JPH07153029A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPH07153029A
JPH07153029A JP29491293A JP29491293A JPH07153029A JP H07153029 A JPH07153029 A JP H07153029A JP 29491293 A JP29491293 A JP 29491293A JP 29491293 A JP29491293 A JP 29491293A JP H07153029 A JPH07153029 A JP H07153029A
Authority
JP
Japan
Prior art keywords
magnetic
coil
thin film
magnetic head
film magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29491293A
Other languages
Japanese (ja)
Inventor
Yuko Shibayama
優子 柴山
Hiroyuki Nagatomo
浩之 長友
Katsuo Konishi
捷雄 小西
Hitoshi Yanagihara
仁 柳原
Makoto Goto
良 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Proterial Ltd
Original Assignee
Hitachi Ltd
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Metals Ltd filed Critical Hitachi Ltd
Priority to JP29491293A priority Critical patent/JPH07153029A/en
Publication of JPH07153029A publication Critical patent/JPH07153029A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers

Landscapes

  • Magnetic Heads (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE:To obtain a vertical-type thin film magnetic head which has a minimum height with the required number of turns of a coil by a method wherein bonding pads which are the leader patterns of the coil are provided at fixed positions. CONSTITUTION:A signal coil insulating layer 4, a signal coil 5, a magnetic core 7, coil leading bonding pads 9, a main electrode 11, a protective film 8, etc., are provided on a magnetic substrate 1 to compose a unipole-type thin film magnetic head. The bonding pads 9 are so provided as to be adjacent to both the sides of the pattern of the core 7 looking from the head sliding plane side. With this constitution, the thin film magnetic head which has a minimum height with the required number of turns of the coil can be obtained without increasing the number of processes.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は高密度磁気記録用の薄膜
磁気ヘッドに関るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head for high density magnetic recording.

【０００２】[0002]

【従来の技術】高密度磁気記録に用いられている薄膜磁
気ヘッドは一般に、例えば図１０に示す様に、基板１’
の上に磁気コアを形成する下部磁性層２、磁気ギャップ
３、絶縁層４を上下に挾んでコイル層を形成する導体層
５、さらに上部磁性層７、保護膜層８を順次積層した構
造をしており、導体コイル５は引出部９により外部と接
続されている。また、近年例えば、図１１に示すような
日本機会学会〔No.930-45〕や IEEE TRANSACTIONS ON M
AGNETICS,VOL.27,NO.6,NOVEMBER1991に示される様に垂
直記録方式によりヘッドをディスクに摺動させて記録す
る方式が開発されている。2. Description of the Related Art A thin film magnetic head used for high density magnetic recording generally has a substrate 1'as shown in FIG.
A lower magnetic layer 2 that forms a magnetic core, a magnetic gap 3, a conductor layer 5 that forms a coil layer by sandwiching an insulating layer 4 above and below, an upper magnetic layer 7, and a protective film layer 8 are laminated in this order. Therefore, the conductor coil 5 is connected to the outside by the lead-out portion 9. In recent years, for example, the Japan Society for Opportunities [No.930-45] and IEEE TRANSACTIONS ON M as shown in FIG.
As shown in AGNETICS, VOL.27, NO.6, NOVEMBER 1991, a method of recording by sliding a head on a disk by a perpendicular recording method has been developed.

【０００３】[0003]

【発明が解決しようとする課題】上記摺動型ヘッドは、
記録再生効率を向上させるために、媒体とのコンタクト
状況が大きく影響する。コンタクト状況にはヘッドの重
量，大きさ（高さ）が大きく影響する。特に、図１１に
示すような構造のヘッドの場合図１２に示す様な構造の
場合に比べてコイルの占有面積がそのままヘッド高さｈ
となるため、コイルの巻数を増すほど、ヘッド高さが増
してしまい摺動型ヘッドとしては、コンタクト状況に悪
影響を与えるという問題があった。The above sliding type head is
In order to improve the recording / reproducing efficiency, the contact situation with the medium has a great influence. The weight and size (height) of the head have a great influence on the contact status. In particular, in the case of the head having the structure shown in FIG. 11, the area occupied by the coil is the same as the head height h as compared with the case of the structure shown in FIG.
Therefore, as the number of turns of the coil is increased, the head height is increased, and as a sliding type head, there is a problem that the contact situation is adversely affected.

