JPH0716042B2 - Auxiliary discharge type gas laser device - Google Patents
Auxiliary discharge type gas laser deviceInfo
- Publication number
- JPH0716042B2 JPH0716042B2 JP14050785A JP14050785A JPH0716042B2 JP H0716042 B2 JPH0716042 B2 JP H0716042B2 JP 14050785 A JP14050785 A JP 14050785A JP 14050785 A JP14050785 A JP 14050785A JP H0716042 B2 JPH0716042 B2 JP H0716042B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- anode
- auxiliary
- laser device
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 〔発明の技術分野〕 この発明は、放電形気体レーザ装置に関係し、特に補助
放電を利用して、放電プラズマの一様化、高密度化を図
ったレーザ放電装置に関する。Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a discharge type gas laser device, and in particular, a laser discharge device in which discharge plasma is uniformized and densified by utilizing an auxiliary discharge. Regarding
従来の技術を第４図に示す。分割陰極エレメント１に制
限抵抗を介して、主放電用電源７が接続されている。分
割陰極エレメント１は、絶縁支持４に取りつけられてい
る。ミラー11はガスの流れ、放電電流の方向と直角に取
りつけられている。この放電方式であると流れ方向に沿
って放電々力の入り方が不均一であり、全体の放電々力
密度は低い。また放電も不安定になる。The conventional technique is shown in FIG. A main discharge power source 7 is connected to the divided cathode element 1 via a limiting resistor. The split cathode element 1 is attached to an insulating support 4. The mirror 11 is mounted perpendicular to the direction of gas flow and discharge current. In this discharge method, the discharge force input is uneven along the flow direction, and the overall discharge force density is low. Also, the discharge becomes unstable.
したがって、CO2レーザ出力効率の低下につながり、装
置の構造が大形化となる欠点があった。Therefore, there is a drawback that the CO 2 laser output efficiency is reduced and the structure of the device becomes large.
〔発明の目的〕 この発明は、上述した従来装置の欠点を改良したもの
で、放電々力密度の向上、放電発光部の空間的一様性を
向上し、レーザ出力の増大、効率向上、装置の小型化が
可能な装置を提供することを目的とする。An object of the present invention is to improve the above-mentioned drawbacks of the conventional device, and to improve the discharge power density, improve the spatial uniformity of the discharge light emitting portion, increase the laser output, improve the efficiency, It is an object of the present invention to provide a device that can be downsized.
本発明は、主放電と別にガス上限側に補助的に放電を発
生させるように構成したもので、ガス循環形CO2レーザ
は、ある電極構造において、ガス組成、圧力流速度など
が決まるとそれらのパラメータに対応して、グロー放電
々力密度の上限値が決まるが、補助放電しない時に比較
して条件により40％増大し、さらに補助電極と陽極の距
離が、陽極と陰極の距離と等しいか、または短かくとれ
ばさらに主放電々力が増大する。これは、主放電の陰極
・陽極間に補助放電により発生したプラズマを効率良く
供給するためと考えられる。また、補助放電々極の形状
を突起形状を有した分割電極で行なうと高い圧力たとえ
ば60Torr以上の場合、補助放電は安定に発生し、そのこ
とは主放電の一様化、安定化につながる。第３図にその
実験結果を示す。補助放電をする場合最大放電々力は、
条件により３倍〜４倍も増大することが確認された。The present invention is configured to generate an auxiliary discharge on the gas upper limit side in addition to the main discharge, and the gas circulation type CO 2 laser can be used when the gas composition, pressure flow velocity, etc. are determined in a certain electrode structure. The upper limit of the power density of glow discharge is determined according to the parameter of, but increases by 40% depending on the condition compared to the case without auxiliary discharge, and whether the distance between the auxiliary electrode and the anode is equal to the distance between the anode and the cathode. Or, if the length is short, the main discharge power further increases. It is considered that this is to efficiently supply the plasma generated by the auxiliary discharge between the cathode and the anode of the main discharge. Further, when the auxiliary discharge cathode is formed by a divided electrode having a projection shape, the auxiliary discharge is stably generated at a high pressure, for example, 60 Torr or more, which leads to uniformization and stabilization of the main discharge. The experimental results are shown in FIG. When performing auxiliary discharge, the maximum discharge force is
It was confirmed that the conditions increased 3 to 4 times depending on the conditions.
尚、曲線９は補助放電あり、曲線10は補助放電なしの場
合についてそれぞれ示す。Curve 9 shows the case with auxiliary discharge, and curve 10 shows the case without auxiliary discharge.
この発明により、空間的に一様で、かつ高電力密度の放
電が得られ、高効率のレーザ装置が得られる。さらに装
置の小形につながる。According to the present invention, a spatially uniform and high power density discharge can be obtained, and a highly efficient laser device can be obtained. It also leads to a smaller device.
