JPH07198579A - 基板上に堆積した粒子の分析装置および分析方法 - Google Patents
基板上に堆積した粒子の分析装置および分析方法Info
- Publication number
- JPH07198579A JPH07198579A JP6248144A JP24814494A JPH07198579A JP H07198579 A JPH07198579 A JP H07198579A JP 6248144 A JP6248144 A JP 6248144A JP 24814494 A JP24814494 A JP 24814494A JP H07198579 A JPH07198579 A JP H07198579A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- machine
- substrate
- data
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002245 particle Substances 0.000 title claims abstract description 107
- 239000000758 substrate Substances 0.000 title claims abstract description 52
- 238000000034 method Methods 0.000 title claims description 24
- 230000005855 radiation Effects 0.000 claims abstract description 55
- 239000012530 fluid Substances 0.000 claims description 24
- 238000001514 detection method Methods 0.000 claims description 14
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 25
- 238000011156 evaluation Methods 0.000 abstract description 4
- 239000013307 optical fiber Substances 0.000 abstract description 4
- 238000009825 accumulation Methods 0.000 abstract 2
- 230000008021 deposition Effects 0.000 description 51
- 238000004458 analytical method Methods 0.000 description 22
- 230000002159 abnormal effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 8
- 239000000314 lubricant Substances 0.000 description 7
- 230000008859 change Effects 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 208000003464 asthenopia Diseases 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000013473 artificial intelligence Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000005802 health problem Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/26—Oils; Viscous liquids; Paints; Inks
- G01N33/28—Oils, i.e. hydrocarbon liquids
- G01N33/2835—Specific substances contained in the oils or fuels
- G01N33/2858—Metal particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0266—Investigating particle size or size distribution with electrical classification
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- Pathology (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Dispersion Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/135,683 | 1993-10-13 | ||
| US08/135,683 US5504573A (en) | 1993-10-13 | 1993-10-13 | Apparatus and method for analyzing particles deposited on a substrate using substantially continuous profile data |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07198579A true JPH07198579A (ja) | 1995-08-01 |
Family
ID=22469181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6248144A Withdrawn JPH07198579A (ja) | 1993-10-13 | 1994-10-13 | 基板上に堆積した粒子の分析装置および分析方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5504573A (enExample) |
| EP (1) | EP0649013A2 (enExample) |
| JP (1) | JPH07198579A (enExample) |
| CA (1) | CA2117963A1 (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6204656B1 (en) | 1997-05-29 | 2001-03-20 | Reid Asset Management Company | Miniature sensor for lubricant analysis |
| US6810365B1 (en) | 2002-06-13 | 2004-10-26 | The United States Of America As Represented By The Secretary Of The Navy | Monitoring waste liquid to determine membrane cleansing performance |
| US8173407B2 (en) * | 2002-09-07 | 2012-05-08 | Labelle Jeffrey T | Nanoengineered biophotonic hybrid device |
| US7067293B2 (en) * | 2002-09-07 | 2006-06-27 | Labelle Jeffrey T | Nanoengineered biophotonic hybrid device |
| US9034623B2 (en) | 2002-09-07 | 2015-05-19 | Jeffrey T. LaBelle | Nanoengineered biophotonic hybrid device |
| EP1536224B1 (en) * | 2003-11-27 | 2007-02-07 | Tribotex Co., Ltd. | Method of diagnosing lubricated portion and system of diagnosing lubricated portion |
| US7862875B2 (en) * | 2004-10-04 | 2011-01-04 | Trico Corporation | Flinger disc |
| US7541004B2 (en) * | 2004-11-12 | 2009-06-02 | Predict, Inc. | MEMS-based sensor for lubricant analysis |
| US7394545B2 (en) * | 2005-07-11 | 2008-07-01 | Ge Betz, Inc. | Apparatus for characterizing and measuring the concentration of opaque particles within a fluid sample |
| US8398849B2 (en) * | 2005-07-11 | 2013-03-19 | General Electric Company | Application of visbreaker analysis tools to optimize performance |