【０００４】本発明の目的は、工程数を増すこと無く、
コイル巻数に対して最小高さの薄膜磁気ヘッドを提供
し、良好な摺動状況を得ることにある。The object of the present invention is to increase the number of steps without increasing the number of steps.
The object is to provide a thin film magnetic head having a minimum height with respect to the number of coil turns and obtain a good sliding condition.

【０００５】[0005]

【課題を解決するための手段】上記目的は、垂直型薄膜
磁気ヘッドのコイル引き出しボンディングパッド部をコ
アと並列して構成配置することにより達成される。The above object is achieved by arranging the coil lead-out bonding pad portion of the vertical thin-film magnetic head in parallel with the core.

【０００６】[0006]

【作用】垂直型薄膜磁気ヘッドのコイル引き出しボンデ
ィングパッド部をコアと並列して構成配置することによ
り工程数を増すこと無く、コイル巻数に対し最小高さの
薄膜磁気ヘッドを提供することができ、良好な摺動特性
を得ることができる。By arranging the coil drawing bonding pad portion of the vertical thin film magnetic head in parallel with the core, it is possible to provide a thin film magnetic head having a minimum height with respect to the number of coil windings without increasing the number of steps. Good sliding characteristics can be obtained.

【０００７】[0007]

【実施例】以下、本発明の実施例を図面を用いて説明す
る。Embodiments of the present invention will be described below with reference to the drawings.

【０００８】図１は本発明による薄膜磁気ヘッドの一例
を示す平面図、図２は図１のＡ’断面図であって、１は
磁性基板、４は信号コイル絶縁層、５は信号コイル、７
は磁気コア、９はコイル引き出しボンディングパッド、
１１は主磁極、８は保護膜である。FIG. 1 is a plan view showing an example of a thin film magnetic head according to the present invention, and FIG. 2 is a sectional view taken along the line A'in FIG. 1, wherein 1 is a magnetic substrate, 4 is a signal coil insulating layer, 5 is a signal coil, 7
Is a magnetic core, 9 is a coil drawing bonding pad,
Reference numeral 11 is a main magnetic pole, and 8 is a protective film.

【０００９】本実施例では磁性基板１にはフェライト基
板を用いている。磁気コア材にはＣｏ−Ｔａ−Ｚｒ系ア
モルファス合金をスパッタリング等により形成してい
る。信号コイルはＣｒを接合層としてＣｕを蒸着等によ
り形成している。保護膜には、フォルステライトをスパ
ッタリングや蒸着等により形成している。In this embodiment, a ferrite substrate is used as the magnetic substrate 1. A Co-Ta-Zr-based amorphous alloy is formed on the magnetic core material by sputtering or the like. The signal coil is formed by depositing Cu with Cr as a bonding layer. Forsterite is formed on the protective film by sputtering, vapor deposition, or the like.

【００１０】以下、本発明による薄膜磁気ヘッドの製造
工程を図３〜図８にそって説明する。The manufacturing process of the thin film magnetic head according to the present invention will be described below with reference to FIGS.

【００１１】図３磁性基板１にダイシングソーやイオン
エッチング等により溝を堀り、ＳｉＯ2，Ａｌ2Ｏ3等の
非磁性絶縁層をスパッタリング等により形成し、ラップ
により平坦化する。A groove is formed on the magnetic substrate 1 by a dicing saw, ion etching or the like, and a non-magnetic insulating layer such as SiO 2 or Al 2 O 3 is formed by sputtering or the like and flattened by lapping.

【００１２】図４Ｃｒ／Ｃｕ／Ｃｒ（Ｃｒ；接合層）か
ら成るコイル導体５を形成した後、非磁性絶縁材をスパ
ッタリング等により形成し、第２コイル絶縁層とする。After forming the coil conductor 5 made of Cr / Cu / Cr (Cr; bonding layer) in FIG. 4, a nonmagnetic insulating material is formed by sputtering or the like to form a second coil insulating layer.

