JPH07180090A - Production of metallic foil for printed circuit board - Google Patents

Production of metallic foil for printed circuit board

Info

Publication number
JPH07180090A
JPH07180090A JP32398693A JP32398693A JPH07180090A JP H07180090 A JPH07180090 A JP H07180090A JP 32398693 A JP32398693 A JP 32398693A JP 32398693 A JP32398693 A JP 32398693A JP H07180090 A JPH07180090 A JP H07180090A
Authority
JP
Japan
Prior art keywords
layer
copper
copper foil
foil
nickel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32398693A
Other languages
Japanese (ja)
Inventor
Naoyuki Urasaki
直之 浦崎
Koichi Tsuyama
宏一 津山
Akishi Nakaso
昭士 中祖
Yushi Sato
祐志 佐藤
Masashi Amakata
正志 天方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Denkai Co Ltd
Showa Denko Materials Co Ltd
Original Assignee
Nippon Denkai Co Ltd
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Denkai Co Ltd, Hitachi Chemical Co Ltd filed Critical Nippon Denkai Co Ltd
Priority to JP32398693A priority Critical patent/JPH07180090A/en
Publication of JPH07180090A publication Critical patent/JPH07180090A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To produce the metallic foil for a printed circuit board which is never curled by electroplating the roughened surface of the copper foil for a carrier with an Ni-P layer in specified thickness and further forming a copper layer to form a circuit on the surface. CONSTITUTION:The roughness for strengthening the adhesion with resin is formed on at least one surface to prepare a copper foil for the carrier. An Ni-P layer having 0.04-1.5mum thickness is formed on the roughened surface of the copper foil by electroplating. A plating soln. contg. the main agent consisting of nickel sulfate, phosphorous acid and boric acid and an additive selected from among o-sulfobenzimide, naphthalenesulfonic acids or their alkali metal salts is used. The content of the additive is preferably controlled to 2-10g/l and the pH of the plating soln. to 1.6-2.8. The plating soln. is kept at about 40-60 deg.C, and the current density is preferably adjusted to about 3-7A/dm<2>. The copper layer for a circuit is further formed on the copper foil surface. Consequently, the Ni-P layer as the intermediate layer relieves stress, and the foil is not curled.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、プリント配線板に用い
る金属箔の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a metal foil used for printed wiring boards.

【0002】[0002]

【従来の技術】プリント配線板は、電子機器の発達に伴
い、その性能にも高度なものが要求されるようになって
きている。例えば、配線密度は、電子部品に配線板の表
面で接続を行ういわゆる表面実装部品が開発され、その
電子部品の接続端子の間隔が小さいものになると、0.15
mm以下となるものも使用され始めており、この密度に合
わせて回路導体を形成することが求められている。
2. Description of the Related Art With the development of electronic equipment, printed wiring boards are required to have high performance. For example, the wiring density is 0.15 when a so-called surface mount component that connects to an electronic component on the surface of a wiring board is developed and the distance between the connection terminals of the electronic component becomes small.
Those having a size of less than mm are beginning to be used, and it is required to form a circuit conductor according to this density.

【0003】このような配線密度の高い配線板の製造方
法としては、銅箔を絶縁基材に貼り合わせた銅張り積層
板を出発材料とし、その銅箔の回路導体とならない箇所
をエッチング除去して回路を形成するサブトラクティブ
法、絶縁基材の表面に、必要な回路形状に無電解めっき
を行って回路形成するアディティブ法、スルーホール内
壁等の回路導体の一部を無電解めっきによって形成する
セミアディティブ法等が一般に知られている。
As a method of manufacturing such a wiring board having a high wiring density, a copper-clad laminate obtained by bonding a copper foil to an insulating base material is used as a starting material, and a portion of the copper foil which does not serve as a circuit conductor is removed by etching. Circuit to form a circuit, an additive method to form a circuit by electroless plating to the required circuit shape on the surface of the insulating base material, a part of the circuit conductor such as the inner wall of the through hole is formed by electroless plating The semi-additive method and the like are generally known.

