JPH0720210A - Thermal impact testing device - Google Patents
Thermal impact testing deviceInfo
- Publication number
- JPH0720210A JPH0720210A JP5151805A JP15180593A JPH0720210A JP H0720210 A JPH0720210 A JP H0720210A JP 5151805 A JP5151805 A JP 5151805A JP 15180593 A JP15180593 A JP 15180593A JP H0720210 A JPH0720210 A JP H0720210A
- Authority
- JP
- Japan
- Prior art keywords
- sample chamber
- sample
- temperature tank
- damper
- individually
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、熱衝撃試験装置に関
し、特に表面積及び熱容量の大きな製品、例えば平面形
表示装置等を評価する熱衝撃試験装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermal shock test device, and more particularly to a thermal shock test device for evaluating a product having a large surface area and heat capacity, such as a flat panel display device.
【０００２】[0002]
【従来の技術】従来の熱衝撃試験装置１は、図３
（ａ），（ｂ）に示すように、試料室５内の温度を高温
と低温とに切替えて連続的に実現するための高温槽３，
低温槽４と、試験が開始されていない場合には、常温
（約２５℃）に保たれる試料室５と、試料室５内に高温
槽３と低温槽４とを切り替えて連通させる高温槽ダンパ
ー６，低温槽ダンパー７と、試験条件，ダンパー開閉等
を制御する装置制御部２とから構成されている（例え
ば、特開昭６２−２７４２７３号公報参照）。2. Description of the Related Art A conventional thermal shock test apparatus 1 is shown in FIG.
As shown in (a) and (b), a high temperature tank 3 for switching the temperature in the sample chamber 5 between a high temperature and a low temperature and continuously realizing the temperature.
A low temperature tank 4, a sample chamber 5 which is kept at room temperature (about 25 ° C.) when the test is not started, and a high temperature tank which switches the high temperature tank 3 and the low temperature tank 4 to communicate with each other in the sample chamber 5. The damper 6 and the low temperature tank damper 7 and the device control unit 2 for controlling the test conditions, damper opening and closing, etc. (see, for example, Japanese Patent Laid-Open No. 62-274273).
【０００３】試料室５の温度を低温にする場合には、高
温槽ダンパー６を閉じ、低温槽ダンパー７を開く。低温
槽ダンパー７が開くと、低温槽４内の冷気がダンパー７
を介して試料室５内に循環し、試料室５内の温度を降温
させる。When lowering the temperature of the sample chamber 5, the high temperature tank damper 6 is closed and the low temperature tank damper 7 is opened. When the low temperature tank damper 7 is opened, the cool air in the low temperature tank 4 is dampened by the damper 7.
It circulates in the sample chamber 5 via the to lower the temperature in the sample chamber 5.
【０００４】また、試料室５内の温度を高温にする場合
には、低温槽ダンパー７を閉じ、高温槽ダンパー６を開
く。高温槽ダンパー６が開くと、高温槽３の暖気がダン
パー６を介して試料室５内に循環し、試料室５内の温度
を上昇させる。To raise the temperature in the sample chamber 5 to a high temperature, the low temperature tank damper 7 is closed and the high temperature tank damper 6 is opened. When the high temperature tank damper 6 is opened, the warm air in the high temperature tank 3 circulates in the sample chamber 5 through the damper 6 and raises the temperature in the sample chamber 5.
【０００５】以上のような動作を規定回数繰り返して、
試料室５内の試料に熱による衝撃を加えて該試料の試験
を行っていた。The above operation is repeated a prescribed number of times,
The sample in the sample chamber 5 was subjected to a thermal shock to test the sample.
【０００６】[0006]
【発明が解決しようとする課題】従来の熱衝撃試験装置
は、暖気又は冷気を試料室内に循環させるものであるか
ら、試料室内での熱容量が小さく制限されてしまうた
め、小さな熱容量の製品、例えば半導体素子等の評価用
として使用されていた。Since the conventional thermal shock test device circulates warm air or cold air in the sample chamber, the heat capacity in the sample chamber is limited to a small value. It was used for evaluation of semiconductor devices and the like.
【０００７】従って、表面積が大きく、熱容量の大きく
製品を従来の熱衝撃試験装置で評価した場合、製品表面
の温度バラツキが激しくなり、図４に示すように試料室
の温度を６０℃から−２０℃に降下させて、−２０℃に
安定させるのに５〜１０分程度を要し、逆に−２０℃か
ら６０℃に昇温させて、６０℃に安定させるのに２〜３
分程度を要し、温度プロファイルよりも試料室及び試料
の温度安定化時間が長くなってしまうという問題点があ
る。Therefore, when a product having a large surface area and a large heat capacity is evaluated by the conventional thermal shock test device, the temperature variation on the product surface becomes severe, and the temperature of the sample chamber is changed from 60 ° C. to −20 as shown in FIG. It takes about 5 to 10 minutes to lower the temperature to -20 ° C and stabilize to -20 ° C, and conversely, to raise the temperature from -20 ° C to 60 ° C and stabilize to 60 ° C in 2-3.
It takes about a minute and the temperature stabilization time of the sample chamber and the sample becomes longer than the temperature profile.
【０００８】本発明の目的は、試料室内の温度を規定値
に昇温又は降温させるのに要する時間を短縮するように
した熱衝撃試験装置を提供することにある。An object of the present invention is to provide a thermal shock test device which is designed to shorten the time required to raise or lower the temperature in the sample chamber to a specified value.
【０００９】[0009]
【課題を解決するための手段】前記目的を達成するた
め、本発明に係る熱衝撃試験装置は、高温槽と、低温槽
と、ダンパー制御部と、予熱体と、予冷体と、駆動部と
を有し、試料室内の試料に、昇温と降温の繰り返しによ
る熱衝撃を加えて、試料の特性試験を行う熱衝撃試験装
置であって、高温槽と低温槽は、ダンパーとシャッター
を介して試料室にそれぞれ個別に接続され、高温槽は、
暖気の供給源であり、低温槽は、冷気の供給源であり、
ダンパーは、高温槽，低温槽と試料室とを個別に連通さ
せて、各槽と試料室との間に、暖気，冷気の循環通路を
個別に形成するものであり、シャッターは、高温槽，低
温槽と試料室とを個別に連通させて、各槽と試料室との
間に、予熱体，予冷体の移動通路を個別に形成するもの
であり、ダンパー制御部は、高温槽のダンパーと低温槽
のダンパーとの開閉制御を個別に行い、各槽と試料室と
の間の循環通路を個別に連通又は遮断するものであり、
予熱体は、高温槽内に格納されて、暖気により予熱さ
れ、シャッターが開かれた高温槽と試料室の間に移動通
路を通して移動するものであり、予冷体は、低温槽内に
格納されて、冷気により予冷され、シャッターが開かれ
た低温槽と試料室の間に移動通路を通して移動するもの
であり、駆動部は、各槽毎に独立させてダンパーの開閉
と同期してシャッターを開き、移動通路を通して予熱体
又は予冷体を試料室内に搬入し、試料室の雰囲気中に晒
した後の一定時間経過後に、予熱体又は予冷体を各槽内
に個別に搬出し、シャッターを閉じるものである。To achieve the above object, a thermal shock test apparatus according to the present invention comprises a high temperature tank, a low temperature tank, a damper control section, a preheating element, a precooling element, and a driving section. A thermal shock test device for subjecting a sample in a sample chamber to a thermal shock by repeatedly raising and lowering the temperature to perform a characteristic test of the sample, wherein the high temperature tank and the low temperature tank are connected via a damper and a shutter. The high temperature baths are connected to the sample chambers individually.
The source of warm air, the cold bath is the source of cold air,
The damper connects the high temperature tank, the low temperature tank and the sample chamber individually to form a circulation path for warm air and cold air between each tank and the sample chamber, and the shutter is a high temperature tank, The low temperature tank and the sample chamber are individually communicated with each other, and the passages for moving the preheating body and the precooling body are individually formed between the respective tanks and the sample chamber. The opening and closing control of the damper of the low temperature tank is performed individually, and the circulation passage between each tank and the sample chamber is individually connected or disconnected.
The preheater is stored in the high temperature tank, preheated by warm air, and moves through the moving passage between the high temperature tank with the shutter opened and the sample chamber.The precooler is stored in the low temperature tank. , Which is pre-cooled by cold air and moves through a moving passage between a low temperature tank where the shutter is opened and the sample chamber, and the drive unit opens the shutter in synchronization with the opening and closing of the damper independently for each tank, The preheater or precooler is carried into the sample chamber through the transfer passage, and after exposure to the atmosphere of the sample chamber for a certain period of time, the preheater or precooler is individually carried into each tank and the shutter is closed. is there.
