JPH07211052A - Magnetic disk analysis mechanism - Google Patents

Magnetic disk analysis mechanism

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Publication number
JPH07211052A
JPH07211052A JP340194A JP340194A JPH07211052A JP H07211052 A JPH07211052 A JP H07211052A JP 340194 A JP340194 A JP 340194A JP 340194 A JP340194 A JP 340194A JP H07211052 A JPH07211052 A JP H07211052A
Authority
JP
Japan
Prior art keywords
gas
magnetic disk
collector
disk
mechanism according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP340194A
Other languages
Japanese (ja)
Inventor
Hitoshi Inoue
均 井上
Yoshio Nakagawa
宜雄 中川
Kazuaki Mizogami
員章 溝上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Tokyo Electronics Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tokyo Electronics Co Ltd, Hitachi Ltd filed Critical Hitachi Tokyo Electronics Co Ltd
Priority to JP340194A priority Critical patent/JPH07211052A/en
Publication of JPH07211052A publication Critical patent/JPH07211052A/en
Pending legal-status Critical Current

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  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To take in and analyse a gas component generated by sliding from the surface of a magnetic disk in the atmosphere with high efficiency. CONSTITUTION:A gas collector 1 with a gas introduction port 2 and gas extraction port 3 are put on a magnetic disk 4. A carrier gas is supplied from a bomb 6 and a gas component generated by sliding and the like between a disk surface and a magnetic head to analyse it. An experiment can be made with a disk being rotated by leaving spaces between the collector and the disk, and when the space is made sufficiently narrow, the loss of the generated gas can be reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【産業上の利用分野】本発明は磁気ディスク装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk device.

【従来の技術】磁気ディスク装置の大容量化には、磁気
ヘッド/磁気ディスク間のスペーシングの狭小化が不可
欠である。ところが、それに伴ってヘッド/ディスク間
の接触、摩擦の頻度が増大し、信頼性の維持上重大な問
題になっている。このような状況下で信頼性を維持する
ためには、ヘッド/ディスクの界面で起こっている現象
を正確に把握することが必要である。現象把握のための
有効な手段の一つとして、ヘッド/ディスク界面で発生
するガスの分析が注目されている。例えば、IEEE
Transactions on Magnetics,vol29,p.253
(1993)には、真空中での摺動によってディスク表
面から発生する潤滑剤分解ガスが質量分析計によって捕
らえられたことが報告されている。
2. Description of the Related Art In order to increase the capacity of a magnetic disk device, it is essential to narrow the spacing between the magnetic head and the magnetic disk. However, the frequency of contact and friction between the head and the disk increases accordingly, which is a serious problem in maintaining reliability. In order to maintain reliability under such circumstances, it is necessary to accurately grasp the phenomenon occurring at the head / disk interface. As one of the effective means for understanding the phenomenon, the analysis of the gas generated at the head / disk interface has been attracting attention. For example, IEEE
Transactions on Magnetics, vol 29, p. 253
(1993) reported that the lubricant decomposition gas generated from the disk surface by sliding in a vacuum was captured by a mass spectrometer.

【発明が解決しようとする課題】上記従来技術では、摺
動は真空中で行なわれている。しかし、現実の磁気ディ
スクは大気中で稼動するものであり、大気中で分析でき
なければ、得られた情報の有用性に限界がある。ところ
が大気中では、ディスク表面から揮発したガス、あるい
は摺動によって発生したガスは空気中に拡散して稀釈さ
れてしまい、高感度の分析が困難である。またディスク
の周囲を容積の小さい容器で覆ってしまえば稀釈の程度
は低く抑えられるが、そのためには専用の実験設備が必
要となり、汎用性、簡便性に欠ける。このような状況下
で、通常の磁気ディスク装置に容易に適用でき、かつ高
効率に発生ガスを採取できる機構を開発することが急務
であった。
In the above prior art, sliding is performed in vacuum. However, the actual magnetic disk operates in the atmosphere, and the usefulness of the obtained information is limited if it cannot be analyzed in the atmosphere. However, in the atmosphere, the gas volatilized from the disk surface or the gas generated by sliding is diffused into the air and diluted, which makes it difficult to perform a highly sensitive analysis. Moreover, if the circumference of the disk is covered with a container with a small volume, the degree of dilution can be suppressed to a low level, but for that purpose, dedicated experimental equipment is required, which lacks versatility and convenience. Under such circumstances, there has been an urgent need to develop a mechanism that can be easily applied to an ordinary magnetic disk device and that can efficiently collect generated gas.