第１図，第２図に発明の実施例を示す。第３図に前述し
た結果の一例を示す。第１図は、ビーム方向（紙面に垂
直）から見た断面図、第２図は、ガスの流れ方向から見
た断面図である。第１図において、１は陰極エレメン
ト、２は平板型陽極、３は分割補助電極で、その先端６
はステンレス製で、突起形状を有している。また補助電
極先端部６と陽極３との距離は、陰極エレメント２と陽
極３との距離より短かく設定されている。また分割補助
電極３は補助放電用の制限抵抗８を介して、主放電用の
制限抵抗５と共通して直流電源７と接続されている。こ
の様な分割された電極がガス流れ方向と直角（ビームの
方向）に多数並べられている。1 and 2 show an embodiment of the invention. FIG. 3 shows an example of the results described above. FIG. 1 is a sectional view seen from the beam direction (perpendicular to the paper surface), and FIG. 2 is a sectional view seen from the gas flow direction. In FIG. 1, 1 is a cathode element, 2 is a flat plate type anode, 3 is a split auxiliary electrode, and its tip 6
Is made of stainless steel and has a protrusion shape. The distance between the auxiliary electrode tip 6 and the anode 3 is set shorter than the distance between the cathode element 2 and the anode 3. The split auxiliary electrode 3 is connected to the DC power supply 7 in common with the limiting resistor 5 for main discharge via the limiting resistor 8 for auxiliary discharge. A large number of such divided electrodes are arranged at right angles to the gas flow direction (beam direction).
本発明の実施により第３図のような結果が得られた。流
速に対する最大入力電力の関係を示した図である。最大
入力電力は、グロー放電が不安定になり始める時の電力
を示す。補助放電がない場合は50m/s以上になると最大
入力電力は増加しなくなるが、補助放電を行なうと73m/
s流速で、補助放電しない時に比較して、２倍増加する
ことが確認された。また主放電領域は、補助放電をした
時、広がりかつ一様な状態になり、レーザ発振効率が上
昇する望ましい方向に働くことも確認された。By carrying out the present invention, the result as shown in FIG. 3 was obtained. It is the figure which showed the relationship of the maximum input electric power with respect to a flow velocity. The maximum input power is the power at which the glow discharge begins to become unstable. When there is no auxiliary discharge, the maximum input power does not increase at 50 m / s or more, but 73 m / s when auxiliary discharge is performed.
It was confirmed that the s flow rate increased by a factor of 2 as compared with the case without auxiliary discharge. It was also confirmed that the main discharge region spreads and becomes uniform when the auxiliary discharge is performed, and works in a desirable direction in which the laser oscillation efficiency is increased.
本発明は、補助放電用電源は主放電々源と共用している
が、これを別電源にして放電を行なっても同様な効果が
得られる。In the present invention, the auxiliary discharge power source is also used as the main discharge source, but the same effect can be obtained by using this as a separate power source for discharging.
第１図は、本発明のビーム方向からみた補助放電型ガス
レーザ装置の要部を示す断面図、 第２図は、本発明のガス流れ方向からみた補助放電型ガ
スレーザ装置の要部を示す断面図。 第３図は、本発明の流速と最大放電々力特性を示す曲線
図、 第４図は、従来の放電型気体レーザ装置を示す一部断面
図である。 １……陰極エレメント、２……平板型陽極、３……補助
電極、5,8……制限抵抗、７……主電源。FIG. 1 is a sectional view showing an essential part of an auxiliary discharge type gas laser device as seen from the beam direction of the present invention, and FIG. 2 is a sectional view showing an essential part of an auxiliary discharge type gas laser device as seen from the gas flow direction of the present invention. . FIG. 3 is a curve diagram showing the flow velocity and maximum discharge force characteristic of the present invention, and FIG. 4 is a partial sectional view showing a conventional discharge type gas laser device. 1 ... Cathode element, 2 ... Plate type anode, 3 ... Auxiliary electrode, 5,8 ... Limiting resistance, 7 ... Main power supply.
Claims (2)
ス循環形CO2レーザにおいて、前記陽極および前記陰極
の上流側に、導体または半導体から構成されかつ陽極と
直角方向からガス流れ方向に平行な方向の間に突起形状
を有した分割型補助電極を有し、前記陽極および前記陰
極の一方または両電極と前記分割型補助電極の間に直流
または交流放電を誘起せしめることにより、主電極側に
空間的に一様でかつ安定な放電を生成させることを特徴
とする補助放電型ガスレーザ装置。1. A gas circulation type CO 2 laser comprising an anode for glow discharge and a cathode, comprising a conductor or semiconductor upstream of the anode and the cathode and parallel to the gas flow direction from a direction perpendicular to the anode. A split type auxiliary electrode having a protrusion shape between the split type auxiliary electrodes, and by inducing a DC or AC discharge between the split type auxiliary electrode and one or both of the anode and the cathode, the main electrode side An auxiliary discharge type gas laser device, characterized in that a spatially uniform and stable discharge is generated.
くとも前記陰極と陽極との距離よりも等しいかまたは短
かい距離に設置したことを特徴とする特許請求の範囲第
１項記載の補助放電型ガスレーザ装置。2. The auxiliary according to claim 1, wherein a distance between the auxiliary electrode and the anode is at least equal to or shorter than a distance between the cathode and the anode. Discharge gas laser device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14050785A JPH0716042B2 (en) | 1985-06-28 | 1985-06-28 | Auxiliary discharge type gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14050785A JPH0716042B2 (en) | 1985-06-28 | 1985-06-28 | Auxiliary discharge type gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622578A JPS622578A (en) | 1987-01-08 |
| JPH0716042B2 true JPH0716042B2 (en) | 1995-02-22 |
Family
ID=15270254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14050785A Expired - Lifetime JPH0716042B2 (en) | 1985-06-28 | 1985-06-28 | Auxiliary discharge type gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0716042B2 (en) |
-
1985
- 1985-06-28 JP JP14050785A patent/JPH0716042B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS622578A (en) | 1987-01-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |