JPH07191756A - Fine driving device and information recording and/or reproducing device using the same - Google Patents

Fine driving device and information recording and/or reproducing device using the same

Info

Publication number
JPH07191756A
JPH07191756A JP33042593A JP33042593A JPH07191756A JP H07191756 A JPH07191756 A JP H07191756A JP 33042593 A JP33042593 A JP 33042593A JP 33042593 A JP33042593 A JP 33042593A JP H07191756 A JPH07191756 A JP H07191756A
Authority
JP
Japan
Prior art keywords
piezoelectric elements
fine movement
pair
driving
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33042593A
Other languages
Japanese (ja)
Inventor
Masahiro Tagawa
昌宏 多川
Toshihiko Miyazaki
俊彦 宮▲崎▼
Akira Kuroda
亮 黒田
Toshimitsu Kawase
俊光 川瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP33042593A priority Critical patent/JPH07191756A/en
Publication of JPH07191756A publication Critical patent/JPH07191756A/en
Pending legal-status Critical Current

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  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To realize high-speed and correct fine driving by in creasing intrinsic frequency in a fine driving mechanism using a pair of piezoelectric elements. CONSTITUTION:In the fine driving mechanism in which a pair of the piezoelectric elements 13a, 13b coincident with each other in their electrode arranging directions are fitted before and behind the driving direction of a movable part 12, and the movable part 12 is driven by expanding and contracting a pair of the piezoelectric elements 13a, 13b mutually in the driving direction by impressing voltage to them, tension in the driving direction is increased by shifting mutually the phases of the driving voltage to be impressed respectively to a pair of the piezoelectric elements 13a, 13b.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えば走査型トンネル
顕微鏡や精密な位置制御が要求される機器に好適に適用
し得る微動駆動装置及びそれを用いた情報記録及び/又
は再生装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine movement driving device and an information recording and / or reproducing device using the fine movement driving device which can be suitably applied to, for example, a scanning tunnel microscope or a device requiring precise position control. is there.

【0002】[0002]

【従来の技術】従来から知られている微動駆動装置は、
図8に示されているように、分極処理をした1対の同特
性の圧電素子1a,1bを順方向に直列させることによ
り、可動部2を挟設してなる微動駆動機構を構成し、両
圧電素子1a,1bに同じ大きさの順方向バイアス電圧
B を印加して同量だけ伸長させると共に、それぞれに
1つの駆動信号を出力極性が相反する2つの増幅器3
a,3bにより増幅して、得られる互いに逆相の駆動電
圧を重畳させることによって、2つの圧電素子1a,1
bの伸長量が互いに逆方向となるように増減し可動部2
を移動させている。
2. Description of the Related Art A fine movement drive device known in the past is
As shown in FIG. 8, a pair of piezoelectric elements 1a and 1b having the same characteristics, which have been polarized, are arranged in series in the forward direction to form a fine movement drive mechanism in which the movable portion 2 is sandwiched. A forward bias voltage V B having the same magnitude is applied to both piezoelectric elements 1a and 1b to extend the same amount, and one drive signal is output to each of the two amplifiers 3 whose output polarities are opposite to each other.
a and 3b are amplified, and the obtained drive voltages of opposite phases are superposed on each other so that the two piezoelectric elements 1a and 1b
The amount of expansion of b is increased or decreased so as to be opposite to each other, and the movable portion 2
Are moving.

【0003】[0003]

【発明が解決しようとする課題】この様な微動駆動装置
の駆動速度の限界は、微動駆動機構の固有振動数によっ
て制限されているが、分極処理した1対の同特性の圧電
素子を可動部に対し直列に配置し、2つの圧電素子を互
いに逆方向に伸長させて駆動する微動駆動機構では、2
つの圧電素子が可動部の駆動方向に及ぼす力(これを軸
力と称する)が、固有振動数を決定する最も大きな要因
の1つになっている。
Although the limit of the driving speed of such a fine movement driving device is limited by the natural frequency of the fine movement driving mechanism, a pair of polarized piezoelectric elements having the same characteristics are used as the movable portion. With respect to the fine movement drive mechanism which is arranged in series with respect to each other and drives two piezoelectric elements by extending them in opposite directions,
The force exerted by the two piezoelectric elements in the driving direction of the movable portion (this is referred to as axial force) is one of the largest factors that determine the natural frequency.

【0004】この軸力と固有振動数の関係にはほぼ比例
関係があり、軸力が高くなるほど固有振動数は上昇す
る。
The relationship between the axial force and the natural frequency is almost proportional, and the higher the axial force, the higher the natural frequency.