【００１０】また、予熱体と予冷体とは、底板と中空状
フィンとを有し、中空状フィンは、一端面が開放された
中空体であり、その内側に試料収納用の空間が確保さ
れ、底板の外周縁から起立し、その周面が試料室の内側
面と向き合うものである。Further, the preheating body and the precooling body have a bottom plate and hollow fins, and the hollow fins are hollow bodies whose one end surface is open, and a space for sample storage is secured inside them. , Stands up from the outer peripheral edge of the bottom plate, and its peripheral surface faces the inner side surface of the sample chamber.
【００１１】また、中空状フィンの試料収納用空間は、
各試料毎に個別に収納する複数の収納部に仕切フィンに
より仕切られ、各収納部をなすフィンは、試料の端面と
向き合うものである。Further, the sample storage space of the hollow fin is
The fins are partitioned by a partition fin into a plurality of storage units that individually store each sample, and the fins that form each storage unit face the end surface of the sample.
【００１２】[0012]
【作用】試料室に送入された暖気又は冷気による昇温又
は降温作用を、予熱体又は予冷体の熱容量による昇温又
は降温作用にて補強し、試料室温の急激な温度変化を実
現する。The function of raising or lowering the temperature by the warm air or the cool air sent into the sample chamber is reinforced by the action of raising or lowering the heat capacity of the preheater or the precooler to realize a rapid temperature change of the room temperature of the sample.
【００１３】[0013]
【実施例】次に本発明について図面を参照して説明す
る。The present invention will be described below with reference to the drawings.
【００１４】（実施例１）図１（ａ）は、本発明の実施
例１を示す装置正面断面図、（ｂ）は、図１（ａ）のＡ
−Ａ線断面図である。図１（ａ），（ｂ）において、本
発明の熱衝撃試験装置１は、高温，低温の両温度をそれ
ぞれ連続的に実現するための高温槽３，低温槽４と、試
験が開始されていない場合には、常温（約２５℃）に保
たれる試料室５と、試料室５の温度を試験時間により、
高温，低温に切り替える高温槽ダンパー６，低温槽ダン
パー７と、高温槽ダンパー６，低温槽ダンパー７と連動
して開閉されるシャッター９と、シャッター９の開閉に
より、高，低温槽３，４から試料室５に独立して出入さ
れる熱容量の大きな予熱体８ａ，予冷体８ｂと、ダンパ
ー６，７を選択的に切替えて開閉制御するダンパー制御
部２ａと、シャッター９を開いて予熱体８ａと予冷体８
ｂとを選択的に切替えて試料室５に出入れする駆動部２
ｂとを有している。(Embodiment 1) FIG. 1 (a) is a front sectional view of an apparatus showing Embodiment 1 of the present invention, and FIG. 1 (b) is an A of FIG. 1 (a).
FIG. 1 (a) and 1 (b), the thermal shock test apparatus 1 of the present invention has a high temperature tank 3 and a low temperature tank 4 for continuously realizing both high temperature and low temperature, and a test has been started. If not, the sample chamber 5 kept at room temperature (about 25 ° C) and the temperature of the sample chamber 5 are
High temperature tank damper 6, low temperature tank damper 7 that switches between high temperature and low temperature, shutter 9 that opens and closes in conjunction with high temperature tank damper 6, low temperature tank damper 7, and high and low temperature tanks 3 and 4 by opening and closing shutter 9. A preheater 8a and a precooler 8b having a large heat capacity that are independently put in and taken out of the sample chamber 5, a damper control unit 2a that selectively opens and closes the dampers 6 and 7 to control opening and closing, and a preheater 8a that opens the shutter 9. Pre-cooled body 8
Drive unit 2 for selectively switching between b and b to move in and out of the sample chamber 5.
b.
【００１５】予熱体８ａと予冷体８ｂは、底板８1と中
空状フィン８2とを有している。中空状フィン８2は、上
端面が開放された中空体であり、その内側に試料収納用
の空間が確保され、底板８1の外周縁から起立し、その
周面が試料室５の内側面と向き合うようになっている。The preheating body 8a and the precooling body 8b have a bottom plate 8 1 and hollow fins 8 2 . The hollow fin 8 2 is a hollow body having an open upper end surface, a space for storing a sample is secured inside, and the hollow fin 8 2 stands up from the outer peripheral edge of the bottom plate 8 1 and its peripheral surface is the inner surface of the sample chamber 5. To face.