【課題を解決するための手段】上記目的を達成するため
に種々のガス採取方法を検討した結果、図1のごとくデ
ィスクの表面を覆うように箱型のガス捕集器をかぶせ、
その中にキャリアーガスとして窒素や空気を導入して発
生ガスを送り出す機構が有効であることが判明した。特
にディスク中央付近にキャリアーガスを送りこみ、ディ
スク周辺部から取り出す方式が効果が高い。このディス
クと捕集器とをさらに別の密閉できる容器内に設置すれ
ばガスを捕集する効率はより高くなる。ディスクの回転
を妨げないように、捕集器はディスクと直接接触しない
位置に設置する必要があるが、隙間からのガス漏れを減
らすためには間隔は1mm以下が望ましく、さらには
0.5mm以下が望ましい。また、捕集器の側面には磁
気ヘッド等を挿入するための窓を設けることもできる。
採取したガスを分析する手法としては、大気圧下で使用
でき、かつ高感度であることから、大気圧イオン化質量
分析計が最も適している。
As a result of studying various gas sampling methods for achieving the above object, as shown in FIG. 1, a box-shaped gas collector is covered so as to cover the surface of the disk,
It has been found that a mechanism in which nitrogen or air is introduced as a carrier gas and the generated gas is sent out is effective. Particularly effective is a method in which a carrier gas is sent near the center of the disk and taken out from the peripheral area of the disk. If the disc and the collector are installed in another container that can be sealed, the efficiency of collecting the gas becomes higher. The collector must be installed in a position where it does not come into direct contact with the disk so as not to hinder the rotation of the disk, but in order to reduce gas leakage from the gap, the interval should be 1 mm or less, and even 0.5 mm or less. Is desirable. Also, a window for inserting a magnetic head or the like can be provided on the side surface of the collector.
The atmospheric pressure ionization mass spectrometer is most suitable as a method for analyzing the collected gas because it can be used under atmospheric pressure and has high sensitivity.

【作用】箱型のガス捕集器でディスクの片面を覆う方式
は、通常のディスク駆動装置に大幅な改良を加えること
なく簡単に適用でき、しかも捕集器の内容積を小さくす
ることで高い捕集効率が容易に実現できる。さらにディ
スクとガス捕集器とを別の容器の中に密閉して二重構造
にすれば、一層捕集効率を高めることができる。ディス
ク表面から発生したガスは、そのままでは拡散によって
しか外部に出てこない。そこで、ガス捕集器にガス導入
口とガス採取口とを設けて、発生ガスを流し出すための
キャリアーガスを導入する。ガス導入口を捕集器の中央
部に、採取口を捕集器の周辺部に設けると、ディスクの
回転に伴って、キャリアーガスは中央から周辺に向かっ
て渦巻状に流れ、ディスク表面からの発生ガスを効率良
く拾って採取口に運ぶことができる。ディスクの回転を
妨げないように、捕集器とディスクとの間には一定の間
隔を開けることが必要である。例えば、図2に示したよ
うな形状のガス捕集器を用いた場合は、ガス捕集器下端
とディスクとの間隔を変えたときの捕集効率の変化は図
3のようになる。ディスク回転数が毎分100回転の時
に30%以上の捕集効率を得るには間隔は1mm以下、
50%以上の捕集効率を得るには0.5mm以下にしな
ければならないことがわかる。ガス捕集器には、磁気ヘ
ッドやその他の器具を挿入するための窓を設けることが
できる。窓を大きくし過ぎると捕集効率の低下を招く
が、実験的に検討したところ、図4のごとく、捕集器の
側面積に対する窓部の面積が10%程度まではあまり影
響がないことが判明した。ガス採取口から取りだしたガ
スは周知の種々の方法で分析可能であるが、特に大気圧
イオン化質量分析計は、大気圧下でのppbオーダーの微
量成分の分析に有効である。
The method of covering one side of the disk with a box-shaped gas collector can be easily applied without making a great improvement to the ordinary disk drive device, and is high by reducing the internal volume of the collector. Collection efficiency can be easily realized. Further, if the disk and the gas collector are sealed in another container to have a double structure, the collection efficiency can be further improved. The gas generated from the surface of the disk can only come out by diffusion as it is. Therefore, the gas collector is provided with a gas introduction port and a gas sampling port to introduce a carrier gas for flowing out the generated gas. If the gas inlet is provided in the central part of the collector and the sampling port is provided in the peripheral part of the collector, the carrier gas flows spirally from the center to the periphery as the disc rotates, The generated gas can be efficiently picked up and transported to the sampling port. It is necessary to have a certain distance between the collector and the disk so as not to disturb the rotation of the disk. For example, when the gas collector having the shape shown in FIG. 2 is used, the change in the collection efficiency when the distance between the lower end of the gas collector and the disk is changed is as shown in FIG. To obtain a collection efficiency of 30% or more when the disk rotation speed is 100 rpm, the interval is 1 mm or less,
It can be seen that in order to obtain a collection efficiency of 50% or more, it must be 0.5 mm or less. The gas collector can be provided with a window for inserting a magnetic head or other instrument. If the window is made too large, the collection efficiency is lowered, but as a result of an experimental study, it was found that there is not much influence up to about 10% of the window area with respect to the side area of the collector, as shown in FIG. found. The gas taken out from the gas sampling port can be analyzed by various well-known methods, and the atmospheric pressure ionization mass spectrometer is particularly effective for the analysis of trace components on the order of ppb under atmospheric pressure.