【0005】しかしながら上述の従来例では、分極処理
した1対の同特性の圧電素子を可動部に対し直列に配置
し、2つの圧電素子を互いに逆方向に同量だけ同時に伸
長させているため、可動部にかかる軸力が一定になり、
固有振動数をある程度以上に上昇させることができな
い。
However, in the above-mentioned conventional example, a pair of polarized piezoelectric elements having the same characteristics are arranged in series with respect to the movable portion, and the two piezoelectric elements are simultaneously extended in the opposite directions by the same amount. The axial force applied to the movable part becomes constant,
The natural frequency cannot be raised above a certain level.

【0006】軸力を上昇させるには、圧電素子の両端に
印加される電圧を増加させれば良いが、圧電素子の耐電
圧以上を印加することはできず、従って固有振動数の上
昇にも限界がある。
In order to increase the axial force, it is sufficient to increase the voltage applied to both ends of the piezoelectric element, but it is not possible to apply more than the withstand voltage of the piezoelectric element, and therefore the natural frequency is also increased. There is a limit.

【0007】本発明の目的は、従来の微動駆動機構の可
動部と圧電素子の位置関係を変えずに、可動部にかかる
軸力を上昇させることによって上述の従来方法の欠点を
解消し、剛性が高く、正確な微動駆動が行える微動駆動
装置及びそれを用いた情報記録及び/又は再生装置を提
供することにある。
An object of the present invention is to eliminate the above-mentioned drawbacks of the conventional method by increasing the axial force applied to the movable portion without changing the positional relationship between the movable portion and the piezoelectric element of the conventional fine movement drive mechanism, and to improve the rigidity. It is an object of the present invention to provide a fine movement driving device that can drive fine movement accurately and an information recording and / or reproducing apparatus using the same.

【0008】[0008]

【課題を解決するための手段】上記の目的を達成するた
めに、本発明は、可動部の駆動方向の前後に、それぞれ
の電極配置方向を互いに一致させて1対の圧電素子を取
付け、該1対の圧電素子の伸縮を印加する駆動電圧によ
って互いに逆動作させる微動駆動機構において、前記駆
動電圧の位相をずらせて印加する手段を備えることを特
徴とする。
In order to achieve the above-mentioned object, the present invention has a pair of piezoelectric elements mounted before and after the driving direction of a movable part so that their respective electrode arrangement directions coincide with each other. A fine movement drive mechanism that causes the pair of piezoelectric elements to operate in opposite directions by a drive voltage that applies expansion and contraction is provided with means for applying the drive voltage while shifting the phase of the drive voltage.

【0009】また、可動部の第1の駆動方向の前後に、
それぞれの電極配置方向を互いに一致させて取付けた第
1の1対の圧電素子と、該第1の1対の圧電素子のそれ
ぞれの外側部分を支持する支持体と、該支持体の第1の
駆動方向とは異なる第2の駆動方向の両側に、それぞれ
の電極配置方向を互いに一致させて取付けた第2の1対
の圧電素子と、前記第1,第2のそれぞれ1対の圧電素
子の伸縮を印加する駆動電圧によって互いに逆動作させ
る2軸微動駆動機構において、前記駆動電圧の位相をず
らせて印加する手段を備えることを特徴とする。
Further, before and after the movable portion in the first driving direction,
A first pair of piezoelectric elements mounted so that their respective electrode arrangement directions are aligned with each other, a support body supporting each outer portion of the first pair of piezoelectric elements, and a first support body of the support body. A second pair of piezoelectric elements mounted on both sides of a second driving direction different from the driving direction such that their respective electrode arrangement directions coincide with each other; and a pair of the first and second piezoelectric elements. A biaxial fine movement drive mechanism that causes the expansion and contraction of the drive voltage to operate in opposite directions to each other is provided with means for applying the drive voltage while shifting the phase thereof.

【0010】さらに、情報記録媒体を支持する支持部
と、前記情報記録媒体に対して情報の記録及び/又は再
生を行うためのプローブ電極と、該プローブ電極を前記
情報記録媒体に相対的に走査する微動駆動手段を具備す
る情報記録及び/又は再生装置において、前記微動駆動
手段として前記の微動駆動装置を用いることを特徴とす
る。
Further, a supporting portion for supporting the information recording medium, a probe electrode for recording and / or reproducing information on the information recording medium, and a scanning of the probe electrode relative to the information recording medium. In the information recording and / or reproducing apparatus provided with the fine movement driving means, the fine movement driving device is used as the fine movement driving means.

【0011】[0011]

【作用】可動部の駆動方向の前後に、取付けられる1対
の圧電素子それぞれに、駆動量の減少を招くことのない
範囲で位相差のある駆動電圧を印加することで、可動部
に作用する軸力を容易に上昇させることができ、微動駆
動機構の固有振動数を高めることができる。
The movable portion is acted on by applying a driving voltage having a phase difference to each of a pair of piezoelectric elements mounted before and after the movable portion in the driving direction, within a range that does not reduce the driving amount. The axial force can be easily increased, and the natural frequency of the fine motion drive mechanism can be increased.