【0004】なかでも、サブトラクティブ法は、古くか
ら行われており、配線密度の向上には、通常、銅張り積
層板の銅箔を薄くすることが行われている。この理由
は、銅箔の表面に必要とする回路形状にエッチングレジ
ストを形成し、エッチング液でエッチングレジストから
露出した不要な銅箔の除去を行うときに、必要な回路部
分の側面から銅がエッチングされる、いわゆるサイドエ
ッチと呼ばれる現象が起り、銅箔が厚いほど、サイドエ
ッチによって回路導体から除去される量が増加し、微細
な回路を形成することが困難となるからである。
Among them, the subtractive method has been used for a long time, and in order to improve the wiring density, the copper foil of the copper-clad laminate is usually thinned. The reason for this is that when an etching resist is formed on the surface of the copper foil in the required circuit shape and the unnecessary copper foil exposed from the etching resist is removed with an etching solution, copper is etched from the side surface of the necessary circuit part. This is because a phenomenon called so-called side etching occurs, and as the copper foil is thicker, the amount removed from the circuit conductor by the side etching increases, and it becomes difficult to form a fine circuit.

【0005】したがって、出発材料である銅張り積層板
の銅箔には薄いものが必要とされ、このように薄い銅箔
は、銅を熱と圧力によって延ばした圧延銅箔や、ステン
レス等の金属の表面に電解めっきによって銅を析出させ
た電解銅箔が使用され、通常は厚さが18〜70μmのもの
が製造されている。また、近年、アルニウム箔に電解め
っきによって5μm程度の薄い銅箔を形成した電解銅箔
も知られている。
Therefore, a thin copper foil for the copper clad laminate as a starting material is required, and such a thin copper foil is a rolled copper foil obtained by extending copper by heat and pressure or a metal such as stainless steel. An electrolytic copper foil having copper deposited on its surface by electrolytic plating is used, and a copper foil having a thickness of 18 to 70 μm is usually manufactured. Further, in recent years, an electrolytic copper foil in which a thin copper foil of about 5 μm is formed on an aluminum foil by electrolytic plating is also known.

【0006】このように薄い銅箔は、プリント配線板用
基材である銅張り積層板とするために、銅箔と未硬化な
いしは半硬化のプリプレグとを積層するときに、取り扱
いが困難であり、わずかの力で銅箔に折れを生じる。ま
た、銅箔を製造するときの取り扱いによってもこのよう
な不具合を生じることが多い。そこで、薄い銅箔を、取
り扱い易い強度の支持体としての板や箔と接合してお
き、絶縁基材と貼り合わせた後、あるいは、使用する前
に、その支持体を除去する方法が提案されている。この
ような例として、特開昭58−108785号公報に
は、キャリア銅層と、中間層として、銅とエッチング除
去条件の異なるニッケル等を用い、薄い回路銅層を有す
る3層構造の金属箔が開示され、特開平5−20659
9号公報に、硫酸ニッケル、亜りん酸、及び硼酸を含む
めっき液を用いてニッケル−リンの中間層を形成し、中
間層の選択エッチング性を改善することが開示されてい
る。
Since such a thin copper foil is a copper-clad laminate which is a substrate for printed wiring boards, it is difficult to handle when laminating the copper foil and the uncured or semi-cured prepreg. , The copper foil is broken with a little force. In addition, such a problem often occurs due to the handling when manufacturing the copper foil. Therefore, a method has been proposed in which a thin copper foil is bonded to a plate or foil serving as a support having a strength that is easy to handle, and the support is removed after being bonded to an insulating base material or before being used. ing. As an example of this, Japanese Patent Laid-Open No. 58-108785 discloses a metal foil having a three-layer structure in which a carrier copper layer and nickel or the like having different etching removal conditions from copper are used as an intermediate layer and having a thin circuit copper layer. Japanese Patent Application Laid-Open No. 5-20659
No. 9 discloses that a nickel-phosphorus intermediate layer is formed using a plating solution containing nickel sulfate, phosphorous acid, and boric acid to improve the selective etching property of the intermediate layer.

