The ultrasonic moving device according to claim 3, wherein a moving object is placed on the rotating body. 5. The ultrasonic moving device according to claim 3, wherein one end of the exciting member is in a free state.