| US7883898B2 (en) * | 2007-05-07 | 2011-02-08 | General Electric Company | Method and apparatus for measuring pH of low alkalinity solutions |
| US8096164B2 (en) | 2008-01-17 | 2012-01-17 | Trico Corporation | Apparatus and methods for management of fluid condition |
| US8220671B2 (en) | 2008-03-12 | 2012-07-17 | Trico Corporation | Lubricant dispenser with nozzle |
| USD687923S1 (en) | 2008-06-03 | 2013-08-13 | Trico Corporation | Lubricant dispensing nozzle |
| US8147684B2 (en) * | 2009-03-27 | 2012-04-03 | Trico Corporation | Apparatus and methods for lubricant filtration and drum pump filtration system |
| US8147683B2 (en) * | 2010-01-22 | 2012-04-03 | Trico Corporation | Portable lubricant filtration system and method |
| FR2987922B1 (fr) * | 2012-03-06 | 2014-04-18 | Commissariat Energie Atomique | Procede et dispositif de comptage d'objets |
| USD687921S1 (en) | 2012-04-25 | 2013-08-13 | Trico Corporation | Lubricant dispenser |
| USD687922S1 (en) | 2012-04-25 | 2013-08-13 | Trico Corporation | Lubricant dispenser |
| USD696956S1 (en) | 2012-04-25 | 2014-01-07 | Trico Corporation | Lubricant dispenser |
| EP3018469B1 (en) * | 2013-07-02 | 2022-06-08 | Nabtesco Corporation | State determination methods and state determination device |
| CN103983543B (zh) * | 2014-05-15 | 2017-01-04 | 西安交通大学 | 一种在线图像可视铁谱成像系统 |
| US11270254B2 (en) * | 2019-01-09 | 2022-03-08 | The Boeing Company | Recognition features for a consumable article |
| US20220062896A1 (en) * | 2020-08-28 | 2022-03-03 | Globalfoundries U.S. Inc. | Device comprising an optofluidic sensor with integrated photodiode |
| US11639895B2 (en) | 2021-03-09 | 2023-05-02 | Globalfoundries U.S. Inc. | Device including optofluidic sensor with integrated photodiode |
| US20230057777A1 (en) * | 2021-08-18 | 2023-02-23 | Meta Platforms, Inc. | Object-sensing systems and robotic systems including the same |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2241143C3 (de) * | 1971-08-25 | 1987-04-16 | The Foxboro Co., Foxboro, Mass. | Verfahren und Vorrichtung zur Untersuchung von in einem Fluid suspendierten Teilchen |
| US4047814A (en) * | 1974-02-27 | 1977-09-13 | Trans-Sonics, Incorporated | Method and apparatus for segregating particulate matter |
| US3892485A (en) * | 1974-05-06 | 1975-07-01 | Gen Electric | Monitoring apparatus for measuring particles suspended in liquid and for measuring the opacity of the liquid |
| AU498574B2 (en) * | 1974-06-13 | 1979-03-15 | Mobil Oil Australia Limited | Determining wear |
| US4187170A (en) * | 1977-01-27 | 1980-02-05 | Foxboro/Trans-Sonics, Inc. | Magnetic techniques for separating non-magnetic materials |
| JPS56166444A (en) * | 1980-05-27 | 1981-12-21 | Toshiba Corp | Detecting method for abnormality of plain bearing |
| GB2099140B (en) * | 1981-03-19 | 1985-10-30 | Jones Davidd Gwynne | Wear analysis equipment |
| US4492461A (en) * | 1981-03-19 | 1985-01-08 | Jones David G | Wear analysis equipment |
| JPS5892841A (ja) * | 1981-11-28 | 1983-06-02 | Shimadzu Corp | 濃度計 |
| US4986664A (en) * | 1984-02-07 | 1991-01-22 | International Technical Associates | System and process for controlled removal of material to produce a desired surface contour |
| US5218211A (en) * | 1991-10-23 | 1993-06-08 | The United States Of America As Represented By The Secretary Of Commerce | System for sampling the sizes, geometrical distribution, and frequency of small particles accumulating on a solid surface |
| US5309213A (en) * | 1992-03-05 | 1994-05-03 | Analysts, Inc. | Optical determination of amount of soot in oil sample |
-
1993
- 1993-10-13 US US08/135,683 patent/US5504573A/en not_active Expired - Fee Related
-
1994
- 1994-10-12 EP EP94116087A patent/EP0649013A2/en not_active Withdrawn
- 1994-10-12 CA CA002117963A patent/CA2117963A1/en not_active Abandoned
- 1994-10-13 JP JP6248144A patent/JPH07198579A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP0649013A3 (enExample) | 1995-05-10 |
| EP0649013A2 (en) | 1995-04-19 |
| CA2117963A1 (en) | 1995-04-14 |
| US5504573A (en) | 1996-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20020115 |