JPH07190203A - Throttle valve - Google Patents

Abstract

PURPOSE:To maximize an opening hole area during a fully opening period and minimize the opening hole area during a fully closing period by providing a plurality of blinds in a valve main body and a gear integrated to the valve main body. CONSTITUTION:A throttle valve is provided with a drive shaft 4 to rotate through a coupling 3 journalled to a motor 2, a first blind 5 to fully open/close in a direction of 90 deg. by motor control so as to rotate, and a second blind 6 and a third blind 7 to fully open/close in the direction of 90 deg. by crank transmission. The drive shaft 11 to rotate by a gear 10 provided integrally to a valve main body 9 is provided and a fourth blind 12 to fully open/close in the direction of 90 deg. by the motor control so as to rotate and a fifth blind 13 and a sixth blind 14 to fully open/close in the direction of 90 deg. by the crank transmission so as to rotate are also provided thereto. Therefore, uniform exhaust can be performed so that certainty and readiness property can be presented to the open/close action of each blind.

Description

Detailed Description of the Invention

[Field of Industrial Application] The present invention mainly relates to a vacuum device for semiconductor production or a liquid crystal panel production vacuum device,
The present invention relates to a throttle valve connected to a vacuum pump that removes gas from these vacuum devices.

2. Description of the Related Art Conventionally, there are butterfly type throttle valves and vane type slot valves as throttle valves used for the above purposes. In the former butterfly type throttle valve, the blade is opened and closed by rotating the central axis of the circular blade by 90 °. The latter vane type throttle valve has a structure in which a plurality of circular blades are provided separately on the central axis of the valve body, a pulley is provided for each circular blade, and metal wires are alternately entwined. When the circular blade is operated, the other circular blade can be rotated along with the metal wire.

[Problems to be Solved by the Invention] However, the former butterfly-type throttle valve has a simple structure, but must consider the effective space of the circular blade when fully opened. Also, since this type of valve has a specification that is combined with an automatic pressure controller that automatically controls the exhaust speed, the entire device is large. Also, in the latter vane type throttle valve, even if the valve diameter becomes large, the effective space at full opening can be suppressed by the number of divisions of the circular blade, so it is superior to the former butterfly type throttle valve structure. However, there are problems such as lack of reliability due to the complicated structure.

[Means for Solving the Problems] The present invention has been made for the purpose of solving the above-mentioned problems. More specifically, the present invention relates to an exhaust system main pump and a vacuum container body. A blind type throttle valve connected between the drive shaft and one drive shaft that rotates via a coupling that is axially supported by the motor shaft, and the throttle valve is connected to the drive shaft and controls the motor. It is connected to the crank and the first blind that rotates fully open and closed in 90 ° direction.
And by the transmission of this crank, it fully opens in the 90 ° direction,
The second blind and the third blind which are fully closed and rotated, and the other drive shaft which is symmetrically rotated with the one drive shaft by the integral gear provided on the valve body are connected to the drive shaft. ,
Also, the fourth blind, which is fully opened and fully closed and rotated in the 90 ° direction under the control of the motor, is connected to the crank, and the fifth blind, which is fully opened and fully closed and rotated in the 90 ° direction by the transmission of the crank. And a sixth blind.

[Operation] The throttle valve of the present invention is
Since the valve body is provided with an integral gear, it is possible to perform symmetrical movement with a biaxial drive structure, and at the same time, it is possible to interlock a plurality of blinds by a crank.

It is desirable that the throttle valve used for the above purpose has a maximum opening area when the blind is fully opened and a minimum opening area when the blind is fully closed. In the throttle valve of this embodiment, all blindons can be held in the open state of 90 ° when fully opened, so that the maximum effective area can be obtained. Further, when the blinds are fully closed, the adjacent blinds slightly overlap each other on the axis of the drive shaft, and the blinds set at both ends overlap the inside of the valve body, so that the opening area is minimized. In this way, uniform exhaust is performed by the symmetric movement of the blinds. Further, since no wire or the like is used for the drive mechanism of the blind, it is possible to eliminate the harmful effects such as gas accumulation. Further, the usage field of the throttle valve is severe, and it is necessary to endure particularly corrosive gas. Since the entire throttle valve of the present invention is made of a corrosion resistant material, it has excellent durability.
In addition, a normal opening / closing operation over a long period can be expected. Moreover, since the blind portion and the valve as a whole are constructed in a simple structure, replacement and maintenance work can be easily performed without waste, and reliability is improved.

