JPH07201847A - Formation of thin film - Google Patents

Abstract

PURPOSE: To provide a formation preprocessing method and a thin film forming method for a nitride film which copes with high density and high reliability of a device. CONSTITUTION: Deposits in a reaction chamber 1 and a reaction container 2 which contain a semiconductor substrate are etched with radicals in a plasma, generated by applying the electric power from a high-frequency source 8 to a gas system containing NF3 , and a plasma is generated by applying the electric power from the high-frequency power source 8 to a reducing gas system containing NH3 , to remove the remaining fluorine components. Then by using raw material gases SiH4 , NH3 , and N2 to form a nitride film by a plasma CVD method, and active seed from NF3 in plasma generated by applying a high-frequency power source 8 for a gas containing NF3 is made to operate on SiH4 active seed, thereby preventing an abnormal film which is rich in Si component and fast in filming rate.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to plasma-enhanced chemical vapor deposition (Plasma E) for forming a thin film on a sample surface such as a semiconductor substrate.
The present invention relates to a thin film forming method using the nhanced CVD method.

[0002]

2. Description of the Related Art Conventionally, in order to form a thin film on a surface of a sample such as a semiconductor substrate, a high frequency is applied to a raw material gas introduced into a reaction vessel to generate plasma and activate the raw material gas. A plasma-enhanced chemical vapor deposition (hereinafter referred to as PECVD) method in which a chemical reaction is promoted by and the generated reaction product is deposited on the sample surface is widely used.

In particular, a nitride film (SiN film) used as an interlayer insulating film between wirings made of Al or an Al alloy or a wiring protection film (passivation film) has a property of a wiring material (Al or Al alloy has a low melting point). Because it is 500
The formation at a relatively low temperature is required based on the fact that a high temperature treatment above ℃ cannot be performed). In this regard, PEC
Since the VD method causes a reaction in a plasma state having high energy, high temperature thermal CVD that requires a formation temperature of 700 ° C. or higher.
Compared with the method, it becomes possible to express the process by significantly lowering the temperature, for example, 450 ° C. or lower. Therefore P
The ECVD method enables formation of a thin film as an interlayer insulating film or a passivation film, and contributes to improvement of device reliability.

The PECVD apparatus includes a parallel plate electrode type, an induction coil type, a microwave discharge type, etc., and a batch processing type, a continuous processing type, a single wafer type, etc. have been developed respectively. In recent years, a parallel plate electrode type single-wafer type device is becoming mainstream from the viewpoints of process stability and measures against particles (polluting particles). Further, due to the improvement in device integration, it is desired to develop a process corresponding to the submicron scale, and accordingly, the unevenness of the thin film surface only makes it difficult to form a wiring pattern and causes a reduction in yield. Therefore, prevention of this occurrence is an important issue because it causes deterioration of device reliability such as moisture resistance even after the process is completed.

[0005]

In recent years, with the demand for higher integration of large-scale integrated circuits (LSI), PEC has been realized.
In the VD method as well, the development of a microfabrication forming technique on the submicron scale has become extremely important. The nitride film used as an interlayer insulating film or a wiring protection film is becoming thinner due to the demand for higher integration of devices, and a more precise film quality is required in consideration of the moisture resistance.

On the other hand, the nitride film formed by the PECVD method is conventionally formed by applying a high frequency power to a source gas system containing SiH ₄ and NH ₃ and by a chemical reaction of active species in the generated plasma discharge. . After the desired film thickness is formed, the application of the high frequency power and the supply of the raw material gas are sequentially stopped. At this time, a reaction product rich in Si component is temporarily formed at a high film forming rate, and when this is deposited on the substrate, an abnormally grown thin film having large surface irregularities is formed. In a mode in which a thin film is used as an interlayer insulating film, if the surface irregularities become large, the covering property of the thin film formed thereafter deteriorates, causing disconnection of wiring or short-circuiting between wirings and only lowering the device yield. Not only that, but even after the completion of the device, the film thickness of the thin film affected by the surface irregularities is non-uniform, so that there is a problem in terms of reliability such as moisture resistance.

The present invention has been made in view of the problems of the conventional PECVD method, and an object thereof is to provide a thin film forming method capable of coping with further high integration and high reliability of the device. To do.

