JPH07197806A - Plasma discharge tube for processing exhaust gas - Google Patents

Plasma discharge tube for processing exhaust gas

Info

Publication number
JPH07197806A
JPH07197806A JP35177893A JP35177893A JPH07197806A JP H07197806 A JPH07197806 A JP H07197806A JP 35177893 A JP35177893 A JP 35177893A JP 35177893 A JP35177893 A JP 35177893A JP H07197806 A JPH07197806 A JP H07197806A
Authority
JP
Japan
Prior art keywords
rod
shaped electrode
exhaust gas
discharge tube
plasma discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP35177893A
Other languages
Japanese (ja)
Inventor
Masao Kawai
正夫 川合
Masao Ando
正夫 安藤
Masahiro Suzuki
雅博 鈴木
Yoshihisa Ito
義久エクォス・リサーチ内 伊藤
Hideumi Nagata
秀海 永田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Equos Research Co Ltd
Shishido Electrostatic Ltd
Original Assignee
Equos Research Co Ltd
Shishido Electrostatic Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Equos Research Co Ltd, Shishido Electrostatic Ltd filed Critical Equos Research Co Ltd
Priority to JP35177893A priority Critical patent/JPH07197806A/en
Publication of JPH07197806A publication Critical patent/JPH07197806A/en
Pending legal-status Critical Current

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  • Exhaust Gas After Treatment (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE:To realize the discharge in a constantly uniform manner between a cylindrical electrode and a rod-shaped electrode even when they are provided in a place subject to the vibration such as an automobile. CONSTITUTION:A rod-shaped electrode 12 consists of a core, and a granular electric conductive body 16 packed between the core and a dielectric 13. This constitution holds the rod-shaped electrode 12 and the dielectric 13 in a mutually close condition even when subject to the vibration, in other word, the positional relationship between the two can be held in a constant manner. As a result, the discharge between the cylindrical electrode 11 and the rod-shaped electrode 12 can be generated in a constantly uniform manner, and the stable processing of the exhaust gas can be executed. Because the discharge is likely to be generated at a pointed part, the efficient discharge can be generated between innumerable particles of the granular conductive body 16 which is pointedly projected on the outer circumferential surface of the rod-shaped electrode 12 and the cylindrical electrode 11, and the efficiency of the exhaust gas processing can be improved thereby.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、自動車等のエンジン
(内然機関)からの排気ガス中に含まれるNOX (窒素
酸化物)を、プラズマ放電によって解離し除去する排気
ガス処理装置に係り、詳しくはそのプラズマを発生させ
るプラズマ放電管に関する。
The present invention relates to relates a NO X contained in the exhaust gas from an engine such as an automobile (internal natural organization) (nitrogen oxides), to the exhaust gas treatment apparatus for dissociating removed by plasma discharge More specifically, it relates to a plasma discharge tube that generates the plasma.

【0002】[0002]

【従来の技術】内然機関からの排気ガス中には、HC
(炭化水素),CO(一酸化炭素),NOX 等の有害成
分が含まれており、そのうち特にNOX は光化学スモッ
グの原因物質でもあることから、大気汚染を防止するう
えでこれを除去することが求められている。
2. Description of the Related Art HC is contained in exhaust gas from a natural engine.
(Hydrocarbon), CO (carbon monoxide), contains harmful components such as NO X, since them particularly NO X is also a causative agent of photochemical smog, to remove it in order to prevent air pollution Is required.

【0003】排気ガス中の有害成分を除去する排気ガス
処理装置としては、従来より、触媒を利用したものがあ
る。その触媒には、CO,HCを酸素で酸化して無害な
CO2 ,H2 Oに変換する酸化触媒と、NOX を排気ガ
ス中のHC,CO,H2 等によってN2 とO2 とに分離
する還元触媒と、CO,HC,NOX を同時に処理する
三元触媒とがある。
As an exhaust gas treatment device for removing harmful components in exhaust gas, there has been a device utilizing a catalyst. The catalyst is an oxidation catalyst that oxidizes CO and HC with oxygen to convert them into harmless CO 2 and H 2 O, and NO x is converted into N 2 and O 2 by HC, CO and H 2 in the exhaust gas. there is a reduction catalyst to separate, and the three-way catalyst for treatment CO, HC, and NO X at the same time.