【実施例】以下に本発明の実施例を示す。 (実施例1)容積25リットルの密閉容器の中に、図2
のような形状のガス捕集器と、表面にフッ素系の潤滑剤
を塗布した直径5.25インチの薄膜磁気ディスクを設
置し、通常の薄膜磁気ヘッドを捕集器側面に設けた窓か
ら挿入して、毎分300回転の回転数で摺動実験を行な
った。捕集器のガス導入口から毎分1リットルの空気を
入れ、ガス採取口から取りだしたガスを大気圧イオン化
質量分析計にて分析した。分析結果を図5に示す。ヘッ
ドとディスクの摩擦力の変化に応じて二酸化炭素の発生
が、また連続的なフッ素系有機物の発生も認められる。
発生ガス量は二酸化炭素が数十ppb、フッ素系有機物が
数百pptのオーダーであった。 (実施例2)表面にフッ素系潤滑剤を塗布した直径5.
25インチの薄膜磁気ディスクに図2のような形状のガ
ス捕集器を取付け、毎分300回転の回転数でディスク
を回転させて、表面から揮発するガスを、実施例1と同
様にして分析した。磁気ヘッドによる摺動がないため二
酸化炭素の発生は見られなかったが、100ppt程度の
フッ素系有機物が検出された。捕集器の形状としては、
図2のような形の他に、図6〜図8のような形状にして
も良い。図2および図6は側壁に孔を開けてガス採取口
とする方式で、図7、図8は単にガス採取管を挿入した
形である。また、側壁の下端の断面形状としても、図7
のような平坦型や、図2のように段差を設けて捕集効率
を高めたもの、さらには図6、図8のようにディスクの
外周を抱えこむ形のものなどが使用できる。 (実施例3)図2のような形状のガス捕集器をディスク
にかぶせ、容積3リットルの容器内に密閉した。ガス導
入口からキャリアーガスと共に濃度1ppmの二酸化炭素
を送りこみ、大気圧イオン化質量分析計で分析した。そ
の結果を図9に示す。二酸化炭素導入直後から信号が急
激に立上り、1〜2分で、定量分析が可能な飽和点に達
している。 (比較例)ガス捕集器を付けないで、ガス導入管とガス
採取管をディスクの上1〜2cmに固定して、容積3リ
ットルの容器内に密閉した。ガス導入管からキャリアー
ガスと共に濃度1ppmの二酸化炭素を送りこみ、大気
圧イオン化質量分析計で分析した。その結果を図10に
示す。検出される二酸化炭素量は徐々に増加し、25分
が経過してもまだ飽和に達していない。以上の実施例に
おいては、分析手法として大気圧イオン化質量分析計を
用いているが、その他にガスクロマトグラフ−質量分析
計や、各種クロマトグラフィー、原子吸光分析、などが
適用できる。
EXAMPLES Examples of the present invention will be shown below. (Example 1) FIG.
Install a gas collector with a shape like the one below, and a thin film magnetic disk with a diameter of 5.25 inches whose surface is coated with a fluorine-based lubricant. Insert a normal thin film magnetic head through the window on the side of the collector. Then, a sliding experiment was conducted at a rotation speed of 300 rpm. Air of 1 liter / min was introduced from the gas inlet of the collector, and the gas taken out from the gas inlet was analyzed by an atmospheric pressure ionization mass spectrometer. The analysis result is shown in FIG. Carbon dioxide is generated according to the change in the frictional force between the head and the disk, and continuous fluorine-based organic substances are also generated.
The amount of gas generated was on the order of tens of ppb for carbon dioxide and hundreds of ppt for organic fluorine compounds. (Example 2) Diameter with a fluorine-based lubricant applied to the surface 5.
A gas collector having a shape as shown in FIG. 2 was attached to a 25-inch thin film magnetic disk, the disk was rotated at a rotation speed of 300 rpm, and gas volatilized from the surface was analyzed in the same manner as in Example 1. did. Since there was no sliding by the magnetic head, generation of carbon dioxide was not seen, but about 100 ppt of fluorine-based organic matter was detected. The shape of the collector is
In addition to the shape shown in FIG. 2, the shape shown in FIGS. 2 and 6 show a method of forming a gas sampling port by forming a hole in the side wall, and FIGS. 7 and 8 show a shape in which a gas sampling tube is simply inserted. In addition, the sectional shape of the lower end of the side wall is also shown in FIG.
The flat type as described above, the type having a stepped portion as shown in FIG. 2 to improve the collecting efficiency, and the type having the outer periphery of the disk held as shown in FIGS. 6 and 8 can be used. Example 3 A disk was covered with a gas collector having a shape as shown in FIG. 2, and the container was sealed in a container having a volume of 3 liters. Carbon dioxide having a concentration of 1 ppm was sent together with a carrier gas from a gas inlet and analyzed by an atmospheric pressure ionization mass spectrometer. The result is shown in FIG. The signal sharply rises immediately after the introduction of carbon dioxide, and reaches the saturation point at which quantitative analysis can be performed in 1 to 2 minutes. (Comparative Example) A gas inlet tube and a gas sampling tube were fixed to 1 to 2 cm above the disc without a gas collector, and the container was sealed in a container having a volume of 3 liters. Carbon dioxide having a concentration of 1 ppm was sent together with a carrier gas from a gas introduction tube and analyzed by an atmospheric pressure ionization mass spectrometer. The result is shown in FIG. The amount of carbon dioxide detected gradually increases and has not yet reached saturation after 25 minutes. In the above examples, an atmospheric pressure ionization mass spectrometer is used as an analysis method, but a gas chromatograph-mass spectrometer, various chromatographies, atomic absorption analysis and the like can be applied.