[0008]

According to the thin film forming method of the present invention, the above-mentioned object is generated by applying a first electric power having a high frequency to a source gas in a reaction container accommodating a substrate. A step of forming a reaction product formed by a chemical reaction between active species in plasma on a substrate, and applying a second power having a high frequency to a gas containing a nitrogen compound to generate active species in plasma. To act on the residual active species of the source gas. Alternatively, in a reaction container containing the substrate,
A step of applying a first electric power having a high frequency to a reactive gas containing a fluorine compound and cleaning the inside of the reaction vessel with active species in the generated plasma; and a step of applying a high frequency to a reducing gas containing a nitrogen compound. Applying a power of 2 to remove the residual fluorine component in the reaction vessel by the active species in the generated plasma, and applying a third power having a high frequency to the raw material gas, the active species in the generated plasma. A step of forming a reaction product formed by a chemical reaction between the two on a substrate, and applying a fourth power having a high frequency to a gas containing a nitrogen compound so that the active species in the generated plasma remain in the source gas. And the step of acting on the active species.

[0009]

As a result of earnest research by the present inventor, the cause of the unevenness of the surface of the nitride film obtained by the PECVD method being rougher than that of the thermal nitride film is that when the plasma is stopped after the film formation step, the Si gas in the source gas is reduced. Active species having a long life such as radicals or ions obtained from the main gas containing a component, S
An active species with a short life from a secondary gas that does not contain the i component,
The proportion existing in the reaction chamber collapses when the plasma is stopped. That is, since the active species life from the main gas is longer than the active species life from the slave gas, the normal composition of the nitride film in the film forming step is destroyed, the Si component is rich, and the film forming rate is high. I found that things grow abnormally. Therefore, in the next step, when the active species from the main gas are considered to be alive, sending nitrogen compounds while stopping the supply of the main gas and continuing to generate plasma is extremely effective in solving the above-mentioned problems. I found something special.

According to the first thin film forming method of the present invention, the step of forming the thin film forms the thin film by depositing the reaction product formed by the chemical reaction of the active species of the plasma-excited source gas on the substrate. The forming and acting step chemically reacts the plasma-excited active species of the nitrogen-containing gas with the residual active species of the source gas. Therefore, in the step of acting, the kind of gas having a long active species life should be stopped or reduced, and the gas containing other nitrogen compounds having a short plasma life should be continuously supplied and a high frequency power should be applied to it. This prevents abnormal thin film formation. Therefore, the formed nitride film may have a fine and fine surface irregularity.

According to the knowledge of the present inventor, in the PECVD method for forming a nitride film, in order to remove deposits formed on jigs or inner walls such as electrodes inside the reaction chamber, NF ₃ Cleaning with a fluorine compound such as C, CF ₄ or C ₂ F ₆ is effective, but after this fluorine compound cleaning is performed, the deposit remains on the surface from which the deposits have been removed via F atoms. Sisters,
Due to this, it was impossible to prevent the film quality of the nitride film itself from being deteriorated because the fluorine component was contained in the thin film formed in the next step.

On the other hand, according to the second thin film forming method of the present invention, after the cleaning step, the active species existing in the plasma of the nitrogen compound act on the residual fluorine component or fluorine bond. By this, it is possible to remove as a reaction product containing a fluorine component, and therefore, the surface of the electrode, jig, or the inner wall of the reaction chamber inside the reaction chamber can be activated. Therefore, the formation of a nitride film containing a fluorine component (having a Si—F—N bond) at the initial stage of film formation after cleaning with a fluorine compound is suppressed. Further, after the film formation step is completed, the abnormal film formation in which the composition of the Si component is changed to a rich composition based on the difference in the active species life between the source gas components, the nitrogen compound gas is continuously supplied and plasma is generated even after the film formation is completed. By generating it, it is possible to prevent the formation of an abnormal growth film. As a result, it is possible to provide a dense nitride film having a uniform film quality over the entire area from the initial stage to the end of the film formation and having a fine film formation surface.

The present invention will be described in detail below.

In the present invention, the "nitrogen compound" is
It is a compound containing an N atom and is preferably a gas at room temperature (25 ° C.). Specifically, NH ₃ or N ₂ is preferably used. Among these, NH ₃ is preferable from the viewpoint of preventing abnormal film formation after the step of forming a film.

In the present invention, the "fluorine compound" is a compound containing an F atom and is preferably a gas at room temperature (25 ° C). Specifically, CF ₄ , C ₂ F ₆ or N
F ₃ is preferably used. Among these, NF ₃ is preferable from the viewpoint of chemically etching the deposit inside the reaction chamber.

The thickness of the nitride film formed by the method of the present invention is usually preferably about 0.1 to 1.0 μm.

