JPH0719847A - Liquid supply apparatus for ultrasonic transducer - Google Patents

Abstract

PURPOSE:To make it possible to supply the intended amount of medium only into the intended part at the intended time by providing a cylinder having a piston, which performs vertical motion by the rotation of a motor and the interlocking of an arm, and a check valve, which is one-way valve, and the like. CONSTITUTION:A cylinder 2 having a piston 1 is immersed into a water tank 13 containing an ultrasonic transmission medium (water) 12. An arm 5 is moved up and down by the rotation of a motor 3, and the piston 1 performs the vertical motion. When the piston 1 rises up, the medium 12 enters into the cylinder 2. Only when the internal pressure in the cylinder 2 is decreased with a check valve 6b (one-way valve), the medium 12 enters into the cylinder 2. The medium 12, which has entered into the cylinder 2, is supplied on an object to be measured 15 through a pipe 7 with the check valve 6a (one-way valve). The rotation of the motor 3 is controlled with a microswitch 9, which is connected to a switch 8 and a plate cam 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention converts an electric signal into an ultrasonic wave, irradiates the ultrasonic wave to a measuring object, receives the ultrasonic wave reflected by the measuring object, and converts the ultrasonic signal into an electric signal. Peripheral equipment for ultrasonic transducers. This ultrasonic transducer is used, for example, for film thickness measurement using ultrasonic waves.

[0002]

2. Description of the Related Art Film thickness measurement using ultrasonic waves is
The film thickness of a film formed on a substrate by coating or painting is measured. For example, JP-A-61-208
The method disclosed in Japanese Patent Publication No. 03 is known. This film thickness measurement is an incident angle θ peculiar to the combination of the substrate, the film, and the ultrasonic transmission medium with respect to the film formed on the substrate.
When ultrasonic waves are applied at, the frequency f of ultrasonic waves and the film thickness d
The phenomenon in which the reflectance of ultrasonic waves becomes extremely small when the product of and becomes a value H peculiar to the above combination is utilized. In this film thickness measurement, an ultrasonic transducer formed by arranging two transducers, a piezoelectric transducer for ultrasonic wave transmission and a piezoelectric transducer for ultrasonic wave reception, facing each other is used.

Further, Japanese Patent Application Laid-Open No. 1-113 by the same applicant.
According to the film thickness measuring method disclosed in Japanese Patent No. 606, when the frequency f _{d at} which the reflectance is minimum in the reflected wave spectrum and the functional relationship at which the film thickness d is d = g (f _d ) have a minimum frequency. f _d to film thickness d
Is required. Also in this measuring method, the method disclosed in JP-A-61-161
The same ultrasonic transducer as in the case of 20803 is used.

When performing the above-mentioned measurement using ultrasonic waves, it is essential to interpose a transmission medium (for example, water) in order to facilitate transmission of ultrasonic waves between the transducer and the object to be measured.

Therefore, in the conventional measurement, as shown in FIG. 2, it was necessary to dip the measuring object 25 and the transducer 21 in the water tank 23 containing the water 22. The transducer 21 is connected to the device body 20. Further, although not shown, a means such as supplying a required amount of water using a dropper or the like has been taken only to a desired portion between the measurement object and the transducer.

It is possible to use various known dispensers as the medium supply means, but the existing products cannot supply the medium suitable for the above measurement. That is, there was no existing dispenser having a function of satisfying the conditions of supplying a desired amount of medium at a desired time, only to a desired portion.

[0007]

DISCLOSURE OF THE INVENTION The present invention has various problems caused by the above-mentioned prior arts, that is, dipping requires a measuring space (water tank portion), and the entire measuring object is used as a medium. It must be soaked, and various harmful effects (labor of drying and deterioration of the measurement object) are expected later. Supplying with a dropper requires labor for the measurer. It is an object of the present invention to solve the above problems and to provide a liquid supply device for an ultrasonic transducer that can supply a medium under desired conditions that cannot be realized by an existing dispenser.