【0004】また、特にNOX を除去する排気ガス処理
装置としては、放電を利用したものがある。これは、排
気ガス中のNOX を、プラズマ放電により、 2NO2 →2NO+O2 2NO+O2 →N2 +2O2 のように、N2 とO2 とに解離し除去するものである。
Further, as an exhaust gas treatment device for removing NO x in particular, there is one utilizing discharge. This allows the NO X in the exhaust gas by a plasma discharge, 2NO 2 → 2NO + O 2 2NO + O 2 → N 2 + 2O as 2, is to dissociate the N 2 and O 2 is removed.

【0005】この種の放電式の排気ガス処理装置に用い
られる従来のプラズマ放電管は、例えば特開平1−11
7913号公報に開示された排気ガス浄化装置における
プラズマ放電管のように、円筒状電極の中心軸上に、一
本の導線から成る棒状電極を配置するとともに、その棒
状電極の周囲に、ガラス管、石英管、その他セラミック
製の誘電体を設けて構成されている。このように棒状電
極の周囲に誘電体を設けることによって、放電管内にお
ける円筒状電極と棒状電極との間の放電を均一化させて
いる。
A conventional plasma discharge tube used in this type of discharge type exhaust gas treatment apparatus is disclosed in, for example, Japanese Patent Laid-Open No. 1-11.
Like the plasma discharge tube in the exhaust gas purifying apparatus disclosed in Japanese Patent No. 7913, a rod-shaped electrode made of a single conductive wire is arranged on the central axis of a cylindrical electrode, and a glass tube is provided around the rod-shaped electrode. , A quartz tube, and other ceramic dielectrics. By thus providing the dielectric around the rod-shaped electrode, the discharge between the cylindrical electrode and the rod-shaped electrode in the discharge tube is made uniform.

【0006】[0006]

【発明が解決しようとする課題】しかし、上記従来のプ
ラズマ放電管では、自動車のように振動を受ける場所に
設置された場合には、棒状電極とその周囲の誘電体との
位置関係が振動によって変化する。その結果、円筒状電
極と棒状電極との間の放電も不均一になり、放電が集中
した部分では誘電体が破損するおそれが生じるととも
に、放電管における排気ガス処理の効率が低下してしま
う。
However, in the above-described conventional plasma discharge tube, when the plasma discharge tube is installed in a place subject to vibration like an automobile, the positional relationship between the rod-shaped electrode and the surrounding dielectric is affected by the vibration. Change. As a result, the discharge between the cylindrical electrode and the rod-shaped electrode also becomes non-uniform, the dielectric may be damaged in the portion where the discharge is concentrated, and the efficiency of exhaust gas treatment in the discharge tube is reduced.

【0007】本発明は、このような問題を解決するため
になされたもので、自動車のように振動を受ける場所に
設置した場合にも、円筒状電極と棒状電極との間で常に
均一に放電を起こさせることのできる、処理効率の高い
プラズマ放電管を提供することを目的とする。
The present invention has been made to solve such a problem, and even when it is installed in a place subject to vibration such as an automobile, a uniform discharge is always generated between the cylindrical electrode and the rod electrode. It is an object of the present invention to provide a plasma discharge tube with high processing efficiency, which can cause the above-mentioned phenomenon.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、本発明に係るプラズマ放電管では、棒状電極(1
2)を、芯線(15)と、その芯線(15)と誘電体
(13)との間に充填した粒状導電体(16)とから構
成した。
In order to achieve the above object, in the plasma discharge tube according to the present invention, a rod-shaped electrode (1
2) was composed of a core wire (15) and a granular conductor (16) filled between the core wire (15) and the dielectric material (13).