The reactive gas used in the present invention contains at least the above-mentioned fluorine compound such as NF ₃ , but may contain nitrogen oxide such as N ₂ O or O ₂ if necessary.

The "reducing gas" used in the present invention means a reducing gas capable of converting a Si-F bond into a Si-H bond. In addition to the above-mentioned nitrogen compounds such as NH ₃ , Si
It may contain H ₄ , N ₂ , H _{2 and the} like.

Further, the source gas used in the present invention is S
It preferably contains iH ₄ and a gas containing at least one selected from NH ₃ and N ₂ .

The above "nitrogen compound" can be used as the above carrier gas, if necessary. In the embodiment in which the source gas contains this nitrogen compound, the uniformity of the film thickness can be further improved by the stable plasma discharge.

In the present invention, as the reaction conditions other than the above, for example, the following conditions can be preferably used.

As for the reaction apparatus which can be used in the thin film forming method of the present invention, a reaction container for accommodating a substrate, a reactive gas such as a fluorine compound, a gas such as a nitrogen compound and a source gas such as silane are placed in this reaction container. The reaction apparatus is not particularly limited as long as it is a reaction apparatus having an introduction system that can be introduced and an electrode that applies a high frequency to these gases, but for example, a PECVD apparatus as shown in the schematic cross-sectional view of FIG. 1 is preferably used.

The schematic structure of this PECVD apparatus will be described below with reference to FIG. Referring to FIG. 1, counter electrodes 3 and 4 are housed in a reaction container 2 for realizing a reaction chamber 1 sealed from the outside air. One electrode 4 is held at the ground potential, a semiconductor substrate 5 for thin film formation is placed on the opposite surface, and the other electrode 3 is supplied with high-frequency power output from a high-frequency oscillation source 8 for plasma generation. It is adapted to be applied via the impedance matching circuit 9. Further, the reaction gas is introduced from the upper side of the electrode 3 into the reaction chamber 1 through the pipe 6 and is exhausted from the exhaust port of the reaction container 2. Further, a heater 7 for temperature control is provided on the electrode 4 side.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail below with reference to the drawings.

In the PECVD apparatus having the structure shown in FIG. 1, a cleaning process is a step of cleaning the inside of the reaction vessel with an active species of a fluorine compound by the thin film forming method of the present invention, and a step of removing a residual fluorine component with a nitrogen compound. The reduction process, the film forming process for forming a nitride film, and the post-treatment process for acting to prevent abnormal film formation were sequentially performed.

[0026] shown in the process flowchart in Fig. 2 of Example 1 Example 1 will be described below for the contents of each process.

(Cleaning process) In the reaction chamber 1,
NF ₃ or NF ₃ / N ₂ O reactive gas is introduced, and the first high frequency oscillator 8 has a high frequency.
Power is applied and activated by plasma discharge energy to form radicals of atoms or molecules that are chemically active, and these active particles are made to chemically act on the deposit formed inside the reaction chamber 1. Chemical dry etching was performed. The preferable process conditions are shown below.

Pressure: 0.5 to 3.0 [Tor
r] High frequency: 13.56 MHz of the first power: 500 to 1200 [W] distance between electrodes: 180-999 [Mils] NF _3: 100 to 1000 [SCCM] N ₂ O: 100 to 1000 [SCCM ] Processing time: 50 to 150 [seconds] Here, NF ₃ which is the main gas of the cleaning process is used.
Instead of CF, either CF ₄ or C ₂ F ₆ is preferably used, and the flow rate is preferably about the same as NF ₃ .

Further, by the addition of N ₂ O, N ₂
The active species retained from O brings about an action of physically etching the deposit, and the chemical action and the physical action are synergistically to advance the etching more effectively, so that the cleaning process time can be shortened.

(Reduction Process) Subsequently, the above-mentioned reactive gas and reaction products are decompressed and removed, and the semiconductor substrate 5 preheated to 25 to 400 ° C. by a halogen lamp outside the reaction vessel 2 is placed in the reaction vessel. It was placed at a predetermined place in No. 2 and an NH ₃ / N ₂ system reducing gas was introduced. A second electric power having a high frequency is applied to this from a high-frequency oscillation source 8 to cause radicals, which are particles activated by plasma discharge energy, to act on a fluorine component remaining inside the reaction chamber 1 to produce a reaction product. Then, the pressure was reduced and removed. The process conditions are shown below.