[Embodiment] An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a front view of a throttle valve according to the present invention, and FIG. 2 is a rear view of the same. FIG. 3 is an explanatory view of a fully closed operation state of a plurality of blinds, and FIG.
Similarly, it is operation | movement explanatory drawing of a fully open state. In the figure, reference numeral 1
Is a throttle valve, 2 is a motor, 3 is a coupling, and 4 is one drive shaft. The drive shaft 4 has a first blind 5 which is fully opened and fully closed in a 90 ° direction by the control of the motor. Are connected. In the figure, 6 indicates a second blind, 7 indicates a third blind, and a crank 8 is connected to the second blind 6 and the third blind 7, and the transmission of the crank 8 causes the second blind 6 to move. The blind 6 and the third blind 7 are fully opened and fully closed and rotated in the 90 ° direction.

The valve body 9 is provided with a pair of gears 10, and the gears 10 rotate another drive shaft 11. The drive shaft 11 is connected with a fourth blind 12 which is fully opened and fully closed and rotated in a 90 ° direction under the control of a motor. In the figure, 13 indicates a fifth blind and 14 indicates a sixth blind. A crank 15 is connected to the fifth blind 13 and the sixth blind 14, and the transmission of the crank 15 causes the fifth blind to move. The blind 13 and the sixth blind 14 rotate fully open and fully closed in the 90 ° direction. In addition, in the above-mentioned embodiment, the blinds are composed of the first blind 6 to the sixth blind 14, but the number of blinds is included in the present invention even if it exceeds that number.

[Advantages of the Invention] Therefore, according to the present invention, since the valve body is provided with a plurality of blinds, the effective space at the time of full opening is 1/5 to 1/10 of that of the butterfly type throttle valve of the same diameter and conductance. Can be approximately tripled. In addition, the minimum conductance can be obtained by superimposing the blinds when fully closed. Also, a uniform exhaust effect can be expected due to the symmetrical movement of the blinds. Furthermore, with a simple structure, opening and closing operations of each blind are reliable and quick, maintenance is easy, and corrosion resistance is exhibited, so reliability is improved, especially in semiconductor manufacturing or liquid crystal panel. It is advantageous for evacuation of the vacuum device used for manufacturing.

[0010]

[Brief description of drawings]

FIG. 1 is a structural front view of a throttle valve according to the present invention.

FIG. 2 is a structural rear view of the same.

FIG. 3 is an explanatory view of a fully closed operation state of a blind.

FIG. 4 is an explanatory view of a fully open operation state of a blind.

[0011]

[Sign clearing]

 1 Throttle Valve 2 Motor 3 Coupling 4 Drive Shaft 5 First Blind 6 Second Blind 7 Third Blind 8 Crank 9 Valve Body 10 Gear 11 Drive Shaft 12 Fourth Blind 13 Fifth Blind 14 Sixth Blind Blind 15 crank

Claims (1)

[Claims] 1. A blind type throttle valve connected between an exhaust system main pump and a vacuum container body, wherein the throttle valve is one drive shaft that rotates via a coupling that is axially supported by a motor shaft. And a first blind which is connected to the drive shaft and which is fully opened and fully closed and rotated in the 90 ° direction under the control of the motor, and is connected to the crank and is fully opened in the 90 ° direction by the transmission of the crank. , A second blind and a third blind that are fully closed and rotate, and another drive shaft that rotates symmetrically with the one drive shaft by an integral gear provided in the valve body, and the drive shaft is connected to the drive shaft. And a fourth blind that fully opens and closes in 90 ° direction under the control of the motor, and a clutch. It is connected to the click, and a throttle valve, characterized in that the crank of the fully open at 90 ° direction by the transmission comprises a fifth blind and sixth blind to rotate fully closed.