JPH0720724Y2 - XY table position detector - Google Patents

Description

[Detailed Description of the Invention] [Industrial field of application] According to the present invention, when the positioning range of the XY table is limited to a predetermined circular area, whether the positioning position of the XY table is within the circular area or not. The present invention relates to an XY table position detection device that detects whether or not it is.

[Conventional technology]

4 (a) and 4 (b) are explanatory views showing an example of a conventional XY table position detecting device of this type, FIG. 4 (a) is a side view, and FIG. 4 (b) is a plan view.

In the figure, 1 is an XY table, 1a is an X-axis moving table, 1b is a Y-axis moving table, 12 is a sensing plate having a punched hole 13 corresponding to a circular region of a positioning range of the XY table 1, 14
Is an arm, and 15 is a transmissive sensor attached to the tip of the arm 14.

The sensing plate 12 is fixed to the Y-axis moving table 1b, and the arm 14 is
When the positioning position of the XY table 1 is at the center of a predetermined circular area, the transmission sensor 15 and the hole 13 are fixed at a position where they overlap.

While the positioning position of the XY table 1 is within the predetermined circular area, the transmissive sensor 15 is sensitive through the hole 13 of the sensing plate 12, and when the positioning position of the XY table 1 is out of the predetermined circular area, It is detected that the transmission type sensor 15 is blocked by the sensing plate 12 and becomes insensitive and the positioning position of the XY table 1 deviates from a predetermined circular area.

[Problems to be solved by the device]

The conventional XY table position detecting device having the above structure has the following drawbacks.

(B) When the sensing plate 12 becomes large, a large dead space is required for the sensing plate 12 to move.

(B) When changing the positioning range, it is necessary to replace the sensing plate 12 of the punched hole 13 corresponding to the range, but it takes time and effort to adjust the centering.

(C) While the positioning position of the XY table is within the predetermined circular area, the positioning position of the XY table cannot be recognized at all.

The present invention has been made to solve the above drawbacks,
A device that can easily detect the displacement from the center of the circular area even when the positioning position is moving within a predetermined circle area, does not require a large dead space, and can easily respond to changes in the positioning range. The purpose is to provide.

[Means for Solving the Problems]

The XY table position detecting device of the present invention is the X-axis of the XY table.
One end of the wire is connected to the tip of the arm fixed to the Y-axis moving table which is superposed on the axis moving table, and when the positioning position of the XY table is at the center of a predetermined circular area, one end of the wire of the arm is connected. The pole is fixed on the base plane where the XY table is installed at a position where the hole at the center of the upper surface overlaps with the above position, and the wire is pulled out from the side surface through the hole at the center of the upper surface of the pole and spread in parallel with the base plane. Position the XY table by connecting the other end of the expanded wire to a slider that slides in a radial direction of a circle centered on the pole on the base plane connected to a hook fixed to the base plane via a spring. The displacement of the position from the center of the circular area is transferred to the linear displacement of the slider, and the linear displacement of the slider is detected by a photo sensor to detect the XY table. Position of the positioning of the Le is that a configuration for detecting whether the predetermined circular region.

〔Example〕

1 (a), (b), 2 (a), (b) are explanatory views showing an embodiment of the present invention, FIG. 1 (a) is a side view, and FIG. 1 (b) is a plan view. is there.

In the figure, 1, 1a and 1b are the same or corresponding to the same reference numerals in FIGS. 4 (a) and 4 (b), 2 is an arm fixed to the Y-axis moving table 1b, 3 is a wire, 4 is a pole, Reference numeral 5 is a base, 6 is a hook fixed to the plane of the base 5, 7 is a spring, 8 is a slider, and 9 is a photo sensor.

When the wire 3 whose one end is connected to the tip of the arm 2 fixed to the Y-axis moving table 1b of the XY table 1 installed on the plane of the base 5 has the positioning position of the XY table 1 at the center of a predetermined circular area, the arm 2 The wire 3 extends through the hole in the center of the upper surface of the pole 4 fixed on the plane of the base 5 at a position where the hole in the center of the upper surface overlaps the position where one end of the wire 3 is connected, and extends parallel to the plane of the base 5 and the other end. Connect a spring 7 to the hook 6 and connect it to a slider 8 that slides in the radial direction of a circle centered on the pole 4 [FIGS. 1 (a) and 1 (b) show this state].

When the positioning position of the XY table 1 moves, the arm 2
Moves, the wire 3 is pulled, and the slider 8 moves [FIGS. 2 (a) and 2 (b) show this state].

FIG. 3 is an explanatory view showing the operation of the embodiment shown in FIGS. 1 and 2, and the reference numerals are the same as those shown in FIGS. 1 and 2.

The arm 2 moves according to the movement of the positioning position of the XY table 1, and the distance (l ₁ or l ₂ ) corresponding to the displacement in the radial direction from the center of the predetermined circular area of the positioning position of the XY table 1 Only, the slider 8 is pulled by the wire 3 and moves against the spring 7.

The displacement of the slider 8 is detected by a photo sensor 9 attached on the moving line of the slider 8 to detect whether or not the positioning position of the XY table 1 is within a predetermined circular area.

By configuring the photosensor 9 to slide on a straight line, it is possible to easily cope with a change in the limited range of positioning of the XY table. By mounting a plurality of photosensors 9, the positioning position of the XY table can be changed. The displacement of the positioning position of the XY table from the center of the circular area can be detected even while it is within the predetermined circular area.

[Effect of device]

As described above, according to the present invention, the dead space is reduced, and even when changing the positioning range of the XY table, there is no need for adjustment and the position of the XY table is within a predetermined circle. There is an advantage that the displacement of the position from the center of the circular region can be detected even while the position is within the region.

[Brief description of drawings]

1 (a), 1 (b), 2 (a) and 2 (b) are explanatory views showing an embodiment of the present invention, and FIG. 3 shows the operation of the embodiment of FIGS. 4A and 4B are explanatory views showing an example of a conventional XY table position detecting device of this type. 1 ... XY table, 1a ... X axis movement table, 1b ... Y
Axis movement table, 2 ... Arm, 3 ... Wire, 4 ...
Pole, 5 ... Base, 6 ... Hook, 7 ... Spring, 8
...... Slider, 9 ... Photo sensor, the same reference numerals in the drawings indicate the same or corresponding ones.

Claims (1)

[Scope of utility model registration request] 1. An XY table position detecting device for detecting whether or not the positioning position of the XY table is within the circular area when the positioning range of the XY table is limited to a predetermined circular area. One end of a wire is connected to the tip of an arm fixed to a Y-axis moving table which is superposed on the X-axis moving table of the XY table, and when the positioning position of the XY table is at the center of the circular area, the wire of the arm is moved. Fix the pole on the base plane where the XY table is installed at a position where the hole at the center of the upper surface overlaps the position where one end is connected, and pull out the wire from the side through the hole at the center of the upper surface of the pole and make it parallel to the base plane. In the radial direction of the circle centered on the pole on the base plane in which the other end of the expanded and stretched wire is connected to a hook fixed to the base plane via a spring. Connect to the id to the slider, the
The displacement of the positioning position of the XY table from the center of the circular area is transferred to the linear displacement of the slider, and the linear displacement of the slider is detected by a photosensor, and the positioning position of the XY table is the circular position. An XY table position detector that detects whether or not it is within the area.