JPH0718500A - Gold plating method - Google Patents

Gold plating method

Info

Publication number
JPH0718500A
JPH0718500A JP18943093A JP18943093A JPH0718500A JP H0718500 A JPH0718500 A JP H0718500A JP 18943093 A JP18943093 A JP 18943093A JP 18943093 A JP18943093 A JP 18943093A JP H0718500 A JPH0718500 A JP H0718500A
Authority
JP
Japan
Prior art keywords
plating
gold
plated
sample
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18943093A
Other languages
Japanese (ja)
Inventor
Yuichi Togano
祐一 戸叶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP18943093A priority Critical patent/JPH0718500A/en
Publication of JPH0718500A publication Critical patent/JPH0718500A/en
Pending legal-status Critical Current

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  • Electroplating Methods And Accessories (AREA)

Abstract

PURPOSE:To provide a gold plating method using a small-sized plating tank and a hot-plate spinner and by which the concn. and temp. are uniformly distributed in a plating soln. during plating by varying the soln. flow. CONSTITUTION:An agitator 4 of magnetic metal is welded to the bottom in a cylindrical vessel 2, a spiral rod 1 is firmly attached to the inner side wall of the vessel 2, the vessel 2 is inserted into a vessel 3 to constitute a plating tank. The agitator 4, cylindrical vessel 2 and spiral rod 1 are simultaneously rotated by using a hot-plate spinner, a plating soln. is spiraled at its upper part to uniformly distribute the concn. and temp. in the soln., and productivity is improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、金電解液を用い、液内
に被メッキ試料を浸漬させ、液内と被メッキ試料にそれ
ぞれ相反する電界を印加して金膜を被メッキ試料に堆積
する方法をとる金メッキに関するものである。
BACKGROUND OF THE INVENTION The present invention uses a gold electrolytic solution to immerse a sample to be plated in the solution, and applies electric fields that are opposite to each other in the solution and the sample to be plated to deposit a gold film on the sample to be plated. The method is related to gold plating.

【0002】[0002]

【従来の技術】金メッキを行う時、金メッキ体積による
メッキ液の局所的な濃度変化や液温変化が生じると、メ
ッキ面の荒さやメッキ速度を変動させるため、攪拌は重
要な要素である。従来このような金メッキは、大型のメ
ッキ槽を用いて行う場合はメッキ槽底部から微細気泡を
送ることにより攪拌する方法が用いられ、小型のメッキ
槽ではメッキ槽底部に攪拌子を有するホットプレート・
スピンナーによる攪拌を行いながらメッキを行ってい
る。
2. Description of the Related Art When gold plating is carried out, if the concentration of the plating solution or the temperature of the plating solution changes depending on the volume of the gold plating, the roughness of the plating surface and the plating speed will fluctuate, so stirring is an important factor. Conventionally, such gold plating is performed by agitating by sending fine bubbles from the bottom of the plating tank when a large plating tank is used.In a small plating tank, a hot plate having a stirrer at the bottom of the plating tank is used.
Plating is performed while stirring with a spinner.

【0003】[0003]

【発明が解決しようとする課題】小型のメッキ槽を用い
るとき、ホットプレート・スピンナーを用いると、容器
を回転させるために液内流動は平行円運動となり、メッ
キ槽の内部のメッキ液の上部と下部での温度差や濃度差
が発生し易い。液中に浸漬した被メッキ物の液面方向の
上部とメッキ槽の底面方向の下部のメッキ面積が非対称
である場合はこの現象は、特に発生し易い。
When a small plating bath is used and a hot plate spinner is used, the flow in the liquid becomes a parallel circular motion due to the rotation of the container. Temperature difference and concentration difference easily occur in the lower part. This phenomenon is particularly likely to occur when the plating area immersed in the liquid is asymmetrical between the upper surface in the liquid surface direction and the lower surface in the bottom surface of the plating tank.

【0004】このような問題点を受けて、本発明の目的
とするところは、メッキ中のメッキ液内の濃度及び温度
分布を被メッキ物の上部と下部で一定にするような、小
型で比較的安価な液流動方向可変可能な金メッキの方法
を提供するものである。
In view of these problems, the object of the present invention is to provide a small-sized comparison in which the concentration and temperature distribution in the plating solution during plating are kept constant above and below the object to be plated. The present invention provides a method of gold plating that can change the liquid flow direction at a relatively low cost.