【発明の効果】以上のように本発明によれば、通常の磁
気ディスク装置に大幅な改良を加えることなく、大気圧
下で回転する磁気ディスク表面で、摺動、その他によっ
て発生する気体成分を効率良く捕集して分析することが
可能になる。
As described above, according to the present invention, a gas component generated by sliding or the like on the surface of a magnetic disk rotating under atmospheric pressure can be removed without making a great improvement to an ordinary magnetic disk device. It enables efficient collection and analysis.

【図面の簡単な説明】[Brief description of drawings]

【図1】ガス捕集機構の説明図。FIG. 1 is an explanatory view of a gas collection mechanism.

【図2】ガス捕集器の例。FIG. 2 shows an example of a gas collector.

【図3】ガス捕集器とディスクの間隔による捕集効率の
変化。
FIG. 3 shows changes in collection efficiency depending on the distance between the gas collector and the disk.

【図4】ガス捕集器の窓部面積率による捕集効率の変
化。
FIG. 4 shows changes in collection efficiency depending on the area ratio of the window of the gas collector.

【図5】本発明を用いた分析例。FIG. 5 is an example of analysis using the present invention.

【図6】ガス捕集器の形状の例1。FIG. 6 is a first example of the shape of the gas collector.

【図7】ガス捕集器の形状の例2。FIG. 7 is a second example of the shape of the gas collector.

【図8】ガス捕集器の形状の例3。FIG. 8 is a third example of the shape of the gas collector.

【図9】ガス捕集器の応答性を示す図。FIG. 9 is a diagram showing the response of the gas collector.

【図10】捕集器がない場合のガスの検出。FIG. 10: Detection of gas without collector.

【符号の説明】[Explanation of symbols]

1…ガス捕集器、 2…ガス導入口、 3…ガス採取口、 4…磁気ディスク、 5…磁気ディスクのスピンドル、 6…キャリアーガスのボンベ、 7…分析装置。 DESCRIPTION OF SYMBOLS 1 ... Gas collector, 2 ... Gas inlet, 3 ... Gas sampling port, 4 ... Magnetic disk, 5 ... Magnetic disk spindle, 6 ... Carrier gas cylinder, 7 ... Analyzer.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 溝上 員章 東京都青梅市藤橋3丁目3番地2 日立東 京エレクトロニクス株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor, Mr. Tomoaki Mizoue 3-3, Fujibashi, Ome-shi, Tokyo 2 Hitachi Hitachi Electronics Co., Ltd.