【００１６】試験実施前、高温槽及び低温槽ダンパー
６，７、及び高温及び低温槽３，４のシャッター９は閉
状態として、高温槽３の暖気，低温槽４の冷気により予
熱体８ａ，予冷体８ｂをそれぞれ予熱，予冷する。予
熱，予冷完了後に、評価条件が低温から始まり高温に移
行するというプログラムの場合の装置の動作を述べる。
まず、低温槽ダンパー７，低温槽側のシャッター９を同
時に開き、低温槽４内の冷気を試料室５内に循環させ
る。試料室５内を冷気が循環し始めると同時に低温槽４
内に格納されていた予冷体８ｂを試料室５内へ移動させ
る。Before the test, the high temperature and low temperature tank dampers 6 and 7, and the shutters 9 of the high and low temperature tanks 3 and 4 are closed, and the warm air of the high temperature tank 3 and the cool air of the low temperature tank 4 preheat the body 8a and precool it. The body 8b is preheated and precooled, respectively. The operation of the device in the case of a program in which the evaluation condition starts from a low temperature and shifts to a high temperature after preheating and precooling are completed is described.
First, the low temperature tank damper 7 and the low temperature tank side shutter 9 are simultaneously opened, and the cold air in the low temperature tank 4 is circulated in the sample chamber 5. At the same time cold air begins to circulate in the sample chamber 5, the low temperature tank 4
The pre-cooling body 8b stored inside is moved into the sample chamber 5.
【００１７】低温槽４からの冷気を試料室５内に循環さ
せるとともに、予冷体８ｂにより試料室５の熱を奪って
冷却し、冷却雰囲気中に試料を所定時間晒す。所定時間
経過後に、予冷体８ｂを低温槽４内に格納後、低温槽ダ
ンパー７，低温槽側のシャッター９が閉じ、同時に高温
槽ダンバー６，高温槽側のシャッター９が開き、高温槽
３内の暖気を試料室５内に循環させる。試料室５内を暖
気が循環し始めると同時に、高温槽３内に格納されてい
る予熱体８ａを試料室５内へ移動させ、暖気の循環と予
熱体８ａで加熱し、試料室５の温度を昇温する。そし
て、高温の雰囲気に試料を晒し、所定時間経過後に、予
熱体８ａを高温槽３へ格納後、高温槽ダンパー６，高温
槽側のシャッター９が閉じる。以降、上述の低温さら
し、，高温さらしへの切り換えを試験終了まで実施す
る。The cold air from the low temperature tank 4 is circulated in the sample chamber 5 and the heat of the sample chamber 5 is removed by the precooler 8b to cool it, and the sample is exposed to the cooling atmosphere for a predetermined time. After the lapse of a predetermined time, after storing the precooling body 8b in the low temperature tank 4, the low temperature tank damper 7 and the low temperature tank side shutter 9 are closed, and at the same time, the high temperature tank damper 6 and the high temperature tank side shutter 9 are opened, and the high temperature tank 3 The warm air is circulated in the sample chamber 5. At the same time that warm air begins to circulate in the sample chamber 5, the preheater 8a stored in the high-temperature tank 3 is moved into the sample chamber 5, and the warm air is circulated and heated by the preheater 8a to measure the temperature of the sample chamber 5. To raise the temperature. Then, the sample is exposed to a high temperature atmosphere, and after a lapse of a predetermined time, the preheater 8a is stored in the high temperature tank 3, and then the high temperature tank damper 6 and the high temperature tank side shutter 9 are closed. After that, switching to the low temperature exposure and the high temperature exposure described above is performed until the end of the test.
【００１８】本発明によれば、熱容量の大きい予熱体８
ａ，予冷体８ｂを予熱，予冷した後、試料室５内に移動
させて試料室５内の温度を昇温，降温させるため、試料
室５内に単に冷気，暖気を循環させるよりも、試料室の
温度は急激に昇温，降温させることができる。According to the present invention, the preheater 8 having a large heat capacity.
a, the precooler 8b is preheated and precooled, and then moved into the sample chamber 5 to raise and lower the temperature in the sample chamber 5, so that rather than simply circulating cold air or warm air in the sample chamber 5, The temperature of the chamber can be raised and lowered rapidly.