【0009】[0009]

【作用】上記構成のように、芯線(15)と誘電体(1
3)との間に粒状導電体(16)を充填して棒状電極
(12)を構成することにより、このプラズマ放電管を
自動車のように振動を受ける場所に設置した場合でも、
棒状電極(12)とその周囲の誘電体(13)とを互い
に密着させた状態に保持することができる。その結果、
円筒状電極(11)と棒状電極(12)との間の放電を
常に均一に起こさせるようにして、安定した排気ガス処
理を行うことができ、それとともに、誘電体(13)を
破損させるおそれもなくすことができる。
As described above, the core wire (15) and the dielectric (1
Even if the plasma discharge tube is installed in a place subject to vibration such as an automobile, by filling the granular conductor (16) with the electrode 3) to form the rod-shaped electrode (12),
The rod-shaped electrode (12) and the dielectric material (13) around it can be kept in close contact with each other. as a result,
The discharge between the cylindrical electrode (11) and the rod-shaped electrode (12) can always be uniformly generated to perform stable exhaust gas treatment, and at the same time, the dielectric (13) may be damaged. It can be lost.

【0010】また、放電は尖った部分で起こり易いとい
う性質があることから、棒状電極(12)の外周面に細
かく突出した粒状導電体(16)の無数の粒子と円筒状
電極(11)との間で、効率よく放電を起こさせること
ができ、それによって排気ガス処理の効率を高めること
ができる。
Further, since the discharge tends to occur at a sharp portion, countless particles of the granular conductor (16) finely projected on the outer peripheral surface of the rod-shaped electrode (12) and the cylindrical electrode (11). In between, it is possible to efficiently cause a discharge, and thereby to enhance the efficiency of exhaust gas treatment.

【0011】なお、上記カッコ内の符号は、図面を参照
するためのものであり、何等本発明の構成を限定するも
のではない。
The reference numerals in parentheses are for reference to the drawings and do not limit the structure of the present invention.

【0012】[0012]

【実施例】以下、図面に基づいて本発明の実施例を説明
する。 〈実施例1〉図1は、本発明の実施例1におけるプラズ
マ放電管の構成を示す図で、(a)は側断面図、(b)
は縦断面図である。また図2は、そのプラズマ放電管を
設けた自動車の排気ガス処理システムの構成を示すブロ
ック図である。
Embodiments of the present invention will be described below with reference to the drawings. <Embodiment 1> FIG. 1 is a diagram showing a structure of a plasma discharge tube according to Embodiment 1 of the present invention, in which (a) is a side sectional view and (b) is a sectional view.
Is a vertical sectional view. FIG. 2 is a block diagram showing the configuration of an automobile exhaust gas treatment system provided with the plasma discharge tube.

【0013】図2に示すように、プラズマ放電管1は、
自動車の排気ガス処理システムにおけるエンジン2の排
気ライン3に接続されるもので、このプラズマ放電管1
には、高電圧電源5とアース6とが接続されている。ま
た上記排気ライン3には、プラズマ放電管1の下流側
に、触媒式排気ガス処理装置7とマフラー9とが直列に
接続されている。
As shown in FIG. 2, the plasma discharge tube 1 is
This plasma discharge tube 1 is connected to an exhaust line 3 of an engine 2 in an automobile exhaust gas treatment system.
A high-voltage power supply 5 and a ground 6 are connected to. A catalytic exhaust gas treatment device 7 and a muffler 9 are connected in series to the exhaust line 3 on the downstream side of the plasma discharge tube 1.

【0014】プラズマ放電管1は、図1に示すように、
円筒状電極11の中心軸上に棒状電極12を配置すると
ともに、その棒状電極12の周囲に誘電体13を設けて
成る円筒型の放電管で、その棒状電極12の構成に特徴
がある。
The plasma discharge tube 1 is, as shown in FIG.
The rod-shaped electrode 12 is arranged on the central axis of the cylindrical electrode 11, and a dielectric 13 is provided around the rod-shaped electrode 12, and the rod-shaped electrode 12 is characterized by its configuration.