【0012】[0012]

【実施例】本発明の原理を図1〜図2を用いて説明す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The principle of the present invention will be described with reference to FIGS.

【0013】図1は本発明の微動駆動装置の原理的な説
明図であり、ガイド機構11に摺動可能に取りつけられ
た可動部12の両側には圧電素子13a、13bが取り
つけられ、例えば何れも中央に負極が現れるように分極
処理されている。
FIG. 1 is a principle explanatory view of a fine movement drive device of the present invention. Piezoelectric elements 13a and 13b are attached to both sides of a movable portion 12 which is slidably attached to a guide mechanism 11. Is polarized so that the negative electrode appears in the center.

【0014】このように配置された微動駆動機構は、例
えば圧電素子13a、13bの負極側電極を基準電位に
接地すると共に、他方の正極側電極に増幅器15からの
駆動電圧を印加する。そしてどちらか一方の圧電素子の
正極側電極と増幅器15との間に、駆動電圧の位相を遅
らせるための遅延回路18を設ける。本説明では圧電素
子13bの正極側電極と増幅器15との間に遅延回路1
8を設けた。
The fine movement drive mechanism thus arranged grounds the negative electrodes of the piezoelectric elements 13a and 13b to the reference potential, and applies the drive voltage from the amplifier 15 to the other positive electrode. Then, a delay circuit 18 for delaying the phase of the drive voltage is provided between the positive electrode of one of the piezoelectric elements and the amplifier 15. In this description, the delay circuit 1 is provided between the positive electrode of the piezoelectric element 13b and the amplifier 15.
8 is provided.

【0015】図2(a)は圧電素子13a、(b)は圧
電素子13bにそれぞれ印加される駆動電圧の時間変化
を示したもので、電圧E/2を中心にして、電圧0から
電圧Eまでの間で変化する正電圧である。
FIG. 2A shows the change over time of the driving voltage applied to the piezoelectric element 13a and FIG. 2B, respectively, and shows the time variation of the driving voltage applied to the piezoelectric element 13b. Is a positive voltage that varies between

【0016】圧電素子13bに印加される電圧は、遅延
回路18により圧電素子13aに印加される電圧波形と
同形であり、位相をπだけずらしてある。
The voltage applied to the piezoelectric element 13b has the same shape as the voltage waveform applied to the piezoelectric element 13a by the delay circuit 18, and the phase is shifted by π.

【0017】駆動電圧波形として、駆動電圧波形の交流
成分のduty比(図2のT2に対するT1の値)が1
でないような波形を選択している。
As the drive voltage waveform, the duty ratio of the AC component of the drive voltage waveform (value of T1 with respect to T2 in FIG. 2) is 1.
Select a waveform that does not.

【0018】駆動電圧波形を前述のように選択し、更に
位相を非同期にすることで、圧電素子13a、13bの
変位量は互いに同期せず、図2(c)に示されるように
duty比が1(T1=T2)の時の軸力(f0)より
も可動部に作用する軸力が最大△fだけ高くなる。その
際の軸力f1は(T1+T2)/2周期で増減する。以
下実施例により本発明を具体的に説明する。
By selecting the drive voltage waveform as described above and making the phases asynchronous, the displacement amounts of the piezoelectric elements 13a and 13b are not synchronized with each other, and the duty ratio is changed as shown in FIG. 2 (c). The axial force acting on the movable part is higher by a maximum Δf than the axial force (f0) when 1 (T1 = T2). The axial force f1 at that time increases / decreases in (T1 + T2) / 2 cycles. The present invention will be specifically described below with reference to examples.

【0019】実施例1 本実施例では駆動電圧として図2(a)に示されるE=
100V、T1=120ms、T2=80msとした駆
動電圧波形を圧電素子13aに印加した。圧電素子13
bには遅延回路18により同形でπだけ位相がずれてい
る駆動電圧波形が印加される。
Embodiment 1 In this embodiment, E = shown as a driving voltage in FIG.
A drive voltage waveform with 100 V, T1 = 120 ms, and T2 = 80 ms was applied to the piezoelectric element 13a. Piezoelectric element 13
A drive voltage waveform having the same shape and a phase difference of π is applied to b by the delay circuit 18.

【0020】本実施例では駆動波形の交流成分のdut
y比が1である波形を、πだけ位相をずらして各々の圧
電素子に印加した場合の軸力f0が100kgfなのに
対し、本発明の手段をこうじることにより軸力は最大5
0kgf増加した。
In the present embodiment, the dut of the AC component of the drive waveform
The axial force f0 when a waveform having a y ratio of 1 is applied to each piezoelectric element by shifting the phase by π is 100 kgf, whereas the axial force f5 is maximal by applying the means of the present invention.
It increased by 0 kgf.

【0021】従って、軸力が高くなった分、微動駆動機
構の固有振動数が上昇する。
Therefore, the natural frequency of the fine motion drive mechanism increases as the axial force increases.