Pressure: 1.0 to 6.5 [Tor
r] High frequency: 13.56 MHz of the second power: 100 to 800 [W] Substrate temperature: 300 to 400 [℃] distance between electrodes: 180-600 [Mils] NH _3: 50 to 1500 [SCCM] N _2: 500 to 2000 [SCCM] processing time: the 5-60 (seconds) wherein said reducing gas, only NH ₃ one type is preferably used.

Also, the addition of the preferred amount of N ₂ provides plasma stability of the reduction process.

(Film Forming Process) Further, the reducing gas and the reaction product were depressurized and removed, and a SiH ₄ / NH ₃ / N ₂ -based source gas was introduced while the substrate was placed.
A third electric power having a high frequency is applied to this from a high frequency oscillation source 8 and activated by plasma discharge energy to decompose a chemical bond to form an atomic or molecular radical. The reaction product due to these active particles was deposited on the surface of the semiconductor substrate 5, and the reaction product was depressurized and removed while forming a nitride film. The process conditions are shown below.

Pressure: 3.0 to 6.5 [Tor
r] High frequency: 13.56 [MHz] Third power: 100 to 800 [W] Substrate temperature: 300 to 400 [° C] Distance between electrodes: 180 to 600 [Mils] SiH ₄ : 50 to 300 [SCCM] NH _3: 50 to 300 [SCCM] N _2: 500 to 5000 [SCCM] processing time: 10 to 100 (seconds) (downstream processing) among the terms that are used in the first process, in the main component in the feed gas The supply of certain SiH ₄ is stopped, and other auxiliary components NH ₃ and N
₂ is continuously supplied, and a fourth electric power having a high frequency is applied thereto from the high-frequency oscillation source 8 to be activated by plasma discharge energy to decompose the chemical bond and become an atomic or molecular radical. These active particles include SiH ₃ ⁺ , SiH ₃ ⁺ , which are the residual components from the first process.
^{Since *} (* means radical) is present, NH
It reacts with ₂ ⁺ , NH ₂ ^* , N ^*, etc. to form a nitride film.
As a result, it is possible to suppress the growth of a nitride film rich in Si component, that is, a material that causes abnormal growth, and it is possible to form a nitride film having a fine surface with few irregularities.

The preferred process conditions are shown below.

Pressure: 3.0 to 6.5 [Tor
r] High frequency: 13.56 MHz of third power: 100 to 800 [W] Substrate temperature: 300 to 400 [℃] distance between electrodes: 180-600 [Mils] NH _3: 50 to 300 [SCCM] N _2: 500 to 5000 [SCCM] processing time: 30 (seconds) deposition rate of the nitride film obtained by this condition 0.2
The refractive index was 1.9 to 2.2 at 1.0 μm / min.

[0037] The process flow of Example 2 Example 2 shown in FIG. 3, described below for the contents of each process.

(Cleaning process) In the reaction chamber 1,
NF ₃ or NF ₃ / N ₂ O reactive gas is introduced, and the first high frequency oscillator 8 has a high frequency.
Power is applied and activated by plasma discharge energy to form radicals of atoms or molecules that are chemically active, and these active particles are made to chemically act on the deposit formed inside the reaction chamber 1. Chemical dry etching was performed. The preferable process conditions are shown below.

Pressure: 0.5 to 3.0 [Tor
r] High frequency: 13.56 MHz of the first power: 500 to 1200 [W] distance between electrodes: 180-999 [Mils] NF _3: 100 to 1000 [SCCM] N ₂ O: 100 to 1000 [SCCM ] Processing time: 50-150 [seconds] Here, instead of NF ₃ described above, CF ₄ and C ₂ F ₆
Either one of these is preferably used, and this flow rate is NF ₃
The same degree as is preferably used.

The effect obtained by adding N ₂ O is the same as in the case of Example 1.

(First Reduction Process) Subsequently, the above-mentioned reactive gas and reaction product are decompressed and removed, and NH ₃ / N is added.
_Two types of reducing gas were introduced. A second electric power having a high frequency is applied to this from a high-frequency oscillation source 8 to cause radicals, which are particles activated by plasma discharge energy, to act on a fluorine component remaining inside the reaction chamber 1 to produce a reaction product. And removed by vacuuming. Where N
NH ₃ or S instead of H ₃ / N ₂ reducing gas
An iH ₄ / N ₂ / NH ₃ type gas is preferably used.
The process conditions are shown below.