【0015】即ち、このプラズマ放電管1の棒状電極1
2は、芯線15とそれを覆う粒状導電体16とから構成
されている。その粒状導電体16は、砂の粒子程度の細
かな導電性粒子から成り、芯線15と誘電体13との間
に充填されたものである。この粒状導電体16の材料と
しては、本実施例におけるプラズマ放電管1のように自
動車に搭載されて、温度が700度程度に達する排気ガ
スを処理する場合には、耐熱性を考慮して、例えばステ
ンレスビーズが用いられる。そのステンレスビーズを充
填する際には、自動車に搭載されて振動を受けてもビー
ズが動かないようにするため、振動を与えながら、でき
るかぎり密に充填する。
That is, the rod-shaped electrode 1 of this plasma discharge tube 1
2 is composed of a core wire 15 and a granular conductor 16 covering the core wire 15. The granular conductor 16 is made of conductive particles as small as sand particles, and is filled between the core wire 15 and the dielectric 13. As a material of the granular conductor 16, when it is mounted on an automobile like the plasma discharge tube 1 in the present embodiment and exhaust gas whose temperature reaches about 700 degrees is treated, heat resistance is taken into consideration, For example, stainless beads are used. When the stainless beads are filled, they are mounted on an automobile so that the beads do not move even when they are subjected to vibration, so that they are filled as close as possible while giving vibration.

【0016】また、上記誘電体13としては、やはり耐
熱性の点から、例えばセラミックが用いられる。さらに
本実施例では、上記棒状電極12の周囲の誘電体13と
は別個に、上記円筒状電極11の内周面にも、セラミッ
クから成る誘電体17が密着した状態で設けられてい
る。
Further, as the dielectric 13, ceramic is used, for example, from the viewpoint of heat resistance. Further, in this embodiment, a dielectric 17 made of ceramic is provided in close contact with the inner peripheral surface of the cylindrical electrode 11 separately from the dielectric 13 around the rod-shaped electrode 12.

【0017】上記構成のプラズマ放電管1において、円
筒状電極11をアース6(図1参照)に接続した状態
で、その円筒状電極11と棒状電極12の芯線15との
間に、高電圧電源5(図1参照)から高電圧を印加する
と、円筒状電極11と棒状電極12の粒状導電体16と
の間でプラズマ放電が起こる。そのプラズマ放電によっ
て、各電極11,12に設けられた誘電体13,17間
の空間部19を通過するエンジン2(図1参照)からの
排気ガス中に含まれるNOX は、N2 とO2 とに解離さ
れて除去されることになる。
In the plasma discharge tube 1 having the above structure, a high voltage power supply is provided between the cylindrical electrode 11 and the core wire 15 of the rod-shaped electrode 12 with the cylindrical electrode 11 connected to the ground 6 (see FIG. 1). When a high voltage is applied from 5 (see FIG. 1), plasma discharge occurs between the cylindrical electrode 11 and the granular conductor 16 of the rod electrode 12. Due to the plasma discharge, NO X contained in the exhaust gas from the engine 2 (see FIG. 1) passing through the space 19 between the dielectrics 13 and 17 provided on the electrodes 11 and 12 is N 2 and O. It will be dissociated into 2 and removed.

【0018】上記構成のプラズマ放電管1では、芯線
(15)と誘電体(13)との間に粒状導電体(16)
を充填して棒状電極(12)を構成したことにより、こ
のプラズマ放電管1を、自動車のように振動を受ける場
所に設置した場合でも、棒状電極12とその周囲の誘電
体13とを互いに密着させた状態に保持することができ
る。その結果、円筒状電極11と棒状電極12との間の
放電を常に均一に起こさせるようにして、安定した排気
ガス処理を行うことができ、それとともに、放電の集中
による誘電体13の破損のおそれをなくすことができ
る。
In the plasma discharge tube 1 having the above structure, the granular conductor (16) is provided between the core wire (15) and the dielectric (13).
Since the rod-shaped electrode (12) is filled by filling the rod-shaped electrode (12) and the surrounding dielectric body (13) with each other even when the plasma discharge tube (1) is installed in a place subject to vibration like an automobile. It can be held in the opened state. As a result, a stable exhaust gas treatment can be performed by always causing the discharge between the cylindrical electrode 11 and the rod-shaped electrode 12 to be uniform, and at the same time, damage to the dielectric 13 due to the concentration of the discharge can be prevented. You can eliminate the fear.