[0008]

In order to achieve the above object, a liquid supply device for an ultrasonic transducer according to the present invention is an ultrasonic wave transmitting means for generating an ultrasonic wave and irradiating the ultrasonic wave to an object to be measured; A liquid supply device used for an ultrasonic transducer having an ultrasonic wave receiving means for receiving a reflected wave reflected by an object, which operates when the transducer is installed on the object to be measured, and a predetermined amount to the object to be measured. Is a liquid supply apparatus for an ultrasonic transducer, which is provided with a mechanism for supplying a liquid that is the ultrasonic transmission medium.

According to a second aspect of the present invention, there is provided a holder having a plurality of legs for holding the transducer and grounding the object to be measured. The holder has a length substantially the same as that of the legs.
The liquid supply apparatus for an ultrasonic transducer has a configuration in which a switching leg having a switching element is provided at the tip.

According to the third aspect of the present invention, there is provided a liquid supply device for an ultrasonic transducer, which is provided with at least the following configuration when supplying the liquid by operation. (a) A piston that moves up and down as the arm rotates in conjunction with the rotation of the motor. (b) A cylinder with a check valve that is a one-way valve on the bottom surface that sucks liquid from the outside as the piston rises. (c) A check valve, which is a one-way valve provided on the bottom surface of the piston so that the liquid sucked into the cylinder is sent to a pipe leading to a measurement target portion.

According to a fourth aspect of the present invention, a plate cam is attached to the rotary shaft of the motor, and an arm extending from the plate cam is driven by a microswitch connected to the plate cam so that the arm extends up and down for one piston. It is a liquid supply device for an ultrasonic transducer that only moves.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of a liquid supply device for an ultrasonic transducer according to the present invention.

A water tank containing an ultrasonic transmission medium (water) 12
A cylinder 2 having a piston 1 on the upper side is immersed in 13 as shown.

An arm 5 connected to a plate cam 4 attached to the rotating shaft of the motor 3 is provided above the piston 1. The arm 5 moves up and down as the motor 3 rotates,
The piston 1 moves up and down, and as the piston 1 rises, the medium 12 enters the cylinder 2.

The check valve 6b provided on the bottom surface of the cylinder 2 is a one-way valve, and operates so that the medium 12 in the water tank 13 enters the inside of the cylinder 2 only when the pressure inside the cylinder 2 decreases. . When the piston 1 descends, it operates so that the medium 12 does not come out from the inside of the cylinder 2 to the water tank 13 side.

A hollow pipe 7 is arranged inside the piston 1, and the pipe 7 is a check valve 6a (one-way valve provided on the bottom surface of the piston 1 and is the same as 6b described above). Is connected to the medium 12 when it rises) and extends to the measurement object portion of the measurement object 15. By the operation of the check valve 6a, the medium 12 that has entered the inside of the cylinder 2 is supplied to the measurement target portion via the pipe 7.

One rotation of the plate cam 4 results in one vertical movement of the piston 1 and one supply of the medium 12. The supply amount is determined depending on the vertical movement amount of the piston 1 and the cross-sectional area of the piston 1. Although not shown, in adjusting the supply amount, the cross-sectional area of the piston is changed (that is,
In addition to replacing the piston), this can be achieved by changing the position of the upper end of the arm 5 connected to the plate cam 4. That is, as the upper end of the arm 5 is closer to the outer periphery of the plate cam 4, the vertical movement amount of the piston 1 with one rotation of the plate cam 4 is larger, and the arm is closer to the rotation axis of the plate cam 4. This is because the upper end of 5 has the opposite effect.

The rotation of the motor 3 is controlled by the switch 8 and the plate cam 4.
It is controlled by the micro switch 9 connected to.

The function required of the switch 8 is that it operates when the transducer is installed on the object to be measured. In this embodiment, a mechanism that realizes the above-mentioned function by adopting the transducer 11 is adopted, and the explanation in the drawing is shown in FIG.