【0007】[0007]

【発明が解決しようとする課題】ところが、このニッケ
ル−リンを中間層として用いるために使用する硫酸ニッ
ケル、亜りん酸、及び硼酸を含むめっき液は、析出した
ニッケル−リン合金の電着応力が高く、金属箔の端部が
カールしてしまい、取り扱いが困難になるという課題を
生じている。
However, the plating solution containing nickel sulfate, phosphorous acid, and boric acid used for using this nickel-phosphorus as an intermediate layer has an electrodeposition stress of the deposited nickel-phosphorus alloy. The cost is high, and the end of the metal foil is curled, which causes a problem of difficulty in handling.

【0008】本発明は、金属箔の端部で発生するカール
を抑制するに優れたニッケル−リンめっき液と、このめ
っき液を用いたプリント配線板用金属箔の製造方法を提
供することを目的とする。
It is an object of the present invention to provide a nickel-phosphorus plating solution which is excellent in curling curls generated at the ends of a metal foil, and a method for producing a metal foil for printed wiring boards using this plating solution. And

【0009】[0009]

【課題を解決するための手段】本発明のニッケル−リン
電解めっき液は、硫酸ニッケル、亜りん酸、及び硼酸か
らなる主剤と、O−スルホ安息香酸イミド、ナフタレン
スルホン酸類、あるいはこれらのアルカリ金属塩のうち
から選択された添加剤とを含むことを特徴とする。本発
明に用いるナフタレンスルホン酸類は、代表として、ナ
フタレンスルホン酸、ナフタレンジスルホン酸あるいは
ナフタレントリスルホン酸などがある。
The nickel-phosphorus electroplating solution of the present invention comprises a main agent consisting of nickel sulfate, phosphorous acid and boric acid, and O-sulfobenzoic acid imide, naphthalene sulfonic acids, or alkali metals thereof. And an additive selected from salts. Representative examples of the naphthalene sulfonic acids used in the present invention include naphthalene sulfonic acid, naphthalene disulfonic acid, and naphthalene trisulfonic acid.

【0010】本発明に用いる組成比は、硫酸ニッケルが
200〜300g/l、亜りん酸が0.2〜20g/l、硼酸が20
〜40g/l、O−スルホ安息香酸イミド、またはナフタ
レンスルホン酸、あるいはこれらのアルカリ金属塩が2
〜10g/lの範囲であることが好ましい。硫酸ニッケル
がこの範囲以下であると、めっきできる電流密度の範囲
が狭くなり、めっきやけを生じ易くなり、この範囲を超
えると、めっきの析出速度が高くなり、表面の粗いめっ
きとなり、表面の均一性、平滑性が得られない。亜りん
酸がこの範囲以下であると、りんの析出量が低下し、加
熱した後のニッケル−りん層の選択除去性が低下し、こ
の範囲を超えると、りんの析出料が上昇し、めっき応力
が高く、カール量が増加する。硼酸がこの範囲以下であ
ると、緩衝作用が小さくなり、pHが変化し易くなり、
この範囲を超えると、溶解しににく沈殿を生ずることが
ある。O−スルホ安息香酸イミド、またはナフタレンス
ルホン酸、あるいはこれらのアルカリ金属塩がこの範囲
以下であると、カールを抑制する効果が小さく、この範
囲を超えるとカールを抑制する効果に変化が見られず、
経済的でない。
The composition ratio used in the present invention is nickel sulfate.
200-300g / l, phosphorous acid 0.2-20g / l, boric acid 20
~ 40g / l, O-sulfobenzoic acid imide, or naphthalene sulfonic acid, or their alkali metal salts 2
It is preferably in the range of -10 g / l. If the nickel sulfate is less than this range, the range of current density that can be plated becomes narrow, and plating burns easily occur.If it exceeds this range, the deposition rate of plating becomes high and the surface becomes rough, resulting in a uniform surface. Property and smoothness cannot be obtained. When the phosphorous acid is below this range, the amount of phosphorus deposited is reduced, and the selective removal property of the nickel-phosphorus layer after heating is reduced. The stress is high and the amount of curl increases. When the content of boric acid is less than this range, the buffering effect becomes small and the pH easily changes,
If it exceeds this range, it may be difficult to dissolve and precipitate. When the O-sulfobenzoic acid imide, naphthalene sulfonic acid, or alkali metal salt thereof is in this range or less, the effect of suppressing curling is small, and when it exceeds this range, the effect of suppressing curling does not change. ,
Not economical.