【0019】また、放電は尖った部分で起こり易いとい
う性質があることから、棒状電極12の外周面に細かく
突出した粒状導電体16の無数の粒子と円筒状電極11
との間で、効率よく放電を起こさせることができ、それ
によって排気ガス処理の効率を高めることができる。
Further, since the discharge tends to occur at a sharp portion, countless particles of the granular conductor 16 finely projected on the outer peripheral surface of the rod-shaped electrode 12 and the cylindrical electrode 11 are formed.
A discharge can be efficiently generated between the two, and thereby, the efficiency of exhaust gas treatment can be increased.

【0020】さらに、本実施例のように、円筒状電極1
1の内周面にも誘電体17を設けることによって、棒状
電極12の周囲の誘電体13のみの場合に比べ、放電の
均一性を、より一層高めることができる。 〈実施例2〉図3は、本発明の実施例2におけるプラズ
マ放電管の構成を示す縦断面図である。
Further, as in this embodiment, the cylindrical electrode 1
By providing the dielectric 17 also on the inner peripheral surface of 1, the uniformity of discharge can be further enhanced as compared with the case where only the dielectric 13 around the rod-shaped electrode 12 is provided. <Embodiment 2> FIG. 3 is a longitudinal sectional view showing the structure of a plasma discharge tube according to Embodiment 2 of the present invention.

【0021】図のようにこの実施例におけるプラズマ放
電管1では、棒状電極12の芯線15に放射状に仕切り
部材20が固定され、その仕切り部材20により、棒状
電極12の粒状導電体16が円周方向に複数部分、例え
ば五つの部分に仕切られている。その仕切り部材20の
材料としては、排気ガスの温度に対する耐熱性を考慮し
て、例えば粒状導電体16と同じステンレスが用いられ
る。
As shown in the figure, in the plasma discharge tube 1 of this embodiment, partition members 20 are radially fixed to the core wire 15 of the rod-shaped electrode 12, and the partition member 20 causes the granular conductors 16 of the rod-shaped electrode 12 to surround the circumference. It is divided into a plurality of parts in the direction, for example, five parts. As the material of the partition member 20, in consideration of the heat resistance to the temperature of the exhaust gas, for example, the same stainless steel as the granular conductor 16 is used.

【0022】このように上記仕切り部材20で粒状導電
体16を仕切ることによって、より強い振動を受けても
粒状導電体16を動かないように保持することができ
る。つまり、より強い振動に対しても、放電の均一性を
保持することができる。
By partitioning the granular conductor 16 by the partition member 20 as described above, the granular conductor 16 can be held so as not to move even when subjected to a stronger vibration. That is, it is possible to maintain the uniformity of discharge even with stronger vibration.

【0023】なお、その他の構成および作用について
は、上記実施例1と同様である。
The other structure and operation are the same as those in the first embodiment.

【0024】また、芯線15と誘電体13との間に充填
した粒状導電体16を動かないように保持する手段とし
ては、本実施例以外に、例えば、その粒状導電体16
を、バネなどの弾性部材によって圧力を加えた状態で保
持するようにしてもよい。
As means for holding the granular conductor 16 filled between the core wire 15 and the dielectric 13 so as not to move, other than the present embodiment, for example, the granular conductor 16 may be used.
May be held under pressure by an elastic member such as a spring.

【0025】[0025]

【発明の効果】以上説明したように、本発明に係るプラ
ズマ放電管によれば、棒状電極を、芯線と、その芯線と
誘電体との間に充填した粒状導電体とから構成したた
め、このプラズマ放電管を、自動車のように振動を受け
る場所に設置した場合でも、円筒状電極と棒状電極との
間の放電を常に均一に起こさせることができる。その結
果、安定した排気ガス処理を行うことができるととも
に、放電の集中による誘電体の破損のおそれもなくすこ
とができる。
As described above, according to the plasma discharge tube of the present invention, the rod-shaped electrode is composed of the core wire and the granular conductor filled between the core wire and the dielectric. Even when the discharge tube is installed in a place subject to vibration such as an automobile, the discharge between the cylindrical electrode and the rod-shaped electrode can always be uniformly generated. As a result, stable exhaust gas treatment can be performed, and the risk of damage to the dielectric due to concentration of discharge can be eliminated.