【0022】本実施例では、圧電素子として積層型の圧
電素子を用いた。
In this embodiment, a laminated piezoelectric element was used as the piezoelectric element.

【0023】図3は、本実施例による可動部12がガイ
ド機構11に対する変位量を、非接触式の静電容量セン
サーを用いて測定した結果である。
FIG. 3 shows the result of measurement of the amount of displacement of the movable portion 12 with respect to the guide mechanism 11 using a non-contact type capacitance sensor according to this embodiment.

【0024】駆動電圧の波形を図2のようなものに選ぶ
ことにより、位相をずらす前と同量の変位量(この例で
は5μm)を得ることができる。
By selecting the waveform of the drive voltage as shown in FIG. 2, it is possible to obtain the same displacement amount (5 μm in this example) as before the phase shift.

【0025】このように本実施例では、圧電素子に印加
される電圧の位相をずらすことにより、可動部に働く軸
力を変更できるので、微動駆動機構の固有振動数を上昇
させることができ、高速で正確な可動部12の駆動を実
現することができる。
As described above, in this embodiment, the axial force acting on the movable portion can be changed by shifting the phase of the voltage applied to the piezoelectric element, so that the natural frequency of the fine movement drive mechanism can be increased. It is possible to realize high-speed and accurate driving of the movable portion 12.

【0026】なお、上記の配線のまま圧電素子13a、
13bの可動部12に対する左右関係を逆転させても駆
動可能であり、この場合には可動部12の駆動方向が上
記の場合とは逆になる。
The piezoelectric elements 13a,
It is possible to drive even if the left-right relationship of 13b with respect to the movable portion 12 is reversed, and in this case, the driving direction of the movable portion 12 is opposite to the above case.

【0027】本実施例では駆動電圧波形として図2
(a)に示される波形を用いたが、これはなんら制限さ
れるものでなく、駆動波形の交流成分のduty比が1
以外であればよく、図4、5に示されるような波形でも
構わない。
In this embodiment, the drive voltage waveform is shown in FIG.
Although the waveform shown in (a) is used, this is not a limitation and the duty ratio of the AC component of the drive waveform is 1
Any other waveform may be used, and the waveforms shown in FIGS.

【0028】実施例2 図6は第2の実施例の構成図である。図6において、弾
性ヒンジばね11a,11b,11c,11dからなる
ガイド機構により、図面左右方向に移動可能とされた可
動部12は、第1の枠体17の中央に配置されており、
可動部12と枠体17の左右の間隙に配置された例えば
感度0.1(μm/V)の圧電素子13a,13bは、
それぞれに例えば50(V)の電圧がかけられた際に、
5(μm)ずつ伸長するようにされている。
Second Embodiment FIG. 6 is a block diagram of the second embodiment. In FIG. 6, the movable portion 12 that is movable in the left-right direction in the drawing by the guide mechanism including the elastic hinge springs 11a, 11b, 11c, and 11d is arranged in the center of the first frame body 17,
For example, the piezoelectric elements 13a and 13b having a sensitivity of 0.1 (μm / V), which are arranged in the left and right gaps between the movable portion 12 and the frame 17,
For example, when a voltage of 50 (V) is applied to each,
It is designed to extend by 5 (μm).

【0029】また、第1の枠体17の外側には第2の枠
体19が配置され、第1の枠体17は弾性ヒンジばね1
1e,11f,11g,11hからなるガイド機構によ
って第2の枠体19から図面の上下方向に移動可能に支
持され、上下の間隙に設けられた圧電素子13c,13
dにより枠体17、可動部12を図面の上下方向に相対
的に駆動可能とされている。なお、圧電素子13c,1
3dを駆動する制御回路は、図示した圧電素子13a,
13bを駆動する回路と全く同じ構成になっており、複
雑化を避けるために図示を省略している。
A second frame body 19 is arranged outside the first frame body 17, and the first frame body 17 is made of the elastic hinge spring 1.
Piezoelectric elements 13c, 13 supported by a guide mechanism composed of 1e, 11f, 11g, 11h so as to be movable in the vertical direction in the drawing from the second frame 19 and provided in the upper and lower gaps.
The frame 17 and the movable portion 12 can be relatively driven in the vertical direction in the drawing by d. The piezoelectric elements 13c, 1
The control circuit for driving 3d includes the illustrated piezoelectric element 13a,
It has exactly the same configuration as the circuit that drives 13b, and is not shown in the figure to avoid complication.

【0030】上述の構成で、圧電素子13a,13bに
対して、図2に示されているような波形で振幅が10V
PPの駆動信号を増幅器15を通して10倍にし、圧電素
子13aにはそのまま、圧電素子13bには遅延回路1
8により位相をπだけずらして印加される。
With the above-mentioned structure, the piezoelectric elements 13a and 13b have a waveform as shown in FIG. 2 and an amplitude of 10V.
The PP drive signal is multiplied by 10 through the amplifier 15, and the piezoelectric element 13a remains unchanged, and the piezoelectric element 13b uses the delay circuit 1 as it is.
By 8 the phase is shifted by π and applied.

【0031】各々の圧電素子は駆動電圧の波形に伴って
伸縮しようとするが、可動部12の前後に圧電素子が位
置しているので、波形通りには伸縮できず、その分、軸
力として可動部12に加わることになる。この結果、微
動駆動機構の固有振動数が上昇する。
Each piezoelectric element tries to expand and contract according to the waveform of the driving voltage, but since the piezoelectric elements are located in front of and behind the movable portion 12, the piezoelectric elements cannot expand and contract according to the waveform, and as a result, the axial force is increased. It will be added to the movable part 12. As a result, the natural frequency of the fine movement drive mechanism increases.

【0032】なお、圧電素子13c,13dについても
同様な駆動制御により、可動部12を上下方向に微動す
ることができる。
The movable portion 12 can be finely moved in the vertical direction by the same drive control for the piezoelectric elements 13c and 13d.

【0033】このように本実施例では、圧電素子に印加
される電圧の位相をずらすことにより、固有振動数を上
昇させることができ、増幅器15に入力される駆動電圧
の位相を遅延回路18で位相をπ遅らせることにより、
X方向の固有振動数が5.6kHzから6.1kHz
に、またY方向は2.6kHzから3.0kHzへと1
0%程度上昇させることができた。固有振動数は、可動
部の変位量を静電容量センサーで測定し、スペクトラム
アナライザで解析することにより算出した。
As described above, in this embodiment, the natural frequency can be increased by shifting the phase of the voltage applied to the piezoelectric element, and the phase of the drive voltage input to the amplifier 15 is delayed by the delay circuit 18. By delaying the phase by π,
Natural frequency in X direction from 5.6kHz to 6.1kHz
In the Y direction, from 2.6 kHz to 3.0 kHz, 1
It was possible to raise it by about 0%. The natural frequency was calculated by measuring the displacement of the movable part with a capacitance sensor and analyzing it with a spectrum analyzer.

【0034】なお、以上何れの場合においても、駆動電
圧が各々の圧電素子の耐圧を超過したり、圧電素子13
a,13bに分極方向と逆の電界が印加することがない
ように制限することが、圧電素子13の劣化を防止する
上で望ましい。
In any of the above cases, the driving voltage exceeds the withstand voltage of each piezoelectric element, or the piezoelectric element 13
In order to prevent the piezoelectric element 13 from being deteriorated, it is desirable to limit the electric fields opposite to the polarization directions to a and 13b.

