JPH07196386A - Heat-resistant member - Google Patents

Abstract

PURPOSE:To obtain a heat-resistant member repeatedly usable in a gaseous atmosphere at a high temperature by laminating a heatresistant metal layer on a carbon fiber-reinforced carbon composite material interposing an intermediate layer. CONSTITUTION:This heat-resistant member is produced by impregnating a thermosetting resin in carbon fiber, forming to a desired form, heat-treating in an inert gas atmosphere to obtain a carbon fiber-reinforced carbon composite material and laminating a heat-resistant metal layer having a thickness of 0.2-3mm to the surface of the composite material interposing an intermediate layer made of ceramic and having a thickness of 2-300mum.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat-resistant member useful as a jig for hardening parts of automobiles, vehicles, industrial machines, etc., a jig for a semiconductor diffusion furnace, a roller for a heat treatment furnace, etc.

[0002]

2. Description of the Related Art With the recent intensification of competition in the automobile industry, great efforts have been made to improve productivity in manufacturing and processing of a large number of parts, and automation as much as possible is realized at the production site. Has been done. However, some processes have not been realized yet. For example, in the heat treatment process of gears, cams, etc., a rod made of heat-resistant steel is used as a jig, but the rod is severely deformed when repeatedly used at a high temperature of about 1,000 ° C. It is not automated because it is impossible. The same can be said for heat-resistant steel used as a jig for a brazing furnace.

In recent years, carbon fiber reinforced composite materials (hereinafter sometimes abbreviated as C-C composites) have attracted attention from the viewpoint of heat resistance, strength, wear resistance and the like. This CC
Composites are used as sliding materials for aircraft brakes, aerospace materials such as rocket nozzles, high temperature hot press dies and other mechanical parts materials, artificial tooth roots, etc., and recently, materials for semiconductor manufacturing equipment and nuclear reactors. The use as a member or a biomaterial is also under study. The C-C composite can be repeatedly used even at a high temperature of 1,500 ° C. or more, but since it is worn by gases such as H ₂ O, CO ₂ , O _{2 and the} like, in the heat treatment step using these gases, ,I can not use it.

Therefore, in order to use it as a jig in the quenching step, it is conceivable to use C--C composite as a base material and coat it with a heat resistant metal.
At a moderate temperature, the metal reacts with the C-C composite, so that long-term use is also impossible. Also, a carbon jig for semiconductor diffusion in which a surface of a C-C composite is covered with a SiC film of 80 to 2,000 μm (Japanese Patent Laid-Open No. 4-443).
No. 15) is proposed, but in this case, when repeatedly placed at a high temperature of about 1,000 ° C., the ceramics and C-
Due to the difference in the coefficient of thermal expansion from the C composite, pinholes and the like are generated, and the C-C composite is worn by the atmospheric gas,
After all, long-term use is impossible.

[0005]

SUMMARY OF THE INVENTION Therefore, the present invention has been made in view of the above-mentioned prior art.
It is an object of the present invention to provide a heat resistant member that can be repeatedly used at a high temperature of about 1,000 ° C. in a gas atmosphere of ₂ O, CO ₂ , O ₂ or the like.

[0006]

According to the present invention, a carbon fiber reinforced carbon composite material is used as a base material, and a heat resistant metal layer is laminated on the base material via an intermediate layer made of ceramics. A heat resistant member is provided.

Since the heat-resistant member of the present invention is formed by laminating the ceramic layer and the heat-resistant metal layer in this order on the C--C composite substrate, the atmosphere of H ₂ O, CO ₂ , O _2, etc. It can be used repeatedly at a high temperature of about 1,000 ° C.

The present invention will be described in detail below. As the C-C composite used as the base material in the present invention, any of those manufactured by a conventionally known method can be used. That is, conventionally, the C-C composite is simply formed by preliminarily maintaining the carbon, put it in a furnace and heat it at a high temperature,
Then, a hydrocarbon gas is passed through the furnace for decomposing and carbonizing, and carbon is deposited and solidified on the surface (so-called CVD method), or a bundle of carbon fibers, woven fabric, non-woven fabric, etc. is thermally cured with phenol resin or epoxy resin. It has been manufactured by a method of carbonizing the resin by performing heat treatment in an inert gas atmosphere after molding the resin into a desired shape, but any of these can be used. However, from the viewpoint of manufacturing period and cost, a plurality of reinforcing fibers including petroleum and / or petroleum-based binder pitch powder having softening property and petroleum and / or coal-based coke powder having no softening property are used as cores. It is preferable to use a material obtained by firing a flexible intermediate material (described in Japanese Patent Publication No. 4-72791) in which a flexible sleeve made of a thermoplastic resin is provided around the material.