【0011】このようなめっき液を用いて、少なくとも
一方の表面に樹脂との接着を強化する粗さを有するキャ
リアとなる銅箔の粗化面に、ニッケル−リン層を電解め
っきによって形成し、さらにその表面に回路を形成する
ための銅層を形成することができる。このニッケル−リ
ン層の厚さは、0.04〜1.5μmの範囲が好ましく、さら
には0.06〜1.2μmの範囲が好ましく、0.04μm未満で
あると、加熱後のニッケル−リン層の選択エッチング性
が低下し、1.5μmを越えると、ニッケル−リン層の選
択エッチングに時間がかかりすぎ、下地の銅層を損なう
こともある。
Using such a plating solution, a nickel-phosphorus layer is formed by electrolytic plating on a roughened surface of a copper foil which becomes a carrier having a roughness for strengthening adhesion with a resin on at least one surface, Further, a copper layer for forming a circuit can be formed on the surface. The thickness of the nickel-phosphorus layer is preferably 0.04 to 1.5 μm, more preferably 0.06 to 1.2 μm, and if it is less than 0.04 μm, the selective etching property of the nickel-phosphorus layer after heating is deteriorated. However, if the thickness exceeds 1.5 μm, it takes too much time to selectively etch the nickel-phosphorus layer, and the underlying copper layer may be damaged.

【0012】このときに、ニッケル−リンめっき液のp
Hは、1.6〜2.8の範囲であることが好ましく、さらに好
ましくは1.8〜2.2の範囲であり、pHが1.6未満である
と、析出するリン濃度が急激に高くなると共に、リン濃
度の調節が困難になり、2.8を超えると、めっきのやけ
が生じ好ましくない。その他のめっき条件としては、め
っき液の液温は、40〜60℃の範囲が好ましく、40℃未満
ではめっきの析出速度が小さく効率が低下し、60℃を超
えると、めっきの析出速度は大きくなるが、めっき浴の
管理や加熱するためのエネルギー消費が大きく経済的で
ない。また、電流密度は、3〜7A/dm2の範囲が好まし
く、この範囲を外れるとニッケルとリンの比率を一定に
保つことが困難になる。尚、電解めっきを行うときに、
空気撹拌あるいは機械的な撹拌を行うことが、めっき液
の均一性を増し好ましい。
At this time, p of the nickel-phosphorus plating solution is used.
H is preferably in the range of 1.6 to 2.8, more preferably in the range of 1.8 to 2.2, and when the pH is less than 1.6, the concentration of precipitated phosphorus increases rapidly and the concentration of phosphorus is difficult to control. When it exceeds 2.8, plating burns occur, which is not preferable. As other plating conditions, the liquid temperature of the plating solution is preferably in the range of 40 to 60 ° C. If it is less than 40 ° C, the deposition rate of plating is small and the efficiency decreases, and if it exceeds 60 ° C, the deposition rate of plating is large. However, the energy consumption for controlling the plating bath and heating is large, which is not economical. Further, the current density is preferably in the range of 3 to 7 A / dm 2 , and if it is out of this range, it becomes difficult to keep the ratio of nickel and phosphorus constant. When performing electrolytic plating,
It is preferable to perform air stirring or mechanical stirring because the uniformity of the plating solution is increased.

【0013】[0013]

【作用】本発明のO−スルホ安息香酸イミド、またはナ
フタレンスルホン酸、あるいはこれらのアルカリ金属塩
を、公知のニッケル電解めっき液に用いることにより、
キャリア銅層/ニッケル−リン合金層/回路銅層の3層
の金属箔において、中間層としての応力を緩和する。
By using the O-sulfobenzoic acid imide of the present invention, naphthalenesulfonic acid, or an alkali metal salt thereof, in a known nickel electroplating solution,
In a three-layer metal foil of carrier copper layer / nickel-phosphorus alloy layer / circuit copper layer, stress as an intermediate layer is relaxed.

【0014】[0014]

【実施例】表1に示す組成の電解めっき液を作成し、め
っき応力と、カール量の測定を行った。
Example An electrolytic plating solution having the composition shown in Table 1 was prepared, and the plating stress and curl amount were measured.

【0015】[0015]

【表1】 [Table 1]

【0016】(めっき応力)試験片は、表1に示すめっ
き液及びめっき条件を用いて、テストストリップ電着応
力測定用ピースに、ニッケル−リンめっきを、0.2μ
mの厚さ形成して、サンプルをそれぞれ作成し、測定
は、テストストリップ電着応力測定法により求めた。
(Plating stress) The test piece was plated with nickel-phosphorus plating at 0.2 μm on the test strip electrodeposition stress measuring piece using the plating solution and plating conditions shown in Table 1.
A sample having a thickness of m was formed to prepare each sample, and the measurement was performed by a test strip electrodeposition stress measuring method.

【0017】(カール量)厚さ18μmの銅箔をキャリア
とし、その粗化面に表1の組成を用いて、厚さ0.2μmの
ニッケル-リンめっきを行い、さらに、電解めっきによ
って、厚さ5μmの銅めっきを行ったものを用い、図1に
示すように、平らなところへ置いて、銅箔端部のカール
量を測定した。
(Curl amount) A copper foil having a thickness of 18 μm is used as a carrier, and the roughened surface is plated with nickel-phosphorus having a thickness of 0.2 μm by using the composition shown in Table 1. A copper plate having a thickness of 5 μm was used and placed on a flat surface as shown in FIG. 1 to measure the curl amount at the end of the copper foil.

【0018】表1に見られるように、本発明の実施例で
はめっき応力が小さく、銅層/ニッケル−リン層/銅層
の3層構成とした場合、カール量を小さくでき、金属箔
を掴むチャックによる掴み損ないや取り扱いのときのシ
ワの発生が少なく、機械による搬送性が高い。これに比
較して、比較例1〜3のように、本実施例と同じ組成で
はあるが、その組成比が適当でないものは、めっき応力
が大きく、カール量も大きく、機械による搬送時にチャ
ックによる掴み損ないやシワを発生した。
As can be seen from Table 1, in the examples of the present invention, the plating stress is small, and when the copper layer / nickel-phosphorus layer / copper layer has a three-layer structure, the curl amount can be reduced and the metal foil can be gripped. There is little gripping by the chuck or wrinkles during handling, and the transportability by machine is high. In comparison, as in Comparative Examples 1 to 3, those having the same composition as that of the present example but having an unsuitable composition ratio had a large plating stress, a large curl amount, and a chuck formed by a machine during conveyance. I couldn't grab and wrinkled.

【0019】[0019]

【発明の効果】以上に説明したように、本発明によっ
て、金属箔の端部で発生するカールを抑制するに優れた
プリント配線板用金属箔の製造方法を提供することがで
きる。
As described above, according to the present invention, it is possible to provide a method for producing a metal foil for a printed wiring board, which is excellent in suppressing curl generated at the end of the metal foil.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に用いた測定方法を説明する
ための側面図である。
FIG. 1 is a side view for explaining a measuring method used in an example of the present invention.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中祖 昭士 茨城県下館市大字小川1500番地 日立化成 工業株式会社下館研究所内 (72)発明者 佐藤 祐志 茨城県下館市大字下江連1226番地 日本電 解株式会社下館工場内 (72)発明者 天方 正志 茨城県下館市大字下江連1226番地 日本電 解株式会社下館工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akashi Nakaso 1500 Ogawa, Shimodate, Ibaraki Pref., Shimodate Research Laboratory, Hitachi Chemical Co., Ltd. (72) Inventor Masashi Amata 1226 Shimoeren, Shimodate-shi, Ibaraki Nihon Denshi Co., Ltd. Shimodate factory