【0005】[0005]

【課題を解決するための手段】本発明の金メッキの方法
として、メッキ中のメッキ液内の液流動を螺旋上方向に
運動させることによって、メッキ中の液内の濃度と温度
を一定に保つ方法が得られる。すなわち、本発明によれ
ば、金電解液を用い、液内に被メッキ試料を浸漬させ、
液内と被メッキ試料にそれぞれ相反する電界を印加して
金膜を被メッキ試料に堆積する方法をとる金メッキにお
いて、攪拌子と螺旋棒を容器内側に密着させ接着したメ
ッキ槽をホットプレート・スピンナーで回転して、メッ
キ中の液流動を螺旋状に上方に攪拌することを特徴とす
る金メッキの方法が得られる。
As a gold plating method of the present invention, a method of keeping the concentration and temperature in the liquid during plating constant by moving the liquid flow in the plating liquid during plating in a spiral upward direction. Is obtained. That is, according to the present invention, using a gold electrolytic solution, the sample to be plated is immersed in the solution,
In gold plating, which uses a method of depositing a gold film on the sample to be plated by applying opposite electric fields to the sample to be plated in the liquid, a stirrer and a spiral rod are adhered to the inside of the container, and the plating tank is attached to the hot plate spinner. The method of gold plating is characterized in that the liquid flow during plating is agitated upward in a spiral manner by rotating at.

【0006】[0006]

【作用】本発明を利用したメッキ方法を用いると、攪拌
子と螺旋棒を容器内側に密着させ接着し、同時にホット
プレート・スピンナーによって容器を回転させると、メ
ッキ中のメッキ液の液流動が容器内で螺旋状に上方に向
けて攪拌されるため、メッキ液内の濃度及び温度分布が
被メッキ物の上下部で一定となり、非対称メッキ面積を
持つ被メッキ物でも小型でメッキ中の液状態の安定な金
メッキを行うことができる。特にこの液状態管理は、メ
ッキ面を鏡面にする必要のある高速進行波電極には大き
な有効性を示す。
When the plating method using the present invention is used, the stirrer and the spiral rod are closely adhered and adhered to the inside of the container, and at the same time, when the container is rotated by the hot plate spinner, the liquid flow of the plating solution during plating is changed. Since it is agitated upward in a spiral shape inside the plating solution, the concentration and temperature distribution in the plating solution are constant at the top and bottom of the object to be plated. Stable gold plating can be performed. In particular, this liquid state management is very effective for a high-speed traveling wave electrode that requires a plated surface to be a mirror surface.

【0007】[0007]

【実施例1】図1は本発明の実施例1の金メッキ方法を
説明する斜視図。図2は本発明の金メッキ装置の構成を
示す説明図。
[Embodiment 1] FIG. 1 is a perspective view illustrating a gold plating method according to a first embodiment of the present invention. FIG. 2 is an explanatory diagram showing the configuration of the gold plating apparatus of the present invention.

【0008】図1に示すように、コイル状の螺旋棒1
は、円筒状容器の内径とほぼ等しい外径を持ち、円筒状
容器2の内側面に密着しつつ接着されている。ホットプ
レート・スピンナーを利用する為、ホットプレート・ス
ピンナーによって回転する攪拌子4は、円筒状容器2の
底面に接着してある。金メッキを行う円筒状容器は、内
側に接着された螺旋棒1と底面に接着された攪拌子4と
を有する容器である。これを、円筒状容器2より大きい
被挿入容器3に入れて、円筒状容器2と被挿入容器3と
をメッキ液で満たす。すなわちメッキ液は、円筒状容器
2の内部と、円筒状容器2と被挿入容器3間に満たすこ
とになるので、円筒状容器と被挿入容器との間に満たし
たメッキ液は円筒状容器2を回転させる潤滑油の働きを
する。これが、図2の上述した円筒状容器と被挿入容器
とにメッキ液を満たした両容器をメッキ漕11として使
用される。このとき、図2のTi−Ptエキスパンダ電
極8、被メッキ試料9、温度センサ部10は、メッキ槽
11内に配置する。これらをメッキ槽11内に配置した
金メッキ装置で、ホットプレート・スピンナーを用い
て、メッキ槽11すなわち前記円筒状容器を回転させる
ことにより濃度と温度とも上下部で一定となるようにメ
ッキ液を攪拌する。すなわちメッキ液の液流動は、液が
螺旋運動する方向に回転させる方法をとる。
As shown in FIG. 1, a coiled spiral rod 1
Has an outer diameter substantially equal to the inner diameter of the cylindrical container and is adhered to the inner surface of the cylindrical container 2 while being in close contact therewith. Since the hot plate spinner is used, the stirring bar 4 rotated by the hot plate spinner is adhered to the bottom surface of the cylindrical container 2. The cylindrical container for gold plating is a container having a spiral rod 1 adhered to the inside and a stirrer 4 adhered to the bottom. This is put in an inserted container 3 larger than the cylindrical container 2 to fill the cylindrical container 2 and the inserted container 3 with a plating solution. That is, the plating liquid fills the inside of the cylindrical container 2 and the space between the cylindrical container 2 and the inserted container 3, so that the plating liquid filled between the cylindrical container and the inserted container 3 is Acts as a lubricating oil to rotate. This is used as the plating tank 11 in which both the cylindrical container and the container to be inserted, which are shown in FIG. At this time, the Ti—Pt expander electrode 8, the sample 9 to be plated, and the temperature sensor unit 10 of FIG. 2 are placed in the plating tank 11. With a gold plating device arranged in the plating tank 11, a plating solution is stirred by using a hot plate spinner to rotate the plating tank 11, that is, the cylindrical container so that both the concentration and the temperature are constant in the upper and lower parts. To do. That is, the liquid flow of the plating liquid adopts a method of rotating the plating liquid in a spiral direction.