【００１９】さらに、予熱体８ａと予冷体８ｂは、中空
状フィン８2の周面が試料室５の内側面と向き合ってい
るため、中空状フィン８2により試料室５の内側面が直
接加熱又は冷却され、試料室の温度変化を急速に行うこ
とができる。Furthermore, preheating body 8a and precooling body 8b, since the circumferential surface of the hollow fins 82 are facing the inner surface of the sample chamber 5, the inner surface of the sample chamber 5 directly by hollow fins 82 heated Alternatively, the temperature of the sample chamber can be rapidly changed by cooling.
【００２０】（実施例２）図２（ａ）は、本発明の実施
例２を示す装置正面断面図、（ｂ）は図２（ａ）のＡ−
Ａ線断面図である。図２において、本例では、高温槽
３，低温槽４にそれぞれ格納されている予熱体８ａ，予
冷体８ｂは、中空状フィン８2内が仕切フィン８3により
櫛歯状に画成されて各試料毎に個別に収納する複数の収
納部を有している。(Embodiment 2) FIG. 2 (a) is a front sectional view of an apparatus showing Embodiment 2 of the present invention, and FIG. 2 (b) is an A- line in FIG. 2 (a).
It is an A line sectional view. In FIG. 2, in this example, the preheating body 8a and the precooling body 8b stored in the high-temperature tank 3 and the low-temperature tank 4, respectively, have hollow fins 8 2 defined by comb-shaped fins 8 3. It has a plurality of storage sections for individually storing each sample.
【００２１】本実施例では、予熱体８ａ又は予冷体８ｂ
は、中空状フィン８2の周面と向き合った試料室５の内
側面を直接加熱又は冷却するばかりでなく、各収納部に
個別に収納された試料の端面とフィンとが向き合って、
試料の端面を直接加熱又は冷却するため、試料室温及び
試料の温度の双方を急激に変化させることができる。In this embodiment, the preheater 8a or the precooler 8b is used.
Is the inner surface of the sample chamber 5 which faces the hollow fins 82 of the circumferential surface not only directly heated or cooled, the end faces of the sample housed individually in each storing unit and the fins facing,
Since the end surface of the sample is directly heated or cooled, both the room temperature of the sample and the temperature of the sample can be rapidly changed.
【００２２】[0022]
【発明の効果】以上説明したように本発明は、高温槽及
び低温槽ダンパーと連動してシャッターを開き、予熱，
予冷した予熱体，予冷体を試料室内に送り込み、暖気，
冷気の循環による昇温，降温を予熱体，予冷体による加
熱，冷却作用で補強するため、試料室内の温度を急激に
変化させることができ、試料室温度及び試料温度を図４
に示すように理想温度プロファイルに近付けることがで
き、試料室内の温度を規定温度に安定させるのに要する
時間を短縮することができる。さらに、予熱体，予冷体
により試料室内での熱容量を増すことができ、熱容量の
大きな試料を安定して加熱，冷却し、熱衝撃を与えるこ
とができる。As described above, according to the present invention, the shutter is opened in conjunction with the high temperature tank and the low temperature tank damper to preheat,
The pre-cooled pre-heated body and pre-cooled body are sent into the sample chamber and warmed up.
The temperature inside and outside the sample chamber can be drastically changed because the heating and cooling by the circulation of cold air are reinforced by the heating and cooling actions by the preheating body and precooling body.
As shown in, it is possible to approach the ideal temperature profile, and the time required to stabilize the temperature in the sample chamber at the specified temperature can be shortened. Further, the heat capacity in the sample chamber can be increased by the preheating body and the precooling body, and a sample having a large heat capacity can be stably heated and cooled to give a thermal shock.
【００２３】さらに、予熱体又は予冷体と試料室の内側
面とを向き合わせ、試料室の内側面を直接加熱又は冷却
することにより、試料室温の温度変化を急激に行うこと
ができる。さらに、予熱体又は予冷体内を試料毎に個別
に画成した各収納部内に試料を収納することにより、試
料の端面を予熱体又は予冷体により直接加熱又は冷却す
ることができ、試料の温度変化を急激に行うことができ
る。Furthermore, the temperature of the sample room temperature can be rapidly changed by making the preheater or precooler face the inner surface of the sample chamber and directly heating or cooling the inner surface of the sample chamber. Furthermore, by storing the sample in each storage unit that defines the preheating body or precooling body individually for each sample, the end surface of the sample can be directly heated or cooled by the preheating body or precooling body, and the temperature change of the sample Can be done rapidly.
【図１】（ａ）は、本発明の実施例１を示す装置正面断
面図、（ｂ）は、図１（ａ）のＡ−Ａ線断面図である。1A is a device front sectional view showing a first embodiment of the present invention, and FIG. 1B is a sectional view taken along line AA of FIG. 1A.
【図２】（ａ）は、本発明の実施例２を示す装置正面断
面図、（ｂ）は、図２（ａ）のＡ−Ａ線断面図である。2A is a device front sectional view showing a second embodiment of the present invention, and FIG. 2B is a sectional view taken along line AA of FIG. 2A.
【図３】（ａ）は、従来例を示す装置正面断面図、
（ｂ）は、図３（ａ）のＡ−Ａ線断面図である。FIG. 3A is a front sectional view of an apparatus showing a conventional example,
3B is a sectional view taken along the line AA of FIG.
【図４】本発明及び従来装置の試料室と試料の温度プロ
ファイルを比較した図である。FIG. 4 is a diagram comparing the temperature profiles of the sample chamber and the sample of the present invention and the conventional device.
１ 熱衝撃試験装置 ２ａ ダンパー制御部 ２ｂ 駆動部 ３ 高温槽 ４ 低温槽 ５ 試料室 ６ 高温槽ダンパー ７ 低温槽ダンパー ８ａ 予熱体 ８ｂ 予冷体 ９ シャッター 1 Thermal Shock Test Device 2a Damper Control Unit 2b Drive Unit 3 High Temperature Tank 4 Low Temperature Tank 5 Sample Chamber 6 High Temperature Tank Damper 7 Low Temperature Tank Damper 8a Preheater 8b Precooler 9 Shutter
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成５年９月２日[Submission date] September 2, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００７[Correction target item name] 0007
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００７】 従って、表面積が大きく、熱容量の大き
な製品を従来の熱衝撃試験装置で評価した場合、製品表
面の温度バラツキが激しくなり、図４に示すように試料
室の温度を６０℃から−２０℃に降下させて、−２０℃
に安定させるのに５〜１０分程度を要し、逆に−２０℃
から６０℃に昇温させて、６０℃に安定させるのに２〜
３分程度を要し、温度プロファイルよりも試料室及び試
料の温度安定化時間が長くなってしまうという問題点が
ある。Therefore, the surface area is large and the heat capacity is large.
When various products were evaluated by the conventional thermal shock tester, the temperature variation on the product surface became severe, and the temperature of the sample chamber was lowered from 60 ° C to -20 ° C as shown in Fig. 4 to -20 ° C.
It takes about 5-10 minutes to stabilize, and -20 ℃ on the contrary.
To 60 ° C to stabilize at 60 ° C
It takes about 3 minutes, and there is a problem that the temperature stabilization time of the sample chamber and the sample becomes longer than the temperature profile.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 21/66 Ｈ 7630−4Ｍ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification number Office reference number FI technical display location H01L 21/66 H 7630-4M
Claims (3)
と、予熱体と、予冷体と、駆動部とを有し、試料室内の
試料に、昇温と降温の繰り返しによる熱衝撃を加えて、
試料の特性試験を行う熱衝撃試験装置であって、 高温槽と低温槽は、ダンパーとシャッターを介して試料
室にそれぞれ個別に接続され、高温槽は、暖気の供給源
であり、低温槽は、冷気の供給源であり、 ダンパーは、高温槽，低温槽と試料室とを個別に連通さ
せて、各槽と試料室との間に、暖気，冷気の循環通路を
個別に形成するものであり、 シャッターは、高温槽，低温槽と試料室とを個別に連通
させて、各槽と試料室との間に、予熱体，予冷体の移動
通路を個別に形成するものであり、 ダンパー制御部は、高温槽のダンパーと低温槽のダンパ
ーとの開閉制御を個別に行い、各槽と試料室との間の循
環通路を個別に連通又は遮断するものであり、 予熱体は、高温槽内に格納されて、暖気により予熱さ
れ、シャッターが開かれた高温槽と試料室の間に移動通
路を通して移動するものであり、 予冷体は、低温槽内に格納されて、冷気により予冷さ
れ、シャッターが開かれた低温槽と試料室の間に移動通
路を通して移動するものであり、 駆動部は、各槽毎に独立させてダンパーの開閉と同期し
てシャッターを開き、移動通路を通して予熱体又は予冷
体を試料室内に搬入し、試料室の雰囲気中に晒した後の
一定時間経過後に、予熱体又は予冷体を各槽内に個別に
搬出し、シャッターを閉じるものであることを特徴とす
る熱衝撃試験装置。1. A high temperature tank, a low temperature tank, a damper control unit, a preheating body, a precooling body, and a driving unit are provided, and a thermal shock is applied to a sample in a sample chamber by repeating heating and cooling. hand,