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】任意の圧力下で回転または停止している磁
気ディスクの片面を、ガス導入口とガス採取口とを具備
し、側面と一つの底面からなる箱型の形状のガス捕集器
で覆って、該磁気ディスク表面から発生する気体成分を
捕集する機構において、該ガス捕集器が、該磁気ディス
クと所定の間隔をあけて設置され、該ガス導入口からキ
ャリアーガスを流し込み、該磁気ディスク表面から発生
する気体成分をキャリアーガスと共に該ガス採取口から
採り出して分析することを特徴とする磁気ディスクの分
析機構。
1. A box-shaped gas collector having a gas inlet and a gas outlet on one side of a magnetic disk that is rotating or stopped under an arbitrary pressure and has a side surface and one bottom surface. In a mechanism for collecting gas components generated from the surface of the magnetic disk, the gas collector is installed at a predetermined distance from the magnetic disk, and a carrier gas is poured from the gas inlet, An analyzing mechanism for a magnetic disk, wherein a gas component generated from the surface of the magnetic disk is taken out from the gas sampling port together with a carrier gas for analysis.
【請求項2】上記磁気ディスクおよびガス捕集器を、別
の密閉可能な容器の中に設置した、請求項1記載の磁気
ディスクの分析機構。
2. The magnetic disk analyzing mechanism according to claim 1, wherein the magnetic disk and the gas collector are installed in another container that can be sealed.
【請求項3】上記ガス捕集器のガス導入口を捕集器中央
部に設け、かつガス採取口を捕集器周辺部に設けた、請
求項1記載の磁気ディスクの分析機構。
3. The magnetic disk analyzing mechanism according to claim 1, wherein the gas inlet of the gas collector is provided in the central portion of the collector, and the gas sampling opening is provided in the peripheral portion of the collector.
【請求項4】上記ガス捕集器と上記磁気ディスクとの間
隔が1mm以下である、請求項1記載の磁気ディスクの
分析機構。
4. The magnetic disk analysis mechanism according to claim 1, wherein the distance between the gas collector and the magnetic disk is 1 mm or less.
【請求項5】上記ガス捕集器と上記磁気ディスクとの間
隔が0.5mm以下である、請求項1記載の磁気ディス
クの分析機構。
5. The magnetic disk analyzing mechanism according to claim 1, wherein the distance between the gas collector and the magnetic disk is 0.5 mm or less.
【請求項6】上記ガス捕集器に磁気ヘッド等が挿入でき
る窓を設けた、請求項1記載の磁気ディスクの分析機
構。
6. A magnetic disk analyzing mechanism according to claim 1, wherein said gas collector is provided with a window into which a magnetic head or the like can be inserted.
【請求項7】上記ガス捕集器によって採取されたガスが
大気圧イオン化質量分析計で分析されることを特徴とす
る、請求項1〜6記載の磁気ディスクの分析機構。
7. The magnetic disk analysis mechanism according to claim 1, wherein the gas collected by the gas collector is analyzed by an atmospheric pressure ionization mass spectrometer.
JP340194A 1994-01-18 1994-01-18 Magnetic disk analysis mechanism Pending JPH07211052A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP340194A JPH07211052A (en) 1994-01-18 1994-01-18 Magnetic disk analysis mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP340194A JPH07211052A (en) 1994-01-18 1994-01-18 Magnetic disk analysis mechanism

Publications (1)

Publication Number Publication Date
JPH07211052A true JPH07211052A (en) 1995-08-11

Family

ID=11556359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP340194A Pending JPH07211052A (en) 1994-01-18 1994-01-18 Magnetic disk analysis mechanism

Country Status (1)

Country Link
JP (1) JPH07211052A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6736872B2 (en) 2001-10-30 2004-05-18 Kabushiki Kaisha Toshiba Gas collecting method and gas collecting apparatus
KR101137651B1 (en) * 2009-07-17 2012-04-19 한국건설기술연구원 Apparatus and Method for Estimating Solidation of Asbestos

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6736872B2 (en) 2001-10-30 2004-05-18 Kabushiki Kaisha Toshiba Gas collecting method and gas collecting apparatus
KR101137651B1 (en) * 2009-07-17 2012-04-19 한국건설기술연구원 Apparatus and Method for Estimating Solidation of Asbestos

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