【0009】図2は、一般的な小型の金メッキ装置の構
造を示す説明図である。直流の電源7から付加される電
流はTi−Ptエキスパンダ電極(以下電極と称す)8
にプラス電荷を、メッキ面である被メッキ試料9にマイ
ナス電荷を印加することにより、メッキ液内の金イオン
をメッキ面に堆積させる方式をとる。Ti−Ptエキス
パンダ電極8によって、液内を電気分解し、金を析出さ
せる。このようなイオン交換作用によって金を堆積させ
て行く構造をとる。ここで、重要なものは、 メッキ液の濃度(本発明を利用して均一化) メッキ液の温度(温度計5でモニタし、ホットプレー
ト・スピンナー12で調整) 印加電流値(電流計6でモニタし、電源7で調整) によって、メッキの膜質やメッキ速度を制御していると
いうことである。
FIG. 2 is an explanatory view showing the structure of a general small gold plating apparatus. The electric current applied from the DC power source 7 is a Ti-Pt expander electrode (hereinafter referred to as an electrode) 8
Is applied to the sample 9 to be plated, which is the plating surface, to deposit gold ions in the plating solution on the plating surface. The inside of the liquid is electrolyzed by the Ti-Pt expander electrode 8 to deposit gold. The structure is such that gold is deposited by such an ion exchange action. Here, what is important is the concentration of the plating solution (uniformization using the present invention) the temperature of the plating solution (monitored by the thermometer 5 and adjusted by the hot plate spinner 12) applied current value (by the ammeter 6) It means that the quality of plating and the plating speed are controlled by monitoring and adjusting with the power supply 7.

【0010】本発明の実施例は、図1に示した構成の円
筒状容器2と被挿入容器3とからなるメッキ槽11にた
いして、図2に示した金メッキ装置の構成のものを使用
した。メッキ液はニュートロネックス309を用いた。
メッキ条件として、表1に示すような条件でメッキを行
った。
In the embodiment of the present invention, the plating tank 11 composed of the cylindrical container 2 and the container 3 to be inserted having the structure shown in FIG. 1 has the structure of the gold plating apparatus shown in FIG. Neutronex 309 was used as the plating solution.
As the plating conditions, plating was performed under the conditions shown in Table 1.

【0011】[0011]

【表1】 [Table 1]

【0012】本発明の効果を実証するため、同一条件で
従来のメッキ槽底部に攪拌子を有するホットプレート・
スピンナーで攪拌しながらメッキを行い、本発明と従来
方法とを比較した結果を表2に示す。
In order to demonstrate the effect of the present invention, a hot plate having a stirrer at the bottom of a conventional plating tank under the same conditions.
The results of comparing the present invention with the conventional method are shown in Table 2, where plating was performed while stirring with a spinner.