【0026】また、放電は尖った部分で起こり易いとい
う性質があることから、棒状電極の外周面に細かく突出
した粒状導電体の無数の粒子と円筒状電極との間で、効
率よく放電を起こさせることができ、それによって排気
ガス処理の効率を高めることができる。
Further, since the discharge tends to occur at a sharp portion, the discharge is efficiently generated between the cylindrical electrode and the innumerable particles of the granular conductor finely projected on the outer peripheral surface of the rod-shaped electrode. It is possible to increase the efficiency of exhaust gas treatment.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1におけるプラズマ放電管の構
成を示す図で、(a)は側断面図、(b)は縦断面図で
ある。
FIG. 1 is a diagram showing a configuration of a plasma discharge tube according to a first embodiment of the present invention, in which (a) is a side sectional view and (b) is a vertical sectional view.

【図2】同じプラズマ放電管を設けた自動車の排気ガス
処理システムの構成を示すブロック図である。
FIG. 2 is a block diagram showing a configuration of an automobile exhaust gas treatment system provided with the same plasma discharge tube.

【図3】本発明の実施例2におけるプラズマ放電管の構
成を示す縦断面図である。
FIG. 3 is a vertical cross-sectional view showing the structure of a plasma discharge tube according to a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 プラズマ放電管 2 エンジン 11 円筒状電極 12 棒状電極 13 誘電体 15 芯線 16 粒状導電体 17 誘電体 20 仕切り部材 DESCRIPTION OF SYMBOLS 1 Plasma discharge tube 2 Engine 11 Cylindrical electrode 12 Rod-shaped electrode 13 Dielectric 15 Core wire 16 Granular conductor 17 Dielectric 20 Partition member

───────────────────────────────────────────────────── フロントページの続き (72)発明者 安藤 正夫 東京都千代田区外神田2丁目19番12号 株 式会社エクォス・リサーチ内 (72)発明者 鈴木 雅博 東京都千代田区外神田2丁目19番12号 株 式会社エクォス・リサーチ内 (72)発明者 伊藤 義久エクォス・リサーチ内 東京都千代田区外神田2丁目19番12号 株 式会社エクォス・リサーチ内 (72)発明者 永田 秀海 神奈川県横浜市鶴見区元宮1丁目10番8号 シシド静電気株式会社横浜工場内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Masao Ando 2-19-12 Sotokanda, Chiyoda-ku, Tokyo Equas Research Co., Ltd. (72) Inventor Masahiro Suzuki 2-19 Sotokanda, Chiyoda-ku, Tokyo No. 12 Incorporated company Equos Research (72) Inventor Yoshihisa Ito Within Equos Research 2-19 Sotokanda Sotokanda, Chiyoda-ku, Tokyo Incorporated company Equos Research (72) Inventor Hidemi Nagata Yokohama, Kanagawa 1-10 Motomiya, Tsurumi-ku, Shishi City Shishido Static Electricity Co., Ltd. Yokohama factory

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 円筒状電極の中心軸上に棒状電極を配置
するとともに、該棒状電極の周囲に誘電体を設けて成
り、エンジンからの排気ガス中に含まれる窒素酸化物
を、上記両電極間の放電によって解離し除去する排気ガ
ス処理用のプラズマ放電管において、 上記棒状電極は、芯線と、該芯線と上記誘電体との間に
充填された粒状導電体とから成り、 上記円筒状電極の内周面に誘電体を備えたことを特徴と
する排気ガス処理用のプラズマ放電管。
1. A rod-shaped electrode is arranged on the central axis of a cylindrical electrode, and a dielectric is provided around the rod-shaped electrode. Nitrogen oxide contained in exhaust gas from an engine is removed from the electrodes. In the plasma discharge tube for exhaust gas treatment, which dissociates and removes by discharge between the rod-shaped electrodes, the rod-shaped electrode includes a core wire and a granular conductor filled between the core wire and the dielectric, and the cylindrical electrode. A plasma discharge tube for treating exhaust gas, characterized in that a dielectric is provided on the inner peripheral surface of the.
【請求項2】 上記棒状電極の粒状導電体として、ステ
ンレスビーズを用いたことを特徴とする請求項1記載の
排気ガス処理用のプラズマ放電管。
2. The plasma discharge tube for treating exhaust gas according to claim 1, wherein stainless beads are used as the granular conductor of the rod-shaped electrode.
【請求項3】 上記棒状電極の芯線に放射状に仕切り部
材を固定することにより、上記棒状電極の粒状導電体を
円周方向に複数部分に仕切ったことを特徴とする請求項
1または2記載の排気ガス処理用のプラズマ放電管。
3. The granular conductor of the rod-shaped electrode is divided into a plurality of portions in the circumferential direction by radially fixing a partition member to the core wire of the rod-shaped electrode. Plasma discharge tube for exhaust gas treatment.
JP35177893A 1993-12-29 1993-12-29 Plasma discharge tube for processing exhaust gas Pending JPH07197806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35177893A JPH07197806A (en) 1993-12-29 1993-12-29 Plasma discharge tube for processing exhaust gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35177893A JPH07197806A (en) 1993-12-29 1993-12-29 Plasma discharge tube for processing exhaust gas