Pressure: 1.0 to 6.5 [Tor
r] High frequency: 13.56 [MHz] Second power: 100 to 800 [W] Substrate temperature: 300 to 400 [° C] Distance between electrodes: 180 to 600 [Mils] SiH ₄ : 50 to 300 [SCCM] NH _3: 50 to 1500 [SCCM] N _2: 500 to 2000 [SCCM] processing time: in embodiments of the reducing gas containing 5 to 15 (seconds) SiH _4, plasma residual fluorine component by the aforementioned cleaning process To form a reaction product having a bond of Si—F—N by combining with an active species such as SiH ₃ ⁺ , SiH ₃ ^*, etc., and controlling the pressure of the reaction chamber so as not to deposit it. Can be removed externally. Therefore, a synergistic effect is brought about in addition to the reducing effect by NH ₃ .

(Second Reduction Process) Further, the reducing gas and the reaction product are depressurized and removed, and the semiconductor substrate 5 which has been preheated to 25 to 400 ° C. with a halogen lamp is reacted outside the reaction vessel 2. The container 2 was placed in a predetermined place, and NH ₃ or NH ₃ / N ₂ -based reducing gas was introduced. A third power having a high frequency is applied thereto from the high-frequency oscillation source 8 to cause radicals, which are particles activated by the plasma discharge energy, to act on the fluorine component remaining inside the reaction chamber 1 to form a reaction product. Then, the pressure was reduced and removed. The process conditions are shown below.

Pressure: 1.0 to 6.5 [Tor
r] High frequency: 13.56 [MHz] Third power: 100 to 800 [W] Substrate temperature: 300 to 400 [° C] Distance between electrodes: 180 to 600 [Mils] NH ₃ : 50 to 1500 [SCCM] N _2: 500 to 2000 [SCCM] processing time: by 5 to 60 (seconds) This, the surface of the semiconductor substrate 5 is also uniformly activated,
It is possible to obtain a preferable tendency that the nitride film formed in the next film forming process is uniformly formed.

(Film Forming Process) Further, the reducing gas and the reaction product were decompressed and removed, and the SiH ₄ / NH ₃ / N ₂ -based raw material gas was introduced while the semiconductor substrate 5 was placed. A third electric power having a high frequency is applied to this from a high frequency oscillation source 8 and activated by plasma discharge energy to decompose a chemical bond to form an atomic or molecular radical. The reaction product generated by these active particles was deposited on the surface of the semiconductor substrate 5 to form a nitride film, and the reaction product was depressurized and removed. The process conditions are shown below.

Pressure: 3.0 to 6.5 [Tor
r] High frequency: 13.56 [MHz] Third power: 100 to 800 [W] Substrate temperature: 300 to 400 [° C] Distance between electrodes: 180 to 600 [Mils] SiH ₄ : 50 to 300 [SCCM] NH _3: 50 to 300 [SCCM] N _2: 500 to 5000 [SCCM] processing time: 10 to 100 (seconds) (downstream processing) among the terms that are used in the film forming process, in the main component in the feed gas The supply of certain SiH ₄ is stopped, and other auxiliary components NH ₃ and N
₂ is continuously supplied, and a fourth electric power having a high frequency is applied thereto from the high-frequency oscillation source 8 to be activated by plasma discharge energy to decompose the chemical bond and become an atomic or molecular radical. These active particles include SiH ₃ ⁺ , SiH ₃ ⁺ , which are the residual components from the first process.
^* (* Means radical) and so on, so NH ₂
^A nitride film is formed by reacting with ⁺ , NH ₂ ^* , N ^{* and the} like. As a result, it is possible to suppress the growth of a nitride film rich in Si component, that is, a material that causes abnormal growth, and it is possible to form a nitride film having a fine surface with few irregularities.

The preferable process conditions are shown below.

Pressure: 3.0 to 6.5 [Tor
r] High frequency: 13.56 MHz of third power: 100 to 800 [W] Substrate temperature: 300 to 400 [℃] distance between electrodes: 180-600 [Mils] NH _3: 50 to 300 [SCCM] N _2: 500 to 5000 [SCCM] processing time: 30 (seconds) deposition rate of the nitride film obtained by this condition 0.2
The refractive index was 1.9 to 2.2 at 1.0 μm / min.