【００１３】図５エッチバック法やラップ等により第２
コイル絶縁層を平坦化する。FIG. 5 Second by the etch back method and the lap
The coil insulation layer is flattened.

【００１４】図６さらに第２コイル，第３コイル絶縁層
を重ねた後、第３コイル絶縁層をエッチバック法やラッ
プ等により平坦化する。FIG. 6 After the second coil and the third coil insulating layer are further stacked, the third coil insulating layer is flattened by an etch back method or a lap.

【００１５】図７コア接続部１２を形成した後、Ｃｏ−
Ｔａ−Ｚｒ系アモルファス磁性膜をスパッタリングで成
膜し、エッチングして磁気コア７を作る。FIG. 7 After forming the core connecting portion 12, Co-
A Ta-Zr type amorphous magnetic film is formed by sputtering and etched to form the magnetic core 7.

【００１６】図８非磁性絶縁層Ａｌ2Ｏ3をスパッタリン
グにより成膜、ラップにより平坦化した後Ｃｏ−Ｔａ−
Ｚｒ系アモルファス磁性膜をスパッタリングにより成膜
し、イオンエッチングにより、パターニングして主磁極
を形成する。FIG. 8 Nonmagnetic insulating layer Al 2 O 3 is formed by sputtering, flattened by wrapping, and then Co-Ta-
A Zr-based amorphous magnetic film is formed by sputtering and patterned by ion etching to form a main magnetic pole.

【００１７】この後、保護膜形成，チップ化，組立て工
程等をへて、ヘッドが完成する。After this, the head is completed by forming a protective film, forming a chip, and assembling steps.

【００１８】以上の構造，製法によれば、工程数を増す
こと無く、コイル巻数に対して最小高さの薄膜磁気ヘッ
ドを提供することができ、良好な摺動状況を得ることが
できる。According to the above structure and manufacturing method, it is possible to provide a thin film magnetic head having a minimum height with respect to the number of coil turns without increasing the number of steps, and it is possible to obtain a good sliding condition.

【００１９】本実施例の説明では、スパイラル構造のコ
イルで説明したが、図９に示すようなジグザグ構造のコ
イルの場合も同様の効果が得られることはいうまでもな
い。また磁性基板に非磁性層を埋め込む方法を用いて説
明したが、磁性基板上に非磁性層を介してコイルを形成
する場合、さらに、主磁極が如何なる場所に位置する場
合も同様の効果が得られることは言うまでもない。In the description of the present embodiment, the spiral structure coil has been described, but it goes without saying that the same effect can be obtained in the case of the zigzag structure coil as shown in FIG. Although the method of embedding the non-magnetic layer in the magnetic substrate has been described, the same effect can be obtained when the coil is formed on the magnetic substrate via the non-magnetic layer and where the main magnetic pole is located. It goes without saying that it will be done.

【００２０】また、摺動面へのボンディングパッドの露
出を防止するためには、摺動面側のボンディングパッド
形状を、スロートハイト０よりもコイル側に位置するよ
うに、パターニングもしくはカッティングする。In order to prevent the bonding pad from being exposed to the sliding surface, the bonding pad shape on the sliding surface side is patterned or cut so as to be located on the coil side with respect to the throat height 0.

【００２１】[0021]

【発明の効果】以上説明したように、本発明によれば、
工程数を増すこと無く、コイル巻数に対し最小高さの薄
膜磁気ヘッドを提供することができる。As described above, according to the present invention,
It is possible to provide a thin film magnetic head having a minimum height with respect to the number of coil turns without increasing the number of steps.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明による薄膜磁気ヘッドの一例を示す平面
図である。FIG. 1 is a plan view showing an example of a thin film magnetic head according to the present invention.

【図２】図１のＡ−Ａ’断面図である。FIG. 2 is a cross-sectional view taken along the line A-A ′ of FIG.

【図３】本発明による薄膜磁気ヘッドの一例を説明する
製造工程図である。FIG. 3 is a manufacturing process diagram illustrating an example of the thin-film magnetic head according to the present invention.

【図４】同じく製造工程図である。FIG. 4 is likewise a manufacturing process drawing.

【図５】同じく製造工程図である。FIG. 5 is also a manufacturing process drawing.