FIG. 3 is an explanatory view of the holder of the transducer, and there is a holder 30 which holds the transducer 11 and has a plurality of legs 31a to 31c which are grounded to the object 15 to be measured. Is provided with a switching leg 33 having substantially the same length as the legs 31a to 31c and having a switching element 32 at the tip.

By installing the holder 30, a plurality of leg portions 31a ...
Since the switching leg 33 is grounded to the measurement object 15 at the same time as 31c, the switching element 32 operates and the switch
It turns on.

Next, the operation of the microswitch 9 will be described by returning to FIG. When the piston 1 is stationary, the contact 9a of the micro switch 9 is fitted in the recessed portion of the plate cam 4, and the micro switch 9 is switched off.

When the switch 8 is turned on (even for a short time), the motor 3 starts rotating. Along with that, when the plate cam 4 also starts to rotate, the contact 9a of the micro switch 9
Is pushed out from the recessed portion and comes into contact with the circumference of the plate cam 4, so that the micro switch 9 is turned on.
In this state, the plate cam 4 makes one rotation, and the recessed portion becomes the contact 9
up to the position of a. That is, when the switch 8 is turned on for a short time, the plate cam 4 makes one rotation and the piston 1
Will perform one cycle of exercise. As described above, the medium 12 is supplied once by the one cycle of movement.

Although the present invention has been described with reference to the embodiment, the present invention is not limited to the embodiment.

[0025]

According to the present invention, the supply of the ultrasonic transmission medium, which has been a bottleneck in the measurement of the sample using the ultrasonic waves, can be easily performed. That is, a liquid supply device for an ultrasonic transducer is provided which satisfies the conditions of supplying a medium of a desired amount at a desired time / only to a desired portion.

[0026]

[Brief description of drawings]

FIG. 1 is an explanatory view showing an embodiment of a liquid supply apparatus according to the present invention.

FIG. 2 is a cross-sectional explanatory view from the side showing a state of measurement according to a conventional technique.

FIG. 3 is an explanatory diagram of a holder for a transducer.

[Explanation of symbols]

 1 ... Piston 2 ... Cylinder 3 ... Motor 4 ... Plate cam 5 ... Arm 6 ... Check valve 7 ... Pipe 8 ... Switch 9 ... Micro switch 10, 20 ... Measuring device body 11, 21 ... Transducer 12, 22 ... Ultrasonic transmission medium 13, 23 ... Water tank 15, 25 ... Object to be measured 30 ... Holder 31 ... Leg 32 ... Switching element 33 ... Switching leg

Claims (4)

[Claims] 1. A liquid used for an ultrasonic transducer having an ultrasonic wave transmitting means for generating an ultrasonic wave and irradiating the ultrasonic wave to an object to be measured, and an ultrasonic wave receiving means for receiving a reflected wave reflected by the object to be measured. A liquid supply device for an ultrasonic transducer, comprising a mechanism that operates when the transducer is installed on an object to be measured and supplies a predetermined amount of liquid, which is an ultrasonic transmission medium, to the object to be measured. 2. A holding tool for holding a transducer and having a plurality of legs for grounding an object to be measured, wherein the holding tool has a switching element at the tip and has substantially the same length as the legs. 2. A structure provided with legs.
The liquid supply device for an ultrasonic transducer as set forth in. 3. The liquid supply apparatus for an ultrasonic transducer according to claim 1, wherein the liquid supply by operation has at least the following configuration. (a) A piston that moves up and down as the arm rotates in conjunction with the rotation of the motor. (b) A cylinder with a check valve that is a one-way valve on the bottom surface that sucks liquid from the outside as the piston rises. (c) A check valve, which is a one-way valve provided on the bottom surface of the piston so that the liquid sucked into the cylinder is sent to a pipe leading to a measurement target portion. 4. A plate cam is attached to a rotating shaft of a motor, and an arm extending from the plate cam is caused to move up and down by one piston only by driving a micro switch connected to the plate cam. The liquid supply device for an ultrasonic transducer according to claim 3, which is characterized in that.