Publications (1)

Publication Number Publication Date
JPH07197806A true JPH07197806A (en) 1995-08-01

Family

ID=18419552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35177893A Pending JPH07197806A (en) 1993-12-29 1993-12-29 Plasma discharge tube for processing exhaust gas

Country Status (1)

Country Link
JP (1) JPH07197806A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002028500A (en) * 2000-07-14 2002-01-29 Fujitsu Ltd Device and method for preparing catalyst and device and. method for chemical reaction
WO2003067046A1 (en) * 2002-02-07 2003-08-14 Furrex Co., Ltd. Discharge type gas cleaner
WO2003098014A1 (en) * 2002-05-17 2003-11-27 Furrex Co., Ltd. Discharge type exhaust emission control system
JP2006144563A (en) * 2004-11-16 2006-06-08 Hino Motors Ltd Emission control device
US7160521B2 (en) 2001-07-11 2007-01-09 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber
WO2008123557A1 (en) * 2007-03-29 2008-10-16 Toyota Jidosha Kabushiki Kaisha Exhaust gas cleaning device
JP2012167614A (en) * 2011-02-15 2012-09-06 Mitsui Eng & Shipbuild Co Ltd Plasma generating device
JP5405296B2 (en) * 2007-03-05 2014-02-05 オーニット株式会社 Low temperature plasma generator
US9617635B2 (en) 2012-11-07 2017-04-11 Samsung Display Co., Ltd. Vapor deposition apparatus
JP2018123748A (en) * 2017-01-31 2018-08-09 ダイハツ工業株式会社 Plasma reactor
JP2020118089A (en) * 2019-01-23 2020-08-06 トヨタ自動車株式会社 Electrochemical reactor

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002028500A (en) * 2000-07-14 2002-01-29 Fujitsu Ltd Device and method for preparing catalyst and device and. method for chemical reaction
US7160521B2 (en) 2001-07-11 2007-01-09 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber
WO2003067046A1 (en) * 2002-02-07 2003-08-14 Furrex Co., Ltd. Discharge type gas cleaner
WO2003098014A1 (en) * 2002-05-17 2003-11-27 Furrex Co., Ltd. Discharge type exhaust emission control system
JP2006144563A (en) * 2004-11-16 2006-06-08 Hino Motors Ltd Emission control device
JP5405296B2 (en) * 2007-03-05 2014-02-05 オーニット株式会社 Low temperature plasma generator
WO2008123557A1 (en) * 2007-03-29 2008-10-16 Toyota Jidosha Kabushiki Kaisha Exhaust gas cleaning device
US8236094B2 (en) 2007-03-29 2012-08-07 Toyota Jidosha Kabushiki Kaisha Exhaust gas purifying device
JP2012167614A (en) * 2011-02-15 2012-09-06 Mitsui Eng & Shipbuild Co Ltd Plasma generating device
US9617635B2 (en) 2012-11-07 2017-04-11 Samsung Display Co., Ltd. Vapor deposition apparatus
JP2018123748A (en) * 2017-01-31 2018-08-09 ダイハツ工業株式会社 Plasma reactor
JP2020118089A (en) * 2019-01-23 2020-08-06 トヨタ自動車株式会社 Electrochemical reactor

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