【0035】実施例3 図7は第3の実施例である情報記録及び/又は再生装置
のブロック線図であり、同図において21はマイクロメ
カニクス技術で作成された複数のプローブ電極、22は
複数のプローブ電極をZ方向に微動させる機構であるZ
方向微動機構23にセットするためのプローブ電極アタ
ッチメント、24は複数のプローブ電極をZ方向に粗動
させるZ方向粗動機構である。25は記録媒体で、25
1はガラスを研磨して得られた基板、252は基板25
1の上にCr(下引き層)とAuを真空蒸着法により形
成した下地電極、253はグラファイト(HOPG)の
記録層である。記録層253は下地電極252の上に導
電性接着剤で接着され、記録層表面の記録再生領域はへ
き開により原子オーダで平滑になっている。26は記録
媒体25をXY方向に微動させるXY方向微動機構、2
7は記録媒体25をXY方向に粗動させるXY方向粗動
機構である。28は記録再生装置との接続を行なうイン
ターフェースであり、書込み読出し情報の入出力、ステ
ータスの出力、制御信号の入力、アドレス信号の出力を
行なう。280は記録再生装置内の各ブロック間の相互
作用の集中制御を行なう制御回路、281は書込み読出
し情報(データ)を制御回路280からの指示により書
込んだり読出したりする書込み読出し回路、282は書
込み読出し回路からの指令信号で複数のプローブ電極2
1と記録媒体25との間に書込み用のパルス状電圧を印
加してデータを書込んだり、読出し用の電圧を印加する
電圧印加回路、283は記録・再生時に複数のプローブ
電極21と記録媒体25との間に流れる電流を検出する
トンネル電流検出回路、284は制御回路280などの
指示によりトンネル電流検出回路283や位置検出回路
288の信号を基に複数のプローブ電極21や記録媒体
25の位置を決定する位置決め回路、285は位置決め
回路284からのサーボ信号を基に複数のプローブ電極
21や記録媒体25の位置をサーボするサーボ回路、2
86はサーボ回路285の信号に従い複数のプローブ電
極21のZ方向微動・粗動機構23,24を駆動するZ
方向駆動回路、287はサーボ回路285の信号に従い
記録媒体25のXY方向微動・粗動機構26,27を駆
動するXY方向駆動回路である。
Embodiment 3 FIG. 7 is a block diagram of an information recording and / or reproducing apparatus according to a third embodiment, in which 21 is a plurality of probe electrodes made by micromechanics technology, and 22 is a plurality. Which is a mechanism for finely moving the probe electrode of Z in the Z direction.
A probe electrode attachment for setting in the direction fine movement mechanism 23, and 24 is a Z direction coarse movement mechanism for coarsely moving a plurality of probe electrodes in the Z direction. 25 is a recording medium,
1 is a substrate obtained by polishing glass, 252 is a substrate 25
A base electrode 253 on which Cr (undercoat layer) and Au are formed by a vacuum vapor deposition method, and 253 is a recording layer of graphite (HOPG). The recording layer 253 is adhered onto the base electrode 252 with a conductive adhesive, and the recording / reproducing area on the surface of the recording layer is smoothed by cleavage by atomic order. Reference numeral 26 is an XY direction fine movement mechanism for finely moving the recording medium 25 in the XY directions.
Reference numeral 7 denotes an XY-direction coarse movement mechanism that coarsely moves the recording medium 25 in the XY directions. Reference numeral 28 denotes an interface for connecting to a recording / reproducing apparatus, which performs input / output of write / read information, output of status, input of control signal, and output of address signal. Reference numeral 280 is a control circuit for performing centralized control of interaction between blocks in the recording / reproducing apparatus, 281 is a write / read circuit for writing / reading write / read information (data) according to an instruction from the control circuit 280, and 282 is write. A plurality of probe electrodes 2 by the command signal from the readout circuit
1 is a voltage application circuit that applies a writing pulse voltage between the recording medium 25 and the recording medium 25 to write data or applies a reading voltage, and 283 is a plurality of probe electrodes 21 and the recording medium during recording / reproduction. A tunnel current detection circuit 284 for detecting a current flowing between the probe electrode 21 and the recording medium 25 is instructed by a control circuit 280 based on signals from the tunnel current detection circuit 283 and the position detection circuit 288. The positioning circuit 285 determines the position of the plurality of probe electrodes 21 and the recording medium 25 based on the servo signal from the positioning circuit 284.
Reference numeral 86 is a Z for driving the Z direction fine movement / coarse movement mechanisms 23, 24 of the plurality of probe electrodes 21 in accordance with the signal from the servo circuit 285.
The direction drive circuit 287 is an XY direction drive circuit which drives the XY direction fine movement / coarse movement mechanisms 26 and 27 of the recording medium 25 in accordance with a signal from the servo circuit 285.

【0036】本図では制御回路280、書込み読込み回
路281、電圧印加回路282、トンネル電流検出回路
283は1つしか記載されていないが、実際には複数の
プローブ電極の数だけ使用する。
Although only one control circuit 280, write / read circuit 281, voltage application circuit 282, and tunnel current detection circuit 283 are shown in the figure, the number of probe electrodes is actually used.

【0037】次に、情報記録再生装置の動作を説明す
る。複数のプローブ電極21は記録媒体25との接触を
避けるために、初期位置は稍々上方にあり、使用時には
Z方向微動・粗動機構23,24によって記録媒体25
に接近される。この時、電圧印加回路282により20
0(mV)の読取電圧をプローブ電極21と記録媒体2
5の下地電極252の間に印加しておき、トンネル電流
検出回路283で検出される電流が100(pA)にな
るまで接近させ、Z方向微動・粗動機構23,24を保
持し、その後にXY方向微動機構26を用いて記録媒体
25上を走査して記録再生を行う。記録は記録媒体25
の記録領域上を1列ずつ複数のプローブ電極21で走査
しながら制御回路280で指令された書き込み位置で電
圧印加回路282よりパルス状電圧を印加することによ
り行われる。このパルス状電圧はパルス高さ4(V)、
パルス幅1(μs)であり、電圧を印加されたグラファ
イト膜の表面が凹状に変化するための閾値である。
Next, the operation of the information recording / reproducing apparatus will be described. In order to avoid contact between the plurality of probe electrodes 21 and the recording medium 25, the initial position is slightly above, and when used, the recording medium 25 is moved by the Z-direction fine movement / coarse movement mechanisms 23 and 24.
Approached. At this time, the voltage applying circuit 282 causes 20
A read voltage of 0 (mV) is applied to the probe electrode 21 and the recording medium 2.
5 is applied between the base electrodes 252 of 5 and approached until the current detected by the tunnel current detection circuit 283 reaches 100 (pA), and the Z direction fine movement / coarse movement mechanisms 23 and 24 are held. Recording and reproduction are performed by scanning the recording medium 25 using the XY direction fine movement mechanism 26. Recording is a recording medium 25
This is performed by applying a pulsed voltage from the voltage application circuit 282 at the writing position instructed by the control circuit 280 while scanning the recording area by a plurality of probe electrodes 21 row by row. This pulsed voltage has a pulse height of 4 (V),
The pulse width is 1 (μs), which is a threshold value for changing the surface of the graphite film to which a voltage is applied into a concave shape.