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】少なくとも一方の表面に樹脂との接着を強
化する粗さを有するキャリアとなる銅箔の粗化面に、硫
酸ニッケル、亜りん酸、及び硼酸からなる主剤と、O−
スルホ安息香酸イミド、ナフタレンスルホン酸類、ある
いはこれらのアルカリ金属塩のうちから選択された添加
剤とを含むめっき液を用いて、厚さ0.04〜1.5μmのニ
ッケル−リン層を電解めっきによって形成し、さらにそ
の表面に回路を形成するための銅層を形成することを特
徴とするプリント配線板用金属箔の製造方法。
1. A base material composed of nickel sulfate, phosphorous acid, and boric acid, and O- on the roughened surface of a copper foil serving as a carrier having a roughness for enhancing adhesion with a resin on at least one surface.
Using a plating solution containing sulfobenzoic acid imide, naphthalene sulfonic acids, or an additive selected from these alkali metal salts, a nickel-phosphorus layer having a thickness of 0.04 to 1.5 μm is formed by electrolytic plating, A method of manufacturing a metal foil for a printed wiring board, further comprising forming a copper layer for forming a circuit on the surface thereof.
【請求項2】O−スルホ安息香酸イミド、またはナフタ
レンスルホン酸、あるいはこれらのアルカリ金属塩が2
〜10g/lの範囲であることを特徴とする請求項1に記
載のプリント配線板用金属箔の製造方法。
2. O-sulfobenzoic acid imide, naphthalene sulfonic acid, or their alkali metal salts
The method for producing a metal foil for a printed wiring board according to claim 1, wherein the amount is in the range of -10 g / l.
【請求項3】ニッケル−リンめっき液のpHが、1.6〜
2.8の範囲であることを特徴とする請求項1または2に
記載のプリント配線板用金属箔の製造方法。
3. The pH of the nickel-phosphorus plating solution is 1.6 to
The method for producing a metal foil for a printed wiring board according to claim 1 or 2, wherein the range is 2.8.
JP32398693A 1993-12-22 1993-12-22 Production of metallic foil for printed circuit board Pending JPH07180090A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32398693A JPH07180090A (en) 1993-12-22 1993-12-22 Production of metallic foil for printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32398693A JPH07180090A (en) 1993-12-22 1993-12-22 Production of metallic foil for printed circuit board

Publications (1)

Publication Number Publication Date
JPH07180090A true JPH07180090A (en) 1995-07-18

Family

ID=18160850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32398693A Pending JPH07180090A (en) 1993-12-22 1993-12-22 Production of metallic foil for printed circuit board

Country Status (1)

Country Link
JP (1) JPH07180090A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007023344A (en) * 2005-07-19 2007-02-01 Sumitomo Metal Mining Co Ltd Duplex-plated substrate and manufacturing method therefor
JP2008235629A (en) * 2007-03-22 2008-10-02 Fujitsu Ltd Circuit board and its manufacturing method
KR102405236B1 (en) * 2022-05-11 2022-06-07 고려아연 주식회사 Method for manufacturing electrolytic copper foil

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007023344A (en) * 2005-07-19 2007-02-01 Sumitomo Metal Mining Co Ltd Duplex-plated substrate and manufacturing method therefor
JP2008235629A (en) * 2007-03-22 2008-10-02 Fujitsu Ltd Circuit board and its manufacturing method
KR102405236B1 (en) * 2022-05-11 2022-06-07 고려아연 주식회사 Method for manufacturing electrolytic copper foil

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