【図６】同じく製造工程図である。FIG. 6 is likewise a manufacturing process drawing.

【図７】同じく製造工程図である。FIG. 7 is likewise a manufacturing process drawing.

【図８】同じく製造工程図である。FIG. 8 is likewise a manufacturing process drawing.

【図９】本発明のその他の例を示す平面図である。FIG. 9 is a plan view showing another example of the present invention.

【図１０】従来の薄膜磁気ヘッドを示す斜視図である。FIG. 10 is a perspective view showing a conventional thin film magnetic head.

【図１１】従来の摺動型垂直記録型薄膜磁気ヘッドを示
す断面図である。FIG. 11 is a cross-sectional view showing a conventional sliding type perpendicular recording thin film magnetic head.

【図１２】同じく薄膜磁気ヘッドを示す断面図である。FIG. 12 is a sectional view showing a thin film magnetic head of the same.

【符号の説明】[Explanation of symbols]

１…磁性基板、１’…非磁性基板、２…下部磁気コア、
３…ギャップ、４…信号コイル絶縁層、５…信号コイ
ル、６…絶縁層、７…上部コア、８…保護膜、９…コイ
ル引き出しボンディングパッド、１０…コア埋込絶縁
層、１１…主磁極、１２…コア接続部、１３…補助磁
極。1 ... Magnetic substrate, 1 '... Non-magnetic substrate, 2 ... Lower magnetic core,
3 ... Gap, 4 ... Signal coil insulating layer, 5 ... Signal coil, 6 ... Insulating layer, 7 ... Upper core, 8 ... Protective film, 9 ... Coil extraction bonding pad, 10 ... Core embedded insulating layer, 11 ... Main magnetic pole , 12 ... core connecting part, 13 ... auxiliary magnetic pole.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小西 捷雄 神奈川県横浜市戸塚区吉田町292番地株式 会社日立製作所映像メディア研究所内 (72)発明者 柳原 仁 神奈川県横浜市戸塚区吉田町292番地株式 会社日立製作所映像メディア研究所内 (72)発明者 後藤 良 東京都千代田区丸ノ内２丁目１番２号日立 金属株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshio Konishi, 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Stock Company, Institute of Image Media Research, Hitachi, Ltd. (72) Inventor Hitoshi Yanagihara 292, Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa (72) Inventor Ryo Goto, Hitachi Metals Co., Ltd. 2 1-2 Marunouchi, Chiyoda-ku, Tokyo

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】磁性基板上、もしくは非磁性基板上に形成
された磁性膜上に絶縁層を介してコイル及びコイル絶縁
層、磁気コアおよび主磁極磁性層、保護膜層を順次積層
してなり、前記主磁極はコア接続部で前記磁性基板もし
くは非磁性基板上に成膜された磁性膜と磁気的に接続す
る単磁極型薄膜垂直磁気ヘッドにおいて前記コイルの引
き出しパターンとなるボンディングパッドを摺動面側か
ら見て前記磁気コアパターンと両隣あわせた位置に配置
したことを特徴とする薄膜磁気ヘッド。1. A coil and a coil insulating layer, a magnetic core and a main magnetic pole magnetic layer, and a protective film layer are sequentially laminated on an magnetic layer formed on a magnetic substrate or a non-magnetic substrate through an insulating layer. , The main magnetic pole slides on a bonding pad serving as a lead pattern of the coil in a single magnetic pole type thin film vertical magnetic head which is magnetically connected to a magnetic film formed on the magnetic substrate or the non-magnetic substrate at a core connecting portion. A thin film magnetic head, characterized in that the thin film magnetic head is arranged at a position adjacent to both sides of the magnetic core pattern when viewed from the surface side.
JP29491293A 1993-11-25 1993-11-25 Thin film magnetic head Pending JPH07153029A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29491293A JPH07153029A (en) 1993-11-25 1993-11-25 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29491293A JPH07153029A (en) 1993-11-25 1993-11-25 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH07153029A true JPH07153029A (en) 1995-06-16

Family

ID=17813865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29491293A Pending JPH07153029A (en) 1993-11-25 1993-11-25 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH07153029A (en)

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