【0038】再生は、電圧印加回路282より複数のプ
ローブ電極21と下地電極252の間に200(mV)
の読み取り電圧を印加しながら、XY方向微動機構26
を用いてプローブ電極21で記録領域を走査し、トンネ
ル電流検出回路283での電流の変化から読み取りを行
う。
The reproduction is performed by the voltage application circuit 282 between the plurality of probe electrodes 21 and the base electrode 252 at 200 (mV).
While applying the reading voltage of XY direction fine movement mechanism 26
The probe electrode 21 is used to scan the recording area by using, and reading is performed from the change in current in the tunnel current detection circuit 283.

【0039】この装置は記録再生装置であったが、記録
のみ又は再生のみの装置であってもよいことは言うまで
もない。また、書き込み読み出しの条件は上記実施例に
限定されることはなく、記録媒体25側に設けたXY方
向微動機構・粗動機構26,27は、プローブ電極21
側に設けてもよい。
Although this apparatus was a recording / reproducing apparatus, it goes without saying that it may be a recording-only or reproducing-only apparatus. The conditions for writing and reading are not limited to those in the above-described embodiment, and the XY direction fine movement mechanism / coarse movement mechanism 26, 27 provided on the recording medium 25 side is the probe electrode 21.
It may be provided on the side.

【0040】この情報記録及び/又は再生装置のXY方
向微動機構に前述の微動駆動装置を用いたところ、高速
書き込み、読み出しが可能になった。
When the above-described fine movement drive device is used for the XY direction fine movement mechanism of this information recording and / or reproducing apparatus, high speed writing and reading are possible.

【0041】[0041]

【発明の効果】以上説明したように本発明にかかわる微
動駆動装置及びそれを用いた情報記録及び/又は再生装
置は、可動部を挟む1対の圧電素子によって可動部に加
えられる軸力を増加させることができるので、装置の固
有振動数を上昇させることができ、高速で精密な微動駆
動を行うことができる。
As described above, the fine movement drive device and the information recording and / or reproducing device using the same according to the present invention increase the axial force applied to the movable portion by the pair of piezoelectric elements sandwiching the movable portion. Therefore, the natural frequency of the device can be increased, and high-speed and precise fine movement drive can be performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の原理的説明図。FIG. 1 is a diagram illustrating the principle of the present invention.

【図2】(a)本発明を説明する圧電素子に印加される
電圧の波形図。(b)本発明を説明する圧電素子に印加
される位相をずらした電圧の波形図。(c)本発明を説
明する軸力の増加を示すグラフ。
FIG. 2A is a waveform diagram of a voltage applied to a piezoelectric element for explaining the present invention. (B) A waveform diagram of phase-shifted voltages applied to the piezoelectric element for explaining the present invention. (C) A graph showing an increase in axial force for explaining the present invention.

【図3】第1の実施例の可動部の変位量を示すグラフ。FIG. 3 is a graph showing a displacement amount of a movable portion according to the first embodiment.

【図4】第1の実施例の圧電素子に印加される他の電圧
の波形図。
FIG. 4 is a waveform diagram of another voltage applied to the piezoelectric element according to the first embodiment.

【図5】第1の実施例の圧電素子に印加される他の電圧
の波形図。
FIG. 5 is a waveform diagram of another voltage applied to the piezoelectric element according to the first embodiment.

【図6】第2の実施例による微動駆動装置の構成図。FIG. 6 is a configuration diagram of a fine movement drive device according to a second embodiment.

【図7】第3の実施例による記録再生装置のブロック回
路構成図。
FIG. 7 is a block circuit configuration diagram of a recording / reproducing apparatus according to a third embodiment.

【図8】従来の微動駆動装置の説明図。FIG. 8 is an explanatory diagram of a conventional fine movement drive device.

【符号の説明】[Explanation of symbols]

11 ガイド機構 11a〜11h 弾性ヒンジばね 12 可動部 13a〜13d 圧電素子 15 増幅器 17,19 枠体 18 遅延回路 21 プローブ電極 25 記録媒体 26 XY方向微動機構 11 Guide Mechanism 11a-11h Elastic Hinge Spring 12 Moving Part 13a-13d Piezoelectric Element 15 Amplifier 17, 19 Frame 18 Delay Circuit 21 Probe Electrode 25 Recording Medium 26 XY Direction Fine Movement Mechanism

フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 H01L 41/09 (72)発明者 川瀬 俊光 東京都大田区下丸子3丁目30番2号 キヤ ノン株式会社内Continuation of the front page (51) Int.Cl. 6 Identification number Office reference number FI Technical indication location H01L 41/09 (72) Inventor Toshimitsu Kawase 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 可動部の駆動方向の前後に、それぞれの
電極配置方向を互いに一致させて1対の圧電素子を取付
け、該1対の圧電素子の伸縮を印加する駆動電圧によっ
て互いに逆動作させる微動駆動機構において、前記駆動
電圧の位相をずらせて印加する手段を備えることを特徴
とする微動駆動装置。
1. A pair of piezoelectric elements are mounted in front of and behind the driving direction of the movable part so that their respective electrode arrangement directions are aligned with each other, and the pair of piezoelectric elements are made to operate in reverse by driving voltages for applying expansion and contraction of the piezoelectric elements. A fine movement drive device comprising a means for applying a phase of the drive voltage with a shift in the fine movement drive mechanism.
【請求項2】 可動部の第1の駆動方向の前後に、それ
ぞれの電極配置方向を互いに一致させて取付けた第1の
1対の圧電素子と、該第1の1対の圧電素子のそれぞれ
の外側部分を支持する支持体と、該支持体の第1の駆動
方向とは異なる第2の駆動方向の両側に、それぞれの電
極配置方向を互いに一致させて取付けた第2の1対の圧
電素子と、前記第1,第2のそれぞれ1対の圧電素子の
伸縮を印加する駆動電圧によって互いに逆動作させる2
軸微動駆動機構において、前記駆動電圧の位相をずらせ
て印加する手段を備えることを特徴とする2軸微動駆動
装置。
2. A first pair of piezoelectric elements mounted before and after the first driving direction of the movable part so that their respective electrode arrangement directions coincide with each other, and each of the first pair of piezoelectric elements. And a second pair of piezoelectric elements mounted on both sides of a second driving direction different from the first driving direction of the supporting body for supporting the outer part of the piezoelectric body, with their respective electrode arrangement directions aligned with each other. The elements and the first and second pairs of piezoelectric elements are made to operate in reverse with each other by drive voltages that apply expansion and contraction of the piezoelectric elements
A two-axis fine movement drive device, comprising means for applying the drive voltage while shifting the phase of the drive voltage.
【請求項3】 前記駆動電圧波形の交流成分のduty
比が1以外であることを特徴とする請求項1又は2記載
の微動駆動装置。
3. The duty of an AC component of the drive voltage waveform
3. The fine movement drive device according to claim 1, wherein the ratio is other than 1.
【請求項4】 前記1対の圧電素子に印加される駆動電
圧の位相差が、πであることを特徴とする請求項1又は
2記載の微動駆動装置。
4. The fine movement drive device according to claim 1, wherein a phase difference between drive voltages applied to the pair of piezoelectric elements is π.
【請求項5】 情報記録媒体を支持する支持部と、前記
情報記録媒体に対して情報の記録及び/又は再生を行う
ためのプローブ電極と、該プローブ電極を前記情報記録
媒体に相対的に走査する微動駆動手段を具備する情報記
録及び/又は再生装置において、前記微動駆動手段とし
て請求項1又は2記載の微動駆動装置を用いることを特
徴とする情報記録及び/又は再生装置。
5. A support portion for supporting an information recording medium, a probe electrode for recording and / or reproducing information on the information recording medium, and a scanning of the probe electrode relative to the information recording medium. An information recording and / or reproducing apparatus comprising a fine movement driving means, wherein the fine movement driving means according to claim 1 or 2 is used as the fine movement driving means.
JP33042593A 1993-12-27 1993-12-27 Fine driving device and information recording and/or reproducing device using the same Pending JPH07191756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33042593A JPH07191756A (en) 1993-12-27 1993-12-27 Fine driving device and information recording and/or reproducing device using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33042593A JPH07191756A (en) 1993-12-27 1993-12-27 Fine driving device and information recording and/or reproducing device using the same

Publications (1)

Publication Number Publication Date
JPH07191756A true JPH07191756A (en) 1995-07-28

Family

ID=18232473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33042593A Pending JPH07191756A (en) 1993-12-27 1993-12-27 Fine driving device and information recording and/or reproducing device using the same

Country Status (1)

Country Link
JP (1) JPH07191756A (en)

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JP2007324045A (en) * 2006-06-02 2007-12-13 Hitachi High-Technologies Corp Electron microscope apparatus and brake mechanism
WO2008126233A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Drive device
WO2008126246A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Driver unit
WO2008126241A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Driver unit
WO2008126234A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Drive device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007324045A (en) * 2006-06-02 2007-12-13 Hitachi High-Technologies Corp Electron microscope apparatus and brake mechanism
WO2008126233A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Drive device
WO2008126246A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Driver unit
WO2008126241A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Driver unit
WO2008126234A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Drive device
US7808152B2 (en) 2007-03-30 2010-10-05 Pioneer Corporation Drive device
US7843110B2 (en) 2007-03-30 2010-11-30 Pioneer Corporation Driving apparatus
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