A thermal shock test device for performing a characteristic test of a sample, in which a high temperature tank and a low temperature tank are individually connected to a sample chamber via a damper and a shutter, the high temperature tank is a source of warm air, and the low temperature tank is The damper is a source of cold air, and the damper connects the high temperature tank, the low temperature tank and the sample chamber individually, and forms a circulation path for warm air and cold air individually between each chamber and the sample chamber. Yes, the shutter connects the high temperature tank, the low temperature tank and the sample chamber individually, and forms the moving passages of the preheater and precooler individually between each chamber and the sample chamber. Damper control The part controls the opening and closing of the damper of the high temperature tank and the damper of the low temperature tank individually, and individually connects or disconnects the circulation passage between each tank and the sample chamber. Stored in the room, preheated by warm air, and the shutter opened. The precooler is stored in the cryostat, precooled by cold air, and moved through the passage between the cryostat with the shutter opened and the sample chamber. The drive unit is independent for each tank and opens the shutter in synchronization with the opening and closing of the damper, and the preheater or precooler is carried into the sample chamber through the moving passage and exposed to the atmosphere of the sample chamber. A thermal shock test device characterized in that a preheated body or precooled body is individually carried into each tank after a lapse of a certain time, and a shutter is closed.
ンとを有し、 中空状フィンは、一端面が開放された中空体であり、そ
の内側に試料収納用の空間が確保され、底板の外周縁か
ら起立し、その周面が試料室の内側面と向き合うもので
あることを特徴とする請求項１に記載の熱衝撃試験装
置。2. The preheating body and the precooling body have a bottom plate and hollow fins, and the hollow fins are hollow bodies whose one end faces are open, and a space for storing a sample is secured inside them. The thermal shock test device according to claim 1, wherein the thermal shock test device stands up from the outer peripheral edge of the bottom plate, and its peripheral surface faces the inner surface of the sample chamber.
料毎に個別に収納する複数の収納部に仕切フィンにより
仕切られ、 各収納部をなすフィンは、試料の端面と向き合うもので
あることを特徴とする請求項２に記載の熱衝撃試験装
置。3. The hollow fin sample storage space is partitioned by partition fins into a plurality of storage portions for individually storing each sample, and the fins forming each storage portion face the end surface of the sample. The thermal shock test device according to claim 2, wherein
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5151805A JP2500614B2 (en) | 1993-06-23 | 1993-06-23 | Thermal shock test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5151805A JP2500614B2 (en) | 1993-06-23 | 1993-06-23 | Thermal shock test equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0720210A true JPH0720210A (en) | 1995-01-24 |
| JP2500614B2 JP2500614B2 (en) | 1996-05-29 |
Family
ID=15526694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5151805A Expired - Fee Related JP2500614B2 (en) | 1993-06-23 | 1993-06-23 | Thermal shock test equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2500614B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008249347A (en) * | 2007-03-29 | 2008-10-16 | Nec Lcd Technologies Ltd | Aging device |
| JP2015165194A (en) * | 2014-03-02 | 2015-09-17 | 株式会社アメフレック | Cooling/heating device and thermal shock test device using the same |
| CN113484643A (en) * | 2021-07-09 | 2021-10-08 | 深圳市优瑞特检测技术有限公司 | Electronic structural component cold and hot impact test method and test equipment |
-
1993
- 1993-06-23 JP JP5151805A patent/JP2500614B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008249347A (en) * | 2007-03-29 | 2008-10-16 | Nec Lcd Technologies Ltd | Aging device |
| JP2015165194A (en) * | 2014-03-02 | 2015-09-17 | 株式会社アメフレック | Cooling/heating device and thermal shock test device using the same |
| CN113484643A (en) * | 2021-07-09 | 2021-10-08 | 深圳市优瑞特检测技术有限公司 | Electronic structural component cold and hot impact test method and test equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2500614B2 (en) | 1996-05-29 |
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