[0049]

As described above, according to the thin film forming method of the present invention, in the step of forming a film, the reaction product formed by the chemical reaction of the active species of the plasma-excited source gas is deposited on the substrate. Thus, the step of forming and acting a thin film chemically reacts the active species of the plasma-excited gas containing the nitrogen compound with the residual active species of the source gas. Therefore, in the step of acting, the kind of gas having a long active species life should be stopped or reduced, and the gas containing other nitrogen compounds having a short plasma life should be continuously supplied and a high frequency power should be applied to it. This prevents abnormal thin film formation. Therefore, the formed nitride film may have a fine and fine surface irregularity. In the reaction vessel containing the substrate, electric power having a high frequency is applied to the raw material gas to generate plasma to deposit the reaction product obtained by the chemical reaction on the substrate, and then the supply of the raw material gas is stopped. Electric power having a high frequency is applied to a reactive gas containing a nitrogen compound, plasma is generated, and a reaction product obtained by a chemical reaction with the remaining source gas is deposited on the substrate or depressurized / removed. Therefore, the composition balance is disturbed by the residual components of the source gas in the main film forming step, that is, the abnormally grown nitride film rich in Si component is not formed. Therefore,
The formed nitride film is a dense film with few irregularities on the surface, and even when this is used as an interlayer insulating film, the wiring thin film of Al or Al alloy etc. formed in the next step is good without breakage. It may have various covering properties. Further, even when it is used as a passivation film, the number of projections and depressions is small, so that the reliability in visual inspection is improved, and thus the yield can be improved.

Alternatively, prior to the above film forming step,
The step of cleaning the inside of the reaction vessel by plasma-based etching of a fluorine compound and the residual fluorine components and fluorine bonds reacting based on the plasma of a nitrogen compound to reduce the reaction product containing the fluorine component in the form of addition is added. By doing so, the surface of the component housed in the reaction container is activated, and the fluorine component is not included in the film formation. Therefore, the formed nitride film can have a dense and highly dense film quality in which Si—N bonds are strong from the beginning to the end of film formation, and has moisture resistance even when used as an interlayer insulating film or a passivation film. An excellent nitride film can be formed. In addition, the nitride film containing no fluorine component has excellent adhesion, and the base substrate is Al or Al.
Peeling even when formed on wiring like alloy
Does not occur. Therefore, it is possible to form a nitride film with a high product yield. As a result, it is possible to provide a thin film forming method capable of coping with high integration and high reliability of devices.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing a schematic configuration of a PECVD apparatus for explaining an embodiment of a thin film forming method according to the present invention.

FIG. 2 is an explanatory diagram of a process flow of a preferred embodiment 1 according to the present invention.

FIG. 3 is an explanatory diagram of a process flow of a second preferred embodiment according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Reaction chamber, 2 ... Reaction container, 3, 4 ... Counter electrode, 5 ... Semiconductor substrate, 6 ... Piping, 7 ... Heater, 8 ... High frequency power supply, 9
… Impedance matching circuit.

Continuation of the front page (51) Int.Cl. ⁶ Identification number Reference number within the agency FI Technical indication location H01L 21/31 (72) Inventor Kazuo Urata 14-3 Shinizumi, Narita, Chiba Prefecture Nogedaira Industrial Park Applied Materials Japan Co., Ltd. (72) Inventor Naoyuki Iwasaki 14-3 Shinizumi, Narita City, Chiba Prefecture Nogedaira Industrial Park Applied Materials Japan Co., Ltd.

Claims (5)

[Claims] 1. A reaction product formed by a chemical reaction between active species in plasma generated when a first electric power having a high frequency is applied to a source gas in a reaction container containing a substrate. A step of forming a film, applying a second power having a high frequency to the gas containing a nitrogen compound,
And a step of acting active species in generated plasma on residual active species of the source gas. 2. A first reaction vessel having a high frequency for a reactive gas containing a fluorine compound in a reaction vessel containing a substrate.
Is applied to clean the inside of the reaction vessel with the active species in the generated plasma, and the second power having a high frequency is applied to the reducing gas containing the nitrogen compound to activate the active species in the generated plasma. The step of removing the residual fluorine component in the reaction vessel by applying a third electric power having a high frequency to the raw material gas, and the reaction product formed by the chemical reaction between active species in the generated plasma is used as a substrate. And a step of applying a fourth electric power having a high frequency to a gas containing a nitrogen compound so that the active species in the generated plasma act on the residual active species of the source gas. . 3. The nitrogen compound is NH _3.
Or the thin film forming method described in 2. 4. The method for forming a thin film according to claim 2, wherein the fluorine compound contains at least one compound selected from NF ₃ , CF ₄ and C ₂ F ₆ . 5. The thin film forming method according to claim 1, wherein the raw material gas contains at least one kind of gas selected from SiH ₄ , NH ₃ and N ₂ .