【0013】[0013]

【表2】 [Table 2]

【0014】比較として両者とも633μm波長のレー
ザ光での反射率の測定を行ったところ、図2の被メッキ
試料の上部位置と下部位置での反射率がよくなっていて
本発明の有効性が確認された。
As a comparison, when both of them were measured for reflectance with a laser beam having a wavelength of 633 μm, the reflectances at the upper and lower positions of the sample to be plated in FIG. 2 were improved and the effectiveness of the present invention was confirmed. confirmed.

【0015】[0015]

【発明の効果】以上明らかなように、本発明を利用した
金メッキ装置はメッキ液の上面及び底面付近の試料のメ
ッキ状態を均一にするばかりではなく、メッキ面の反射
率も向上することがわかった。これは、メッキ中の液内
の濃度や温度分布が均一であり、本発明が小型メッキ装
置に関して明かに有効であることがわかる。また、金メ
ッキ装置にかかるコストも従来の小型メッキ槽に比べて
非常に安価なコストで済むため、生産性もよい。
As is apparent from the above, the gold plating apparatus using the present invention not only makes the plating state of the sample near the top and bottom of the plating solution uniform, but also improves the reflectance of the plating surface. It was This shows that the concentration and temperature distribution in the liquid during plating are uniform, and it is clear that the present invention is effective for a small plating apparatus. Further, the cost of the gold plating apparatus is much lower than that of the conventional small plating tank, and therefore the productivity is also good.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例に用いたメッキ槽分解斜視図。FIG. 1 is an exploded perspective view of a plating tank used in an embodiment of the present invention.

【図2】本発明の実施例に用いた金メッキ装置全体図。FIG. 2 is an overall view of a gold plating apparatus used in an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 螺旋棒(断面は、四角でも丸でも良い) 2 円筒状容器 3 被挿入容器 4 攪拌子 5 温度計 6 電流計 7 電源(直流) 8 Ti−Ptエキスパンダ電極(+) 9 被メッキ試料(−) 10 温度計センサ部 11 メッキ槽 12 ホットプレート・スピンナー(温度及び攪拌回
転スピードを制御)
1 Spiral rod (cross section may be square or round) 2 Cylindrical container 3 Inserted container 4 Stirrer 5 Thermometer 6 Ammeter 7 Power supply (direct current) 8 Ti-Pt expander electrode (+) 9 Plated sample ( -) 10 Thermometer sensor section 11 Plating tank 12 Hot plate spinner (controlling temperature and stirring rotation speed)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 金電解液を用い、液内に被メッキ試料を
浸漬させ、液内と被メッキ試料にそれぞれ相反する電界
を印加して金膜を被メッキ試料に堆積する方法をとる金
メッキにおいて、攪拌子と螺旋棒を容器内側に密着させ
接着したメッキ槽をホットプレート・スピンナーで回転
して、メッキ中の液流動を螺旋状に上方に攪拌すること
を特徴とする金メッキの方法。
1. In gold plating, a method of depositing a gold film on a sample to be plated by immersing the sample to be plated in the solution using a gold electrolytic solution and applying an electric field that is opposite to the inside of the solution and the sample to be plated A method of gold plating, characterized in that a stirrer and a spiral rod are brought into close contact with the inside of the container and the plating tank adhered thereto is rotated by a hot plate spinner to spirally stir the liquid flow during plating upward.
JP18943093A 1993-06-30 1993-06-30 Gold plating method Pending JPH0718500A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18943093A JPH0718500A (en) 1993-06-30 1993-06-30 Gold plating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18943093A JPH0718500A (en) 1993-06-30 1993-06-30 Gold plating method

Publications (1)

Publication Number Publication Date
JPH0718500A true JPH0718500A (en) 1995-01-20

Family

ID=16241122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18943093A Pending JPH0718500A (en) 1993-06-30 1993-06-30 Gold plating method

Country Status (1)

Country Link
JP (1) JPH0718500A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005206937A (en) * 2003-12-26 2005-08-04 Toyo Seikan Kaisha Ltd Method and apparatus for forming oxide coating
CN110670114A (en) * 2019-11-13 2020-01-10 江西志浩电子科技有限公司 Electroplating device for producing HDI (high Density interconnection) plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005206937A (en) * 2003-12-26 2005-08-04 Toyo Seikan Kaisha Ltd Method and apparatus for forming oxide coating
JP4559188B2 (en) * 2003-12-26 2010-10-06 東洋製罐株式会社 Oxide coating method and apparatus
CN110670114A (en) * 2019-11-13 2020-01-10 江西志浩电子科技有限公司 Electroplating device for producing HDI (high Density interconnection) plate

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