In the present invention, the C-C composite substrate may have any shape such as a rod shape, a tubular shape, a plate shape, or the like.

In the present invention, the intermediate layer made of ceramics is first laminated on the CC composite substrate.
The types of ceramics are SiC, TiC, ZrC,
WC, TiN, ZrN, AlN, BN, Si ₃ N ₄ , Al
₂ O ₃ , TiO ₂ , Cr ₂ O ₃ , SiO ₂ or the like is used.

As a ceramic layer forming method, CVD is used.
Method, PVD method, ion plating, sputtering, thermal spraying, aqueous glass coating, laser deposition method,
Conventional methods such as plasma spraying, plating lining, painting, etc. can be used. The thickness of the ceramics intermediate layer is
The range of 2 to 300 μm is preferable. If it is less than 2 μm, it is difficult to completely suppress the reaction between metal and carbon, and if it exceeds 300 μm, peeling tends to occur.

In the present invention, a heat resistant metal layer is further laminated on the intermediate layer. As the type of metal layer, carbon steel, stainless steel, molybdenum steel, nickel steel, other heat-resistant alloys or non-ferrous metals such as aluminum and copper,
And non-ferrous alloys made of these. As a method for providing the heat-resistant metal layer, it is also possible to cover with a shape method such as a CVD method, a PVD method, an ion plating method, a sputtering method, a laser deposition method, a plating lining, or a heat-resistant metal pipe. However, in this case, it is necessary to seal both ends by means such as crimping or welding. This thickness is preferably in the range of 0.2 to 3 mm. When it is less than 0.2 mm, the mechanical strength is insufficient and it is easy to crack. On the contrary, when it is more than 3 mm, the carbon material is easily bent due to thermal deformation during use.

[0013]

EXAMPLES The present invention will be described in more detail with reference to examples below, but the technical scope of the present invention is not limited by these.

Example 1 A carbon fiber reinforced carbon composite material having a diameter of 9 mm and a length of 60 cm was used as a base material, and silicon carbide having a film thickness of 40 μm was applied onto the base material.
0.5mm thick stainless steel (SUS304) around it
Was coated to prepare a round bar having a diameter of 10φ. Using this round bar, a 60 cm × 60 cm × 60 cm basket was prepared. The connection point of the round bar was fixed by welding. Using this basket, heat treatment for brazing metal parts was performed.
The temperature is 1,160 ° C and the composition of the carrier gas is CO 2
%, CO ₂ 10%, H ₂ 2%, N ₂ 86%. When this jig was subjected to a durability test, it did not deform even after one year or more passed, and the jig did not deform in the steps before and after the heat treatment furnace, so automation was also possible.

Comparative Example 1 Instead of the round bar of Example 1, the diameter of SUS 304 was 10 m.
A similar basket was produced using a round bar having a length of m and a length of 60 cm. The heat treatment furnace and heat treatment conditions were tested in the same manner as in Example 1, and as a result, this jig was severely thermally deformed after one month and the operability was deteriorated. Further, automation was impossible in the steps before and after the heat treatment furnace.

Comparative Example 2 A similar basket was prepared by using a round bar of carbon fiber reinforced carbon composite material having a diameter of 10 mm and a length of 60 cm in place of the round bar of Example 1. The heat treatment conditions are the same as in Comparative Example 1. As a result, after about 3 weeks, the material was abraded due to oxidation, which made it difficult to form a basket.

Comparative Example 3 A basket having the same shape as the round bar of Example 1 and having no intermediate layer made of ceramics was prepared, and the same heat treatment test was carried out. As a result, the basket broke in 4 to 5 months. It was found that the cause was that the reaction between the carbon of the base material and the coated metal proceeded, the coated metal was destroyed, and then the base material was oxidized by the atmospheric gas.

[0018]

The heat-resistant member of the present invention comprises a carbon fiber reinforced carbon composite material as a base material, and a heat-resistant metal layer is laminated on the base material with an intermediate layer made of ceramics interposed therebetween. When used as, since there is almost no thermal deformation, automation is possible and the weight is greatly reduced, so that the amount of heat stored is also reduced, resulting in a great energy saving effect.

Claims (1)

[Claims] 1. A carbon fiber reinforced carbon composite material as a base material,
A heat-resistant member comprising a heat-resistant metal layer laminated on an intermediate layer made of ceramics.